CN114670350A - 基于相变微胶囊悬浮液的半导体单晶硅金刚石线锯切割方法 - Google Patents
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Abstract
一种基于相变微胶囊悬浮液的半导体单晶硅金刚石线锯切割方法，包括以下步骤：1)以甲基丙烯酸甲酯作为有机壳体，直链烷烃类相变材料作为相变芯材，改性纳米氮化硅作为导热粒子采用聚合法制备相变微胶囊，其以金刚线切割液和去离子水按50:1配置水性基础液，添加0.1～0.3wt％的纳米SiC和上述微胶囊制备1.0wt％‑5.0wt％的相变微胶囊悬浮液；2)水泵运输储存池中的微胶囊悬浮液通过冷凝器到达喷嘴，冷凝器确保微胶囊在到达切割区域前没发生相变；3)微胶囊悬浮液通过喷嘴喷洒到金刚石锯丝上，微胶囊颗粒进入切割区域发生相变。本发明具有高热导率和热稳定性，在多次冷热循环下仍有较好的利用率。
Description
技术领域
本发明属于金刚石线锯切割技术领域，具体涉及一种基于相变微胶囊悬浮液的半导体单晶硅金刚石线锯切割方法。
背景技术
在金刚石线锯切割过程中会不断产生切削热，由切削热又会产生热应力，使硅片发生翘曲变形。随着硅片的大尺寸、超薄化发展，硅片因翘曲发生断裂破碎的几率增大，增加了后续研磨和抛光工艺的难度。线锯切割液在线锯切割过程中承担着将产生的切削热及时有效释放、增加切割过程润滑渗透等作用，早期的切割液是以矿物油为主体，在其中加入油溶性防腐蚀剂、分散剂等所构成复合油基切削液。但此类切割液冷却效果不理想且对人体有害。目前金刚石线锯主要采用的是以去离子水为基础，添加了少量表面活性剂、缓蚀剂、极压剂等组分所构成的水基切削液，但目前所使用的水基切削液润滑性差、抗腐蚀性差、热导率较低，且切削液不易回收，循环使用率较低。针对这些缺点，当前企业主要采用两种方法，一是加大切割过程中切削液的供应量，但由于进入切割区域的切割液是一定的，提高切割液的供应量会造成切割液的大量浪费，增加后续处理的成本。二是在切削液中增加各种油性添加剂来改善切削液的润滑性能。但这种方法在提高切割液润滑性能的同时会降低冷却性能，从而造成工件的翘曲。
发明内容
为了克服已有技术的不足，为解决切割过程中高切削热引起的硅片翘曲，本发明提出一种基于相变微胶囊悬浮液的半导体单晶硅金刚石线锯切割方法。
本发明解决其技术问题所采用的技术方案是：
一种基于相变微胶囊悬浮液的半导体单晶硅金刚石线锯切割方法，包括以下步骤：
1)以甲基丙烯酸甲酯作为有机壳体，直链烷烃类相变材料作为相变芯材，改性纳米氮化硅作为导热粒子采用聚合法制备相变微胶囊，其中芯、壳和氮化硅的质量比为1.5：1：(0.06—0.07)；以金刚线切割液和去离子水按50:1配置水性基础液，添加0.1～0.3wt％的纳米SiC和上述微胶囊制备1.0wt％-5.0wt％的相变微胶囊悬浮液；
2)水泵运输储存池中的微胶囊悬浮液通过冷凝器到达喷嘴，冷凝器确保微胶囊在到达切割区域前没发生相变；
3)微胶囊悬浮液通过喷嘴喷洒到金刚石锯丝上，微胶囊颗粒进入切割区域达到相变温度发生相变。。
进一步，所述步骤1)，所述相变芯材包括正十八烷、正十七烷和正十四烷中的一种或两种以上的组合。
再进一步，所述步骤1)中，改性氮化硅通过硅烷偶联剂接枝法对纳米氮化硅改性制得。
更进一步，所述悬浮液中相变微胶囊熔化时吸收大量潜热，增大相变微胶囊悬浮液有效比热容，相变微胶囊颗粒附近的“微对流效应”增强了管路壁面的导热性，SiC颗粒由于纳米尺寸效应，会在锯丝和硅片间形成物理吸附膜提高切削液的摩擦特性和润滑性能。
所述步骤2)中，所述喷嘴与冷凝器连接。
本发明的技术构思为：在能源消耗日益严重的今天，为响应国家可持续发展战略，相变储热技术在废热回收利用、提高能源利用效率等领域得到广泛应用。从国内外学者的研究中可知相变微胶囊悬浮液是由相变微胶囊颗粒和传统单相载流体组成的固液多相流体，兼具增强传热、热能储存与运输等功能。烷烃类相变材料作为芯材被有机壳体包裹起来，具有较好的稳定性、大的比表面积，而且储热材料与输热流体为一体，促使互相之间的换热过程得以省略，从而进一步提高了整个传热***的传热效率，氮化硅作为导热粒子接连在有机壳体表面可以提高有机壳体的导热性能。纳米粒子作为添加剂能明显提高水基润滑剂的摩擦学性能，纳米SiC又有着优良的韧性，较高的强度和散电导热性能，高温时能抗氧化，化学稳定性高。
本发明的有益效果主要表现在：具有高热导率和热稳定性，在多次冷热循环下仍有较好的利用率。
附图说明
图1为本发明实施的原理示意图；
图中：1.悬浮液储存池；2.泵；3.冷凝器；4.喷嘴；5.金刚石锯丝；6.相变微胶囊悬浮液；7.工件。
具体实施方式
下面结合附图对本发明作进一步描述。
参照图1，一种基于相变微胶囊悬浮液的半导体单晶硅金刚石线锯切割方法，包括以下步骤：
1)以甲基丙烯酸甲酯作为有机壳体，直链烷烃类相变材料作为相变芯材，改性纳米氮化硅作为导热粒子采用聚合法制备相变微胶囊，其中芯、壳和氮化硅的质量比为1.5：1：(0.06—0.07)。以金刚线专用切割液和去离子水按50:1配置水性基础液，添加0.1～0.3wt％的纳米SiC和上述微胶囊制备1.0wt％-5.0wt％的相变微胶囊悬浮液。
优选的，所述相变芯材包括正十八烷、正十七烷和正十四烷中的一种或两种以上的组合
优选的，改性氮化硅通过硅烷偶联剂接枝法对纳米氮化硅改性制得
2)水泵2运输储存池1中的微胶囊悬浮液通过冷凝器3到达喷嘴5，冷凝器确保微胶囊在到达切割区域前没发生相变。
3)微胶囊悬浮液通过喷嘴喷洒到金刚石锯丝5上，微胶囊颗粒进入切割区域达到相变温度发生相变。
所述悬浮液中相变微胶囊熔化时吸收大量潜热，增大相变微胶囊悬浮液有效比热容，相变微胶囊颗粒附近的“微对流效应”增强了管路壁面的导热性，SiC颗粒由于纳米尺寸效应，会在锯丝和硅片间形成物理吸附膜提高切削液的摩擦特性和润滑性能。
优选的，所述喷嘴4与水泵连接。
本说明书的实施例所述的内容仅仅是对发明构思的实现形式的列举，仅作说明用途。本发明的保护范围不应当被视为仅限于本实施例所陈述的具体形式，本发明的保护范围也及于本领域的普通技术人员根据本发明构思所能想到的等同技术手段。
Claims (5)
1.一种基于相变微胶囊悬浮液的半导体单晶硅金刚石线锯切割方法，其特征在于，所述方法包括以下步骤：
1)以甲基丙烯酸甲酯作为有机壳体，直链烷烃类相变材料作为相变芯材，改性纳米氮化硅作为导热粒子采用聚合法制备相变微胶囊，其中芯、壳和氮化硅的质量比为1.5：1：(0.06—0.07)；以金刚线切割液和去离子水按50:1配置水性基础液，添加0.1～0.3wt％的纳米SiC和上述微胶囊制备1.0wt％-5.0wt％的相变微胶囊悬浮液；
2)水泵运输储存池中的微胶囊悬浮液通过冷凝器到达喷嘴，冷凝器确保微胶囊在到达切割区域前没发生相变；
3)微胶囊悬浮液通过喷嘴喷洒到金刚石锯丝上，微胶囊颗粒进入切割区域发生相变。
2.如权利要求1所述的基于相变微胶囊悬浮液的半导体单晶硅金刚石线锯切割方法，其特征在于，所述步骤1)，所述相变芯材包括正十八烷、正十七烷和正十四烷中的一种或两种以上的组合。
3.如权利要求1或2所述的基于相变微胶囊悬浮液的半导体单晶硅金刚石线锯切割方法，其特征在于，所述步骤1)中，改性氮化硅通过硅烷偶联剂接枝法对纳米氮化硅改性制得。
4.如权利要求1或2所述的基于相变微胶囊悬浮液的半导体单晶硅金刚石线锯切割方法，其特征在于，所述悬浮液中相变微胶囊熔化时吸收大量潜热，增大相变微胶囊悬浮液有效比热容，相变微胶囊颗粒附近的“微对流效应”增强了管路壁面的导热性，SiC颗粒由于纳米尺寸效应，会在锯丝和硅片间形成物理吸附膜提高切削液的摩擦特性和润滑性能。
5.如权利要求1或2所述的基于相变微胶囊悬浮液的半导体单晶硅金刚石线锯切割方法，其特征在于，所述步骤2)中，所述喷嘴与冷凝器连接。
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