CN114610092B - Self-overlapping temperature control equipment - Google Patents
Self-overlapping temperature control equipment Download PDFInfo
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- CN114610092B CN114610092B CN202210112882.5A CN202210112882A CN114610092B CN 114610092 B CN114610092 B CN 114610092B CN 202210112882 A CN202210112882 A CN 202210112882A CN 114610092 B CN114610092 B CN 114610092B
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- G05D23/19—Control of temperature characterised by the use of electric means
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Abstract
The invention relates to the technical field of temperature control, and provides self-cascade temperature control equipment which comprises a self-cascade refrigeration system and a temperature control system, wherein the self-cascade refrigeration system comprises a compressor and a multi-stage self-cascade heat exchange loop, the self-cascade heat exchange loop comprises a heat release pipeline of a heat exchanger, a gas-liquid separator, a throttling component, a heat absorption pipeline of the heat exchanger and a heat absorption pipeline of the heat exchanger, and the heat release pipeline of the heat exchanger is connected with at least one of the heat absorption pipeline of the heat exchanger, the heat absorption pipeline of the heat exchanger and the heat absorption pipeline of the next stage of heat exchanger through the throttling component; the temperature control system comprises a multi-stage temperature control loop, the temperature control loop exchanges heat with a heat absorption pipeline of the heat exchanger, and at least one stage of temperature control loop exchanges heat with a heat absorption pipeline of the heat exchanger of the multi-stage self-cascade heat exchange loop. The self-cascade temperature control equipment provided by the invention can simplify the layout mode of a heat exchange loop and meet the temperature control requirement of a multi-channel wide temperature area by matching the self-cascade refrigeration system and the temperature control system.
Description
Technical Field
The invention relates to the technical field of temperature control, in particular to a self-overlapping temperature control device.
Background
In the integrated circuit manufacturing industry and the integrated circuit process, in order to meet the requirements of process processing, new requirements are provided for the temperature range of semiconductor temperature control equipment and the number of channels with different temperatures. At present, the low temperature requirement is basically in the range of-20 to-70 ℃, the single-stage compression refrigeration can be realized at the temperature of-40 ℃ above, a two-stage cascade refrigeration mode can be adopted at the temperature of-70 ℃, but no equipment capable of meeting the requirement exists at present for the lower temperature requirement.
The requirement of the semiconductor process for the number of channels with different temperatures changes with the increase of the positions needing temperature control, and when an electrostatic-adsorption tray (ESC) needs to change the temperature rapidly, cooling liquids with different temperatures in a plurality of channels are needed to be switched or mixed to reach the required temperature. At present, independent channel designs are adopted, and each channel is provided with a respective independent refrigerating or heating system, so that the equipment system is complex and large in size.
In the related art, when a plurality of channels of cooling liquid are required, a plurality of independent channels are provided, each channel operates independently and has a respective refrigeration system, and the equipment is complicated. The reason for this problem is that the process requirements of the integrated circuit main process equipment are increased, and the related semiconductor dedicated temperature control equipment is difficult to meet the requirements of the low temperature control equipment corresponding to the requirements.
Disclosure of Invention
The invention provides a self-cascade temperature control device, which is used for solving the defect of complex devices in the prior art, and can reduce the number of parts such as compressors of a refrigerating system, simplify the layout mode of a heat exchange loop and meet the temperature control requirement by matching a self-cascade refrigerating system and a temperature control system.
The invention provides a self-overlapping temperature control device, which comprises:
the self-cascade refrigeration system comprises a compressor and a multi-stage self-cascade heat exchange loop, wherein the self-cascade heat exchange loop comprises a heat release pipeline of a heat exchanger, a gas-liquid separator, throttling components, a heat absorption pipeline of the heat exchanger and a heat absorption pipeline of the heat exchanger, the heat release pipeline of the heat exchanger of the self-cascade heat exchange loop is communicated, the heat absorption pipeline of the heat exchanger of the self-cascade heat exchange loop is communicated, and the outlet end of the heat release pipeline of each heat exchanger is provided with a plurality of throttling components; an inlet of the gas-liquid separator is communicated with a heat release pipeline of the heat exchanger of the current stage, a second outlet of the gas-liquid separator is communicated with the throttling component of the current stage, and a first outlet of the gas-liquid separator is communicated with a heat release pipeline of the heat exchanger of the next stage; the heat release pipeline of the heat exchanger is connected with at least one of the heat absorption pipeline of the heat exchanger, the heat absorption pipeline of the heat exchanger of the current stage and the heat absorption pipeline of the heat exchanger of the next stage through the throttling component, wherein the heat release pipelines of the heat exchangers from the first-stage self-overlapping heat exchange loop to the second-last-stage self-overlapping heat exchange loop are connected with the heat absorption pipelines of the heat exchangers in corresponding number through a plurality of throttling components;
the temperature control system comprises a multi-stage temperature control loop, the temperature control loop exchanges heat with a heat absorption pipeline of the heat exchanger, and at least one stage of temperature control loop exchanges heat with the heat absorption pipeline of the heat exchanger of the multi-stage self-cascade heat exchange loop.
According to the self-overlapping temperature control equipment provided by the invention, the gas-liquid separator is used for separating the refrigerant, and the boiling point of the refrigerant separated by the second outlet is gradually reduced.
According to the self-cascade temperature control equipment provided by the invention, the self-cascade heat exchange loop comprises a first-stage self-cascade heat exchange loop and a second-stage self-cascade heat exchange loop, wherein the first-stage self-cascade heat exchange loop comprises a first heat exchanger, a first gas-liquid separator, a sixth throttling element, a seventh throttling element, an eighth throttling element, a ninth throttling element, a heat absorption pipeline of a fourth heat exchanger and a heat absorption pipeline of a fifth heat exchanger;
a heat release pipeline of the first heat exchanger is communicated with an inlet of the first gas-liquid separator;
the second outlet of the first gas-liquid separator, the ninth throttling component and a heat absorption pipeline of the first heat exchanger are communicated;
the second outlet of the first gas-liquid separator, the eighth throttling component, the heat absorption pipeline of the fifth heat exchanger and the heat absorption pipeline of the first heat exchanger are communicated, and the heat absorption pipeline of the fifth heat exchanger exchanges heat with the first-stage temperature control loop;
the second outlet of the first gas-liquid separator, the seventh throttling element, the heat absorption pipeline of the fourth heat exchanger and the heat absorption loop of the first heat exchanger are communicated, and the heat absorption pipeline of the fourth heat exchanger exchanges heat with the second-stage temperature control loop;
the second outlet of the first gas-liquid separator and the sixth throttling component are communicated with the second-stage self-cascade heat exchange loop.
According to the self-cascade temperature control equipment provided by the invention, the second-stage self-cascade heat exchange loop comprises a second heat exchanger, a second gas-liquid separator, a third throttling component, a fourth throttling component, a fifth throttling component, a heat absorption pipeline of a third heat exchanger and a heat absorption pipeline of a second heat exchanger;
the first outlet of the first gas-liquid separator and the heat release pipeline of the second heat exchanger are communicated with the inlet of the second gas-liquid separator;
the second outlet of the second gas-liquid separator and the fifth throttling component are communicated with the heat absorption pipeline of the third heat exchanger and the heat absorption pipeline of the second heat exchanger;
the second outlet of the second gas-liquid separator, the fourth throttling component, the heat absorption pipeline of the second heat exchanger and the heat absorption pipeline of the second heat exchanger are communicated;
the second outlet of the second gas-liquid separator and the third throttling component are communicated with the third-stage self-cascade heat exchange loop.
According to the self-cascade temperature control equipment provided by the invention, the third-stage self-cascade heat exchange loop comprises a third-stage heat exchanger, a first throttling part, a second throttling part and a heat absorption pipeline of the first heat exchanger;
the heat release pipeline of the third-stage heat exchanger, the second throttling component, the heat absorption pipeline of the first heat exchanger and the heat absorption pipeline of the third-stage heat exchanger are communicated;
and the heat release pipeline of the third-stage heat exchanger, the first throttling component and the heat absorption pipeline of the third-stage heat exchanger are communicated.
According to the self-cascade temperature control equipment provided by the invention, the third-stage heat exchanger comprises a third heat exchanger and a fourth heat exchanger, a heat release pipeline of the third heat exchanger is communicated with a heat release pipeline of the fourth heat exchanger, the third throttling part is communicated with a heat absorption pipeline of the third heat exchanger, the second throttling part is arranged between the heat release pipeline of the fourth heat exchanger and the heat absorption pipeline of the first heat exchanger, and the first throttling part is arranged between the heat absorption pipeline of the fourth heat exchanger and the heat release pipeline of the fourth heat exchanger; and a heat release pipeline of the fourth heat exchanger, the second throttling part and a heat absorption pipeline of the first heat exchanger are communicated with a heat absorption pipeline of the third heat exchanger.
According to the self-cascade temperature control equipment provided by the invention, the temperature control loop comprises a third-stage temperature control loop, and the third-stage temperature control loop comprises a heat release pipeline of the first heat exchanger and a heat release pipeline of the second heat exchanger which are communicated with each other.
According to the self-cascade temperature control equipment provided by the invention, the temperature control circuit comprises a second-stage temperature control circuit, and the second-stage temperature control circuit comprises a heat release pipeline of the third heat exchanger and a heat release pipeline of the fourth heat exchanger which are communicated with each other.
According to the self-overlapping temperature control equipment provided by the invention, the sixth throttling component is communicated with the heat absorption pipeline of the second heat exchanger.
The invention also provides self-cascade temperature control equipment, wherein the last stage of self-cascade heat exchange loop comprises two heat exchangers, the two heat exchangers are respectively a last heat exchanger and a penultimate heat exchanger, and a heat release pipeline of the last heat exchanger is connected with two throttling parts; one throttling part is connected with a heat absorption pipeline of the last heat exchanger, and the heat absorption pipeline of the last heat exchanger is connected with a heat absorption pipeline of the penultimate heat exchanger; and the other throttling part is connected with the heat absorption pipeline of the last heat exchanger.
The self-cascade temperature control equipment comprises a self-cascade refrigeration system and a temperature control system, wherein the self-cascade refrigeration system provides refrigeration capacity for the temperature control system, and the self-cascade temperature control system provides a refrigerant for a multi-stage self-cascade heat exchange loop through a compressor, so that the structure of the self-cascade temperature control system is simplified, and the size of the equipment is reduced; each stage of the auto-cascade heat exchange loop is provided with a plurality of throttling components, namely, each stage of the auto-cascade heat exchange loop can supply cold for a plurality of places. The temperature control loop can exchange heat with a multi-stage auto-cascade heat exchange loop to widen the temperature range of the temperature control loop and realize wide temperature zone control; the requirement of a plurality of channels of cooling liquid can be met only through one set of low-temperature refrigeration system, the application range can be enlarged, and the wider requirement can be met.
Drawings
In order to more clearly illustrate the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic structural diagram of a self-cascade temperature control device provided by the present invention;
reference numerals:
COMP, compressor; CON and a condenser; OS, oil separator;
HE1, a first heat exchanger; HE2, a second heat exchanger; HE3, a third heat exchanger; HE4, a fourth heat exchanger;
EEV1, a first throttling component; EEV2, a second throttling component; EEV3, third throttling component; EEV4, fourth throttling means; EEV5, fifth throttle member; EEV6, sixth throttling component; EEV7, seventh throttling means; EEV8, eighth throttling component; EEV9, ninth throttling means;
SPR1, a first gas-liquid separator; SPR2 and a second gas-liquid separator;
EVA1, first heat exchanger; EVA2, a second heat exchanger; EVA3, third heat exchanger; EVA4, fourth heat exchanger; EVA5, fifth heat exchanger;
TANK1, a first water TANK; TANK2, a second water TANK; TANK3, third water TANK;
HT1, first heater; HT2, second heater; HT3, third heater;
a PUMP1 and a first PUMP body; a PUMP2 and a second PUMP body; a PUMP3 and a third PUMP body;
t1, a first temperature sensor; t2, a second temperature sensor; t3, a third temperature sensor; t4, a fourth temperature sensor; t5, a fifth temperature sensor; t6, a sixth temperature sensor; t7, a seventh temperature sensor; t8, an eighth temperature sensor; t9, ninth temperature sensor;
FS1, a first flow meter; FS2, second flow meter; FS3, third flow meter;
p1, a first pressure sensor; p2, a second pressure sensor; p3, a third pressure sensor;
CH1, a low temperature channel; CH2, a medium temperature channel; CH3, high temperature channel.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In addition, in the description of the present invention, "a plurality", and "a plurality" mean two or more unless otherwise specified.
Referring to fig. 1, the present invention provides a self-cascade temperature control apparatus, comprising: a self-cascade refrigeration system and a temperature control system. The self-cascade refrigeration system provides cold energy for the temperature control system so that the temperature control system reaches a target temperature range.
The self-cascade refrigeration system comprises a compressor COMP and a multi-stage self-cascade heat exchange loop, wherein each stage of self-cascade heat exchange loop comprises a heat release pipeline, a gas-liquid separator, a throttling component and a heat absorption pipeline, so that the self-cascade heat exchange loop is communicated with the compressor COMP to form a heat exchange cycle.
In some cases, the self-cascade refrigeration system is filled with mixed refrigerants comprising refrigerants with different boiling points, so that each stage of the self-cascade heat exchange loop separates different kinds of refrigerants, and the different kinds of refrigerants have different heat exchange capacities. When the self-cascade refrigeration system comprises a three-stage self-cascade heat exchange loop, the refrigerant can be a mixture of R134a/R23/R14, but the refrigerant is not limited to the mixture, and other refrigerant mixtures capable of meeting the requirements are also possible.
The inlet of the gas-liquid separator is communicated with the heat release pipeline of the heat exchanger of the stage, the second outlet of the gas-liquid separator is communicated with the throttling component of the stage, and the refrigerant flowing out of the second outlet mainly exchanges heat in the self-cascade heat exchange loop of the stage, such as the refrigerant is supplied to the heat absorption pipeline of the heat exchanger of the stage and the heat absorption pipeline of the heat exchanger of the stage, and can also be supplied to the heat absorption pipeline of the heat exchanger of the next stage; the first outlet of the gas-liquid separator is communicated with the heat release pipeline of the next-stage heat exchanger, and the refrigerant flowing out of the first outlet enters the heat release pipeline of the next-stage heat exchanger.
The two-stage self-cascade heat exchange loop is divided by a refrigerant, the boiling point of the refrigerant is reduced step by step, and the boiling point of the refrigerant separated from the stage self-cascade heat exchange loop is higher than that of the refrigerant separated from the next stage self-cascade heat exchange loop.
The self-cascade heat exchange loops comprise heat release pipelines of the heat exchangers, throttling parts, heat absorption pipelines of the heat exchangers and heat absorption pipelines of the heat exchangers, the heat release pipelines of the heat exchangers of the multi-stage self-cascade heat exchange loops are communicated, and the heat absorption pipelines of the heat exchangers of the multi-stage self-cascade heat exchange loops are communicated. The heat releasing pipeline and the heat absorbing pipeline of the same heat exchanger exchange heat, refrigerant in the heat releasing pipeline of the heat exchanger flows back to the heat releasing pipeline of the heat exchanger of the current stage or flows into the heat releasing pipeline of the next stage of heat exchanger after being expanded by the throttling component, or the refrigerant in the heat releasing pipeline of the heat exchanger is expanded by the throttling component and introduced into the heat absorbing pipeline of the heat exchanger for heat exchange, and then introduced into the heat releasing pipeline of the heat exchanger (the heat exchanger can be the heat exchanger of the current stage or the next stage of heat exchanger).
The outlet end of the heat release pipeline of each heat exchanger is provided with a plurality of throttling components, and the heat release pipeline of each heat exchanger is connected with at least one of the heat absorption pipeline of the heat exchanger, the heat absorption pipeline of the heat exchanger of the current stage and the heat absorption pipeline of the next stage of heat exchanger through the throttling components. The heat-absorbing pipelines of the heat exchangers in the first-stage self-cascade heat exchange loop to the penultimate self-cascade heat exchange loop are connected with the heat-absorbing pipelines of the corresponding number of heat exchangers through a plurality of throttling components, namely, the heat-absorbing pipelines of each heat exchanger are communicated with the heat-releasing pipelines of the heat exchangers through the throttling components.
The heat releasing pipeline of the last stage of heat exchanger can be connected with the heat absorbing pipeline of one heat exchanger through one throttling part, or the heat releasing pipeline of the last stage of heat exchanger is connected with the heat absorbing pipelines of a plurality of heat exchangers through a plurality of throttling parts, and the heat releasing pipeline can be selected according to the requirement.
The temperature control system comprises a multistage temperature control loop, the temperature control loop exchanges heat with a heat absorption pipeline of the heat exchanger, namely, a heat release pipeline of the heat exchanger is used as a part of the temperature control loop. The at least one temperature control loop exchanges heat with the heat absorption pipelines of the heat exchangers of the multi-stage self-cascade heat exchange loops, namely, the at least one temperature control loop comprises heat release pipelines of a plurality of heat exchangers, the heat absorption pipelines of the corresponding heat exchangers are arranged in the self-cascade heat exchange loops of different stages, the heat exchange capacities of the heat absorption pipelines of the heat exchangers of different stages are different, the heat release pipelines of the multi-stage heat exchangers are used in series, the temperature range of the temperature control loop can be widened, and the temperature control of a wide temperature zone is realized.
It should be noted that each temperature control loop corresponds to a different temperature range, and a plurality of temperature control loops are independently equipped and separately operated, so that the control requirements are low, the mutual influence is avoided, and the realization is easy. Because the mixed refrigerant carries out the heat exchange in stages, the evaporation temperature of the refrigerant is reduced step by step so as to realize the gradual reduction of the control temperature of the temperature control loop.
Based on the foregoing, in the embodiment of the present invention, the self-cascade refrigeration system using a single compressor COMP can reduce the number of compressors COMP, simplify a heat exchange loop, and contribute to reducing equipment cost, compared with a refrigeration system using multiple compressors COMP, and by performing innovative associated design on the self-cascade refrigeration system and a temperature control loop, a low temperature below-100 ℃ can be realized, and a set of self-cascade refrigeration system can provide a wide temperature zone cooling liquid for multiple temperature control loops. The wide temperature range of the temperature control circuits reaches the low temperature below 100 ℃ below zero, and the development of low-temperature control equipment of the advanced semiconductor process is actively promoted.
The last-stage self-cascade heat exchange loop comprises two heat exchangers, the two heat exchangers are respectively a last heat exchanger and a penultimate heat exchanger, and a heat release pipeline of the last heat exchanger is connected with two throttling parts; one throttling component is connected with a heat absorption pipeline of the last heat exchanger, and the heat absorption pipeline of the last heat exchanger is connected with a heat absorption pipeline of the penultimate heat exchanger; and the other throttling part is connected with a heat absorption pipeline of the last heat exchanger to realize the supercooling of the last heat exchanger, so that the last-stage temperature control loop can reach lower temperature.
In the above, the self-cascade heat exchange loops may be provided with multiple stages, the number of the temperature control loops corresponds to the number of the self-cascade heat exchange loops, and the specific number of the stages is not limited.
Next, referring to fig. 1, the self-cascade heat exchange circuit and the temperature control circuit will be described by taking an example in which the self-cascade heat exchange circuit is provided with three stages and the temperature control circuit is provided with three stages.
The self-cascade heat exchange loop comprises a first-stage self-cascade heat exchange loop and a second-stage self-cascade heat exchange loop, wherein the first-stage self-cascade heat exchange loop comprises a heat absorption pipeline of a first heat exchanger HE1, a first gas-liquid separator SPR1, a sixth throttling component EEV6, a seventh throttling component EEV7, an eighth throttling component EEV8, a ninth throttling component EEV9, a fourth heat exchanger EVA4 and a heat absorption pipeline of a fifth heat exchanger EVA 5.
A heat release pipeline of the first heat exchanger HE1 is communicated with an inlet of the first gas-liquid separator SPR1, so that the refrigerant subjected to heat release through the heat release pipeline of the first heat exchanger HE1 is introduced into the first gas-liquid separator SPR1, and a part with a lower boiling point in the refrigerant is condensed and flows out through a second outlet of the first gas-liquid separator SPR1 to exchange heat through the first-stage self-cascade heat exchange loop; the lower boiling point portion of the refrigerant is discharged through the first outlet of the first gas-liquid separator SPR1 to flow into the second-stage self-cascade heat exchange circuit while remaining in a gaseous state.
The second outlet of the first gas-liquid separator SPR1, the ninth throttling part EEV9 and the heat absorbing pipeline of the first heat exchanger HE1 are communicated, that is, the refrigerant in the heat releasing pipeline of the first heat exchanger HE1 flows into the heat absorbing pipeline of the first heat exchanger HE1 after passing through the ninth throttling part EEV9, so that the two pipelines of the first heat exchanger HE1 exchange heat with each other.
The second outlet of the first gas-liquid separator SPR1, the eighth throttling element EEV8, the heat absorbing pipeline of the fifth heat exchanger EVA5 and the heat absorbing pipeline of the first heat exchanger HE1 are communicated, the heat absorbing pipeline of the fifth heat exchanger EVA5 exchanges heat with the first-stage temperature control loop, that is, the heat releasing pipeline of the fifth heat exchanger EVA5 is used as a part of the first-stage temperature control loop.
The second outlet of the first gas-liquid separator SPR1, the seventh throttling component EEV7, the heat absorption pipeline of the fourth heat exchanger EVA4 and the heat absorption loop of the first heat exchanger HE1 are communicated, and the heat absorption pipeline of the fourth heat exchanger EVA4 exchanges heat with the second-stage temperature control loop.
The cold energy of the first-stage self-overlapping heat exchange loop can be supplied to the first-stage temperature control loop and the second-stage temperature control loop.
The second outlet of the first gas-liquid separator SPR1 and the sixth throttling part EEV6 are communicated with the second-stage self-cascade heat exchange loop, that is, the refrigerant at the second outlet of the first gas-liquid separator SPR1 may be introduced into the heat absorption pipeline of the heat exchanger in the second-stage self-cascade heat exchange loop.
And the sixth throttling component EEV6 is communicated with a heat absorption pipeline of the second heat exchanger HE2, and the refrigerant in the first-stage self-cascade heat exchange loop is introduced into the heat absorption pipeline of the second heat exchanger HE2 to provide cold energy for the second heat exchanger HE 2.
The opening and closing and the opening of the ninth throttling part EEV9, the eighth throttling part EEV8, the seventh throttling part EEV7 and the sixth throttling part EEV6 are adjusted according to the heat exchange requirements of all the branches. If the cold quantity of the heat absorption pipeline of the first heat exchanger HE1 is insufficient, adjusting a ninth throttling component EEV9; if the cold quantity of the heat absorption pipeline of the EVA5 of the fifth heat exchanger is insufficient, the EEV8 of the eighth throttling component is adjusted; if the cold quantity of the heat absorption pipeline of the fourth heat exchanger EVA4 is insufficient, a seventh throttling component EEV7 is adjusted; and if the cold quantity of the heat absorption pipeline of the second heat exchanger HE2 of the second-stage self-cascade heat exchange loop is insufficient, the sixth throttling component EEV6 is adjusted. The adjustment may be an opening/closing adjustment or an opening adjustment.
It should be noted that the first stage self-cascade heat exchange loop may include one or more heat exchange paths as described above, but is not limited to the heat exchange paths described above.
The second-stage self-cascade heat exchange loop comprises a second heat exchanger HE2, a second gas-liquid separator SPR2, a third throttling part EEV3, a fourth throttling part EEV4, a fifth throttling part EEV5, a heat absorption pipeline of a third heat exchanger EVA3 and a heat absorption pipeline of a second heat exchanger EVA 2.
The first outlet of the first gas-liquid separator SPR1 and the heat release pipeline of the second heat exchanger HE2 are communicated with the inlet of the second gas-liquid separator SPR2, so that the refrigerant subjected to heat release through the heat release pipeline of the second heat exchanger HE2 is introduced into the second gas-liquid separator SPR2, and the part with a lower boiling point in the refrigerant is condensed and flows out through the second outlet of the second gas-liquid separator SPR2 to exchange heat through a second-stage self-overlapping heat exchange loop; the lower boiling point portion of the refrigerant remains in a gaseous state and is discharged through the first outlet of the second gas-liquid separator SPR2 to flow into the third-stage self-cascade heat exchange circuit.
The second outlet of the second gas-liquid separator SPR2 and the fifth throttling component EEV5 are communicated with a heat absorption pipeline of the third heat exchanger EVA3 and a heat absorption pipeline of the second heat exchanger HE 2.
The temperature control loop comprises a second-stage temperature control loop, and the second-stage temperature control loop comprises a heat release pipeline of a third heat exchanger EVA3 and a heat release pipeline of a fourth heat exchanger EVA4 which are communicated with each other. The heat release pipeline of the third heat exchanger EVA3 is connected with the heat release pipeline of the fourth heat exchanger EVA4 in series and is used as a part of the second-stage temperature control loop, the second-stage temperature control loop can exchange heat with at least one of the first-stage self-cascade heat exchange loop and the second-stage self-cascade heat exchange loop, the temperature range of the second-stage temperature control loop can be widened, and the temperature control of a wide temperature zone is realized.
The second outlet of the second gas-liquid separator SPR2, the fourth throttling part EEV4, the heat absorption pipeline of the second heat exchanger EVA2 and the heat absorption pipeline of the second heat exchanger HE2 are communicated. And a heat absorption pipeline of the second heat exchanger EVA2 exchanges heat with the third-stage temperature control loop.
In combination with the above, the cold energy of the second-stage self-cascade heat exchange loop can be supplied to the second-stage temperature control loop and the third-stage temperature control loop.
The self-cascade heat exchange loop further comprises a third stage self-cascade heat exchange loop, and the second outlet of the second gas-liquid separator SPR2 and the third throttling component EEV3 are communicated with the third stage self-cascade heat exchange loop. That is, the cooling capacity of the second-stage self-cascade heat exchange circuit can be supplied to the heat absorption side of the heat exchanger of the third-stage self-cascade heat exchange circuit.
Based on the foregoing, the opening and closing and the opening of the fifth throttling component EEV5, the fourth throttling component EEV4 and the third throttling component EEV3 are adjusted according to the heat exchange requirements of the branches. If the cold quantity of the heat absorption pipeline of the third heat exchanger EVA3 is insufficient, the fifth throttling component EEV5 is adjusted; if the cold quantity of the heat absorption pipeline of the second heat exchanger EVA2 is insufficient, the fourth throttling component EEV4 is adjusted; and if the cooling capacity of the heat absorption pipeline of the third heat exchanger HE3 of the third-stage self-cascade heat exchange loop is insufficient, adjusting a third throttling component EEV3. The adjustment may be an opening/closing adjustment or an opening adjustment.
It should be noted that the second stage self-cascade heat exchange loop may include one or more heat exchange paths as described above, but is not limited to the heat exchange paths described above.
The third-stage self-cascade heat exchange loop comprises a third-stage heat exchanger, a first throttling component EEV1, a second throttling component EEV2 and a heat absorption pipeline of a first heat exchanger EVA 1.
And a heat release pipeline of the third-stage heat exchanger, the second throttling component EEV2, a heat absorption pipeline of the first heat exchanger EVA1 and a heat absorption pipeline of the third-stage heat exchanger are communicated. And the heat absorption pipeline of the first heat exchanger EVA1 exchanges heat with the third-stage temperature control loop.
Based on the foregoing, the temperature control circuit includes a third-stage temperature control circuit, and the third-stage temperature control circuit includes a heat release pipeline of the first heat exchanger EVA1 and a heat release pipeline of the second heat exchanger EVA2 that are communicated with each other. The heat release pipeline of the first heat exchanger EVA1 and the heat release pipeline of the second heat exchanger EVA2 are connected in series and are used as a part of the third-stage temperature control loop, so that the temperature range of the third-stage temperature control loop can be widened, and the temperature control of a wide temperature zone is realized.
And a heat release pipeline of the third-stage heat exchanger, the first throttling part EEV1 and a heat absorption pipeline of the third-stage heat exchanger are communicated. The heat release pipeline and the heat absorption pipeline of the third-stage heat exchanger exchange heat with each other, so that the third-stage heat exchanger is overcooled, the temperature range of the third-stage temperature control loop is reduced, and low temperature is provided.
Referring to fig. 1, the third-stage heat exchanger includes a third heat exchanger HE3 and a fourth heat exchanger HE4, a heat release pipeline of the third heat exchanger HE3 is communicated with a heat release pipeline of the fourth heat exchanger HE4, a third throttling part EEV3 is communicated with a heat absorption pipeline of the third heat exchanger HE3, a second throttling part EEV2 is arranged between the heat release pipeline of the fourth heat exchanger HE4 and the heat absorption pipeline of the first heat exchanger EVA1, and a first throttling part EEV1 is arranged between the heat absorption pipeline of the fourth heat exchanger HE4 and the heat release pipeline of the fourth heat exchanger HE4, so as to achieve supercooling of the fourth heat exchanger HE4, and further ensure that the third-stage temperature control loop can reach a lower temperature.
And a heat release pipeline of the fourth heat exchanger HE4, the second throttling part EEV2 and a heat absorption pipeline of the first heat exchanger EVA1 are communicated with a heat absorption pipeline of the third heat exchanger HE 3. The refrigerant absorbed by the heat absorption pipeline of the first heat exchanger EVA1 is introduced into the heat absorption pipeline of the third heat exchanger HE3 instead of the heat absorption pipeline of the fourth heat exchanger HE4, so that the supercooling of the heat absorption pipeline of the fourth heat exchanger HE4 can be realized.
The self-cascade refrigeration system further comprises a condenser CON and an oil separator OS, heat release pipelines of the compressor COMP, the condenser CON and the first heat exchanger HE1 are communicated in sequence, and the heat exchange effect of two-stage condensation is better.
Based on the above, the temperature intervals of the first-stage temperature control loop, the second-stage temperature control loop and the second-stage temperature control loop are gradually increased, the first-stage temperature control loop is provided with the high-temperature channel CH3, the second-stage temperature control loop is provided with the medium-temperature channel CH2, the third-stage temperature control loop is provided with the low-temperature channel CH1, and the temperature control loops with different temperatures can be switched or controlled in a mixed manner. Here, high, medium, and low are relative concepts, and specific temperatures are not limited. The low-temperature channel CH1 can realize temperature control below-100 ℃ and can be used as special low-temperature control equipment for semiconductors.
Correspondingly, the first-stage self-cascade heat exchange loop is a high-temperature stage, the second-stage self-cascade heat exchange loop is a medium-temperature stage, and the third-stage self-cascade heat exchange loop is a low-temperature stage.
Next, the composition of the temperature control circuit will be described.
The temperature control loop comprises a water tank, a heater, a pump body, a pressure sensor, a flowmeter, a temperature sensor and a corresponding heat exchange channel.
Specifically, the first-stage temperature control loop comprises a third water TANK3, a third heater HT3, a third PUMP body PUMP3, a third pressure sensor P3, a third flow meter FS3, a seventh temperature sensor T7, an eighth temperature sensor T8, a ninth temperature sensor T9, and a high-temperature channel CH3; the second-stage temperature control loop comprises a second water TANK TANK2, a second heater HT2, a second PUMP body PUMP2, a second pressure sensor P2, a second flowmeter FS2, a fourth temperature sensor T4, a fifth temperature sensor T5, a sixth temperature sensor T6 and a medium temperature channel CH2; the third-stage temperature control loop comprises a first water TANK1, a first heater HT1, a first PUMP body PUMP1, a first pressure sensor P1, a first flowmeter FS1, a first temperature sensor T1, a second temperature sensor T2, a third temperature sensor T3, and a low-temperature channel CH1.
The self-cascade refrigeration system adopts a mixed refrigerant such as a combination of R134a/R23/R14, the mixed refrigerant is compressed by a compressor COMP, enters an oil separator OS for effective oil return, is condensed by a condenser CON, enters a first heat exchanger HE1 for further supercooling, enters a first gas-liquid separator SPR1 for separating a low-boiling-point R134a liquid refrigerant, passes through a sixth throttling component EEV6, a seventh throttling component EEV7, an eighth throttling component EEV8 and a ninth throttling component EEV9, and is used for supercooling the next stage of fractional condensation respectively to provide refrigerating capacity for a first stage of temperature control loop and a second stage of temperature control loop and increase supercooling for the first stage of fractional condensation. The uncondensed R23/R14 two-component mixed refrigerant enters a second gas-liquid separator SPR2 after being cooled by a second heat exchanger HE2, low-boiling-point R23 liquid refrigerant is separated, and the low-boiling-point R23 liquid refrigerant passes through a third throttling component EEV3, a fourth throttling component EEV4 and a fifth throttling component EEV5 to respectively provide supercooling for R14 and provide refrigerating capacity for a second-stage temperature control loop and a third-stage temperature control loop. After the uncondensed R14 refrigerant is condensed by the third heat exchanger HE3 and subcooled by the fourth heat exchanger HE4, the uncondensed R14 refrigerant passes through the first throttling component EEV1 and the second throttling component EEV2 to respectively provide subcooling for the R14 refrigerant and provide refrigerating capacity for the third-stage temperature control loop. The gaseous refrigerant mixes before each heat exchanger stage and returns to the compressor COMP to complete a cycle.
The control method of the self-cascade system is to control the superheat degree and the supercooling degree of each heat exchanger through the opening degree of each throttling component. The temperature control method of the temperature control loop is characterized in that the temperature of the inlet of the water tank is taken as a target to control a throttling component corresponding to the inlet of the heat exchanger, the temperature of the outlet of the circulating system is controlled by a heater in the water tank, and the temperature of the outlet of each channel reaches the target temperature by a two-stage control method. The second-stage temperature control loop and the third-stage temperature control loop can select high and low temperature sections through opening and closing of the throttling parts corresponding to the serial heat exchangers.
Branch refrigeration cycles are respectively extracted from the first-stage self-cascade heat exchange loop of the high-temperature stage and the second-stage self-cascade heat exchange loop of the medium-temperature stage, and are respectively connected with the second-stage self-cascade heat exchange loop of the medium-temperature stage and the third-stage self-cascade heat exchange loop of the low-temperature stage in series to provide cold energy for the corresponding temperature control loops, so that wide-temperature-zone temperature control of each temperature control loop is realized, a compatible high-low-temperature mode refrigeration system is provided, and the process requirements of main process equipment are met.
Based on the three-stage heat exchange description, the equipment adopts the traditional overlapping scheme that a single compressor COMP replaces a plurality of compressors COMP by self-overlapping, reduces two sets of compressor COMP refrigerating systems, simplifies the system, reduces the size of the equipment and improves the use efficiency of a low-temperature system; two-stage condensation is carried out in the auto-cascade system, so that the dephlegmation effect and the refrigeration effect are improved; the system can supply cooling liquid with a plurality of channel temperatures, adopts mixed refrigerant, and can provide special temperature control equipment for a semiconductor with a low temperature below 100 ℃ by utilizing self-cascade refrigeration cycle to make up the gap of the existing equipment; and can only satisfy the demand of a plurality of passageways cooling liquid through a set of low temperature refrigerating system, the wide warm area control is realized to a plurality of passageways, can enlarge application range, satisfies more extensive demand.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (9)
1. A self-laminating temperature control apparatus, comprising:
the self-cascade refrigeration system comprises a compressor and a multi-stage self-cascade heat exchange loop, wherein the self-cascade heat exchange loop comprises a heat release pipeline of a heat exchanger, a gas-liquid separator, throttling components, a heat absorption pipeline of the heat exchanger and a heat absorption pipeline of the heat exchanger, the heat release pipeline of the heat exchanger of the self-cascade heat exchange loop is communicated, the heat absorption pipeline of the heat exchanger of the self-cascade heat exchange loop is communicated, and the outlet end of the heat release pipeline of each heat exchanger is provided with a plurality of throttling components; an inlet of the gas-liquid separator is communicated with a heat release pipeline of the heat exchanger of the current stage, a second outlet of the gas-liquid separator is communicated with the throttling component of the current stage, and a first outlet of the gas-liquid separator is communicated with a heat release pipeline of the heat exchanger of the next stage; the heat release pipeline of the heat exchanger is connected with at least one of the heat absorption pipeline of the heat exchanger, the heat absorption pipeline of the heat exchanger of the current stage and the heat absorption pipeline of the heat exchanger of the next stage through the throttling component, wherein the heat release pipelines of the heat exchangers from the first stage of the self-cascade heat exchange loop to the second last stage of the self-cascade heat exchange loop are connected with the heat absorption pipelines of the heat exchangers in corresponding number through a plurality of throttling components;
the temperature control system comprises a multi-stage temperature control loop, the temperature control loop exchanges heat with a heat absorption pipeline of the heat exchanger, and at least one stage of temperature control loop exchanges heat with the heat absorption pipeline of the heat exchanger of the multi-stage self-cascade heat exchange loop;
the first-stage self-cascade heat exchange loop comprises a first heat exchanger, a first gas-liquid separator, a sixth throttling component, a seventh throttling component, an eighth throttling component, a ninth throttling component, a heat absorption pipeline of a fourth heat exchanger and a heat absorption pipeline of a fifth heat exchanger;
a heat release pipeline of the first heat exchanger is communicated with an inlet of the first gas-liquid separator;
the second outlet of the first gas-liquid separator, the ninth throttling component and a heat absorption pipeline of the first heat exchanger are communicated;
the second outlet of the first gas-liquid separator, the eighth throttling component, the heat absorption pipeline of the fifth heat exchanger and the heat absorption pipeline of the first heat exchanger are communicated, and the heat absorption pipeline of the fifth heat exchanger exchanges heat with the first-stage temperature control loop;
the second outlet of the first gas-liquid separator, the seventh throttling element, the heat absorption pipeline of the fourth heat exchanger and the heat absorption loop of the first heat exchanger are communicated, and the heat absorption pipeline of the fourth heat exchanger exchanges heat with the second-stage temperature control loop;
the second outlet of the first gas-liquid separator and the sixth throttling component are communicated with the second-stage self-cascade heat exchange loop.
2. The self-cascade temperature control apparatus according to claim 1, wherein the gas-liquid separator is configured to separate refrigerant, and the boiling point of the refrigerant separated by the second outlet is gradually decreased.
3. The self-cascade temperature control apparatus of claim 1, wherein the second-stage self-cascade heat exchange circuit comprises a second heat exchanger, a second gas-liquid separator, a third throttling element, a fourth throttling element, a fifth throttling element, a heat absorption circuit of a third heat exchanger, and a heat absorption circuit of a second heat exchanger;
the first outlet of the first gas-liquid separator and the heat release pipeline of the second heat exchanger are communicated with the inlet of the second gas-liquid separator;
the second outlet of the second gas-liquid separator and the fifth throttling component are communicated with the heat absorption pipeline of the third heat exchanger and the heat absorption pipeline of the second heat exchanger;
the second outlet of the second gas-liquid separator, the fourth throttling component, the heat absorption pipeline of the second heat exchanger and the heat absorption pipeline of the second heat exchanger are communicated;
the second outlet of the second gas-liquid separator and the third throttling component are communicated with the third-stage self-cascade heat exchange loop.
4. The self-cascade temperature control apparatus of claim 3, wherein the third stage self-cascade heat exchange circuit comprises a third stage heat exchanger, a first throttling element, a second throttling element, and a heat absorption circuit of the first heat exchanger;
the heat release pipeline of the third-stage heat exchanger, the second throttling component, the heat absorption pipeline of the first heat exchanger and the heat absorption pipeline of the third-stage heat exchanger are communicated;
and the heat release pipeline of the third-stage heat exchanger, the first throttling component and the heat absorption pipeline of the third-stage heat exchanger are communicated.
5. The self-cascade temperature control apparatus according to claim 4, wherein the third stage heat exchanger includes a third heat exchanger and a fourth heat exchanger, a heat release line of the third heat exchanger is communicated with a heat release line of the fourth heat exchanger, the third throttling member is communicated with a heat absorption line of the third heat exchanger, the second throttling member is disposed between the heat release line of the fourth heat exchanger and the heat absorption line of the first heat exchanger, and the first throttling member is disposed between the heat absorption line of the fourth heat exchanger and the heat release line of the fourth heat exchanger; and a heat release pipeline of the fourth heat exchanger, the second throttling part and a heat absorption pipeline of the first heat exchanger are communicated with a heat absorption pipeline of the third heat exchanger.
6. The self-laminating temperature control apparatus of claim 4, wherein the temperature control circuit comprises a third stage temperature control circuit including a heat release line of the first heat exchanger and a heat release line of the second heat exchanger in communication.
7. The self-laminating temperature control apparatus of claim 3, wherein the temperature control circuit comprises a second stage temperature control circuit including a heat release line of the third heat exchanger and a heat release line of the fourth heat exchanger in communication.
8. The self-laminating temperature control apparatus of claim 3, wherein the sixth throttling element is in communication with a heat sink conduit of the second heat exchanger.
9. The self-cascade temperature control device according to claim 1, wherein the last stage of the self-cascade heat exchange loop comprises two heat exchangers, the two heat exchangers are respectively a last heat exchanger and a penultimate heat exchanger, and a heat release pipeline of the last heat exchanger is connected with the two throttling components; one throttling component is connected with a heat absorption pipeline of the last heat exchanger, and the heat absorption pipeline of the last heat exchanger is connected with a heat absorption pipeline of the penultimate heat exchanger; and the other throttling part is connected with the heat absorption pipeline of the last heat exchanger.
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| CN107356007A (en) * | 2016-06-13 | 2017-11-17 | 北京库蓝科技有限公司 | A kind of three warm varying capacity of Auto-cascade cycle exports refrigeration system |
| CN113419574A (en) * | 2021-06-18 | 2021-09-21 | 北京京仪自动化装备技术股份有限公司 | Low-temperature control equipment for semiconductor |
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