CN114596328A

CN114596328A - Edge detection method and device and storage medium

Info

Publication number: CN114596328A
Application number: CN202210266086.7A
Authority: CN
Inventors: 陈鲁; 王天民; 张嵩
Original assignee: Shenzhen Zhongke Feice Technology Co Ltd
Current assignee: Shenzhen Zhongke Feice Technology Co Ltd
Priority date: 2022-03-15
Filing date: 2022-03-15
Publication date: 2022-06-07

Abstract

An edge detection method, an apparatus and a storage medium, the edge detection method includes: obtaining the size of at least one edge area of the surface to be measured of the object to be measured; dividing each edge area into a plurality of parallel sub-detection areas along the respective length direction according to the detection size of the first detector and the detection size of the second detector; and controlling the first detector and the second detector to scan the edge area to obtain a detection image corresponding to the edge area. By dividing the sub-detection areas of the edge area and scanning the corresponding sub-detection areas through the two detectors, the time for moving a single detector along the first preset direction and the second preset direction is saved, the time for starting acceleration and deceleration and stopping in a plurality of scanning rounds is saved, and the overall detection efficiency is improved.

Description

Edge detection method and device and storage medium

Technical Field

The present invention relates to the field of edge detection technologies, and in particular, to an edge detection method, an edge detection device, and a storage medium.

Background

In the field of AOI detection of a panel Module section, along with the updating and upgrading of process technology, higher precision requirements are put forward for the detection of special types of defects, and the requirements of the detection of the defects in the micron level are upgraded to the submicron level at present.

However, the product capacity of the Module section is not reduced, so that the detection speed is inevitably reduced on the premise of improving the detection precision, and the takt time of the production line cannot be obviously reduced. The screen products produced by the panel can be roughly divided into the following sizes: watch level, mobile phone level, tablet level, notebook level, display level, TV level. Among them, the smaller the screen size, the more complicated the process structure, and the higher the requirement for defect detection. Correspondingly, taking mobile phone-level screen detection as an example, because the size is small, under the original detection precision of more than 10 μm level, a large target surface camera can be used to match with a proper lens, so that full-frame coverage of mobile phone screen products or splicing coverage of limited several or more than ten images can be realized; however, the detection accuracy is now improved to submicron, and the field of view of the camera is very small, so hundreds or thousands of images are needed to cover the camera.

The existing detection method has the advantages of low detection speed and long detection time cost.

Disclosure of Invention

The invention mainly solves the technical problems of lower detection speed and longer detection time cost of the existing detection method.

According to a first aspect, an embodiment provides an edge detection method, including:

obtaining the size of at least one edge area of the surface to be measured of the object to be measured;

dividing each edge area into a plurality of parallel sub-detection areas along the respective length direction according to the detection size of the first detector and the detection size of the second detector; the width of the edge area is larger than the detection size of the first detector and larger than the detection size of the second detector; the plurality of sub-detection regions comprises at least one first sub-detection region and at least one second sub-detection region;

controlling the first detector and the second detector to scan the edge area to obtain a detection image corresponding to the edge area; when each edge area is scanned, the length direction of the edge area is determined to be parallel to a first preset direction, a first detector is controlled to scan a first sub-detection area of the edge area along the first preset direction to obtain a first sub-detection image corresponding to the first sub-detection area, a second detector is controlled to scan a second sub-detection area of the edge area along the first preset direction to obtain a second sub-detection image corresponding to the second sub-detection area, and the detection images comprise the first sub-detection image and the second sub-detection image.

According to a second aspect, an embodiment provides an edge detection apparatus, including a first probe, a second probe, a probe motion system, and a processing terminal;

the first detector is used for scanning a first sub-detection area of the object to be detected to obtain a corresponding first sub-detection image;

the second detector is used for scanning a second sub-detection area of the object to be detected to obtain a corresponding second sub-detection image;

the detector motion system is used for driving the first detector to move along a first preset direction and a second preset direction, and the detector motion system is also used for driving the second detector to move along the first preset direction and the second preset direction; the first preset direction is orthogonal to the second preset direction;

the processing terminal is used for acquiring the size of at least one edge area of the surface to be measured of the object to be measured; dividing each edge area into a plurality of parallel sub-detection areas along the respective length direction according to the detection size of the first detector and the detection size of the second detector; the width of the edge area is larger than the detection size of the first detector and larger than the detection size of the second detector; the plurality of sub-detection regions comprises at least one first sub-detection region and at least one second sub-detection region; controlling the first detector and the second detector to scan the edge area to obtain a detection image corresponding to the edge area; when each edge area is scanned, the length direction of the edge area is determined to be parallel to a first preset direction, a first detector is controlled to scan a first sub-detection area of the edge area along the first preset direction to obtain a first sub-detection image corresponding to the first sub-detection area, a second detector is controlled to scan a second sub-detection area of the edge area along the first preset direction to obtain a second sub-detection image corresponding to the second sub-detection area, and the detection image comprises the first sub-detection image and the second sub-detection image.

According to a third aspect, an embodiment provides an edge detection apparatus, comprising:

a memory for storing a program;

a processor for implementing the method as described in the first aspect by executing a program stored in the memory.

According to a fourth aspect, an embodiment provides a computer readable storage medium having a program stored thereon, the program being executable by a processor to implement the method as described in the first aspect.

According to the edge detection method, the edge detection device and the storage medium of the embodiment, the edge area is divided into the sub-detection areas, and the two detectors are used for scanning the corresponding sub-detection areas at the same time, so that the time for moving a single detector along the first preset direction and the second preset direction is saved, the time for starting acceleration and stopping deceleration in a plurality of scanning rounds is saved, and the overall detection efficiency is improved.

Drawings

Fig. 1 is a schematic structural diagram of an object to be measured and an edge area according to an embodiment;

FIG. 2 is a schematic view of a scan path of a conventional single detector scan;

FIG. 3 is a flow chart of a method for edge detection according to an embodiment;

fig. 4, 5 to 7 are schematic diagrams illustrating the division of the sub-detection regions according to an embodiment;

FIGS. 8 and 9 are schematic diagrams of a detector arrangement according to an embodiment;

FIG. 10 is a schematic structural diagram of an edge detection apparatus according to an embodiment;

fig. 11 is a schematic structural diagram of another edge detection apparatus according to an embodiment.

Reference numerals: 10-a first detector; 20-a second detector; 30-a detector motion system; 40-an object motion system; 50-processing the terminal; 60-an object to be measured; 100-a memory; 200-a processor.

Detailed Description

The present invention will be described in further detail with reference to the following detailed description and accompanying drawings. Wherein like elements in different embodiments are numbered with like associated elements. In the following description, numerous details are set forth in order to provide a better understanding of the present application. However, those skilled in the art will readily recognize that some of the features may be omitted or replaced with other elements, materials, methods in different instances. In some instances, certain operations related to the present application have not been shown or described in detail in order to avoid obscuring the core of the present application from excessive description, and it is not necessary for those skilled in the art to describe these operations in detail, so that they may be fully understood from the description in the specification and the general knowledge in the art.

Furthermore, the described features, operations, or characteristics may be combined in any suitable manner to form various embodiments. Also, the various steps or actions in the method descriptions may be transposed or transposed in order, as will be apparent to one of ordinary skill in the art. Thus, the various sequences in the specification and drawings are for the purpose of describing certain embodiments only and are not intended to imply a required sequence unless otherwise indicated where such sequence must be followed.

The numbering of the components as such, e.g., "first", "second", etc., is used herein only to distinguish the objects as described, and does not have any sequential or technical meaning. The term "connected" and "coupled" when used in this application, unless otherwise indicated, includes both direct and indirect connections (couplings).

The existing panel detection has different detection precision according to different sizes of panels and different applied products. For a detector with a detection precision in submicron (represented by 0.5 μm), under the current technical level, parameters such as the size of a target surface of the detector, the maximum target surface supported by a lens and the like are comprehensively considered, and the actual single-picture object space size (defined as the detection size of the detector) of a set of detector with reasonable cost is obtained and is approximately in millimeter-scale detection size such as 1.8mm x 1.8 mm. For a mobile phone screen with the size of 170mm x90mm, thousands of images need to be taken.

As shown in fig. 1, a conventional screen module may include five regions (ACBDE regions) to be detected, wherein four edge regions are included, and assuming that the width (left and right directions in the drawing) of the B region is 3mm and the detection size of the detector is 1.8mm × 1.8mm, the detector needs to perform two scanning rounds to complete the scanning of the B region, and the scanning path is as shown in fig. 2. For convenience of illustration, the longitudinal direction of the B region (the vertical direction in the figure) is shown in a reduced scale. "0123" in the figure represents the stop position of the probe. At the beginning of scanning, the detector starts scanning upwards from the position of 0 at the lower left of the B area, firstly starting acceleration is carried out, then the first round of scanning is carried out on the B area at a constant speed, and then deceleration is stopped to the position of 1. Then, the scanning device is translated from the position of 1 to the position of 2, finally, the acceleration is started from the position of 2, the second round scanning is carried out on the B area, and the deceleration is stopped to the position of 3. In actual detection, the "0" position is located at the lower left of the B region, the detection area of the detector just covers the lower left corner, and similarly, the "1" position is located at the upper left of the B region, and fig. 2 illustrates the scanning path for better illustration, and does not limit the specific motion start point and end point.

The motion of the shaft of the motion system consumes longer time when starting acceleration, deceleration, stopping and reverse movement, the motion efficiency is low and is relatively long, and the motion efficiency at the linear uniform motion section is high and is relatively short; thus, with a single detector, a first scan cycle involves initiating an acceleration and deceleration stop, a movement from the "1" position to the "2" position involves initiating an acceleration and deceleration stop, and a second scan cycle from the "2" position to the "3" position involves initiating an acceleration, reversal, and deceleration stop.

As the width of the edge area increases, a single detector needs more scanning rounds to scan, and the time for starting acceleration, deceleration, stop and reverse movement in the middle is a large part, so that the scanning efficiency is low.

In the present application, the detector needs to be driven to move by a detector moving system, which is generally a three-axis moving system (defined as XYZ three axes), where the XY axes of the horizontal plane are defined as a first preset direction and a second preset direction, respectively.

In the embodiment of the invention, the double detectors are adopted to scan the same edge area, so that the time occupied by starting acceleration, deceleration, stopping and reverse movement in multiple scanning turns of a single detector is reduced, and the detection efficiency is improved.

The first embodiment is as follows:

referring to fig. 3, the present embodiment provides an edge detection method, including:

step 1: the size of at least one edge region of the surface to be measured of the object to be measured is acquired.

Specifically, the size of the edge region includes a length-direction size and a width-direction size of the edge region. For a specific object to be detected, the size of the edge area corresponding to the determined detection defect is fixed, and the size of the edge area to be detected can be obtained by obtaining the information of the product to be detected. Alternatively, the setting is performed manually on the processing terminal. It is to be understood that each edge region is formed as a long strip, the length direction referring to the direction of the long side and the width direction referring to the direction of the narrow side.

Step 2: dividing each edge area into a plurality of parallel sub-detection areas along the respective length direction according to the detection size of the first detector and the detection size of the second detector; the width of the edge area is larger than the detection size of the first detector and larger than the detection size of the second detector; the plurality of sub-detection regions includes at least one first sub-detection region and at least one second sub-detection region.

Specifically, in this embodiment, the first detector and the second detector are taken as the same type of detector for explanation, and the detection sizes of the two detectors are the same. However, the edge detection method provided by the present invention is not limited to be applicable to two identical detectors, and the method is still applicable as long as the detection parameters of the two detectors can be adjusted to be the same. However, it is obvious that, under the condition that the first detector or the second detector meets the detection precision requirement, the larger the detection size is, the better the detection size is; in order to reduce the number of scanning rounds, the same two detectors are used to scan at the maximum detection size with the minimum number of scanning rounds.

As shown in fig. 4, when the width of the B-zone is 7.2mm, the detection sizes of the first detector and the second detector are 1.8mm x 1.8mm, and the B-zone can be divided into four sub-detection areas. As shown in fig. 5 and fig. 6, in this case, the manner of dividing the first sub-detection region and the second sub-detection region may have two manners, specifically, the first sub-detection region and the second sub-detection region are alternately arranged at intervals, or at least one first sub-detection region and at least one second sub-detection region are adjacently disposed.

And step 3: controlling the first detector and the second detector to scan the edge area to obtain a detection image corresponding to the edge area; when each edge area is scanned, the length direction of the edge area is determined to be parallel to a first preset direction, a first detector is controlled to scan a first sub-detection area of the edge area along the first preset direction to obtain a first sub-detection image corresponding to the first sub-detection area, a second detector is controlled to scan a second sub-detection area of the edge area along the first preset direction to obtain a second sub-detection image corresponding to the second sub-detection area, and the detection images comprise the first sub-detection image and the second sub-detection image.

Specifically, the first detector and the second detector may move synchronously or asynchronously, and this requirement depends on the detector motion system. When two sets of independent motion systems are adopted to respectively drive the first detector and the second detector, the first detector and the second detector can move synchronously or asynchronously during scanning. When a set of motion systems is used, the first detector and the second detector can only move synchronously during scanning. The synchronous movement refers to a movement along a first predetermined direction, and the movement along the first predetermined direction may be a forward direction or a reverse direction, i.e. an upward or downward movement as shown in the figure.

In one practical application, as shown in fig. 5, when the first sub-detection regions and the second sub-detection regions are alternately arranged, the sub-detection regions scanned by the two detectors and the position relationship between the two sub-detection regions are different according to whether the detector motion system can drive the two detectors to move independently.

Specifically, when each edge area is scanned, a first detector is controlled to scan a first sub-detection area of the edge area along a first preset direction, and a second detector is controlled to synchronously scan a second sub-detection area of the edge area along the first preset direction; the width of the first sub-detection area is smaller than or equal to the detection size of the first detector, and the width of the second sub-detection area is smaller than or equal to the detection size of the second detector.

For example, as shown in FIG. 5, when the detector motion system simultaneously drives both detectors in a synchronous motion in a first predetermined direction, but the two detectors are driven independently, the second detector may be one of the B2 and B4 sub-detection areas when the first detector scans the B1 sub-detection area. While the first detector scans the B3 sub-detection region, the second detector may be the other of the B2 and B4 sub-detection regions. It can be seen that if the first detector needs to move to the right after scanning the B1 sub-detection region, then it scans the B3 region. It is also better for the second detector to scan the B2 sub-detection region first, moving to the right, and then scan the B4 sub-detection region later. The situation that one detector faces right and one detector faces left is avoided, the complexity of a detector movement system is reduced, and the control difficulty of the movement process is also reduced. In this case, the two detectors are not required to be driven independently, and can be driven integrally. However, when the hardware condition of the detector motion system satisfies the independent driving, the synchronous motion is not limited to the same-direction synchronous motion or the opposite-direction synchronous motion.

For another example, since the first detector scans the B1 sub-detection region, it moves to the right, and then scans the B3 region. While the second detector scans the B2 sub-detection region, moving to the right, and then scans the B4 sub-detection region better. Then, the distance between the first detector and the second detector may be kept constant, and at this time, the two detectors may be driven to move along the first preset direction and the second preset direction simultaneously by a set of detector moving system, that is, the up-down direction and the left-right direction in the drawing.

At this time, the relationship between the first detector and the second detector may be that the detection size of the first detector is the same as the detection size of the second detector, the width of the first sub-detection region is the same as the width of the second sub-detection region, the number of the first sub-detection regions is N or N +1, the number of the second sub-detection regions is N, the total number of the sub-detection regions is 2N or 2N +1, and N is a positive integer greater than or equal to 1; in each scanning turn, two adjacent sub-detection areas are arranged between a first sub-detection area scanned by the first detector and a second sub-detection area scanned by the second detector. That is, the B1 sub-detection region of the first detector scan is the B2 sub-detection region of the second detector scan. Then, for any one edge region, it is only necessary to distinguish how many sub-detection regions are divided, and for the detector motion system, the scanning of two sub-detection regions is performed according to the driving along the first preset direction, and then the motion of the next two sub-detection regions to be detected towards the second preset direction is repeated. It can be seen that, at this time, the hardware requirements for the probe motion system are low, and the control algorithm requirements for the processing terminal are low.

In another practical application, as shown in fig. 6, when at least one first sub-detection region and at least one second sub-detection region are adjacently disposed, the position relationship between the sub-detection region modes scanned by the two detectors is different according to whether the detector motion system can respectively drive the two detectors to independently move.

For example, as shown in FIG. 6, when the detector motion system simultaneously drives both detectors in a synchronous motion in a first predetermined direction, but the two detectors are driven independently, the second detector may be one of the B3 and B4 sub-detection areas when the first detector scans the B1 sub-detection area. While the first detector scans the B2 sub-detection region, the second detector may be the other of the B3 and B4 sub-detection regions. It can be seen that if the first detector needs to move to the right after scanning the B1 sub-detection region, then it scans the B3 region. While it is better for the second detector to scan the B3 sub-detection region first, moving to the right, and then scan the B4 sub-detection region later. The situation that one detector faces right and one detector faces left is avoided, the complexity of a detector movement system is reduced, and the control difficulty of the movement process is also reduced. In this case, the two detectors are not required to be driven independently, and can be driven integrally.

For another example, when the two detectors of the detector moving system are not synchronously moved along the first preset direction, one of the detectors is driven to scan the first sub-detection region from left to right, and the other detector is driven to scan the second sub-detection region from right to left. It is possible that the two detectors move towards each other. Physical space conflicts can arise when there are situations where the width of the edge region is less than the minimum probe spacing. As shown in fig. 6, when the first detector scans the first sub-detection area B2 from top to bottom, the second detector scans the first sub-detection area B3 from bottom to top, when the two detectors move to scan the middle position of the edge area, the first detector moves to the left and right direction to avoid, the second detector continues to scan, and after the second detector scans, the first detector continues to scan after moving to the original position.

At this time, the relationship between the first detector and the second detector may be such that the detection size of the first detector is the same as the detection size of the second detector, the width of the first sub-detection region is the same as the width of the second sub-detection region, the number of the first sub-detection regions is N or N +1, the number of the second sub-detection regions is N, the total number of the sub-detection regions is 2N or 2N +1 and is greater than or equal to 3, and N is a positive integer greater than or equal to 1; in each scanning turn, the distance between the first sub-detection area scanned by the first detector and the second sub-detection area scanned by the second detector is kept constant. That is, while the first detector scanned the B1 sub-detection region, the second detector scanned the B3 sub-detection region and then simultaneously moved to the right, while the first detector scanned the B2 sub-detection region, the second detector scanned the B4 sub-detection region. Then, for any one edge region, it is only necessary to distinguish how many sub-detection regions are divided, and for the detector motion system, the scanning of two sub-detection regions is performed according to the driving along the first preset direction, and then the motion of the next two sub-detection regions to be detected towards the second preset direction is repeated. It can be seen that, at this time, the hardware requirements for the probe motion system are low, and the control algorithm requirements for the processing terminal are low. However, when the first detector and the second detector are relatively fixed, it is obviously necessary to ensure that the detection sizes of the two detectors are the same, and ensure that the width of each sub-detection area is the same, so that after the scanning of the two sub-detection areas is completed, the next two sub-detection areas are scanned by traversing.

When the two detectors have different detection sizes and are fixed relatively to each other, as shown in fig. 7, the first sub-detection regions and the second sub-detection regions can only be arranged in a dividing manner as shown in fig. 5, so as to ensure that the distance between every two scanned sub-detection regions (one first sub-detection region and one second sub-detection region) is the same, so as to correspond to the distance between the two detectors along the second preset direction. That is, the pitch of the B1 sub sensing area and the B2 sub sensing area is the same as the pitch of the B3 sub sensing area and the B4 sub sensing area, which is equal to the pitch of the two probes along the second preset direction. The pitch of the B1 sub detection region and the B3 sub detection region is the same as the pitch of the B2 sub detection region and the B4 sub detection region, and is equal to the pitch of each traverse.

In summary, it is determined whether to drive synchronously or asynchronously according to the performance of the detector motion system. When synchronous driving is adopted, different sub-detection area division modes can be adopted according to whether the detection sizes of the two detectors are the same, and finally, the distance between the two detectors in the second preset direction is adjusted to match sub-detection area division.

As shown in fig. 8 and 9, when the two detectors are integrally driven, the two detectors are relatively static, and may be arranged side by side as shown in fig. 8, or arranged back and forth along a first preset direction and staggered along a second preset direction as shown in fig. 9, according to the different external dimensions of the detectors, so as to ensure that the two detectors can scan simultaneously. As shown in fig. 9, when the external dimensions of the detectors are larger than the detection dimensions, the arrangement relationship shown in fig. 8 cannot be adopted between the two detectors, and only the arrangement relationship shown in fig. 9 can be adopted. For the mode shown in fig. 9, two detectors are required to be arranged in tandem along the first predetermined direction, for example, at an interval of 80mm, and in each scanning pass, more 80mm is required to move along the first predetermined direction than in the mode shown in fig. 8. As previously mentioned, the linear motion is much less than the time required to initiate acceleration, deceleration, stop and reverse motion, and therefore the increased linear motion time per scan pass using dual detectors is still significant as a whole compared to the decreased time required to initiate acceleration, deceleration, stop and reverse motion using a single detector. For example, when a single detector scans the edge area shown in fig. 5, four scanning passes are required to complete the scanning, including four linear scans and three traverses, and each of the linear scans and the traverses needs to start acceleration and deceleration and stop, that is, seven times of acceleration and deceleration and stop are started. With the dual detector arrangement shown in fig. 8 or 9, only two linear scans and one traverse are required, saving two linear scans and two traverses, including four start-ups and four deceleration stops. Even with the dual detector arrangement shown in fig. 9, the increased time of linear motion has less impact than the time savings.

Therefore, the scanning mode of the double detectors is adopted, and the edge detection efficiency can be greatly improved. When the double detectors are integrally driven, the difference between the double detectors and a single detector is not large on the requirement of a detector motion system, and the first detector and the second detector are only required to be relatively fixed through a clamp. Meanwhile, the edge detection method is not limited by the specific shape of the object to be detected, and the edge detection method can be adopted to carry out accelerated scanning on the object to be detected with the edge area corresponding to the straight edge, so that the detection efficiency is improved.

Example two:

in the first embodiment, a related description is mainly performed for the detection of a single edge region, and in the actual detection, the object to be detected has a plurality of edges and a plurality of edge regions correspondingly. In this embodiment, as shown in fig. 1, the object to be measured may be a square, for example, a mobile phone screen, and the edge area of the object to be measured includes a first edge area, a second edge area, a third edge area, and a fourth edge area, which correspond to the B area, the C area, the D area, and the E area in fig. 1; the first edge area and the third edge area are the same in size and are parallel, and the second edge area and the fourth edge area are parallel. In practical applications, the detection requirements of the upper edge and the lower edge of the mobile phone screen are different.

At this time, corresponding to this embodiment, in step 3 of the edge detecting method, controlling the first detector and the second detector to scan the edge area may include:

step 310: and controlling the first detector and the second detector to scan the first edge area, and after the first edge area is scanned, controlling the first detector and the second detector to scan the third edge area.

Step 320: and after the scanning of the third edge area is finished, rotating the object to be detected by 90 degrees, controlling the first detector and the second detector to scan the second edge area, and after the scanning of the second edge area is finished, controlling the first detector and the second detector to scan the fourth edge area.

When scanning the edge area, the first detector and the second detector synchronously scan or asynchronously scan along a first preset direction; and during synchronous scanning, the distance between the first detector and the second detector along the first preset direction is kept unchanged. That is, the front and back arrangement along the first preset direction shown in fig. 8 is adopted.

In practical applications, in step 320, after rotating the object to be measured by 90 °, the edge detection method may further include:

step 321: and controlling the first detector or the second detector to scan the edge of the object to be detected corresponding to the second edge area to obtain a detection image. The edge of the product can be clearly distinguished from the edge area and the background, and can be used for judging whether the edge is parallel to the first preset direction.

Step 322: judging whether the length direction of the second edge area is parallel to the first preset direction or not according to the detection image, and controlling the first detector and the second detector to scan the second edge area when the length direction of the second edge area is parallel to the first preset direction; and when the length direction of the second edge region is not parallel to the first preset direction, rotating the object to be detected according to the detection image, and acquiring the detection image again for judgment until the length direction of the second edge region is parallel to the first preset direction.

Specifically, the edge is subjected to one covering scanning, any two points, namely a point a and a point B, are taken along a straight line in the first preset direction, and the distance D1 between the point a and the edge in the edge region and the distance D2 between the point B and the edge in the edge region are respectively measured in the second preset direction, when the difference between D1 and D2 is smaller than or equal to α, the length direction of the edge region is considered to be parallel to the first preset direction, and at this time, the subsequent scanning can be continuously completed; when the difference between D1 and D2 is greater than α, it is determined that the length direction of the edge region is not parallel to the first predetermined direction, and the rotation angle needs to be fine-tuned, and then the step 321 is performed. Wherein the difference may be 0.001 mm.

That is, after the steering is performed, whether the second edge region is parallel to the first preset direction may be determined through one scanning pass.

In particular, assuming that in fig. 1, the widths of the areas B, C and D are 3mm, the width of the area E is 7mm, and the detection size of the detector is 1.8mm × 1.8mm, then the areas B, C and D need to be scanned for two rounds, during which one traverse between the two rounds is involved; the area E needs four turns, three times of transverse movement among the four turns is involved in the period, the sequential scanning of BCDE is generally adopted, ten scanning turns and six transverse movements are needed in total, and the object to be detected needs to be rotated three times. In the embodiment, a scanning mode of double detectors is adopted, so that the areas B, C and D only need one scanning turn, and do not need to move transversely; the E area only needs two turns and only needs one traversing; and the scanning sequence is according to the mode of BDCE, five scanning rounds are needed in total, one-time transverse movement is needed, and the object to be detected only needs to rotate once. That is, the time required for five straight scanning passes, five traverses, and three rotations can be saved. The widths of the edge regions are only used for illustration, and actually the widths between the regions B and D are not necessarily the same, and the scanning sequence still follows that two parallel edge regions are scanned first, then rotated, and then the remaining two parallel edge regions are scanned. However, after the rotation, the edge area with closer distance is scanned first, for example, as in fig. 1, after the scanning of the D area is completed, the two detectors are located above the D area, and after the rotation of 90 °, the C area is closer, so that the D area is scanned after the C area.

In summary, by using the edge detection method provided in this embodiment to perform edge detection on the rectangular object to be detected, the detection time can be reduced, and the detection speed can be increased.

Example three:

referring to fig. 10, the present embodiment provides an edge detecting apparatus including a first probe 10, a second probe 20, a probe moving system 30, and a processing terminal 50.

The first detector 10 is configured to scan a first sub-detection area of the object 60 to be detected, and obtain a corresponding first sub-detection image. The second detector 20 is configured to scan a second sub-inspection area of the object 60 to be inspected to obtain a corresponding second sub-inspection image.

In one practical application, the first detector 10 and the second detector 20 are arranged in the arrangement shown in fig. 9, and are arranged in a front-back manner along a first predetermined direction and in a staggered manner along a second predetermined direction. And both detectors are always moving synchronously when driven by the detector motion system 30.

The detector moving system 30 is configured to drive the first detector 10 to move along a first preset direction and a second preset direction, and the detector moving system 30 is further configured to drive the second detector 20 to move along the first preset direction and the second preset direction; the first predetermined direction is orthogonal to the second predetermined direction.

In one embodiment, the detector moving system 30 employs a three-axis moving system to integrally drive the first detector 10 and the second detector 20 to move synchronously. In each scanning turn, integrally driving the first detector 10 and the second detector 20 to synchronously move along a first preset direction; in each traversing movement, the first detector 10 and the second detector 20 are driven integrally to move synchronously along a second preset direction. And when detecting the square object to be detected 60 shown in fig. 1, after completing detection of one edge region, integrally driving the first detector 10 and the second detector 20 to synchronously move along a second preset direction, and detecting the other parallel edge region.

The processing terminal 50 is used for acquiring the size of at least one edge region of the surface to be measured of the object to be measured 60; dividing each edge region into a plurality of parallel sub-detection regions along the respective length direction according to the detection size of the first detector 10 and the detection size of the second detector 20; the width of the edge region is larger than the detection size of the first detector 10 and larger than the detection size of the second detector 20; the plurality of sub-detection regions comprises at least one first sub-detection region and at least one second sub-detection region; controlling the first detector 10 and the second detector 20 to scan the edge area to obtain a detection image corresponding to the edge area; when each edge area is scanned, it is determined that the length direction of the edge area is parallel to a first preset direction, the first detector 10 is controlled to scan a first sub-detection area of the edge area along the first preset direction to obtain a first sub-detection image corresponding to the first sub-detection area, the second detector 20 is controlled to scan a second sub-detection area of the edge area along the first preset direction to obtain a second sub-detection image corresponding to the second sub-detection area, and the detection image includes the first sub-detection image and the second sub-detection image. For example, the processing terminal 50 may be a computer or other terminal.

In a practical application, in this embodiment, as shown in fig. 1, the object 60 to be measured may be a square, for example, a mobile phone screen, and the edge area of the object 60 to be measured includes a first edge area, a second edge area, a third edge area and a fourth edge area, which correspond to the area B, the area C, the area D and the area E in fig. 1; the first edge area and the third edge area are the same in size and are parallel, and the second edge area and the fourth edge area are parallel. The edge detection apparatus may further include an object motion system 40, the object motion system 40 being configured to drive the object 60 to be measured to rotate around the normal of the surface to be measured. The processing terminal 50 is also used to control the object moving system 40 to rotate the object 60 to be measured by a predetermined angle, for example, 90 °. When the object 60 to be detected is detected, after the detection of the region B is completed, the parallel region D is detected. Then, the object 60 to be tested is rotated by 90 °, and the detection in the area C and the detection in the area E are performed. After the detection of one object 60 to be detected is completed, the device is rotated reversely by 90 degrees to reset, and the detection of the next object 60 to be detected is carried out.

It can be seen that, by using the edge detection apparatus provided in this embodiment, the edge detection can be performed by using the methods described in the first and second embodiments, and the object to be detected 60 can be efficiently detected by using the dual detectors and the reasonable detection sequence.

Referring to fig. 11, the present embodiment further provides another edge detection apparatus, which includes a memory 100 and a processor 200.

The memory 100 is used to store programs. The processor 200 is used for implementing the method described in the first embodiment and the second embodiment by executing the program stored in the memory 100. The method of the first embodiment and the second embodiment has the corresponding technical effects, and the description is not repeated here.

Those skilled in the art will appreciate that all or part of the functions of the various methods in the above embodiments may be implemented by hardware, or may be implemented by computer programs. When all or part of the functions of the above embodiments are implemented by a computer program, the program may be stored in a computer-readable storage medium, and the storage medium may include: a read only memory, a random access memory, a magnetic disk, an optical disk, a hard disk, etc., and the program is executed by a computer to realize the above functions. For example, the program may be stored in a memory of the device, and when the program in the memory is executed by the processor, all or part of the functions described above may be implemented. In addition, when all or part of the functions in the above embodiments are implemented by a computer program, the program may be stored in a storage medium such as a server, another computer, a magnetic disk, an optical disk, a flash disk, or a portable hard disk, and may be downloaded or copied to a memory of a local device, or may be version-updated in a system of the local device, and when the program in the memory is executed by a processor, all or part of the functions in the above embodiments may be implemented.

The present invention has been described in terms of specific examples, which are provided to aid in understanding the invention and are not intended to be limiting. Numerous simple deductions, modifications or substitutions may also be made by those skilled in the art in light of the present teachings.

Claims

1. An edge detection method, comprising:

dividing each edge area into a plurality of parallel sub-detection areas along the respective length direction according to the detection size of the first detector and the detection size of the second detector; the width of the edge region is larger than the detection size of the first detector and larger than the detection size of the second detector; the plurality of sub-detection regions comprises at least one first sub-detection region and at least one second sub-detection region;

controlling the first detector and the second detector to scan the edge area to obtain a detection image corresponding to the edge area; when each edge area is scanned, determining that the length direction of the edge area is parallel to a first preset direction, controlling the first detector to scan the first sub-detection area of the edge area along the first preset direction to obtain a first sub-detection image corresponding to the first sub-detection area, controlling the second detector to scan the second sub-detection area of the edge area along the first preset direction to obtain a second sub-detection image corresponding to the second sub-detection area, wherein the detection image comprises the first sub-detection image and the second sub-detection image.

2. The edge detection method of claim 1, wherein the object to be measured is square, and the edge regions of the object to be measured include a first edge region, a second edge region, a third edge region, and a fourth edge region; the first edge area and the third edge area are the same in size and are parallel, and the second edge area and the fourth edge area are parallel;

controlling the first detector and the second detector to scan the edge region, including:

controlling the first detector and the second detector to scan the first edge area, and after the first edge area is scanned, controlling the first detector and the second detector to scan the third edge area;

after the third edge area is scanned, rotating the object to be detected by 90 degrees, controlling the first detector and the second detector to scan the second edge area, and after the second edge area is scanned, controlling the first detector and the second detector to scan the fourth edge area;

when the edge area is scanned, the first detector and the second detector synchronously scan or asynchronously scan along a first preset direction; and during synchronous scanning, the distance between the first detector and the second detector along a first preset direction is kept unchanged.

3. The edge detection method of claim 2, wherein after rotating the object to be measured by 90 °, the edge detection method further comprises:

controlling the first detector or the second detector to scan the edge of the object to be detected corresponding to the second edge area to obtain a detection image;

judging whether the length direction of the second edge area is parallel to a first preset direction or not according to the detection image, and controlling the first detector and the second detector to scan the second edge area when the length direction of the second edge area is parallel to the first preset direction; and when the length direction of the second edge region is not parallel to the first preset direction, rotating the object to be detected according to the detection image, and acquiring the detection image again for judgment until the length direction of the second edge region is parallel to the first preset direction.

4. The edge detection method of any of claims 1-3, wherein the first sub-detection regions are alternately spaced from the second sub-detection regions;

when each edge area is scanned, controlling the first detector to scan the first sub-detection area of the edge area along a first preset direction, and simultaneously controlling the second detector to synchronously scan the second sub-detection area of the edge area along the first preset direction; the width of the first sub-detection area is smaller than or equal to the detection size of the first detector, and the width of the second sub-detection area is smaller than or equal to the detection size of the second detector.

5. The edge detection method according to claim 4, wherein the detection size of the first detector is the same as the detection size of the second detector, the width of the first sub-detection region is the same as the width of the second sub-detection region, the number of the first sub-detection regions is N or N +1, the number of the second sub-detection regions is N, the total number of the sub-detection regions is 2N or 2N +1, and N is a positive integer greater than or equal to 1; in each scanning turn, two adjacent sub-detection areas are arranged between the first sub-detection area scanned by the first detector and the second sub-detection area scanned by the second detector.

6. The edge detection method according to any of claims 1-3, wherein the at least one first sub-detection region is disposed adjacent to the at least one second sub-detection region;

7. The edge detection method according to claim 6, wherein a detection size of the first detector is the same as a detection size of the second detector, a width of the first sub-detection region is the same as a width of the second sub-detection region, the number of the first sub-detection regions is N or N +1, the number of the second sub-detection regions is N, the total number of the sub-detection regions is 2N or 2N +1 and 3 or more, and N is a positive integer greater than or equal to 1; in each scanning turn, the distance between the first sub-detection area scanned by the first detector and the second sub-detection area scanned by the second detector is kept constant.

8. The edge detection device is characterized by comprising a first detector, a second detector, a detector motion system and a processing terminal;

the processing terminal is used for acquiring the size of at least one edge area of the surface to be measured of the object to be measured; dividing each edge area into a plurality of parallel sub-detection areas along the respective length direction according to the detection size of the first detector and the detection size of the second detector; the width of the edge region is larger than the detection size of the first detector and larger than the detection size of the second detector; the plurality of sub-detection regions comprises at least one first sub-detection region and at least one second sub-detection region; controlling the first detector and the second detector to scan the edge area to obtain a detection image corresponding to the edge area; when each edge area is scanned, determining that the length direction of the edge area is parallel to a first preset direction, controlling the first detector to scan the first sub-detection area of the edge area along the first preset direction to obtain a first sub-detection image corresponding to the first sub-detection area, controlling the second detector to scan the second sub-detection area of the edge area along the first preset direction to obtain a second sub-detection image corresponding to the second sub-detection area, wherein the detection image comprises the first sub-detection image and the second sub-detection image.

9. An edge detection apparatus, comprising:

a memory for storing a program;

a processor for implementing the method of any one of claims 1-7 by executing a program stored by the memory.

10. A computer-readable storage medium, characterized in that the medium has stored thereon a program which is executable by a processor to implement the method according to any one of claims 1-7.