CN114678312A

CN114678312A - Semiconductor device, semiconductor transport system, and semiconductor transport method

Info

Publication number: CN114678312A
Application number: CN202210303249.4A
Authority: CN
Inventors: 沈世帅
Original assignee: Changxin Memory Technologies Inc
Current assignee: Changxin Memory Technologies Inc
Priority date: 2022-03-25
Filing date: 2022-03-25
Publication date: 2022-06-28

Abstract

The present disclosure provides a semiconductor device, a semiconductor transportation system, and a semiconductor transportation method. Semiconductor device sets up between overhead traveling crane body and track, and semiconductor device includes two strutting arrangement along presetting the direction interval and setting up, and each strutting arrangement includes: the base body is used for being connected with the crown block body; the supporting component is arranged on the seat body in a lifting manner, and the supporting device is provided with a supporting position and a resetting position, wherein the supporting component is lifted to be in contact with the track, and the supporting component is lowered to be separated from the track; the supporting assembly comprises a connecting structure and a wheel body, the connecting structure is connected with the seat body, and the wheel body is rotatably connected with the connecting structure; when the supporting device is in the supporting position, the wheel body is in contact with the track; the preset direction and the running direction of the crown block body form an included angle. The lateral stable supporting device effectively solves the problem that the labor intensity of workers is increased for the resetting of the lateral stable supporting device in the prior art.

Description

Semiconductor device, semiconductor transportation system and semiconductor transportation method

Technical Field

The disclosure relates to the technical field of semiconductors, in particular to a semiconductor device, a semiconductor transportation system and a semiconductor transportation method.

Background

In an automatic material handling system in a semiconductor integrated circuit, an automated overhead traveling crane (OHT) lateral stable support device (Outrigger) is used for maintaining balance and stability of the overhead traveling crane when the overhead traveling crane performs left and right side pick-and-place. Wherein the OHT lateral stabilizing support device has a support position and a reset position.

However, in the long-term use process of the OHT lateral stable supporting device, there is a phenomenon that the OHT lateral stable supporting device cannot be automatically reset due to abnormality, and at this time, a lift car or an elevated platform is required to ascend, a cover plate of the OHT lateral stable supporting device is manually removed, and a motor is manually rotated, so that the OHT lateral stable supporting device is reset. However, the above-mentioned resetting manner increases the labor intensity of the worker and wastes manpower.

Disclosure of Invention

The main objective of the present disclosure is to provide a semiconductor device, a semiconductor transportation system and a semiconductor transportation method, so as to solve the problem in the prior art that the labor intensity of workers is increased for the resetting of a lateral stable supporting device.

In order to achieve the above object, according to one aspect of the present disclosure, there is provided a semiconductor apparatus disposed between a crown block body and a rail, the semiconductor apparatus including two supporting devices disposed at an interval in a preset direction, each of the supporting devices including: the base body is used for being connected with the crown block body; the supporting component is arranged on the seat body in a lifting manner, and the supporting device is provided with a supporting position and a resetting position, wherein the supporting component is lifted to be in contact with the track, and the supporting component is lowered to be separated from the track; the supporting assembly comprises a connecting structure and a wheel body, the connecting structure is connected with the seat body, and the wheel body is rotatably connected with the connecting structure; when the supporting device is in the supporting position, the wheel body is in contact with the track; the preset direction and the running direction of the crown block body form an included angle.

Further, the supporting device further comprises: the reset structure is arranged on the base body and used for applying reset force moving towards the crown block body to the connecting structure so that the supporting device moves to the reset position from the supporting position.

Further, the supporting device further comprises: a drive structure; the driving structure is in driving connection with the cam so as to drive the cam to rotate; wherein, the outer peripheral face of cam contacts with connection structure to drive connection structure and carry out the elevating movement.

Further, the connection structure includes: the wheel body is arranged on at least one end of the connecting rod; and the rotating body is rotatably arranged in the middle of the connecting rod, and the outer peripheral surface of the rotating body is in contact with the outer peripheral surface of the cam.

Furthermore, the connecting structure also comprises a connecting shaft, and the connecting shaft is arranged in the middle of the connecting rod; the rotating body is a bearing, the outer ring of the bearing is in contact with the outer peripheral surface of the cam, and the inner ring of the bearing is sleeved on the connecting shaft and is in rotation stopping fit with the connecting shaft.

Further, the pedestal includes the bracing piece, and the connecting rod has the via hole, and the bracing piece is worn to establish in the via hole to make the connecting rod carry out elevating movement along the bracing piece.

Furthermore, one supporting rod is arranged; or the supporting rods are arranged at intervals along the running direction of the crown block body.

Furthermore, the reset structure is a spring which is sleeved outside the support rod and is positioned above the connecting rod; wherein, the bracing piece has the spacing convex part that is located outside the via hole, and the spring is located between spacing convex part and the connecting rod.

Further, the supporting device further comprises: the first limit sensor is used for detecting the position of the support component; when the first limit sensor detects that the supporting component descends to the reset position, the driving structure is controlled to stop running.

Further, the supporting device further comprises: the second limit sensor is used for detecting the position of the supporting component; when the second limit sensor detects that the supporting component rises to the supporting position, the driving structure is controlled to stop running.

Furthermore, the semiconductor equipment also comprises a connecting shaft, and the driving structure is in driving connection with the cam through the connecting shaft; the support assembly further includes: the first limiting component is arranged on the connecting rod or the connecting shaft, and the first limiting sensor is used for detecting the position of the first limiting component; the second limiting component is arranged on the connecting rod or the connecting shaft, the second limiting component and the first limiting component are arranged oppositely, and the second limiting sensor is used for detecting the position of the second limiting component.

Further, the support rod includes: a support rod body; one end of the locking component is locked on the supporting rod body, and the spring is sleeved on the other end of the locking component.

Further, the driving structure includes: a drive body; the driving end is arranged on the driving body and is in driving connection with the cam; and the controller is electrically connected with the driving body and is used for controlling the driving end to rotate.

According to another aspect of the present disclosure, there is provided a semiconductor transportation system including a crown block body, a rail along which the crown block body is slidable, and a semiconductor device disposed between the rail and the crown block body; wherein the semiconductor device is the above semiconductor device.

Furthermore, the crown block body has a goods taking and placing state and a running state, when the semiconductor equipment normally runs, the supporting device of the semiconductor equipment is at a supporting position when the crown block body is in the goods taking and placing state, and the supporting device of the semiconductor equipment is at a resetting position when the crown block body is in the running state; the semiconductor transport system further comprises: the control system is in communication connection with a controller of the semiconductor equipment; the terminal equipment is connected with the control system; after the crown block body is switched to the running state from the goods taking and placing state, if the supporting component of the semiconductor equipment is continuously located at the supporting position, the terminal equipment sends a signal to the control system so as to control the crown block body to be continuously located at the running state through the control system.

According to another aspect of the present disclosure, there is provided a semiconductor transportation method, which is suitable for the semiconductor transportation system, the semiconductor transportation method including:

judging whether a supporting device of semiconductor equipment of the semiconductor transportation system breaks down or not, inputting a preset signal to terminal equipment of the semiconductor transportation system according to the running condition of the supporting device, and controlling the crown block body to be in a running state after a control system of the semiconductor transportation system receives the preset signal; the operation condition includes normal operation and failure to reset.

Furthermore, the preset signal comprises a shielding signal, and the shielding signal is that the supporting device cannot be reset; the method for controlling the crown block body to be in the running state after the control system of the semiconductor transportation system receives the preset signal comprises the following steps: when the preset signal is the shielding signal, the control system receives the shielding signal and then controls the crown block body to be in a running state.

Use this disclosed technical scheme, each strutting arrangement sets up along predetermineeing the direction interval, and strutting arrangement's supporting component includes connection structure and wheel body, and connection structure sets up with the liftable, and the wheel body rotationally is connected with connection structure to realize strutting arrangement's support and reset. Like this, when strutting arrangement is in the support position and can't reset, because the wheel body rotationally set up and with the track between form rolling friction pair to make the overhead traveling crane body still can travel along the track, the staff need not to carry out artifical the reseing to strutting arrangement this moment, and then solved among the prior art to the side direction steady support device reset the problem that has increased staff intensity of labour, reduced staff's intensity of labour.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate exemplary embodiments of the disclosure and, together with the description, serve to explain the disclosure and not to limit the disclosure. In the drawings:

fig. 1 shows a schematic perspective view of an embodiment of a semiconductor device according to the present disclosure in a support position;

fig. 2 shows a schematic perspective view of the semiconductor device of fig. 1 in a reset position;

fig. 3 shows a top view of the semiconductor device of fig. 1;

FIG. 4 illustrates a front view of a left side pick and place cargo according to an embodiment of the transport system of the present disclosure; and

fig. 5 shows a front view of the transport system of fig. 4 with right-side access to the goods.

Wherein the figures include the following reference numerals:

10. a crown block body; 20. a track; 30. a support device; 31. a base body; 311. a support bar; 32. a support assembly; 321. a connecting structure; 3211. a connecting rod; 3212. a rotating body; 3213. a connecting shaft; 322. a wheel body; 323. a first limit member; 324. a second limiting component; 33. a reset structure; 34. a drive structure; 35. a cam; 36. a first limit sensor; 37. a second limit sensor; 40. goods; 50. a locking member; 60. and (7) connecting the shafts.

Detailed Description

It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present disclosure will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.

It is noted that, unless otherwise indicated, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

In the present disclosure, unless stated to the contrary, use of the directional terms "upper and lower" are generally with respect to the orientation shown in the drawings, or with respect to the vertical, or gravitational direction; likewise, for ease of understanding and description, "left and right" are generally to the left and right as shown in the drawings; "inner and outer" refer to the inner and outer relative to the profile of the components themselves, but the above directional words are not intended to limit the disclosure.

In order to solve the problem that the labor intensity of workers is increased for the reset of a lateral stable supporting device in the prior art, the application provides a semiconductor transportation system and a semiconductor transportation method.

As shown in fig. 1 to 5, the semiconductor device is disposed between the crown block body 10 and the rail 20, the semiconductor device includes two supporting devices 30 disposed at intervals along a predetermined direction, and each supporting device 30 includes a seat body 31 and a supporting assembly 32. The seat body 31 is used for connecting with the crown block body 10. The supporting member 32 is liftably provided on the base body 31, and the supporting device 30 has a supporting position where the supporting member 32 is raised to be in contact with the rail 20 and a returning position where the supporting member 32 is lowered to be separated from the rail 20. The supporting assembly 32 includes a connecting structure 321 and a wheel body 322, the connecting structure 321 is connected with the seat 31, and the wheel body 322 is rotatably connected with the connecting structure 321; when the supporting device 30 is in the supporting position, the wheel body 322 is in contact with the track 20. The preset direction and the traveling direction of the crown block body 10 form an included angle.

By applying the technical solution of this embodiment, each supporting device 30 is disposed at intervals along the preset direction, and the supporting assembly 32 of the supporting device 30 includes a connecting structure 321 and a wheel body 322, the connecting structure 321 is disposed in a liftable manner, and the wheel body 322 is rotatably connected with the connecting structure 321 to support and reposition the supporting device 30. Like this, when strutting arrangement 30 was in the support position and can't reset, because wheel body 322 rotationally sets up and form the rolling friction pair between the track 20 to make overhead traveling crane body 10 still can travel along track 20, the staff need not to carry out manual reset to strutting arrangement 30 this moment, and then has solved among the prior art to the problem that has increased staff intensity of labour to the resetting of side direction stabilizing support device, has reduced staff's intensity of labour.

In this embodiment, two strutting arrangement 30 are located the left and right sides of overhead traveling crane body 10 respectively, and compare in the fore-and-aft direction that two strutting arrangement 30 are located overhead traveling crane body 10, even strutting arrangement 30 breaks down and can't automatic re-setting, can not influence the normal driving of overhead traveling crane yet, and then need not the manual work and reset strutting arrangement 30, has reduced staff's intensity of labour.

As shown in fig. 1 and 2, the supporting device 30 further includes a restoring structure 33. Wherein, the reset structure 33 is disposed on the seat body 31, and the reset structure 33 is used for applying a reset force to the connecting structure 321, which moves towards the crown block body 10, so as to move the supporting device 30 from the supporting position to the reset position. In this way, the automatic resetting of the supporting device 30 can be realized through the resetting structure 33, so as to ensure that the supporting device 30 can be automatically switched between the supporting position and the resetting position, and further improve the intelligence degree of the supporting device 30.

Specifically, when the overhead traveling crane takes a load on the left side thereof, the supporting device 30 on the side away from the load among the two supporting devices 30 is controlled to be in the supporting position to support the right side of the overhead traveling crane, and the supporting device 30 near the load is controlled to be in the reset position to ensure that the overhead traveling crane can travel smoothly. When the right side of overhead traveling crane gets goods, keep away from among two strutting arrangement 30 that goods one side is in the supporting position to support the left side of overhead traveling crane, controlling strutting arrangement 30 that is close to the goods is in the position that resets, and then has promoted strutting arrangement 30's support reliability.

As shown in fig. 1-3, the support device 30 further includes a drive structure 34 and a cam 35. Wherein the driving structure 34 is in driving connection with the cam 35 to drive the cam 35 to rotate. The outer peripheral surface of the cam 35 contacts the connecting structure 321 to drive the connecting structure 321 to move up and down. In this way, the lifting movement of the connecting structure 321 and thus the lifting movement of the wheel body 322 is realized through the rotation of the cam 35, so that the supporting device 30 can be freely switched between the supporting position and the reset position, and the processing cost of the supporting device 30 is further reduced.

Alternatively, the driving mechanism 34 is a motor, and a motor shaft of the motor is drivingly connected to the cam 35 to rotate the cam 35. Thus, when the cam 35 rotates to the maximum radial direction of the cam to contact with the connecting structure 321, and at this time, the connecting structure 321 and the wheel body 322 are at the highest position, the supporting device 30 is at the supporting position; when the cam 35 rotates to the minimum radial direction of the cam to contact with the connecting structure 321, and the connecting structure 321 and the wheel body 322 are at the lowest position, the supporting device 30 is at the reset position. In this way, the driving structure 34 drives the cam 35 to rotate, so that the supporting device 30 can be switched between the supporting position and the reset position, and further, the control of the supporting device 30 by a worker is easier and simpler, and the control difficulty is reduced.

As shown in fig. 1 to 3, the connection structure 321 includes a connection rod 3211 and a rotating body 3212. Wherein the wheel body 322 is disposed on at least one end of the connecting rod 3211. The rotating body 3212 is rotatably provided at the middle of the connecting rod 3211, and the outer circumferential surface of the rotating body 3212 contacts the outer circumferential surface of the cam 35. Thus, the arrangement makes the kinematic pair between the connecting structure 321 and the cam 35 be a rolling friction pair, thereby reducing the structural wear of the supporting device 30 and the rail 20 and prolonging the service life of the overhead travelling crane and the semiconductor equipment.

Specifically, there are two wheel bodies 322, the two wheel bodies 322 are respectively disposed at two ends of the connecting rod 3211, and the rotating body 3212 is located between the two wheel bodies 322. The peripheral surface of the rotating body 3212 is a torus, and the torus contacts with the peripheral surface of the cam 35, so that the kinematic pair between the connecting structure 321 and the cam 35 is a rolling friction pair, and further the structural wear of the semiconductor device and the rail 20 is reduced.

In this embodiment, the distance between the pivot axis of the rotating body 3212 and the rotation axis of each wheel body 322 is the same, so that the supporting forces of the two wheel bodies 322 on the track 20 are the same, and the supporting stability of the supporting device 30 on the track 20 is further improved.

The number of the wheels 322 is not limited to this, and may be adjusted according to the working condition and the use requirement. Optionally, the wheels 322 are one, or three, or four, or more.

As shown in fig. 1 and 2, the connecting structure 321 further includes a connecting shaft 3213, and the connecting shaft 3213 is disposed in the middle of the connecting rod 3211. The rotating body 3212 is a bearing, an outer ring of the bearing contacts an outer peripheral surface of the cam 35, and an inner ring of the bearing is sleeved on the connecting shaft 3213 and is in rotation stopping fit with the connecting shaft 3213. Thus, the above arrangement reduces the processing cost of the rotor 3212, and thus reduces the overall processing cost of the semiconductor device.

Specifically, the inner ring of the bearing is in rotation-stop fit with the connecting shaft 3213, so that a kinematic pair between the outer ring of the bearing and the cam 35 is prevented from being converted from a rolling friction pair to a sliding friction pair due to relative rotation between the inner ring of the bearing and the connecting shaft 3213, and structural wear of the semiconductor device and the rail 20 is further reduced. Meanwhile, the central axis of the bearing and the central axis of the cam 35 are arranged in parallel to each other and above the central axis of the cam 35.

In this embodiment, the inner ring of the bearing is fixedly connected with the connecting shaft 3213, so that on one hand, the rotation stop fit between the inner ring and the connecting shaft 3213 is realized; on the other hand, the bearing is prevented from falling off from the connecting shaft 3213 to affect the supporting reliability of the supporting device 30.

As shown in fig. 1 and 2, the base 31 includes a support rod 311, the connection rod 3211 has a through hole, and the support rod 311 is disposed in the through hole in a penetrating manner, so that the connection rod 3211 moves up and down along the support rod 311. Thus, the arrangement improves the lifting reliability of the connecting structure 321, so as to ensure that the wheel body 322 can be switched between the supporting position and the resetting position, and also reduce the processing cost of the seat body 31.

Specifically, the support rod 311 is an L-shaped rod, the L-shaped rod includes a first rod body and a second rod body connected to each other, the first rod body and the second rod body are perpendicular to each other, the first rod body is connected to the crown block body 10, and the second rod body is inserted into the through hole. The extending direction of the second rod is the same as the height direction, so as to ensure that the connecting structure 321 and the wheel body 322 can perform lifting motion along the second rod.

Optionally, there is one support bar 311; alternatively, the number of the support rods 311 is plural, and the plurality of support rods 311 are provided at intervals along the traveling direction of the crown block body 10. Like this, above-mentioned setting makes the number of bracing piece 311 select more in a flexible way to satisfy different user demand and operating mode, also promoted staff's processing flexibility.

In the present embodiment, two of the support rods 311, the two support rods 311 are respectively located at both sides of the cam 35. Thus, the above arrangement not only improves the supporting reliability of the supporting rod 311, but also improves the overall structural stability of the supporting device 30.

It should be noted that the number of the support rods 311 is not limited to this, and can be adjusted according to the working condition and the use requirement. Optionally, the number of the supporting rods 311 is three, or four, or more.

As shown in fig. 1 and fig. 2, the restoring structure 33 is a spring, and the spring is sleeved outside the supporting rod 311 and located above the connecting rod 3211. The supporting rod 311 has a limiting protrusion located outside the via hole, and the spring is located between the limiting protrusion and the connecting rod 3211. Thus, the arrangement reduces the processing cost of the reset structure 33 on one hand, and further reduces the overall processing cost of the semiconductor device; on the other hand, the spring is limited and stopped by the limiting convex part, so that the spring is prevented from being separated from the support rod 311 to influence the resetting reliability.

In this embodiment, the spring is sleeved on the second rod, and the end of the second rod has a limiting protrusion to limit and stop the first end of the spring by the limiting protrusion. Wherein, the second end of the spring abuts against the connecting rod 3211 to apply an elastic restoring force to the connecting rod 3211.

In the present embodiment, the number of the springs is two, and the two springs are disposed in one-to-one correspondence with the two support rods 311.

It should be noted that the number of the springs is not limited to this, and can be adjusted according to the working condition and the use requirement. Alternatively, the number of the springs is the same as the number of the support rods 311.

As shown in fig. 3, the support device 30 further includes a first limit sensor 36. The first limit sensor 36 is used to detect the position of the support assembly 32. Wherein, when the first limit sensor 36 detects that the support assembly 32 is lowered to the reset position, the driving structure 34 is controlled to stop operating. Thus, during the operation of the supporting device 30, the position of the supporting assembly 32 is detected by the first limit sensor 36, and when the supporting assembly 32 is detected to be lowered to the reset position, the control system is controlled to stop the operation of the driving structure 34, so that the supporting device 30 is at the reset position.

Specifically, the first limit sensor 36 is configured to detect whether the connection structure 321 moves to a low position, and when detecting that the connection structure 321 descends to the low position, the control system controls the driving structure 34 to stop operating, so that the supporting device 30 stays at the reset position, and the reset of the supporting device 30 is further achieved.

As shown in fig. 3, the supporting device 30 further includes a second limit sensor 37. The second limit sensor 37 is used to detect the position of the support member 32. When the second limit sensor 37 detects that the support assembly 32 is lifted to the support position, the driving structure 34 is controlled to stop operating. In this way, during the operation of the supporting device 30, the position of the supporting component 32 is detected by the second limit sensor 37, and when the supporting component 32 is detected to be lifted to the supporting position, the control system controls the driving structure 34 to stop operating, so that the supporting device 30 is at the supporting position.

Specifically, the second limit sensor 37 is configured to detect whether the connection structure 321 moves to a high position, and when detecting that the connection structure 321 rises to the high position, the control system controls the driving structure 34 to stop running, so that the supporting device 30 stays at the supporting position, and the supporting effect of the supporting device 30 on the track 20 is further achieved.

In this embodiment, the driving structure 34 drives the cam 35 to rotate, and when the connecting structure 321 descends to the lowest point, the first limit sensor 36 is triggered and transmits a signal to the controller, so that the driving structure 34 stops rotating, and the wheel body 322 descends under the spring pressure and is separated from the track 20. On the contrary, the second limit sensor 37 detects a signal and feeds the signal back to the controller, so that the driving structure 34 stops rotating, and at this time, the wheel body 322 is jacked up, thereby playing a role of stable support.

Optionally, the semiconductor device further comprises a connecting shaft 60, and the driving structure 34 is in driving connection with the cam 35 through the connecting shaft 60. The support assembly 32 also includes a first stop member 323 and a second stop member 324. The first limiting member 323 is disposed on the connecting rod 3211 or the connecting shaft 60, and the first limiting sensor 36 is configured to detect a position of the first limiting member 323. The second limiting member 324 is disposed on the connecting rod 3211 or the connecting shaft 60, the second limiting member 324 is disposed opposite to the first limiting member 323, and the second limiting sensor 37 is configured to detect a position of the second limiting member 324. Like this, in strutting arrangement 30 operation in-process, detect spacing part's position through spacing sensor, when detecting that spacing part is located low level or high-order, control drive structure bring to rest, and then make spacing sensor's position detection more accurate to ensure that strutting arrangement 30 can be in reset position and support position. Meanwhile, the limiting part is arranged more flexibly by the arrangement, so that different use requirements and working conditions are met, and the processing flexibility of workers is improved.

In the present embodiment, the first and second limiting

members

323 and 324 are disposed on the connecting shaft 60, and the first and second limiting

members

323 and 324 are disposed opposite to each other to ensure that the two can detect the high position and the low position, respectively.

Specifically, in the process that the driving structure 34 drives the connecting shaft 60 to rotate, the first limiting component 323 and the second limiting component 324 both rotate synchronously with the connecting shaft 60, and when the first limiting sensor 36 is arranged opposite to the first limiting component 323 and detects the first limiting component 323, it is determined that the supporting assembly 32 descends to the reset position, and the control system controls the driving structure 34 to stop operating, so that the supporting device 30 is located at the reset position; when the second limiting sensor 37 and the second limiting part 324 are oppositely arranged and detect the second limiting part 324, it is determined that the supporting assembly 32 is lifted to the supporting position, and the control system controls the driving structure 34 to stop operating, so that the supporting device 30 is located at the supporting position, and the position detection is more accurate.

In other embodiments not shown in the drawings, the first limiting part is arranged on the connecting rod, and the second limiting part is arranged on the connecting shaft, so that the arrangement positions of the first limiting part and the second limiting part are more flexible, and different use requirements and working conditions are met.

In other embodiments not shown in the drawings, the first limiting part is arranged on the connecting rod, and the second limiting part is arranged on the connecting rod, so that the arrangement positions of the first limiting part and the second limiting part are more flexible, and different use requirements and working conditions are met.

In other embodiments not shown in the drawings, the first limiting part is arranged on the connecting shaft, and the second limiting part is arranged on the connecting rod, so that the arrangement positions of the first limiting part and the second limiting part are more flexible, and different use requirements and working conditions are met.

As shown in fig. 1 to 3, the support bar 311 includes a support bar body and a locking member 50. Wherein, one end of the locking part 50 is locked on the support rod body, and the spring is sleeved on the other end of the locking part 50. Optionally, the locking member 50 is a locking screw. Thus, the spring is limited on the support rod body through the locking screw, and further the spring is prevented from being separated from the support rod 311 to influence the resetting reliability of the support component 32.

In the present embodiment, the driving structure 34 includes a driving body, a driving end and a controller. Wherein, the driving end is arranged on the driving body and is in driving connection with the cam 35. The controller is electrically connected with the driving body and is used for controlling the driving end to rotate. Optionally, the controller is a control substrate. Like this, at semiconductor device operation in-process, staff's accessible controller control drive end rotates or stop rotating to realize semiconductor device's intelligent control, promoted and used experience. Meanwhile, the operator can also control the controller by performing signal transmission between the terminal device and the controller, so as to control the operation state of the driving structure 34.

As shown in fig. 4 and 5, the present application also provides a semiconductor transportation system, which includes a crown block body 10, a rail 20, and a semiconductor device, wherein the crown block body 10 is slidable along the rail 20, and the semiconductor device is disposed between the rail 20 and the crown block body 10. Wherein the semiconductor device is the above semiconductor device.

Optionally, the semiconductor transport System is an Automated Material Handling System (AMHS). The supporting device 30 of the semiconductor device is used to maintain the balance and stability of the overhead traveling crane when the overhead traveling crane performs left and right side picking and placing.

In this embodiment, the crown block body 10 has a goods taking and placing state and a running state, when the semiconductor device is normally operated, the supporting device 30 of the semiconductor device is at the supporting position when the crown block body 10 is in the goods taking and placing state, and when the crown block body 10 is in the running state, the supporting device 30 of the semiconductor device is at the resetting position. The semiconductor transportation system further comprises a control system and terminal equipment, and the control system is in communication connection with the controller of the semiconductor equipment. The terminal equipment is connected with the control system. After the crane body 10 is switched from the cargo picking and placing state to the traveling state, if the supporting component 32 of the semiconductor device is continuously located at the supporting position, the terminal device sends a signal to the control system, so as to control the crane body 10 to be continuously located at the traveling state through the control system. In this way, during operation of the semiconductor transport system, the operator controls the control system via the terminal device to ensure that the overhead travelling crane can still continue to travel when the support device 30 fails to be reset.

The application also provides a semiconductor transportation method, which is suitable for the semiconductor transportation system, and the semiconductor transportation method comprises the following steps:

judging whether a supporting device of the semiconductor equipment of the semiconductor transportation system breaks down or not, inputting a preset signal to terminal equipment of the semiconductor transportation system according to the operating condition of the supporting device, and controlling the crown block body 10 to be in a running state after a control system of the semiconductor transportation system receives the preset signal. The operation condition includes normal operation and failure to reset.

Specifically, the control driving structure 34 drives the cam 35 to rotate through the connecting shaft 60, when the second limiting component 324 rotates to interact with the second limiting sensor 37, at this time, the cam 35 rotates to the highest point, the wheel body 322 supports the rail 20, the supporting device 30 is in the supporting position, the second limiting sensor 37 feeds back a detected signal to the controller, the controller controls the driving end of the driving structure 34 to stop rotating and feeds back the signal to the control system of the overhead travelling crane, and the overhead travelling crane can perform left and right side FOUP (wafer transfer pod) transportation; when the overhead traveling crane finishes carrying out the FOUP on the left side and the right side, the control system of the overhead traveling crane sends a signal to the controller of the supporting device 30, the driving structure 34 drives the cam 35 to rotate clockwise, when the first limiting part 323 rotates to be mutually inductive with the first limiting sensor 36, the cam 35 rotates to the lowest point at the moment, the wheel body 322 is separated from the track 20 through the spring pressure, the first limiting sensor 36 feeds back the detected signal to the controller, the controller controls the driving end of the driving structure 34 to stop rotating and feeds back the signal to the control system of the overhead traveling crane, and the overhead traveling crane executes the continuous traveling action.

In this embodiment, the preset signal includes a shielding signal, and the shielding signal indicates that the support device cannot be reset; the method for controlling the crown block body 10 to be in the running state after the control system of the semiconductor transportation system receives the preset signal comprises the following steps:

when the preset signal is the shielding signal, the control system receives the shielding signal and then controls the crown block body 10 to be in the running state.

Specifically, when the supporting device 30 reports an error (the supporting device 30 cannot be reset), a shielding code is input to the terminal device, and after the shielding code is received by the control system of the overhead traveling crane, an error reporting signal fed back from the controller (control substrate) of the supporting device 30 is ignored, so that the overhead traveling crane is automatically offline for inspection, the overhead traveling crane does not need to ascend for inspection by workers, manpower is saved, and the conveying efficiency is improved.

From the above description, it can be seen that the above-described embodiments of the present disclosure achieve the following technical effects:

each strutting arrangement sets up along predetermineeing the direction interval, and strutting arrangement's supporting component includes connection structure and wheel body, and connection structure sets up with the liftable, and the wheel body rotationally is connected with connection structure to realize strutting arrangement's support and reset. Like this, when strutting arrangement is in the support position and can't reset, because the wheel body rotationally set up and with the track between form rolling friction pair to make the overhead traveling crane body still can travel along the track, the staff need not to carry out artifical the reseing to strutting arrangement this moment, and then solved among the prior art to the side direction steady support device reset the problem that has increased staff intensity of labour, reduced staff's intensity of labour.

It is to be understood that the above-described embodiments are only a few, but not all embodiments of the present disclosure. All other embodiments, which can be derived by a person skilled in the art from the embodiments disclosed herein without making any creative effort, shall fall within the protection scope of the present disclosure.

It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an", and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.

It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are capable of operation in sequences other than those illustrated or described herein.

The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure, and various modifications and changes may be made to the present disclosure by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A semiconductor apparatus provided between a crown block body (10) and a rail (20), characterized in that the semiconductor apparatus includes two supporting devices (30) provided at intervals in a preset direction, each of the supporting devices (30) comprising:

the base body (31), the base body (31) is used for connecting with the crown block body (10);

the supporting component (32) is arranged on the base body (31) in a lifting manner, the supporting device (30) is provided with a supporting position that the supporting component (32) is lifted to be in contact with the track (20) and a resetting position that the supporting component (32) is lowered to be separated from the track (20);

the supporting assembly (32) comprises a connecting structure (321) and a wheel body (322), the connecting structure (321) is connected with the seat body (31), and the wheel body (322) is rotatably connected with the connecting structure (321); -the wheel (322) is in contact with the track (20) when the supporting means (30) are in the supporting position; the preset direction and the running direction of the crown block body (10) form an included angle.

2. The semiconductor device according to claim 1, wherein the supporting means (30) further comprises:

the resetting structure (33) is arranged on the base body (31), and the resetting structure (33) is used for applying a resetting force towards the movement of the crown block body (10) to the connecting structure (321) so that the supporting device (30) moves from the supporting position to the resetting position.

3. The semiconductor device according to claim 2, wherein the supporting means (30) further comprises:

a drive structure (34);

the cam (35), the driving structure (34) is in driving connection with the cam (35) to drive the cam (35) to rotate; the outer peripheral surface of the cam (35) is in contact with the connecting structure (321) to drive the connecting structure (321) to move up and down.

4. A semiconductor device according to claim 3, characterized in that the connection structure (321) comprises:

a connecting rod (3211), the wheel body (322) being disposed on at least one end of the connecting rod (3211);

and a rotating body (3212) rotatably disposed at a middle portion of the connecting rod (3211), an outer circumferential surface of the rotating body (3212) contacting an outer circumferential surface of the cam (35).

5. The semiconductor device according to claim 4, wherein the connecting structure (321) further comprises a connecting shaft (3213), the connecting shaft (3213) being disposed at a middle portion of the connecting rod (3211); the rotating body (3212) is a bearing, an outer ring of the bearing is in contact with the outer peripheral surface of the cam (35), and an inner ring of the bearing is sleeved on the connecting shaft (3213) and is in rotation stopping fit with the connecting shaft (3213).

6. The semiconductor device according to claim 4, wherein the base (31) comprises a support rod (311), the connection rod (3211) has a through hole, and the support rod (311) is inserted into the through hole, so that the connection rod (3211) moves up and down along the support rod (311).

7. The semiconductor device according to claim 6, wherein the support rod (311) is one; or, the supporting rods (311) are multiple, and the supporting rods (311) are arranged at intervals along the traveling direction of the crown block body (10).

8. The semiconductor device according to claim 6, wherein the restoring structure (33) is a spring, the spring is sleeved outside the supporting rod (311) and is located above the connecting rod (3211); the supporting rod (311) is provided with a limiting convex part outside the via hole, and the spring is positioned between the limiting convex part and the connecting rod (3211).

9. The semiconductor device according to claim 4, wherein the supporting means (30) further comprises:

a first limit sensor (36) for detecting the position of the support assembly (32); when the first limit sensor (36) detects that the support assembly (32) descends to the reset position, the drive structure (34) is controlled to stop running.

10. The semiconductor device according to claim 9, wherein the supporting means (30) further comprises:

a second limit sensor (37) for detecting the position of the support assembly (32); when the second limit sensor (37) detects that the support assembly (32) is lifted to the support position, the driving structure (34) is controlled to stop running.

11. The semiconductor device according to claim 10, further comprising a connecting shaft (60), wherein the driving structure (34) is in driving connection with the cam (35) through the connecting shaft (60); the support assembly (32) further comprises:

the first limiting component (323) is arranged on the connecting rod (3211) or the connecting shaft (60), and the first limiting sensor (36) is used for detecting the position of the first limiting component (323);

the second limiting component (324) is arranged on the connecting rod (3211) or the connecting shaft (60), the second limiting component (324) is arranged opposite to the first limiting component (323), and the second limiting sensor (37) is used for detecting the position of the second limiting component (324).

12. The semiconductor device according to claim 8, wherein the support bar (311) comprises:

a support rod body;

one end of the locking component (50) is locked on the supporting rod body, and the spring is sleeved on the other end of the locking component (50).

13. A semiconductor device according to claim 3, characterized in that the drive structure (34) comprises:

a drive body;

the driving end is arranged on the driving body and is in driving connection with the cam (35);

the controller is electrically connected with the driving body and used for controlling the driving end to rotate.

14. A semiconductor transportation system is characterized by comprising a crown block body (10), a rail (20) and a semiconductor device, wherein the crown block body (10) can slide along the rail (20), and the semiconductor device is arranged between the rail (20) and the crown block body (10); wherein the semiconductor device is the semiconductor device according to any one of claims 1 to 13.

15. The semiconductor transportation system according to claim 14, wherein the crown block body (10) has a pick-and-place state and a running state, and when the semiconductor device is normally operated, the supporting device (30) of the semiconductor device is in a supporting position when the crown block body (10) is in the pick-and-place state, and when the crown block body (10) is in the running state, the supporting device (30) of the semiconductor device is in a resetting position; the semiconductor transport system further comprises:

the control system is in communication connection with the controller of the semiconductor equipment;

the terminal equipment is connected with the control system; after the crown block body (10) is switched to the running state from the goods taking and placing state, if the supporting component (32) of the semiconductor equipment is continuously located at the supporting position, the terminal equipment sends a signal to the control system so as to control the crown block body (10) to be continuously located at the running state through the control system.

16. A semiconductor transportation method applicable to the semiconductor transportation system of claim 14 or 15, the semiconductor transportation method comprising:

judging whether a supporting device of the semiconductor equipment of the semiconductor transportation system breaks down or not, inputting a preset signal to terminal equipment of the semiconductor transportation system according to the running condition of the supporting device, and controlling a crown block body (10) to be in a running state after a control system of the semiconductor transportation system receives the preset signal; wherein the operating condition includes normal operation and failure to reset.

17. The semiconductor transportation method according to claim 16, wherein the predetermined signal comprises a mask signal, the mask signal being that the supporting device cannot be reset; the method for controlling the crown block body (10) to be in the running state after the control system of the semiconductor transportation system receives the preset signal comprises the following steps:

when the preset signal is the shielding signal, the control system receives the shielding signal and then controls the crown block body (10) to be in the running state.