CN114686980A - Diamond single crystal growth device - Google Patents

Diamond single crystal growth device Download PDF

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Publication number
CN114686980A
CN114686980A CN202210320445.2A CN202210320445A CN114686980A CN 114686980 A CN114686980 A CN 114686980A CN 202210320445 A CN202210320445 A CN 202210320445A CN 114686980 A CN114686980 A CN 114686980A
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China
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box body
single crystal
crystal growth
fixedly connected
diamond single
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CN202210320445.2A
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Chinese (zh)
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CN114686980B (en
Inventor
冯建伟
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China Science Frontier Technology Research Co ltd
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China Science Frontier Technology Research Co ltd
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    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/04Diamond
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B1/00Single-crystal growth directly from the solid state
    • C30B1/12Single-crystal growth directly from the solid state by pressure treatment during the growth

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The invention provides a diamond single crystal growth device, which relates to the technical field of diamond single crystal growth equipment and comprises a box body, wherein the top of the box body is fixedly connected with a feeding box, the top of the box body is provided with a circular groove communicated with the feeding box, a supporting plate is arranged inside the circular groove, the top of the supporting plate is provided with a tray for placing graphite, the top of the supporting plate is provided with a sealing plate positioned right above the tray, the bottom of the box body is fixedly connected with a supporting table, and the top of the supporting table is rotatably connected with a screw rod; the graphite is fixedly placed in the tray, the screw rod is driven to rotate through the driving mechanism, the L-shaped connecting plate is limited in rotation through the limiting part, and the L-shaped connecting plate cannot rotate, so that the supporting plate and the threaded cylinder cannot rotate along with the screw rod, the threaded cylinder slides downwards gradually along the screw rod, the supporting plate drives the tray and the sealing plate to descend, and the tray descends between the two heating plates.

Description

Diamond single crystal growth device
Technical Field
The invention relates to the technical field of diamond single crystal growth equipment, in particular to a diamond single crystal growth device.
Background
Diamond, commonly known as "diamond" is a mineral composed of carbon elements, is an allotrope of graphite, has the chemical formula C, and is also the original body of common diamond, and diamond is the hardest substance naturally occurring in nature, and graphite can form artificial diamond under high temperature and high pressure, and the diamond has a wide range of applications, for example: artware, cutting tools in industry, and is also a precious gem.
Current diamond single crystal growth equipment is when using, and most directness is fixed with graphite and is placed inside equipment, and the chamber door is opened when leading to graphite processing to accomplish the back and taking the change, and the inside temperature of equipment can a large amount of losses overflow, causes the waste of energy, is unfavorable for the continuous processing use of equipment, and graphite is simply fixed placing inside equipment usually, can't be better guarantee graphite can thermally equivalent, reduces the quality of product easily.
Disclosure of Invention
The invention aims to provide a diamond single crystal growth device, and aims to solve the problems that in the prior art, when graphite is taken and replaced after being processed, a box door is opened, the temperature in equipment is greatly lost and overflows, and when the graphite is taken and replaced after being processed, the graphite is usually simply and fixedly placed in the equipment, so that the graphite can not be well guaranteed to be uniformly heated.
In order to achieve the purpose, the invention adopts the following technical scheme: the diamond single crystal growth device comprises: the graphite box comprises a box body, wherein a feeding box is fixedly connected to the top of the box body, a circular groove communicated with the feeding box is formed in the top of the box body, a supporting plate is arranged inside the circular groove, a tray for placing graphite is arranged on the top of the supporting plate, a sealing plate positioned right above the tray is arranged on the top of the supporting plate, a supporting table is fixedly connected to the bottom of the box body, a lead screw is rotatably connected to the top of the supporting table, a threaded cylinder fixed to the bottom of the supporting plate is in threaded connection with the outside of the lead screw, a driving mechanism for driving the lead screw to rotate is arranged at the bottom end of the lead screw, two L-shaped connecting plates which are symmetrically distributed are fixedly connected to the bottom of the supporting plate, a limiting component for limiting the rotation of the L-shaped connecting plates is arranged on one side of each L-shaped connecting plate, two heating plates which are symmetrically distributed along the axis of the circular groove are fixedly connected to the top of the box body, and a pressurizing pipe is arranged on the side wall of the box body, and a pressure relief pipe is arranged on the other side of the box body.
In order to enable the invention to have a better effect of driving the screw rod to rotate, the invention adopts the further technical scheme that the driving mechanism is a forward and reverse rotating motor fixedly arranged in the support platform, and the output end of the forward and reverse rotating motor is fixedly connected with the screw rod.
In order to enable the invention to have a better limiting effect on the L-shaped connecting plates, the invention has the further technical scheme that the limiting component comprises an electric telescopic rod fixedly arranged on the side wall of the box body, the output end of the electric telescopic rod is fixedly connected with a vertical rod positioned on one side of one of the L-shaped connecting plates, the top wall and the bottom wall of the box body are respectively provided with two symmetrically distributed sliding grooves, and two ends of the vertical rod are respectively connected inside the two sliding grooves in a sliding manner.
In order to enable the pressure relief pipe to have a good pressure relief adjusting effect, the further technical scheme is that an adjusting valve is arranged inside the pressure relief pipe.
In order to improve the sealing effect of the equipment, the top of the supporting plate is fixedly connected with a vertical plate, the top end of the vertical plate is fixedly connected to the bottom of the sealing plate, and the supporting plate, the sealing plate and the circular groove are equal in shape and size.
In order to enable the feeding box to have a good effect of observing the interior, the feeding box has the further technical scheme that a box door is connected to one side of the feeding box, and an observation window is arranged in the box door.
In order to enable the graphite cooling device to have the function of quickly cooling graphite, the graphite cooling device has the further technical scheme that a servo motor is fixedly installed on the side wall of the feeding box, the output end of the servo motor is fixedly connected with fan blades located inside the feeding box, and a plurality of air holes which are distributed at equal intervals are formed in the side wall of the feeding box.
The invention has the beneficial effects that:
1. when the invention is used, graphite is fixedly placed in the tray, the screw rod is driven to rotate by the driving mechanism, the L-shaped connecting plate is limited in rotation by the limiting part and cannot rotate, so that the supporting plate and the threaded cylinder cannot rotate along with the screw rod, the threaded cylinder slides downwards along the screw rod gradually, the supporting plate drives the tray and the sealing plate to descend, the tray descends to a position between the two heating plates, the sealing plate enters the circular groove to be sealed, gas is introduced into the box body through the pressurizing pipe to pressurize, the graphite in the tray is heated from two sides through the two heating plates, the limiting part is adjusted to relieve the limitation on the L-shaped connecting plate while heating, the threaded cylinder is changed from moving along the screw rod to rotating along with the screw rod, the graphite is driven to rotate and heat between the two heating plates, the graphite is better uniformly heated, and the heating effect of the heating plates on the graphite is improved, the quality of the product is improved, after processing is accomplished, drive lead screw antiport through actuating mechanism, it is spacing to L shape even board is rotated to adjust stop part once more, make the screw thread section of thick bamboo along the lead screw lifting, deliver tray and graphite to the feeding incasement, and make the backup pad get into the circular slot inside and seal it, thereby better graphite to processing the completion is changed, the inside temperature of equipment runs off in a large number when effectual having avoided graphite to change, cause the loss of energy, make the equipment can be better last processing use, and the production cost is saved, facilitate for the user.
2. When the graphite feeding box is used, the servo motor, the fan blades and the air holes are matched, after graphite is processed and sent out to the interior of the feeding box, the fan blades are driven to rotate through the servo motor, the graphite is rapidly cooled, hot air in the graphite can be rapidly discharged from the air holes, workers are effectively prevented from being scalded due to overhigh temperature of the graphite, the safety coefficient of equipment use is improved, and the practicability of the equipment is enhanced.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the present invention.
Fig. 2 is a front view of an embodiment of the present invention.
Fig. 3 is a cross-sectional view of an embodiment of the present invention.
Fig. 4 is a sectional view showing an operation state of the embodiment of the present invention.
Fig. 5 is a schematic structural diagram of a support plate according to an embodiment of the present invention.
In the figure: 1. a box body; 2. a feeding box; 3. a limiting component; 31. an electric telescopic rod; 32. a vertical rod; 4. a circular groove; 5. a support plate; 6. a tray; 7. a sealing plate; 8. a support table; 9. a screw rod; 10. a threaded barrel; 11. an L-shaped connecting plate; 12. heating plates; 13. a pressure increasing pipe; 14. a pressure relief pipe; 15. a positive and negative rotation motor; 16. a chute; 17. adjusting a valve; 18. a vertical plate; 19. a box door; 20. an observation window; 21. a servo motor; 22. a fan blade; 23. and (4) air holes.
Detailed Description
The following further describes embodiments of the present invention with reference to the drawings.
As shown in fig. 1 to 5, a diamond single crystal growth apparatus includes: the box body 1, the top of the box body 1 is fixedly connected with a feeding box 2, the top of the box body 1 is provided with a circular groove 4 communicated with the feeding box 2, the inside of the circular groove 4 is provided with a supporting plate 5, the top of the supporting plate 5 is provided with a tray 6 for placing graphite, the top of the supporting plate 5 is provided with a sealing plate 7 positioned right above the tray 6, the bottom of the box body 1 is fixedly connected with a supporting table 8, the top of the supporting table 8 is rotatably connected with a screw rod 9, the outer part of the screw rod 9 is in threaded connection with a threaded cylinder 10 fixed at the bottom of the supporting plate 5, the bottom of the screw rod 9 is provided with a driving mechanism for driving the screw rod to rotate, the bottom of the supporting plate 5 is fixedly connected with two L-shaped connecting plates 11 which are symmetrically distributed, one side of the L-shaped connecting plate 11 is provided with a limiting part 3 for limiting the rotation of the L-shaped connecting plate, the top of the box body 1 is fixedly connected with two heating plates 12 which are symmetrically distributed along the axis of the circular groove 4, the side wall of the box body 1 is provided with a pressure increasing pipe 13, and the other side of the box body 1 is provided with a pressure releasing pipe 14.
In this embodiment, graphite is fixedly placed inside the tray 6, the screw rod 9 is driven to rotate by the driving mechanism, the L-shaped connecting plate 11 is limited by the limiting component 3 to rotate and cannot rotate, so that the supporting plate 5 and the threaded cylinder 10 cannot rotate along with the screw rod 9, the threaded cylinder 10 gradually slides downwards along the screw rod 9, the supporting plate 5 drives the tray 6 and the sealing plate 7 to descend, the tray 6 descends to a position between the two heating plates 12, the sealing plate 7 enters the circular groove 4 to be sealed, gas is introduced into the box body 1 through the pressurizing pipe 13 to pressurize, the graphite in the tray 6 is heated from two sides through the two heating plates 12, the limiting component 3 is adjusted to relieve the limitation on the L-shaped connecting plate 11 while heating, the threaded cylinder 10 is changed from moving along the screw rod 9 to rotating along with the screw rod 9, and the graphite is driven to rotate and heat between the two heating plates 12, better messenger's graphite thermally equivalent, improve the heating effect of hot plate 12 to graphite, improve the quality of product, after processing is accomplished, drive lead screw 9 antiport through actuating mechanism, it is spacing to adjust spacing part 3 again and rotate L shape even board 11, make screw thread section of thick bamboo 10 along lead screw 9 lifting, send tray 6 and graphite to feeding box 2 in, and make backup pad 5 get into 4 insides of circular slot and seal it, thereby better graphite to processing completion is changed, the inside temperature of equipment runs off in a large number when the effectual graphite of having avoided is changed, cause the loss of energy, make the equipment can be better carry out continuous processing and use, practice thrift manufacturing cost, facilitate for the user.
Specifically, the driving mechanism is a forward and reverse rotating motor 15 fixedly installed inside the supporting table 8, the output end of the forward and reverse rotating motor 15 is fixedly connected with the screw rod 9, and the screw rod 9 is driven to rotate forward or reversely through the forward and reverse rotating motor 15.
Specifically, spacing part 3 includes electric telescopic handle 31 of fixed mounting at the 1 lateral wall of box, and electric telescopic handle 31's output fixedly connected with is located the montant 32 of one of them L shape even board 11 one side, blocks L shape even board 11 by one side through montant 32, and it rotates to better restriction, drives montant 32 through electric telescopic handle 31 shrink and removes and break away from L shape even board 11, can remove to its rotation spacing.
Furthermore, the top wall and the bottom wall of the box body 1 are respectively provided with two symmetrically distributed sliding grooves 16, two ends of the vertical rod 32 are respectively connected inside the two sliding grooves 16 in a sliding manner, and the vertical rod 32 is matched with the sliding grooves 16 to better stop the rotating L-shaped connecting plate 11.
Specifically, the pressure release pipe 14 is provided with a regulating valve 17 inside, and pressure is preferably released from the pressure release pipe 14 through the regulating valve 17.
Specifically, the top fixedly connected with riser 18 of backup pad 5, the top fixed connection of riser 18 is in the bottom of closing plate 7, makes the better closing plate 7 that drags of backup pad 5 go up and down through riser 18.
Preferably, the support plate 5, the sealing plate 7 and the circular groove 4 are all equal in shape and size.
Preferably, a box door 19 is connected to one side of the feeding box 2, an observation window 20 is arranged inside the box door 19, and the box door 19 and the observation window 20 can better seal the feeding box 2 and observe the inside of the feeding box.
Preferably, lateral wall fixed mounting of feeding case 2 has servo motor 21, servo motor 21's output fixedly connected with is located feeding case 2 inside flabellum 22, a plurality of equidistance distributions's gas pocket 23 is seted up to feeding case 2 lateral walls, through servo motor 21, flabellum 22 and gas pocket 23's cooperation sets up, accomplish the inside back of seeing off to feeding case 2 at graphite processing, drive flabellum 22 through servo motor 21 and rotate, quick cooling to graphite, make inside hot-air can be discharged by gas pocket 23 fast, the effectual too high staff that scalds of graphite temperature of avoiding, the factor of safety that improves equipment uses, the practicality of reinforcing equipment.
In the description of the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims (9)

1. A diamond single crystal growth apparatus comprising: the box body (1) is characterized in that a feeding box (2) is fixedly connected to the top of the box body (1), a circular groove (4) communicated with the feeding box (2) is formed in the top of the box body (1), a supporting plate (5) is arranged inside the circular groove (4), a tray (6) for placing graphite is arranged on the top of the supporting plate (5), a sealing plate (7) located right above the tray (6) is arranged on the top of the supporting plate (5), a supporting table (8) is fixedly connected to the bottom of the box body (1), a lead screw (9) is rotatably connected to the top of the supporting table (8), a threaded cylinder (10) fixed to the bottom of the supporting plate (5) is in threaded connection with the outside of the lead screw (9), a driving mechanism for driving the lead screw (9) to rotate is arranged at the bottom of the lead screw, two L-shaped connecting plates (11) which are symmetrically distributed are fixedly connected to the bottom of the supporting plate (5), one side of the L-shaped connecting plate (11) is provided with a limiting part (3) for limiting the rotation of the L-shaped connecting plate, the top of the box body (1) is fixedly connected with two heating plates (12) which are symmetrically distributed along the axis of the circular groove (4), the side wall of the box body (1) is provided with a pressure increasing pipe (13), and the other side of the box body (1) is provided with a pressure releasing pipe (14).
2. The diamond single crystal growth device according to claim 1, characterized in that the driving mechanism is a forward and reverse rotation motor (15) fixedly arranged inside the support platform (8), and the output end of the forward and reverse rotation motor (15) is fixedly connected with the screw rod (9).
3. The diamond single crystal growth device according to claim 1, wherein the limiting component (3) comprises an electric telescopic rod (31) fixedly arranged on the side wall of the box body (1), and the output end of the electric telescopic rod (31) is fixedly connected with a vertical rod (32) positioned on one side of one L-shaped connecting plate (11).
4. The diamond single crystal growth device according to claim 3, wherein the top wall and the bottom wall of the box body (1) are respectively provided with two symmetrically distributed sliding grooves (16), and two ends of the vertical rod (32) are respectively connected inside the two sliding grooves (16) in a sliding manner.
5. The diamond single crystal growth apparatus according to claim 1, characterized in that the inside of the pressure relief pipe (14) is provided with a regulating valve (17).
6. The diamond single crystal growth device according to claim 1, wherein a riser (18) is fixedly connected to the top of the support plate (5), and the top end of the riser (18) is fixedly connected to the bottom of the sealing plate (7).
7. Diamond single crystal growth device according to claim 1, characterized in that the shape and size of the support plate (5), the sealing plate (7) and the circular groove (4) are all equal.
8. The diamond single crystal growth apparatus according to claim 1, wherein a box door (19) is connected to one side of the feeding box (2), and an observation window (20) is provided inside the box door (19).
9. The diamond single crystal growth device according to any one of claims 1 to 8, wherein a servo motor (21) is fixedly installed on the side wall of the feeding box (2), the output end of the servo motor (21) is fixedly connected with fan blades (22) positioned inside the feeding box (2), and a plurality of air holes (23) are formed in the side wall of the feeding box (2) and are distributed at equal intervals.
CN202210320445.2A 2022-03-29 2022-03-29 Diamond single crystal growing device Active CN114686980B (en)

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CN114686980B CN114686980B (en) 2024-03-26

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Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07172975A (en) * 1993-12-20 1995-07-11 Mitsubishi Materials Corp Raw material incorporation method for single crystal pulling up device and apparatus therefor
US6048813A (en) * 1998-10-09 2000-04-11 Cree, Inc. Simulated diamond gemstones formed of aluminum nitride and aluminum nitride: silicon carbide alloys
CN105568370A (en) * 2016-03-01 2016-05-11 山东大学 Centrally symmetric silicon carbide (SiC) single crystal growing device and method
CN110714225A (en) * 2019-10-31 2020-01-21 长沙新材料产业研究院有限公司 Diamond growth tray and system
CN211170964U (en) * 2019-07-04 2020-08-04 常州宝颐金刚石科技有限公司 Diamond single crystal growth device
CN211170963U (en) * 2019-07-04 2020-08-04 常州宝颐金刚石科技有限公司 Seed crystal tray for producing diamond single crystal
CN111945216A (en) * 2020-07-16 2020-11-17 大同新成新材料股份有限公司 Ultra-high-purity graphite thermal field of semiconductor-grade straight-pull monocrystalline silicon furnace
CN112795988A (en) * 2020-12-29 2021-05-14 浙江中电环境科技有限公司 Single crystal furnace for producing silicon carbide semiconductor
CN213417071U (en) * 2020-10-13 2021-06-11 修武县鑫锐超硬材料有限公司 Diamond single crystal growth device
CN113463065A (en) * 2021-06-17 2021-10-01 湖南良诚新材料科技有限公司 Equipment for chemical vapor deposition of diamond

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07172975A (en) * 1993-12-20 1995-07-11 Mitsubishi Materials Corp Raw material incorporation method for single crystal pulling up device and apparatus therefor
US6048813A (en) * 1998-10-09 2000-04-11 Cree, Inc. Simulated diamond gemstones formed of aluminum nitride and aluminum nitride: silicon carbide alloys
CN105568370A (en) * 2016-03-01 2016-05-11 山东大学 Centrally symmetric silicon carbide (SiC) single crystal growing device and method
CN211170964U (en) * 2019-07-04 2020-08-04 常州宝颐金刚石科技有限公司 Diamond single crystal growth device
CN211170963U (en) * 2019-07-04 2020-08-04 常州宝颐金刚石科技有限公司 Seed crystal tray for producing diamond single crystal
CN110714225A (en) * 2019-10-31 2020-01-21 长沙新材料产业研究院有限公司 Diamond growth tray and system
CN111945216A (en) * 2020-07-16 2020-11-17 大同新成新材料股份有限公司 Ultra-high-purity graphite thermal field of semiconductor-grade straight-pull monocrystalline silicon furnace
CN213417071U (en) * 2020-10-13 2021-06-11 修武县鑫锐超硬材料有限公司 Diamond single crystal growth device
CN112795988A (en) * 2020-12-29 2021-05-14 浙江中电环境科技有限公司 Single crystal furnace for producing silicon carbide semiconductor
CN113463065A (en) * 2021-06-17 2021-10-01 湖南良诚新材料科技有限公司 Equipment for chemical vapor deposition of diamond

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