CN114658785A - Combined vibration damper and scanning electron microscope - Google Patents
Combined vibration damper and scanning electron microscope Download PDFInfo
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- CN114658785A CN114658785A CN202210193563.1A CN202210193563A CN114658785A CN 114658785 A CN114658785 A CN 114658785A CN 202210193563 A CN202210193563 A CN 202210193563A CN 114658785 A CN114658785 A CN 114658785A
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- vibration damping
- bellows
- damping device
- corrugated pipe
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- 238000013016 damping Methods 0.000 claims abstract description 80
- 238000009434 installation Methods 0.000 claims abstract description 16
- 238000003780 insertion Methods 0.000 claims description 22
- 230000037431 insertion Effects 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 9
- 239000002131 composite material Substances 0.000 claims description 7
- 210000001503 joint Anatomy 0.000 claims description 2
- 229920001296 polysiloxane Polymers 0.000 claims description 2
- 239000000945 filler Substances 0.000 claims 2
- 150000001875 compounds Chemical class 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 21
- 238000000034 method Methods 0.000 abstract description 13
- 230000008569 process Effects 0.000 abstract description 11
- 230000006835 compression Effects 0.000 abstract description 5
- 238000007906 compression Methods 0.000 abstract description 5
- 230000008602 contraction Effects 0.000 abstract description 4
- 238000003384 imaging method Methods 0.000 description 5
- 230000009467 reduction Effects 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F7/00—Vibration-dampers; Shock-absorbers
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/0027—Pulsation and noise damping means
- F04B39/0044—Pulsation and noise damping means with vibration damping supports
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F7/00—Vibration-dampers; Shock-absorbers
- F16F7/10—Vibration-dampers; Shock-absorbers using inertia effect
- F16F7/104—Vibration-dampers; Shock-absorbers using inertia effect the inertia member being resiliently mounted
- F16F7/108—Vibration-dampers; Shock-absorbers using inertia effect the inertia member being resiliently mounted on plastics springs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Vibration Prevention Devices (AREA)
Abstract
The invention discloses a combined vibration damper and a scanning electron microscope, wherein the vibration damper comprises: the middle part of the bracket is limited with an installation space; a part of the corrugated pipe is arranged in the installation space, two ends of the corrugated pipe are matched with the support, and two ends of the corrugated pipe are respectively provided with an installation seat; wherein, the support is scalable in the axial of bellows, and the outer wall of bellows is formed with the clearance of indent, is equipped with the elasticity filling member in the clearance. According to the combined vibration damping device provided by the embodiment of the invention, the bellows and the elastic filling piece are arranged, the vibration transmitted to the sample chamber in the operation process of the vacuum pump is absorbed through the expansion and contraction of the bellows, the vibration damping effect is realized, the compression of the bellows can be buffered through the elastic filling piece, the vibration damping effect of the whole structure can be further improved, the influence of the vibration on the performance of the scanning electron microscope in the operation process of the vacuum pump can be reduced by the support which is axially expanded and contracted with the bellows, the whole structure is simple, the assembly is convenient, and the assembly and disassembly on the scanning electron microscope are convenient.
Description
Technical Field
The invention relates to the technical field of scanning electron microscopes, in particular to a combined vibration damper and a scanning electron microscope.
Background
Scanning electron microscope uses high energy electron beam to carry out scanning imaging to the sample, in order to guarantee formation of image resolution, need be one kind of collimation and focus of electron beam image light beam, and high energy electron beam striking air molecule can be absorbed or scattered, collimation nature can be destroyed, consequently, scanning electron microscope sample room need use molecular pump or other vacuum pumps to carry out the evacuation, and the vacuum pump can produce vibration at the operation in-process, vibration transmission to the sample room, can exert an influence to scanning electron microscope's formation of image and resolution ratio etc. exist the space of improvement.
Disclosure of Invention
The present invention is directed to solving at least one of the problems of the prior art. Therefore, the invention aims to provide a combined vibration damping device which is simple in structure and good in vibration damping effect.
The invention also provides a scanning electron microscope.
A composite vibration damping device according to an embodiment of the first aspect of the present invention includes: the bracket is provided with a mounting space in the middle; a part of the corrugated pipe is arranged in the installation space, two ends of the corrugated pipe are matched with the support, and two ends of the corrugated pipe are respectively provided with an installation seat; the support is telescopic in the axial direction of the corrugated pipe, an inwards concave gap is formed in the outer wall surface of the corrugated pipe, and an elastic filling piece is arranged in the gap.
According to the combined vibration damping device provided by the embodiment of the invention, the bellows and the elastic filling piece are arranged, the vibration transmitted to the sample chamber in the operation process of the vacuum pump is absorbed through the expansion and contraction of the bellows, the vibration damping effect is realized, the compression of the bellows can be buffered through the elastic filling piece, the vibration damping effect of the whole structure can be further improved, the influence of the vibration on the performance of the scanning electron microscope in the operation process of the vacuum pump can be reduced by the support which is axially expanded and contracted with the bellows, the whole structure is simple, the assembly is convenient, and the assembly and disassembly on the scanning electron microscope are convenient.
According to the combined vibration damper of the embodiment of the invention, the elastic filling piece is an elastic ring.
According to the combined vibration damper provided by the embodiment of the invention, the elastic filling piece is a rubber material piece or a silica gel material piece.
According to the combined vibration damper provided by the embodiment of the invention, the support comprises a plurality of annular support plates which are arranged at intervals along the axial direction of the corrugated pipe, two adjacent annular support plates are connected in a matched mode through the vibration damper, and two ends of the corrugated pipe are respectively connected with the corresponding annular support plates in a matched mode through the vibration damper.
In some examples, the damping piece comprises a plurality of damping pieces which are arranged between two adjacent annular support plates at intervals along the circumferential direction of the annular support plates; and the plurality of damping pieces are arranged in a staggered manner along the arrangement direction of the annular support plate.
In some examples, the vibration damper is a rubber pad, fixing columns with external threads are arranged at two ends of the rubber pad respectively, the annular support plate is provided with fixing holes, and the fixing columns are matched with the fixing holes and are fixedly connected through nuts.
In some examples, the annular support plate comprises a first half ring section and a second half ring section, the end of the first half ring section is provided with a first inserting plate extending towards the second half ring section, the end of the second half ring section is provided with a second inserting plate extending towards the first half ring section, the second inserting plate corresponds to the first inserting plate in shape, and the second inserting plate is inserted above or below the first inserting plate and is fixedly connected through a fastener.
In some examples, the annular support plate has a fixing groove opened toward one side of the bellows, and a portion of the fixing groove forms a fixing hole for mounting a fixing post or a fastener of the rubber pad.
According to the combined vibration damping device of the embodiment of the present invention, the bellows includes: the corrugated section is arranged in the installation space, and the outer wall surface of the corrugated section is provided with the gap; the connecting section, the connecting section is including locating two at the both ends of ripple section, two the connecting section pass through damping piece with leg joint, the mount pad is located the connecting section.
In some examples, the bellows is a one-piece member.
According to the combined vibration damper provided by the embodiment of the invention, the mounting seat is an LF caliper.
The combined vibration damping device according to the embodiment of the present invention further includes: the balancing weight is arranged at least one end of the corrugated pipe and is connected with the corrugated pipe in a matching mode.
In some examples, the weight forms a ring that fits over the outside of the bellows, and the weight is connected to the bellows by a hexagon socket bolt.
According to the scanning electron microscope of the embodiment of the second aspect of the invention, the combined vibration reduction device is adopted, so that the influence of vibration on the performance of the scanning electron microscope in the operation process of the vacuum pump can be reduced, and the imaging effect of the scanning electron microscope and the accuracy of an analysis result are improved.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a schematic structural view of a composite vibration damping device according to an embodiment of the present invention from one perspective;
FIG. 2 is a schematic structural view of a composite vibration damping device according to an embodiment of the present invention from another perspective;
FIG. 3 is a partial schematic structural view of a composite damping device according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of an annular plate according to an embodiment of the invention.
Reference numerals:
the vibration damping device 100 is provided with a vibration damping device,
an annular support plate 10, a first half ring section 11, a first insertion plate 111, a second half ring section 12, a second insertion plate 121, a fastening piece 13, a fixing groove 14, a fixing hole 15,
bellows 20, bellows segment 21, connecting segment 22, gap 23, first mounting seat 25, second mounting seat 26,
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention and are not to be construed as limiting the present invention.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the invention. Furthermore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
A composite vibration damping device 100 according to an embodiment of the present invention is described below with reference to fig. 1 to 4.
As shown in fig. 1 to 4, a combined vibration damping device 100 according to one embodiment of the present invention includes: support and bellows 20, the middle part of support is injectd there is installation space, bellows 20's partly setting is in installation space, bellows 20's both ends and support cooperation, along bellows 20's length direction, bellows 20 has both ends, bellows 20 can stretch out and draw back along its length direction, bellows 20's length direction's both ends are equipped with the mount pad, particularly, bellows 20 one end is equipped with first mount pad 25, first mount pad 25 is used for installing scanning electron microscope's sample room, bellows 20's the other end is equipped with second mount pad 26, second mount pad 26 is used for installing scanning electron microscope's vacuum pump, can absorb the vibration that transmits the sample room in the vacuum pump operation process through bellows 20's flexible, realize the damping effect. The support can stretch out and draw back in the axial direction of the corrugated pipe 20, so that two ends of the corrugated pipe 20 are matched with the support, and meanwhile, the support can also play a role in vibration reduction due to stretching deformation.
In addition, bellows 20's outer wall surface is formed with inside sunken clearance 23, be equipped with elasticity filling member 30 in the clearance 23, on the one hand, elasticity filling member 30 can directly be filled on bellows 20's outer wall surface, it is fixed to realize the installation of elasticity filling member 30, on the other hand, elasticity filling member 30 can cushion bellows 20's compression, overall structure's damping effect can further be promoted, reduce the influence of vacuum pump operation in-process vibration to scanning electron microscope performance, utilize bellows 20's own structure promptly, set up elasticity filling member 30, simultaneously through elasticity filling member 30 and bellows 20, realize multiple damping, the vibration reduction effect is improved.
According to the combined vibration damping device 100 of the embodiment of the invention, the bellows 20 and the elastic filling member 30 are arranged, the vibration transmitted to the sample chamber in the operation process of the vacuum pump is absorbed through the expansion and contraction of the bellows 20, the vibration damping effect is realized, the compression of the bellows 20 is buffered through the elastic filling member 30, the vibration damping effect of the whole structure can be further improved, the influence of the vibration on the performance of the scanning electron microscope in the operation process of the vacuum pump can be reduced by the support which can axially expand and contract the bellows 20, the whole structure is simple, the assembly is convenient, and the assembly and disassembly on the scanning electron microscope are convenient.
As shown in fig. 3, in some examples, the gap 23 extends along the circumferential direction of the corrugated pipe 20, and in the length direction of the corrugated pipe 20, there are a plurality of gaps 23, wherein each gap 23 may be provided with one elastic filling member 30, and an elastic filling member 30 may be provided in a part of the gaps 23. The elastic filling member 30 can form an elastic ring, i.e. an annular shape, and the elastic ring is directly sleeved on the gap 23 of the corrugated pipe 20, so that the installation is convenient and reliable. Of course, the elastic filling member 30 may be in other forms, and directly fills the gap 23.
According to an embodiment of the present invention, the elastic filling member 30 is a rubber material member, and is sleeved in the gap 23 outside the corrugated tube 20 through a rubber ring to buffer the compression of the corrugated tube 20, and a part of the vibration deformation of the corrugated tube 20 is absorbed through the deformation of the elastic filling member 30, so that the vibration noise can be reduced, and the material is easy to obtain and the cost is low. Of course, the elastic filling member 20 may also be a silicone material member, and the elastic filling member 20 may also be other structural members having elastic material.
As shown in fig. 1-3, according to some embodiments of the present invention, bellows 20 comprises: the corrugated section 21 is arranged in the installation space, the outer wall surface of the corrugated section 21 is provided with an inward concave gap 23, the elastic filling member 30 is arranged on the outer side of the corrugated section 21, the connecting section 22 comprises two connecting sections 22, the two connecting sections 22 are arranged at two ends of the corrugated section 21 in the length direction (the vertical direction shown in figure 3), the two connecting sections 22 are connected with the bracket through the vibration damping members 40, one side of one connecting section 22, which is far away from the corrugated section 21, is provided with a first mounting seat 25, one side of the other connecting section 22, which is far away from the corrugated section 21, is provided with a second mounting seat 26, the outer diameter of the connecting section 22 is larger than that of the corrugated section 21, so that the connecting section 21 is conveniently matched and connected with the bracket, the vibration damping members 40 can be arranged on the outer side of the corrugated section 21, and by arranging the vibration damping members 40, besides the vibration damping effect of the corrugated pipe 20, the vibration transmitted to the sample chamber in the operation process can be absorbed through the deformation of the vibration damping members 40, further vibration damping effect is achieved.
In some specific examples, first mount pad 25 and second mount pad 26 can be LF calliper respectively, are equipped with the calliper flange on linkage segment 22, and calliper setting is on the calliper flange, and bellows 20 here can be the corrugated metal pipe, is equipped with the flange interface on linkage segment 22, and the calliper flange can weld into an organic whole with bellows 20, improves overall structure's stability, installs through adopting LF calliper, and the dismouting of being convenient for is maintained, and then be convenient for with the assembly of vacuum pump and sample room.
As shown in fig. 2, in some examples, the vibration damping member 40 is a rubber pad, two ends of the rubber pad are respectively provided with a fixing column, the fixing column has an external thread, the mounting seat has a fixing hole, the fixing hole may be a non-through hole structure, and the fixing column may be screwed with the fixing hole on the mounting seat until the fixing column abuts against the bottom wall of the fixing hole; the fixing hole is formed in the support, the fixing hole can be of a through hole structure, the fixing column is matched with the fixing hole, and the fixing hole is tightly connected with the fixing hole through the nut, so that the rubber pad is fixedly installed, the structure is simple, the acquisition and the installation are convenient, and the vibration reduction effect of the rubber pad is good.
As shown in fig. 1 and 2, in some examples, the bracket includes a plurality of annular support plates 10, the plurality of annular support plates 10 are arranged at intervals along the extending direction (the up-down direction shown in fig. 1) of the corrugated section 21, the middle parts of the plurality of annular support plates 10 form a mounting space, two adjacent annular support plates 10 are connected by a damping piece 40, for example, by a plurality of damping pieces 40 arranged at intervals along the circumferential direction of the annular support plates 10, and the annular support plates 10 and the connecting section 22 are also connected by the damping piece 40, so that a plurality of damping pieces 40 are provided outside the corrugated section 21, wherein the plurality of damping pieces 40 can be arranged at intervals along the length direction of the corrugated section 21 to improve the damping effect of the damping device 100 in all directions.
The vibration damping piece 40 can be a rubber pad, fixing columns are arranged at two ends of the rubber pad respectively and are provided with external threads, fixing holes 15 are formed in the annular support plate 10 and can be of a through hole structure, the fixing columns at the two ends of the rubber pad are matched with the corresponding fixing holes respectively and are connected through nuts in a fastening mode, and the rubber pad and the annular support plate 10 are fixedly installed.
In some examples, the annular support plate 10 has a fixing groove 14, a side of the fixing groove 14 facing the bellows 20 is open, a part of the fixing groove 14 forms a fixing hole 15, the fixing hole 15 can be used for installing a rubber pad fixing column, and the rubber pad fixing column can be conveniently installed by arranging the fixing groove 14 with one side open, so that convenience in assembly is improved.
In some specific examples, the damping member 40 includes a plurality of damping members, and between two adjacent annular brackets 10, the plurality of damping members are arranged at intervals along the circumferential direction of the annular brackets 10; along the arrangement direction of the plurality of annular supporting plates 10, the plurality of damping pieces 40 are arranged in a staggered mode, namely the damping pieces 40 are not collinear in the arrangement direction of the annular supporting plates 10, and the damping pieces 40 are integrally arranged at intervals in an alternating mode, so that the stress points of the annular supporting plates 10 can be deformed, and the damping effect is improved.
As shown in fig. 4, in some examples, the annular support plate 10 includes a first half ring segment 11 and a second half ring segment 12, the first half ring segment 11 substantially forms a half annular structure, the second half ring segment 12 also substantially forms a half annular structure, the first half ring segment 11 and the second half ring segment 12 are fixedly connected through a fastener 13, and the annular support plate 10 is formed by assembling the first half ring segment 11 and the second half ring segment 12, so that the assembly of the annular support plate 10 outside the corrugated pipe 20 is realized, and the manufacturing and forming of the integral structure are facilitated. Of course, the first half ring segment 11 and the second half ring segment 12 may also be snap fit or adhesively fit.
In some examples, the ring plate 10 has a fixing groove 14, a side of the fixing groove 14 facing the bellows 20 is open, a part of the fixing groove 14 forms a fixing hole 15, the fixing hole 15 can be used for installing a fastener, and by providing the fixing groove 14 with one side open, installation of the fastener can be facilitated, and convenience in assembly can be improved.
In some examples, the first half ring section 11 has a first insertion plate 111 at each end, the first insertion plate 111 extends towards the second half ring section 12, the second half ring section 12 has a second insertion plate 121 at each end, the second insertion plate 121 extends towards the first half ring section 11, the second insertion plate 121 corresponds to the first insertion plate 111 in shape, the second insertion plate 121 is inserted above or below the first insertion plate 111, and the second insertion plate 121 and the first insertion plate 111 are fixedly connected through a fastener 13. As shown in fig. 4, for example, two first insertion plates 111 are different in position in the vertical direction, two second insertion plates 121 are different in position in the vertical direction, and one second insertion plate 121 is inserted above the first insertion plate 111, so that the two half ring segments have the same structure, and can be manufactured and formed through one mold, the manufacturing process is simplified, and the assembly is facilitated.
In some specific examples, the bellows 20 is an integrally formed part, that is, the bellows section 21 and the connection section 22 may be integrally formed parts, thereby facilitating the assembly of the vibration damping device 100, improving the stability of the overall structure, and absorbing vibration during the operation of the vacuum pump by the expansion and contraction amount of the bellows section 21, thereby ensuring the vibration damping effect. The bellows 20 herein may be a metal bellows, such as a stainless steel bellows, which is widely available and low cost.
According to some embodiments of the invention, the vibration damping device 100 further comprises: the weight 50 is disposed at either end of the corrugated tube 20, or the two ends of the corrugated tube 20 are respectively disposed with a weight 50, and the weights 50 may be the same or different.
In some examples, the weight 50 may be disposed at a side adjacent to the second mounting seat 26, that is, the weight 50 is disposed close to the mounting vacuum pump, the weight 50 forms a ring member sleeved outside the corrugated pipe 20, the weight 50 may be connected to the corrugated pipe 20 through a hexagon socket head cap screw, so as to fix the weight 50, thereby reducing the vibration frequency and amplitude of the vacuum pump, and further effectively improving the resolution and imaging effect of the scanning electron microscope.
According to the combined vibration damping device 100 provided by the embodiment of the invention, triple vibration damping is realized by arranging the corrugated pipe 20, the elastic filling part 30 and the vibration damping part 40, the vibration damping effect of the vibration damping device 100 is greatly improved, the vibration damping performance is good, meanwhile, the vibration frequency and the vibration amplitude of the vacuum pump are reduced by utilizing the balancing weight 50, the resolution and the imaging effect of a scanning electron microscope are improved, and the vacuum pump and the sample holder are installed by directly adopting the LF calipers, so that the combined vibration damping device is convenient to disassemble, assemble and maintain, compact in overall structure, simple and easy to process.
According to the embodiment of the invention, the scanning electron microscope comprises the vibration damping device 100 according to the embodiment of the invention, and by adopting the vibration damping device 100, the influence of vibration on the performance of the scanning electron microscope in the operation process of the vacuum pump can be reduced, and the imaging effect of the scanning electron microscope and the accuracy of an analysis result can be improved.
Other configurations and operations of the scanning electron microscope according to the embodiments of the present invention are known to those skilled in the art and will not be described in detail herein. The vertical direction, the horizontal direction, and the front-rear direction are based on the vertical direction, the horizontal direction, and the front-rear direction of the figure.
In the description of the present invention, unless otherwise expressly specified or limited, the first feature "on" or "under" the second feature may comprise the first and second features being in direct contact, or may comprise the first and second features being in contact, not directly, but via another feature in between. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (14)
1. A combination vibration damping device, comprising:
the bracket is provided with a mounting space in the middle;
a part of the corrugated pipe is arranged in the installation space, two ends of the corrugated pipe are matched with the support, and two ends of the corrugated pipe are respectively provided with an installation seat;
the support is telescopic in the axial direction of the corrugated pipe, an inwards concave gap is formed in the outer wall surface of the corrugated pipe, and an elastic filling piece is arranged in the gap.
2. A composite vibration damping device according to claim 1, wherein said resilient filler member is an elastomeric ring.
3. A combined vibration damping device according to claim 1 or 2, characterised in that the resilient filler is a rubber material or a silicone material.
4. The combined vibration damping device according to claim 1, wherein the bracket comprises a plurality of annular support plates, the annular support plates are arranged at intervals along the axial direction of the corrugated pipe, two adjacent annular support plates are connected by a vibration damping member in a matching manner, and two ends of the corrugated pipe are respectively connected with the corresponding annular support plates by the vibration damping member in a matching manner.
5. The combination damper as claimed in claim 4 wherein said damper member includes a plurality of damper members disposed between adjacent two of said annular brackets at spaced intervals along the circumference of said annular brackets; and the plurality of damping pieces are arranged in a staggered manner along the arrangement direction of the annular support plate.
6. The combined vibration damping device according to claim 4, wherein the vibration damping member is a rubber pad, fixing columns with external threads are respectively arranged at two ends of the rubber pad, the annular support plate is provided with fixing holes, and the fixing columns are matched with the fixing holes and are fixedly connected through nuts.
7. The combination vibration damping device according to claim 4, wherein the annular support plate comprises a first half ring section and a second half ring section, the end of the first half ring section is provided with a first insertion plate extending towards the second half ring section, the end of the second half ring section is provided with a second insertion plate extending towards the first half ring section, the second insertion plate corresponds to the first insertion plate in shape, and the second insertion plate is inserted above or below the first insertion plate and fixedly connected through a fastener.
8. The combined vibration damping device according to claim 6 or 7, wherein the annular stay has a fixing groove opened toward a side of the bellows, a part of the fixing groove forming a fixing hole for mounting a fixing post or a fastener of the rubber pad.
9. The compound vibration damping device according to claim 1, wherein the bellows comprises:
the corrugated section is arranged in the installation space, and the outer wall surface of the corrugated section is provided with the gap;
the connecting section, the connecting section is including locating two at the both ends of ripple section, two the connecting section pass through damping piece with leg joint, the mount pad is located the connecting section.
10. A combination vibration damping device according to claim 9, wherein the bellows is an integrally formed part.
11. The combination vibration damping device according to claim 1 wherein said mounting seat is an LF caliper.
12. The combination damper as in claim 1, further comprising: the balancing weight is arranged at least one end of the corrugated pipe and is connected with the corrugated pipe in a matching mode.
13. A combination vibration damping device according to claim 12, wherein the weight forms a ring around the outside of the bellows, the weight being connected to the bellows by a socket head cap screw.
14. A scanning electron microscope comprising the composite vibration damping device according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210193563.1A CN114658785A (en) | 2022-03-01 | 2022-03-01 | Combined vibration damper and scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210193563.1A CN114658785A (en) | 2022-03-01 | 2022-03-01 | Combined vibration damper and scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114658785A true CN114658785A (en) | 2022-06-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210193563.1A Pending CN114658785A (en) | 2022-03-01 | 2022-03-01 | Combined vibration damper and scanning electron microscope |
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| Country | Link |
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| CN (1) | CN114658785A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2551505A (en) * | 1946-12-04 | 1951-05-01 | Jr Raymond G Olson | Cushioning device |
| EP0019533A1 (en) * | 1979-05-11 | 1980-11-26 | Hutchinson-Mapa | Shock absorbers |
| CN1673550A (en) * | 2004-03-22 | 2005-09-28 | 阿尔卡特公司 | Damping connection for vacuum pump |
| CN109386564A (en) * | 2017-08-11 | 2019-02-26 | 上海锆智电子科技有限公司 | Turbomolecular pump damper |
| CN217463015U (en) * | 2022-03-01 | 2022-09-20 | 国仪量子(合肥)技术有限公司 | Vibration damping structure |
-
2022
- 2022-03-01 CN CN202210193563.1A patent/CN114658785A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2551505A (en) * | 1946-12-04 | 1951-05-01 | Jr Raymond G Olson | Cushioning device |
| EP0019533A1 (en) * | 1979-05-11 | 1980-11-26 | Hutchinson-Mapa | Shock absorbers |
| CN1673550A (en) * | 2004-03-22 | 2005-09-28 | 阿尔卡特公司 | Damping connection for vacuum pump |
| CN109386564A (en) * | 2017-08-11 | 2019-02-26 | 上海锆智电子科技有限公司 | Turbomolecular pump damper |
| CN217463015U (en) * | 2022-03-01 | 2022-09-20 | 国仪量子(合肥)技术有限公司 | Vibration damping structure |
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