CN114562594B - Self-locking starting and closing device for vacuum valve - Google Patents
Self-locking starting and closing device for vacuum valve Download PDFInfo
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- CN114562594B CN114562594B CN202111624458.0A CN202111624458A CN114562594B CN 114562594 B CN114562594 B CN 114562594B CN 202111624458 A CN202111624458 A CN 202111624458A CN 114562594 B CN114562594 B CN 114562594B
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- 230000007246 mechanism Effects 0.000 claims abstract description 15
- 230000005294 ferromagnetic effect Effects 0.000 claims description 6
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 230000009471 action Effects 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 5
- 238000007789 sealing Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 210000003734 kidney Anatomy 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/44—Mechanical actuating means
- F16K31/52—Mechanical actuating means with crank, eccentric, or cam
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sliding Valves (AREA)
Abstract
The invention discloses a self-locking starting and closing device of a vacuum valve, which comprises a frame and a cross rod driven by a driving cylinder, wherein the cross rod is connected with a rotating block, a base, a connecting rod and a valve rod to form a connecting rod mechanism, the valve rod is used for connecting a valve of a vacuum cabin, the driving cylinder drives the connecting rod mechanism to act, the valve rod drives the valve to switch between an opening position and a closing position, and locking force is automatically generated when the valve is closed, so as to resist the reverse acting force of the valve, and prevent the valve from losing vacuum tightness of the vacuum cabin due to factors such as insufficient power of the driving cylinder.
Description
Technical Field
The invention relates to the technical field of vacuum valves, in particular to a self-locking starting and closing device of a vacuum valve, which can drive the valve to open or close and has a self-locking function when the valve is closed.
Background
The wafer or TFT, MOCVD, PECVD, LCD glass substrate is usually processed in a vacuum chamber, the vacuum chamber usually comprises an openable/closable valve, the valve is driven by an opening and closing device, when the valve is opened, a processed object can enter and exit the vacuum chamber from the valve, after the processed object is sent into the vacuum chamber, the valve is closed to enable the vacuum chamber to be in a sealed state, and then air suction is carried out to enable the vacuum chamber to be in a vacuum state. For opening or closing the valve, the prior art generally relies on an air cylinder or an oil cylinder to drive a transmission mechanism, the transmission mechanism drives the valve to open or close, and after the valve is tightly sealed with the vacuum chamber, the air cylinder or the oil cylinder is required to continuously tightly support the valve with air pressure or oil pressure to the vacuum chamber so as to prevent the valve from losing the sealing with the vacuum chamber. However, after the machine is used for a period of time, the abrasion problem is inevitably caused, and particularly, the air pressure or oil pressure of the air cylinder or the oil cylinder is insufficient easily caused by the pipeline problem, so that the valve and the vacuum cabin are out of close fit, and the vacuum state cannot be maintained. On the other hand, the power source is used for driving the transmission mechanism, so that the contradiction between the quick start closing of the valve and the small action range of the closing action required by the valve and the particle generation cannot be solved or needs to be solved at great cost. The Chinese patent document with publication number CN 104612488A discloses a self-locking vacuum cabin door opening and closing device, which mainly comprises a frame, a driving cylinder, a linear slide rail and a valve, wherein the driving cylinder is fixed on the frame, a connecting rod group is arranged between the driving cylinder and the valve, and the driving cylinder pushes the valve horizontally upwards to the vacuum cabin door so as to seal the vacuum cabin door. However, the valve with the structure needs a multi-section connecting rod group structure and a linear sliding rail, so that the structure is complex, the connecting rod group cannot be ensured to be just at a dead point, the structure volume and the cost can be increased, and the risk that the vacuum chamber suddenly loses vacuum tightness exists.
Disclosure of Invention
The invention aims to solve the problems that in the prior art, air pressure or oil pressure is insufficient easily caused by pipeline problems of an air cylinder or an oil cylinder, so that a valve is out of close contact with a vacuum cabin, the vacuum state cannot be maintained, the vacuum cabin opening and closing device in the prior art is complex in structure and high in cost, and the vacuum cabin is likely to lose vacuum tightness suddenly.
The invention adopts a specific technical scheme for realizing the aim that the self-locking starting and closing device of the vacuum valve comprises:
The frame comprises a side seat, two side frames and a side frame, and the side seat, the two side frames and the side frame are enclosed to form a shell of the self-locking starting closing device;
The driving cylinder is arranged on the side seat, a driving shaft is arranged on the driving cylinder, and the extending direction of the driving shaft points to the side frame;
A cross bar fixed to an end of the drive shaft;
The rotary block is integrally triangular, an arc-shaped through groove, a first hinge hole and a second hinge hole are formed in the rotary block, and the first hinge hole and the second hinge hole are respectively positioned at two corners of the triangle; one end of the arc-shaped through groove is positioned at the other corner of the triangle, the other end of the arc-shaped through groove is positioned between the first hinge hole and the second hinge hole, and one end of the cross rod is slidably arranged in the arc-shaped through groove;
the base is arranged on the inner side of the side frame and hinged with the first hinge hole through a hinge shaft;
one end of the connecting rod is hinged with the second hinge hole through a hinge shaft;
The valve rod is hinged with the other end of the connecting rod, the other end of the valve rod is connected with the valve, when the driving shaft stretches, the transverse rod drives the rotating block to rotate around the base, and the rotating block rotates to drive the valve to open or close through the connecting rod and the valve rod; when the valve is closed, the connecting line between the first hinge hole and the second hinge hole is in the same straight line with the axis of the connecting rod and the axis of the valve rod. The reaction force of the valve is transmitted to the frame through the valve rod, the connecting rod, the rotating block and the base in a straight line, so that the valve can be prevented from being automatically opened due to the reaction force of the valve.
The invention adopts the connecting rod transmission mechanism to switch between two positions of valve opening and valve closing, and utilizes the dead center clamping characteristic of the connecting rod mechanism to automatically generate locking force at the valve closing position so as to offset the reaction of the valve and prevent the valve from losing vacuum sealing accidents caused by insufficient power or disappearance and the like. On the other hand, the invention adopts the connecting rod transmission mechanism to switch between two positions of valve opening and valve closing, and utilizes the quick return characteristic of the connecting rod mechanism, the valve is opened in an accelerating way, the valve is closed slowly in a closing way, the requirements of high pneumatic closing speed and small closing action range can be well met, meanwhile, the opening and closing speed can be changed by changing the parameters of the arc-shaped through groove, and the valve can be kept clamped at the dead point of the connecting rod. Therefore, the self-locking vacuum cabin door starting and closing device has the advantages of simple structure, acceleration of opening when the valve is opened, slow closing when the valve is closed, stable self-locking after closing, and effective prevention of accidents that the vacuum cabin loses vacuum tightness due to insufficient power of a driving cylinder and the like.
Preferably, the frame is rectangular structure, both side frames are respectively arranged at two ends of the side seat, the side frames are arranged at the other side of the side frames relative to the side seat, the driving cylinder is arranged on a frame central line between the two side frames, the rotating block, the base, the connecting rod and the valve rod are two, the two sides of the axis of the driving shaft are symmetrically arranged, and the axis of the valve rod is parallel to the axis of the driving shaft. Although the rotary block, the base, the connecting rod and the valve rod are arranged on one side, the opening and closing operation of the valve can be completed, the symmetrical structure has the advantages of balanced stress and more flexible opening and closing of the valve.
Preferably, one side of the side frame, which is close to the frame, is provided with a kidney-shaped hole for fixing the base, one end of the side frame, which is close to the side frame, is provided with an adjusting screw, the front end of the adjusting screw is abutted to the base, and a guide mechanism for limiting the sliding direction of the base is arranged between the side frame and the base. The distance between the base and the frame can be changed movably by matching the adjusting screw with the kidney-shaped hole so as to adapt to different valve sizes and adjust the action stroke of the valve. The guide mechanism is used for limiting the moving direction of the base and avoiding the influence on the normal operation of the system caused by the deviation of the base during the position adjustment.
Preferably, the rotating block is of a flat plate structure, the base is provided with an ear plate, the ear plate is provided with a shaft hole, and the base is hinged with the rotating block through the shaft hole on the ear plate.
Preferably, guide convex strips are arranged on the groove walls on two sides of the arc-shaped through groove, a groove wheel is arranged at the end part of the cross rod, a groove matched with the guide convex strips is arranged on the groove wheel, and the end part of the cross rod is in sliding connection with the arc-shaped through groove through the groove wheel. The guide convex strips are arranged on the groove walls at two sides of the arc-shaped through groove of the rotating block, so that the grooved pulley can be limited, and the grooved pulley is prevented from being blocked in the arc-shaped through groove.
Preferably, the cross rod is perpendicular to the axis of the driving shaft, the cross rod is of an I-shaped structure, the middle part of the cross rod is fixedly connected with the end part of the driving shaft, the two ends of the cross rod are provided with avoidance grooves, and the width of the avoidance grooves is matched with the thickness of the rotating block. The middle part of the cross rod of the I-shaped structure is fixedly connected with the end part of the driving shaft, the avoidance grooves at the two ends of the cross rod are used for avoiding when the rotating block rotates, and part of the rotating block can enter the avoidance grooves to ensure that the rotating block rotates flexibly.
Preferably, the connecting rod is of a double-layer structure and comprises a first connecting rod and a second connecting rod which are arranged in parallel, one ends of the first connecting rod and the second connecting rod are respectively hinged to the upper side and the lower side of the rotating block, the other ends of the first connecting rod and the second connecting rod are respectively hinged to the two sides of the valve rod, a valve rod hole is formed in the side seat, and the valve rod can be slidably arranged in the valve rod hole in a penetrating mode.
Preferably, the rotating block is embedded with a magnet, the magnet is located on the outer side edge between the first hinge hole and the second hinge hole, the base is provided with a ferromagnetic area which is attracted with the magnet, and when the valve is closed, the magnet is close to or abutted against the ferromagnetic area. The connecting line between the first hinge hole and the second hinge hole is in the same straight line with the axis of the connecting rod and the axis of the valve rod, so that the reaction force of the valve can be transmitted to the frame through the valve rod, the connecting rod, the rotating block and the base in a straight line, and the valve is prevented from being opened due to the reaction force of the valve.
Preferably, the frame is of a homogeneous integrated structure, a piston cavity of the driving cylinder is arranged in the side seat, and cover plates are arranged on two sides of the frame. The frame of homogeneous integral structure can improve the structural strength and the machining precision of the frame, and the piston cavity of the driving cylinder is arranged in the side seat, so that the side seat can be fully utilized as the cylinder body of the driving cylinder, thereby reducing the volume and the cost.
Preferably, the valve comprises a door frame, the door frame is connected with the outer side surface of the side seat, a sliding groove parallel to the axial direction of the driving shaft is arranged in the door frame, a valve plate is slidably arranged in the sliding groove, the valve plate is connected with the valve rod, an opening of the valve is arranged in the sliding groove, and when the valve is closed, the valve rod drives the valve plate to seal the opening.
The beneficial effects of the invention are as follows:
1. When the driving cylinder drives the valve to the locking position, the connecting lines of the first hinge hole and the second hinge hole are arranged in a straight line with the connecting rod and the axis of the valve rod, so that the reaction force generated by the valve is transmitted to the frame by the valve rod, the connecting rod, the rotating block and the base in a straight line, the purpose of automatically locking the valve is achieved, and the problem that the driving cylinder needs additional power for locking when the driving cylinder is at the closing position of the valve is solved.
2. The invention can change the opening and closing speed by changing the parameters of the arc through groove, and can keep the valve clamped at the dead point of the connecting rod.
3. An adjusting screw is arranged between the base and the frame, so that the distance between the base and the frame can be changed movably, and the valve is suitable for different valve sizes, and the action stroke is adjusted.
4. The rotary block and the base of the invention strengthen the attractive force of the closing position of the valve through the magnet, thus preventing the connecting rod locking mechanism from automatically separating from the locking state due to vibration and the like, and greatly improving the reliability of the system.
Drawings
FIG. 1 is a schematic perspective view of an actuated closure device of the present invention;
FIG. 2 is a schematic view of the actuator closure device of the present invention in a valve closed position;
FIG. 3 is a partial perspective exploded view of the start closure device of the present invention in a valve closed state;
FIG. 4 is a schematic view of a construction of the rotating block and sheave of the start closure of the present invention;
fig. 5 is a schematic view of a structure of the start-up closing device of the present invention in the valve open state.
In the figure: 10. the hydraulic actuator comprises a frame, 11, a side seat, 12, a side frame, 13, 20, a driving cylinder, 21, a driving shaft, 30, a cross bar, 31, a grooved pulley, 32, a dodge groove, 40, a base, 41, an adjusting screw, 42, a kidney hole, 43, an ear plate, 44, a shaft hole, 50, a rotary block, 51, an arc-shaped through groove, 52, a first hinging hole, 53, a second hinging hole, 54, a guiding convex strip, 60, a connecting rod, 61, a first connecting rod, 62, a second connecting rod, 70, a valve rod, 71, a valve rod hole, 80, a valve, 81, a door frame, 82, a valve plate, 83, a sliding groove and 84.
Detailed Description
The following describes a specific embodiment of the technical scheme of the present invention by way of examples and with reference to the accompanying drawings.
Example 1
In embodiment 1 shown in fig. 1, a vacuum valve self-locking actuation closure device comprises:
The frame 10 is a homogeneous and integrated rectangular structure, and comprises a side seat 11, two side frames 12 and a frame 13, wherein the two side frames are respectively arranged at two ends of the side seat, the frame is arranged at the other side of the side frame relative to the side seat, the two side frames and the frame enclose to form a shell of the self-locking starting and closing device, and cover plates (not shown in the figure) are arranged on two sides of the frame.
The driving cylinder 20 is a cylinder and is arranged on the side seat, a driving shaft 21 is arranged on the driving cylinder, and the extending direction of the driving shaft points to the side frame; the driving cylinder is arranged on the center line of the frame between the two side frames, a piston cavity of the driving cylinder is arranged in the side seat, the side seat is used as a cylinder barrel of the driving cylinder, and the driving shaft is coaxial with the driving cylinder;
The cross rod 30 is perpendicular to the axis of the driving shaft, is fixed at the end part of the extending end of the driving shaft and is fixed through a nut, a grooved wheel 31 is arranged at the end part of the cross rod, the cross rod is of an I-shaped structure, and the middle part of the cross rod is fixedly connected with the end part of the driving shaft;
the rotary block 50 is of a flat plate structure and is integrally triangular, an arc-shaped through groove 51, a first hinge hole 52 and a second hinge hole 53 are formed in the rotary block, and the first hinge hole and the second hinge hole are respectively positioned at two corners of the triangle; one end of the arc-shaped through groove is positioned at the other corner of the triangle, the other end of the arc-shaped through groove is positioned between the first hinge hole and the second hinge hole, and one end of the cross rod is slidably arranged in the arc-shaped through groove; guide convex strips 54 are arranged on the groove walls on two sides of the arc-shaped through groove, grooves (see figure 4) matched with the guide convex strips are arranged on the grooved wheels of the cross rod, and the end parts of the cross rod are in sliding connection with the arc-shaped through groove through the grooved wheels; the two ends of the cross rod are provided with avoidance grooves 32, and the width of the avoidance grooves is matched with the thickness of the rotating block.
A base 40 disposed inside the side frame, the base being hinged to the first hinge hole through a hinge shaft; a kidney-shaped hole 42 for fixing the base is formed in one side, close to the side frame, of the side frame, an adjusting screw 41 (see fig. 2) is arranged at one end, close to the side frame, of the side frame, the front end of the adjusting screw is abutted to the base, and a guide mechanism for limiting the sliding direction of the base is arranged between the side frame and the base; the base is provided with an ear plate 43, the ear plate is provided with a shaft hole 44, and the base is hinged with the rotating block through the shaft hole on the ear plate.
The connecting rod 60, one end of which is hinged with the second hinge hole through a hinge shaft, and the connecting rod of the embodiment is of a double-layer structure and comprises a first connecting rod 61 and a second connecting rod 62 which are arranged in parallel, wherein one ends of the first connecting rod and the second connecting rod are respectively hinged on the upper side and the lower side of the rotating block; the other ends of the first connecting rod and the second connecting rod are respectively hinged to two sides of the valve rod;
And one end of the valve rod 70 is hinged with the other end of the connecting rod, the other end of the valve rod is connected with the valve 80, a valve rod hole 71 is formed in the side seat, and the valve rod is slidably arranged in the valve rod hole in a penetrating mode. When the driving shaft stretches out and draws back, the cross rod drives the rotating block to rotate around the base, and the rotating block rotates to drive the valve to open or close through the connecting rod and the valve rod; when the valve is closed, the connecting line between the first hinge hole and the second hinge hole is on the same straight line with the axis of the connecting rod and the axis of the valve rod (see figure 3).
The valve includes door frame 81 (see fig. 5), the lateral surface of door frame and side seat is connected, is equipped with the sliding tray 83 that is on a parallel with drive shaft axis direction in the door frame, is equipped with valve plate 82 in the sliding tray slidable, the valve plate be connected with the valve rod, the opening 84 setting of valve is in the sliding tray, when the valve is closed, the valve rod drives the valve plate and seals the opening.
The rotating block, the base, the connecting rod and the valve rod of the embodiment are two, the two sides of the axis of the driving shaft are symmetrically arranged, and the axis of the valve rod is parallel to the axis of the driving shaft.
Example 2
The rotating block of embodiment 2 is embedded with a magnet, the magnet is located on the outer side edge between the first hinge hole and the second hinge hole, the base is provided with a ferromagnetic area which attracts the magnet mutually, when the valve is closed, (the base of the embodiment is made of steel), the magnet is close to or abutted against the ferromagnetic area to generate an adsorption force so as to avoid loosening of the locking mechanism under working conditions such as vibration, and the rest is the same as embodiment 1.
The starting and closing device disclosed by the invention has the working process that when the valve is opened, the driving shaft of the driving cylinder extends out along the frame direction, the rotary block is driven to rotate around the base to one side of the frame by the cross rod, the rotary block rotates to pull the connecting rod to move to one side of the frame, meanwhile, the connecting rod drives the valve rod to move to one side of the frame and drives the valve plate to move to one side of the side seat in the sliding groove, so that the valve plate is separated from the opening of the valve, and the valve is in an opened state (see figure 5).
On the contrary, when the valve is closed, the driving shaft of the driving cylinder is retracted in the side seat direction (see fig. 1), the cross rod drives the rotating block to rotate around the base towards one side of the side seat, the rotating block rotates to push the connecting rod to move towards one side of the side seat, meanwhile, the connecting rod pushes the valve rod to move towards one side of the side seat and drives the valve plate to move towards one side far away from the side seat in the sliding groove, and then the valve plate covers the opening of the valve, and the valve is in a closed state. When the valve is in a closed state, the connecting line between the first hinge hole and the second hinge hole is in the same straight line with the axis of the connecting rod and the axis of the valve rod, and the reaction force of the valve is transmitted to the frame through the valve rod, the connecting rod, the rotating block and the base in a straight line, so that the valve can be prevented from being automatically opened due to the reaction force of the valve, and the unexpected occurrence that the vacuum chamber loses vacuum tightness due to the factors of insufficient power of the driving cylinder and the like is prevented.
In addition to the above embodiments, the technical features or technical data of the present invention may be rearranged and combined within the scope of the claims and the description of the present invention to constitute new embodiments, which may be implemented without inventive effort by those skilled in the art, and thus, embodiments of the present invention not described in detail should be considered as embodiments of the present invention within the scope of the protection of the present invention.
Claims (9)
1. A self-locking starting and closing device of a vacuum valve is characterized by comprising:
the self-locking starting closing device comprises a frame (10), wherein the frame comprises a side seat (11), two side frames (12) and a frame (13), and the side seat, the two side frames and the frame are enclosed to form a shell of the self-locking starting closing device;
The driving cylinder (20) is arranged on the side seat, a driving shaft (21) is arranged on the driving cylinder, and the extending direction of the driving shaft points to the side frame;
A cross bar (30) fixed at an end of the drive shaft;
The rotary block (50) is integrally triangular, an arc-shaped through groove (51), a first hinge hole (52) and a second hinge hole (53) are formed in the rotary block, and the first hinge hole and the second hinge hole are respectively positioned at two corners of the triangle; one end of the arc-shaped through groove is positioned at the other corner of the triangle, the other end of the arc-shaped through groove is positioned between the first hinge hole and the second hinge hole, and one end of the cross rod is slidably arranged in the arc-shaped through groove; guide convex strips (54) are arranged on the groove walls at two sides of the arc-shaped through groove, a groove wheel (31) is arranged at the end part of the cross rod, a groove matched with the guide convex strips is arranged on the groove wheel, and the end part of the cross rod is in sliding connection with the arc-shaped through groove through the groove wheel;
A base (40) which is arranged on the inner side of the side frame and is hinged with the first hinge hole through a hinge shaft;
a link (60) having one end hinged to the second hinge hole through a hinge shaft; and
The valve rod (70) is hinged with the other end of the connecting rod, the other end of the valve rod is connected with the valve (80), and when the driving shaft stretches, the transverse rod drives the rotating block to rotate around the base, and the rotating block rotates to drive the valve to open or close through the connecting rod and the valve rod; when the valve is closed, the connecting line between the first hinge hole and the second hinge hole is in the same straight line with the axis of the connecting rod and the axis of the valve rod.
2. The vacuum valve self-locking starting and closing device according to claim 1, wherein the frame is of a rectangular structure, the two side frames are respectively arranged at two ends of the side seat, the side frames are positioned at the other sides of the side frames relative to the side seat, the driving cylinder is arranged on a frame central line between the two side frames, the rotating block, the base, the connecting rod and the valve rod are two, two symmetrical parts are arranged on two sides of the axis of the driving shaft, and the axis of the valve rod is parallel to the axis of the driving shaft.
3. The self-locking starting and closing device of the vacuum valve according to claim 1, wherein a waist-shaped hole (42) for fixing a base is formed on one side, close to the side frame, of the side frame, an adjusting screw (41) is arranged at one end, close to the side frame, of the side frame, the front end of the adjusting screw is abutted to the base, and a guide mechanism for limiting the sliding direction of the base is arranged between the side frame and the base.
4. The self-locking starting and closing device of the vacuum valve according to claim 1, wherein the rotating block is of a flat plate structure, an ear plate (43) is arranged on the base, a shaft hole (44) is arranged on the ear plate, and the base is hinged with the rotating block through the shaft hole on the ear plate.
5. The vacuum valve self-locking starting and closing device according to claim 1, wherein the cross rod is perpendicular to the axis of the driving shaft, the cross rod is of an I-shaped structure, the middle part of the cross rod is fixedly connected with the end part of the driving shaft, the two ends of the cross rod are provided with avoidance grooves (32), and the width of the avoidance grooves is matched with the thickness of the rotating block.
6. The self-locking starting and closing device of the vacuum valve according to claim 1, wherein the connecting rod is of a double-layer structure and comprises a first connecting rod (61) and a second connecting rod (62) which are arranged in parallel, one ends of the first connecting rod and the second connecting rod are respectively hinged to the upper side and the lower side of the rotating block, the other ends of the first connecting rod and the second connecting rod are respectively hinged to the two sides of the valve rod, a valve rod hole (71) is formed in a side seat, and the valve rod is slidably arranged in the valve rod hole in a penetrating mode.
7. The self-locking start-up closing device of claim 1, wherein a magnet is embedded in the rotating block, the magnet is located on the outer side edge between the first hinge hole and the second hinge hole, a ferromagnetic area which is attracted with the magnet is formed on the base, and the magnet is close to or abutted against the ferromagnetic area when the valve is closed.
8. The self-locking starting and closing device of a vacuum valve according to claim 1, wherein the frame is of a homogeneous integrated structure, a piston cavity of the driving cylinder is arranged in the side seat, and cover plates are arranged on two sides of the frame.
9. The self-locking start-up closing apparatus of vacuum valve according to any one of claims 1-8, characterized in that the valve comprises a door frame (81), the door frame is connected with the outer side surface of the side seat, a sliding groove (83) parallel to the axis direction of the driving shaft is arranged in the door frame, a valve plate (82) is slidably arranged in the sliding groove, the valve plate is connected with a valve rod, an opening (84) of the valve is arranged in the sliding groove, and when the valve is closed, the valve rod drives the valve plate to close the opening.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111624458.0A CN114562594B (en) | 2021-12-28 | 2021-12-28 | Self-locking starting and closing device for vacuum valve |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111624458.0A CN114562594B (en) | 2021-12-28 | 2021-12-28 | Self-locking starting and closing device for vacuum valve |
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| CN114562594A CN114562594A (en) | 2022-05-31 |
| CN114562594B true CN114562594B (en) | 2024-06-04 |
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| CN202111624458.0A Active CN114562594B (en) | 2021-12-28 | 2021-12-28 | Self-locking starting and closing device for vacuum valve |
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| EP2878870A1 (en) * | 2013-11-29 | 2015-06-03 | King Lai Hygienic Materials Co., Ltd. | Self-lockable opening and closing mechanism for vacuum cabin door |
| CN204805692U (en) * | 2015-06-17 | 2015-11-25 | 川北真空科技(北京)有限公司 | Valve auto -lock structure |
| CN207660434U (en) * | 2017-12-13 | 2018-07-27 | 中船重工中南装备有限责任公司 | A kind of hatch door headstock gear and the hatch door with the headstock gear |
| CN212177915U (en) * | 2020-03-17 | 2020-12-18 | 常州捷佳创精密机械有限公司 | Valve assembly and vacuum pumping device |
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2021
- 2021-12-28 CN CN202111624458.0A patent/CN114562594B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4065097A (en) * | 1976-05-17 | 1977-12-27 | Airco, Inc. | Slot sealing valve for vacuum coating apparatus |
| EP2878870A1 (en) * | 2013-11-29 | 2015-06-03 | King Lai Hygienic Materials Co., Ltd. | Self-lockable opening and closing mechanism for vacuum cabin door |
| CN204805692U (en) * | 2015-06-17 | 2015-11-25 | 川北真空科技(北京)有限公司 | Valve auto -lock structure |
| CN207660434U (en) * | 2017-12-13 | 2018-07-27 | 中船重工中南装备有限责任公司 | A kind of hatch door headstock gear and the hatch door with the headstock gear |
| CN212177915U (en) * | 2020-03-17 | 2020-12-18 | 常州捷佳创精密机械有限公司 | Valve assembly and vacuum pumping device |
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| CN114562594A (en) | 2022-05-31 |
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