CN114582583A - Magnetic control single crystal pulling superconducting magnet device - Google Patents

Magnetic control single crystal pulling superconducting magnet device Download PDF

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Publication number
CN114582583A
CN114582583A CN202111572298.XA CN202111572298A CN114582583A CN 114582583 A CN114582583 A CN 114582583A CN 202111572298 A CN202111572298 A CN 202111572298A CN 114582583 A CN114582583 A CN 114582583A
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CN
China
Prior art keywords
coil
cold
iron yoke
single crystal
superconducting magnet
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Pending
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CN202111572298.XA
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Chinese (zh)
Inventor
刘伟
李超
马鹏
张弛
葛正福
兰贤辉
周涛
李猛
闫果
刘向宏
冯勇
张平祥
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Xi'an Juneng Superconducting Magnet Technology Co ltd
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Xi'an Juneng Superconducting Magnet Technology Co ltd
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Application filed by Xi'an Juneng Superconducting Magnet Technology Co ltd filed Critical Xi'an Juneng Superconducting Magnet Technology Co ltd
Priority to CN202111572298.XA priority Critical patent/CN114582583A/en
Publication of CN114582583A publication Critical patent/CN114582583A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F6/00Superconducting magnets; Superconducting coils
    • H01F6/06Coils, e.g. winding, insulating, terminating or casing arrangements therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F6/00Superconducting magnets; Superconducting coils
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F6/00Superconducting magnets; Superconducting coils
    • H01F6/04Cooling
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Containers, Films, And Cooling For Superconductive Devices (AREA)

Abstract

The invention discloses a magnetic control single crystal pulling superconducting magnet device which comprises a coil framework, a coil and an embedded iron yoke. The coil framework is of a saddle-shaped annular structure, the coil is wound on the coil framework, and one end of the embedded iron yoke is arranged in an inner ring of the coil framework. On the basis of retaining the advantages of high utilization rate of the magnetic field of the saddle-shaped coil, small using amount of the coil and the like under the condition of the same magnetic field intensity requirement, the embedded iron yoke is optimally designed according to the coil structure and embedded into the inner diameter space of the coil, so that the embedded iron yoke generates attraction to the coil, the influence of the generated electromagnetic repulsion force on the coil due to the fact that the currents of the upper horizontal section and the lower horizontal section are opposite after the coil is electrified and excited is relieved, the electromagnetic force of the upper horizontal section and the lower horizontal section of the superconducting coil is greatly reduced, the stress of the coil is more reasonable, and the quench risk caused by overlarge stress of the coil in the operation process is relieved.

Description

Magnetic control single crystal pulling superconducting magnet device
Technical Field
The invention relates to the technical field of semiconductor production equipment, in particular to a magnetic control single crystal pulling superconducting magnet device.
Background
The high-purity monocrystalline silicon is widely applied to industries such as solar cells, integrated circuits, semiconductors and the like, is one of key materials of high and new technology industries such as photovoltaic power generation, electronic information and the like, and has an important strategic position in terms of energy, information and national safety.
Until now, in the field of superconducting magnets for magnetron pulling single crystals, related patents such as CN103106994A and CN110136915A have been filed for protection in recent years. However, most of the prior magnets have problems that the coil of the magnet adopts a circular coil structure with 4 or more coils, and the coil has a complicated structure. Especially 4 coils and above structures, because the magnetic field between coil and coil has the problem of mutual offset, lead to the magnetic field utilization ratio lower, consequently the quantity of superconductive wire is more under the same magnetic field demand, lead to manufacturing cost higher. Meanwhile, CN210535437U and CN210429450U both adopt saddle-shaped coil structures which are distributed in bilateral symmetry, the problems can be well solved, the utilization rate of a magnetic field is obviously improved, and the consumption of superconducting wires is less than 1/2 of the traditional 4 coils under the condition of generating the same central magnetic field, so that the production cost of the magnetic control single crystal pulling superconducting magnet is greatly reduced compared with that of the traditional magnetic control single crystal pulling superconducting magnet.
However, there is a disadvantage in the saddle-shaped coil, since the magnet diameter of the magnetron-pulled single crystal is about 2m, resulting in a length of the upper and lower straight segments of the coil of approximately 2.5 m. Compared with the traditional circular coil, the problem of deformation of the coil structure caused by electromagnetic force during operation is more prominent, so that the risk of quench of the superconducting coil during operation is increased. In conclusion, how to further optimize the stress of the coil on the basis of keeping the high utilization rate of the saddle-shaped coil magnetic field becomes a key problem for improving the operation reliability of the superconducting magnetic single crystal pulling device.
Disclosure of Invention
The embodiment of the invention provides a magnetic control single crystal pulling superconducting magnet device, which is used for solving the problem of quench caused by stress deformation of a saddle-shaped coil in the operation process in the prior art, further reducing the manufacturing cost of the magnetic control single crystal pulling superconducting magnet device, and removing the traditional separately arranged low-temperature vacuum Dewar component by using an embedded iron yoke as a low-temperature vacuum Dewar structure.
In one aspect, an embodiment of the present invention provides a magnetic control single crystal pulling superconducting magnet device, including:
the coil framework is of a saddle-shaped annular structure;
the coil is wound on the coil framework;
and one end of the embedded iron yoke is arranged in an inner ring of the coil framework.
The magnetic control single crystal pulling superconducting magnet device has the following advantages:
1. on the basis of keeping the advantages of high utilization rate of the magnetic field of the saddle-shaped coil, less usage of the coil and the like under the condition of the same magnetic field intensity requirement, the embedded iron yoke is optimally designed according to the coil structure and is embedded into the space of the inner diameter of the coil, so that the embedded iron yoke generates attraction to the coil, the influence of the generated electromagnetic repulsion force on the coil due to the fact that the currents of the upper horizontal section and the lower horizontal section are opposite after the coil is electrified and excited is relieved, the electromagnetic force of the upper horizontal section and the lower horizontal section of the superconducting coil is greatly reduced, the stress of the coil is more reasonable, and the quench risk caused by the overlarge stress of the coil in the operation process is relieved.
2. Because the embedded iron yoke is arranged in the inner diameter space of the coil, the embedded iron yoke plays a role of a magnetic pole gathering head in the coil, the uniformity of a magnetic field obtained in the space area of the magnet device is higher, and the efficiency of producing and preparing the magnetic control pulling single crystal is improved conveniently. Meanwhile, the embedded iron yoke can be used as a low-temperature vacuum Dewar structure, the complexity of additionally designing the vacuum Dewar structure is eliminated, and great help is provided for reducing the cost of the device.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is an external structural schematic diagram of a magnetic control single crystal pulling superconducting magnet device according to an embodiment of the present invention;
fig. 2 is a partial internal structural schematic diagram of a magnetic control single crystal pulling superconducting magnet device according to an embodiment of the present invention;
fig. 3 is a schematic perspective view of a coil and an embedded yoke according to an embodiment of the present invention;
fig. 4 is a schematic position diagram of the coil, the embedded yoke, and the upper magnetic shield yoke top plate and the lower magnetic shield yoke bottom plate according to the embodiment of the present invention;
fig. 5 is a schematic diagram of deformation of a conventional saddle-shaped coil under the action of electromagnetic repulsion force.
Description of reference numerals: the magnetic shielding iron yoke cooling system comprises a magnetic shielding iron yoke upper top plate 1, a Dewar inner cylinder 2, an embedded iron yoke 3, a magnetic shielding iron yoke lower bottom plate 4, a magnetic shielding iron yoke outer cylinder 5, a Dewar convex part 6, a G-M refrigerator 7, a cold shielding cold conducting structure 8, a coil cold conducting structure 9, a cold shielding 10, a coil framework 11, a coil 12, a coil 13, a cold conducting connecting structure and a vacuum interface 14.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Fig. 1-2 are schematic structural diagrams of a magnetic control single crystal pulling superconducting magnet device according to an embodiment of the present invention. The embodiment of the invention provides a magnetic control single crystal pulling superconducting magnet device, which comprises:
the coil framework 11 is of a saddle-shaped annular structure;
the coil 12 is wound on the coil framework 11;
an embedded yoke 3, one end of the embedded yoke 3 is arranged in the inner ring of the coil framework 11.
Exemplarily, the annular structure in the shape of a saddle is formed by bending the annular structure into a shape of a saddle, the annular structure has two horizontal segments with equal length and arranged in parallel, and the ends of the two horizontal segments are connected by semicircular arc segments respectively. The projection of the coil frame 11 on the horizontal plane is arc-shaped, and the outer side surface of the coil frame is provided with a wire slot, and the coil 12 is wound in the wire slot. Since the coil bobbin 11 has a saddle-shaped ring structure, the coil 12 wound thereon has the same shape. The saddle-shaped coil can effectively improve the utilization rate of a magnetic field and has the advantages of less lines for the same magnetic field intensity, low leakage magnetic field and the like.
In the embodiment of the present invention, the embedded iron yoke 3 is also of a ring structure, and one end of the embedded iron yoke 3 has the same shape as the inner ring of the bobbin 11, but the size of the embedded iron yoke is slightly smaller than the size of the inner ring of the bobbin 11, so that a certain distance exists between the embedded iron yoke 3 and the inner ring of the bobbin 11 after the embedded iron yoke is embedded at one end thereof.
As shown in fig. 3, the embedded iron yoke 3 is embedded in the inner ring of the coil frame 11, the coil 12 generates a magnetic field B after being energized, and at this time, the embedded iron yoke 3 serves as a magnetic pole gathering head inside the coil 12, so that the magnetic field obtained in the space region of the magnetic control single crystal pulling superconducting magnet device has higher uniformity, and the efficiency of production and preparation of single crystal silicon is improved.
Meanwhile, as shown in fig. 4, after the coil 12 is energized, the current directions of the upper and lower horizontal segments are opposite, so that a mutual repulsive force F is generated, and the coil 12 has a risk of deformation under the action of the repulsive force F, as shown in fig. 5. The embedded iron yoke 3 can generate vertical downward and vertical upward attraction force F to the upper and lower horizontal sections of the coil 12 under the action of the magnetic field, and the attraction force F has certain offset to the repulsion force F. The embedded iron yoke 3 is optimally designed according to the structure of the coil 12, the distance L1 between the coil 12 and the upper top plate 1 of the magnetic shielding iron yoke and the distance L2 between the coil 12 and the embedded iron yoke 3 are adjusted, so that the embedded iron yoke 3 generates proper attraction force F for the coil 12, and electromagnetic repulsion force F is relieved after the coil 12 is electrified and excited due to the fact that currents of an upper horizontal section and a lower horizontal section are opposite, the electromagnetic repulsion force of the upper horizontal section and the lower horizontal section of the coil 12 is greatly reduced, the stress of the coil 12 is more reasonable, and the quench risk caused by overlarge stress of the coil 12 in the running process is relieved. Moreover, the embedded iron yoke 3 is adopted to relieve the stress of the coil 12, and finally, the supporting structural member related to the coil 12 can be simplified, so that the processing and the production are more convenient, and the final cost is lower.
In a possible embodiment, further comprising: the magnetic shielding iron yoke upper top plate 1 is positioned above the coil framework 11; the magnetic shielding iron yoke lower bottom plate 4 is positioned below the coil framework 11; the Dewar inner barrel 2 is positioned at the inner side of the coil framework 11, and the upper end and the lower end of the Dewar inner barrel 2 are respectively connected with the inner side ends of the upper top plate 1 of the magnetic shielding iron yoke and the lower bottom plate 4 of the magnetic shielding iron yoke; and the magnetic shielding iron yoke outer cylinder 5 is positioned outside the coil framework 11, and the upper end and the lower end of the magnetic shielding iron yoke outer cylinder 5 are respectively connected with the outer ends of the magnetic shielding iron yoke upper top plate 1 and the magnetic shielding iron yoke lower bottom plate 4.
Illustratively, the upper top plate 1 of the magnetic shielding yoke and the lower bottom plate 4 of the magnetic shielding yoke are circular rings with the same size and shape, and the two are arranged oppositely up and down. The Dewar inner barrel 2 is a cylindrical structure, the outer diameter of the Dewar inner barrel is the same as the inner diameter of the magnetic shielding iron yoke upper top plate 1, and the height of the Dewar inner barrel is the same as the distance between the magnetic shielding iron yoke upper top plate 1 and the magnetic shielding iron yoke lower bottom plate 4. The outer cylinder 5 of the magnetic shielding yoke is also cylindrical, and the inner diameter of the outer cylinder is the same as the outer diameter of the upper top plate 1 of the magnetic shielding yoke, and the height of the outer cylinder is the same as the distance between the upper top plate 1 of the magnetic shielding yoke and the lower bottom plate 4 of the magnetic shielding yoke. Therefore, the magnetic shielding yoke upper top plate 1, the magnetic shielding yoke lower bottom plate 4, the dewar inner cylinder 2 and the magnetic shielding yoke outer cylinder 5 are surrounded to form a cylindrical ring structure, and the coil bobbin 11, the coil 12 and the embedded yoke 3 are all located inside the cylindrical ring structure.
In the embodiment of the invention, the side surface of the magnetic shielding iron yoke outer cylinder 5 is provided with an opening which has the same size and shape as the tail end of the embedded iron yoke 3, one end of the embedded iron yoke 3 is embedded into the inner ring of the coil frame 11, the other end of the embedded iron yoke 3 is connected with the opening, and the embedded iron yoke 3 is filled with a metal material inside one end of the embedded coil frame 11 so as to shield the magnetic field inside the cylindrical annular structure. Meanwhile, the upper top plate 1 of the magnetic shielding iron yoke, the lower bottom plate 4 of the magnetic shielding iron yoke and the outer cylinder 5 of the magnetic shielding iron yoke are all made of metal materials so as to shield leakage of a magnetic field. The Dewar inner barrel 2 is made of a magnetic permeable material, so that a magnetic field in the cylindrical annular structure can penetrate out to an axial position. Further, the embedded iron yoke 3 is made of a ferromagnetic metal such as iron, cobalt, nickel, and alloys thereof, so that it can generate an attractive force f to the coil 12.
The invention adopts the embedded iron yoke 3 as the low-temperature vacuum dewar, saves the low-temperature dewar part which needs to be arranged separately in the prior art, further reduces the production cost by reducing the production and manufacturing cost, simultaneously increases the internal space due to the omission of the low-temperature dewar part, facilitates the production operation, and also avoids the risk of contacting the parts due to too close distance.
In a possible embodiment, further comprising: the cold screen 10 is sleeved outside the coil 12 and the coil framework 11; a G-M refrigerator 7; and the cold shield cold guide structure 8 is connected with the refrigeration output end of the G-M refrigerator 7, and the cold shield cold guide structure 8 is also contacted with the cold shield 10 so as to keep the interior of the cold shield 10 in a low-temperature environment.
Illustratively, the G-M refrigerator 7 can generate low temperature after being powered on, and the low temperature is transferred to the cold shield 10 through the cold shield cold-conducting structure 8, so that the coil 12 inside the cold shield 10 is in a low-temperature environment at any time, and the coil 12 operates in a superconducting state.
In the embodiment of the invention, the cold shield cold guide structure 8 comprises a primary cold head and a cold shield cold guide plate, the primary cold head is connected with the refrigeration output end of the G-M refrigerator 7, the cold shield cold guide plate is arranged outside the primary cold head, and the cold shield cold guide plate is in contact with the cold shield 10. The low temperature output by the G-M refrigerator 7 is transmitted to the cold shield cold guide plate through the primary cold head and then transmitted to the cold shield 10 through the cold shield cold guide plate.
In a possible embodiment, further comprising: and the coil cold guide structure 9 is connected with the output end of the cold shield cold guide structure 8, and meanwhile, the coil cold guide structure 9 is also contacted with the coil framework 11 so that the coil framework 11 and the coil 12 are kept at low temperature.
Illustratively, the low temperature of the cold shield cold conduction structure 8 is transferred to the cold shield 10 on the one hand and also transferred to the coil cold conduction structure 9 on the other hand, and the coil cold conduction structure 9 further transfers the low temperature to the coil skeleton 11, so that the ambient temperature of the coil 12 is further reduced, and the coil 12 stably operates in a superconducting state.
In the embodiment of the present invention, the number of the bobbins 11 is two, and the two bobbins 11 are disposed opposite to each other. The device further comprises a cold conducting connecting structure 13, the cold conducting connecting structure 13 is connected between the two coil frameworks 11, and the coil cold conducting structure 9 is in contact with the cold conducting connecting structure 13, so that the two coil frameworks 11 and the coil 12 are in a low-temperature state.
The coil cold conduction structure 9 includes: the second-stage cold head is connected with the output end of the first-stage cold head; and the coil cold guide plate is arranged outside the secondary cold head and is in contact with the coil framework 11. The low temperature output by the first-stage cold head is transmitted to the coil cold conducting plate through the second-stage cold head, and then transmitted to the coil framework 11 through the coil cold conducting plate.
In a possible embodiment, further comprising: dewar convex part 6, Dewar convex part 6 set up on the lateral surface of magnetic shield yoke urceolus 5, and G-M refrigerator 7 sets up on Dewar convex part 6's lateral surface, and cold shield cold conduction structure 8 and coil cold conduction structure 9 all set up inside Dewar convex part 6.
Illustratively, the dewar convex part 6 is a hollow structure of a cubic shape, and it communicates with the inside of the magnetic shield yoke outer cylinder 5. The G-M refrigerator 7 is arranged on the outer top surface of the Dewar convex part 6, and the refrigeration output end of the G-M refrigerator penetrates through the top surface of the Dewar convex part 6 and then is connected with a primary cold head positioned inside the Dewar convex part 6.
In a possible embodiment, further comprising: the vacuum interface 14 is arranged on the outer side surface of the Dewar convex part 6, and the vacuum interface 14 is used for matching with a vacuumizing device to vacuumize the space enclosed by the Dewar convex part 6, the magnetic shielding iron yoke upper top plate 1, the magnetic shielding iron yoke lower bottom plate 4, the Dewar inner cylinder 2 and the magnetic shielding iron yoke outer cylinder 5.
Illustratively, after the space is vacuumized, the heat exchange between the inside and the outside of the space can be reduced, and the low-temperature loss of the G-M refrigerator 7 can be further reduced.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including preferred embodiments and all such alterations and modifications as fall within the scope of the invention.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.

Claims (10)

1. A magnetic control single crystal pulling superconducting magnet device is characterized by comprising:
the coil framework (11), the coil framework (11) is of a saddle-shaped annular structure;
the coil (12), the said coil (12) is wound on the said coil skeleton (11);
the coil frame comprises an embedded iron yoke (3), wherein one end of the embedded iron yoke (3) is arranged in an inner ring of the coil frame (11).
2. A magnetron pulled single crystal superconducting magnet device according to claim 1 wherein the embedded iron yoke (3) is also of annular configuration.
3. A magnetron pulled single crystal superconducting magnet apparatus according to claim 1, further comprising:
the magnetic shielding iron yoke upper top plate (1), wherein the magnetic shielding iron yoke upper top plate (1) is positioned above the coil framework (11);
the magnetic shielding iron yoke lower bottom plate (4) is positioned below the coil framework (11);
the Dewar inner barrel (2) is positioned on the inner side of the coil framework (11), and the upper end and the lower end of the Dewar inner barrel (2) are respectively connected with the inner side ends of the magnetic shielding iron yoke upper top plate (1) and the magnetic shielding iron yoke lower bottom plate (4);
magnetic shield indisputable yoke urceolus (5), magnetic shield indisputable yoke urceolus (5) are located coil skeleton (11) outside, just the upper and lower both ends of magnetic shield indisputable yoke urceolus (5) respectively with the outside end connection of roof (1) and magnetic shield indisputable yoke bottom plate (4) on the magnetic shield indisputable yoke.
4. A magnetron pulled single crystal superconducting magnet apparatus according to claim 3, further comprising:
the cold screen (10), the said cold screen (10) is fitted over the said coil (12) and outside of the said coil skeleton (11);
a G-M refrigerator (7);
the cold screen cold guide structure (8), cold screen cold guide structure (8) with the refrigeration output of G-M refrigerator (7) is connected, simultaneously cold screen cold guide structure (8) also with cold screen (10) contact, so that cold screen (10) inside keeps low temperature environment.
5. A magnetron pulled single crystal superconducting magnet apparatus according to claim 4 further comprising:
coil leads cold structure (9), coil lead cold structure (9) with the output of cold shield leads cold structure (8) is connected, simultaneously coil lead cold structure (9) also with coil skeleton (11) contact, so that coil skeleton (11) and coil (12) keep low temperature.
6. A superconducting magnet device for magnetically controlled pulling of a single crystal according to claim 5, wherein the number of the coil bobbins (11) is two, and the two coil bobbins (11) are oppositely arranged;
further comprising:
lead cold connection structure (13), lead cold connection structure (13) and connect two between coil skeleton (11), coil lead cold structure (9) with lead cold connection structure (13) contact, make two coil skeleton (11) and coil (12) are in the low temperature state.
7. A magnetron pulled single crystal superconducting magnet device according to claim 5 wherein the cold shield cold conducting structure (8) comprises:
the primary cold head is connected with the refrigerating output end of the G-M refrigerating machine (7);
the cold screen is arranged outside the primary cold head, and is in contact with the cold screen (10).
8. A magnetron pulled single crystal superconducting magnet device according to claim 7 wherein the coil cold conducting structure (9) comprises:
the secondary cold head is connected with the output end of the primary cold head;
and the coil cold conducting plate is arranged outside the secondary cold head and is in contact with the coil framework (11).
9. A magnetron pulled single crystal superconducting magnet apparatus according to claim 5 further comprising:
dewar convex part (6), Dewar convex part (6) set up on the lateral surface of magnetic shield yoke urceolus (5), G-M refrigerator (7) set up on the lateral surface of Dewar convex part (6), cold shield cold conduction structure (8) and coil cold conduction structure (9) all set up inside Dewar convex part (6).
10. A magnetron pulled single crystal superconducting magnet apparatus according to claim 9, further comprising:
the vacuum connector (14) is arranged on the outer side face of the Dewar convex part (6), and the vacuum connector (14) is used for being matched with a vacuumizing device to vacuumize the Dewar convex part (6) and the space surrounded by the magnetic shielding iron yoke upper top plate (1), the magnetic shielding iron yoke lower bottom plate (4), the Dewar inner cylinder (2) and the magnetic shielding iron yoke outer cylinder (5).
CN202111572298.XA 2021-12-21 2021-12-21 Magnetic control single crystal pulling superconducting magnet device Pending CN114582583A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111572298.XA CN114582583A (en) 2021-12-21 2021-12-21 Magnetic control single crystal pulling superconducting magnet device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111572298.XA CN114582583A (en) 2021-12-21 2021-12-21 Magnetic control single crystal pulling superconducting magnet device

Publications (1)

Publication Number Publication Date
CN114582583A true CN114582583A (en) 2022-06-03

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115831527A (en) * 2022-11-21 2023-03-21 苏州八匹马超导科技有限公司 Superconducting magnet framework ejector rod mechanism

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115831527A (en) * 2022-11-21 2023-03-21 苏州八匹马超导科技有限公司 Superconducting magnet framework ejector rod mechanism
CN115831527B (en) * 2022-11-21 2023-09-12 苏州八匹马超导科技有限公司 Superconducting magnet skeleton ejector rod mechanism

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