CN114563841A - 一种封装集成一体的温度梯度增敏保偏光纤传感器 - Google Patents
一种封装集成一体的温度梯度增敏保偏光纤传感器 Download PDFInfo
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Abstract
一种封装集成一体的温度梯度增敏保偏光纤传感器,属于基于镀膜保偏光纤的多参量光纤传感器领域。在去掉涂覆层的保偏光纤包层表面通过脉冲激光沉积的方法镀近红外高透过率的ZnSe9:Co1纳米薄膜,使得传输光能量更集中在光纤表面。在ZnSe9:Co1纳米薄膜表面利用热蒸镀的方法镀银纳米薄膜,提高光纤的热膨胀系数。用PDMS填充毛细管封装镀膜保偏光纤,增加传感器整体热膨胀系数,最终实现温度梯度增敏的测量。
Description
技术领域
本发明属于镀膜保偏光纤的多参量光纤传感器领域,具体涉及以保偏光纤(Polarization maintaining fiber,PMF)为传感器件,以ZnSe9:Co1和银作为增敏材料脉冲激光沉积和热蒸镀涂覆在保偏光纤表面,用聚二甲硅氧烷(Polydimethylsiloxane,PDMS)填充毛细管封装镀膜保偏光纤,实现温度梯度增敏的测量。
背景技术
光纤传感器由于其耐腐蚀抗干扰,传输损耗低,瞬时响应和轻便小巧的优势在工业生产和居家生活中发挥着重要的作用。
测量参数的灵敏度调节以适应不同应用场合,解决光纤传感器固有的交叉敏感问题,成为现在光纤传感器研究的热点。表面涂层和封装技术可以很好的满足光纤传感器在此方面的需求。在光纤传感器上进行单层膜的构建在以往的研究中十分普遍,但多层复合膜受制于制备方法不易实现,而且多层膜与光纤传感器之间的失配也往往使效果不尽人意。光纤传感器和膜材料的选取以及镀膜的方法十分重要。保偏光纤由于双折射系数的调制在Sagnac环路中产生典型的周期性尖锐波谷,波谷处能量的损耗恰与外界环境产生很好的相互作用。1550nm是光纤传输损耗最小的通讯波段,将1550nm附近选为信号监测的波段还可以实现远距离的实时监控。
要实现温度梯度增敏测量的光纤传感器需要达到以下要求:光纤波导层的薄膜需要高折射率和高透过率的材料。因为比光纤包层折射率高有利于传输光耦合到薄膜中,而传输波段的高透过率可以保证能量在波导层中尽量少的损耗,从而有更多的传输能量与外界环境发生作用,需要材料的热膨胀系数远远大于光纤本身,利用封装确保光纤传感器件热膨胀系数整体提高,实现温度测量灵敏度的梯度增加。设计思路:1、利用剥线钳和酒精去除PMF涂覆层并清洁表面。2、利用脉冲激光沉积方法在PMF包层表面镀近红外高透过率的ZnSe9:Co1纳米薄膜,使得传输光能量更集中在光纤表面。3、利用热蒸镀的方法在ZnSe9:Co1纳米薄膜表面镀银纳米薄膜,提高光纤的热膨胀系数。4、用PDMS填充毛细管封装镀膜保偏光纤,增加传感器整体的热膨胀系数,构成温度梯度增敏的保偏光纤传感器。
发明内容
本发明目的是发明一种封装集成一体的温度梯度增敏保偏光纤传感器及其制备方法。
一种集成一体的温度梯度光纤传感器,去掉PMF涂覆层,在包层表面通过脉冲激光沉积的方法镀ZnSe9:Co1纳米薄膜,使得传输光能量更集中在光纤表面。在ZnSe9:Co1纳米薄膜表面利用热蒸镀的方法镀银纳米薄膜,提高光纤的热膨胀系数。用PDMS填充毛细管封装镀膜保偏光纤,增加传感器整体热膨胀系数,最终实现温度梯度增敏的测量。
为实现上述目的本发明的一种封装集成一体的温度梯度增敏保偏光纤传感器,其特征在于,在去除涂覆层的PMF(1)上,激光脉冲沉积一层ZnSe9:Co1纳米薄膜(2)、在ZnSe9:Co1纳米薄膜(2)上热蒸镀一层银纳米薄膜(3),得到镀膜光纤,将镀膜光纤穿过毛细管后,在镀膜光纤与毛细管内表面之间填充PDMS(4)实现封装。
所述的去除涂覆层的PMF为:由纤芯半径、包层、应力区构成的熊猫型保偏光纤ZnS。
ZnSe9:Co1纳米薄膜厚度为50-100nm。
银纳米薄膜厚度为100-120nm。
毛细管内径为0.9-1.2mm。
集成一体温度增敏保偏光纤传感器制备方法,其特征在于,包括以下步骤:
(1)PMF涂覆层去除:
PMF的纤芯为2-3μm,包层半径为63-65μm,应力区的半径为16-18μm,用标准口径的剥线钳去除PMF涂覆层。
进一步地,用酒精擦拭3-6次光纤表面,确保光纤表面绝对清洁。
进一步地,选取6-8cm去除涂覆层的PMF两端与单模光纤用熔接机熔接。再对光纤表面用酒精擦拭3-6次确保光纤表面清洁。
(2)ZnSe9:Co1纳米薄膜的制备:
将去除涂覆层的PMF两端固定在镂空基板(铜板)上,放入真空腔中,使其平行于ZnSe9:Co1靶材间距45-50mm放置。
进一步地,采用脉冲激光沉积技术在PMF上镀ZnSe9:Co1薄膜。脉冲激光波长为355-532nm,重复频率为10-30Hz,脉宽为10-30ns,输出功率为400-500mW,经过透镜聚焦在ZnSe9:Co1靶材上。真空腔本底真空度为3-4.5×10-4Pa,沉积时间为30-45分钟。镀膜过程中,靶材自转,确保激光照射靶材均匀,每10-12分钟测量激光功率,根据偏差进行调整。
进一步地,将固定PMF的镂空基底翻面,将最初背向靶材的一面正对靶材,对PMF另一侧进行相同参数的镀膜。
进一步地,用氮气吹镀有ZnSe9:Co1薄膜的PMF表面,去除多余杂质,放入真空干燥腔室内,确保光纤表面清洁。
(3)银纳米薄膜的制备:
将PMF两端固定在镂空基板(铜板)上,放置在热蒸镀仪器真空腔内,与靶材平局距离10-15cm。
进一步地,将真空腔的本底真空度设置为4-6x 10-4Pa。在镀有ZnSe9:Co1薄膜的保偏光纤上镀银膜。
进一步地,将固定PMF的镂空基底翻面,将最初背向靶材的一面正对靶材,对PMF另一侧进行相同参数的镀膜。
进一步地,用氮气吹镀有银薄膜的PMF表面,去除多余杂质,放入真空干燥腔室内,确保光纤表面清洁。
(4)PDMS填充毛细管封装镀膜保偏光纤的制备
将直径0.9-1.2mm的毛细管固定在平移台上,将镀有ZnSe9:Co1和银薄膜的PMF穿过毛细管和软管。
进一步地,将PDMS与对应固化剂按照10:1-10:2的比例混合,搅拌30-45分钟后,立即将两种混合凝胶用注射器以5-6s/cm的速度平稳注入毛细管中。
进一步地,将他们放置在温控箱(恒定温度75℃-85℃)2-3小时,然后将其从温控箱中取出在室温下放置1-2天。
本发明所得温度梯度增敏的保偏光纤传感器,可用于温度灵敏度切换调节,机械温度过热远距离安全的实时监测等方面。
本发明利用激光脉冲沉积和热蒸镀的方法制备了纳米级别的薄膜,具有高折射,高透过率和高热膨胀系数的特点。解决了以往复合膜难以复合,不易制备,多层膜与光纤传感器之间的失配问题,拓展了光纤传感器在多层膜涂覆方面的应用。
本发明采用毛细管填充PDMS对镀膜PMF的封装,提高了传感器整体的热膨胀系数,对于光纤熔接处起到了很好的保护效果,实现了温度梯度增敏的实时实地测量。
附图说明
图1去除涂覆层的PMF实物图.
图2PMF固定在镂空基底镀ZnSe9:Co1薄膜实物图;
图3ZnSe9:Co1薄膜厚度SEM
图4PMF固定在镂空基底镀银薄膜实物图;
图5银薄膜厚度SEM图;
图6PDMS填充毛细管封装示意图;
图7光纤传感器温控箱加热示意图;
图8;温度梯度增敏的保偏光纤传感器实物图;
图9温度梯度增敏的保偏光纤传感器温度测量图;
图10中(a)裸保偏光纤波长漂移随温度变化关系;(b)不同镀膜保偏光纤温度灵敏度结果对比;
图11温度梯度增敏的保偏光纤传感器示意图;
去除涂覆层的保偏光纤(1)、ZnSe9:Co1薄膜(2)、银薄膜(3)、PDMS(4)填充毛细管封装。
具体实施方式
下面结合实施例对本发明作进一步说明,但本发明并不限于以下实施例。
实施例1
制备温度梯度增敏的保偏光纤传感器,其主要包括ZnSe9:Co1薄膜的制备,银薄膜的制备,以及温度灵敏度的测试。
步骤一,PMF涂覆层去除:
PMF的纤芯为2μm,包层半径为63μm,应力区的半径为16μm,用标准口径的剥线钳去除PMF涂覆层。
用酒精擦拭6次光纤表面,确保光纤表面绝对清洁。
选取6cm去除涂覆层的PMF两端与单模光纤用熔接机熔接。再对光纤表面用酒精擦拭6次确保光纤表面清洁。
步骤二,ZnSe9:Co1纳米薄膜的制备:
将去除涂覆层的PMF两端固定在镂空基板(铜板)上,放入真空腔中,使其平行于ZnSe9:Co1靶材间距45mm放置。
采用脉冲激光沉积技术在PMF上镀ZnSe9:Co1薄膜。脉冲激光波长为355nm,重复频率为10Hz,脉宽为10ns,输出功率为400mW,经过透镜聚焦在ZnSe9:Co1靶材上。真空腔本底真空度为4.5×10-4Pa,沉积时间为30分钟。镀膜过程中,靶材自转,确保激光照射靶材均匀,每10分钟测量激光功率,根据偏差进行调整。
将固定PMF的镂空基底翻面,将最初背向靶材的一面正对靶材,对PMF另一侧进行相同参数的镀膜。
用氮气吹镀有ZnSe9:Co1薄膜的PMF表面,去除多余杂质,放入真空干燥腔室内,确保光纤表面清洁。
步骤三,银纳米薄膜的制备:
将PMF两端固定在镂空基板(铜板)上,放置在热蒸镀仪器真空腔内,与靶材平局距离10cm。
将真空腔的本底真空度设置为6x 10-4Pa。在镀有ZnSe9:Co1薄膜的保偏光纤上镀银膜。
将固定PMF的镂空基底翻面,将最初背向靶材的一面正对靶材,对PMF另一侧进行相同参数的镀膜。
用氮气吹镀有银薄膜的PMF表面,去除多余杂质,放入真空干燥腔室内,确保光纤表面清洁。
步骤四,PDMS填充毛细管封装镀膜保偏光纤的制备
将直径1mm的毛细管固定在平移台上,将镀有ZnSe9:Co1和银薄膜的PMF穿过毛细管和软管。
将PDMS与对应固化剂按照10:1的比例混合,搅拌30分钟后,立即将两种混合凝胶用注射器以5s/cm的速度平稳注入毛细管中。
将他们放置在温控箱(恒定温度80℃)2小时,然后将其从温控箱中取出在室温下放置1天。构成封装集成一体的温度梯度增敏保偏光纤传感器。ZnSe9:Co1镀在PMF上和银、ZnSe9:Co1镀在PMF上的温度灵敏度分别为0.71nm/℃和0.91nm/℃.镀膜之后再用PDMS封装的毛细管传感器的温度灵敏度分别为1.49nm/℃.最终传感器在温度灵敏度方面获得了1.04倍,1.34倍和2.19倍的梯度递增。
Claims (5)
1.一种封装集成一体的温度梯度增敏保偏光纤传感器,其特征在于,在去除涂覆层的PMF(1)上,激光脉冲沉积一层ZnSe9:Co1纳米薄膜(2)、在ZnSe9:Co1纳米薄膜(2)上热蒸镀一层银纳米薄膜(3),得到镀膜光纤,将镀膜光纤穿过毛细管后,在镀膜光纤与毛细管内表面之间填充PDMS(4)实现封装。
2.按照权利要求1所述的一种封装集成一体的温度梯度增敏保偏光纤传感器,其特征在于,ZnSe9:Co1薄膜和银薄膜构成紧密贴合的复合结构,具有高折射率和高热膨胀系数;ZnSe9:Co1纳米薄膜厚度为50-100nm;银纳米薄膜厚度为100-120nm。
3.按照权利要求1所述的一种封装集成一体的温度梯度增敏保偏光纤传感器,其特征在于,所述的去除涂覆层的PMF为:由纤芯半径、包层、应力区构成的熊猫型保偏光纤ZnS。
4.按照权利要求1所述的一种封装集成一体的温度梯度增敏保偏光纤传感器,其特征在于,毛细管内径为0.9-1.2mm。
5.按照权利要求1所述的一种封装集成一体的温度梯度增敏保偏光纤传感器的制备方法,其特征在于,包括以下步骤:
(1)PMF涂覆层去除:
PMF的纤芯为2-3μm,包层半径为63-65μm,应力区的半径为16-18μm,用标准口径的剥线钳去除PMF涂覆层;
进一步地,用酒精擦拭3-6次光纤表面,确保光纤表面绝对清洁;
(2)ZnSe9:Co1纳米薄膜的制备:
将去除涂覆层的PMF两端固定在镂空基板上,放入真空腔中,使其平行于ZnSe9:Co1靶材间距45-50mm放置;采用脉冲激光沉积技术在PMF上镀ZnSe9:Co1薄膜。脉冲激光波长为355-532nm,重复频率为10-30Hz,脉宽为10-30ns,输出功率为400-500mW,经过透镜聚焦在ZnSe9:Co1靶材上。真空腔本底真空度为3-4.5×10-4Pa,沉积时间为30-45分钟;镀膜过程中,靶材自转,确保激光照射靶材均匀,每10-12分钟测量激光功率,根据偏差进行调整;
将固定PMF的镂空基底翻面,将最初背向靶材的一面正对靶材,对PMF另一侧进行相同参数的镀膜;
用氮气吹镀有ZnSe9:Co1薄膜的PMF表面,去除多余杂质,放入真空干燥腔室内,确保光纤表面清洁;
(3)银纳米薄膜的制备:
将PMF两端固定在镂空基板(铜板)上,放置在热蒸镀仪器真空腔内,与靶材平局距离10-15cm;将真空腔的本底真空度设置为4-6x10-4Pa。在镀有ZnSe9:Co1薄膜的保偏光纤上镀银膜;
将固定PMF的镂空基底翻面,将最初背向靶材的一面正对靶材,对PMF另一侧进行相同参数的镀膜;
用氮气吹镀有银薄膜的PMF表面,去除多余杂质,放入真空干燥腔室内,确保光纤表面清洁;
(4)PDMS填充毛细管封装镀膜保偏光纤的制备
将直径0.9-1.2mm的毛细管固定在平移台上,将镀有ZnSe9:Co1和银薄膜的PMF穿过毛细管;将PDMS与对应固化剂按照10:1-10:2的比例混合,搅拌30-45分钟后,立即将两种混合凝胶用注射器以5-6s/cm的速度平稳注入毛细管中;
进一步地,放置在恒定温度75℃-85℃温控箱2-3小时,然后将其从温控箱中取出在室温下放置1-2天。
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US20110090484A1 (en) * | 2008-04-23 | 2011-04-21 | Oesterlund Lars | Optical Sensor Unit for Evanescence Wave Spectroscopy |
JP2012068107A (ja) * | 2010-09-22 | 2012-04-05 | Toshiba Corp | 温度補償素子およびそれを用いたサニャック干渉型光電流センサ |
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US20110090484A1 (en) * | 2008-04-23 | 2011-04-21 | Oesterlund Lars | Optical Sensor Unit for Evanescence Wave Spectroscopy |
JP2012068107A (ja) * | 2010-09-22 | 2012-04-05 | Toshiba Corp | 温度補償素子およびそれを用いたサニャック干渉型光電流センサ |
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