CN114754906B - Biosensing flexible pressure sensor and preparation method thereof - Google Patents
Biosensing flexible pressure sensor and preparation method thereof Download PDFInfo
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- CN114754906B CN114754906B CN202210267149.0A CN202210267149A CN114754906B CN 114754906 B CN114754906 B CN 114754906B CN 202210267149 A CN202210267149 A CN 202210267149A CN 114754906 B CN114754906 B CN 114754906B
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- polydimethylsiloxane
- microsphere
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
Abstract
The invention relates to a biologically inspired ultrasensitive flexible pressure sensor and a preparation method thereof. For this film, the nano-sized polyaniline pin-like arrays are uniformly distributed on the micro-sized polydimethylsiloxane columnar arrays. The structure can generate the interlocking effect twice when being subjected to external force, thereby greatly improving the sensitivity while guaranteeing the use range of the sensor. The preparation method comprises the following steps: (1) Preparing a micron-sized polydimethylsiloxane columnar array; (2) preparing a nano polyaniline thorn-shaped array; (3) Ultra-sensitive pressure sensors based on a hierarchical polyaniline/polydimethylsiloxane array were assembled. The product prepared by the invention has the advantages of ultrahigh sensitivity, ultralow detection limit, quick response time, excellent cycle stability and outstanding environmental adaptability, and the preparation method is simple, the process is mature, no pollution is caused to the environment, and the product has considerable application prospects in the fields of human health monitoring, human-computer interaction and the like.
Description
Technical Field
The invention relates to an ultrasensitive pressure flexible sensor and a preparation method thereof, belonging to the technical field of preparation of flexible electronic materials.
Background
A pressure sensor is a device or apparatus that senses a pressure signal and converts the pressure signal to a usable output electrical signal according to a certain law. The pressure sensor is the most commonly used sensor in industrial practice, is widely applied to various industrial self-control environments, and relates to various industries such as water conservancy and hydropower, railway traffic, intelligent building, production self-control, aerospace, military industry, petrochemical industry, oil well, electric power, ships, machine tools, pipelines and the like.
The traditional pressure sensor usually uses a micro-electromechanical system sensor, has good stability and relatively high test precision, but has extremely limited application in the fields of human physiological signal monitoring, man-machine interaction and the like due to high rigidity. In addition, flexible pressure sensors based on organic polymers have received very great attention in recent years due to their great application prospects in the field of artificial skin.
Flexible pressure sensors can be broadly classified into compression resistance type, capacitance type, piezoelectric type and triboelectric type according to different sensing mechanisms, wherein the compression resistance type is focused by a plurality of scientific researchers due to simple preparation process and principle. The traditional composite compression resistance type flexible pressure sensor has the performance defects of long response time, poor temperature stability and the like due to the problems of filler dispersibility, inherent viscoelasticity of resin and the like, and therefore, the compression resistance type flexible pressure sensor with high sensitivity, short response time and good environmental stability is very necessary. The present invention is therefore primarily directed to the design and fabrication of a flexible pressure sensor having a biomimetic hierarchical structure.
Disclosure of Invention
The invention aims to provide a biologically inspired ultrahigh-sensitivity flexible pressure sensor and a preparation method thereof. The sensor has ultra-high sensitivity, ultra-low detection limit, rapid response time and outstanding circulation stability, and has continuous and stable monitoring capability on large-amplitude muscle movements of a human body and tiny vital signs such as pulse and breath. In addition, the sensor can also present good environmental stability in environments with different humidity and temperature, and greatly widens the application scenes of the sensor in various fields. Meanwhile, the preparation process has the technical advantages of simplicity and environmental protection, and combines the mature film preparation processes such as casting, spin coating and the like at present, thereby having good theoretical research and practical application values.
The pressure sensor is formed by assembling two polydimethylsiloxane micro-column/polyaniline nano-thorn layered composite structure films with the same structure face to face, and the thickness of the pressure sensor is 160-1000 mu m.
The invention provides a preparation method of a biologically inspired ultrasensitive flexible pressure sensor, which comprises the following specific steps:
(1) Curing polydimethylsiloxane on a glass substrate through a curing agent at 60-90 ℃ for 1-6 hours to obtain polydimethylsiloxane resin;
(2) Preparing a microsphere template by taking the microsphere as a sacrificial layer, and heating the microsphere template in a baking oven at 220 ℃ to obtain a densely arranged microsphere template sacrificial layer;
(3) Adding 1-3 g of a mixed solution composed of an organic diluent and the polydimethylsiloxane resin obtained in the step (1) on the microsphere template sacrificial layer obtained in the step (2), adopting a film forming process, pumping air in a vacuum dryer for 30-60 minutes, enabling the polydimethylsiloxane resin to completely enter a microsphere array gap, curing for 1-6 hours on a 60-90 ℃ heat table, and stripping the polydimethylsiloxane resin layer after taking down to obtain a polydimethylsiloxane film with micrometer columns;
(4) Placing the polydimethylsiloxane film with the micrometer columns obtained in the step (3) in a glass container, sequentially adding an aniline monomer and a perchloric acid solution of ammonium persulfate, and controlling the molar ratio of the aniline monomer to the ammonium persulfate to be 1.5:1, the concentration of a perchloric acid solution is 1M, a magneton stirring reaction is carried out, the reaction is carried out for 20 to 26 hours at the temperature of-5 to 5 ℃, a polydimethylsiloxane film with micrometer posts is taken out, and the polydimethylsiloxane film is washed clean by deionized water, so that a composite structure film with polyaniline nanometer spines uniformly distributed on a polydimethylsiloxane micrometer post array is obtained;
(5) And (3) taking two composite structure films prepared in the step (4) and uniformly distributed on the polydimethylsiloxane micro-column array, respectively curing the edges of the composite structure films together with silver paste and copper conductive adhesive tapes, and assembling the composite structure films face to obtain the ultra-sensitive pressure sensor based on the hierarchical polyaniline/polydimethylsiloxane array.
In the invention, the mass ratio of the monomer of the polydimethylsiloxane to the curing agent on the glass substrate in the step (1) is 1: 1-10: 1.
in the invention, the microsphere template in the step (2) is at least one of micron polystyrene microsphere, micron silicon dioxide microsphere or micron polymethyl methacrylate microsphere.
In the invention, the heating time of the microsphere template in the step (2) in the oven is 24-96 hours.
In the invention, the microsphere particle size of the microsphere template in the step (2) is 3-15 mu m.
In the invention, the preparation method of the microsphere array template in the step (3) is a unidirectional friction method.
In the present invention, the organic diluent in the step (3) is at least one of toluene, ethyl acetate, cyclohexane or n-hexane.
In the present invention, the film forming process in step (3) is any one of spin coating, casting, spraying, doctor blading, drip coating or reverse molding.
The pressure sensor prepared in the invention has the advantages that:
(1) The sensor has ultrahigh sensitivity and extremely low detection limit, and the bionic structural design of the sensor ensures that the sensor has excellent performances in all aspects, and can monitor physiological signals of a human body (including large-amplitude muscle transportation and extremely fine vital signs such as respiration and pulse) in real time and stably.
(2) The flexible pressure sensor is mainly formed by assembling a film with a hierarchical polyaniline/polydimethylsiloxane array, and the composite structure film main body polyaniline and polydimethylsiloxane are all made of organic polymers, so that the sensor has very excellent flexibility, can be bent and twisted in any form, and has good fit with human skin.
(3) The nanometer polyaniline thorn-shaped array can be interlocked under the fine pressure, so that the conductive path is greatly increased, the contact resistance is sharply reduced, and the polyaniline thorn-shaped array has ultralow detection limit and ultrahigh sensitivity under ultralow pressure.
(4) Because the micron-sized polydimethylsiloxane columnar array can be subjected to secondary interlocking under larger pressure, the conductive path is further increased, the contact resistance is reduced, the sensor has good response in a larger pressure range, and the use range of the sensor is widened.
(5) The array structure of the hierarchical polyaniline nanoneedle/polydimethylsiloxane micro-column enables the surface of the composite film to have excellent hydrophobicity, so that the pressure sensor has excellent signal stability in a wide humidity range.
(6) The synthesis process is simple, the preparation process is environment-friendly and pollution-free, and the composite film forming process is mature, so that convenience is provided for batch preparation and subsequent further development and research.
Drawings
Fig. 1 is a scanning electron microscope and atomic force microscope photograph of a hierarchical polyaniline/polydimethylsiloxane array film. Wherein: (a) The scanning electron microscope image and the atomic force microscope image.
Fig. 2 is a physical diagram of the pressure sensor.
Fig. 3 is a resistance-pressure curve and a sensitivity-pressure curve of the sensor thin.
FIG. 4 is a response time curve of the sensor.
FIG. 5 is a graph of the fatigue response test of the sensor.
FIG. 6 is a graph showing the resistance change of the sensor for the same pressure in the humidity range of 1.8% -93.1%.
FIG. 7 is a graph showing the resistance change of the sensor for the same pressure in the temperature range of 30-90 ℃.
Fig. 8 is a graph of the resistance change of the sensor for the contraction and relaxation movements of the biceps brachii muscle of the human body.
Fig. 9 is a graph showing the current variation of the sensor with respect to the pulse signal of the wrist of the human body.
Detailed Description
The present invention will be further described with reference to the following examples and drawings, but the present invention is not limited to the following examples. The methods are conventional methods unless otherwise specified. The starting materials are available from published commercial sources unless otherwise specified.
First, a polydimethylsiloxane prepolymer (dakangnin 184) and a curing agent were mixed at a ratio of 2:1 ratio and air bubbles were removed in a vacuum dryer. The mixture was then spin coated onto a glass substrate and cured in an oven at 80 ℃ for 3 hours. A suitable amount of dry powder of 5 μm silica particles was placed on the above polydimethylsiloxane substrate and uniaxially rubbed with another piece of polydimethylsiloxane (prepolymer: curing agent=10:1) cured by the same procedure to give a single layer silica array template. The templates were then heated at 220 ℃ for 72 hours.
And diluting the polydimethylsiloxane to 70-wt% by using toluene, dripping the mixed solution on the heated silicon dioxide substrate, placing the silicon dioxide substrate in a vacuum dryer for air extraction for 1 hour to ensure that the space between the microspheres is completely filled with the polydimethylsiloxane, curing the mixture on a hot table at 80 ℃ for 3 hours, and demolding to obtain the PDMS film with the micro-columnar ordered array.
The polydimethylsiloxane film was placed in a glass vessel, and aniline monomer and ammonium persulfate in perchloric acid solution were mixed at 1.5:1 molar ratio is added into a container, the concentration of the perchloric acid solution is 1M, the reaction is carried out for 22 hours under the low-temperature condition by magnetic stirring, and the temperature is controlled to be between-2 ℃ and 2 ℃. Fig. 1 is a micrograph of a scanning electron microscope and an atomic force microscope thereof.
The film was removed and rinsed with deionized water to obtain a composite structured film with polyaniline nanothorns uniformly distributed on the polydimethylsiloxane micro-pillar array, as shown in fig. 2.
And (3) taking two composite structural films, respectively curing the edges of the films together by using silver paste and a copper conductive adhesive tape, and assembling the films face to obtain the ultra-sensitive pressure sensor based on the hierarchical polyaniline/polydimethylsiloxane array.
Fig. 3 shows the resistance change of the sensor under different pressure conditions, and calculates a specific sensitivity index.
Fig. 4 shows the response speed of the sensor to pressure, and the response time of the sensor to pressure and pressure release is within 30 ms.
Fig. 5 shows the pressure response signal of the sensor during 10000 load-unload cycles.
FIG. 6 shows the resistance signal of the sensor to the same pressure over a wide humidity range of 1.8% -93.1%.
FIG. 7 shows the resistance signal of the sensor for the same pressure over a temperature range of 30-90 ℃.
Fig. 8 shows the resistance change signal of the sensor for the contraction and relaxation movements of the biceps brachii muscle of the human body, demonstrating the continuous monitoring capability of the sensor for the movement of the large muscle of the human body.
Fig. 9 shows the current variation signal of the sensor for human wrist pulse, demonstrating the continuous monitoring capability of the sensor for human minute vital signs.
Claims (8)
1. The preparation method of the biologically inspired ultrasensitive flexible pressure sensor comprises the steps of assembling two polydimethylsiloxane micron columns/polyaniline nanometer thorn layered composite structure films with the same structure face to face, wherein the thickness of the ultrasensitive flexible pressure sensor is 160-1000 microns; the method is characterized by comprising the following specific steps:
(1) Curing polydimethylsiloxane on a glass substrate through a curing agent at 60-90 ℃ for 1-6 hours to obtain polydimethylsiloxane resin;
(2) Preparing a microsphere template by taking the microsphere as a sacrificial layer, and heating the microsphere template in a baking oven at 220 ℃ to obtain a densely arranged microsphere template sacrificial layer;
(3) Adding 1-3 g of a mixed solution composed of an organic diluent and the polydimethylsiloxane resin obtained in the step (1) on the microsphere template sacrificial layer obtained in the step (2), adopting a film forming process, pumping air in a vacuum dryer for 30-60 minutes, enabling the polydimethylsiloxane resin to completely enter a microsphere array gap, curing for 1-6 hours on a 60-90 ℃ heat table, and stripping the polydimethylsiloxane resin layer after taking down to obtain a polydimethylsiloxane film with micrometer columns;
(4) Placing the polydimethylsiloxane film with the micrometer columns obtained in the step (3) in a glass container, sequentially adding an aniline monomer and a perchloric acid solution of ammonium persulfate, and controlling the molar ratio of the aniline monomer to the ammonium persulfate to be 1.5:1, the concentration of a perchloric acid solution is 1M, a magneton stirring reaction is carried out, the reaction is carried out for 20 to 26 hours at the temperature of-5 to 5 ℃, a polydimethylsiloxane film with micrometer posts is taken out, and the polydimethylsiloxane film is washed clean by deionized water, so that a composite structure film with polyaniline nanometer spines uniformly distributed on a polydimethylsiloxane micrometer post array is obtained;
(5) And (3) taking two composite structure films prepared in the step (4) and uniformly distributed on the polydimethylsiloxane micro-column array, respectively curing the edges of the composite structure films together with silver paste and copper conductive adhesive tapes, and assembling the composite structure films face to obtain the ultra-sensitive pressure sensor based on the hierarchical polyaniline/polydimethylsiloxane array.
2. The method for preparing a biologically inspired ultrasensitive flexible pressure sensor according to claim 1, wherein the mass ratio of monomers and curing agent of polydimethylsiloxane on the glass substrate in step (1) is 1: 1-10: 1.
3. the method of claim 1, wherein the microsphere template in step (2) is at least one of a microstyrene microsphere, a microsilica microsphere, or a microsilica microsphere.
4. The method for preparing a biologically inspired ultrasensitive flexible pressure sensor according to claim 1, wherein the heating time of the microsphere template in the oven in the step (2) is 24-96 hours.
5. The method for preparing a biologically inspired ultrasensitive flexible pressure sensor according to claim 1, wherein the microsphere particle size of the microsphere template in the step (2) is 3 μm to 15 μm.
6. The method of claim 1, wherein the microsphere array template in step (3) is prepared by a unidirectional friction method.
7. The method of preparing a biologically inspired ultrasensitive flexible pressure sensor of claim 1, wherein the organic diluent in step (3) is at least one of toluene, ethyl acetate, cyclohexane, or n-hexane.
8. The method of manufacturing a bio-inspired ultrasensitive flexible pressure sensor of claim 1, wherein the film forming process in step (3) is any one of spin coating, casting, spraying, knife coating, drip coating, or reverse casting.
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Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103292685A (en) * | 2013-06-09 | 2013-09-11 | 青岛大学 | Bent flexible transparent strain sensor production method |
| CN105758562A (en) * | 2016-03-29 | 2016-07-13 | 电子科技大学 | Flexible pressure sensor and preparation method thereof |
| WO2016153155A1 (en) * | 2015-03-23 | 2016-09-29 | 울산과학기술원 | Biomimetic based pressure sensor manufacturing method and pressure sensor manufactured thereby |
| KR20180013338A (en) * | 2016-07-29 | 2018-02-07 | 한국기계연구원 | Reliable tactile sensor of interlocking structure with hybrid stiffness |
| CN107898463A (en) * | 2017-11-13 | 2018-04-13 | 深圳大学 | A kind of flexible electronic pressure sensor and preparation method thereof |
| CN109100075A (en) * | 2018-07-28 | 2018-12-28 | 张玉英 | A kind of pliable pressure sensor and preparation method for electronic skin |
| CN208350249U (en) * | 2018-05-10 | 2019-01-08 | 西安建筑科技大学 | A kind of high sensitivity pliable pressure sensor |
| CN109921679A (en) * | 2019-03-08 | 2019-06-21 | 吉林大学 | A kind of Bionic flexible actuator and preparation method thereof having Real-time Feedback function |
| CN110329986A (en) * | 2019-06-24 | 2019-10-15 | 华中科技大学 | A kind of Bionic flexible force snesor and preparation method thereof |
| CN110346079A (en) * | 2019-07-30 | 2019-10-18 | 天津大学 | Capacitive pliable pressure sensor based on prestretching and its preparation method and application |
| KR20190121652A (en) * | 2018-04-18 | 2019-10-28 | 울산과학기술원 | Flexible multilayer pressure sensor for broad range pressure sensing |
| CN110511569A (en) * | 2019-07-25 | 2019-11-29 | 复旦大学 | One kind is based on barbed hollow carbosphere ultra-sensitivity pressure sensing film and preparation method thereof |
| CN210154720U (en) * | 2019-06-20 | 2020-03-17 | 上海交通大学 | High-sensitivity electronic skin |
| AU2020101386A4 (en) * | 2020-07-16 | 2020-08-20 | Shaanxi University Of Science & Technology | A Biomimetic multifunctional flexible sensor based on skin collagen aggregate and its manufacturing method |
| CN113548640A (en) * | 2021-07-20 | 2021-10-26 | 天津智柔科技有限公司 | Regular micro-nano cone array structure conductive film, and preparation method and application thereof |
| CN113670484A (en) * | 2021-08-18 | 2021-11-19 | 吉林大学重庆研究院 | Flexible pressure sensor with complementary spiral structure, preparation method and application thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10782164B2 (en) * | 2015-11-20 | 2020-09-22 | University Of Virginia Patent Foundation | Flexible, self-rolled superficial flow sensor |
-
2022
- 2022-03-18 CN CN202210267149.0A patent/CN114754906B/en active Active
Patent Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103292685A (en) * | 2013-06-09 | 2013-09-11 | 青岛大学 | Bent flexible transparent strain sensor production method |
| WO2016153155A1 (en) * | 2015-03-23 | 2016-09-29 | 울산과학기술원 | Biomimetic based pressure sensor manufacturing method and pressure sensor manufactured thereby |
| CN105758562A (en) * | 2016-03-29 | 2016-07-13 | 电子科技大学 | Flexible pressure sensor and preparation method thereof |
| KR20180013338A (en) * | 2016-07-29 | 2018-02-07 | 한국기계연구원 | Reliable tactile sensor of interlocking structure with hybrid stiffness |
| CN107898463A (en) * | 2017-11-13 | 2018-04-13 | 深圳大学 | A kind of flexible electronic pressure sensor and preparation method thereof |
| KR20190121652A (en) * | 2018-04-18 | 2019-10-28 | 울산과학기술원 | Flexible multilayer pressure sensor for broad range pressure sensing |
| CN208350249U (en) * | 2018-05-10 | 2019-01-08 | 西安建筑科技大学 | A kind of high sensitivity pliable pressure sensor |
| CN109100075A (en) * | 2018-07-28 | 2018-12-28 | 张玉英 | A kind of pliable pressure sensor and preparation method for electronic skin |
| CN109921679A (en) * | 2019-03-08 | 2019-06-21 | 吉林大学 | A kind of Bionic flexible actuator and preparation method thereof having Real-time Feedback function |
| CN210154720U (en) * | 2019-06-20 | 2020-03-17 | 上海交通大学 | High-sensitivity electronic skin |
| CN110329986A (en) * | 2019-06-24 | 2019-10-15 | 华中科技大学 | A kind of Bionic flexible force snesor and preparation method thereof |
| CN110511569A (en) * | 2019-07-25 | 2019-11-29 | 复旦大学 | One kind is based on barbed hollow carbosphere ultra-sensitivity pressure sensing film and preparation method thereof |
| CN110346079A (en) * | 2019-07-30 | 2019-10-18 | 天津大学 | Capacitive pliable pressure sensor based on prestretching and its preparation method and application |
| AU2020101386A4 (en) * | 2020-07-16 | 2020-08-20 | Shaanxi University Of Science & Technology | A Biomimetic multifunctional flexible sensor based on skin collagen aggregate and its manufacturing method |
| CN113548640A (en) * | 2021-07-20 | 2021-10-26 | 天津智柔科技有限公司 | Regular micro-nano cone array structure conductive film, and preparation method and application thereof |
| CN113670484A (en) * | 2021-08-18 | 2021-11-19 | 吉林大学重庆研究院 | Flexible pressure sensor with complementary spiral structure, preparation method and application thereof |
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