CN114598119B - Reluctance type two-dimensional scanning movement device - Google Patents
Reluctance type two-dimensional scanning movement device Download PDFInfo
- Publication number
- CN114598119B CN114598119B CN202210154347.6A CN202210154347A CN114598119B CN 114598119 B CN114598119 B CN 114598119B CN 202210154347 A CN202210154347 A CN 202210154347A CN 114598119 B CN114598119 B CN 114598119B
- Authority
- CN
- China
- Prior art keywords
- magnetic
- stator
- mover
- magnetizers
- magnetic circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K16/00—Machines with more than one rotor or stator
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
- H02K11/21—Devices for sensing speed or position, or actuated thereby
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K3/00—Details of windings
- H02K3/04—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors
- H02K3/28—Layout of windings or of connections between windings
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2213/00—Specific aspects, not otherwise provided for and not covered by codes H02K2201/00 - H02K2211/00
- H02K2213/03—Machines characterised by numerical values, ranges, mathematical expressions or similar information
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Linear Motors (AREA)
Abstract
The invention discloses a magneto-resistive two-dimensional scanning movement device. The magnetic steel is arranged between the two magnetizers of the mover, the coils are wound on the magnetizers of the mover or the stator, the magnetizers of the stator are distributed on two sides of the magnetizers of the mover, and an air gap exists between the stator and the magnetizers of the mover to form a closed path; when the magnetic steel type magnetic field generating device works, under the combined action of a bias magnetic field formed by magnetic steel and a changing magnetic field formed by current flowing in a coil, the two moving frames respectively generate movements along positive/negative directions of two mutually perpendicular coordinates. The device can realize two-dimensional scanning movement through the control of bidirectional magnetic resistance, and meanwhile, the stability of the device is improved by adopting a guiding and negative stiffness compensation mechanism.
Description
Technical Field
The invention relates to the technical field of nano-processing, in particular to a magneto-resistive two-dimensional scanning movement device.
Background
The high-precision scanning motion device is a key component for realizing nanoscale precision machining, and various equipment including an atomic force microscope, 3D printing and machine tool machining all need the scanning motion device as a support. The continuous increase in machining precision also places higher demands on the scanning motion device, which is generally required to achieve higher precision in smaller volumes. Linear actuator components, typically voice coil motors, are now widely used for high precision scanning movements, but due to their low output density, smaller volumes are difficult to achieve.
Compared with a voice coil motor, the reluctance motor has larger output density and thrust constant, and can achieve smaller volume and smaller power consumption under the same output requirement, so that the problems can be solved, and the reluctance motor can be more easily integrated into complete equipment. However, the conventional reluctance motor can be regarded as an electromagnet, can only realize the force (suction force) in a single direction, has strong nonlinearity and negative rigidity, and has great control difficulty.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a magneto-resistive two-dimensional scanning movement device; the differential hybrid reluctance motor is adopted to realize bidirectional output and relatively better linearity so as to realize two-dimensional motion, and the flexible structure, the magnetic spring, the gas spring and the like are adopted to guide the negative stiffness and compensate the negative stiffness, so that the long-time motion stability of the device is improved.
The technical scheme of the invention is specifically introduced as follows.
The invention provides a magneto-resistive two-dimensional scanning movement device, which comprises a base, a first movement frame and a second movement frame, wherein the first movement frame is arranged on the base; the first moving frame comprises a first rotor, a first stator, a plurality of first coils and a plurality of first guiding and negative stiffness compensation mechanisms, and the second moving frame comprises a second rotor, a second stator, a plurality of second coils and a plurality of second guiding and negative stiffness compensation mechanisms; the second stator is fixed on the base, the second rotor is connected with the second stator and/or the base through a plurality of second guiding and negative stiffness compensation mechanisms, the first stator is fixed on the second rotor, the first rotor is connected with the first stator and/or the second rotor through a plurality of first guiding and negative stiffness compensation mechanisms, and the first rotor is used for realizing two-dimensional scanning motion along the positive/negative directions of a first coordinate and a second coordinate relative to the base during operation; wherein:
the first stator comprises a plurality of first magnetizers, the first mover comprises a plurality of second magnetizers and a plurality of first magnetic steels, a plurality of first air gaps exist between the first magnetizers and the plurality of second magnetizers, the first magnetic steels are positioned between the two second magnetizers, the first magnetic steels form a first bias magnetic field, a closed first magnetic circuit and a closed second magnetic circuit are respectively formed in the plurality of first magnetizers and the plurality of second magnetizers, and the first magnetic circuit and the second magnetic circuit are oppositely wound; the first coil is wound on the first magnetizer and/or the second magnetizer, the first coil is arranged so that a first changing magnetic field is generated after the first coil is electrified, a closed third magnetic circuit which is not blocked by the first magnetic steel and passes through a plurality of first air gaps is formed in the plurality of first magnetizers and the plurality of second magnetizers, and the third magnetic circuit is wound in the same direction as the first magnetic circuit or the second magnetic circuit; under the combined action of the first bias magnetic field and the first changing magnetic field, the first mover receives magnetic resistance along the positive/negative direction of the first coordinate in a plurality of first air gaps to form resultant force along the positive/negative direction of the first coordinate, so that the first mover generates displacement along the positive/negative direction of the first coordinate;
the second stator comprises a plurality of third magnetic conductors, the second rotor comprises a plurality of fourth magnetic conductors and a plurality of second magnetic steels, a plurality of second air gaps are formed between the third magnetic conductors and the fourth magnetic conductors, the second magnetic steels are positioned between the two fourth magnetic conductors, the second magnetic steels form a second bias magnetic field, a closed fourth magnetic circuit and a closed fifth magnetic circuit are respectively formed in the plurality of third magnetic conductors and the plurality of fourth magnetic conductors, and the winding directions of the fourth magnetic circuit and the fifth magnetic circuit are opposite; the second coil is wound on the third magnetizer and/or the fourth magnetizer, the second coil is arranged so that a second changing magnetic field is generated after the second coil is electrified, a closed sixth magnetic circuit which is not blocked by the second magnetic steel and passes through a plurality of second air gaps is formed in a plurality of third magnetizers and a plurality of fourth magnetizers, and the winding direction of the sixth magnetic circuit is the same as that of the fourth magnetic circuit or the fifth magnetic circuit; under the combined action of the second bias magnetic field and the second changing magnetic field, the second mover receives magnetic resistance along the positive/negative direction of the second coordinate in a plurality of second air gaps to form resultant force along the positive/negative direction of the second coordinate, so that the second mover generates displacement along the positive/negative direction of the second coordinate.
In the invention, the functions of the plurality of first guiding and negative rigidity compensating mechanisms comprise two aspects: firstly, realizing the guiding of the first rotor moving along the positive/negative direction of the first coordinate, namely restraining the degrees of freedom of the first rotor in other directions except the direction of the first coordinate; and secondly, compensating the negative rigidity existing in the first motion frame to prevent the unstable condition.
In the invention, the functions of the plurality of second guiding and negative rigidity compensating mechanisms comprise two aspects: firstly, realizing the guiding of the motion of the second rotor along the positive/negative direction of the second coordinate, namely restraining the degrees of freedom of the second rotor in other directions except the direction of the second coordinate; and secondly, compensating the negative rigidity existing in the second motion frame to prevent the unstable condition.
In the invention, the first guiding and negative stiffness compensation mechanism and the second guiding and negative stiffness compensation mechanism are independently realized by adopting one or a combination of a plurality of flexible structures, magnetic springs, gas springs and mechanical guide rail structures.
In the present invention, the first mover is fixed as a stator of the first moving frame, and the first stator is released from the stator as a mover of the first moving frame.
In the present invention, the second mover is fixed as a stator of the second moving frame, and the second stator is released from the stator as a mover of the second moving frame.
In the invention, the cross section area of the first magnetizer is equal to the cross section area of the second magnetizer; the cross-sectional area of the third magnetizer and the cross-sectional area of the fourth magnetizer are equal.
In the invention, the first magnetizer, the second magnetizer, the third magnetizer and the fourth magnetizer are respectively and independently more than two, the first magnetic steel and the second magnetic steel are respectively and independently more than one, and the first coil and the second coil are respectively and independently more than one.
The invention further comprises a power amplifier and a sensor, wherein the power amplifier is used for supplying current to the first coil and the second coil, and the sensor is used for measuring the position of the first rotor.
Compared with the prior art, the invention has the beneficial effects that: compared with the existing two-dimensional scanning device, the device can achieve smaller volume and smaller power consumption under the same output requirement; the invention compensates the negative rigidity of the hybrid reluctance motor, reduces the control difficulty of the hybrid reluctance motor, and thus is easier to realize high-precision movement; meanwhile, the device has simple and flexible structure and high stability, and can better integrate the system.
Drawings
Fig. 1 is a schematic overall structure of an embodiment 1 provided in the present invention.
Fig. 2 is a schematic structural view of the first moving frame 1 corresponding to fig. 1.
Fig. 3 is a schematic structural view of the second moving frame 2 corresponding to fig. 1.
Fig. 4 is a schematic structural view of an embodiment provided by the present invention.
Fig. 5 is a schematic structural diagram of an embodiment provided by the present invention.
Fig. 6 is a schematic structural diagram of an embodiment provided by the present invention.
Reference numerals in the drawings: 1-first moving frame, 11, 12-first stator, 111, 113, 121, 123-first coil, 112, 122-first magnetizer, 13-first mover, 131, 133-second magnetizer, 132-first magnetic steel, 141-first magnetic circuit, 142-third magnetic circuit, 143-second magnetic circuit, 151, 152, 153, 154-first air gap, 161, 162-first guiding and negative stiffness compensating mechanism, 2-second moving frame, 21, 22-second stator, 212, 222-third magnetizer, 211, 213, 221, 223-second coil, 23-second mover, 232, 233-fourth magnetizer, 231, 234-second magnetic steel, 241-fourth magnetic circuit, 242-sixth magnetic circuit, 243-fifth magnetic circuit, 251, 252, 253, 254-second air gap, 261, 262, 263, 264-second guiding and negative stiffness compensating mechanism, 281, 282-guiding rail, 283, 284-magnetic spring.
Detailed Description
The invention is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present invention are shown in the drawings.
In describing embodiments of the present invention, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In embodiments of the invention, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, or may include both the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
In the description of the embodiments of the present invention, the terms "upper", "lower", "right", "inner", "outer", and the like are used for convenience of description and simplicity of operation based on the orientation or positional relationship shown in the drawings, and are not to be construed as limiting the present invention, as the means or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, or be indicated or implied. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.
An embodiment 1 of the present invention is shown in fig. 1-3, and the apparatus includes a first moving frame 1 and a second moving frame 2. The first moving frame 1 includes a first mover 13, first stators 11, 12, and two first guide and negative stiffness compensation mechanisms 161 and 162; the second moving frame 2 includes a second mover 23, second stators 21, 22, and four second guide and negative stiffness compensation mechanisms 261, 262, 263, and 264.
The second stators 21, 22 are fixed on the base, and the second mover 23 is connected with the second stators 21, 22 and/or the base through four second guiding and negative stiffness compensating mechanisms 261, 262, 263 and 264 and can move along the x-axis direction relative to the second stators 21, 22 (the base); the first stator 11, 12 is fixed to the second mover 23, and the first mover 13 is connected to the first stator 11, 12 and/or the second mover 23 via two first guiding and negative stiffness compensating mechanisms 161, 162, and is movable in the y-axis direction with respect to the first stator 11, 12 (the second mover 23). Therefore, the first mover can realize a two-dimensional scanning motion in x, y directions with respect to the base.
Optionally, the first guiding and negative stiffness compensating mechanisms 161 and 162 are each composed of a plurality of (two are shown) spring plates parallel to a plane defined by the x-axis of the z-axis; optionally, the second guiding and negative stiffness compensating mechanisms 261, 262, 263 and 264 are each comprised of a plurality (two shown) of spring plates that are parallel to a plane defined by the y-axis of the z-axis.
As shown in fig. 2, the first stator 11, 12, 11 comprises one first magnetizer 112 and two first coils 111, 113, 12 comprises one first magnetizer 122 and two first coils 121, 123; the first mover 13 includes two second magnetic conductors 131 and 133, and a first magnetic steel 132, the first magnetic steel 132 is disposed between the two second magnetic conductors 131 and 133, the first magnetic conductors 112 and 122 are distributed on both sides of the second magnetic conductors 131 and 133, and the first magnetic conductors 112 and 122 and the second magnetic conductors 131 and 133 directly have first air gaps 151, 152, 153 and 154. Preferably, the first and second magnetic conductors 112, 122, 131, 133 have the same cross-sectional area.
Alternatively, the magnetizing direction of the first magnetic steel 132 is along the negative direction of the x-axis, generating a first bias magnetic field, and forming a first magnetic circuit 141 and a second magnetic circuit 143 in opposite winding directions and respectively closed in the first magnetic conductors 112, 122 and the second magnetic conductors 131, 133.
After the forward current i1+ is applied to the first coils 111, 113, 121, and 123, a first varying magnetic field is formed in the first magnetic conductors 112, 122 and the second magnetic conductors 131, 133, and a closed third magnetic circuit 142 is formed in the first magnetic conductors 112, 122 and the second magnetic conductors 131, 133. At this time, the first magnetic circuit 141 and the third magnetic circuit 142 are opposite in direction, and the second magnetic circuit 143 and the third magnetic circuit 142 are the same in direction. In the first air gaps 151, 152,153 and 154, the first magnetic resistance of the first mover 13 due to the first bias magnetic field and the first change magnetic field is F 11 、F 12 、F 13 And F 14 。
The formula of the magnetic resistance is
Wherein A is the sectional area of the magnetizer, mu 0 For vacuum permeability, Φ is the total magnetic flux in the air gap. Further, a first magnetic resistance F 11 、F 12 、F 13 And F 14 Can be expressed as
Wherein phi is 141 、Φ 143 And phi is 142 A is the magnetic fluxes flowing through the first, second and third magnetic circuits 141, 143 and 142, respectively 1 For the sectional areas of the first magnetic conductors 112, 122 and the second magnetic conductors 131, 133, it is preferable to use a symmetrical structure, Φ 141 ＝Φ 143 . Therefore, the first mover 13 receives a first resultant force F 1 Can be expressed as
At this time, the first mover 13 receives a first resultant force F 1 Forward along the y-axis.
After the reverse current I1-is applied to the first coils 111, 113, 121, and 123, a third magnetic circuit 142 is formed in the first magnetic conductors 112, 122 and the second magnetic conductors 131, 133 in the opposite direction to the drawing. At this time, the first magnetic circuit 141 and the third magnetic circuit 142 are in the same direction, and the second magnetic circuit 143 and the third magnetic circuit 142 are in opposite directions. Similarly, the first mover 13 receives a first resultant force F 1 Is that
At this time, the first mover 13 receives a first resultant force F 1 And negative along the y-axis.
Therefore, under the first bias magnetic field generated by the first magnetic steel 132, the first resultant force F exerted by the first mover 13 can be controlled by adjusting the magnitude and direction of the current flowing in the first coils 111, 113, 121 and 123 1 And further realizes the motion control of the first mover 13 along the y-axis direction.
It should be noted that the magnetizing direction of the first magnetic steel 132 may be positive along the x-axis, and a first magnetic circuit 141 and a second magnetic circuit 143 opposite to the illustrated direction may be formed in the first magnetic conductors 112, 122 and the second magnetic conductors 131, 133. At this time, when the forward current I1+ is applied to the first coils 111, 113, 121 and 123, the first mover 13 receives a first resultant force F 1 Negative along the y-axis; when the reverse current I1-is applied to the first coils 111, 113, 121 and 123, the first mover 13 receives a first resultant force F 1 Forward along the y-axis.
It should be noted that the first mover 13 may be used as a stator, and the corresponding first stators 11, 12 may be used as movers, and the force output manner and principle are similar to those described above, so that a detailed description is omitted.
As shown in fig. 3, the second stators 21, 22, wherein 21 comprises one third magnetizer 212 and two second coils 211, 213, 22 comprises one third magnetizer 222 and two second coils 221, 223; the second mover 23 includes two fourth magnetic conductors 232 and 233, and two second magnetic steels 231 and 234, the second magnetic steels 231 and 234 are disposed between the two fourth magnetic conductors 232 and 233, the third magnetic conductors 212 and 222 are distributed on both sides of the fourth magnetic conductors 232 and 233, and second air gaps 251, 252, 253 and 254 exist between the third magnetic conductors 212 and the fourth magnetic conductors 232 and 233, preferably, the third magnetic conductors 212, 222 and the fourth magnetic conductors 232 and 233 have the same sectional area.
The second magnetic steels 231 and 234 form a second bias magnetic field, and optionally, a magnetizing direction of the second magnetic steel 231 is along a positive direction of the y-axis, and a closed fourth magnetic circuit 241 is formed in the third magnetic conductor 212 and the fourth magnetic conductors 232 and 233; meanwhile, the magnetizing direction of the second magnetic steel 234 is also along the positive direction of the y-axis, and a closed fifth magnetic circuit 243 is formed in the third magnetic conductor 222, the fourth magnetic conductors 232 and 233.
The second coils 211, 213, 221, and 223 form a second varying magnetic field after passing the forward current i2+, and form a closed sixth magnetic circuit 242 in the third and fourth magnetic conductors 212, 222, 232, 233. At this time, the fourth magnetic circuit 241 and the sixth magnetic circuit 242 are opposite in direction, and the fifth magnetic circuit 243 and the sixth magnetic circuit 242 are the same in direction. The second mover 23 receives a second magnetic resistance F in the second air gaps 251, 252, 253, and 254 due to the second bias magnetic field and the second varying magnetic field, respectively 21 、F 22 、F 23 And F 24 . Second magnetic resistance F 21 、F 22 、F 23 And F 24 Can be expressed as
Wherein phi is 241 、Φ 243 And phi is 242 A is the magnetic fluxes flowing through the fourth magnetic circuit 241, the fifth magnetic circuit 243, and the sixth magnetic circuit 242, respectively 2 The cross-sectional areas of the third and fourth magnetic conductors 212, 222, 232, 233. Preferably, the first magnetic steels 231 and 234 are identical and have a symmetrical structure, i.e., Φ 241 ＝Φ 243 . Therefore, the second mover 23 receives a second resultant force F 2 Is that
At this time, the second mover 23 receives a second resultant force F 2 Forward along the x-axis.
After the reverse current I2-is applied to the second coils 211, 213, 221, and 223 in the opposite direction to the illustration, a sixth magnetic circuit 242 in the opposite direction to the illustration is formed in the third magnetic conductors 212, 222 and the fourth magnetic conductors 232, 233. At this time, the fourth magnetic circuit 241 and the sixth magnetic circuit 242 are wound in the same direction, and the fifth magnetic circuit 243 and the sixth magnetic circuit 242 are wound in opposite directions. Similarly, a second resultant force F is applied to the second mover 23 2 Is that
At this time, the second mover 23 receives a second resultant force F 2 And negative along the x-axis.
Therefore, under the second bias magnetic field generated by the second magnetic steels 231, 234, the second resultant force F exerted by the second mover 23 can be controlled by adjusting the magnitude and direction of the current flowing in the second coils 211, 213, 221 and 223 2 And further realizes the motion control of the second mover 23 in the x-axis direction.
It is noted that the magnetizing direction of the second magnetic steel 231 may be along the negative y-axis direction, and a fourth magnetic circuit opposite to that shown in the drawings is formed in the third magnetic conductor 212 and the fourth magnetic conductors 232 and 233241, a base; accordingly, the second magnetic steel 234 is magnetized in the negative y-axis direction, and a fifth magnetic circuit 243 is formed in the third magnetic conductor 222 and the fourth magnetic conductors 232 and 233, which are opposite to those shown in the figure. At this time, when the second coils 211, 213, 221 and 223 are supplied with the forward current i2+, the second mover 23 receives a second resultant force F 2 Negative along the x-axis; when the coils 211, 213, 221 and 223 are supplied with the reverse current I2-, the second mover 23 receives a second resultant force F 2 Forward along the x-axis.
It should be noted that the second mover 23 may be used as a stator, and the corresponding second stators 21, 22 may be used as a mover, and the force is similar to that described above, so that a detailed description is omitted.
It should be noted that the above-described embodiments are only examples of the proposed solution and are not limiting. The first, second, third and fourth magnetizers can be other numbers or respectively formed by splicing a plurality of magnetizers; the first magnetic steel and the second magnetic steel can also adopt more or be respectively formed by splicing a plurality of magnets; the first and second coils can be of other numbers; the first and second guides and the negative stiffness compensation mechanism may be in other numbers and positions.
Another embodiment of the present invention is shown in fig. 4, where guide rails 281, 282 and magnetic springs 281, 282, 283, 284 are used as the second guide and negative stiffness compensation mechanism. The embodiment shows that the proposed technical scheme does not limit the guiding mechanism and the negative stiffness compensation structure, and the mechanical structure, the magnetic levitation structure, the air levitation structure and the like can be used. Other structural arrangements resulting from the use of other guiding or negative stiffness compensation structures are still within the scope of the claims.
The present invention also provides a specific embodiment as shown in fig. 5, in which the first coils 111, 113, 121, 123 in the first moving frame 1 are installed in the first mover 13, and the plurality of second coils 211, 213, 221, 223 in the second moving frame 2 are integrated in the second mover 23, the output of which is the same as that in the first embodiment. The first coils 111, 113, 121, 123 are installed so that they can form a closed magnetic circuit in the magnetic conductor of the first frame without being interrupted by the first magnetic steel after being energized, and the formed magnetic circuit needs to pass through a plurality of air gaps between the first mover and the first stator; similarly, the second coil is mounted so that it can form a closed magnetic circuit in the magnetic conductor of the second frame after being energized, without being interrupted by the second magnetic steel, and the formed magnetic circuit needs to pass through a plurality of air gaps between the second mover and the second stator. The present embodiment shows that the proposed technical solution has no specific limitation on the positions of the coils, and other structural solutions due to the different numbers and positions of the first and second coils are still within the scope of the present invention.
The present invention also provides a specific embodiment, as shown in fig. 6, in which the structure of the magnetizer in the second mover 23 is changed, and still a closed magnetic circuit can be formed, and the output structure is the same as that of the embodiment of fig. 2. The embodiment shows that the technical proposal does not limit the structure of the magnetizer, so long as a closed magnetic circuit can be formed. The first, second, third and fourth magnetic conductor structures provided in the embodiments of the present invention are merely examples, and are not limiting, and the structures of the first, second, third and fourth magnetic conductors may be adjusted according to different application scenarios in practical applications, and other structural schemes generated thereby are also within the scope of the present invention.
Note that the above is only a preferred embodiment of the present invention and the technical principle applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, and that various obvious changes, rearrangements, combinations, and substitutions can be made by those skilled in the art without departing from the scope of the invention. Therefore, while the invention has been described in connection with the above embodiments, the invention is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the invention, which is set forth in the following claims.
Claims (6)
1. A magneto-resistive two-dimensional scanning movement device is characterized by comprising a base, a first movement frame and a second movement
A frame; the first moving frame comprises a first rotor, a first stator, a plurality of first coils and a plurality of first guiding and negative stiffness compensation mechanisms, and the second moving frame comprises a second rotor, a second stator, a plurality of second coils and a plurality of second guiding and negative stiffness compensation mechanisms; the second stator is fixed on the base, the second rotor is connected with the second stator and/or the base through a plurality of second guiding and negative stiffness compensation mechanisms, the first stator is fixed on the second rotor, the first rotor is connected with the first stator and/or the second rotor through a plurality of first guiding and negative stiffness compensation mechanisms, and the first rotor is used for realizing two-dimensional scanning motion along the positive/negative directions of a first coordinate and a second coordinate relative to the base during operation; wherein:
the first stator comprises a plurality of first magnetizers, the first mover comprises a plurality of second magnetizers and a plurality of first magnetic steels, a plurality of first air gaps exist between the first magnetizers and the plurality of second magnetizers, the first magnetic steels are positioned between the two second magnetizers, the first magnetic steels form a first bias magnetic field, a closed first magnetic circuit and a closed second magnetic circuit are respectively formed in the plurality of first magnetizers and the plurality of second magnetizers, and the first magnetic circuit and the second magnetic circuit are oppositely wound; the first coil is wound on the first magnetizer and/or the second magnetizer, the first coil is arranged so that a first changing magnetic field is generated after the first coil is electrified, a closed third magnetic circuit which is not blocked by the first magnetic steel and passes through a plurality of first air gaps is formed in the plurality of first magnetizers and the plurality of second magnetizers, and the third magnetic circuit is wound in the same direction as the first magnetic circuit or the second magnetic circuit; under the combined action of the first bias magnetic field and the first changing magnetic field, the first mover receives magnetic resistance along the positive/negative direction of the first coordinate in a plurality of first air gaps to form resultant force along the positive/negative direction of the first coordinate, so that the first mover generates displacement along the positive/negative direction of the first coordinate;
the second stator comprises a plurality of third magnetic conductors, the second rotor comprises a plurality of fourth magnetic conductors and a plurality of second magnetic steels, a plurality of second air gaps are formed between the third magnetic conductors and the fourth magnetic conductors, the second magnetic steels are positioned between the two fourth magnetic conductors, the second magnetic steels form a second bias magnetic field, a closed fourth magnetic circuit and a closed fifth magnetic circuit are respectively formed in the plurality of third magnetic conductors and the plurality of fourth magnetic conductors, and the winding directions of the fourth magnetic circuit and the fifth magnetic circuit are opposite; the second coil is wound on the third magnetizer and/or the fourth magnetizer, the second coil is arranged so that a second changing magnetic field is generated after the second coil is electrified, a closed sixth magnetic circuit which is not blocked by the second magnetic steel and passes through a plurality of second air gaps is formed in a plurality of third magnetizers and a plurality of fourth magnetizers, and the winding direction of the sixth magnetic circuit is the same as that of the fourth magnetic circuit or the fifth magnetic circuit; under the combined action of the second bias magnetic field and the second changing magnetic field, the second mover receives magnetic resistance along the positive/negative direction of the second coordinate in a plurality of second air gaps to form resultant force along the positive/negative direction of the second coordinate, so that the second mover generates displacement along the positive/negative direction of the second coordinate.
2. The two-dimensional scanning motion device of claim 1 wherein the first guide and negative stiffness compensation mechanism,
The second guiding and negative stiffness compensation mechanism is independently realized by one or more of a flexible structure, a magnetic spring, a gas spring and a mechanical guide rail structure.
3. The two-dimensional scanning movement device according to claim 1, wherein the first mover is fixed as the first movement
And a stator of the movable frame, wherein the first stator is released from the stator to serve as a mover of the first movable frame.
4. The two-dimensional scanning movement device according to claim 1, wherein the second mover is fixed as the second carrier
And a stator of the movable frame, wherein the second stator is released from the stator to serve as a mover of the second movable frame.
5. The two-dimensional scanning motion device of claim 1 wherein the cross-sectional area of the first magnetic conductor and the cross-sectional area of the second magnetic conductor are equal; the cross-sectional area of the third magnetizer and the cross-sectional area of the fourth magnetizer are equal.
6. The two-dimensional scanning movement device of claim 1 further comprising a power amplifier for supplying current to the first coil and the second coil and a sensor for measuring the position of the first mover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210154347.6A CN114598119B (en) | 2022-02-21 | 2022-02-21 | Reluctance type two-dimensional scanning movement device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210154347.6A CN114598119B (en) | 2022-02-21 | 2022-02-21 | Reluctance type two-dimensional scanning movement device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114598119A CN114598119A (en) | 2022-06-07 |
| CN114598119B true CN114598119B (en) | 2023-10-03 |
Family
ID=81804575
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210154347.6A Active CN114598119B (en) | 2022-02-21 | 2022-02-21 | Reluctance type two-dimensional scanning movement device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114598119B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1667286A (en) * | 2005-04-06 | 2005-09-14 | 北京航空航天大学 | Permanent magnet biased inner rotor radial magnetic bearing |
| EP1953903A1 (en) * | 2007-01-30 | 2008-08-06 | Magtronics Technology Inc. | Voice coil motor and method of using a magnetic restoring force for displacement control |
| CN103047338A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Double-layer orthogonal air floatation decoupling and two-dimensional flexible hinge angular decoupling electromagnetic damping vibration isolator |
| CN106341029A (en) * | 2015-07-10 | 2017-01-18 | 上海微电子装备有限公司 | Voice coil motor |
| CN113922546A (en) * | 2021-10-08 | 2022-01-11 | 复旦大学 | Differential reluctance motor device |
-
2022
- 2022-02-21 CN CN202210154347.6A patent/CN114598119B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1667286A (en) * | 2005-04-06 | 2005-09-14 | 北京航空航天大学 | Permanent magnet biased inner rotor radial magnetic bearing |
| EP1953903A1 (en) * | 2007-01-30 | 2008-08-06 | Magtronics Technology Inc. | Voice coil motor and method of using a magnetic restoring force for displacement control |
| CN103047338A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Double-layer orthogonal air floatation decoupling and two-dimensional flexible hinge angular decoupling electromagnetic damping vibration isolator |
| CN106341029A (en) * | 2015-07-10 | 2017-01-18 | 上海微电子装备有限公司 | Voice coil motor |
| CN113922546A (en) * | 2021-10-08 | 2022-01-11 | 复旦大学 | Differential reluctance motor device |
Non-Patent Citations (1)
| Title |
|---|
| 二维磁声电图像重建及成像影响因素分析;夏慧;刘国强;郭亮;黄欣;陈晶;;电子科技大学学报(第01期);152-156 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114598119A (en) | 2022-06-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100479985C (en) | XYZ-axes table | |
| JP5387570B2 (en) | Multi-degree-of-freedom actuator and stage device | |
| US6734583B2 (en) | Slider unit with built-in moving-coil linear motor | |
| KR20060051009A (en) | Linear motor and linear moving stage device | |
| KR20110107801A (en) | Monolithic stage positioning system and method | |
| JP4508999B2 (en) | Linear drive | |
| JP4753004B2 (en) | Electromagnet unit, electromagnetic actuator, levitation control device for electromagnetic actuator, and stage device | |
| CN113922546B (en) | Differential reluctance motor device | |
| JP2006034017A (en) | Linear motor for machine tool | |
| JP2004172557A (en) | Stage apparatus and its control method | |
| CN114598119B (en) | Reluctance type two-dimensional scanning movement device | |
| CN112262522B (en) | Linear motor, transport device and production device | |
| JP2001211630A (en) | Linear slider | |
| US6876108B2 (en) | Linear motor, its controlling method, and XY table | |
| JP4594093B2 (en) | Drive device | |
| CN115833517A (en) | Near-zero rigidity micro-nano motor | |
| JP2004312956A (en) | Linear actuator | |
| JP2002096233A (en) | Linear slider | |
| JPH02219455A (en) | Linear motor supporting mechanism | |
| JP2006034016A (en) | Linear motor for machine tool | |
| CN114598123B (en) | Active magnetic levitation vibration damper based on reluctance motor | |
| JP5470990B2 (en) | Multi-degree-of-freedom actuator | |
| US20240055970A1 (en) | Linear motor, transport apparatus, and production apparatus | |
| JP2006034013A (en) | Linear motor for machine tool | |
| FI20195489A1 (en) | A linear electric machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |