CN114749222A - Integrated piezoelectric multi-column uniform liquid drop generator - Google Patents
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- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/02—Burettes; Pipettes
- B01L3/0241—Drop counters; Drop formers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/02—Burettes; Pipettes
- B01L3/0241—Drop counters; Drop formers
- B01L3/0268—Drop counters; Drop formers using pulse dispensing or spraying, eg. inkjet type, piezo actuated ejection of droplets from capillaries
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0433—Moving fluids with specific forces or mechanical means specific forces vibrational forces
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- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0475—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure
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Abstract
The invention discloses an integrated piezoelectric multi-column uniform liquid drop generator, relates to the technical field of liquid microfluidics, and aims to solve the problems that the uniformity of liquid drops dispersed by the existing liquid drop generator is poor, the precision is low, and further the microfluidic precision is seriously influenced; meanwhile, the existing generator has the problems of high price, high use cost and the like; the invention comprises a connecting disc, a fluid cavity, piezoelectric ceramics, a piezoelectric ceramic groove, an annular sealing ring, a jet flow sheet, a screw cap, an injection pump connecting port and a BNC interface; the whole stainless steel material that is and ensure piezoceramics safe operation through the design insulating layer, can not take place the user and electrocute the condition, the security is better. The method has wide application scenes in the field of microfluidics, and a user can determine the appropriate crushing frequency according to a table so as to achieve the optimal effect. The multi-column uniform liquid drop generator can greatly improve the application efficiency and broaden the application scene of a single column, and has important function in the field of rapid bio-pharmaceuticals.
Description
Technical Field
The invention relates to the technical field of liquid microfluidics, in particular to an integrated piezoelectric multi-column uniform droplet generator.
Background
Microfluidics refers to the precise control and control of microscale fluids, and because the application scene is a micro-nanoscale structure, and the fluids display and generate special properties different from macroscale in the structure, the unique physicochemical properties of the fluids need to be analyzed. The method aims at the preparation of uniform micro-droplets, and the column-type monodisperse droplet string with high precision and strong regularity has great application prospects in the fields of chemical industry, food, ink-jet printing and medical treatment, and how to accurately control the flow of high-speed droplets and the regular droplet string in the application scene is a difficult problem to be solved. With the gradual deepening of the application, how to efficiently and quickly complete the preparation of micro-droplets with different requirements also becomes the current direction of interest.
At present, the common domestic piezoelectric droplet generator forms experimental conditions by mechanical means for separately placing a fluid cavity, a spray head, a piezoelectric module and a BNC connector so as to generate continuous monodisperse droplets.
In addition to the piezoelectric droplet generator described above, there are also pneumatic droplet generators and droplet preparation by microchannels, both of which can produce continuous droplets by means of a fixture, but they also have certain disadvantages. The pneumatic droplet generator can produce dispersed droplets but its uniformity is poor; the droplets produced by the microchannel are also deformed to some extent in the channel, and this method is mostly used for mixing two substances, mostly in a closed environment.
Meanwhile, the droplet generator also has the problems of poor use effect, low precision and the like, which are also a difficulty of the droplet generator, the low precision is mainly reflected in the deviation between the number of the discharged droplets and the set frequency, the high deviation can interfere with the flow of the droplet string, each droplet can be uneven, and then the microfluidic precision is seriously influenced. And many drop generators have not been proven to be practical. Although foreign countries have formed liquid drop generators, the price is expensive, and the single continuous liquid drop and the multi-group liquid drop jet mode are switched by switching the whole spray head, so that the switching is more complicated and the cost is higher.
The invention improves the original single-row liquid drop into the multi-row liquid drop with a replaceable spray head. The generation of the multi-row uniform liquid drop generator can greatly improve the application efficiency and broaden the application scene of a single row, and has important effect in the field of rapid biological pharmacy.
Disclosure of Invention
The invention aims to solve the problems of poor uniformity and low precision of dispersed liquid drops of the existing liquid drop generator, and further causes serious influence on the microfluidic precision; meanwhile, the problems of high price, high use cost and the like exist; an integrated piezoelectric multi-column uniform droplet generator is provided.
An integrated piezoelectric multi-column uniform liquid drop generator comprises a connecting disc, a fluid cavity, piezoelectric ceramics, a piezoelectric ceramic groove, an annular sealing ring, a jet flow sheet, a screw cap, an injection pump connecting port and a BNC interface;
a connecting disc is fixed at one end of the fluid cavity and is communicated with a connecting port of an injection pump through the connecting disc, and the connecting port of the injection pump introduces fluid into the fluid cavity through a conveying hose;
the other end of the fluid cavity is provided with an annular sealing ring, a jet flow sheet and a screw cap, and the jet flow sheet is fixed in a groove of the screw cap through the stress of the annular sealing ring and the screw cap;
a groove is arranged outside the cavity of the fluid cavity and serves as a piezoelectric ceramic groove, and an insulating layer and piezoelectric ceramic are arranged in the piezoelectric ceramic groove and fixed through a binding tape;
the BNC interface is arranged on the connecting disc and is used as an electric signal input end of the piezoelectric ceramic, and the square wave or sine control signal amplified by the power amplifier is transmitted to the piezoelectric ceramic to generate micron-level vibration;
a plurality of rows of jet holes are arranged on the jet sheet, and the distances between adjacent jet holes are the same; the thickness of the jet flow sheet is 0.5mm-1 mm.
The invention has the beneficial effects that: the integrated piezoelectric multi-column uniform droplet generator has the following advantages:
1. In the liquid drop generator, each row of jet liquid drops operate stably, the crushing effect is good, and the liquid drop generator has wider application range and better effect compared with a pneumatic type liquid drop generator and the like.
2. Compared with TSI and other manufacturers, the liquid drop generator has the advantages of low price and wide application range.
3. The liquid drop generator integrates the piezoelectric ceramics, the BNC connector, the fluid cavity, the jet hole and the fluid cavity into a whole, is made of stainless steel materials, ensures the safe operation of the piezoelectric ceramics by designing the insulating layer, does not generate the electric shock condition of a user, and has better safety.
4. Through repeated verification of experiments, simulation calculation and the like, the optimal physical parameters of the piezoelectric ceramics, strength, output, resonant frequency, driving voltage and other parameters are obtained and verified, and a voltage and amplitude relation diagram is given. And finally, the device can be matched with a designed liquid drop generator to achieve an optimal crushing effect, the crushing effect is verified through high-speed camera shooting, under the condition of ensuring the crushing condition, the device can achieve the effect that the quantity of the crushed liquid drops is approximately equal to the set frequency and the error does not exceed 0.5 percent of the set frequency through precision testing. Has wide application scenes in the field of microfluidics.
5. The optimal depth and the wall thickness of the piezoelectric ceramic groove are calculated through repeated simulation in the design process of the whole fluid cavity, and the effective amplitude of the piezoelectric ceramic is ensured. The invention has been experimentally verified to yield the optimum thickness range.
6. The present invention also provides the frequency range (100 um and as an example) used at different flow rates, and the user can determine the appropriate crushing frequency according to the table to achieve the best effect. And the diameter of the liquid drop outlet can be determined according to the flow rate and the outlet aperture through an empirical formula, and the size of the aperture can be customized according to needs.
Drawings
FIG. 1 is a schematic diagram of an integrated piezoelectric multi-column uniform droplet generator according to the present invention;
FIG. 2 is an exploded view of an integrated piezoelectric multi-column uniform droplet generator according to the present invention;
FIG. 3 is a front view, a side view and a top view of the piezoelectric ceramic plate;
FIG. 4 is a graph of the driving voltage versus displacement for a piezoceramic wafer;
FIG. 5 is a schematic diagram of an integrated piezoelectric uniform droplet generator according to the present invention;
FIG. 6 is an effect diagram of continuous droplet generation by the integrated piezoelectric uniform droplet generator using a high-speed camera for real shooting;
FIG. 7 is a schematic view of a jet hole with a radius of 100um, 5X 5 jet sheet;
FIG. 8 is a schematic view of a jet hole radius of 71um, 7 x 7 jet sheet;
fig. 9 is a schematic of a jet hole radius of 50um, 10 x 10 jet sheet.
In the figure: 1. the device comprises a power amplifier, 2, a signal generator, 3, an injection pump, 4, a liquid drop generator, 4-1, a connecting disc, 4-2, a fluid cavity, 4-3, piezoelectric ceramics, 4-4, a piezoelectric ceramic groove, 4-5, an annular sealing ring, 4-6, a jet sheet, 4-7, a screw cap, 4-8, an injection pump connecting port, 4-9 and a BNC interface.
Detailed Description
The embodiment is described by combining fig. 1 to 9, and the integrated piezoelectric multi-column uniform droplet generator comprises a connecting disc 4-1, a fluid cavity 4-2, piezoelectric ceramics 4-3, a piezoelectric ceramic groove 4-4, an annular sealing ring 4-5, a jet flow sheet 4-6, a screw cap 4-7, an injection pump connecting port 4-8 and a BNC interface 4-9;
the left end of a connecting port of the injection pump 3 is connected with the external thread of the fluid cavity 4-2 by adopting a threaded port, and the right end is connected with a water delivery pipe by adopting a smooth cylindrical port. The connection port is a fluid inlet for introducing fluid into the interior of the fluid chamber through a delivery hose. The left side of the BNC interface is fixed with the clamping groove of the connecting disc 4-1 by strong fixing glue, so that the BNC interface is convenient to replace. The connector is a piezoelectric ceramic electrical signal input end, and transmits the square wave or sine control signal amplified by the power amplifier 1 to the stacked piezoelectric ceramics 4-3, so that micron-scale vibration is generated.
The connecting disc is connected with the fluid cavity 4-2 through internal threads, and the whole connecting disc 4-1 is clamped on a boss on the outer side of the fluid cavity 4-2. The connecting disc 4-1 mainly serves to connect the fluid chamber 4-2 with the other two interfaces, serving to connect the entire generator.
An insulating coating is arranged between the piezoelectric ceramic 4-3 and the fluid cavity groove, and the piezoelectric ceramic piece is fixed at the center of the fluid cavity groove and is fixed by a binding tape after the insulating coating is manufactured.
One of the core components of the piezoelectric ceramic in this embodiment is determined and processed by continuous testing and calculation in the design process, as shown in table 1, the following parameters of the piezoelectric ceramic are determined and processed.
TABLE 1
The polarization direction is set as that of the silver used as an electrode outside in the height direction of figure 3, and the welding wire mode adopts the welding with two surfaces vertical to the height, thereby facilitating the lead wire. The displacement of the stacked ceramic is about 3.3um when the resonant frequency is reached, and the displacement relationship before the resonant frequency is reached is mainly about 10000hz and about 2um in the frequency range used by the invention. When the piezoelectric ceramic is used, pretightening force must be added to prevent the internal ceramic plates from being damaged due to tensile stress. The method of adding the pretension may be by a band, a steel hoop, or the like. FIG. 4 shows the amplitude of the piezoelectric ceramic as a function of voltage. The lower test curve is a graph of voltage and displacement of the piezoelectric ceramic from 0, and the upper curve is a curve of voltage from 150v to 0v, because of capacitive impedance, the residual voltage displacement is not 0.
The left end of the fluid cavity 4-2 is connected with the screw cap 4-7 through external threads, and the right end of the fluid cavity is connected with the connecting disc 4-1 through external threads. The inside fluid is full of the fluid chamber, and the fluid chamber middle section is outside to be used for placing to pile up piezoceramics and cover insulating layer prevents that the user from electrocuting for the recess, reaches piezoceramics vibration efficiency maximize through design middle part thickness.
The piezoelectric ceramic grooves 4-4 are machined on the outer side of the fluid cavity in a turning mode, the design of the piezoelectric ceramic grooves is also a key point of the embodiment, multiple simulation results show that the wall thickness of the piezoelectric ceramic grooves needs to be 0.5-1.5mm as the best wall thickness, the displacement of the piezoelectric ceramic pieces can be greatly reduced due to the thicker piezoelectric ceramic pieces, and the fluid cavity can deform under high pressure due to the thinner piezoelectric ceramic pieces.
The annular sealing ring 4-5 is provided with a clamping groove in the rotary cap 4-7 by turning, the annular sealing ring 4-5 is fixed, and the right end of the annular sealing ring 4-5 is fixed in the rotary cap groove by being extruded by a fluid cavity. The best sealing effect can be achieved by adopting a rectangular sealing ring with a cross section for sealing, and the annular sealing ring compresses the jet sheet 4-6 in the groove inside the screw cap 4-7 through the pressure stress of the fluid cavity 4-2 and the annular sealing ring.
The jet flow sheet 4-6 can be obtained through fine processing, and the jet flow sheet 4-6 is fixed in a groove of the screw cap 4-7 through the pressure stress of the annular sealing ring 4-5 and the screw cap 4-7. The jet holes on the jet sheets 4-6 can be obtained by a laser technology, 10000 meshes of abrasive paper are needed to be used for polishing after processing, and burrs are eliminated. Through continuous experiments, the jet flow sheet 4-6 is found to be thick to cause the jet flow outlet to be seriously inclined, and the jet flow sheet is thin to cause the jet flow sheet to be bent under the condition of high flow speed and insufficient strength. The thickness of the obtained emergent flow sheet is preferably between 0.5mm and 1 mm. The jet hole is also the only outlet of the fluid by customizing the size of the hole on the sheet according to different hole diameters and flow rates.
The screw cap 4-7 is connected with the external thread of the fluid cavity 4-2 through the internal thread. The inner groove of the screw cap 4-7 plays a role in fixing the jet sheet 4-6, and the screw cap 4-7 also plays a role in packaging and sealing the whole fluid cavity 4-2.
The present embodiment is described with reference to fig. 5 and 6, and the operation principle of the integrated piezoelectric uniform droplet generator of the present embodiment is as follows:
the signal generator 5v square wave or sinusoidal signal is amplified by the power amplifier 1 (the power amplifier is defined as a multiple of 50), and the electrical signal is applied to the piezoelectric ceramic 4-3 through the BNC interface 4-9 connection as shown in FIG. 5. The piezoelectric ceramic 4-3 presents capacitive impedance, and can convert electric energy into regular mechanical vibration. And then regularly disturbing the continuous fluid, so that the continuous fluid is broken into uniform round water drops. The specific process is as follows:
1. parameters of the injection pump 3 are adjusted, and the required liquid flow and flow rate are set. The injection pump 3 pushes the injection pipe to pressurize the liquid to push the liquid through the rotation of the lead screw, the flow and the flow rate can be adjusted through adjusting the parameters of the injection pump 3, the stable flow rate is approximately above 3m/s, and the experiment range is approximately 3m/s-30 m/s. This flow rate range is larger than the previous domestic flow rate range, since the design stability of the structure is also better than before.
2. The signal generator 2 for driving the piezoelectric ceramics can set sine waves and square waves, and the peak voltage is 5 v. The square wave effect may be better, determining the output impedance to be 5 ohms (consistent with the power amplifier impedance). The initial phase may be selected from the 0 bit for less phase sensitivity. The frequency is chosen according to an empirical formula:
in the formula, u is the fluid velocity, d is the nozzle diameter, and the multiple rows are the same as the single row, taking the aperture of 100um as an example, the corresponding frequency range, flow velocity and diameter after the liquid drop flows out are given. The minimum wavelength formula is satisfied by calculating the minimum wavelength under this operating condition: the lambda is more than or equal to pi d, so that the stability of the liquid drop generator can be ensured. Table 2, droplet parameter table under 100um aperture;
TABLE 2
| Nozzle straight code | Flow (ml/h) | Droplet velocity (m/s) | Excitation frequency (min hz) | Excitation frequency (max hz) | Median frequency | Droplet diameter (um) | Minimum wavelength (um) |
| 100 | 100 | 3.539 | 3380.80 | 10142.40 | 6761.60 | 198.7501 | 348.931 |
| 100 | 105 | 3.715 | 3549.84 | 10649.52 | 7099.68 | 198.7332 | 348.842 |
| 100 | 110 | 3.892 | 3718.88 | 11156.64 | 7437.76 | 198.7348 | 348.851 |
| 100 | 115 | 4.069 | 3887.92 | 11663.76 | 7775.84 | 198.7363 | 348.858 |
| 100 | 120 | 4.246 | 4056.96 | 12170.88 | 8113.92 | 198.7377 | 348.865 |
| 100 | 125 | 4.423 | 4226.00 | 12678.00 | 8452.00 | 198.7389 | 348.872 |
| 100 | 130 | 4.600 | 4395.04 | 13185.12 | 8790.08 | 198.7401 | 348.878 |
| 100 | 135 | 4.777 | 4564.08 | 13692.24 | 9128.16 | 198.7411 | 348.884 |
| 100 | 140 | 4.954 | 4733.12 | 14199.36 | 9466.24 | 198.7421 | 348.889 |
| 100 | 145 | 5.131 | 4902.16 | 14706.48 | 9804.32 | 198.7430 | 348.894 |
| 100 | 150 | 5.308 | 5071.20 | 15213.60 | 10142.40 | 198.7439 | 348.898 |
| 100 | 155 | 5.485 | 5240.24 | 15720.72 | 10480.48 | 198.7447 | 348.903 |
| 100 | 160 | 5.662 | 5409.28 | 16227.84 | 10818.56 | 198.7455 | 348.907 |
| 100 | 165 | 5.839 | 5578.32 | 16734.96 | 11156.64 | 198.7462 | 348.910 |
| 100 | 170 | 6.016 | 5747.36 | 17242.08 | 11494.72 | 198.7468 | 348.914 |
| 100 | 175 | 6.192 | 5916.40 | 17749.20 | 11832.80 | 198.7368 | 348.861 |
| 100 | 180 | 6.369 | 6085.44 | 18256.32 | 12170.88 | 198.7377 | 348.865 |
| 100 | 185 | 6.546 | 6254.48 | 18763.44 | 12508.96 | 198.7385 | 348.870 |
| 100 | 190 | 6.723 | 6423.52 | 19270.56 | 12847.04 | 198.7393 | 348.874 |
| 100 | 195 | 6.900 | 6592.56 | 19777.68 | 13185.12 | 198.7401 | 348.878 |
| 100 | 200 | 7.077 | 6761.60 | 20284.80 | 13523.20 | 198.7408 | 348.882 |
| 100 | 205 | 7.254 | 6930.64 | 20791.92 | 13861.28 | 198.7415 | 348.886 |
| 100 | 210 | 7.431 | 7099.68 | 21299.04 | 14199.36 | 198.7421 | 348.889 |
| 100 | 215 | 7.608 | 7268.72 | 21806.16 | 14537.44 | 198.7427 | 348.892 |
| 100 | 220 | 7.785 | 7437.76 | 22313.28 | 14875.52 | 198.7433 | 348.895 |
3. After the signal generator 2 is adjusted, the power amplifier 1 is continuously adjusted, the impedance of the power amplifier is 5 ohms after the power amplifier 1 is started, and the voltage amplification factor starts from 2 times lower, so that the power amplifier is prevented from being damaged if the power amplifier is short-circuited due to wiring faults.
4. The piezoelectric ceramic groove 4-4 is placed in the side wall insulation pit and is firmly fixed by a plastic insulation binding tape to increase the pretightening force (if the pretightening force tensile stress is not applied to the ceramic plates, the stacked ceramic is broken), the piezoelectric ceramic is connected with the BNC patch cord, and then the piezoelectric ceramic is connected with the power amplifier 1. The insulation of the whole wiring line is ensured.
5. Pressing a starting button of the injection pump 3, and clicking an output key of the signal generator; pressing a power amplifier output key; after the piezoelectric ceramic is heard with a buzzer, the multiple is gradually adjusted from 2 to 50, and finally the quality of the liquid drops of the liquid drop generator is checked through observation equipment such as a high-speed camera and the like; then, the signal generator 2 is used for further confirming the frequency, firstly, the adjustment is carried out by taking 1khz as a unit, after the optimal frequency is found, the adjustment is carried out by taking 100hz as a unit, and finally, the fine adjustment is carried out by taking 10hz and 1hz as units to find the optimal crushing phenomenon, so that the best effect is finally achieved.
As shown in FIG. 6, the continuous drop image observed by the high speed camera, with a velocity of about 6m/s, set frequency 4400hz, produced drops of about 4400 + -20 drops per second. The error is about 0.05%, and the precision reaches the top of international technology.
In fig. 7 to 9, 5 × 5 is provided on each 10mm × 10mm area in the case of equal flow rate; 7 by 7; 10 x 10 pores with radius of 100um, 71um, 50um, respectively. Because under the condition of equal flow, the radius of the liquid drop in each row is reduced along with the increase of the number of the holes, and the flow speed is not reduced. The design mode of equal area can use different density hole numbers aiming at the fixed object to obtain multi-column drop strings with different sizes and different numbers but certain total flow. The error in the number of droplets produced by a single train is substantially between 0.5% and 0.8% of the set frequency.
Since the generation of multiple rows of droplets can cause the droplets in each row to interfere, repeated tests show that the optimal hole spacing of the device is 5 times or more of the diameter of the droplets. If less than five times the pitch, the two rows of droplets may stick and interfere with each other.
The integrated piezoelectric multi-column uniform droplet generator ensures that all the components of the generator are skillfully connected in series through mechanical design on the basis of good droplet crushing effect, forms a product which can be directly applied, and verifies the accuracy through a high-speed camera. The successfully processed liquid drop generator passes a large number of experiments and is repeatedly verified by equipment such as a high-speed camera, and the data reliability is high.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (5)
1. Integrated piezoelectric type multiseriate even liquid droplet generator, characterized by: the liquid drop generator comprises a connecting disc (4-1), a fluid cavity (4-2), piezoelectric ceramics (4-3), an annular sealing ring (4-5), a jet sheet (4-6), a screw cap (4-7), an injection pump connecting port (4-8) and a BNC interface (4-9);
one end of the fluid cavity (4-2) is fixedly connected with a connecting disc (4-1), the connecting disc (4-1) is communicated with a connecting port (4-8) of the injection pump, and the connecting port (4-8) of the injection pump introduces fluid into the fluid cavity (4-2) through a conveying hose;
an annular sealing ring (4-5), a jet sheet (4-6) and a screw cap (4-7) are arranged at the other end of the fluid cavity (4-2), and the jet sheet (4-6) is fixed in a groove of the screw cap (4-7) through the stress of the annular sealing ring (4-5) and the screw cap (4-7);
a groove is arranged outside the cavity of the fluid cavity (4-2) to serve as a piezoelectric ceramic groove (4-4), and an insulating layer and piezoelectric ceramic are arranged in the piezoelectric ceramic groove (4-4) and fixed by a binding tape;
the BNC interface (4-9) is arranged on the connecting disc (4-1) and serves as an electrical signal input end of the piezoelectric ceramic, and a square wave or sine control signal amplified by the power amplifier is transmitted to the piezoelectric ceramic (4-3) to generate micron-scale vibration;
a plurality of rows of jet holes are arranged on the jet sheet (4-6), and the distance between every two adjacent jet holes is the same; the thickness of the jet sheet (4-6) is 0.5mm-1 mm.
2. The integrated piezoelectric multi-column uniform droplet generator of claim 1, wherein: the length, width and height of the piezoelectric ceramics (4-3) are respectively set to be 7mm, 7mm and 5mm, the driving voltage is 150V, the displacement range is 3um, and the resonant frequency is 200-300 khz.
3. The integrated piezoelectric multi-column uniform droplet generator of claim 1, wherein: the wall thickness of the piezoelectric ceramic groove (4-4) is 0.5-1.5 mm.
4. The integrated piezoelectric multi-column uniform droplet generator of claim 1, wherein: the jet flow sheets (4-6) set the sizes of the jet flow holes according to different aperture diameters and flow rates, and the jet flow holes are used as fluid outlets.
5. The integrated piezoelectric multi-column uniform droplet generator of claim 1, wherein: the optimal jet hole spacing is 5 times the droplet diameter.
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