CN114582772B - Suspension type temporary storage device, horizontal adjusting system and horizontal adjusting method - Google Patents

Suspension type temporary storage device, horizontal adjusting system and horizontal adjusting method Download PDF

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CN114582772B
CN114582772B CN202210459771.1A CN202210459771A CN114582772B CN 114582772 B CN114582772 B CN 114582772B CN 202210459771 A CN202210459771 A CN 202210459771A CN 114582772 B CN114582772 B CN 114582772B
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temporary storage
storage device
component
suspension type
type temporary
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CN114582772A (en
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陈天柱
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Changxin Memory Technologies Inc
Changxin Jidian Beijing Memory Technologies Co Ltd
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Changxin Memory Technologies Inc
Changxin Jidian Beijing Memory Technologies Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733Overhead conveying
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B17/00Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00Measuring inclination, e.g. by clinometers, by levels
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773Conveying cassettes, containers or carriers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10Measuring as part of the manufacturing process
    • H01L22/12Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The embodiment of the disclosure provides a suspension type temporary storage device, a horizontal adjusting system and a horizontal adjusting method. Wherein, suspension type temporary storage device includes: a plurality of connecting members, a carrying member for placing a carried object, and a controller; each of the connecting members includes: fixed subassembly, first coupling assembling, flexible subassembly and second coupling assembling, wherein: the fixing component is arranged on the mounting surface; two ends of the first connecting component are respectively connected with the fixed component and the telescopic component; two ends of the second connecting assembly are respectively connected with the telescopic assembly and the bearing part; the both ends of flexible subassembly respectively with first coupling assembling with second coupling assembling connects, flexible subassembly with controller electric connection for respond to the signal of telecommunication that the controller sent, adjust adapting unit's length. By adopting the device in the embodiment of the disclosure, the labor can be saved, and the operation efficiency can be improved.

Description

Suspension type temporary storage device, horizontal adjusting system and horizontal adjusting method
Technical Field
The present disclosure relates to the field of semiconductor technology, and more particularly, to, but not limited to, a suspension type temporary storage device, a level adjustment system, and a level adjustment method.
Background
An Automated Material Handling System (AMHS) in a semiconductor integrated circuit includes an Overhead Hoist Transport (OHT) that travels along a track on a mounting surface and an Overhead Buffer (OHB) disposed below the mounting surface. The overhead stocker is a storage bay for storing a Front Opening Unified Pod (FOUP), and the overhead crane is used to transport the FOUP to a destination station.
When the suspension type temporary storage device is installed and in the later use process, the horizontal value of the suspension type temporary storage device needs to be adjusted. However, the current method of adjusting the level of the suspension buffer requires manpower, takes a long time and is inefficient.
Disclosure of Invention
The embodiment of the disclosure provides a suspension type temporary storage device, a horizontal adjusting system and a horizontal adjusting method.
In a first aspect, an embodiment of the present disclosure provides a suspension type temporary storage device, including: a plurality of connecting members, a carrying member for placing a carried object, and a controller; each of the connecting members includes: fixed subassembly, first coupling assembling, flexible subassembly and second coupling assembling, wherein: the fixing component is arranged on the mounting surface; two ends of the first connecting component are respectively connected with the fixed component and the telescopic component; two ends of the second connecting assembly are respectively connected with the telescopic assembly and the bearing part; the both ends of flexible subassembly respectively with first coupling assembling with second coupling assembling connects, flexible subassembly with controller electric connection for respond to the signal of telecommunication that the controller sent, adjust adapting unit's length.
In some embodiments, the retraction assembly comprises: a piezoelectric ceramic component.
In some embodiments, the suspension buffer includes 4 connecting members, a surface of the carrying member facing the mounting surface includes 4 regions, the second connecting members of the 4 connecting members are respectively connected with the 4 regions, and a closed quadrilateral formed by the 4 connecting position points is a square.
In a second aspect, an embodiment of the present disclosure provides a leveling system for a suspension-type temporary storage device, including: a verification unit and an over-the-counter device as in any of the above embodiments, wherein: the checking component is arranged on the bearing component and used for measuring the horizontal value of the suspension temporary storage device; the controller is further used for acquiring the level value; determining the expansion amount to be adjusted of the expansion assembly in each connecting part based on the relation between the horizontal value and a preset horizontal reference value; and sending an electric signal to the corresponding telescopic assembly based on the telescopic amount to be adjusted of the telescopic assembly in each connecting part so as to adjust the horizontal value of the suspension type temporary storage device.
In some embodiments, the verification component comprises: a component body; the horizontal measuring unit is arranged in the component body and is used for measuring the horizontal value of the suspension temporary storage device; the load sensing unit is embedded in the surface, facing the bearing part, of the part body and used for detecting whether the part body is placed on the bearing part of the suspension temporary storage device or not; and the storage unit is arranged in the component body, is electrically connected with the horizontal measuring unit and the load sensing unit, and is used for storing the horizontal value measured by the horizontal measuring unit when the load sensing unit detects that the component body is placed on the bearing component.
In some embodiments, the level adjustment system further comprises: the conveying part is used for conveying the checking part to the suspension type temporary storage device; the controller is also used for controlling the carrying part to carry the checking part to the suspension temporary storage device.
In some embodiments, the handling member comprises a drive unit and a control unit, wherein: the control unit is used for sending a conveying instruction to the driving unit and acquiring the level value from the storage unit when the load sensing unit detects that the component body is placed on the bearing component; the driving unit is used for responding to the conveying instruction sent by the control unit and conveying the checking component to the suspension type temporary storage device.
In some embodiments, the level adjustment system further comprises: a receiver and a network switch; the receiver is used for receiving the level value sent by the control unit and transmitting the level value to the network switch; the network switch is used for transmitting the level value transmitted by the receiver to the controller.
In some embodiments, the level adjustment system further comprises: and the power supply assembly is electrically connected with the controller and is used for applying voltage to the telescopic assembly.
In some embodiments, the controller is further configured to send a control signal to the power supply assembly, the control signal configured to control the power supply assembly to apply a voltage to the retraction assembly; the power supply assembly is used for responding to the control signal and applying voltage to the telescopic assembly;
the level adjustment system further comprises: and the gain component is electrically connected with the power supply component and the telescopic component at two ends respectively and is used for amplifying the voltage output by the power supply component to the voltage required by the telescopic component.
In a third aspect, an embodiment of the present disclosure provides a method for adjusting a level of a suspension type temporary storage device, which is implemented by using a level adjustment system of the suspension type temporary storage device in any of the embodiments described above, and the method includes: the following cyclic steps are executed at least once on the suspension type temporary storage device to be adjusted until the level value of the adjusted suspension type temporary storage device is within the range of the preset level reference value: acquiring a measured horizontal value of the suspension type temporary storage device; determining the expansion amount to be adjusted of each expansion assembly in the horizontal adjusting system based on the relation between the horizontal value and the preset horizontal reference value; based on each flexible volume of treating the adjustment of flexible subassembly, send the signal of telecommunication to corresponding flexible subassembly, through adjusting the length of flexible subassembly realizes adjusting suspension type temporary storage device's horizontal value.
In some embodiments, determining the amount of telescoping to be adjusted for each telescoping assembly in the level adjustment system based on the relationship of the level value to the preset level reference value comprises: and determining a target telescopic assembly to be adjusted and a telescopic amount to be adjusted of the target telescopic assembly from a plurality of telescopic assemblies in the level adjustment system based on the relation between the level value and the preset level reference value.
In some embodiments, the method further comprises: acquiring a suspension type temporary storage device queue to be adjusted; and sequentially executing the circulation steps on each suspension type temporary storage device in the suspension type temporary storage device queue to be adjusted until the adjusted horizontal value of the suspension type temporary storage device is within the range of the preset horizontal reference value.
In some embodiments, the method further comprises: determining the queue of the suspension type temporary storage device to be adjusted based on the working state and/or the checking period of the suspension type temporary storage device; wherein the operating state comprises: a normal state and an abnormal state.
In some embodiments, the method further comprises: determining a check path based on the queue of the suspended temporary storage device to be adjusted; and sending a conveying instruction to the conveying part based on the checking path, wherein the conveying instruction is used for controlling the conveying part to convey the checking part to the suspension type temporary storage device according to the checking path.
In some embodiments, the method further comprises: and when the adjusted horizontal value of the suspension type temporary storage device is within the range of the preset horizontal reference value, controlling the carrying component to carry the checking component away from the suspension type temporary storage device.
In the embodiment of the disclosure, the telescopic assembly can respond to the deformation that the electric signal that the controller sent produced the correspondence, consequently can realize the automatically regulated to adapting unit's length to can realize the automatically regulated to suspension type temporary storage device's horizontal value, need not to rely on the manpower to ascend a height to go the adjustment, thereby can use manpower sparingly, improve the operating efficiency.
Drawings
In the drawings, which are not necessarily drawn to scale, like reference numerals may describe similar components in different views. Like reference numerals having different letter suffixes may represent different examples of similar components. The drawings illustrate generally, by way of example, but not by way of limitation, various embodiments discussed herein.
Fig. 1 is a first schematic structural diagram illustrating a suspension type temporary storage device according to an embodiment of the present disclosure;
fig. 2 is a schematic structural diagram of a suspension type temporary storage device according to an embodiment of the present disclosure;
fig. 3 is a schematic structural diagram of a telescopic assembly according to an embodiment of the present disclosure;
FIG. 4 is a schematic diagram illustrating deformation of a telescopic assembly under the action of an electric field according to an embodiment of the present disclosure;
fig. 5 is a third schematic structural diagram illustrating a suspension type temporary storage device according to an embodiment of the present disclosure;
fig. 6 is a first schematic structural diagram illustrating a horizontal adjustment system of a suspension type temporary storage device according to an embodiment of the present disclosure;
fig. 7 is a schematic structural diagram illustrating a checking component in a level adjustment system of a suspension type temporary storage device according to an embodiment of the present disclosure;
fig. 8 is a schematic structural diagram of a horizontal adjustment system of a suspension type temporary storage device according to an embodiment of the present disclosure;
fig. 9 is a third schematic structural diagram illustrating a horizontal adjustment system of a suspension type temporary storage device according to an embodiment of the present disclosure;
fig. 10 is a schematic structural diagram illustrating a horizontal adjustment system of a suspension type temporary storage device according to a fourth embodiment of the present disclosure;
fig. 11 is a schematic structural diagram of a horizontal adjustment system of a suspension type temporary storage device according to a fifth embodiment of the present disclosure;
fig. 12 is a schematic diagram of a composition framework of a leveling system of a suspension type temporary storage device according to an embodiment of the present disclosure;
fig. 13 is a schematic flow chart illustrating an implementation of a horizontal adjustment method for a suspension type temporary storage device according to an embodiment of the present disclosure;
fig. 14 is a schematic flow chart illustrating an implementation of another horizontal adjustment method for a suspension type temporary storage device according to an embodiment of the present disclosure;
fig. 15 is a schematic flow chart illustrating an implementation of a horizontal adjustment method of a suspension type temporary storage device according to another embodiment of the present disclosure.
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the specific embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
In the following description, numerous specific details are set forth in order to provide a more thorough understanding of the present disclosure. It will be apparent, however, to one skilled in the art, that the present disclosure may be practiced without one or more of these specific details. In other instances, well-known features of the art have not been described in order to avoid obscuring the present disclosure; that is, not all features of an actual embodiment are described herein, and well-known functions and structures are not described in detail.
In the drawings, the size of layers, regions, elements, and relative sizes may be exaggerated for clarity. Like reference numerals refer to like elements throughout.
It will be understood that when an element or layer is referred to as being "on" … …, "adjacent to … …," "connected to" or "coupled to" other elements or layers, it can be directly on, adjacent to, connected to or coupled to the other elements or layers or intervening elements or layers may be present. In contrast, when an element is referred to as being "directly on … …," "directly adjacent to … …," "directly connected to" or "directly coupled to" other elements or layers, there are no intervening elements or layers present. It will be understood that, although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present disclosure. And the discussion of a second element, component, region, layer or section does not necessarily imply that the first element, component, region, layer or section is necessarily present in the disclosure.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the disclosure. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. As used herein, the term "and/or" includes any and all combinations of the associated listed items.
After the suspension type temporary storage device is installed in the construction period of a new semiconductor factory, the level value of the suspension type temporary storage device is regulated in a normative manner; after the suspension type temporary storage device which is put into use is used for a long time, the horizontal value is slightly changed, so that errors are reported when the suspension type temporary storage device takes and places the FOUP, and production is influenced. Therefore, the level of the suspended buffer needs to be checked and maintained periodically.
At present, the method for adjusting the level value of the suspension type temporary storage device is usually to ascend by manpower and use a level meter to check and adjust based on the checking result, the level value is generally adjusted by adjusting a nut in the suspension type temporary storage device, and the same position is usually finished by repeated checking and adjusting, which not only wastes manpower but also has low efficiency.
In view of this, the embodiment of the present disclosure provides a suspension type temporary storage device, referring to fig. 1, including: a plurality of connecting members 11, a carrying member 12 for placing a carried object, and a controller 13. Wherein:
each of the connecting members 11 includes: a fixed component 111, a first connecting component 112, a telescopic component 113 and a second connecting component 114. Wherein:
the fixing member 111 is provided on the mounting surface 21.
The first connection member 112 is connected at both ends thereof to the fixed member 111 and the telescopic member 113, respectively.
The second connecting assembly 114 is connected at both ends thereof to the telescopic assembly 113 and the carrier member 12, respectively.
The two ends of the telescopic assembly 113 are respectively connected with the first connecting assembly 112 and the second connecting assembly 114, and the telescopic assembly 113 is electrically connected with the controller 13 and is used for adjusting the length of the connecting part 11 in response to an electric signal sent by the controller 13.
Here, the plurality of connection parts may be three connection parts, four connection parts, or more connection parts. The carried object can be FOUP, level measurement unit or load sensing unit. The mounting surface may be a surface to which the upper end of the fixing member is fixedly connected, and may be a ceiling, for example.
The suspension temporary storage device in the embodiment of the disclosure can be used for bearing a FOUP, and the FOUP can protect wafers from being polluted by dust in the external environment in the process of transferring the wafers between each production machine, so that the yield is improved. If the wafer in the FOUP is not immediately transported to the production machine for the next process, the suspension type temporary storage device can be filled with nitrogen gas to ensure that the environment of the wafer meets the requirement.
In practice, referring to fig. 1, the fixing member 111 is used to fix the connecting member 11 on the mounting surface 21, and when implemented, the fixing member 111 may be a hook, and the lower end of the hook has an opening. The first connection assembly 112 may include a first screw rod 112a, a first nut 112b and a second nut 112c, wherein the upper end of the first screw rod 112a passes through the opening of the suspension buckle, the upper end of the first screw rod 112a and the suspension buckle are fastened together by the first nut 112b and the second nut 112c arranged up and down, and the lower end of the first screw rod 112a is connected with one end of the telescopic assembly 113. The second connection assembly 114 may include a second screw 114a, an upper end of the second screw 114a is connected to the other end of the telescopic assembly 113, and a lower end of the second screw 114a is connected to the carrier 12.
In practice, the telescopic assembly may be fixedly connected, for example, adhered or bolted, to the lower end of the first screw and the upper end of the second screw, respectively.
In some embodiments, referring to fig. 2, the second connection assembly 114 may further include a third nut 114b, a fourth nut 114c, a connection rod 114d, and a hanger rod 114e disposed on the second threaded rod 114 a. The connecting rod 114d is shaped like a 7, the third nut 114b and the fourth nut 114c fasten the upper end of the connecting rod 114d and the second screw rod 114a together, the lower end of the connecting rod 114d is fixedly connected with one end of the hanger rod 114e, and the other end of the hanger rod 114e is connected with the bearing component 12.
In the embodiment of the disclosure, flexible subassembly can respond to the deformation of the electric signal production of controller transmission and correspond dimension from top to bottom, consequently can realize the automatically regulated to adapting unit's length to can realize the automatically regulated to the horizontality of suspension type temporary storage device, need not to rely on the manpower to ascend a height and go the adjustment, thereby can use manpower sparingly, improve the operating efficiency.
The telescoping assembly needs to be able to respond to electrical signals sent by the controller and to deform (strain). The piezoelectric ceramic is a novel displacement material, the inverse piezoelectric effect of the piezoelectric ceramic enables the piezoelectric ceramic to generate strain under the action of an electric field, and the magnitude of the strain and the magnitude of the electric field form a linear relation when the electric field is not very strong. In some embodiments, the retraction assembly 113 comprises: a piezoelectric ceramic component. The electric signal that the controller sent can be used for the size of the voltage of representation application in piezoceramics subassembly both sides, through the size of the voltage of control application in piezoceramics subassembly both sides, just can control piezoceramics subassembly's flexible volume to the realization is to the adjustment of suspension type temporary storage device's horizontal value.
The piezo ceramic assembly may include a plurality of stacked piezo ceramic unit assemblies, a single piezo ceramic unit assembly being illustrated in fig. 3 as an example. Referring to fig. 3, each of the piezoelectric ceramic unit components may include a piezoelectric ceramic plate 1131, a first conductive plate 1132 and a second conductive plate 1133 respectively disposed on the upper and lower surfaces of the piezoelectric ceramic plate 1131, and a power module 31 connected to both ends of the first conductive plate 1132 and the second conductive plate 1133. The piezoelectric ceramic component in the embodiments of the present disclosure may also be referred to as a piezoelectric ceramic stack or a piezoelectric ceramic stack, and a piezoelectric ceramic component composed of a plurality of stacked piezoelectric ceramic unit components may be obtained by analogy: the conductive plates at the two ends are respectively connected with a power supply component 31.
The piezoelectric ceramic component has the advantages of good stability, high response speed, high displacement resolution, high electromechanical conversion efficiency, large driving force and the like; meanwhile, the expansion amount of the piezoelectric ceramic component is continuously and reversibly adjusted, and the lengths of the connecting parts can be the same through one or more times of adjustment. When the piezoelectric ceramic component is implemented, the piezoelectric ceramic component can be made of lead zirconate titanate ceramic or barium titanate ceramic, and the piezoelectric ceramic component made of the two materials has the advantages of wider working frequency, good stability and easiness in batch production.
In practice, referring to fig. 3, the power module 31 is connected to both ends of the first conductive plate 1132 and the second conductive plate 1133, or the power module 31 is connected to both ends of a piezoelectric ceramic module composed of a plurality of stacked piezoelectric ceramic unit modules. A controller for sending a control signal to the power supply module 31, the control signal being used to control the power supply module 31 to apply a voltage to the piezoelectric ceramic module; and a power supply assembly 31 for applying a voltage to the piezoelectric ceramic assembly through the conductive plates at both ends in response to a control signal.
In some embodiments, with continued reference to fig. 3, a switch 32 may also be provided between the power supply assembly 31 and a conductive pad on one end (e.g., the first conductive pad 1132).
And a controller for controlling the switch 32 to be in an open or closed state. The power module 31 can apply an electric field to the piezo ceramic module when the switch 32 is in the open state.
Referring to fig. 4, after the electric field is applied, the piezo-ceramic assembly is deformed along the direction of the electric field to adjust the length of the connecting member.
In some embodiments, with reference to fig. 5, the suspender comprises 4 connecting members 11, the surface of the load-bearing member 12 facing the mounting surface 21 comprises 4 regions a ', B', C 'and D', and the second connecting members 114 of the 4 connecting members 11 are connected to the 4 regions a ', B', C 'and D', respectively. Wherein, a 'and D ″ (B' and C ') are arranged in the X-axis direction, and a' and B ″ (D 'and C') are arranged in the Y-axis direction.
In some embodiments, the closed quadrangle formed by the second connection assemblies of the 4 connection members and the 4 connection position points of the 4 regions a ', B', C ', and D' may be square, for example, may be square or rectangular. Therefore, the stress of the 4 second connecting components is relatively balanced; meanwhile, the bearing objects can be orderly arranged on the surface of the bearing part, and the conveying path of the subsequent conveying part is simpler when the bearing objects are conveyed. In practice, these four regions may be four corner regions of the surface of the load bearing member, or may be non-corner regions. The four regions are four corner regions of the surface of the bearing member, and compared with the four regions which are four non-corner regions of the surface of the bearing member, more space can be reserved for placing the bearing object, and the connecting member does not obstruct the conveying and checking of the conveying member.
In some embodiments, with continued reference to fig. 5, the connection areas of the 4 fixing elements 111 and the mounting surface 21 are A, B, C and D, respectively, and the closed quadrilateral formed by the 4 fixing elements 111 and the 4 connection location points of the four connection areas A, B, C and D may be a square, for example, a square or a rectangle, or other shapes.
The present disclosure provides a horizontal adjustment system of a suspension buffer, referring to fig. 6, including a checking unit 41 and the suspension buffer in any of the embodiments. Wherein:
and the checking part 41 is arranged on the bearing part 12 and is used for measuring the horizontal value of the suspension type temporary storage device. In one embodiment, the verification component 41 also stores the measured level value.
The controller 13 is also used for acquiring a level value; determining the amount of expansion and contraction of the expansion and contraction component 113 in each connecting part 11 to be adjusted based on the relationship between the level value and the preset level reference value; based on the amount of expansion and contraction of the expansion and contraction components 113 to be adjusted in each connection part 11, an electric signal is sent to the corresponding expansion and contraction component 113, and the level value of the suspension type temporary storage device is adjusted.
In implementation, the carrying component 12 may include at least one shelf 121, and the checking component 41 as a carried object may be located in the shelf 121. Although the checking component has a weight, the influence on the level of the suspension type temporary storage device is small and can be ignored, and the influence of the self-weight of the checking component on the level value can also be calibrated by initializing the subsequent setting of the level measurement unit.
In the embodiment of the disclosure, the checking unit may automatically measure the level value of the suspension type temporary storage device and store the measured level value, and the controller may obtain the level value and adjust the length of each connecting unit based on the relationship between the level value and a preset level reference value, so as to adjust the level value of the suspension type temporary storage device. That is, when the level value measured by the checking component is not within the preset level reference value range, the level adjusting system can adjust the level value of the suspension type temporary storage device to be within the preset level reference value range. Therefore, the automatic measurement and check of the horizontal value of the suspension type temporary storage device can be realized at the same time, so that the labor is saved, the working efficiency is improved, the human error can be reduced, and the accuracy of horizontal value adjustment is improved.
It will be appreciated that the calibration unit can always be placed on the suspension buffer to be adjusted, so that the level of the suspension buffer is always measured. In some embodiments, the checking part may only measure but not store the level value and transmit the measured level value to the controller, so the checking part may only include the level measuring unit. In other embodiments, the checking unit may further have a data storage function, and when implemented, may store the level value for a preset number of times, or store the level value in a period, or store the level value for a long time. Therefore, the check section may include a storage unit in addition to the level measurement unit.
In some embodiments, referring to fig. 7, the checking part 41 includes a part body 411, a leveling unit 412, a storage unit 413, and a load sensing unit 414. Wherein:
the level measurement unit 412 is disposed in the component body 411 and is used for measuring a level value of the suspension type temporary storage device.
And a storage unit 413, disposed in the component body 411, and electrically connected to the leveling unit 412 and the load sensing unit 414, for storing a level value measured by the leveling unit 412 when the load sensing unit 414 detects that the component body 411 or the verification component 41 is placed on the load-bearing member.
And a load sensing unit 414 embedded in the surface of the part body 411 facing the bearing member for detecting whether the part body 411 or the check part 41 is placed on the bearing member of the suspension buffer.
In one embodiment, the leveling unit 412 may be disposed on a surface of the component body 411 facing away from the load-bearing component, i.e., an inner bottom surface.
In practice, the load sensing unit 414 may be embedded on the bottom surface of the component body 411, and the load sensing unit 414 is electrically connected to the storage unit 413. After the checking part 41 is carried to the load bearing member, the load sensing unit 414 is triggered due to the influence of the weight of the checking part 41 or the part body 411 itself. When the load sensing unit 414 is triggered, the level value of the suspended register measured by the level measuring unit 412 is stored in the storage unit 413.
In practice, the leveling unit may be a leveling instrument, a level gauge, or the like, which can be used to measure an inclination angle with respect to a horizontal position, flatness and straightness of a guide rail of a machine tool type device, a horizontal position and a vertical position of a device mounting, or the like, and may be various kinds of measuring devices capable of realizing the above-described functions.
The measured horizontal value may be an inclination angle that characterizes a plane in which the load bearing member is located, i.e., a horizontal deviation of the plane in which the load bearing member is located. Wherein, the inclination angle and the telescopic amount of the telescopic assembly to be adjusted meet a preset relationship. Based on the preset relation and the measured inclination angle, the target telescopic assembly can be positioned, and the telescopic amount to be adjusted of the target telescopic assembly is calculated.
In one embodiment, the load cell may be a pressure load cell. The component body can be any cavity capable of accommodating the level measurement unit, the storage unit and the load sensing unit; for example, the part body may be a FOUP in the AMHS, that is, the verification part may be formed after a level measurement unit such as a level gauge, a load sensing unit such as a pressure load sensor, and a memory unit are mounted in the FOUP in the AMHS.
It will be appreciated that the collation assembly may be carried by a handling assembly, such as a crown block or robotic arm, to the staging area to be conditioned. The level value measured by the checking component is not the level value of the suspension buffer device to be adjusted during the transportation process, but the level value of the checking component itself during the transportation process. Therefore, it is necessary to send the level value to the controller after determining that the check component is placed in the scratch pad to be adjusted. The checking unit may therefore also comprise a load-sensing unit for determining whether the checking unit is placed in the suspension buffer to be adjusted. The leveling unit transfers the measured level value to the memory unit only when the load-sensing unit detects that the calibration component is placed on the carrier element of the suspension buffer (to be adjusted), i.e. when the calibration component is transported into the suspension buffer or when there is already a calibration component in the suspension buffer. In this way, the memory unit can be reduced from storing useless data.
In some embodiments, referring to fig. 7 and 8 simultaneously, the leveling system further comprises:
a carrying member 51 for carrying the check member 41 into the suspension buffer;
the controller 13 is further configured to control the conveying unit 51 to convey the verification unit 41 to the ceiling-mounted temporary storage device.
In some embodiments, the controller 13 may send a transport instruction to the transport member 51, the transport instruction being used to control the transport member 51 to transport the collation member 41 into the scratch pad.
In some embodiments, the handling member may be a crown block or a robot arm, and the handling member 51 shown in fig. 8 is a crown block. The controller 13 can directly control the overhead travelling crane to transport the verification component 41 to the suspended temporary storage device. The controller 13 may obtain a level value of the suspension buffer from the storage unit 413, determine a stretching amount to be adjusted of the stretching assembly in each connecting member based on a relationship between the level value and a preset level reference value, send an electrical signal to the corresponding stretching assembly based on the stretching amount to be adjusted of the stretching assembly in each connecting member, and adjust the level value of the suspension buffer. Therefore, the checking component is not required to be arranged in the shed position of the suspension type temporary storage device before the measurement and adjustment of the horizontal value, and the normal use of the suspension type temporary storage device cannot be influenced.
In other embodiments, with continued reference to fig. 8, the handling member 51 may comprise a drive unit 511 and a control unit 512, wherein:
a control unit 512 for sending a carrying instruction to the driving unit 511 and acquiring a level value from the storage unit when the load sensing unit detects that the part body or the check part is placed on the carrier;
the driving unit 511 is configured to convey the check component 41 into the ceiling-mounted buffer in response to the conveying instruction sent by the control unit 512.
It is understood that the handling member may have a control unit independent of the controller, which may send handling instructions to the drive unit. When the carrying member has an independent control unit, the control unit is required to transmit the level value measured by the level measuring unit to the controller so that the controller analyzes the level value. In practice, a receiver and a network switch may be provided between the control unit and the controller. Therefore, the interference to the controller can be reduced, and the running speed of the controller can be improved.
In some embodiments, referring to fig. 9, the level adjustment system further comprises: a receiver 61 and a network switch 71; wherein:
a receiver 61 for receiving the level value sent by the control unit 512 and transmitting the level value to the network switch 71; a network switch 71 for transmitting the level value transmitted by the receiver 61 to the controller 13.
In practice, the receiver may transmit the level value to the network switch by wireless transmission or by wired transmission. The Wireless transmission may be Wireless local area network (WiFi) transmission or bluetooth transmission. When the load sensing unit detects that the checking component is placed on the bearing component after the horizontal measuring unit in the checking component measures the horizontal value of the suspension type temporary storage device, the horizontal value of the suspension type temporary storage device measured by the horizontal measuring unit is stored in the storage unit; the control unit obtains the level value from the storage unit, then the control unit transmits the level value to the receiver, and after the receiver received the level value, the level value is transmitted to the network switch through WiFi or bluetooth, and finally the level value can be transmitted to the controller through WiFi or bluetooth.
In some embodiments, referring to fig. 10, the level adjustment system further comprises: and a power supply unit 31 electrically connected to the controller 13 for applying a voltage to the telescopic unit 113.
In practice, the power supply module may also supply power to various electrical components such as a controller and a control unit so that the controller, the control unit and the electrical components operate normally.
In some embodiments, the level adjustment system may further include a power module for supplying power to the power consuming components to enable the components to operate normally.
In some embodiments, the controller 13 is further configured to send a control signal to the power supply assembly 31, the control signal being configured to control the power supply assembly 31 to apply a voltage to the telescopic assembly 113; a power supply assembly 31 for applying a voltage to the telescopic assembly 113 in response to a control signal.
In practice, there may be a case where the voltage applied by the power supply module does not reach the voltage required by the telescopic module, and therefore the level adjustment system may further include: referring to fig. 11, a gain block 81 is electrically connected to the power supply block 31 and the expansion block, and is used for amplifying the voltage output by the power supply block to the voltage required by the expansion block.
The operation of the level adjustment system of the suspension buffer according to the embodiment of the present disclosure is described with reference to fig. 12. Firstly, an OHB to be checked is determined, the carrying part 51 carries the checking part 41 to the OHB to be checked, and a horizontal measuring unit in the checking part 41 measures a horizontal value; when the load sensing unit 414 detects that the check part is placed on the carrier part in the suspension buffer, the leveling unit stores the measured data in the storage unit. The storage unit sends the level value to the control unit, which in turn is transmitted via the receiver 61, the network switch 71 to the controller 13. The controller 13 determines the amount of expansion and contraction to be adjusted of the piezoelectric ceramic components in each connecting part based on the relationship between the level value and a preset level reference value; a control signal is sent to the corresponding power supply module 31 based on the amount of expansion and contraction of the piezoelectric ceramic module in each connecting module to be adjusted, the power supply module 31 applies a voltage to the corresponding piezoelectric ceramic module in response to the control signal, and the gain module 81 amplifies the voltage output from the power supply module 31 to a voltage required by the piezoelectric ceramic module. After the power supply assembly 31 applies a voltage to the piezo ceramic assembly, the piezo ceramic assembly deforms to adjust the length of each of the connecting members, thereby adjusting the level of the suspension register.
After the level value of the suspension type temporary storage device is adjusted, the actions are repeated until the level value of the suspension type temporary storage device meets a preset level reference value.
In practice, for example, referring to fig. 10, for ease of understanding, 4 connecting members are respectively denoted as 11a, 11b, 11c, and 11d, wherein 11a and 11b (11 c and 11 d) are aligned in the Y-axis direction, and 11b and 11c (11 a and 11 d) are aligned in the X-axis direction. According to the measured horizontal value, the inclination angle of the plane where the bearing part is located can be obtained, whether the plane where the bearing part is located rotates on the X axis or the Y axis or not can be judged, and if the plane where the bearing part is located rotates along the Y axis, the horizontal value can be adjusted by adjusting the stretching and retracting of the (11 a and 11 b) and/or the (11 c and 11 d). If the plane in which the carrier lies is rotated along the X-axis, the level can be adjusted by adjusting the extension and retraction of (11 a and 11 d), and/or (11 c and 11 b). Of course, it is also possible to determine the telescopic assembly in any one of the connecting members as the target telescopic assembly to be adjusted, and then determine the telescopic amount to be adjusted. The above-mentioned adjusting methods can be adjusted accordingly until the level value is within the range of the preset level reference value.
The embodiments of the present disclosure further provide a horizontal adjustment system for a suspension type temporary storage device, including a distance sensing unit and the suspension type temporary storage device in any of the embodiments. Wherein:
the controller is also used for acquiring the length value of each connecting part; determining the expansion amount to be adjusted of the expansion assembly in each connecting part based on the relation between the length value of each connecting part and a preset length reference value; and sending an electric signal to the corresponding telescopic assembly based on the telescopic amount to be adjusted of the telescopic assembly in each connecting part so as to adjust the length of each connecting part in the suspension type temporary storage device, and finally enabling the bearing part in the suspension type temporary storage device to be in a horizontal state.
In practice, the distance sensing unit may be an optical distance sensor, an infrared distance sensor, an ultrasonic distance sensor, or the like.
And the distance sensing unit is arranged on the bearing part and used for measuring the length value of each connecting part. When the suspension type temporary storage device is implemented, the suspension type temporary storage device can comprise 4 connecting components, the surface, facing the mounting surface, of the bearing component comprises 4 areas, the second connecting components in the 4 connecting components are respectively connected with the 4 areas, and a closed quadrangle formed by the 4 connecting position points is square. In this case, the distance sensing unit may be provided at the connection location point.
The operation of the level adjustment system of the suspension buffer in the embodiment of the present disclosure is described below. First, the distance sensing unit measures length values of the first to fourth link parts as a, b, c and d meters (m), respectively, and if the preset length reference value can be a range [ l [ ] 1 -ξ, l 1 +ξ]. Finally connect four to each otherThe length value of the connecting part is adjusted to be within a preset length reference value range. Wherein l 1 Denotes the center value of the range,/ 1 ξ denotes the lower limit of the range,/ 1 + ξ represents the upper limit of the range. For example, [ l 1 -ξ, l 1 +ξ]May be [0.520-0.0005, 0.520+0.0005 ]]I.e. l 1 The value is 0.520, and xi is 0.0005. In this embodiment, the horizontal value can be understood as an index (a, b, c, d) representing the length of the four connecting members.
Secondly, the controller determines the difference Δ between the length value of each link and a preset reference length value 1 、△ 2 、△ 3 And Δ 4 Based on the difference Δ between the length value of each connection part and a predetermined length reference value 1 、△ 2 、△ 3 And Δ 4 Determining the difference corresponding to each connecting part as the expansion amount to be adjusted of the expansion assembly in the corresponding connecting part, i.e. the expansion amount to be adjusted of the expansion assembly in the four connecting parts can be expressed as an array [. DELTA ] 1 , △ 2 , △ 3 , △ 4 ]. And then the controller sends an electric signal to the corresponding telescopic assembly based on the to-be-adjusted telescopic amount of the telescopic assembly in each connecting part so as to adjust the length of each connecting part in the suspension type temporary storage device.
The embodiment of the present disclosure further provides a horizontal adjustment method of a suspension type temporary storage device, where the following cyclic steps are performed at least once on the suspension type temporary storage device to be adjusted until a length value of each connection component in the adjusted suspension type temporary storage device is within a preset length reference value range, that is, until a load-bearing component in the adjusted suspension type temporary storage device is in a horizontal state:
step S11, obtaining the measured length value of each connecting part;
step S12, determining the expansion amount to be adjusted of the expansion component in each connecting part based on the relation between the length value of each connecting part and the preset length reference value;
step S13, sending an electrical signal to the corresponding telescoping assembly based on the telescoping amount to be adjusted of the telescoping assembly in each connecting member, so as to adjust the length of each connecting member in the suspension type temporary storage device.
In practice, for example, referring to fig. 10, for ease of understanding, 4 connecting members are respectively denoted as 11a, 11b, 11c, and 11d, wherein 11a and 11b (11 c and 11 d) are aligned in the Y-axis direction, and 11b and 11c (11 a and 11 d) are aligned in the X-axis direction. When the connecting parts 11a and 11b are longer, but the connecting parts 11c and 11d are shorter, that is, the plane where the bearing part is located rotates along the Y axis, the length value of each connecting part can be adjusted accordingly (i.e., the telescopic assemblies in the connecting parts 11a, 11b, 11d, and 11c are determined as target telescopic assemblies to be adjusted) according to the relationship between the length value of each connecting part and the preset length reference value, until the length value of each connecting part meets the preset length reference value or is within the preset length reference value range; it is also possible to determine the telescopic assembly of the connecting members 11a and 11b as the target telescopic assembly to be adjusted, which is the difference in length between the connecting members 11a and 11b and the connecting members 11d and 11c, respectively, that is, the shorter the length of the connecting members 11a and 11b needs to be adjusted. It is needless to say that the telescopic assemblies in the connecting members 11c and 11d may be determined as target telescopic assemblies to be adjusted, and the length of the connecting members 11c and 11d may be adjusted to be longer, so that the length of each connecting member in the suspension buffer is within the preset length reference value, so that the carrying member in the suspension buffer is in a horizontal state.
Similarly, when the connecting members 11b and 11c are longer and the connecting members 11a and 11d are shorter, that is, the plane on which the bearing member is located rotates along the X-axis, the length of each connecting member may be adjusted accordingly (i.e., the telescopic assemblies in the connecting members 11a, 11b, 11d, and 11c are determined as the target telescopic assemblies to be adjusted) according to the relationship between the length of each connecting member and the preset length reference value, until the length of each connecting member meets the preset length reference value or is within the preset length reference value range; it is also possible to determine the telescopic assembly of the connecting members 11b and 11c as the target telescopic assembly to be adjusted, which is the difference in length between the connecting members 11a and 11d and the connecting members 11b and 11c, respectively, that is, the shorter the length of the connecting members 11b and 11c needs to be adjusted. It is needless to say that the telescopic assemblies in the connecting members 11a and 11d may be determined as target telescopic assemblies to be adjusted, and the length of the connecting members 11a and 11d may be adjusted to be longer, so that the length of each connecting member in the suspension buffer is within the preset length reference value, so that the carrying member in the suspension buffer is in a horizontal state. That is, it is possible to determine the telescopic assembly in any one of the connection members as a target telescopic assembly to be adjusted, and then determine the amount of telescopic adjustment to be made.
Based on the level adjustment system of the suspension type temporary storage device provided in fig. 10 and 11, an embodiment of the present disclosure provides a level adjustment method of the suspension type temporary storage device, which is implemented by using the level adjustment system of the suspension type temporary storage device in any of the embodiments described above, with reference to fig. 13, including: the following cyclic steps are executed at least once on the suspension type temporary storage device to be adjusted until the level value of the adjusted suspension type temporary storage device is within the range of the preset level reference value:
step S301, acquiring a measured horizontal value of the suspension type temporary storage device;
here, the level value is measured by a level cell in the check section.
Step S302, determining the expansion amount to be adjusted of each expansion component in the horizontal adjustment system based on the relation between the horizontal value and a preset horizontal reference value;
step S303, based on the expansion amount to be adjusted of each expansion assembly, sending an electric signal to the corresponding expansion assembly, and adjusting the horizontal value of the suspension type temporary storage device by adjusting the length of the expansion assembly.
It is understood that, when the steps S301 to S303 are performed, the checking parts are already placed on the carrying parts in the suspension buffer in the leveling system, so that the handling parts are not required to handle the checking parts to the suspension buffer.
In the embodiment of the present disclosure, by repeatedly performing steps S301 to S303, the controller may compare the horizontal value with the preset horizontal reference value, determine the expansion amount to be adjusted of each expansion component in the suspension type temporary storage device, and then adjust the length of the expansion component, so that the horizontal value of the suspension type temporary storage device satisfies the preset horizontal reference value. Therefore, not only can closed-loop control be realized, but also human errors can be reduced, and the adjustment accuracy is improved; the problems that the production progress is influenced due to operation error reporting caused by the fact that the horizontal value of the suspension type temporary storage device does not meet the preset horizontal reference value can be solved; in addition, the labor can be saved, and the operation efficiency is improved.
In some embodiments, step S302 may include: and determining a target telescopic assembly to be adjusted and a telescopic amount to be adjusted of the target telescopic assembly from a plurality of telescopic assemblies in the horizontal adjusting system based on the relation between the horizontal value and a preset horizontal reference value. In this manner, the target retraction assembly to be adjusted may be quickly and accurately determined.
In step S303, based on the amount of expansion to be adjusted of each expansion assembly, an electrical signal is sent to the corresponding expansion assembly, and the length of the corresponding connection member is adjusted by adjusting the length of the expansion assembly, thereby adjusting the level value of the suspension type temporary storage device.
In some embodiments, referring to fig. 14, the method of leveling the overhead working buffer further comprises:
in step S304, a queue of the suspended temporary storage device to be adjusted is obtained.
In practice, each of the suspension buffers to be adjusted is arranged in sequence to form a queue of suspension buffers to be adjusted, wherein each suspension buffer to be adjusted in the queue has a position.
In some embodiments, each of the scratch pads may have a logo, which may be a two-dimensional code or a bar code.
In other embodiments, the queue of the suspended temporary storage device to be adjusted can be determined based on the working state and/or the checking period of the suspended temporary storage device; wherein, operating condition includes: a normal state and an abnormal state.
For example, a queue formed by all the suspension registers with abnormal operating states in sequence may be determined as a queue of suspension registers to be adjusted. For another example, a queue formed by some or all of the suspended registers in sequence may be periodically determined as the queue of suspended registers to be adjusted.
For another example, if the queue formed by the partial suspension type temporary storage devices in sequence is periodically determined as the first queue, then the suspension type temporary storage devices with abnormal working states in all the suspension type temporary storage devices are determined, then the suspension type temporary storage devices with abnormal working states are added to the head of the first queue to obtain the second queue, and the second queue is determined as the suspension type temporary storage device queue to be adjusted, so that the suspension type temporary storage devices in abnormal working states can be preferentially adjusted.
In some embodiments, the verification period may be determined based on historical operating conditions of the overhead buffer. It is to be understood that a check period may refer to a particular time or condition setting between two calibrations. The check period in the disclosed embodiments may be one month, three months, half a year, one year, and so forth. In implementation, the checking period may be determined according to the historical operating state of the suspension buffer. For example, if a portion of the scratch pad device frequently fails, the time of the check cycle should be shortened appropriately.
It will be appreciated that the number of verification units may be one or more in the case of adjusting the level of only one of the scratch pads. When all the suspended temporary storage devices of one suspended temporary storage device queue to be adjusted need to be adjusted, the number of the checking units may be multiple, and the number of the checking units in the embodiment of the present disclosure is not limited. When the number of the checking parts is multiple, the level values of multiple shed positions or multiple suspension type temporary storage devices can be measured and adjusted at one time, and therefore time is saved.
Step S305, sequentially performing the above-mentioned loop steps S301 to S303 for each suspension register in the queue of suspension registers to be adjusted until the adjusted level value of the suspension register is within the range of the preset level reference value.
In some embodiments, the method for leveling an overhead register further comprises:
step S306, determining a checking path based on the queue of the suspension type temporary storage device to be adjusted;
here, the check path may be formed by connecting the positions of the suspended buffers to be adjusted in the order of the queue of the suspended buffers to be adjusted. In other words, the check path may be: and sequentially routing the whole process from the first suspension type temporary storage device to be regulated to the last suspension type temporary storage device to be regulated of the queue. For example, there are three suspension buffers to be adjusted, the device identifiers being 1 to 3, in case 1: when the queue of suspended buffers to be adjusted is device 1, device 2 and device 3, the check path is a path formed by connecting devices 1 to 3 in sequence. In case 2: when the queue of suspended buffers to be adjusted is device 3, device 2 and device 1, the check path is a path formed by connecting devices 3, 2 and 1 in sequence.
And step S307, sending a conveying instruction to the conveying part based on the checking path, wherein the conveying instruction is used for controlling the conveying part to convey the checking part to the suspended temporary storage device according to the checking path.
Here, the controller may transmit a transport instruction to the transport unit based on the check path, and control the transport unit to transport the check unit to the overhead stocker according to the check path.
For example, there are 3 scratch pads to be adjusted, and the queue and check path of the scratch pad to be adjusted determined by the controller is case 2. When adjusting the level value, the handling means first carries the checking means to the device 3 based on the checking path; the above loop steps S301 to S303 are executed for the device 3 until the adjusted level value of the device 3 is within the range of the preset level reference value; then, the transportation component transports the checking component to the device 2, and performs the above loop steps S301 to S303 on the device 2 until the adjusted level value of the device 2 is within the range of the preset level reference value; finally, the transport component transports the verification component to the device 1, and performs the above loop steps S301 to S303 on the device 1 until the adjusted level value of the device 1 is within the range of the preset level reference value. Therefore, the level value of each suspension type temporary storage device in the queue can be sequentially adjusted according to the checking path, so that the level value of each suspension type temporary storage device meets the preset level reference value, errors are reduced when the suspension type temporary storage device takes and places the FOUP due to the fact that the level value does not meet the preset level reference value, and production is influenced. In addition, since the queue of the suspended registers to be adjusted is determined first, and then the above-mentioned loop steps S301 to S303 are sequentially performed for each suspended register in the queue, the missing of the calibration can be reduced.
In some embodiments, the aforementioned loop from step S301 to step S303 may be performed simultaneously for the pending buffers in the pending buffer queue to be adjusted until the level value of the pending buffer is within the predetermined range of the horizontal reference value. Therefore, the utilization rate of the checking component can be improved, the adjusting time can be shortened, and the working efficiency is further improved.
It is understood that if the above-mentioned loop from step S301 to step S303 is performed simultaneously on the suspension registers to be adjusted, a calibration unit is required to be disposed on each suspension register. If some suspension type temporary storage devices to be adjusted have no checking component, a checking component can be conveyed into the suspension type temporary storage device by utilizing the conveying component, under the condition, the controller can determine the conveying path of each conveying component according to the position of the idle checking component, the position of the suspension type temporary storage device without the checking component and the position of the conveying component, thus, the adjacent conveying components can be selected as far as possible to convey the idle checking component to the corresponding suspension type temporary storage device, thereby not only reducing the conveying time, but also reducing the influence on each other in the conveying process and improving the operation efficiency.
In some embodiments, the load-bearing member may include at least one bay, and the method of leveling the suspended temporary storage device further includes: the above-mentioned steps S301 to S303 are sequentially performed for each gate position in each suspension type temporary storage device in the queue of suspension type temporary storage devices to be adjusted until the level value of each gate position in the adjusted suspension type temporary storage device is within the range of the preset level reference value. Therefore, the influence of the placement position of the checking component on the horizontal value measurement can be reduced, and the horizontal value of the suspension type temporary storage device can be more accurately adjusted.
In some embodiments, the method for leveling an overhead register further comprises:
step S308, when the load sensing unit detects that the component body is placed on the load-bearing component, the level value of the suspension type temporary storage device measured by the level measuring unit is stored in the storage unit.
In this way, it is possible to reduce the memory unit from storing useless data, such as the level value measured by the level measuring unit during transportation.
In some embodiments, the method for leveling an overhead register further comprises:
in step S309, when the adjusted level value of the suspension type temporary storage device is within the range of the preset level reference value, the handling component is controlled to carry the verification component away from the suspension type temporary storage device.
During implementation, the required transporting component transports the checking component away from the adjusted suspension temporary storage device according to the transporting instruction, and transports the checking component to the next suspension temporary storage device to be adjusted, so as to complete adjustment of the level value of the next suspension temporary storage device to be adjusted.
The present disclosure further provides a horizontal adjustment method for a suspension type temporary storage device, referring to fig. 15, including steps S401 to S408:
step S401, determining a queue of the suspension type temporary storage device to be adjusted based on the working state and/or the checking period of the suspension type temporary storage device;
step S402, determining a checking path based on a suspension type temporary storage device queue to be adjusted;
here, step S401 and step S402 may be implemented with reference to step S304 and step S306, respectively.
Step S403, sending a conveying instruction to the conveying part based on the checking path, wherein the conveying instruction is used for controlling the conveying part to convey the checking part to the suspended temporary storage device according to the checking path;
here, step S403 may be implemented with reference to step 307.
Step S404, when the load sensing unit detects that the component body is placed on the bearing component, storing the level value of the suspension type temporary storage device measured by the level measuring unit in a storage unit;
here, step S404 may be implemented with reference to step S308.
Step S405, obtaining a measured horizontal value of the suspension type temporary storage device;
step S406, determining the expansion amount to be adjusted of each expansion component in the horizontal adjustment system based on the relation between the horizontal value and a preset horizontal reference value;
step S407, based on the expansion amount to be adjusted of each expansion assembly, sending an electric signal to the corresponding expansion assembly, and adjusting the horizontal value of the suspension type temporary storage device by adjusting the length of the expansion assembly;
here, steps S405 to S407 may be implemented with reference to steps S301 to S303.
In step S408, when the adjusted level value of the suspension type temporary storage device is within the range of the preset level reference value, the handling component is controlled to carry the verification component away from the suspension type temporary storage device.
Here, step S408 may be implemented with reference to step 309.
When adjusting one of the queues of the suspended registers to be adjusted, after the steps S401 to S407 are performed, it may be necessary to perform the steps S404 and S407 again or even multiple times until the amount of expansion and contraction to be adjusted of each expansion and contraction component in the horizontal adjustment system is determined to be zero based on the relationship between the horizontal value and the preset horizontal reference value, that is, the horizontal value is within the range of the preset horizontal reference value, and then step S408 is performed. Thereafter, steps S403 to S408 may be performed on the next suspension register in the queue until the level value of each suspension register in the queue is within the predetermined level reference value range.
The horizontal adjusting method of the suspension type temporary storage device in the embodiment of the disclosure can adjust the horizontal value of each suspension type temporary storage device to be adjusted in the queue of the suspension type temporary storage devices to be adjusted to be within the preset reference horizontal value range, so that manual ascending adjustment one by one is not needed, and the operation efficiency is improved; in addition, because the suspension type temporary storage device queue to be adjusted is determined firstly, and then each suspension type temporary storage device in the queue is sequentially subjected to horizontal value adjustment, the condition of missing check can be reduced.
In the several embodiments provided in this disclosure, it should be understood that the disclosed apparatus, system, and method may be implemented in a non-target manner. The above-described device embodiments are merely illustrative, for example, the division of the unit is only a logical functional division, and there may be other division ways in actual implementation, such as: multiple units or components may be combined, or may be integrated into another system, or some features may be omitted, or not implemented. Also, the various elements shown or discussed are coupled indirectly or directly to each other.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, that is, may be located in one place, or may be distributed on a plurality of network units; some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
The features disclosed in the several method, apparatus, or system embodiments provided by the present disclosure may be combined in any combination to yield new method, apparatus, or system embodiments without conflict.
The above description is only a few embodiments of the present disclosure, but the scope of the embodiments of the present disclosure is not limited thereto, and any person skilled in the art can easily conceive of changes or substitutions within the technical scope of the embodiments of the present disclosure, and all the changes or substitutions should be covered by the scope of the embodiments of the present disclosure. Therefore, the protection scope of the embodiments of the present disclosure shall be subject to the protection scope of the claims.

Claims (14)

1. A leveling system for a suspended staging device, the leveling system comprising: the checking component and the suspension type temporary storage device; wherein:
the suspension type temporary storage device comprises: a plurality of connecting members, a carrying member for placing a carried object, and a controller;
each of the connecting members includes: fixed subassembly, first coupling assembling, flexible subassembly and second coupling assembling, wherein: the fixing component is arranged on the mounting surface; two ends of the first connecting component are respectively connected with the fixed component and the telescopic component; two ends of the second connecting assembly are respectively connected with the telescopic assembly and the bearing part; the two ends of the telescopic assembly are respectively connected with the first connecting assembly and the second connecting assembly, and the telescopic assembly is electrically connected with the controller and used for responding to an electric signal sent by the controller and adjusting the length of the connecting component;
the checking component is arranged on the bearing component and used for measuring the horizontal value of the suspension temporary storage device;
the controller is further used for acquiring the level value; determining the expansion amount to be adjusted of the expansion assembly in each connecting part based on the relation between the horizontal value and a preset horizontal reference value; sending an electric signal to a corresponding telescopic assembly based on the telescopic amount to be adjusted of the telescopic assembly in each connecting component so as to adjust the horizontal value of the suspension type temporary storage device;
the checking part includes: a component body; the horizontal measuring unit is arranged in the component body and is used for measuring the horizontal value of the suspension temporary storage device; the load sensing unit is embedded in the surface, facing the bearing part, of the part body and used for detecting whether the part body is placed on the bearing part of the suspension temporary storage device or not; and the storage unit is arranged in the component body, is electrically connected with the horizontal measuring unit and the load sensing unit, and is used for storing the horizontal value measured by the horizontal measuring unit when the load sensing unit detects that the component body is placed on the bearing component.
2. The leveling system of claim 1, wherein the telescoping assembly comprises: a piezoelectric ceramic component.
3. The level adjustment system according to claim 1 or 2, wherein the suspension buffer comprises 4 connecting members, the surface of the carrying member facing the mounting surface comprises 4 areas, the second connecting members of the 4 connecting members are respectively connected with the 4 areas, and the closed quadrangle formed by the 4 connecting position points is a square.
4. The level adjustment system according to claim 1 or 2, further comprising:
the conveying part is used for conveying the checking part to the suspension type temporary storage device;
the controller is also used for controlling the carrying component to carry the checking component to the suspension type temporary storage device.
5. The level adjustment system according to claim 4, wherein the handling member comprises a drive unit and a control unit, wherein:
the control unit is used for sending a carrying instruction to the driving unit and acquiring the level value from the storage unit when the load sensing unit detects that the component body is placed on the bearing component;
the driving unit is used for responding to the conveying instruction sent by the control unit and conveying the checking component to the suspension type temporary storage device.
6. The level adjustment system of claim 5, further comprising: a receiver and a network switch;
the receiver is used for receiving the level value sent by the control unit and transmitting the level value to the network switch;
the network switch is used for transmitting the level value transmitted by the receiver to the controller.
7. The level adjustment system of claim 6, further comprising: and the power supply assembly is electrically connected with the controller and is used for applying voltage to the telescopic assembly.
8. The level adjustment system of claim 7, wherein the controller is further configured to send a control signal to the power supply assembly, the control signal configured to control the power supply assembly to apply a voltage to the retraction assembly;
the power supply assembly is used for responding to the control signal and applying voltage to the telescopic assembly;
the level adjustment system further comprises: and the two ends of the gain component are respectively electrically connected with the power supply component and the telescopic component and are used for amplifying the voltage output by the power supply component to the voltage required by the telescopic component.
9. A leveling method for an over-the-air suspension buffer device, which is implemented by the leveling system of the over-the-air suspension buffer device of claim 7 or 8, the leveling method comprising:
the following cyclic steps are executed at least once on the suspension type temporary storage device to be adjusted until the level value of the adjusted suspension type temporary storage device is within the range of the preset level reference value:
acquiring a measured horizontal value of the suspension type temporary storage device;
determining the expansion amount to be adjusted of each expansion assembly in the horizontal adjusting system based on the relation between the horizontal value and the preset horizontal reference value;
based on each flexible volume of treating the adjustment of flexible subassembly, send the signal of telecommunication to corresponding flexible subassembly, through adjusting the length of flexible subassembly realizes adjusting suspension type temporary storage device's horizontal value.
10. The level adjustment method of claim 9, wherein determining the amount of telescoping to be adjusted for each telescoping assembly in the level adjustment system based on the relationship of the level value to the preset level reference value comprises:
and determining a target telescopic assembly to be adjusted and a telescopic amount to be adjusted of the target telescopic assembly from a plurality of telescopic assemblies in the level adjustment system based on the relation between the level value and the preset level reference value.
11. The level adjustment method according to claim 9 or 10, characterized in that the level adjustment method further comprises:
acquiring a suspension type temporary storage device queue to be adjusted;
and sequentially executing the circulation steps on each suspension type temporary storage device in the suspension type temporary storage device queue to be adjusted until the adjusted horizontal value of the suspension type temporary storage device is within the range of the preset horizontal reference value.
12. The level adjustment method according to claim 11, further comprising:
determining the queue of the suspension type temporary storage device to be adjusted based on the working state and/or the checking period of the suspension type temporary storage device; wherein the operating state comprises: a normal state and an abnormal state.
13. The level adjustment method according to claim 11, further comprising:
determining a check path based on the queue of the suspended temporary storage device to be adjusted;
and sending a conveying instruction to the conveying part based on the checking path, wherein the conveying instruction is used for controlling the conveying part to convey the checking part to the suspension type temporary storage device according to the checking path.
14. The level adjustment method according to claim 13, further comprising:
and when the adjusted horizontal value of the suspension type temporary storage device is within the range of the preset horizontal reference value, controlling the carrying component to carry the checking component away from the suspension type temporary storage device.
CN202210459771.1A 2022-04-28 2022-04-28 Suspension type temporary storage device, horizontal adjusting system and horizontal adjusting method Active CN114582772B (en)

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