CN114623958A - Flexible touch sensor based on electrode array and preparation method thereof - Google Patents

Flexible touch sensor based on electrode array and preparation method thereof Download PDF

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Publication number
CN114623958A
CN114623958A CN202210178729.2A CN202210178729A CN114623958A CN 114623958 A CN114623958 A CN 114623958A CN 202210178729 A CN202210178729 A CN 202210178729A CN 114623958 A CN114623958 A CN 114623958A
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circuit board
flexible
soft
base
imitation body
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CN114623958B (en
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李淼
雷自伟
邓旭畑
王熠
武开群
潘伟鸿
蒋俊南
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Wuhan University WHU
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Wuhan University WHU
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/18Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02Sensing devices
    • B25J19/028Piezoresistive or piezoelectric sensing devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/26Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload

Abstract

The invention relates to a flexible touch sensor based on an electrode array and a preparation method thereof. The base is the major structure of touch sensor, and other parts all install fixedly on the base. The circuit board is a double-layer printed circuit board and is divided into a top layer and a bottom layer, a plurality of excitation electrode points and sensing electrode points are distributed on the top layer, and electronic elements and pins communicated with the outside are welded on the bottom layer. The silica gel imitation body is a part which is contacted with an object when the touch sensor works, a sealed space is formed after the silica gel imitation body is fixed with the base through the annular pressing plate, and the circuit board is placed inside the sealed space and filled with the conductive liquid. The pressure sensor is used for measuring the pressure change of the conductive liquid. The flexible touch sensor provided by the invention can realize the acquisition of the position and contact force information of a contact object, and has the characteristics of good flexibility, low cost and high adaptability.

Description

Flexible touch sensor based on electrode array and preparation method thereof
Technical Field
The invention belongs to the field of robot interaction, relates to a flexible touch sensor, and particularly relates to a flexible touch sensor based on an electrode array and a preparation method thereof.
Background
With the development of the robot technology, the requirement of interaction between the robot and the environment is more and more increased, and the touch sense is more and more applied to the field of the robot as a sensing mode for the external environment, and has very important practical significance in various operation tasks of the robot.
According to the difference of measurement principles, currently mainstream touch sensors can be divided into piezoelectric type, capacitance type, resistance type, ultrasonic type and optical fiber type touch sensors, different types of touch sensors have different characteristics and are suitable for specific application scenes, but most touch sensors are poor in flexibility and do not have a bionic structure, and particularly in the research of the field of humanoid robots, a touch sensor with good flexibility and a good bionic structure is urgently needed to be used as a part for interaction between a robot and the environment or human.
Disclosure of Invention
In view of the fact that the existing touch sensor cannot meet the requirement of flexible sensing of a robot, the invention aims to provide a flexible touch sensor based on an electrode array, which has the characteristics of good flexibility, low cost and high adaptability.
In order to achieve the purpose, the invention adopts the technical scheme that:
a flexible tactile sensor based on an electrode array, characterized in that: the flexible imitation body is arranged on the circuit board, conductive liquid is filled between the circuit board and the flexible imitation body, and a plurality of flexible bulges which can contact with the circuit board and deform are arranged on the lower surface of the flexible imitation body; the circuit board is provided with a plurality of electrode points which are contacted with the conductive liquid and a data acquisition device for measuring the liquid resistance change between the electrode points, and the circuit board between the electrode points is arranged in an insulating way; the position and the magnitude of the force applied to the soft dummy are determined by the resistance change of the liquid at the corresponding electrode points.
Furthermore, the electrode points comprise a plurality of excitation electrode points and sensing electrode points which are distributed in a staggered mode, and the data acquisition device comprises a data acquisition card, a reference resistor, a capacitor and an excitation source for sending out an excitation signal;
all excitation electrode points are connected in parallel and then connected in series on an excitation source through a capacitor, the excitation source sends out rectangular pulse excitation voltage, and the rectangular pulse excitation voltage is converted into bipolar alternating voltage through the capacitor and is loaded to the excitation electrode points;
and a reference resistor is connected behind each sensing electrode point, the other end of the reference resistor is grounded, and the data acquisition card is used for acquiring the voltage value of the reference resistor.
The invention also provides a preparation method of the flexible touch sensor, which is characterized by comprising the following steps:
step 1, preparing a mould according to the shape and the size of the soft imitation, and preparing the soft imitation by adopting silica gel pouring;
step 2, mounting the circuit board in the middle of the base through gluing, and placing the pin header in a central control groove of the base;
step 3, covering the soft imitation body on the circuit board, assembling the sealing bulge at the lower part of the soft imitation body in the sealing groove of the base, pressing the annular pressing plate on the soft imitation body, and fixing the annular pressing plate on the base body through a fastening piece;
step 4, a hollow needle penetrates through the circular truncated cone-shaped bulge from one puncture hole in the annular pressing plate until the hollow needle is used as an exhaust pipe in the conical hole, an injection needle with conductive liquid penetrates through the circular truncated cone-shaped bulge from the other puncture hole until the conical hole is filled into the sealed space, and the hollow needle and the injection needle are pulled out until the sealed space is filled with the conductive liquid, so that the conductive liquid is filled;
step 5, connecting the electrode points of the circuit board with a data acquisition device through the pin header;
and 6, pressure calibration, namely pressing the touch sensor by using a standard force sensor, recording the indication value of the standard force sensor, the voltage value of a sensing electrode point and the measurement value of the pressure sensor, and fitting and training data by using a model to obtain a calibrated function model, namely completing the preparation of the flexible touch sensor.
The invention has the beneficial effects that:
1. the contact point can be quickly positioned by sensing the voltage change of the electrode, and the data acquisition rate can be very high along with the improvement of the performance of the data acquisition unit.
2. The model is used for fitting the relation among the voltage values of all sensing electrodes, the pressure sensor measurement values and the real contact pressure values, the trained model can be used for predicting the magnitude of the contact force, and high precision can be achieved within a certain range.
3. The bionic silica gel with the hardness close to the skin of a human body is used, so that the sensor has the bionic characteristic, the conducting liquid is filled in the lower layer of the bionic silica gel, the flexibility of a contact area is further increased, and the sensor can be fully contacted with objects in various shapes.
4. The main parts of the sensor are manufactured by using a 3D printing technology, rapid modification and forming are supported, the appearance of the sensor can be conveniently modified to adapt to various use scenes, and the manufacturing cost is extremely low compared with other similar products.
Drawings
FIG. 1 is an overall profile view of a flexible tactile sensor according to the present invention;
FIG. 2 is a schematic circuit diagram of a flexible tactile sensor according to the present invention;
FIG. 3 is an exploded view of a flexible tactile sensor according to the present invention;
FIG. 4 is a cross-sectional view of a flexible tactile sensor according to the present invention;
FIG. 5 is a bottom view of a silicone phantom of the flexible touch sensor of the present invention;
FIG. 6 is a diagram of the base structure of the flexible tactile sensor of the present invention;
FIG. 7 is a block diagram of a conductive fluid injection channel of the flexible tactile sensor according to the present invention;
fig. 8 is a circuit board structure view of the flexible tactile sensor according to the present invention;
fig. 9 is a drawing of upper and lower molds of silicone rubber replicas of the flexible touch sensor according to the present invention.
The pressure sensor comprises a base 1, a sealing groove 11, a sealing groove 12, a middle through hole 13, a mounting hole 14, a mounting groove 15, a conductive liquid injection channel 16, a pressure measurement channel 17, a pressure sensor mounting seat 18, a taper hole 2, a silica gel imitation body 21, a sealing bulge 22, a pyramid-shaped bulge 23, a semicircular section stripe 24, a truncated cone-shaped bulge 25, a tactile part 26, a blank holder 26, an annular pressing plate 3, a puncture hole 31, a screw 4, a pressure sensor 5, a pressing plate 6, a circuit board 7, a bottom pin 71, an excitation electrode point 72, a sensing electrode point 73, an upper die 8 and a lower die 9.
Detailed Description
In order to make the technical problems and technical solutions to be solved by the present invention clearer, the following describes a flexible tactile sensor based on an electrode array in detail with reference to the accompanying drawings and embodiments, which are used for explanation and not for limitation.
As shown in fig. 1 to 8, the present invention provides a flexible touch sensor based on an electrode array, which at least comprises a circuit board 7 and a flexible dummy body with elasticity, which is arranged on the circuit board 7, wherein a conductive liquid is filled between the circuit board 7 and the flexible dummy body, and a flexible protrusion capable of contacting with the circuit board 7 and deforming is arranged on the lower surface of the flexible dummy body; a large number of electrode points which are contacted with the conductive liquid and a data acquisition device for measuring the liquid resistance change between the electrode points are arranged on the circuit board 7, and the circuit board 7 between the electrode points is arranged in an insulating way; the position and the magnitude of the force applied to the soft dummy are determined by the resistance change of the liquid at the corresponding electrode points.
In this embodiment, the soft imitation is a silica gel imitation 2 made of silica gel, and has good resilience and touch.
When the silica gel imitation body 2 is pressed, the soft bulges can be firstly contacted with the circuit board 7, the soft bulges near the contact gradually deform along with the increase of the pressure, and the conductive liquid is discharged to the periphery, so that the conductive performance near the contact is reduced, the liquid resistance is increased, and the partial pressure of the sensing electrode point 73 near the contact is reduced. According to the measured voltage change of the sensing electrode points 73 on the circuit board 7, the corresponding coordinates of the sensing electrode points are synthesized according to the voltage change proportion, and the contact position of the silica gel imitation body 2 and the circuit board 7 when the silica gel imitation body is pressed, namely the position of the contact point on the upper surface of the silica gel imitation body 2 can be calculated.
As a preferred embodiment, referring to fig. 2 and 8, the electrode points include a plurality of excitation electrode points 72 and sensing electrode points 73 distributed in a staggered manner, and the data acquisition device includes a data acquisition card, a reference resistor, a capacitor, and an excitation source for emitting an excitation signal;
all the excitation electrode points 72 are connected in parallel and then connected in series on an excitation source through capacitors, the excitation source sends out rectangular pulse excitation voltage, and the rectangular pulse excitation voltage is converted into bipolar alternating voltage through the capacitors and loaded to the excitation electrode points 72;
a reference resistor is connected behind each sensing electrode point 73, and the other end of the reference resistor is grounded; a complete circuit structure is formed by an excitation power supply anode, a capacitor, an excitation electrode point 72, a liquid resistor, a sensing electrode point 73, a reference resistor and a power supply cathode (grounded);
the data acquisition card is used for acquiring the voltage value of the reference resistor.
As a preferred embodiment, the sensing electrode points 73 are distributed around the excitation electrode points 72, so that the sensing electrode points 73 can be measured conveniently.
As a preferred embodiment, referring to fig. 3 and 4, a sealed space is formed between the circuit board 7 and the silicone imitation body 2, and a pressure sensor 5 is further included for measuring the pressure of the conductive liquid in the space, and the pressure on the silicone imitation body 2 obtained by the resistance change of the liquid is corrected by pressure measurement. When the surface of the silica gel imitation body 2 is pressed, the internal sealing space is reduced, the pressure of the conductive liquid is increased, the pressure intensity sensor 5 can be switched on to measure the pressure change of the conductive liquid, and the pressure of the contact point can be calculated by combining the voltage value measured by the sensing electrode point 73 and model fitting data.
As a preferred embodiment, referring to fig. 3 and 4, the flexible touch sensor further includes a base 1, the circuit board 7 is mounted in the middle of the base 1, and the silicone rubber dummy 2 is pressed on the base 1 around the circuit board 7 by the annular pressing plate 3.
As a preferred embodiment, referring to fig. 6, a mounting groove 14 for mounting a circuit board 7 is formed in the middle of the base 1, a middle through hole 12 penetrating downwards is formed in the middle of the mounting groove 14, a pin header connected to an excitation electrode point 72 and a sensing electrode point 73 is formed on the back surface of the circuit board 7, the pin header is disposed in the middle through hole 12, and the periphery of the circuit board 7 is hermetically connected to the base 1 around the middle through hole 12 to form a sealed space below the silicone rubber dummy 2.
In this embodiment, the peripheral edge of the circuit board 7 is coated with a sealant to adhere to the base 1, so as to seal and prevent leakage.
As a preferred embodiment, referring to fig. 4 and 8, the circuit board 7 is a double-layer printed circuit board 7, divided into a top layer and a bottom layer. A plurality of excitation electrode points 72 and sensing electrode points 73 are distributed on the top layer, the excitation electrode points 72 and the sensing electrode points 73 are all solid circles with the same diameter, only the excitation electrode points 72 and the sensing electrode points 73 are exposed outside the top layer, and the rest parts are covered with green oil to form insulation protection. Electronic components and pins for communicating with the outside are welded on the bottom layer of the circuit board 7, after the circuit board is connected with a power supply, bipolar rectangular pulse excitation voltage can be generated at the excitation electrode point 72, and the bottom pin 71 is connected with the sensing electrode point 73 in parallel and can measure the voltage at the sensing electrode point 73.
As a preferred embodiment, see fig. 6, be equipped with round sealed slot 11 on base 1, the imitative body 2 of silica gel is equipped with all around the bottom and can install the sealed protruding 21 (this embodiment is the semicircle cross-section sealing strip) in sealed slot 11, annular pressure plate 3 passes through the fastener (for example screw 4) to be fixed on base 1, through sealed slot 11 and the protruding 21 cooperation of sealed, forms sealed space between imitative body 2 of silica gel and circuit board 7, through sealed slot 11 and the protruding 21 setting of sealed, has utilized the silica gel self characteristic to improve sealed space's sealing performance, reduces external environment and disturbs.
As a preferred embodiment, referring to fig. 3, 4 and 7, the middle part of the silicone rubber imitation body 2 protrudes upwards to form a tactile part 25, the upper surface of the tactile part 25 is provided with a plurality of semicircular cross-section-shaped stripes 23, when an object slides on the surface of the silicone rubber, a vibration signal can be generated and detected by the pressure sensor 5, the surface characteristics of different objects are different, and the generated vibration signal is also different, so that the type of the contacted object can be judged according to the vibration signal. Furthermore, the striped structure may also increase the friction upon contact.
As a preferred embodiment, referring to fig. 4, the soft protrusions on the lower surface of the tactile part 25 are pyramid-shaped protrusions 22 with downward conical tips made of the same material, and the deformation capability of the protrusions is improved by the pyramid-shaped protrusions 22, which indirectly improves the measurement accuracy. Tactile portion 25 is all around for the blank pressing 26 with annular pressure plate 3 complex, has improved the fastness of imitating body 2 to silica gel through setting up of blank pressing 26, improves limit environment reply ability.
As a preferred embodiment, referring to fig. 3 and 4, the base 1 is provided at a side thereof with a pressure measuring channel 16 leading into the sealed space, and the pressure sensor 5 is provided in the pressure measuring channel 16 to measure a pressure change of the conductive liquid, thereby correcting the contact pressure obtained from the sensing electrode point 73. As a specific installation mode, the pressure measurement channel 16 extends to the side part of the base 1, the pressure sensor 5 installation seat 17 is arranged on the periphery of the pressure measurement channel 16 on the side part of the base 1, the pressure sensor 5 is fixed on the pressing sheet 6, the pressing sheet 6 is fixed on the pressure sensor 5 installation seat 17 through bolts, the root part of the pressure sensor 5 is conical, and when the pressing sheet 6 is fixed through the bolts, the conical shape of the root part of the pressure sensor 5 is tightly pressed on the end part of the pressure measurement channel 16 for sealing.
As a preferred embodiment, referring to fig. 6 and 7, at least two taper holes 18 are formed in the base 1 outside the sealing groove 11, the bottoms of the taper holes 18 are connected with the inside of the sealing space through a conductive liquid injection channel 15 provided with the inner wall of the base 1, the silicone imitation body 2 is provided with truncated cone-shaped protrusions 24 which are installed in the taper holes 18 and matched with the shape of the taper holes, piercing holes 31 corresponding to the positions and the number of the truncated cone-shaped protrusions 24 are formed in the annular plate, and the piercing needles pierce the truncated cone-shaped protrusions 24 of the silicone imitation body 2 from the piercing holes 31 to fill or discharge conductive liquid or exhaust gas into the sealing space.
As a preferred embodiment, the invention further provides a method for preparing the silica gel phantom 2, which comprises the steps of designing a mold according to the shape of the silica gel phantom 2, and manufacturing the mold by 3D printing, wherein the mold designed herein is divided into an upper mold 8 and a lower mold 9. And (3) assembling the upper die 8 and the lower die 9 together, injecting the mixed silica gel stock solution from an injection port, and forming the silica gel imitation body 2 in a special shape after solidification.
The invention also provides a preparation method of the flexible touch sensor, which comprises the following steps:
step 1, referring to fig. 9, a mold is prepared according to the shape and size of the silica gel imitation 2, and the silica gel imitation 2 is prepared by silica gel casting;
step 2, mounting the circuit board 7 in the middle of the base 1 through gluing, and placing the pin header in a central control groove of the base 1;
step 3, covering the silica gel imitation body 2 on the circuit board 7, assembling a sealing bulge 21 at the lower part of the silica gel imitation body 2 in a sealing groove 11 of the base 1, pressing the annular pressing plate 3 on the silica gel imitation body 2, and fixing the annular pressing plate 3 on the base body through a fastening piece;
step 4, a hollow needle penetrates through the circular truncated cone-shaped bulge 24 from one puncture hole 31 on the annular pressing plate 3 until the inside of the conical hole 18 is used as an exhaust pipe, an injection needle with conductive liquid penetrates through the circular truncated cone-shaped bulge 24 from the other puncture hole 31 until the inside of the conical hole 18 is filled into the sealed space until the sealed space is filled with the conductive liquid, and the hollow needle and the injection needle are pulled out to finish the filling of the conductive liquid;
specifically, two injectors with thin needle tubes are taken, the round table-shaped bulges 24 pierce through the dummy silica gel and extend into the tapered hole 18, one injector only keeps the needle tube as an exhaust port, and the other injector sucks the conductive liquid and then injects the conductive liquid into a sealed space below the silica gel dummy 2. In particular, the conductive liquid injected into the touch sensor completely fills the sealed space, so that no air bubbles are left, and the air bubbles can be extruded out of the exhaust channel in a squeezing mode during the injection process.
Step 5, connecting the electrode points of the circuit board 7 with a data acquisition device through pin headers;
and 6, pressure calibration, namely pressing the touch sensor by using a standard force sensor, recording the indication number of the standard force sensor, the voltage value of a sensing electrode point 73 and the measured value of the pressure sensor 5, and fitting and training data by using a model to obtain a calibrated function model, namely completing the preparation of the flexible touch sensor.
Further, referring to the drawings, the process of making the dummy silica gel is as follows: the structure of the upper die 8 and the lower die 9 is designed according to the shape of the silica gel imitation body 2, and 3D printing is used for manufacturing the dies. Aligning and assembling an upper die 8 and a lower die 9, screwing and fixing the upper die and the lower die by using a screw 4, mixing the solution A and the solution B of the silica gel stock solution according to the proportion of 1:1, fully stirring, and then carrying out defoaming treatment to remove bubbles in the silica gel solution. And then injecting silica gel liquid from an injection port of the mold by using a syringe injector, indicating that the silica gel liquid is filled in the mold when the silica gel liquid flows out from the other side of the mold, stopping injection, standing for solidification of the silica gel liquid, then disassembling the mold, and taking out the molded silica gel imitation 2.
Further, referring to fig. 1, the following is a description of a possible use case: first, the tactile sensor is assembled, and a conductive liquid is injected into a sealed space inside the sensor by using a syringe. Next, the bottom pin header 71, the excitation source and the data collector on the circuit board 7 are connected by using wires, programs are written into the excitation source and the data collector, the excitation source is controlled to emit rectangular pulse excitation voltage, and the data collector is controlled to measure the voltage value of the sensing electrode point 73. Then, the newly assembled tactile sensor is pressure-calibrated: and pressing the touch sensor by using a standard force sensor, recording the readings (namely the magnitude of contact force) of the standard force sensor, the voltage value of the sensing electrode point 73 and the measured value of the pressure sensor 5, and fitting and training the data by using a model to obtain a calibrated function model. Finally, when the touch sensor is used, an object is in contact with the silica gel imitation body 2, so that the voltage at the sensing electrode point 73 near the contact point is changed, the position of the contact point can be calculated, the pressure of the contact point can be calculated according to a function model obtained through calibration, and the position of the contact object and the contact force information can be obtained.
The above embodiments are merely illustrative of the present invention and are not to be construed as limiting the invention. Although the present invention has been described in detail with reference to the embodiments, it should be understood by those skilled in the art that various combinations, modifications or equivalents may be made to the technical solution of the present invention without departing from the spirit and scope of the technical solution of the present invention, and the technical solution of the present invention is covered by the claims of the present invention.

Claims (10)

1. A flexible tactile sensor based on an electrode array, characterized in that: the flexible imitation body is arranged on the circuit board, conductive liquid is filled between the circuit board and the flexible imitation body, and a plurality of flexible bulges which can contact with the circuit board and deform are arranged on the lower surface of the flexible imitation body; the circuit board is provided with a plurality of electrode points which are contacted with the conductive liquid and a data acquisition device for measuring the liquid resistance change between the electrode points, and the circuit board between the electrode points is arranged in an insulating way; the position and the magnitude of the force applied to the soft dummy are determined by the resistance change of the liquid at the corresponding electrode points.
2. The flexible tactile sensor according to claim 1, wherein: the electrode points comprise a plurality of excitation electrode points and sensing electrode points which are distributed in a staggered mode, and the data acquisition device comprises a data acquisition card, a reference resistor, a capacitor and an excitation source for sending out an excitation signal;
all excitation electrode points are connected in parallel and then connected in series on an excitation source through a capacitor, the excitation source sends out rectangular pulse excitation voltage, and the rectangular pulse excitation voltage is converted into bipolar alternating voltage through the capacitor and is loaded to the excitation electrode points;
and a reference resistor is connected behind each sensing electrode point, the other end of the reference resistor is grounded, and the data acquisition card is used for acquiring the voltage value of the reference resistor.
3. The flexible tactile sensor according to claim 2, wherein: the pressure measurement device comprises a circuit board, a soft imitation body and a pressure sensor, wherein a sealed space is arranged between the circuit board and the soft imitation body, the pressure sensor is used for measuring the pressure of conducting liquid in the space, and the pressure on the soft imitation body obtained through the resistance change of the liquid is corrected through the pressure measurement.
4. The flexible tactile sensor according to claim 3, wherein: the flexible imitation body is pressed on the base around the circuit board through the annular pressing plate.
5. The flexible tactile sensor according to claim 4, wherein: the base is provided with a circle of sealing groove, the periphery of the bottom of the soft imitation body is provided with a sealing bulge which can be installed in the sealing groove, and a sealing space is formed between the soft imitation body and the circuit board through the matching of the sealing groove and the sealing bulge.
6. The flexible tactile sensor according to claim 4, wherein: the middle part of the soft imitation body protrudes upwards to form a touch part, the upper surface of the touch part is provided with a plurality of strips in the shape of a semicircular section, the soft protrusion on the lower surface of the touch part is a pyramid protrusion with a downward conical tip made of the same material, and the periphery of the touch part is provided with a blank holder matched with the annular pressing plate.
7. The flexible tactile sensor according to claim 5, wherein: the flexible imitation body is characterized in that a middle through hole is formed in the middle of the base, a row needle connected with the excitation electrode point and the sensing electrode point is arranged on the back face of the circuit board, the row needle is arranged in the middle through hole, and the periphery of the circuit board is connected with the base around the middle through hole in a sealing mode so as to form a sealing space below the flexible imitation body.
8. The flexible tactile sensor according to claim 7, wherein: the side part of the base is provided with a pressure measuring channel communicated with the sealed space, and the pressure sensor is arranged in the pressure measuring channel.
9. The flexible tactile sensor according to claim 8, wherein: be equipped with two at least bell mouths on the base in the sealed slot outside, the bell mouth bottom links to each other in conducting solution injection channel through being equipped with the base inner wall and the enclosure space, soft imitative body is equipped with installs in the bell mouth and the round platform form arch rather than the shape matching, be equipped with the puncture hole that corresponds with round platform form protruding position and quantity on the annular plate, pierce through the pjncture needle from the puncture hole and fill in the round platform form arch of soft imitative body to the enclosure space and fill conducting liquid or exhaust.
10. A method of making a flexible touch sensor according to claim 9, comprising the steps of:
step 1, preparing a mould according to the shape and the size of the soft imitation, and preparing the soft imitation by adopting silica gel pouring;
step 2, mounting the circuit board in the middle of the base through gluing, and placing the pin header in a central control groove of the base;
step 3, covering the soft imitation body on the circuit board, assembling the sealing bulge at the lower part of the soft imitation body in the sealing groove of the base, pressing the annular pressing plate on the soft imitation body, and fixing the annular pressing plate on the base body through a fastening piece;
step 4, a hollow needle penetrates through the circular truncated cone-shaped bulge from one puncture hole in the annular pressing plate until the hollow needle is used as an exhaust pipe in the conical hole, an injection needle with conductive liquid penetrates through the circular truncated cone-shaped bulge from the other puncture hole until the conical hole is filled into the sealed space, and the hollow needle and the injection needle are pulled out until the sealed space is filled with the conductive liquid, so that the conductive liquid is filled;
step 5, connecting the electrode points of the circuit board with a data acquisition device through the pin header;
and 6, pressure calibration, namely pressing the touch sensor by using a standard force sensor, recording the indication value of the standard force sensor, the voltage value of a sensing electrode point and the measurement value of the pressure sensor, and fitting and training data by using a model to obtain a calibrated function model, namely completing the preparation of the flexible touch sensor.
CN202210178729.2A 2022-02-25 2022-02-25 Flexible touch sensor based on electrode array and preparation method thereof Active CN114623958B (en)

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