CN114737242B - Special high-efficient electroplating roller of MEMS shield cover - Google Patents
Special high-efficient electroplating roller of MEMS shield cover Download PDFInfo
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- CN114737242B CN114737242B CN202210458867.6A CN202210458867A CN114737242B CN 114737242 B CN114737242 B CN 114737242B CN 202210458867 A CN202210458867 A CN 202210458867A CN 114737242 B CN114737242 B CN 114737242B
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- electroplating
- mems
- roller
- liquid medicine
- efficient
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- 238000009713 electroplating Methods 0.000 title claims abstract description 62
- 239000007788 liquid Substances 0.000 claims abstract description 42
- 239000003814 drug Substances 0.000 claims abstract description 32
- 238000007747 plating Methods 0.000 claims abstract description 16
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 230000008859 change Effects 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 7
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/16—Apparatus for electrolytic coating of small objects in bulk
- C25D17/18—Apparatus for electrolytic coating of small objects in bulk having closed containers
- C25D17/20—Horizontal barrels
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
The utility model provides a special high-efficient electroplating roller of MEMS shield, relates to electroplating technical field, including the plating bath, detachable rotation installs the cylinder in the plating bath, and the equipartition has the through-hole on the perisporium of cylinder, and coaxial cartridge has the fixed liquid medicine exchange tube in position in the cylinder, and the equipartition has the change hole on the perisporium of liquid medicine exchange tube, still is equipped with conductive disc in the cylinder, is connected with the electric hammer on the conductive disc. The invention solves the problems that when the device in the traditional technology is used for electroplating a product, the plating layer is uneven, the phenomenon similar to the spot is easy to occur, marking and poor identification occur in the later stage, and the performance of the product is affected.
Description
Technical Field
The invention relates to the technical field of electroplating devices, in particular to a special efficient electroplating roller for an MEMS shielding case.
Background
Electroplating is a process of plating a thin layer of other metals or alloys on the surface of certain metals by utilizing an electrolysis principle, a roller is an important part of barrel plating, the quality of barrel plating is greatly influenced, and electroplating liquid diversion holes are formed in the roller to finish the exchange of electroplating liquid inside and outside the barrel. During the electroplating process, the roller is partially or completely immersed in the electroplating solution and rotates around the axial direction. When the parts are rolled and electroplated in the solution, the plated workpiece in the roller is kept in the roller, and the plated workpiece is simultaneously acted by the electroplating liquid entering through each hole in the panel under the overturning action of the roller.
The existing MEMS electroplating roller is a conventional electroplating roller, and during electroplating operation, the product has the problems of uneven electroplated layers and spots in a certain proportion, and as the product is used for MEMS semiconductor packaging, the uniformity of the electroplated layers in the same batch must be within 1um, and the precision of the gold plating layer must be controlled within 5 nm.
The utility model discloses a patent of publication number CN109868499A among the prior art, this scheme includes the barrel, and the barrel both ends are equipped with feed inlet and discharge gate respectively, are equipped with guide structure between feed inlet and the discharge gate in the barrel, still provide an electroplating roller subassembly, including electroplating roller, the rolling drive device as above, electroplating roller and electroplating roller subassembly that provide, can continuous feeding and ejection of compact, realize serialization electroplating production.
However, the device gradually exposes the defects of the technology in production and use, and mainly shows the following aspects:
when the existing device is used for electroplating products, the plating layer is uneven, the phenomenon similar to the spot is easy to occur, the problems of marking and poor identification occur in the later period, and the performance of the products is affected.
In summary, it is clear that the prior art has inconvenience and defects in practical use, so that improvement is needed.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides a special efficient electroplating roller for an MEMS shielding case, which is used for solving the problems that when a device in the prior art is used for electroplating a product, a plating layer is uneven and is easy to appear like a spot, marking and poor identification occur in the later stage, and the performance of the product is influenced.
In order to achieve the above purpose, the present invention provides the following technical solutions:
the utility model provides a special high-efficient electroplating cylinder of MEMS shield cover, includes the plating bath, detachable rotation installs the cylinder in the plating bath, the equipartition has the through-hole on the perisporium of cylinder, coaxial cartridge has the fixed liquid medicine exchange tube in position in the cylinder, the equipartition has the change hole on the perisporium of liquid medicine exchange tube, still be equipped with the conducting disc in the cylinder, be connected with the electric hammer on the conducting disc.
As an optimized scheme, the inlet end of the liquid medicine exchange tube is connected with a liquid inlet tube, and the liquid inlet tube penetrates through the conductive disc to extend to the outside and is connected with a first quick connection joint.
As an optimized scheme, the plating tank is also connected with a second quick-connection joint matched with the first quick-connection joint.
As an optimized scheme, the roller is a hexagonal roller, end covers are fixedly connected to two ends of the hexagonal roller, a taking and placing opening is formed in one surface of the hexagonal roller, a cover plate is connected to the taking and placing opening, and through holes are uniformly distributed in the cover plate.
As an optimized scheme, the two end covers are respectively rotatably installed on the support, a V-shaped conductive seat is fixedly connected on the lower surface of the support, and a V-shaped conductive seat support matched with the V-shaped conductive seat is arranged at the upper end part of the electroplating bath.
As an optimized scheme, the upper end part of the electroplating tank is also provided with a proximity switch.
As an optimized scheme, one of the brackets is provided with a gear set connected with the end cover, and the electroplating bath is also provided with a driving gear meshed with the gear set.
As an optimized scheme, the electroplating bath is also connected with a liquid medicine exchange pump, the outlet end of the liquid medicine exchange pump is connected with the second quick connector through a pipe body, and the inlet end of the liquid medicine exchange pump is connected with the inner cavity of the electroplating bath.
As an optimized solution, the conductive hammer is connected to the conductive disc through a conductive wire.
Compared with the prior art, the invention has the beneficial effects that:
the quality of the electroplating layer is thoroughly improved, and simultaneously, the electroplating efficiency is greatly improved, and the cost is reduced;
in terms of appearance of the coating, the problem of bad spots caused by inconsistent thickness of the coating is thoroughly solved, the product yield reaches 100%, and the batch use verification marking of customers is stable and reliable;
the requirements on the operation methods and skills of operators are reduced, standardized operation is facilitated, the original 1-man-1 machine is improved to 1-man-3 machines, and labor cost is reduced;
the manufacturing cost is low, and the maintenance is convenient; the design is reasonable, and the matching between the structures is precise; the method is convenient and quick; the stability in the working process is improved; the components are few, the working procedure is simple and convenient, and the failure rate is low; the structure is simple, and the service life is long; the operation control is simple and convenient, the large-scale manufacturing and installation are easy, and the application range is wide.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. Like elements or portions are generally identified by like reference numerals throughout the several figures. In the drawings, elements or portions thereof are not necessarily drawn to scale.
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic view of a drum according to the present invention;
FIG. 3 is a schematic view of the plating vessel of the present invention.
In the figure: 1-a roller; 2-end caps; 3-cover plate; 4-a bracket; 5-gear set; 6-V type conductive seat; 7-a liquid medicine exchange tube; 8-conductive plates; 9-a conductive wire; 10-a conductive hammer; 11-a liquid inlet pipe; 12-a first quick connect coupling; 13-a second quick connect coupling; 14-a liquid medicine exchange pump; 15-V-shaped conductive seat support; 16-proximity switch; 17-drive gear.
Detailed Description
Embodiments of the technical scheme of the present invention will be described in detail below with reference to the accompanying drawings. The following examples are only for more clearly illustrating the technical aspects of the present invention, and thus are merely examples, and are not intended to limit the scope of the present invention.
As shown in fig. 1 to 3, the special efficient electroplating roller for the MEMS shielding case comprises an electroplating bath, wherein the electroplating bath is detachably and rotatably installed, through holes are uniformly distributed on the peripheral wall of the roller 1, a liquid medicine exchange tube 7 with a fixed position is coaxially inserted in the roller 1, exchange holes are uniformly distributed on the peripheral wall of the liquid medicine exchange tube 7, a conductive plate 8 is further arranged in the roller 1, and a conductive hammer 10 is connected to the conductive plate 8.
The inlet end of the liquid medicine exchange tube 7 is connected with a liquid inlet tube 11, and the liquid inlet tube 11 passes through the conductive disc 8 to extend to the outside and is connected with a first quick connection joint 12.
The plating tank is also connected with a second quick-connect coupling 13 which is matched with the first quick-connect coupling 12.
The roller 1 is a hexagonal roller 1, end covers 2 are fixedly connected to two ends of the hexagonal roller 1, a taking and placing opening is formed in one surface of the hexagonal roller, a cover plate 3 is connected to the taking and placing opening, and through holes are uniformly distributed in the cover plate 3.
The two end covers 2 are respectively rotatably installed on the support 4, the lower surface of the support 4 is fixedly connected with a V-shaped conductive seat 6, and the upper end part of the electroplating bath is provided with a V-shaped conductive seat support 15 matched with the V-shaped conductive seat 6.
The upper end of the plating tank is also provided with a proximity switch 16.
One of the brackets 4 is provided with a gear set 5 connected with the end cover 2, the electroplating bath is also provided with a driving gear 17 meshed with the gear set 5, and the driving gear 17 is driven to rotate by a driving motor.
The electroplating bath is also connected with a liquid medicine exchange pump 14, the outlet end of the liquid medicine exchange pump 14 is connected with a second quick connecting joint 13 through a pipe body, and the inlet end of the liquid medicine exchange pump 14 is connected with the inner cavity of the electroplating bath.
The conductive hammer 10 is connected to the conductive plate 8 through a conductive wire 9.
The roller 1 and the cover plate 3 are fixed by screws to form a closed cavity, through holes with phi 0.5-phi 2.0 for liquid medicine exchange are arranged on the roller 1 and the cover plate 3, C angles are designed at two ends of the small holes, and the hole spacing is 2-5 mm. The roller 1 is in a regular hexahedral design, is made of PP, and has a thickness of preferably 0.5-2.0mm. Inside the drum 1 are provided a conductive hammer 10 and a conductive wheel. During electroplating, the product in the roller 1 is always in contact with the conductive hammer 10, the conductive hammer 10 is fixed on the conductive wheel through a flexible wire and is always connected with the conductive wheel, and the conductive wheel is connected with the V-shaped conductive seat 6, and is made of pure copper.
The gear set 5 is divided into 3 gears, the uppermost gear is a thick gear, the thick gear is meshed with a driving gear 17 of the groove body, the uppermost gear is meshed with a pinion in the middle of the roller 1, the pinion is meshed with a lower gear connected with the roller 1, the middle of the lower gear is of a hollow structure, the lower gear is concentric with the rotating central shaft of the roller 1, the central hole is phi 17mm, and a liquid medicine exchange tube 7 enters the roller 1 from the center.
The liquid medicine exchange tube 7 is made of PP tube, the cylindrical surface of the tube is provided with through holes with phi 0.5-phi 2.0 for liquid medicine exchange, the through holes are uniformly distributed on the circumferential surface according to the angle of 40-60 degrees, and the arrangement between each layer of holes is preferably 2-5 mm. The pipe diameter is preferably 8-16mm. When the liquid medicine exchange speed is too high or too low, the accurate control of the liquid medicine flow can be realized by adjusting the throttle valve.
The working principle is as follows:
firstly, opening a cover plate 3 of a product, loading the product into a roller 1, arranging a conductive hammer 10 in the roller 1 and always keeping in a contact state with the product, and fixing the cover plate 3 by using a fixing screw to prevent the product from falling out when rolling;
secondly, the travelling crane places the roller 1 at a position corresponding to the electroplating bath according to a program, when the roller 1 is placed in place, the first quick connecting joint 12 and the second quick connecting joint 13 of liquid medicine exchange are synchronously connected in place, the V-shaped conductive seat 6 is clamped on the V-shaped conductive seat support 15, and current is applied to the conductive hammer 10 in the roller 1, so that a product is electrified; meanwhile, the travel switch acts to enable the driving gear 17 and the liquid medicine exchange pump 14 to work simultaneously, and the electroplating process is started.
And in the electroplating process, the liquid medicine is exchanged at a low speed without constant pressure from outside to inside relative to the original roller 1, so that the quantitative constant pressure from inside to outside is exchanged rapidly, the liquid medicine uniformity and the flow rate are controllable in the whole process, and the quality of the electroplating process is stable.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and not for limiting the same; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the invention, and are intended to be included within the scope of the appended claims and description.
Claims (7)
1. The utility model provides a special high-efficient electroplating barrel of MEMS shield cover which characterized in that: comprises an electroplating bath, a roller (1) is detachably and rotatably arranged in the electroplating bath, through holes are uniformly distributed on the peripheral wall of the roller (1), a liquid medicine exchange tube (7) with a fixed position is coaxially inserted in the roller (1), exchange holes are uniformly distributed on the peripheral wall of the liquid medicine exchange tube (7), a conductive disc (8) is also arranged in the roller (1), a conductive hammer (10) is connected on the conductive disc (8),
the inlet end of the liquid medicine exchange tube (7) is connected with a liquid inlet tube (11), the liquid inlet tube (11) passes through the conductive disc (8) to extend to the outside and is connected with a first quick connection joint (12),
and a second quick connecting joint (13) matched with the first quick connecting joint (12) is further connected to the electroplating bath.
2. The efficient electroplating cylinder special for the MEMS shielding case as claimed in claim 1, wherein the efficient electroplating cylinder is characterized in that: the novel multifunctional drum is characterized in that the drum (1) is a hexagonal drum (1), end covers (2) are fixedly connected to two ends of the hexagonal drum (1), a taking and placing opening is formed in one surface of the hexagonal drum (1), a cover plate (3) is connected to the taking and placing opening, and through holes are uniformly distributed in the cover plate (3).
3. The efficient electroplating cylinder special for the MEMS shielding case as claimed in claim 2, wherein: the two end covers (2) are respectively rotatably installed on the support (4), a V-shaped conductive seat (6) is fixedly connected on the lower surface of the support (4), and a V-shaped conductive seat support (15) matched with the V-shaped conductive seat (6) is arranged at the upper end part of the electroplating bath.
4. The efficient electroplating cylinder special for the MEMS shielding case as claimed in claim 1, wherein the efficient electroplating cylinder is characterized in that: the upper end of the plating tank is also provided with a proximity switch (16).
5. A special efficient electroplating cylinder for a MEMS shield according to claim 3, wherein: the support (4) is provided with a gear set (5) connected with the end cover (2), and the electroplating bath is also provided with a driving gear (17) meshed with the gear set (5).
6. The efficient electroplating cylinder special for the MEMS shielding case as claimed in claim 1, wherein the efficient electroplating cylinder is characterized in that: the electroplating bath is also connected with a liquid medicine exchange pump (14), the outlet end of the liquid medicine exchange pump (14) is connected with the second quick connecting joint (13) through a pipe body, and the inlet end of the liquid medicine exchange pump (14) is connected with the inner cavity of the electroplating bath.
7. The efficient electroplating cylinder special for the MEMS shielding case as claimed in claim 1, wherein the efficient electroplating cylinder is characterized in that: the conductive hammer (10) is connected to the conductive disc (8) through a conductive wire (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210458867.6A CN114737242B (en) | 2022-04-27 | 2022-04-27 | Special high-efficient electroplating roller of MEMS shield cover |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210458867.6A CN114737242B (en) | 2022-04-27 | 2022-04-27 | Special high-efficient electroplating roller of MEMS shield cover |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114737242A CN114737242A (en) | 2022-07-12 |
| CN114737242B true CN114737242B (en) | 2023-11-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210458867.6A Active CN114737242B (en) | 2022-04-27 | 2022-04-27 | Special high-efficient electroplating roller of MEMS shield cover |
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| Country | Link |
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| CN (1) | CN114737242B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104047044A (en) * | 2014-07-04 | 2014-09-17 | 旺诠科技(昆山)有限公司 | Circulation mechanism for filling electroplating liquid into electroplating barrel |
| CN104611758A (en) * | 2015-01-30 | 2015-05-13 | 广东保迪环保电镀设备有限公司 | Planetary barrel plating machine |
| CN212404343U (en) * | 2020-06-08 | 2021-01-26 | 包头市英思特稀磁新材料股份有限公司 | Novel barrel plating roller equipment |
| KR102278771B1 (en) * | 2021-03-05 | 2021-07-19 | 주식회사 광성금속 | Barrel Type Plating Apparatus Having Circulating Portion For Of Plating Solution |
| CN217677880U (en) * | 2022-04-27 | 2022-10-28 | 山东睿思精密工业有限公司 | Special high-efficient electroplating barrel of MEMS shield cover |
-
2022
- 2022-04-27 CN CN202210458867.6A patent/CN114737242B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104047044A (en) * | 2014-07-04 | 2014-09-17 | 旺诠科技(昆山)有限公司 | Circulation mechanism for filling electroplating liquid into electroplating barrel |
| CN104611758A (en) * | 2015-01-30 | 2015-05-13 | 广东保迪环保电镀设备有限公司 | Planetary barrel plating machine |
| CN212404343U (en) * | 2020-06-08 | 2021-01-26 | 包头市英思特稀磁新材料股份有限公司 | Novel barrel plating roller equipment |
| KR102278771B1 (en) * | 2021-03-05 | 2021-07-19 | 주식회사 광성금속 | Barrel Type Plating Apparatus Having Circulating Portion For Of Plating Solution |
| CN217677880U (en) * | 2022-04-27 | 2022-10-28 | 山东睿思精密工业有限公司 | Special high-efficient electroplating barrel of MEMS shield cover |
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| Publication number | Publication date |
|---|---|
| CN114737242A (en) | 2022-07-12 |
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|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: 261000 Building 9, 3177 Yuehe Road, Weifang Economic Development Zone, Shandong Province Applicant after: Shandong Ruisi Precision Industry Co.,Ltd. Address before: 261000 Building 9, 3177 Yuehe Road, Weifang Economic Development Zone, Shandong Province Applicant before: WEIFANG YUYUAN ELECTRONICS Co.,Ltd. |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A high-efficiency electroplating drum for MEMS shielding cover Granted publication date: 20231114 Pledgee: Weifang branch of Bank of Beijing Co.,Ltd. Pledgor: Shandong Ruisi Precision Industry Co.,Ltd. Registration number: Y2024980025842 |