CN114740223A - Monolithic integrated triaxial optical accelerometer based on push-pull type photonic crystal zipper cavity - Google Patents
Monolithic integrated triaxial optical accelerometer based on push-pull type photonic crystal zipper cavity Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/093—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by photoelectric pick-up
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1225—Basic optical elements, e.g. light-guiding paths comprising photonic band-gap structures or photonic lattices
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/212—Mach-Zehnder type
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
Abstract
The invention discloses a monolithic integrated triaxial optical accelerometer based on a push-pull photonic crystal zipper cavity, which integrates an incidence unit on a lithium niobate single crystal thin film and is used for generating incident light; the phase modulation feedback unit is used for modulating the incident light wave to obtain a modulated light wave and carrying out frequency modulation feedback; the X-axis acceleration sensing unit is used for detecting the magnitude of X-axis input acceleration; the Y-axis acceleration sensing unit is used for detecting the magnitude of Y-axis input acceleration; the Z-axis acceleration sensing unit is used for detecting the magnitude of Z-axis input acceleration; a photonic crystal zipper cavity structure is adopted, and large-bandwidth and high-resolution sensing is realized at the same time; differential detection is realized by adopting a push-pull structure, and interference caused by paraxial acceleration is inhibited; the scheme that the micro-nano waveguide is used for coupling light into the micro-cavity is adopted, so that the acceleration sensor is more stable, and the high precision, miniaturization and high integration of the triaxial acceleration sensor are realized.
Description
Technical Field
The application relates to the technical field of micro-optical-electro-mechanical systems and inertial sensing, in particular to a monolithic integrated triaxial optical accelerometer based on a push-pull photonic crystal zipper cavity.
Background
In recent years, with the increasing maturity of microelectronics, integrated circuit technologies, and micromachining technologies. MEMS acceleration sensors are widely used in various fields of our lives, such as agricultural production, vehicle driving, medical and health, aerospace, robot fields, and the like. However, the conventional MEMS accelerometer is limited by the measurement principle itself, and cannot meet the requirements in the field of high-precision and high-environment-adaptability inertial navigation. MOEMS is a microsystem technology that combines micro-optics with MEMS technology using integrated optics and micro-nano processing technology. The MOEMS accelerometer has the advantages of strong anti-interference capability, suitability for strong electromagnetic interference and strong corrosive environment, high sensitivity, small volume, light weight and the like.
According to different working principles, the research on the MOEMS acceleration sensor at home and abroad mainly comprises the following types: micro-structured grating accelerometers, sub-wavelength resonant accelerometers, optical waveguide micro-mechanical accelerometers and more recently developed cavity optomechanical accelerometers. Light-substance interactions have received much attention in cavity optomechanical systems over the past few decades. The cavity optomechanical system provides a new way for high-precision optical detection, controls the mechanical motion of a quantum region by light, and realizes the high-precision optical sensing of micro motion by the coupling effect between phonons and photons, and the high-precision optical sensing is close to or even exceeds the standard quantum limit.
With the development of the inertial technology, the requirements of the application field on the precision, the volume and the weight of an inertial system are higher and higher, and the design of an optical accelerometer with high precision, integration, miniaturization, low cost and high stability is a trend.
In addition, many applications require a triaxial acceleration sensor capable of detecting three-component acceleration signals simultaneously, and most of the conventional accelerometers are single-vector measurement, and a plurality of single-axis accelerometers need to be assembled to form the triaxial accelerometer, which inevitably results in larger error, larger volume and higher cost.
Disclosure of Invention
The embodiment of the application aims to solve the problems of low system integration degree, low measurement precision and poor anti-interference capability in the prior art by adopting mature integrated optics and micro-nano processing technology based on the characteristics of easy integration and excellent electro-optic performance of lithium niobate (LiNbO3) materials and the like in the prior triaxial acceleration sensor and providing a monolithic integrated triaxial optical accelerometer based on a push-pull photonic crystal zipper cavity.
According to the embodiment of the application, a monolithic integrated triaxial optical accelerometer based on a push-pull photonic crystal zipper cavity is provided, which comprises: the system comprises an incidence unit, a phase modulation feedback unit, a Z-axis acceleration sensitive unit, a Y-axis acceleration sensitive unit and an X-axis acceleration sensitive unit which take a lithium niobate single crystal film as a substrate;
the incident unit is used for generating incident laser, dividing the incident laser into at least five paths of equal power and inputting the divided laser to the phase modulation feedback unit;
the phase modulation feedback unit is used for modulating incident laser to obtain a modulation signal and playing a role of closed-loop feedback through modulating the laser frequency;
the Z-axis acceleration sensing unit is used for receiving the modulation signal and detecting the magnitude of Z-axis input acceleration;
the Y-axis acceleration sensing unit is used for receiving the modulation signal and detecting the magnitude of the Y-axis input acceleration;
and the X-axis acceleration sensing unit is used for receiving the modulation signal and detecting the input acceleration of the X axis.
Further, the lithium niobate single crystal thin film comprises a silicon substrate, a silicon dioxide buffer layer and a lithium niobate single crystal thin film layer, wherein the silicon dioxide buffer layer is positioned on the upper surface of the silicon substrate, the lithium niobate single crystal thin film layer is positioned on the upper surface of the silicon dioxide buffer layer, the tangential direction of the lithium niobate single crystal thin film layer is X-cut, and a ridge waveguide is formed on the lithium niobate single crystal thin film layer through etching.
Furthermore, the incidence unit comprises a narrow linewidth laser light source, a spot size converter and a 1 xn (n is more than or equal to 5) multimode interference coupler, wherein the narrow linewidth laser light source is opposite to and contacted with one end of the spot size converter, and the other end of the spot size converter is connected with the single waveguide input end of the 1 xn (n is more than or equal to 5) multimode interference coupler.
Furthermore, n output ports of the 1 xn (n is more than or equal to 5) multimode interference couplers are symmetrically distributed about the central axis of the multimode interference area, and the 1 xn (n is more than or equal to 5) multimode interference couplers are all formed by lithium niobate single crystal thin film ridge waveguides formed by etching.
Further, the phase modulation feedback unit includes a first modulation waveguide, a second modulation waveguide, a third modulation waveguide, a fourth modulation waveguide, a fifth modulation waveguide, a first electrode, a second electrode, a third electrode, a fourth electrode, and a fifth electrode;
the first electrode, the second electrode, the third electrode, the fourth electrode and the fifth electrode are respectively and symmetrically distributed on two sides of the first modulation waveguide, the second modulation waveguide, the third modulation waveguide, the fourth modulation waveguide and the fifth modulation waveguide, so that input light of the first modulation waveguide, the second modulation waveguide, the third modulation waveguide, the fourth modulation waveguide and the fifth modulation waveguide is modulated, and closed-loop frequency modulation feedback is realized.
Furthermore, the Z-axis acceleration sensitive unit comprises a Z-axis mass block, a Z-axis first input waveguide, a Z-axis second input waveguide, a Z-axis waveguide coupled front photonic crystal nano beam, a Z-axis waveguide coupled rear photonic crystal nano beam, a Z-axis mass block front photonic crystal nano beam, a Z-axis mass block rear photonic crystal nano beam, a Z-axis first support arm, a Z-axis second support arm, a Z-axis third support arm and a Z-axis fourth support arm, wherein the Z-axis mass block is positioned at the center of the Z-axis acceleration sensitive unit and is connected with the lithium niobate single crystal thin film layer through the Z-axis first support arm, the Z-axis second support arm, the Z-axis third support arm and the Z-axis fourth support arm, the Z-axis acceleration sensitive unit is in a suspended state, the Z-axis waveguide coupled front photonic crystal nano beam and the Z-axis mass block front photonic crystal nano beam are in opposite positions to form a zipper cavity structure, the Z-axis waveguide coupling rear photonic crystal nano beam and the Z-axis mass block rear photonic crystal nano beam are in relative positions to form a zipper cavity structure, and the Z-axis first input waveguide and the Z-axis second input waveguide are respectively connected with the phase modulation feedback unit.
Furthermore, the Y-axis acceleration sensitive unit comprises a Y-axis mass block, a Y-axis first input waveguide, a Y-axis second input waveguide, a Y-axis waveguide coupled front photonic crystal nano beam, a Y-axis waveguide coupled rear photonic crystal nano beam, a Y-axis mass block front photonic crystal nano beam, a Y-axis mass block rear photonic crystal nano beam, a Y-axis first support arm, a Y-axis second support arm, a Y-axis third support arm and a Y-axis fourth support arm, wherein the Y-axis mass block is positioned at the center of the Y-axis acceleration sensitive unit and is connected with the lithium niobate single crystal thin film layer through the Y-axis first support arm, the Y-axis second support arm, the Y-axis third support arm and the Y-axis fourth support arm, the Y-axis acceleration sensitive unit is in a suspended state, the Y-axis waveguide coupled front photonic crystal nano beam and the Y-axis mass block front photonic crystal nano beam are in opposite positions to form a zipper cavity structure, the Y-axis waveguide coupling rear photonic crystal nano beam and the Y-axis mass block rear photonic crystal nano beam are in relative positions to form a zipper cavity structure, and the Y-axis first input waveguide and the Y-axis second input waveguide are respectively connected with the phase modulation feedback unit.
Furthermore, the X-axis acceleration sensitive unit comprises an X-axis input waveguide, a phase shift Bragg grating, a first Y waveguide, a straight waveguide, a curved waveguide and a second Y waveguide, wherein the first Y waveguide, the second Y waveguide, the straight waveguide and the curved waveguide jointly form an asymmetric Mach-Zehnder interferometer structure, and the X-axis input waveguide is connected with the phase modulation feedback unit.
Furthermore, light of the narrow-linewidth laser light source enters a 1 Xn (n is more than or equal to 5) multimode interference coupler after passing through the spot-size converter, the light is divided into n (n is more than or equal to 5) light beams with equal power, a first light beam enters a zipper cavity formed by coupling a Y-axis waveguide with a front photonic crystal nano beam and a Y-axis mass block front photonic crystal nano beam through a Y-axis first input waveguide and then enters a first photoelectric detector, a second light beam enters a zipper cavity formed by coupling a Y-axis waveguide with a rear photonic crystal nano beam and a Y-axis mass block rear photonic crystal nano beam through a Y-axis second input waveguide and then enters a second photoelectric detector, a third light beam enters a zipper cavity formed by coupling a Z-axis waveguide with the front photonic crystal nano beam and the Z-axis mass block front photonic crystal nano beam and then enters a third photoelectric detector, and a fifth light beam enters a Z-axis second input waveguide and then couples the Z-axis waveguide with the rear photonic crystal nano beam and the Z-axis mass block rear photonic crystal nano beam The fourth light beam enters the fourth photoelectric detector after passing through the X-axis sensitive input waveguide, the phase-shift Bragg grating, the first Y waveguide, the straight waveguide, the bent waveguide and the second Y waveguide, and the mth (m >5) light beam directly enters the mth photoelectric detector.
Furthermore, the silicon dioxide buffer layers in the areas below the Z-axis acceleration sensitive unit, the Y-axis acceleration sensitive unit and the X-axis acceleration sensitive unit are in suspended structures after being removed by hydrofluoric acid, and all structures on the chip are formed through a micro-nano processing technology.
The technical scheme provided by the embodiment of the application can have the following beneficial effects:
according to the embodiment, the sensing unit adopts a photonic crystal zipper cavity structure, strong light machine coupling is realized through parameter design, and extremely high intrinsic mechanical quality factors are generated by utilizing the test quality and structure of ng magnitude. Differential detection is realized by adopting the push-pull accelerometer, paraxial crosstalk and common-mode noise are inhibited, and the resolution of the micro-accelerometer is improved. The scheme of coupling light into the microcavity by adopting the micro-nano waveguide realizes the monolithic integration of the grating coupler, the MMI coupler and the triaxial acceleration sensitive unit through the micro-structure design, improves the system integration level and reduces the system volume. The lithium niobate single crystal thin film material is adopted to localize the optical field in a smaller size, so that stronger optical-mechanical coupling is provided, and more efficient electro-optical modulation of low half-wave voltage is realized. The embodiment of the invention overcomes the problems of low system integration level, low measurement precision, poor anti-interference capability and the like in the system in the prior art. The embodiment of the invention can solve the contradiction between large bandwidth and high resolution, and realize the practical three-axis optical accelerometer with high resolution, large bandwidth and small size of monolithic integration.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the application.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and together with the description, serve to explain the principles of the application.
FIG. 1 is a schematic diagram of the general structure of a monolithic integrated three-axis optical accelerometer based on a push-pull photonic crystal zipper cavity according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a Z-axis acceleration sensitive unit in a monolithic integrated three-axis optical accelerometer based on a push-pull photonic crystal zipper cavity according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a Y-axis acceleration sensitive unit in a monolithic integrated three-axis optical accelerometer based on a push-pull photonic crystal zipper cavity according to an embodiment of the present invention;
FIG. 4 is a schematic cross-sectional view of a-B of a monolithic integrated three-axis optical accelerometer based on a push-pull photonic crystal zipper cavity according to an embodiment of the present invention.
Fig. 5 is a flow chart of a method shown in accordance with exemplary embodiment 2.
Detailed Description
Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present application. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the present application, as detailed in the appended claims.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used in this application and the appended claims, the singular forms "a", "an", and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should also be understood that the term "and/or" as used herein refers to and encompasses any and all possible combinations of one or more of the associated listed items.
It is to be understood that although the terms first, second, third, etc. may be used herein to describe various information, such information should not be limited to these terms. These terms are only used to distinguish one type of information from another. For example, first information may also be referred to as second information, and similarly, second information may also be referred to as first information, without departing from the scope of the present application. The word "if" as used herein may be interpreted as "at … …" or "when … …" or "in response to a determination", depending on the context.
The embodiment of the invention provides a monolithic integrated triaxial optical accelerometer based on a push-pull photonic crystal zipper cavity, which comprises: the system comprises an incidence unit 1 taking a lithium niobate single crystal film as a substrate, a phase modulation feedback unit 2, a Z-axis acceleration sensitive unit 3, a Y-axis acceleration sensitive unit 4 and an X-axis acceleration sensitive unit 5; the incident unit 1 is used for generating incident laser, dividing the incident laser into at least five paths of equal power, inputting the divided incident laser into the phase modulation feedback unit 2, and respectively receiving detection signals from the Z-axis acceleration sensitive unit 3, the Y-axis acceleration sensitive unit 4 and the X-axis acceleration sensitive unit 5; the phase modulation feedback unit 2 is used for modulating the incident laser to obtain a modulation signal and performing frequency modulation feedback of the signal; the Y-axis acceleration sensing unit 4 is used for detecting the magnitude of Y-axis input acceleration; the X-axis acceleration sensing unit 5 is used for detecting the magnitude of X-axis input acceleration; and the Z-axis acceleration sensing unit 3 is used for detecting the magnitude of Z-axis input acceleration.
According to the embodiment, the sensing unit adopts a photonic crystal zipper cavity structure, strong light machine coupling is realized through parameter design, and extremely high intrinsic mechanical quality factors are generated by utilizing the test quality and structure of ng magnitude. Differential detection is realized by adopting the push-pull accelerometer, paraxial crosstalk and common-mode noise are inhibited, and the resolution of the micro-accelerometer is improved. The scheme of coupling light into the microcavity by adopting the micro-nano waveguide realizes the monolithic integration of the grating coupler, the MMI coupler and the triaxial acceleration sensitive unit through the micro-structure design, improves the system integration level and reduces the system volume. The lithium niobate single crystal thin film material is adopted to localize the optical field in a smaller size, so that stronger optical-mechanical coupling is provided, and more efficient electro-optical modulation of low half-wave voltage is realized. The embodiment of the invention overcomes the problems of low system integration level, low measurement precision, poor anti-interference capability and the like in the system in the prior art. The embodiment of the invention can solve the contradiction between large bandwidth and high resolution, and realize the practical three-axis optical accelerometer with high resolution, large bandwidth and small size of monolithic integration.
The invention is further described with reference to the following figures and specific embodiments.
Example 1:
specifically, referring to fig. 1 to 4, the lithium niobate single crystal thin film in this embodiment includes a three-layer structure of a silicon substrate 47, a silica buffer layer 48, and a lithium niobate single crystal thin film layer 49, where the silica buffer layer is located on an upper surface of the silicon substrate, the lithium niobate single crystal thin film layer is located on an upper surface of the silica buffer layer, a tangential direction of the lithium niobate single crystal thin film layer is an X-cut, a thickness of the lithium niobate single crystal thin film layer is 600 nm, a thickness of the silica buffer layer is 2 microns, and a thickness of the silicon substrate is 800 microns. A ridge waveguide is formed on the lithium niobate single crystal thin film layer through etching, the width of the lithium niobate single crystal thin film ridge waveguide is 800 nanometers, the etching depth is 300 nanometers, the etching depth of the suspension structure of the acceleration sensitive unit is 600 nanometers, and the suspension structure is realized by corroding a silicon dioxide buffer layer below with hydrofluoric acid.
The incidence unit 1 comprises a narrow-linewidth laser light source 6, a spot size converter 7 and a 1 x 5 multimode interference coupler 8, wherein the narrow-linewidth laser light source 6 is opposite to and in contact with one end of the spot size converter 7, the central wavelength of the narrow-linewidth laser light source 6 is 1550 nanometers, the linewidth is in the kHz level, the other end of the spot size converter 7 is connected with the single waveguide input end of the 1 x 5 multimode interference coupler 8, five output ports are symmetrically distributed about the axis of a multimode interference area, and the spot size converter 7 and the 1 x 5 multimode interference coupler 8 are both formed by lithium niobate single crystal thin film ridge waveguides formed by etching.
The phase modulation feedback unit 2 comprises a first modulation waveguide 9, a second modulation waveguide 10, a third modulation waveguide 11, a fourth modulation waveguide 12, a fifth modulation waveguide 13, a first electrode 14, a second electrode 15, a third electrode 16, a fourth electrode 17 and a fifth electrode 18; the first electrode 14, the second electrode 15, the third electrode 16, the fourth electrode 17 and the fifth electrode 18 are respectively and symmetrically distributed on two sides of the first modulation waveguide 9, the second modulation waveguide 10, the third modulation waveguide 11, the fourth modulation waveguide 12 and the fifth modulation waveguide 13, so that input light of the first modulation waveguide 9, the second modulation waveguide 10, the third modulation waveguide 11, the fourth modulation waveguide 12 and the fifth modulation waveguide 13 is modulated, frequency modulation feedback of a system is achieved, the first electrode 14, the second electrode 15, the third electrode 16, the fourth electrode 17 and the fifth electrode 18 are made of gold (Au), the length is 20 micrometers, the thickness is 150 nanometers, and the direction of applying an electric field is parallel to the Z axis so as to increase the modulation depth.
The Z-axis acceleration sensing unit 3 comprises a Z-axis mass block 19, a Z-axis first input waveguide 20, a Z-axis second input waveguide 21, a Z-axis waveguide coupling front photonic crystal nano beam 22, a Z-axis waveguide coupling rear photonic crystal nano beam 23, a Z-axis mass block front photonic crystal nano beam 24, a Z-axis mass block rear photonic crystal nano beam 25, a Z-axis first support arm 26, a Z-axis second support arm 27, a Z-axis third support arm 28 and a Z-axis fourth support arm 29, wherein the Z-axis mass block 19 is arranged at the central position of the Z-axis acceleration sensing unit 3 and has the size of 150 multiplied by 60 multiplied by 0.6 cubic micrometers, the Z-axis acceleration sensing unit 3 is connected with the main body through the Z-axis first support arm 26, the Z-axis second support arm 27, the Z-axis third support arm 28 and the Z-axis fourth support arm 29, the sizes of the four support arms are 560 multiplied by 2 multiplied by 0.6 cubic micrometers, and the Z-axis acceleration sensing unit 3 is in a suspended state, the Z-axis waveguide coupling front photonic crystal nano beam 22 and the Z-axis mass block front photonic crystal nano beam 24 are in opposite positions to form a zipper cavity structure, the Z-axis waveguide coupling rear photonic crystal nano beam 23 and the Z-axis mass block rear photonic crystal nano beam 25 are in opposite positions to form a zipper cavity structure, two groups of zipper cavities form a push-pull structure to eliminate interference caused by paraxial acceleration, the dimensions of the four photonic crystal nano beams are 25 multiplied by 0.8 multiplied by 0.6 cubic micrometers, the periodic photonic crystal structures on two sides of each nano beam are used as reflectors to form a defect region by changing the lattice constant of a central region, and the Z-axis first input waveguide 20 and the Z-axis second input waveguide 21 are respectively connected with the third modulation waveguide 11 and the fifth modulation waveguide 13.
The Y-axis acceleration sensing unit 4 comprises a Y-axis mass block 30, a Y-axis first input waveguide 31, a Y-axis second input waveguide 32, a Y-axis waveguide coupling front photonic crystal nano-beam 33, a Y-axis waveguide coupling rear photonic crystal nano-beam 34, a Y-axis mass block front photonic crystal nano-beam 35, a Y-axis mass block rear photonic crystal nano-beam 36, a Y-axis first support arm 37, a Y-axis second support arm 38, a Y-axis third support arm 39 and a Y-axis fourth support arm 40, wherein the Y-axis mass block 30 is positioned at the center of the Y-axis acceleration sensing unit 4 and has the size of 150 x 60 x 0.6 cubic micrometers, and is connected with the main body through the Y-axis first support arm 37, the Y-axis second support arm 38, the Y-axis third support arm 39 and the Y-axis fourth support arm 40, the sizes of the four support arms are 0.6 x 1 x 560 cubic micrometers, the Y-axis acceleration sensing unit 4 is in a suspended state, the Y-axis waveguide coupling front photonic crystal nano beam 33 and the Y-axis mass block front photonic crystal nano beam 35 are in opposite positions to form a zipper cavity structure, the Y-axis waveguide coupling rear photonic crystal nano beam 34 and the Y-axis mass block rear photonic crystal nano beam 36 are in opposite positions to form a zipper cavity structure, two groups of zipper cavities form a push-pull structure to eliminate interference caused by paraxial acceleration, the dimensions of the four photonic crystal nano beams are 0.6 multiplied by 0.8 multiplied by 25 cubic micrometers, the periodic photonic crystal structures on two sides of each nano beam are used as reflectors, defect regions are formed by changing the lattice constant of a central region, and the Y-axis first input waveguide 31 and the Y-axis second input waveguide 32 are respectively connected with the first modulation waveguide 9 and the second modulation waveguide 10.
The X-axis acceleration sensitive unit 5 includes a Z-axis input waveguide 41, a phase shift bragg grating 42, a first Y waveguide 43, a straight waveguide 44, a curved waveguide 45, and a second Y waveguide 46, where the first Y waveguide 43, the second Y waveguide 46, the straight waveguide 44, and the curved waveguide 45 together form an asymmetric mach-zehnder interferometer structure, the X-axis input waveguide 41 is connected with the fourth modulation waveguide 12, and the first Y waveguide realizes a structure of 50: 50, the period of the phase shift bragg grating is 520nm, the X-axis input waveguide 41 and the phase shift bragg grating 42 are designed on the first support arm 26 of the Z-axis sensing unit 3, and the X-axis acceleration sensing unit 5 and the Z-axis sensing unit 3 share the Z-axis mass block 19.
Light of a narrow-linewidth laser light source 6 enters a 1 x 5 multimode interference coupler 8 after passing through a spot-size converter 7, is divided into a first light beam, a second light beam, a third light beam, a fourth light beam and a fifth light beam in an equipower mode into a first light beam, a second light beam, a third light beam, a fourth light beam and a fifth light beam which respectively pass through a first modulation waveguide 9, a second modulation waveguide 10, a third modulation waveguide 11, a fourth modulation waveguide 12 and a fifth modulation waveguide 13, the first light beam enters a zipper cavity formed by a Y-axis waveguide coupling front photonic crystal nano beam 33 and a Y-axis mass block front photonic crystal nano beam 35 through a Y-axis first input waveguide 31 and then enters a first photoelectric detector, the second light beam enters a zipper cavity formed by a Y-axis waveguide coupling rear photonic crystal nano beam 34 and a Y-axis mass block rear photonic crystal nano beam 36 and then enters a second photoelectric detector, the third light beam enters a Z-axis waveguide coupling front photonic crystal nano beam 22 and a Z-axis mass block front photonic crystal nano beam 24 through a Z-axis first input waveguide 20 The formed zipper cavity enters a third photoelectric detector, a fifth light beam enters the zipper cavity formed by coupling the Z-axis waveguide with the rear photonic crystal nano beam 23 and the Z-axis mass block rear photonic crystal nano beam 25 through the Z-axis second input waveguide 21 and then enters the fifth photoelectric detector, and a fourth light beam enters the fourth photoelectric detector after passing through the X-axis input waveguide 41, the phase-shift Bragg grating 42, the first Y waveguide 43, the straight waveguide 44, the bent waveguide 45 and the second Y waveguide 46 in sequence.
The silicon dioxide buffer layer 46 of the area below the Z-axis acceleration sensitive unit 3, the Y-axis acceleration sensitive unit 4 and the X-axis acceleration sensitive unit 5 is hollowed after being removed by hydrofluoric acid, and all structures on the chip are formed by micro-nano processing technologies such as electron beam lithography, plasma etching, vacuum evaporation coating and the like.
The dimensions of the monolithic three-axis optical accelerometer based on the push-pull photonic crystal zipper cavity provided by the embodiment are 12mm × 8mm × 0.5mm, but are not limited thereto.
In a specific embodiment, the Z-axis direction is parallel to the Y-axis first input waveguide direction, the Y-axis direction is parallel to the Z-axis first input waveguide direction, the Z-axis direction is perpendicular to the Y-axis direction, and the X-axis direction is perpendicular to a plane formed by the Z-axis direction and the Y-axis direction.
When the input acceleration vector has X-axis, Y-axis and Z-axis components at the same time:
due to the inertia effect, the Z-axis mass block 19 generates translational displacement in the directions of the Z-axis and the X-axis, and the gap between the two zipper cavity structures at the front end and the rear end of the Z-axis sensitive unit 3 is respectively increased and decreased, so that the resonance frequency of the zipper cavity and the frequency of incident laser are detuned, the signal intensity received by the third photoelectric detector and the fifth photoelectric detector is changed, and the interference caused by the acceleration component of the X-axis is eliminated through the push-pull structure.
Due to the inertia effect, the Y-axis mass block 30 generates translational displacement in the directions of the Y-axis and the X-axis, and the gap between the two zipper cavity structures at the front end and the rear end of the Y-axis sensitive unit 4 is increased and decreased respectively, so that the resonance frequency of the zipper cavity and the frequency of incident laser are detuned, the signal intensity received by the first photoelectric detector and the second photoelectric detector is changed, and the interference caused by the acceleration component of the X-axis is eliminated through the push-pull structure.
The mass block 19 of the Z axis generates translational displacement in the directions of the Z axis and the X axis due to the inertia effect, the first support arm 26 of the Z axis is extended under the driving of the displacement of the mass block, the structural parameters of the phase shift Bragg grating 42 on the first support arm 26 of the Z axis are changed, so that the wavelength of the transmitted light of the grating is changed, and the transmitted light is converted into light intensity change through the asymmetric Mach-Zehnder interferometer and then is measured by the photoelectric detector.
Example 2:
referring to fig. 2 to 5, in this embodiment, the incidence unit 1 includes a narrow-line-width laser light source 6, a spot size converter 7, and a 1 × 6 multimode interference coupler 8, the narrow-line-width laser light source 6 is opposite to and in contact with one end of the spot size converter 7, the center wavelength of the narrow-line-width laser light source 6 is 1550 nm, the line width is in the kHz level, the other end of the spot size converter 7 is connected to the single waveguide input end of the 1 × 6 multimode interference coupler 8, six output ports are symmetrically distributed about the central axis of the multimode interference region, and the spot size converter 7 and the 1 × 6 multimode interference coupler 8 are both formed by a lithium niobate single crystal thin film ridge waveguide formed by etching.
Light of a narrow-linewidth laser light source 6 enters a 1 x 6 multimode interference coupler 8 after passing through a spot-size converter 7, is divided into a first light beam, a second light beam, a third light beam, a fourth light beam, a fifth light beam and a sixth light beam in an equal power mode, the first light beam, the second light beam, the third light beam, the fourth light beam and the fifth light beam respectively pass through a first modulation waveguide 9, a second modulation waveguide 10, a third modulation waveguide 11, a fourth modulation waveguide 12 and a fifth modulation waveguide 13, the first light beam enters a zipper cavity formed by a Y-axis first input waveguide 31, a Y-axis waveguide coupling front photonic crystal nano beam 33 and a Y-axis mass block front photonic crystal nano beam 35 and then enters a first photoelectric detector, the second light beam enters a zipper cavity formed by a Y-axis waveguide coupling rear photonic crystal nano beam 34 and a Y-axis mass block rear photonic crystal nano beam 36 and then enters a second photoelectric detector, the third light beam enters a zipper cavity formed by the Z-axis waveguide coupling front photonic crystal nano beam 22 and the Z-axis mass block front photonic crystal nano beam 24 through the Z-axis first input waveguide 20 and then enters a third photoelectric detector, the fifth light beam enters a zipper cavity formed by the Z-axis waveguide coupling rear photonic crystal nano beam 23 and the Z-axis mass block rear photonic crystal nano beam 25 through the Z-axis second input waveguide 21 and then enters a fifth photoelectric detector, the fourth light beam enters a fourth photoelectric detector after passing through the X-axis input waveguide 41, the phase shift Bragg grating 42, the first Y waveguide 43, the straight waveguide 44, the bent waveguide 45 and the second Y waveguide 46 in sequence, and the sixth light beam directly enters the sixth photoelectric detector to serve as a reference light beam.
The remaining specific structure of this embodiment is the same as embodiment 1.
The invention provides a monolithic integrated triaxial optical accelerometer based on a push-pull photonic crystal zipper cavity, which is beneficial to improving the integration level of a triaxial optical accelerometer system and improving the resolution and stability of the triaxial optical accelerometer. The invention overcomes the problems of low system integration level, low measurement precision, poor anti-interference capability and the like in the prior art system. The sensing unit adopts a photonic crystal zipper cavity structure, realizes strong light machine coupling through parameter design, and generates extremely high intrinsic mechanical quality factors by utilizing the test quality and structure of ng magnitude. Differential detection is realized by adopting the push-pull accelerometer, paraxial crosstalk and common-mode noise are inhibited, and the resolution of the micro-accelerometer is improved. The scheme of coupling light into the microcavity by adopting the micro-nano waveguide realizes the monolithic integration of the grating coupler, the MMI coupler and the triaxial acceleration sensitive unit through the micro-structure design, improves the system integration level and reduces the system volume. The lithium niobate single crystal thin film material is adopted to localize the optical field in a smaller size, so that stronger optical-mechanical coupling is provided, and more efficient electro-optical modulation of low half-wave voltage is realized. The embodiment of the invention can realize the practical three-axis optical accelerometer with monolithic integration, high resolution, large bandwidth and small size.
Other embodiments of the present application will be apparent to those skilled in the art from consideration of the specification and practice of the disclosure disclosed herein. This application is intended to cover any variations, uses, or adaptations of the invention following, in general, the principles of the application and including such departures from the present disclosure as come within known or customary practice within the art to which the invention pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the application being indicated by the following claims.
It will be understood that the present application is not limited to the precise arrangements described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the application is limited only by the appended claims.
Claims (10)
1. A monolithic integrated triaxial optical accelerometer based on a push-pull photonic crystal zipper cavity, comprising: the device comprises an incidence unit (1) taking a lithium niobate single crystal film as a substrate, a phase modulation feedback unit (2), a Z-axis acceleration sensitive unit (3), a Y-axis acceleration sensitive unit (4) and an X-axis acceleration sensitive unit (5);
the incident unit (1) is used for generating incident laser, dividing the incident laser into at least five paths of equal power and inputting the divided power to the phase modulation feedback unit (2);
the phase modulation feedback unit (2) is used for modulating incident laser to obtain a modulation signal and playing a role of closed-loop feedback through modulating the laser frequency;
the Z-axis acceleration sensing unit (3) is used for receiving a modulation signal and detecting the magnitude of Z-axis input acceleration;
the Y-axis acceleration sensing unit (4) is used for receiving the modulation signal and detecting the magnitude of the Y-axis input acceleration;
and the X-axis acceleration sensitive unit (5) is used for receiving the modulation signal and detecting the magnitude of the X-axis input acceleration.
2. The monolithic integrated triaxial optical accelerometer based on a push-pull photonic crystal zipper cavity according to claim 1, wherein the lithium niobate single crystal thin film comprises a silicon substrate (47), a silica buffer layer (48) and a lithium niobate single crystal thin film layer (49), the silica buffer layer is located on the upper surface of the silicon substrate, the lithium niobate single crystal thin film layer is located on the upper surface of the silica buffer layer, the tangential direction of the lithium niobate single crystal thin film layer is X-cut, and a ridge waveguide is formed on the lithium niobate single crystal thin film layer through etching.
3. The monolithic integrated triaxial optical accelerometer based on a push-pull photonic crystal zipper cavity according to claim 1, wherein the incidence unit (1) comprises a narrow linewidth laser light source (6), a spot size converter (7), and a 1 xn (n is greater than or equal to 5) multimode interference coupler (8), the narrow linewidth laser light source (6) is opposite to and in contact with one end of the spot size converter (7), and the other end of the spot size converter (7) is connected with a single waveguide input end of the 1 xn (n is greater than or equal to 5) multimode interference coupler (8).
4. The monolithic integrated triaxial optical accelerometer based on a push-pull photonic crystal zipper cavity according to claim 3, wherein n output ports of the 1 xn (n ≧ 5) multimode interference coupler (8) are distributed axisymmetrically with respect to the multimode interference region, and each of the 1 xn (n ≧ 5) multimode interference coupler (8) is formed by a lithium niobate single crystal thin film ridge waveguide formed by etching.
5. The push-pull photonic crystal zipper cavity-based monolithically integrated triaxial optical accelerometer according to claim 1, wherein the phase modulation feedback unit (2) comprises a first modulation waveguide (9), a second modulation waveguide (10), a third modulation waveguide (11), a fourth modulation waveguide (12), a fifth modulation waveguide (13), a first electrode (14), a second electrode (15), a third electrode (16), a fourth electrode (17), a fifth electrode (18);
the first electrode (14), the second electrode (15), the third electrode (16), the fourth electrode (17) and the fifth electrode (18) are symmetrically distributed on two sides of the first modulation waveguide (9), the second modulation waveguide (10), the third modulation waveguide (11), the fourth modulation waveguide (12) and the fifth modulation waveguide (13) respectively, so that input light of the first modulation waveguide (9), the second modulation waveguide (10), the third modulation waveguide (11), the fourth modulation waveguide (12) and the fifth modulation waveguide (13) is modulated, and closed-loop frequency modulation feedback is achieved.
6. The monolithic integrated three-axis optical accelerometer based on the push-pull type photonic crystal zipper cavity according to claim 1, wherein the Z-axis acceleration sensing unit (3) comprises a Z-axis mass block (19), a Z-axis first input waveguide (20), a Z-axis second input waveguide (21), a Z-axis waveguide coupling front photonic crystal nanobeam (22), a Z-axis waveguide coupling rear photonic crystal nanobeam (23), a Z-axis mass block front photonic crystal nanobeam (24), a Z-axis mass block rear photonic crystal nanobeam (25), a Z-axis first support arm (26), a Z-axis second support arm (27), a Z-axis third support arm (28), and a Z-axis fourth support arm (29), wherein the Z-axis mass block (19) is located at the center of the Z-axis acceleration sensing unit (3), and the Z-axis second support arm (27) is located through the Z-axis first support arm (26), the Z-axis second support arm (27), The Z-axis third supporting arm (28) and the Z-axis fourth supporting arm (29) are connected with the lithium niobate single crystal thin film layer, the Z-axis acceleration sensitive unit is in a suspended state, the Z-axis waveguide coupling front photonic crystal nano beam (22) and the Z-axis mass block front photonic crystal nano beam (24) are in opposite positions to form a zipper cavity structure, the Z-axis waveguide coupling rear photonic crystal nano beam (23) and the Z-axis mass block rear photonic crystal nano beam (25) are in opposite positions to form a zipper cavity structure, and the Z-axis first input waveguide (20) and the Z-axis second input waveguide (21) are respectively connected with the phase modulation feedback unit (2).
7. The monolithic integrated triaxial optical accelerometer based on a push-pull photonic crystal zipper cavity of claim 1, wherein: the Y-axis acceleration sensing unit (4) comprises a Y-axis mass block (30), a Y-axis first input waveguide (31), a Y-axis second input waveguide (32), a Y-axis waveguide coupling front photonic crystal nano beam (33), a Y-axis waveguide coupling rear photonic crystal nano beam (34), a Y-axis mass block front photonic crystal nano beam (35), a Y-axis mass block rear photonic crystal nano beam (36), a Y-axis first support arm (37), a Y-axis second support arm (38), a Y-axis third support arm (39) and a Y-axis fourth support arm (40), wherein the Y-axis mass block (30) is positioned at the central position of the Y-axis acceleration sensing unit (4) and is connected with the lithium single crystal thin film layer through the Y-axis first support arm (37), the Y-axis second support arm (38), the Y-axis third support arm (39) and the Y-axis fourth support arm (40), and is in a suspended state, the Y-axis waveguide coupling front photonic crystal nano beam (33) and the Y-axis mass block front photonic crystal nano beam (35) are in opposite positions to form a zipper cavity structure, the Y-axis waveguide coupling rear photonic crystal nano beam (34) and the Y-axis mass block rear photonic crystal nano beam (36) are in opposite positions to form a zipper cavity structure, and the Y-axis first input waveguide (31) and the Y-axis second input waveguide (32) are respectively connected with the phase modulation feedback unit (2).
8. The monolithic integrated triaxial optical accelerometer based on push-pull photonic crystal zipper cavities of claim 1, wherein: the X-axis acceleration sensitive unit (5) comprises an X-axis input waveguide (41), a phase shift Bragg grating (42), a first Y waveguide (43), a straight waveguide (44), a bent waveguide (45) and a second Y waveguide (46), wherein the first Y waveguide (43), the second Y waveguide (46), the straight waveguide (44) and the bent waveguide (45) jointly form an asymmetric Mach-Zehnder interferometer structure, and the X-axis input waveguide (41) is connected with the phase modulation feedback unit (2).
9. The monolithic integrated triaxial optical accelerometer based on a push-pull photonic crystal zipper cavity of claim 1, wherein: light of a narrow-linewidth laser light source (6) enters a 1 Xn (n is more than or equal to 5) multimode interference coupler (8) after passing through a spot-size converter (7), the light is divided into n (n is more than or equal to 5) light beams with equal power, a first light beam enters a zipper cavity formed by a Y-axis first input waveguide (31) and a Y-axis waveguide coupling front photonic crystal nano beam (33) and a Y-axis mass block front photonic crystal nano beam (35) and then enters a first photoelectric detector, a second light beam enters a zipper cavity formed by a Y-axis second input waveguide (32) and a Y-axis waveguide coupling rear photonic crystal nano beam (34) and a Y-axis mass block rear photonic crystal nano beam (36) and then enters a second photoelectric detector, a third light beam enters a zipper cavity formed by a Z-axis coupling front photonic crystal nano beam (22) and a Z-axis mass block front photonic crystal nano beam (24) and then enters a third photoelectric detector, the fifth light beam enters a zipper cavity formed by the Z-axis waveguide coupling rear photonic crystal nano beam (23) and the Z-axis mass block rear photonic crystal nano beam (25) through the Z-axis second input waveguide (21) and then enters a fifth photoelectric detector, the fourth light beam enters a fourth photoelectric detector through the X-axis sensitive input waveguide (41), the phase-shift Bragg grating (42), the first Y waveguide (43), the straight waveguide (44), the bent waveguide (45) and the second Y waveguide (46), and the m (m >5) light beam directly enters the m photoelectric detector.
10. The monolithic integrated triaxial optical accelerometer based on a push-pull photonic crystal zipper cavity of claim 1, wherein: and the silicon dioxide buffer layers in the areas below the Z-axis acceleration sensitive unit (3), the Y-axis acceleration sensitive unit (4) and the X-axis acceleration sensitive unit (5) are removed by hydrofluoric acid and then are in suspended structures, and all the structures on the chip are formed by micro-nano processing technology.
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