CN114740005A - SiCfQuantitative evaluation method for machining surface quality of/SiC ceramic matrix composite - Google Patents

SiCfQuantitative evaluation method for machining surface quality of/SiC ceramic matrix composite Download PDF

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CN114740005A
CN114740005A CN202111587148.6A CN202111587148A CN114740005A CN 114740005 A CN114740005 A CN 114740005A CN 202111587148 A CN202111587148 A CN 202111587148A CN 114740005 A CN114740005 A CN 114740005A
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sic
matrix composite
ceramic matrix
roughness
measuring
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汪文虎
刘聪
熊一峰
蒋睿嵩
杨卓勇
刘智武
刘秀梅
黄博
李良万
王子春
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Northwestern Polytechnical University
AECC Aviation Power Co Ltd
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Northwestern Polytechnical University
AECC Aviation Power Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/30Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/40Imaging
    • G01N2223/401Imaging image processing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/60Specific applications or type of materials
    • G01N2223/615Specific applications or type of materials composite materials, multilayer laminates
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/60Specific applications or type of materials
    • G01N2223/634Specific applications or type of materials wear behaviour, roughness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/60Specific applications or type of materials
    • G01N2223/645Specific applications or type of materials quality control
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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Abstract

The invention relates to SiCfA quantitative evaluation method for the quality of a processed surface of a/SiC ceramic matrix composite belongs to the technical field of detection; first, for SiCfThe surface of the/SiC ceramic matrix composite is processed, an optical scanning instrument is adopted to measure the surface roughness, and the phenomenon that a contact roughness measuring instrument is clamped during measurement due to defects such as pores, pits and the like is avoided. Secondly, the three-dimensional surface roughness SaAs SiCfThe characteristic parameters of the surface quality of the/SiC ceramic matrix composite material are provided for SaThe measurement should be carried out so that a plurality of fiber bundles and a matrix are contained in the measurement area to ensure the validity of the measurement result. Finally, the whole damage factor delta of the processed surface is provided and is used as the SiCfQuality evaluation of/SiC ceramic matrix composite material processed surfaceThe second quantitative evaluation parameter of (1). The invention can improve the comprehensiveness and the accuracy of evaluation in research and is SiCfThe accurate evaluation of the processing surface quality of the/SiC ceramic matrix composite material provides beneficial guidance.

Description

SiCfQuantitative evaluation method for processing surface quality of SiC ceramic matrix composite
Technical Field
The invention belongs to the technical field of detection, and particularly relates to SiCfA method for quantitatively evaluating the quality of the processed surface of a/SiC ceramic matrix composite.
Background
The fiber reinforced ceramic matrix composite has the characteristics of high specific strength, high specific modulus, high temperature resistance, corrosion resistance and the like, has wide prospect in the application of hot end parts of the aircraft engine, and is one of ideal materials for high-temperature parts of the future new-generation aircraft engine. SiCfSiC ceramic matrix composite and Cfthe/SiC ceramic matrix composite material is 2 advanced ceramic matrix composite materials at present, and a lot of researchers do a lot of research on the aspects of processing technology, processing mechanism, detection technology and the like, but a unified and definite standard is not formed in the aspect of evaluating the processing surface quality of the fiber reinforced ceramic matrix composite material. "Effect of fiber orientation on Surface grinding processes of non-ideal C/SiC compositions" published by Zhang et al, Applied Surface Science,2016,366424-The two-dimensional evaluation parameter detection and analysis are carried out on the processed surface of the C/SiC ceramic matrix composite, three processed surface roughness values are compared, and the order of the surface roughness values is found as follows: longitudinal direction>Is normal>And transverse direction. However, many pores and pits are distributed on the surface of the fiber reinforced ceramic matrix composite, a probe of a contact type measuring instrument is small and is easy to be clamped in the pores and the pits on the surface, so that the measurement fails, and when the two-dimensional evaluation parameters are used for performing characterization evaluation on the processing surface of the anisotropic fiber reinforced ceramic matrix composite, the influences of a measured position (fiber or matrix) and a measured direction (vertical or parallel to the fiber direction) are large, the measurement results have large differences, and the stability of the measured data is poor. Therefore, in the process of detecting the quality of the processed surface of the anisotropic fiber reinforced ceramic matrix composite, the contact roughness measuring instrument has certain limitation, and the two-dimensional evaluation parameters are difficult to accurately analyze and evaluate the quality of the processed surface.
Different from the traditional metal material, the fiber reinforced ceramic matrix composite material has the characteristics of anisotropy and non-homogeneity, and a large number of scholars research the evaluation parameters of the processing surface quality of the fiber reinforced ceramic matrix composite material. In the article "experiment research on ultrasonic-assisted grinding of silicon carbide fiber reinforced silicon carbide ceramic matrix composite", Zhao Fang contrasts with SiCfTwo-dimensional surface roughness R of/SiC ceramic matrix composite processing surfaceaAnd three-dimensional surface roughness SaStability of the measured data, determiningaThe width of the SiC fiber bundle of this material was about 700 μm as a machined surface quality evaluation parameter, but the measurement area size thereof was only 0.883mm × 0.662 mm. The existing literature only uses a quantitative evaluation parameter of surface roughness for SiCfThe quality of the processed surface of the/SiC ceramic matrix composite is evaluated, and the selected three-dimensional evaluation parameter measuring area is basically concentrated on a single fiber bundle and does not contain the processed surface information of the matrix and other fiber bundles, so that the effectiveness of the measured data and the accuracy of the evaluation result are influenced.
Disclosure of Invention
The technical problem to be solved is as follows:
to compensate for SiCfThe invention provides a defect of a method for evaluating the processing surface quality of a SiC ceramic matrix composite materialfA method for quantitatively evaluating the surface quality of SiC ceramic matrix composite includes such steps as preparing SiCfThe surface of the/SiC ceramic matrix composite is processed, an optical scanning instrument is adopted to measure the surface roughness, and the phenomenon that a contact roughness measuring instrument is clamped during measurement due to defects such as pores, pits and the like is avoided. Secondly, the three-dimensional surface roughness SaAs SiCfThe characteristic parameters of the surface quality of the SiC ceramic matrix composite material are provided and S is carried outaThe measurement should be carried out so that a plurality of fiber bundles and a matrix are contained in the measurement area to ensure the validity of the measurement result. Finally, the whole damage factor delta of the processed surface is provided and is used as the SiCfAnd performing a second quantitative evaluation parameter of quality evaluation on the processed surface of the/SiC ceramic matrix composite material.
The technical scheme of the invention is as follows: SiCfThe method for quantitatively evaluating the quality of the processed surface of the/SiC ceramic matrix composite is characterized by comprising the following specific steps of:
step 1: and (3) processing test: making test parameters for SiCfCarrying out a processing test on the/SiC ceramic matrix composite;
step 2: selecting a measuring instrument: according to SiCfSelecting a roughness measuring instrument for the surface characteristics of the/SiC ceramic matrix composite material to measure the surface roughness;
and step 3: two-dimensional surface roughness RaAnd three-dimensional surface roughness SaAnd (3) measuring stability comparison: for SiC after processingfSelecting a measuring area on the surface of the/SiC ceramic matrix composite material, and performing two-dimensional surface roughness R by using a roughness measuring instrumentaAnd three-dimensional surface roughness SaMeasuring, comparing the stability of multiple measurement results, and determining the three-dimensional surface roughness SaAs a machining surface roughness evaluation parameter;
and 4, step 4: three-dimensional surface roughness S of different measurement areasaAnd (3) comparing the measured values: selecting S comprising a plurality of fiber bundles and a matrixaMeasurement area and S comprising only individual fibersaMeasurement areas, respectivelyMultiple measurements of SiC in selected measurement regionsfThree-dimensional surface roughness S of/SiC ceramic matrix composite processing surfaceaTaking the average of the measurement results as the roughness of the measurement area and comparing the measured three-dimensional surface roughness S on the single fiber bundleaComparing to determine the three-dimensional surface roughness SaThe measuring area comprises a plurality of fiber bundles and a matrix;
and 5: determining the roughness of the processed surface: selecting the three-dimensional surface roughness S determined in step 4aMeasuring the area and measuring S a plurality of timesaTaking the average value thereof as the SiCfThe roughness value of the processed surface of the/SiC ceramic matrix composite material;
step 6: acquiring a scanning electron microscope image of a machined surface: using scanning instruments to align SiCfCarrying out regional scanning on the machined surface of the/SiC ceramic matrix composite to obtain a plurality of scanning electron microscope images of the machined surface;
and 7: calculating the damage ratio of the processed surface: using image processing functions on SiCfAnd processing the scanning electron microscope image of the processed surface of the/SiC ceramic matrix composite material to obtain the damaged area of the processed surface, calculating the damage ratio, and taking the average value as the integral damage ratio of the processed surface.
The further technical scheme of the invention is as follows: in the step 1, an ultrasonic vibration assisted milling and grinding test is adopted: adopting ultrasonic parameters and processing parameters of 4000r/min of main shaft rotating speed, 300mm/min of feeding speed, 0.15mm of cutting depth, 6 mu m of amplitude and 30kHz of frequency to process SiCfAnd carrying out ultrasonic vibration assisted milling and grinding processing tests on the/SiC ceramic matrix composite.
The further technical scheme of the invention is as follows: the equipment for the processing test adopts a three-coordinate numerical control milling machine and ultrasonic vibration hardware.
The further technical scheme of the invention is as follows: in the step 2, the roughness measuring instrument is an Alicona optical three-dimensional scanner.
The invention further adopts the technical scheme that: in the step 3, a measuring area of 8mm × 8mm is selected for the processed surface.
The further technical scheme of the invention is as follows:in the step 3, the two-dimensional surface roughness RaThe measurement method is that R parallel to the fiber direction is respectively measuredaX value and R perpendicular to the fibre directionaY values, R measured 5 times from left to right in the parallel fiber direction and from top to bottom in the perpendicular fiber directiona-X and Ra-a value of Y;
three-dimensional surface roughness SaThe measuring method comprises the steps of sequentially measuring for 5 times from top to bottom;
after measurement, R is measured for 5 timesaAnd SaThe stability of the measurement result is contrastively analyzed to obtain the roughness SaThe measured value is more stable, and the three-dimensional surface roughness S is obtainedaAs evaluation parameters of the roughness of the machined surface.
The further technical scheme of the invention is as follows: in said step 4, the three-dimensional surface roughness SaThe measuring area is 8mm multiplied by 8mm and comprises 4 fiber bundles and a matrix; s of a single fibreaThe measurement area 0.8mm x 0.8mm contains individual fibers, no matrix.
The invention further adopts the technical scheme that: in the step 6, a VEGA 3LMU scanning electron microscope is selected as a scanning instrument; the scanning image area is set to be 3mm multiplied by 3 mm; and scanning the different positions of the processed surface for 3 times to obtain 3 groups of scanning electron microscope images.
The further technical scheme of the invention is as follows: in the step 7, the Image processing function in the Image J Image processing software is adopted to carry out Image processing on 3 groups of SiCfThe method is characterized in that a/SiC ceramic matrix composite material processing surface two-dimensional image is processed, and the basic processing process is as follows: and converting the image into an 8-bit gray image, adjusting a threshold value of the 8-bit gray image, automatically framing out a damage area, calculating the whole damage area of the surface through a Measure function, and taking the average value of the damage area as the whole damage proportion of the processed surface.
Advantageous effects
The invention has the beneficial effects that: the quantitative evaluation method provided by the invention uses the optical roughness measuring instrument to perform quantitative evaluation on SiCfTwo-dimensional roughness R of/SiC ceramic matrix composite processing surfaceaAnd three-dimensional roughness SaThe measurement is carried out, and the phenomenon that the surface of the measuring tool has large profile fluctuation is avoidedThe problems of measurement failure and the like caused by the fact that the probe card is subjected to contact measurement are solved. By comparing the three-dimensional surface roughness SaAnd two-dimensional surface roughness RaMeasuring the stability of the data, determining SaAs the evaluation parameter of the surface roughness of the material; when S isaWhen the measuring region only contains a single fiber bundle, the evaluation result is greatly deviated, and the processing information of the matrix and other fiber bundles cannot be represented, so that the selected region should contain a plurality of fiber bundles and the matrix, and the effectiveness of the measuring result of the processed surface roughness of the fiber reinforced ceramic matrix composite material can be improved. Establishment of the whole damage factor delta pair SiC of the processed surfacefThe damage generated on the surface of the SiC ceramic matrix composite material is subjected to overall quantitative evaluation, so that the problem that only one roughness quantitative evaluation parameter exists in the previous research is avoided, and the comprehensiveness of the surface quality quantitative evaluation is further improved. Thus, SiC of the present invention is usedfThe method for quantitatively evaluating the quality of the processed surface of the SiC ceramic matrix composite can improve the comprehensiveness and the accuracy of evaluation in research, and is SiCfThe accurate evaluation of the machining surface quality of the/SiC ceramic matrix composite material provides beneficial guidance.
Drawings
FIG. 1 is a schematic view of an ultrasonic vibration assisted milling process test;
FIG. 2 is SiCfThe processed surface of the/SiC ceramic matrix composite has obvious defects of holes, pits and the like;
FIG. 3 is a two-dimensional surface roughness RaAnd three-dimensional surface roughness SaA method of measurement; (a) two-dimensional surface roughness RaMeasurement method, (b) three-dimensional surface roughness SaA method of measurement;
FIG. 4 is a two-dimensional surface roughness RaAnd three-dimensional surface roughness SaComparing the stability of the 5 measured values;
FIG. 5 is a three-dimensional surface roughness SaComparison of the measured values in the two measurement regions, S on the left side of the figureaThe measuring area only contains a single fiber bundle and no matrix; s on the right side of the figureaThe measuring area comprises 4 fiber bundles and a matrix;
FIG. 6 shows SiC under the same parametersfAnd (3) processing the surface of the/SiC ceramic matrix composite material, and determining the surface damage degree of different positions.
Description of reference numerals: 1. the ultrasonic knife comprises a main shaft box, a main shaft 2 and an ultrasonic knife handle 3. PDC milling cutter, 5.SiC f6, a SiC ceramic matrix composite material.
Detailed Description
The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
The present invention is further illustrated with reference to the following figures 1-6 and examples, including but not limited to the following examples.
Step 1: ultrasonic vibration assisted milling and grinding processing test: adopts ultrasonic parameters and processing parameters of 4000r/min of main shaft rotation speed, 300mm/min of feed speed, 0.15mm of cutting depth, 6 mu m of amplitude and 30kHz of frequency to process SiC by using ultrasonic vibration hardware provided by VMC-850 three-coordinate numerical control milling machine and Siann Chaonet ultrasonic technology research institute Limited companyfAnd carrying out ultrasonic vibration assisted milling and grinding processing tests on the/SiC ceramic matrix composite.
Step 2: selecting a measuring instrument: as the SiCf/SiC ceramic matrix composite material can generate a plurality of hole defects during preparation, and the machined surface can generate defects such as pits, fiber fracture, fiber pull-out and the like, a probe can be often clamped in the surface pits during measurement by adopting a contact roughness measuring instrument so that the measurement cannot be finished, and an Alicona optical three-dimensional scanner with the model number of Infine Focus G4 is selected for SiC ceramic matrix composite materialfAnd performing two-dimensional and three-dimensional surface roughness measurement on the machined surface of the/SiC ceramic matrix composite.
And step 3: two-dimensional surface roughness RaAnd three-dimensional surface roughness SaAnd (3) measuring stability comparison: selecting a measuring area of 8mm multiplied by 8mm for the processed surface, and respectively measuring the two-dimensional surface roughness R by using an optical three-dimensional scanneraAnd three-dimensional surface roughness Sa. Wherein the two-dimensional surface roughness measurement is influenced more by the fibre direction, R parallel to the fibre direction being measured separatelyaX value and perpendicular to the fibre directionR of (A) to (B)a-a value of Y. Thus, R is measured 5 times from left to right in the parallel fiber direction and from top to bottom in the perpendicular fiber directiona-X and RaValue Y, three-dimensional surface roughness SaThe measurements were performed 5 times in order from top to bottom. Finally, for 5 times RaAnd SaThe stability of the measurement result is contrastively analyzed, and the three-dimensional surface roughness S is foundaThe measured value is more stable, and the three-dimensional surface roughness S is obtainedaAs evaluation parameters of the roughness of the machined surface.
And 4, step 4: three-dimensional surface roughness S of different measurement areasaAnd (3) comparing the measured values: selected SaThe measuring area is 8mm multiplied by 8mm and comprises 4 fiber bundles and a matrix, only comprises single fibers and S without the matrixaThe measurement area size was 0.8mm × 0.8 mm. The maximum displacement of the workbench of the optical three-dimensional scanner is limited, the magnification of the measuring area of 0.8mm multiplied by 0.8mm is 20 times, and the magnification of the measuring area of 8mm multiplied by 8mm is 5 times. Measuring SiC of 5 selected measurement regions respectivelyfThree-dimensional surface roughness S of/SiC ceramic matrix composite processing surfaceaTaking the average value as the roughness of the measuring region, and comparing the three-dimensional surface roughness S of the two regionsaIt was found that the measurement results were greatly influenced by the number of fiber bundles and matrices contained in the measurement area, so S was performedaWhen measuring, a plurality of fiber bundles and a matrix are contained in the measuring area.
And 5: determining the roughness of the processed surface: selecting a three-dimensional surface roughness SaThe measurement area was 8mm × 8mm, so that 4 fiber bundles were included in the measurement area, and S was takenaThe average value was defined as the SiCfRoughness value of the/SiC ceramic matrix composite processing surface.
Step 6: acquiring a scanning electron microscope image of a machined surface: scanning the processing surface of the SiCf/SiC ceramic matrix composite material by using a scanning electron microscope (scanning electron microscope) which is manufactured by Czech Tescan company and has the model of VEGA 3LMU, wherein in order to avoid the influence of the hole defects of the material on the processing result, the distance between holes on the surface of the material is considered, the scanning image adopts a region of 3mm multiplied by 3mm, and the scanning image is scanned for 3 times at different positions of the processing surface to obtain 3 groups of scanning electron microscope images.
And 7: calculating the damage ratio of the processed surface: image J Image processing software for 3 SiC groupsfThe method comprises the following steps of processing a two-dimensional image of a processed surface of the/SiC ceramic matrix composite material, wherein the basic processing process comprises the following steps: and converting the image into an 8-bit gray image, adjusting the threshold value of the image, automatically selecting a damage area, calculating the whole damage area of the surface by using the Measure function, and taking the average value of the damage area as the whole damage proportion of the processed surface. Comparing the damage proportions of 3 different two-dimensional images, finding that the calculated value is in a relatively stable state, and therefore, processing the two-dimensional images through Image J Image processing software so as to calculate the overall damage proportion delta of the processing surface.
In summary, optical scanners are more suitable for SiC than contact roughness measurement instrumentsfMeasurement of surface roughness of/SiC ceramic matrix composite material, three-dimensional surface roughness SaCompared with two-dimensional surface roughness RaThe measured value has small fluctuation and is relatively more stable. SaThe measuring area should contain a plurality of fiber bundles and a matrix, and 8mm multiplied by 8mm is selected as the processing surface S of the materialaThe area was measured by including 4 fiber bundles in the measurement area, and the processed surface roughness was finally measured to be 4.2785 μm. And processing the two-dimensional scanning Image by adopting Image J Image processing software to obtain that the overall damage ratio of the processing surface under the parameter is about 23.952%. Therefore, a three-dimensional surface roughness S can be adoptedaTwo quantitative parameters of the total damage ratio delta of the processed surface to SiCfAnd quantitatively evaluating the quality of the processed surface of the/SiC ceramic matrix composite.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made in the above embodiments by those of ordinary skill in the art without departing from the principle and spirit of the present invention.

Claims (9)

1. SiCfA method for quantitatively evaluating the quality of a processed surface of a/SiC ceramic matrix composite,the method is characterized by comprising the following specific steps:
step 1: and (3) processing test: making test parameters for SiCfCarrying out a processing test on the/SiC ceramic matrix composite;
step 2: selecting a measuring instrument: according to SiCfSelecting a roughness measuring instrument for the surface characteristics of the/SiC ceramic matrix composite material to measure the surface roughness;
and step 3: two-dimensional surface roughness RaAnd three-dimensional surface roughness SaAnd (3) measuring stability comparison: for SiC after processingfSelecting a measuring area on the surface of the/SiC ceramic matrix composite material, and performing two-dimensional surface roughness R by using a roughness measuring instrumentaAnd three-dimensional surface roughness SaMeasuring, comparing the stability of multiple measurement results, and determining the three-dimensional surface roughness SaAs a machining surface roughness evaluation parameter;
and 4, step 4: three-dimensional surface roughness S of different measurement areasaAnd (3) comparing measured values: selecting S comprising a plurality of fiber bundles and a matrixaMeasurement area and S comprising only a single fibreaMeasuring regions for measuring SiC of selected measuring regions respectively for a plurality of timesfThree-dimensional surface roughness S of processed surface of SiC ceramic matrix compositeaTaking the average of the measurement results as the roughness of the measurement area and comparing the measured three-dimensional surface roughness S on the single fiber bundleaComparing to determine the three-dimensional surface roughness SaThe measuring area comprises a plurality of fiber bundles and a matrix;
and 5: determining the roughness of the processed surface: selecting the three-dimensional surface roughness S determined in step 4aMeasuring the area and measuring S a plurality of timesaTaking the average value as the SiCfThe roughness value of the processed surface of the/SiC ceramic matrix composite material;
step 6: acquiring a scanning electron microscope image of a machined surface: using scanning instruments to align SiCfCarrying out regional scanning on the machined surface of the/SiC ceramic matrix composite to obtain a plurality of scanning electron microscope images of the machined surface;
and 7: calculating the damage ratio of the processed surface: using image processing functions on SiCf/SiCAnd processing the scanning electron microscope image of the processed surface of the ceramic matrix composite material to obtain the damaged area of the processed surface, calculating the damage ratio, and taking the average value of the damaged area as the integral damage ratio of the processed surface.
2. SiC according to claim 1fThe method for quantitatively evaluating the quality of the processed surface of the/SiC ceramic matrix composite is characterized by comprising the following steps of: in the step 1, an ultrasonic vibration assisted milling and grinding test is adopted: the ultrasonic parameters and processing parameters of 4000r/min of main shaft rotation speed, 300mm/min of feeding speed, 0.15mm of cutting depth, 6 mu m of amplitude and 30kHz of frequency are adopted to process SiCfAnd carrying out ultrasonic vibration assisted milling and grinding processing tests on the/SiC ceramic matrix composite.
3. SiC according to claim 2fThe method for quantitatively evaluating the quality of the processed surface of the/SiC ceramic matrix composite is characterized by comprising the following steps of: the equipment for the processing test adopts a three-coordinate numerical control milling machine and ultrasonic vibration hardware.
4. SiC according to claim 1fThe method for quantitatively evaluating the quality of the processed surface of the/SiC ceramic matrix composite is characterized by comprising the following steps of: in the step 2, the roughness measuring instrument is an Alicona optical three-dimensional scanner.
5.SiC according to claim 1fThe method for quantitatively evaluating the quality of the processed surface of the/SiC ceramic matrix composite is characterized by comprising the following steps of: in the step 3, a measuring area of 8mm × 8mm is selected for the processed surface.
6. SiC according to claim 1fThe method for quantitatively evaluating the quality of the processed surface of the/SiC ceramic matrix composite is characterized by comprising the following steps of: in the step 3, the two-dimensional surface roughness RaThe measurement method is that R parallel to the fiber direction is respectively measuredaX value and R perpendicular to the fibre directionaY values, R measured 5 times from left to right in the parallel fiber direction and from top to bottom in the perpendicular fiber directiona-X and Ra-a value of Y;
three-dimensional surface roughness SaThe measuring method is that the measuring is carried out for 5 times from top to bottom;
after measurement, R is measured for 5 timesaAnd SaThe stability of the measurement result is contrastively analyzed to obtain the roughness SaThe measured value is more stable, and the three-dimensional surface roughness S is obtainedaAs evaluation parameters of the roughness of the machined surface.
7. SiC according to claim 1fThe method for quantitatively evaluating the quality of the processed surface of the/SiC ceramic matrix composite is characterized by comprising the following steps of: in said step 4, the three-dimensional surface roughness SaThe measuring area is 8mm multiplied by 8mm and comprises 4 fiber bundles and a matrix; s of a single fibreaThe measurement area 0.8mm x 0.8mm contains individual fibers, no matrix.
8. SiC according to claim 1fThe method for quantitatively evaluating the quality of the processed surface of the/SiC ceramic matrix composite is characterized by comprising the following steps of: in the step 6, a VEGA 3LMU scanning electron microscope is selected as a scanning instrument; the scanning image area is set to be 3mm multiplied by 3 mm; and scanning the different positions of the processed surface for 3 times to obtain 3 groups of scanning electron microscope images.
9. SiC according to claim 1fThe method for quantitatively evaluating the quality of the processed surface of the/SiC ceramic matrix composite is characterized by comprising the following steps of: in the step 7, the Image processing function in the Image J Image processing software is adopted to carry out Image processing on 3 groups of SiCfThe method comprises the following steps of processing a two-dimensional image of a processed surface of the/SiC ceramic matrix composite material, wherein the basic processing process comprises the following steps: and converting the image into an 8-bit gray image, adjusting a threshold value of the 8-bit gray image, automatically framing out a damage area, calculating the whole damage area of the surface through a Measure function, and taking the average value of the damage area as the whole damage proportion of the processed surface.
CN202111587148.6A 2021-12-23 2021-12-23 SiCfQuantitative evaluation method for machining surface quality of/SiC ceramic matrix composite Pending CN114740005A (en)

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Publication number Priority date Publication date Assignee Title
CN118067621A (en) * 2024-04-17 2024-05-24 常州旭焱光电科技有限公司 Production equipment and production process of precise ceramic piece

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118067621A (en) * 2024-04-17 2024-05-24 常州旭焱光电科技有限公司 Production equipment and production process of precise ceramic piece

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