CN114761606B - 其上形成有硬质涂膜的切削工具 - Google Patents
其上形成有硬质涂膜的切削工具 Download PDFInfo
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- 238000005520 cutting process Methods 0.000 title claims abstract description 73
- 239000011248 coating agent Substances 0.000 title claims abstract description 67
- 238000000576 coating method Methods 0.000 title claims abstract description 67
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 30
- 239000001301 oxygen Substances 0.000 claims abstract description 30
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 30
- 239000010410 layer Substances 0.000 claims abstract description 25
- 239000002356 single layer Substances 0.000 claims abstract description 7
- 150000004767 nitrides Chemical class 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 6
- 239000011247 coating layer Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 abstract description 13
- 229910052582 BN Inorganic materials 0.000 abstract description 3
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 abstract description 3
- -1 cemented carbide Substances 0.000 abstract description 3
- 239000000919 ceramic Substances 0.000 abstract description 3
- 239000011195 cermet Substances 0.000 abstract description 3
- 230000003647 oxidation Effects 0.000 description 11
- 238000007254 oxidation reaction Methods 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 8
- 238000011156 evaluation Methods 0.000 description 8
- 238000005240 physical vapour deposition Methods 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000003801 milling Methods 0.000 description 3
- 238000004227 thermal cracking Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910000975 Carbon steel Inorganic materials 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 239000010962 carbon steel Substances 0.000 description 2
- 230000032798 delamination Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 2
- 239000007888 film coating Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 229910017150 AlTi Inorganic materials 0.000 description 1
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
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- 238000003754 machining Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000005482 strain hardening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
- B23B27/148—Composition of the cutting inserts
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
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- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- C23C14/081—Oxides of aluminium, magnesium or beryllium
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
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- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2226/00—Materials of tools or workpieces not comprising a metal
- B23B2226/12—Boron nitride
- B23B2226/125—Boron nitride cubic [CBN]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/10—Coatings
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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Abstract
本发明涉及一种由硬质基材(例如硬质合金、金属陶瓷、陶瓷和立方氮化硼)以及形成在所述硬质基材上的硬质涂膜组成的切削工具。在本发明的切削工具中，由单层或多层结构构成的硬质涂膜形成在基材上，其中所述硬质涂膜包括由氧化物构成的层，其中在所述由氧化物构成的层中，所述切削工具的刃口中心的氧含量高于距所述刃口中心50μm以上的区域中的氧含量。
Description
技术领域
本发明涉及一种在诸如硬质合金、金属陶瓷、陶瓷和立方氮化硼等硬质基材上形成有硬质涂膜的切削工具，更具体地，涉及一种在硬质基材上形成有硬质涂膜的切削工具，该硬质涂膜具有具有立方γ相或六方α相的氧化物层的单层结构或包括氧化物层的多层结构。
背景技术
在硬质材料的高速加工期间，切削工具的刃口(edge)暴露于约1000℃的高温环境中，由于与工件接触而引起的摩擦和氧化而磨耗，并且还受到诸如间歇性(intermittence)等机械冲击。因此，实质上要求切削工具具有适当的耐磨性和韧性。
为了施加切削工具所需的耐磨性和韧性，通常通过化学气相沉积(下文称为“CVD”)或物理气相沉积(下文称为“PVD”)在用于切削工具的硬质合金的表面上形成硬质涂膜。
硬质涂膜包括单层或多层非氧化物类涂膜(例如，TiN、TiC、TiCN)、具有优异抗氧化性的氧化物类涂膜(例如，Al2O3)，或它们的混合层。非氧化物类涂膜可包括例如周期表中第4、5和6族金属元素的碳化物、氮化物和碳氮化物(例如TiN、TiC和TiCN)，并且氧化物类涂膜可包括例如α-Al2O3或γ-Al2O3。
而且，切削工具的根据与工件接触的区域而所需的作用和性能略有不同。例如，前刀面通常要求抗氧化性、耐磨性和耐焊接性，刃口要求抗氧化性、抗热裂性(thermal crackresistance)和抗分层性，并且后刀面要求耐磨性。
为了适当地满足对于切削工具的每个区域不同地要求的性能，尽管应用了包含各种成分的多成分涂膜、包括不同材料层的多层涂膜、或后加工技术，但上述技术可能无法使工具的每个区域的性能区别化。
发明内容
技术问题
本发明提供一种通过不同地调节形成在切削工具的每个区域上的硬质涂膜的氧含量以具有刃口、前刀面和后刀面各自所需的性能而具有延长寿命的切削工具。
技术方案
为了实现上述目的，其上形成有硬质涂膜的切削工具具有这样的结构，其中由单层或多层结构构成的硬质涂膜形成在所述切削工具的基材上，所述硬质涂膜包括由氧化物构成的层，并且所述切削工具的刃口中心的氧含量高于距所述切削工具的刃口中心50μm以上的区域的氧含量。
有利效果
在本发明的切削工具的情况下，由于前刀面或后刀面的氧含量小于刃口的氧含量，因此前刀面或后刀面具有高硬度和改进的耐磨性，并且刃口通过增加的氧含量而具有抗氧化性和抗热裂性。
附图说明
图1是示出本发明的硬质涂膜的结构的示意图。
实施本发明的方式
以下，将参考附图详细描述本发明的实施方式。
然而，本发明可以以不同的形式实施，并且不应被构造为限于这里阐述的实施方式。相反，提供这些实施方式是为了使本公开彻底和完整，并将本发明的范围完全传达给本领域技术人员。
本发明的其上形成有硬质涂膜的切削工具的特征在于，具有单层或多层结构的硬质涂膜形成在所述切削工具的基材上，所述硬质涂膜包括由氧化物构成的层，并且在所述由氧化物构成的层中，所述切削工具的刃口中心的氧含量高于距所述刃口中心50μm以上的区域的氧含量。
图1是示出本发明的硬质涂膜的结构的示意图。如图1所示，由氧化物构成的涂膜形成在基材的表面上，并且在该涂膜中，从刃口中心(基材中的弯曲区域)到前刀面或后刀面约50μm以内的区域(开口间距(hatch spacing)宽的区域)的氧含量相对大于其余区域(开口间距窄的区域)的氧含量。
这里，从刃口中心(基材中的弯曲区域)到前刀面或后刀面约50μm以内的区域(开口间距宽的区域)可具有均匀的氧含量，或者氧含量可在从中心朝向前刀面或后刀面的方向上连续地或间歇地降低。
如上所述，当刃口和前刀面或后刀面各自的氧含量被相对不同地控制时，前刀面或后刀面可具有相对于刃口较少的氧含量以具有高硬度和改进的耐磨性，并且刃口可具有高的氧含量以具有抗氧化性和抗热裂性。
而且，在由氧化物构成的层中，当切削工具的刃口中心和距刃口中心50μm以上的区域之间的氧含量差小于5at％时，刃口和前刀面或后刀面可能没有足够的性能差异，并且当氧含量差大于15at％时，刃口可具有降低的耐磨性。因此，氧含量差可优选保持在5at％至15at％。
而且，涂膜可由含有选自Al、Cr、Ti、Y、V、W、Ta、Nb、Mo、Zr、Hf和Si中的至少一种的氧化物制成。
而且，当涂膜具有小于0.01μm的薄厚度时，可能无法确保切削期间所需的抗氧化性，并且当涂膜具有大于5μm的厚度时，随着残余应力增加，可容易产生分层和崩裂(chipping)，并且由于涂膜的导电性显著降低，当沉积膜时涂膜的密度和结合力降低。因此，涂膜的厚度可在0.01μm至5μm的范围内，优选在0.01μm至3μm的范围内，更优选在0.01μm至1μm的范围内。
而且，在由氧化物构成的涂层的上方和/或下方可额外地形成选自各自含有Al、Cr、Ti、Y、V、W、Ta、Nb、Mo、Zr、Hf和Si中的至少一种的碳化物、氮化物、氧化物、碳氮化物、氧氮化物、氧碳化物、碳氧氮化物、硼化物、硼氮化物、硼碳化物、硼碳氮化物、硼氧氮化物、硼氧碳化物、硼碳氧氮化物和硼氧氮化物中的化合物层的至少一层。
而且，由氧化物构成的涂层可由例如具有立方γ相或六方α相的Al2O3制成。
[实施方式]
硬质涂膜制造
在本发明的实施方式中，通过使用作为物理气相沉积(PVD)的磁控溅射在诸如硬质合金、金属陶瓷、陶瓷和立方氮化硼等由烧结材料构成的硬质基材的表面上形成由氧化物构成的涂膜，并且通过同时应用电弧离子镀的混合PVD工艺形成具有包括由氧化物构成的涂膜的多层的涂膜。
具体而言，用超纯水和湿式微喷清洁基材，然后以干燥状态沿旋转台的圆周安装在涂覆炉中与旋转台上的中心轴在径向上间隔预定距离的位置处。通过将涂覆炉中的初始真空压力减压至等于或小于8.5×10-5Torr的压力，并在400℃至600℃的温度下加热后，在氩(Ar)气气氛下对在旋转台上旋转的同时自行旋转的基材施加-200V至-300V的脉冲偏置电压，进行离子轰击30分钟至60分钟。将用于涂覆的气体压力保持在等于或小于50mTorr，理想地等于或小于40mTorr，并且对于涂覆期间的偏置电压，在氧化物膜涂覆的情况下以-100V至-150V的电压施加，在氮化物膜涂覆的情况下以-20V至-100V的电压施加。上述涂覆条件可根据设备特征和条件而变化。
更具体而言，基材由Co含量为10重量％且平均晶粒尺寸(WC)为0.8μm的硬质合金构成。氧化物涂膜由Al2O3构成，并且通过使用具有99.9at％的Al的靶在偏置电压为-125V(脉冲DC，20kHz至45kHz)、溅射功率为20kW、输入的反应气体为O2和Ar并且压力为0.5Pa的条件下形成。这里，本发明的实施方式通过应用小于50％的偏置电压的脉冲占空比而构成，并且本发明的比较例通过应用等于或大于50％的偏置电压的脉冲占空比而构成。而且，当形成包括由氧化物构成的涂膜的多层结构时，应用AlTiN或AlCrN氮化物膜代替Al2O3，并且通过使用AlTi(60at％/40at％)靶或AlCr(64at％/36at％)靶在偏置电压为-30V至-60V、电弧电流为100A至150A、输入的反应气体为N2并且压力为2.7Pa至4.0Pa的条件下形成膜。
在上述条件下制造本发明的实施方式和比较例，并且包括硬质涂膜的结构、厚度和硬度的基本信息示于下表1中。
[表1]
硬质涂膜的氧含量的分析结果
下表2示出了通过能量色散X射线光谱(EDX)分析实施方式和比较例的样品的切削工具的刃口中心中的氧化物膜的氧含量和距刃口中心50μm的区域中的氧化物膜的氧含量而获得的结果。这里，普通工具具有设置在平行于靶的方向上的前刀面和设置在垂直于靶的方向上的后刀面，并且这可根据工具的形状或将工具安装到旋转台的方法而改变。将样品1-3(R)、1-5(R)、2-3(R)和2-5(R)安装在旋转台上，使得工具的前刀面设置在垂直于靶的方向上，并且工具的后刀面设置在平行于靶的方向上。
[表2]
如上表2所示，在实施方式的硬质涂膜中，切削工具的刃口中心的氧化物膜中的氧含量的值比距刃口中心50μm的区域(前刀面或后刀面)中的氧化物膜中的氧含量的值高5at％至15at％。另一方面，在比较例的硬质涂膜中，切削工具的刃口中心的氧化物膜中的氧含量的值比距刃口中心50μm的区域(前刀面或后刀面)中的氧化物膜中的氧含量的值高2at％至7at％。即，实施方式的硬质涂膜根据切削工具的刃口的位置而具有显著的氧含量差异。
切削性能评价
进行铣削试验以评价如表2中所述制造的硬质涂膜的耐磨性、抗热裂性和耐崩裂性(chipping resistance)，并用以下条件进行评价。
通常，碳钢的主要磨损类型是化学摩擦磨损，并且切削性能受刃口的抗氧化性的影响极大。通常，合金钢的主要磨损类型是热裂和机械摩擦磨损，并且切削性能受刃口的隔热性和前刀面或后刀面的涂膜的硬度的影响极大。通常，不锈钢的主要磨损类型是由工件的沉积和加工硬化引起的崩裂，并且切削性能受刃口的抗氧化性和润滑性的影响极大。
(1)耐磨性评价
工件：碳钢(SM45C)
样品型号：SNMX1206ANN-MM
切削速度：250m/min
切削进给：0.2mm/齿
切削深度：2mm
(2)抗热裂性评价
工件：合金钢(SCM440)
样品型号：SNMX1206ANN-MM
切削速度：200m/min
切削进给：0.2mm/齿
切削深度：2mm
(3)耐崩裂性评价
工件：STS316L
样品型号：ADKT170608PESR-ML
切削速度：120m/min
切削进给：0.15mm/齿
切削深度：5mm
用上述条件进行评价而获得的结果示于下表3中。
[表3]
如上表3所示，与比较例的硬质涂膜相比，实施方式的硬质涂膜的样品1-3、1-3(R)、1-5和1-5(R)在耐磨性、抗热裂性和耐崩裂性方面更优异。
实施方式的硬质涂膜具有这样的结构，其中由于刃口中心的高氧含量，刃口中心相对于前刀面或后刀面具有优异的润滑性和抗氧化性，并且前刀面或后刀面由于其高涂膜硬度而具有优异的机械耐磨性。因此，在上述铣削试验中，确定了实施方式的硬质涂膜具有优于比较例的硬质涂膜的切削性能，因为实施方式的硬质涂膜具有比比较例的硬质涂膜更多的工具的每个区域所需的性能。
这里，氧化物膜具有单层的样品1-1和2-1由于低涂膜硬度、低结合力和低涂膜厚度而显示出显著低的切削性能。而且，氧化物膜层叠在氮化物膜上的样品1-2、1-4、2-2和2-4显示出相对低的切削性能，因为由于缺乏用于保护涂膜硬度低的氧化物膜的最外层，氧化物膜在加工期间被迅速消耗，从而导致抗氧化性和润滑性降低。因此，可知，具有氧化物膜层叠在氮化物膜之间的结构的样品1-3、1-5、2-3和2-5是稳定的。这里，可以确定样品1-3和1-5中的每一个都具有当工具的每个区域的氧含量不同时具有改进的切削性能效果的涂膜结构。
除了上述评价的14种样品之外，还额外地制造了在由氧化物构成的涂膜的上方和/或下方具有含有选自Al、Cr、Ti、Y、V、W、Ta、Nb、Mo、Zr、Hf和Si中的至少一种的氮化物的硬质涂膜样品。对该样品进行铣削试验，并且评价结果示于下表4中。
[表4]
如上表4所示，相对于比较例的硬质涂膜，实施方式的硬质涂膜在耐磨性、抗热裂性、耐崩裂性方面整体优异。
可知，在由氧化物构成的涂膜的上方和/或下方具有含有选自Al、Cr、Ti、Y、V、W、Ta、Nb、Mo、Zr、Hf和Si中的至少一种的氮化物的硬质涂膜根据氮化物的组成和层叠位置对每个评价项目显示出稍微不同的切削性能。如上所述，可通过各种材料的组成和结构组合以及本发明的由氧化物构成的涂膜来实现针对加工环境进行适当设计的硬质涂膜和性能改进。
Claims (5)
1.一种其上形成有硬质涂膜的切削工具，
其中，由单层或多层结构构成的硬质涂膜形成在所述切削工具的基材上，
其中，所述硬质涂膜包括由氧化物构成的层，并且在所述由氧化物构成的层中，所述切削工具的刃口中心的氧含量大于距所述刃口中心50μm以上的区域的氧含量，
其中，在所述由氧化物构成的层中，所述切削工具的刃口中心的氧含量比距所述刃口中心50μm以上的区域的氧含量大5at％至15at％。
2.根据权利要求1所述的切削工具，其中，所述涂膜包含选自Al、Cr、Ti、Y、V、W、Ta、Nb、Mo、Zr、Hf和Si中的至少一种。
3.根据权利要求1或2所述的切削工具，其中，所述涂膜的厚度为0.01μm至5μm。
4.根据权利要求1所述的切削工具，其中，在所述由氧化物构成的涂层的上方和/或下方额外地形成选自各自含有Al、Cr、Ti、Y、V、W、Ta、Nb、Mo、Zr、Hf和Si中的至少一种的碳化物、氮化物、氧化物、碳氮化物、氧氮化物、氧碳化物、碳氧氮化物、硼化物、硼氮化物、硼碳化物、硼碳氮化物、硼氧氮化物、硼氧碳化物、硼碳氧氮化物和硼氧氮化物中的化合物层的至少一层。
5.根据权利要求1所述的切削工具，其中，所述由氧化物构成的涂层由具有立方γ相或六方α相的Al2O3制成。
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