CN114561690A - Feeding assembly, single crystal growing device with same and feeding method - Google Patents

Feeding assembly, single crystal growing device with same and feeding method Download PDF

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Publication number
CN114561690A
CN114561690A CN202210348157.8A CN202210348157A CN114561690A CN 114561690 A CN114561690 A CN 114561690A CN 202210348157 A CN202210348157 A CN 202210348157A CN 114561690 A CN114561690 A CN 114561690A
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China
Prior art keywords
opening
cover
raw material
channel
single crystal
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CN202210348157.8A
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Chinese (zh)
Inventor
陈俊宏
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Zhonghuan Leading Xuzhou Semiconductor Materials Co ltd
Zhonghuan Advanced Semiconductor Materials Co Ltd
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Xuzhou Xinjing Semiconductor Technology Co Ltd
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Application filed by Xuzhou Xinjing Semiconductor Technology Co Ltd filed Critical Xuzhou Xinjing Semiconductor Technology Co Ltd
Priority to CN202210348157.8A priority Critical patent/CN114561690A/en
Publication of CN114561690A publication Critical patent/CN114561690A/en
Priority to TW112102110A priority patent/TW202325905A/en
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The invention discloses a feeding assembly, a single crystal growing device with the same and a feeding method, wherein the feeding assembly is suitable for supplementing raw materials into a crucible of the single crystal growing device and comprises: the inner cylinder, the urceolus, first switching mechanism and second switching mechanism, form first passageway in the inner cylinder, the inner cylinder forms the first opening with first passageway intercommunication towards the one end of crucible, raw materials in the first passageway is suitable for and falls into the crucible through first opening, the urceolus cover is established at the periphery side of inner cylinder, inject second passageway and towards the crucible and with the second opening of second passageway intercommunication between inner cylinder and the urceolus, raw materials in the second passageway are suitable for and fall into the crucible through the second opening, first switching mechanism is suitable for to open or close first opening, second switching mechanism is suitable for to open or close the second opening. According to the feeding assembly disclosed by the invention, the amount of raw materials put into the crucible at a time can be well controlled, so that the splashing of molten soup and the fluctuation of the liquid level of the molten soup in the feeding process can be well reduced.

Description

Feeding assembly, single crystal growth device with same and feeding method
Technical Field
The invention relates to the technical field of crystal growth, in particular to a feeding assembly, a single crystal growth device with the feeding assembly and a feeding method.
Background
In the czochralski single crystal manufacturing method, a seed crystal is immersed in a raw material melt of silicon stored in a crucible in a chamber maintained in an inert gas atmosphere under reduced pressure, and the immersed seed crystal is slowly pulled up, whereby single crystal silicon is grown below the seed crystal. Among them, in the process of single crystal growth, since polycrystalline raw materials required for producing a boule of a predetermined size cannot be accurately estimated, and at the same time, in order to prevent waste of raw materials, it is necessary to supplement polycrystalline raw materials into a crucible. However, in the charging process of the related technology, the liquid level of the molten liquid is easy to generate large fluctuation, so that the growth quality of the single crystal is influenced, the molten liquid is splashed, the waste of raw materials is caused, and the stability of the single crystal furnace is influenced.
Disclosure of Invention
The invention provides a feeding assembly which can better control the amount of raw materials put into a crucible at a time and has the advantages of reducing molten soup splashing and liquid level fluctuation caused in the feeding process.
The invention also provides a single crystal growing device with the feeding assembly.
The invention also provides a feeding method for the single crystal growing device.
A feed assembly according to an embodiment of the present invention is adapted to replenish a crucible of the single crystal growing apparatus with feedstock, the feed assembly comprising: the inner cylinder is internally provided with a first channel, one end of the inner cylinder facing the crucible is provided with a first opening communicated with the first channel, and the raw material in the first channel is suitable for falling into the crucible through the first opening; the outer barrel is sleeved on the outer peripheral side of the inner barrel, a second channel and a second opening facing the crucible and communicated with the second channel are defined between the inner barrel and the outer barrel, and raw materials in the second channel are suitable for falling into the crucible through the second opening; a first switching mechanism adapted to open or close the first opening; a second switch mechanism adapted to open or close the second opening.
According to the feeding assembly provided by the embodiment of the invention, the feeding of the raw material in the first channel is controlled by opening or closing the first opening of the first switch mechanism, the feeding of the raw material in the second channel is controlled by opening or closing the second opening of the second switch mechanism, and the amount of the raw material fed into the crucible in a single time can be better controlled, so that molten soup splashing and liquid level fluctuation caused in the feeding process can be reduced, further, the waste and interference of the raw material caused by the molten soup splashing to other parts can be prevented, and the reliability of a single crystal growth device can be improved. In addition, the fluctuation range of the liquid level of the molten liquid is small in the feeding process, and the liquid level of the molten liquid can be quickly restored to a relatively quiet state, so that the influence of the fluctuation of the liquid level of the molten liquid on the growth of the single crystal is reduced.
According to some embodiments of the invention, the first switching mechanism comprises: the first cover body is movably arranged on one side of the inner cylinder close to the first opening; the first driving piece is suitable for driving the first cover body to be far away from or close to the inner barrel so as to open or close the first opening.
According to some embodiments of the invention, the first cover comprises: the main body part is provided with a plurality of embedded grooves which are arranged at intervals along the circumferential direction; the embedding portion, the embedding portion with the same and the one-to-one of quantity of embedding recess, the embedding portion movably is located between extended position and withdrawal position in the embedding recess extended position on the circumferential direction of inner tube, adjacent two the part of embedding portion overlaps.
According to some embodiments of the invention, the embedding groove comprises: a first insertion groove and a second insertion groove that are layered in an axial direction of the main body portion, the insertion portion including: a plurality of first embedding parts and a plurality of second embedding parts, wherein the first embedding parts are movably arranged in the first embedding grooves between an extending position and a retracting position, the second embedding parts are movably arranged in the second embedding grooves between the extending position and the retracting position, the first embedding grooves are arranged in a plurality of circumferential directions of the main body part, the second embedding grooves are arranged in a plurality of circumferential directions of the main body part, in addition, the plurality of second embedding grooves and the plurality of first embedding grooves are arranged in a staggered manner in the circumferential directions of the main body part, the plurality of first embedding parts are arranged in a one-to-one correspondence manner, the plurality of first embedding parts and the plurality of first embedding grooves are arranged in a one-to-one correspondence manner, the plurality of second embedding parts are arranged in a one-to-one correspondence manner, and when the first embedding parts and the second embedding parts are both in the extending position, the first and second embedded portions adjacent to each other partially overlap in a circumferential direction of the inner tube.
According to some embodiments of the invention, the second switching mechanism comprises: the second cover body is arranged on one side of the outer cylinder close to the second opening; a second driving member adapted to drive one of the second cover and the outer cylinder to move relative to the other to open or close the second opening.
According to some embodiments of the present invention, the first cover and the second cover each extend obliquely downward in a direction toward a radially outer side of the inner cylinder.
According to some embodiments of the invention, the angle of inclination of the first cover with respect to the horizontal is the same as the angle of inclination of the second cover with respect to the horizontal.
According to some embodiments of the present invention, the outer peripheral edge of the first cover body is flush with the outer peripheral edge of the second cover body in the radial direction of the inner cylinder.
According to some embodiments of the invention, the angle of inclination of the first cover with respect to the horizontal is smaller than the angle of inclination of the second cover with respect to the horizontal.
According to some embodiments of the invention, the charging assembly further comprises: a plurality of agitation bars disposed within the first channel and the second channel, the agitation bars adapted to agitate the material within the first channel and the second channel; the extension direction of the stirring rod is vertical to the axis of the inner cylinder or the stirring rod extends downwards in an inclined mode; and/or a plurality of stirring rods are arranged at intervals along the vertical direction, in the axial direction of the inner cylinder, the distance between the lower edge of the stirring rod positioned at the lowest side and the top wall of the inner cylinder is a, the axial size of the inner cylinder is b, and the requirements are met: a/b is less than 0.5.
A single crystal growing apparatus according to an embodiment of the present invention includes: the feeding assembly.
According to the single crystal growing device provided by the embodiment of the invention, the raw material put into the first channel is controlled by opening or closing the first opening through the first switch mechanism, the raw material put into the second channel is controlled by opening or closing the second opening through the second switch mechanism, the amount of the raw material put into the crucible at a time can be well controlled, so that molten soup splashing and liquid level fluctuation caused in the feeding process can be reduced, the waste and interference of the raw material caused by the molten soup splashing to other components can be prevented, and the reliability of the single crystal growing device can be improved. In addition, the fluctuation range of the liquid level of the molten liquid is small in the feeding process, and the liquid level of the molten liquid can be quickly restored to a relatively quiet state, so that the influence of the fluctuation of the liquid level of the molten liquid on the growth of the single crystal is reduced.
According to the charging method for the single crystal growing apparatus of the embodiment of the present invention, the charging method includes: adding feedstock into the first and second channels; and controlling the first switch mechanism to open the first opening to throw the raw material in the first channel into the crucible, and then controlling the second switch mechanism to open the second opening to throw the raw material in the second channel into the crucible.
According to the feeding method for the single crystal growth device, the amount of the raw materials fed into the crucible at a time can be well controlled, so that molten soup splashing and liquid level fluctuation caused in the feeding process can be reduced, waste and interference of the raw materials caused by the fact that the molten soup splashes to other parts can be prevented, and the reliability of the single crystal growth device is improved. In addition, the fluctuation range of the liquid level of the molten liquid is small in the feeding process, and the liquid level of the molten liquid can be quickly restored to a relatively quiet state, so that the influence of the fluctuation of the liquid level of the molten liquid on the growth of the single crystal is reduced.
According to some embodiments of the present invention, the first opening and closing mechanism includes a first cover and a first driving element provided on a side of the inner cylinder adjacent to the first opening, the second opening and closing mechanism includes a second cover and a second driving element provided on a side of the outer cylinder adjacent to the second opening and located radially outside the first opening, the first cover and the second cover each extend obliquely downward in a direction toward radially outside the inner cylinder, an outer peripheral edge of the first cover is flush with an outer peripheral edge of the second cover, and the raw material is added into the first channel and the second channel, including: adding a first type of raw material into the first channel, and adding a second type of raw material into the second channel, wherein the diameter of the first type of raw material is smaller than that of the second type of raw material.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
FIG. 1 is a schematic view of a charging assembly according to a first embodiment of the present invention with both the first and second openings closed;
FIG. 2 is a schematic view of the charging assembly opening a first opening and closing a second opening in accordance with a first embodiment of the present invention;
FIG. 3 is a schematic view of the charging assembly according to the first embodiment of the present invention with both the first opening and the second opening open;
FIG. 4 is a schematic view of the charging assembly according to the second embodiment of the present invention with both the first opening and the second opening closed;
FIG. 5 is a schematic view of the charging assembly according to the second embodiment of the present invention with the first opening open and the second opening closed;
FIG. 6 is a top view of the insert portion of the first cover of the charging assembly in an extended position in accordance with an embodiment of the present invention;
fig. 7 is a partial cross-sectional view of the first embedded portion of the first cover of the charging assembly in a retracted position according to the second embodiment of the present invention;
FIG. 8 is a partial cross-sectional view of the first insert portion of the first cover of the charging assembly in an extended position in accordance with the second embodiment of the present invention;
FIG. 9 is a top view of the first insert portion of the first cover of the charging assembly in an extended position in accordance with the second embodiment of the present invention;
FIG. 10 is a partial cross-sectional view of the second insert portion of the first cover of the charging assembly in a retracted position in accordance with the second embodiment of the present invention;
fig. 11 is a partial cross-sectional view of the second insert portion of the first cover of the charging assembly in an extended position in accordance with the second embodiment of the present invention;
FIG. 12 is a top view of the second insert portion of the first cover of the charging assembly in an extended position in accordance with the second embodiment of the present invention;
figure 13 is a top view of the first and second insert portions of the first cover of the charging assembly in an extended position in accordance with the second embodiment of the present invention;
figure 14 is a schematic view of a third embodiment of the charging assembly according to the present invention with both the first feeding port and the second feeding port closed;
figure 15 is a schematic view of the charging assembly according to a third embodiment of the invention with the first feeding port open and the second feeding port closed;
figure 16 is a schematic view of a charging assembly according to a third embodiment of the invention with the first feeding port closed and the second feeding port open;
figure 17 is a schematic view of a charging assembly according to a fourth embodiment of the invention with both the first feeding port and the second feeding port closed;
figure 18 is a schematic view of the feeding assembly according to the fourth embodiment of the invention with the first dosage port open and the second dosage port closed;
figure 19 is a schematic view of a charging assembly according to a fourth embodiment of the invention with both the first and second charging ports open;
figure 20 is a schematic view of a fifth embodiment of the charging assembly according to the invention with both the first feeding port and the second feeding port closed.
Reference numerals:
a charging assembly 100;
an inner cylinder 1; a first channel 11; a first opening 12; a first feed opening 13;
an outer cylinder 2; a second channel 21; a second opening 22; a second feed opening 23;
a first switch mechanism 3;
a first cover 31; a main body portion 311; an insertion groove 312; the first insertion groove 312 a; the second insertion groove 312 b; an insertion portion 313; the first embedding portion 313 a; the second insertion portion 313 b; an elastic member 314; a first driving member 32;
a second switch mechanism 4; a second cover 41; a second drive member 42;
a stirring rod 5;
a crucible 200; melting soup 210; a melt level 211.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
The following disclosure provides many different embodiments, or examples, for implementing different features of the invention. To simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present invention provides examples of various specific processes and materials, but one of ordinary skill in the art will recognize the applicability of other processes and/or the use of other materials.
The charging assembly 100 according to an embodiment of the present invention is described below with reference to the drawings.
As shown in FIG. 1, a feed assembly 100 according to an embodiment of the present invention is adapted to replenish a crucible 200 of a single crystal growing apparatus with feedstock. It can be understood that, in the process of growing a single crystal, for example, when a single crystal silicon rod is produced by using a single crystal growing apparatus, a raw material such as a polycrystalline silicon raw material is first placed in the crucible 200 and heated to a molten state to form a polycrystalline silicon melt 210, then the seed crystal is immersed in the melt 210, silicon atoms in the melt 210 are gradually crystallized at the bottom of the seed crystal by means of pulling and rotating the seed crystal, and the size of the seed crystal is controlled by controlling the pulling and rotating speed of the seed crystal, so as to finally form the single crystal silicon rod meeting the size requirement. However, as the silicon atoms in melt 210 continue to crystallize at the bottom of the seed crystal, the silicon atom content in melt 210 continues to decrease. Therefore, the charging assembly 100 can timely supplement raw materials for producing single crystals into the crucible 200, thereby avoiding the situation that the growth speed, quality and the like of the single crystals are influenced due to insufficient atom content of the single crystals and ensuring that the single crystal rods meeting the size requirement are produced.
As shown in fig. 1-3, the charging assembly 100 includes: the device comprises an inner cylinder 1, an outer cylinder 2, a first switch mechanism 3 and a second switch mechanism 4. Specifically, a first channel 11 is formed in the inner cylinder 1, a first opening 12 communicated with the first channel 11 is formed at one end of the inner cylinder 1 facing the crucible 200, the raw material in the first channel 11 is suitable for falling into the crucible 200 through the first opening 12, the outer cylinder 2 is sleeved on the outer peripheral side of the inner cylinder 1, a second channel 21 and a second opening 22 facing the crucible 200 and communicated with the second channel 21 are defined between the inner cylinder 1 and the outer cylinder 2, the raw material in the second channel 21 is suitable for falling into the crucible 200 through the second opening 22, the first opening and closing mechanism 3 is suitable for opening or closing the first opening 12, and the second opening and closing mechanism 4 is suitable for opening or closing the second opening 22. That is, the second passage 21 is located on the outer peripheral side of the first passage 11, and the second opening 22 is located on the outer peripheral side of the first opening 12, so that the supply of the raw material in the first passage 11 can be controlled by the first opening/closing mechanism 3, and the supply of the raw material in the second passage 21 can be controlled by the second opening/closing mechanism 4. Thereby, the charging assembly 100 can flexibly control the amount of raw material which is fed to the crucible 200 at a single time.
Specifically, before the charging is started, the raw material may be fed into the first passage 11 and the second passage 21, for example, the inner cylinder 1 may form a first charging opening communicating with the first passage 11, and the outer cylinder 2 may form a second charging opening communicating with the second passage 21, at which time the first opening/closing mechanism 3 closes the first opening 12, and the second opening/closing mechanism 4 closes the second opening 22, so that the raw material may be temporarily stored in the first passage 11 and the second passage 21. When charging is required, the charging assembly 100 may first be moved to a charging position, where the charging position refers to a position that facilitates the charging assembly 100 to dispense feedstock into the crucible 200, e.g., when the charging assembly 100 is positioned in a charging device, the charging assembly 100 is positioned above the crucible 200 with the first and second openings 12 and 22 opposite the crucible 200. When the raw material in the first passage 11 is charged into the crucible 200, the first opening and closing mechanism 3 is controlled to open the first opening 12, so that the raw material in the first passage 11 is charged into the crucible 200 through the first opening 12, and after the charging of the set amount of raw material is completed, the first opening and closing mechanism 3 can close the first opening 12 to wait for the next charging; when the raw material in the second passage 21 is charged into the crucible 200, the second opening/closing mechanism 4 is controlled to open the second opening 22 to charge the raw material in the second passage 21 into the crucible 200 through the second opening 22, and after the addition of the set amount of the raw material is completed, the second opening/closing mechanism 4 may close the second opening 22 to wait for the next charge.
In other words, during the charging into the crucible 200, the amount of the raw material charged into the crucible 200 can be controlled by controlling the opening or closing of the first opening 12 and the second opening 22, for example, during the charging, the first opening/closing mechanism 3 is first controlled to open the first opening 12, the raw material in the first passage 11 is charged into the crucible 200, and after the addition of the raw material in the first passage 11 is completed, the second opening/closing mechanism 4 is controlled to open the second opening 22, and the raw material in the second passage 21 is charged into the crucible 200; or the second opening and closing mechanism 4 is controlled to open the second opening 22 first, the raw material in the second passage 21 is fed into the crucible 200 first, after the addition of the raw material in the second passage 21 is completed, the first opening and closing mechanism 3 is controlled to open the first opening 12, the raw material in the first passage 11 is fed into the crucible 200, and thus the amount of the raw material falling into the molten soup 210 is controlled.
Wherein the amount of raw material falling into the melt 210 is proportional to the amount of splashing of the melt 210 caused by the raw material and the fluctuation of the melt level 211. That is, the smaller the amount of raw material falling into the melt 210 at the same time, the smaller the magnitude of splashing of the melt 210 and fluctuation of the melt level 211, and the larger the amount of raw material falling into the melt 210, the larger the magnitude of splashing of the melt 210 and fluctuation of the melt level 211. Therefore, through the first switch mechanism 3 and the second switch mechanism 4, in the feeding process of the feeding assembly 100, raw materials in the first channel 11 and the second channel 21 can be added into the crucible 200 for multiple times, so that the raw material amount in the crucible 200 can be controlled for a single time, the splashing of the molten liquid 210 and the fluctuation of the liquid level caused in the feeding process can be reduced, the waste and the interference of the raw materials caused by the splashing of the molten liquid 210 to other parts can be prevented, and the reliability of the single crystal growth device can be improved. In addition, the fluctuation range of the liquid level 211 of the molten soup is small in the feeding process, so that the liquid level 211 of the molten soup can be quickly restored to a relatively quiet state, and the influence of the fluctuation of the liquid level 211 of the molten soup on the growth of the single crystal is reduced.
Secondly, one or more times of feeding operation can be flexibly carried out according to the required amount of raw materials, so that the single crystal rod meeting the size requirement can be produced. In addition, the raw materials are added into the crucible 200 for a plurality of times, and the input amount can be flexibly controlled according to the current growth state of the single crystal rod, so that the raw materials waste caused by adding excessive raw materials for a single time can be prevented, and the production cost of the single crystal rod is favorably reduced.
According to the feeding assembly 100 of the embodiment of the invention, the raw material fed into the first channel 11 is controlled by opening or closing the first opening 12 of the first switch mechanism 3, and the raw material fed into the second channel 21 is controlled by opening or closing the second opening 22 of the second switch mechanism 4, so that the amount of the raw material fed into the crucible 200 at a time can be well controlled, the splashing of the molten liquid 210 and the fluctuation of the liquid level caused in the feeding process can be reduced, the waste and the interference of the raw material caused by the splashing of the molten liquid 210 onto other parts can be prevented, and the reliability of the single crystal growing device can be improved. In addition, the fluctuation range of the liquid level 211 of the molten liquid is small in the feeding process, and the liquid level 211 of the molten liquid can be quickly restored to a calmer state, so that the influence of the fluctuation of the liquid level 211 of the molten liquid on the growth of single crystals is reduced.
According to some embodiments of the present invention, the first switch mechanism 3 includes a first cover 31 and a first driving member 32, the first cover 31 is movably disposed on a side of the inner barrel 1 adjacent to the first opening 12, and the first driving member 32 is adapted to drive the first cover 31 away from or close to the inner barrel 1 to open or close the first opening 12. That is, the first driving member 32 can adjust the distance between the first cover 31 and the peripheral wall of the first opening 12 to open or close the first opening 12, thereby controlling the material feeding in the first channel 11. Specifically, after the first channel 11 is filled or the first channel 11 is filled, the first driving element 32 may drive the first cover 31 to move toward the first opening 12 until the first cover 31 blocks the first opening 12, so as to block the raw material in the first channel 11 from falling through the first opening 12; when adding the raw material into the crucible 200, the first driving member 32 drives the first cover 31 to move in a direction away from the inner cylinder 1, so that the first cover 31 can be spaced apart from the outer peripheral wall of the first opening 12, i.e., the first opening 12 is opened, and the raw material in the first passage 11 can be thrown into the crucible 200 through the opened portion of the first opening 12. The diameter of the first cover 31 is not smaller than the inner diameter of the first opening 12, that is, the diameter of the first cover 31 may be the same as the inner diameter of the first opening 12 or the diameter of the first cover 31 is larger than the inner diameter of the first opening 12, so as to ensure the blocking effect of the first cover 31 on the first opening 12.
In addition, when the first cover 31 moves toward a direction approaching the inner cylinder 1, the opening portion of the first opening 12 is gradually reduced, so that the amount of the raw material charged through the first opening 12 is reduced, whereas when the first cover 31 moves toward a direction away from the inner cylinder 1, the opening portion of the first opening 12 is gradually increased, so that the amount of the raw material charged through the first opening 12 is increased, whereby the amount of the raw material charged into the crucible 200 at the same time can be flexibly controlled, which is advantageous for controlling the splashing of the molten soup 210 and the fluctuation of the molten soup level 211 caused in the charging process.
Further, as shown in fig. 4 to 8, the first cover 31 includes a main body portion 311 and a plurality of insertion grooves 312 arranged at intervals in the circumferential direction on the main body portion 311, the number of the insertion portions 313 is the same as and corresponds to the number of the insertion grooves 312, and the insertion portions 313 are movably provided in the insertion grooves 312 between an extended position where portions of two adjacent insertion portions 313 overlap in the circumferential direction of the inner cylinder 1 and a retracted position. Thus, by controlling the extension length of the fitting portion 313, the diameter of the first lid 31 can be adjusted, and the sealing area of the first opening 12 by the first lid 31 can be controlled, whereby the size of the open portion of the first opening 12 can be adjusted, and the amount of the raw material to be charged can be controlled. Moreover, the diameter of the first cover 31 can be changed to better fit the first opening 12 with different inner diameters.
Furthermore, in some alternative embodiments of the present invention, the first cover 31 is disposed coaxially with the first passage 11, the first cover 31 extends obliquely downward in a direction toward the radially outer side of the inner cylinder 1, the main body portion 311 is substantially tapered and has the same outer diameter as the inner diameter of the inner cylinder 1, and the insertion portions 313 each extend obliquely downward in a direction away from the central axis of the main body portion 311. Therefore, after the first cover 31 opens the first opening 12, the raw material in the first passage 11 can slide down along the downward inclined main body 311 and the extended insertion portion 313 into the crucible 200, and thus, the diameter of the first main body 311 can be adjusted by controlling the extension length of the insertion portion 313, and the falling point in the crucible 200 can be controlled well, that is, the longer the length of the insertion portion 313 extended out of the insertion groove 312 is, the larger the diameter of the main body 311 is, the farther the region of the raw material falling into the crucible 200 is from the central axis of the crucible 200, and conversely, the shorter the length of the insertion portion 313 extended out of the insertion groove 312 is, the smaller the diameter of the main body 311 is, the closer the region of the raw material falling into the crucible 200 is from the central axis of the crucible 200. Therefore, by controlling the extension length of the embedded part 313, the feeding area of the raw material in the crucible 200 can be well controlled, so that the raw material can be uniformly fed into the crucible 200, the raw material in the crucible 200 can be uniformly distributed, and the growth quality of the single crystal can be improved. Further, when the first lid body 31 closes the first opening 12, the insertion portion 313 is in the retracted position, and interference of the insertion portion 313 can be preferably avoided, and when the first opening 12 is opened, the insertion portion 313 is in the extended position, so that the dispensing of the raw material can be preferably guided by the insertion portion 313.
In some alternative embodiments of the present invention, as shown in fig. 7-13, the insertion groove 312 includes: a first insertion groove 312a and a second insertion groove 312b, the first insertion groove 312a and the second insertion groove 312b being layered in the axial direction of the main body portion 311, the insertion portion 313 including: a first embedding portion 313a and a second embedding portion 313b, the first embedding portion 313a is movably disposed in the first embedding groove 312a between the extended position and the retracted position, the second embedding portion 313b is movably disposed in the second embedding groove 312b between the extended position and the retracted position, wherein the first embedding groove 312a is arranged in plurality along the circumferential direction of the main body 311, the second embedding groove 312b is arranged in plurality along the circumferential direction of the main body 311, and in the circumferential direction of the main body 311, the plurality of second embedding grooves 312b and the plurality of first embedding grooves 312a are arranged in a staggered manner, the plurality of first embedding portions 313a are provided, the plurality of first embedding portions 313a and the plurality of first embedding grooves 312a are provided in one-to-one correspondence, the plurality of second embedding portions 313b and the plurality of second embedding grooves 312b are provided in one-to-one correspondence, and when the first embedding portions 313a and the second embedding portions 313b are both in the extended position, in the circumferential direction of the inner tube 1, the adjacent first and second embedded portions 313a and 313b partially overlap. That is, the first and second insertion parts 313a and 313b are layered in the axial direction of the main body part 311. Therefore, the first embedded part 313a and the second embedded part 313b can be prevented from interfering with each other when moving between the extended position and the retracted position, which is beneficial to improving the stability of the first cover 31.
In a specific example, the first embedding grooves 312a are located above the second embedding grooves 312b, the number of the first embedding grooves 312a and the number of the second embedding grooves 312b are four, the four first embedding grooves 312a and the four second embedding grooves 312b are uniformly and alternately arranged in the circumferential direction of the main body portion 311, the first embedding portions 313a and the second embedding portions 313b are identical in shape and are fan-shaped, and when the first embedding portions 313a and the second embedding portions 313b are in the extending positions, in the circumferential direction of the main body portion 311, each first embedding portion 313a and two adjacent second embedding portions 313b are partially overlapped in the axial direction of the main body portion 311, so that raw materials can be prevented from being exposed between the first embedding portions 313a and the second embedding portions 313b, and the feeding amount can be controlled accurately.
According to some embodiments of the present invention, as shown in fig. 14 and 17, the second opening and closing mechanism 4 includes a second cover 41 and a second driving member 42, the second cover 41 is movably disposed on a side of the inner cylinder 1 adjacent to the second opening 22, and the second driving member 42 is adapted to drive one of the second cover 41 and the outer cylinder 2 to move relative to the other to open or close the second opening 22. That is, the second driving member 42 can adjust the distance between the second cover 41 and the peripheral wall of the second opening 22 to open or close the second opening 22, thereby controlling the feeding of the raw material in the second channel 21. The second driving member 42 may be in transmission connection with the second cover 41, and the second driving member 42 closes or opens the second opening 22 by driving the second cover 41 to approach or depart from the outer barrel 2; alternatively, the second driving member 42 may be in transmission connection with the outer cylinder 2, and the second driving member 42 may drive the outer cylinder 2 to approach or move away from the second cover 41 to close or open the second opening 22.
Specifically, after the filling of the second channel 21 or the feeding of the second channel 21 is completed, the second driving element 42 may control the second cover 41 and the outer barrel 2 to approach each other until the second cover 41 blocks the second opening 22, so as to prevent the raw material in the second channel 21 from falling through the second opening 22; when the raw material is added into the crucible 200, the second driving member 42 can control the second cover 41 and the outer cylinder 2 to be away from each other, the second cover 41 is spaced apart from the outer cylinder 2, and the raw material in the second passage 21 can be thrown into the crucible 200 through the second opening 22 of the opening portion. Alternatively, the second cover 41 is annular and surrounds the outer periphery of the first opening 12, the inner diameter of the second cover 41 is the same as the diameter of the inner cylinder 1, and the outer diameter of the second cover 41 is the same as the inner diameter of the outer cylinder 2, so as to ensure the sealing effect of the second cover 41 on the second opening 22.
In addition, when the distance between the second cover 41 and the outer cylinder 2 is reduced, the opened portion of the second opening 22 is gradually reduced, so that the amount of the raw material charged through the second opening 22 is reduced, whereas when the distance between the second cover 41 and the outer cylinder 2 is increased, the opened portion of the second opening 22 is gradually increased, so that the amount of the raw material charged through the second opening 22 is increased, whereby the amount of the raw material charged into the crucible 200 at the same time can be flexibly controlled, which is advantageous for controlling the splashing of the molten steel 210 and the fluctuation of the molten steel level 211 caused during the charging process.
According to some embodiments of the present invention, as shown in fig. 14 to 19, the first opening and closing mechanism 3 includes a first cover 31 disposed on a side of the inner cylinder 1 adjacent to the first opening 12 and a first driving member 32 for driving the first cover 31 to move up and down, the second opening and closing mechanism 4 includes a second cover 41 and a second driving member 42 disposed on a side of the outer cylinder 2 adjacent to the second opening 22 and located radially outside the first opening 12, in the direction toward the radial outside of the inner cylinder 1, the first cover body 31 and the second cover body 41 both extend obliquely downward, a first material feeding port 13 communicating with the first opening 12 is defined between the first cover body 31 and the second cover body 41, a second material feeding port 23 communicating with the second opening 22 is defined between the second cover body 41 and the inner wall of the outer cylinder 2, the second driving member 42 is adapted to open or close the second material feeding port 23, and the first driving member 32 is adapted to cooperate with the second driving member 42 and open or close the first material feeding port 13.
That is, the second driving member 42 can adjust the distance between the second cover 41 and the peripheral wall of the second opening 22, thereby controlling the size of the second feeding port 23, and when the second feeding port 23 is opened, the raw material in the second passage 21 can fall into the crucible 200 through the second opening 22 and the second feeding port 23, that is, the raw material in the second passage 21 can roll along the second cover 41 toward the surface of the second opening 22 and fall into the crucible 200 at the outer peripheral edge of the second cover 41.
In addition, in the process of opening or closing the first feeding port 13, when the position of the second cover 41 is fixed, that is, the second driving element 42 is in transmission connection with the outer cylinder 2, for example, when the second cover 41 is fixed on the bottom wall of the inner cylinder 1, the first cover 31 is driven to lift by the first driving element 32, and the distance between the first cover 31 and the second cover 41 is adjusted, so that the first feeding port 13 can be opened or closed; when the second cover 41 is movable, that is, the second driving element 42 is in transmission connection with the second cover 41, for example, the second cover 41 is disposed on the bottom wall of the inner cylinder 1 in a liftable manner, the first cover 31 is driven to move by the first driving element 32, and the second cover 41 is driven to move by the second driving element 42, so as to adjust the distance between the first cover 31 and the second cover 41, thereby opening or closing the first feeding port 13. Wherein the raw material in the first channel 11 can fall into the crucible 200 through the first opening 12 and the first feeding port 13 when the first feeding port 13 is opened, i.e. the raw material in the first channel 11 can roll along the surface of the first cover 31 towards the first opening 12 and fall into the crucible 200 at the outer circumferential edge of the first cover 31.
Therefore, the first cover body 31 and the second cover body 41 are obliquely arranged, so that the falling speed of the raw material can be well slowed down by the first cover body 31 and the second cover body 41, the raw material can be well prevented from directly falling into the crucible 200 through the first opening 12 or the second opening 22, and the splashing of the molten liquid 210 and the fluctuation of the liquid level caused in the feeding process can be controlled.
In some alternative embodiments of the present invention, as shown in fig. 1-3, the first cover 31 is inclined at the same angle with respect to the horizontal plane as the second cover 41. That is, when the first feeding port 13 is in the open state, the first cover 31 is parallel to the second cover 41, so that the distance between the first cover 31 and the second cover 41 in the direction away from the central axis of the inner cylinder 1 is kept constant, thereby allowing the raw material in the first channel 11 to be quickly released through the first feeding port 13.
In some alternative embodiments of the present invention, as shown in fig. 15, 16 and 19, the outer peripheral edge of the first cover 31 is flush with the outer peripheral edge of the second cover 41 in the radial direction of the inner cylinder 1. That is to say, the region where the raw material in the first channel 11 falls into the melt 210 along the first cover 31 is the same as the region where the raw material in the second channel 21 falls into the melt 210 along the second cover 41, so that the raw material falling into the melt 210 first can form a buffer layer on the melt 210, and in the subsequent charging process, the raw material falling down later can fall on the buffer layer formed on the melt 210, and therefore the splashing of the melt 210 and the fluctuation of the liquid level caused by the collision of the raw material and the melt 210 can be well reduced, and further the raw material can be prevented from being wasted and interfered by splashing of the melt 210 onto other parts, and the reliability of the single crystal growth device can be improved. In addition, the liquid level 211 of the molten liquid can be quickly restored to a more calm state, thereby reducing the influence of the fluctuation of the liquid level 211 of the molten liquid on the growth of the single crystal
Further, the inclination angle of the first cover 31 with respect to the horizontal plane is smaller than the inclination angle of the second cover 41 with respect to the horizontal plane. It is understood that, on the premise that the diameter of the first lid body 41 is kept constant, the smaller the inclination angle of the first lid body 31, the smaller the dimension of the first lid body 31 in the axial direction of the inner cylinder 1. Therefore, the axial dimension of the first cover 31 can be reduced well, which is beneficial to saving the installation space and the production cost occupied by the first cover 31. In addition, the larger the inclination angle of the first cover 31 with respect to the horizontal plane, the faster the raw material in the first channel 11 rolls on the first cover 31, and the faster the raw material falls after separating from the first cover 31, and conversely, the smaller the inclination angle of the first cover 31 with respect to the horizontal plane, the slower the raw material in the first channel 11 rolls on the first cover 31, so that the speed of the raw material falling from the first cover 31 into the molten soup 210 can be reduced. Thus, by reducing the inclination angle of the first lid 41 with respect to the horizontal plane, the splashing of the melt 210 and the fluctuation of the liquid surface due to the collision of the raw material with the melt 210 can be reduced.
According to some embodiments of the present invention, as shown in fig. 20, the charging assembly 100 further comprises a plurality of stirring rods 5 disposed in the first channel 11 and the second channel 21, the stirring rods 5 being adapted to stir the material in the first channel 11 and the second channel 21. That is, when the raw material is unevenly distributed in the first channel 11 or the second channel 21, the uneven distribution here means that the raw material at the uppermost layer has a significant height difference, that is, a part of the raw material is piled up at one position and cannot fall down, so that the raw material can be pushed to move by the rotation and the like of the stirring rod 5, so that the piled raw material can slide down and fall apart, so that the raw material can be evenly distributed in the first channel 11 and the second channel 21, thereby ensuring the even feeding into the crucible 200. In addition, the stirring rod 5 pushes the raw materials, so that the raw materials are prevented from being clamped in the first channel 11 or the second channel 21, and the feeding efficiency is improved.
In some alternative embodiments of the invention, the direction of extension of the stirring rod 5 is perpendicular to the axis of the inner barrel 1 or the stirring rod 5 extends obliquely downwards. That is to say, in the direction from bottom to top, the contained angle between the extending direction of stirring rod 5 and the lateral wall of inner tube 1 is right angle or obtuse angle to can avoid the raw materials to be blocked by the region that forms between stirring rod 5 and the lateral wall of inner tube 1 or urceolus 2 at the in-process of whereabouts betterly, make the raw materials can descend along unblocked first passageway 11 and second passageway 21, do benefit to and promote reinforced efficiency.
In some optional embodiments of the present invention, the stirring rods 5 are provided in plurality at intervals along the up-down direction, in the axial direction of the inner barrel 1, the lower edge of the stirring rod 5 at the lowest side is spaced from the top wall of the inner barrel 1 by a distance a, the axial dimension of the inner barrel 1 is b, and the following conditions are satisfied: a/b is less than 0.5. That is, the ratio of the distance between the lower edge of the stirring rod 5 located at the lowermost side and the top wall of the inner cylinder 1 to the axial dimension of the inner cylinder 1 is controlled to be within 0.5, for example, the ratio of the distance between the lower edge of the stirring rod 5 located at the lowermost side and the top wall of the inner cylinder 1 to the axial dimension of the inner cylinder 1 may be 0.1, 0.2, 0.3, or 0.4, and the like.
In other words, the plurality of stirring rods 5 are provided at the upper positions in the inner cylinder 1 and the outer cylinder 2, which is advantageous to reduce the difficulty in assembling the stirring rods 5, and it can be understood that when the first passage 11 and the second passage 21 are filled with raw materials, the raw materials located at the bottom of the first passage 11 and the second passage 21 are first released when the raw materials are charged into the crucible 200, the raw materials located at the top of the first passage 11 and the second passage 21 are not yet released due to the raw materials below, and the raw materials at the top have a slow falling speed due to interaction therebetween. From this, with the ratio control between the internal diameter of interval and inner tube 1 between inner tube 1 roof and the lowermost end stirring rod 5 within 0.5 for the stirring board can stir the raw materials on upper strata when the raw materials release begins, with the efficiency that accelerates the raw materials to fall towards first opening 12, does benefit to and promotes reinforced efficiency.
A charging assembly 100 according to a specific embodiment of the present invention is described below with reference to fig. 1-20. It is to be understood that the following description is intended to be illustrative only, and is not intended to be in any way limiting.
Example one
Referring to fig. 1-3, the charging assembly 100 includes: the device comprises an inner cylinder 1, an outer cylinder 2, a first switch mechanism 3 and a second switch mechanism 4. Wherein, the inner cylinder 1 forms a first channel 11 extending along the vertical direction, the bottom of the inner cylinder 1 forms a first opening 12 communicated with the first channel 11, the outer cylinder 2 is sleeved on the outer periphery of the inner cylinder 1, in the radial direction of the inner cylinder 1, the inner cylinder 1 and the outer cylinder 2 define a second channel 21 positioned on the outer periphery of the inner cylinder 1, and a second opening 22 positioned on the bottom of the inner cylinder 1 and communicated with the second channel 21.
Further, the first switch mechanism 3 includes a first cover 31 and a first driving member 32, the first cover 31 is conical and is disposed coaxially with the inner cylinder 1, in a direction away from the crucible 200, a diameter of the first cover 31 is gradually reduced, a maximum diameter of the first cover 31 is the same as an inner diameter of the inner cylinder 1, the first driving member 32 is disposed in the first passage 11 in a penetrating manner along a vertical direction, and the first driving member 32 is connected with the first cover 31 to drive the first cover 31 to lift. The second opening and closing mechanism 4 includes a second cover 41 and a second driving element 42, the second cover 31 is in a truncated cone shape and is hollow, the second cover 31 and the inner cylinder 1 are coaxially arranged, the top wall of the second cover 31 and the bottom wall of the inner cylinder 1 are fixedly connected, the diameter of the second cover 41 is gradually reduced in the direction away from the crucible 200, the maximum diameter of the second cover 41 is the same as the inner diameter of the outer cylinder 2, and the second driving element 42 is connected with the outer cylinder to drive the outer cylinder 2 to lift.
Example two
The present embodiment is substantially the same as the first embodiment, in which the same reference numerals are used for the same components, and referring to fig. 4 to 13, the second embodiment is different from the first embodiment in that the first cover 31 includes a main body portion 311 and an insertion portion 313, the main body portion 311 is tapered and is disposed coaxially with the inner cylinder 1, a diameter of the main body portion 311 is gradually reduced in a direction away from the crucible 200, a maximum diameter of the main body portion 311 is the same as an inner diameter of the inner cylinder 1, an insertion groove 312 is formed at an end surface of the main body portion 311 extending away from the inner cylinder 1, and the insertion groove 312 includes: a first insertion groove 312a and a second insertion groove 312b, the first insertion groove 312a and the second insertion groove 312b being layered in the axial direction of the main body portion 311, the insertion portion 313 including: a plurality of first insertion portions 313a and a plurality of second insertion portions 313b, the first insertion portions 313a being movably disposed in the first insertion grooves 312a between the extended position and the retracted position, the second insertion portions 313b being movably disposed in the second insertion grooves 312b between the extended position and the retracted position, wherein the first insertion grooves 312a are arranged in a plurality along a circumferential direction of the main body 311, the second insertion grooves 312b are arranged in a plurality along the circumferential direction of the main body 311, and the plurality of second insertion grooves 312b are arranged alternately with the plurality of first insertion grooves 312a in the circumferential direction of the main body 311, the plurality of first insertion portions 313a are provided in a plurality, the plurality of first insertion portions 313a are provided in one-to-one correspondence with the plurality of first insertion grooves 312a, the plurality of second insertion portions 313b are provided in a plurality, the plurality of second insertion portions 313b are provided in one-to-one correspondence with the plurality of second insertion grooves 312b, and when both the first insertion portions 313a and the second insertion portions 313b are in the extended position, in the circumferential direction of the inner tube 1, the adjacent first and second insertion portions 313a and 313b partially overlap. In addition, an elastic member 314 is disposed between the first embedding portion 313a and the first embedding groove 312a, and between the second embedding portion 313b and the second embedding groove 312b, the elastic member 314 is adapted to push the first embedding portion 313a and the second embedding portion 313b to move toward the extended position, when the first opening/closing mechanism 3 closes the first opening 12, the first embedding portion 313a and the second embedding portion 313b are in the retracted position, and when the first opening/closing mechanism 3 opens the first opening 12, the first embedding portion 313a and the second embedding portion 313b are in the extended position.
EXAMPLE III
The present embodiment is substantially the same as the first embodiment, wherein the same reference numerals are used for the same components, and referring to fig. 14 to 16, the third embodiment is different from the first embodiment in that the maximum diameter of the first cover 31 is the same as the maximum diameter of the second cover 41, the inclination angle of the first cover 31 with respect to the horizontal plane is smaller than the inclination angle of the second cover 41 with respect to the horizontal plane, the second driving element 42 is inserted into the side wall of the inner cylinder 1, and the bottom end of the second driving element 42 is connected with the bottom wall of the second cover 41 to drive the second cover 41 to move up and down with respect to the inner cylinder 1 and the outer cylinder 2.
Example four
The present embodiment has substantially the same structure as the first embodiment, in which the same reference numerals are used for the same components, and referring to fig. 17 to 19, the fourth embodiment is different from the first embodiment in that the maximum diameter of the first cover 31 is the same as the maximum diameter of the second cover 41, and the inclination angle of the first cover 31 with respect to the horizontal plane is smaller than the inclination angle of the second cover 41 with respect to the horizontal plane.
EXAMPLE five
The present embodiment has substantially the same structure as the fourth embodiment, wherein the same reference numerals are used for the same components, and referring to fig. 20, the fifth embodiment is different from the fourth embodiment in that a rotating mechanism is arranged on the side wall of the inner cylinder 1, a plurality of stirring rods 5 are arranged in the first channel 11 and the second channel 21 at intervals in the vertical direction, and the rotating mechanism is in transmission connection with the plurality of stirring rods 5.
A single crystal growth apparatus according to an embodiment of the present invention is described below with reference to the accompanying drawings.
A single crystal growing apparatus according to an embodiment of the present invention includes: the charging assembly 100 described above. That is, in the process of charging the crucible 200 of the single crystal growth apparatus, the amount of the raw material charged into the crucible 200 can be controlled by controlling the opening or closing of the first opening 12 and the second opening 22, for example, in the charging, the first opening/closing mechanism 3 is first controlled to open the first opening 12, the raw material in the first passage 11 is charged into the crucible 200, and after the addition of the raw material in the first passage 11 is completed, the second opening/closing mechanism 4 is controlled to open the second opening 22, and the raw material in the second passage 21 is charged into the crucible 200; or the second opening and closing mechanism 4 is controlled to open the second opening 22 first, the raw material in the second passage 21 is fed into the crucible 200 first, after the addition of the raw material in the second passage 21 is completed, the first opening and closing mechanism 3 is controlled to open the first opening 12, the raw material in the first passage 11 is fed into the crucible 200, and thus the amount of the raw material falling into the molten soup 210 is controlled.
Wherein the amount of raw material falling into the melt 210 is proportional to the amount of splashing of the melt 210 caused by the raw material and the fluctuation of the melt level 211. That is, the smaller the amount of raw material falling into the melt 210 at the same time, the smaller the magnitude of splashing of the melt 210 and fluctuation of the melt level 211, and the larger the amount of raw material falling into the melt 210, the larger the magnitude of splashing of the melt 210 and fluctuation of the melt level 211. Therefore, through the first switch mechanism 3 and the second switch mechanism 4, in the feeding process of the feeding assembly 100, raw materials in the first channel 11 and the second channel 21 can be added into the crucible 200 for multiple times, so that the raw material amount in the crucible 200 can be controlled for a single time, the splashing of the molten liquid 210 and the fluctuation of the liquid level caused in the feeding process can be reduced, the waste and the interference of the raw materials caused by the splashing of the molten liquid 210 to other parts can be prevented, and the reliability of the single crystal growth device can be improved. In addition, the fluctuation range of the liquid level 211 of the molten liquid is small in the feeding process, and the liquid level 211 of the molten liquid can be quickly restored to a calmer state, so that the influence of the fluctuation of the liquid level 211 of the molten liquid on the growth of single crystals is reduced.
According to the single crystal growing device provided by the embodiment of the invention, the raw material put into the first channel 11 is controlled by opening or closing the first opening 12 of the first switch mechanism 3, and the raw material put into the second channel 21 is controlled by opening or closing the second opening 22 of the second switch mechanism 4, so that the amount of the raw material put into the crucible 200 at a time can be well controlled, the splashing of the molten soup 210 and the fluctuation of the liquid level caused in the feeding process can be reduced, the waste and the interference of the raw material caused by the splashing of the molten soup 210 onto other parts can be prevented, and the reliability of the single crystal growing device can be improved. In addition, the fluctuation range of the liquid level 211 of the molten soup is small in the feeding process, so that the liquid level 211 of the molten soup can be quickly restored to a relatively quiet state, and the influence of the fluctuation of the liquid level 211 of the molten soup on the growth of the single crystal is reduced.
A charging method for a single crystal growth apparatus according to an embodiment of the present invention is described below with reference to the accompanying drawings.
The feeding method comprises the following steps: raw material is added to the first channel 11 and the second channel 21. That is, the raw material can be temporarily stored in the first passage 11 and the second passage 21 before the charging assembly 100 is extended toward the crucible 200, so that the charging amount can be precisely controlled, and the difficulty of charging the raw material can be reduced,
further, firstly, the first switch mechanism 3 is controlled to open the first opening 12 to put the raw material in the first channel 11 into the crucible 200, and after the raw material in the first channel 11 is completely put, the second switch mechanism 4 is controlled to open the second opening 22 to put the raw material in the second channel 21 into the crucible 200; alternatively, the second opening/closing mechanism 4 is first controlled to open the second opening 22 to feed the raw material in the second passage 21 into the crucible 200, and after the raw material in the second passage 21 is completely fed, the first opening/closing mechanism 3 is controlled to open the first opening 12 to feed the raw material in the first passage 11 into the crucible 200.
That is, the raw material in the first passage 11 may be charged into the crucible 200, and then the raw material in the second passage 21 may be charged into the crucible 200; or the raw material in the second passage 21 is charged into the crucible 200 first, and then the raw material in the first passage 11 is charged into the crucible 200. Thereby, the amount of the raw material added to the crucible 200 at the same time can be preferably reduced, and it can be understood that the amount of the raw material falling into the crucible 200 at the same time is proportional to the amplitude of the splashing of the melt 210 and the fluctuation of the melt level 211. Therefore, according to the feeding method provided by the embodiment of the invention, the situation that the molten liquid 210 is splashed greatly and the liquid level fluctuates due to the fact that the raw materials are simultaneously fed in too large amount can be avoided, the waste and the interference of the raw materials caused by the fact that the molten liquid 210 is splashed to other parts can be further prevented, and the reliability of a single crystal growing device is improved. In addition, the fluctuation range of the liquid level 211 of the molten soup is small in the feeding process, so that the liquid level 211 of the molten soup can be quickly restored to a relatively quiet state, and the influence of the fluctuation of the liquid level 211 of the molten soup on the growth of the single crystal is reduced.
According to some embodiments of the present invention, the first opening and closing mechanism 3 includes a first cover 31 and a first driving member 32 provided on a side of the inner cylinder 1 adjacent to the first opening 12, the second opening and closing mechanism 4 includes a second cover 41 and a second driving member 42 provided on a side of the outer cylinder 2 adjacent to the second opening 22 and located radially outside the first opening 12, in a direction toward radially outside of the inner cylinder 1, the first cover 31 and the second cover 41 each extend obliquely downward, an outer peripheral edge of the first cover 31 is flush with an outer peripheral edge of the second cover 41, and the adding of the raw material into the first channel 11 and the second channel 21 includes: one type of raw material is added into the first channel 11, and the second type of raw material is added into the second channel 21, wherein the diameter of the first type of raw material is smaller than that of the second type of raw material.
That is, when the first feeding port 13 is opened, one kind of raw material in the first passage 11 may roll along the first cover 31 toward the surface of the first opening 12 and fall into the crucible 200 at the outer circumferential edge of the first cover 31, and when the second feeding port 23 is opened, the second kind of raw material in the second passage 21 may roll along the second cover 41 toward the surface of the second opening 22 and fall into the crucible 200 at the outer circumferential edge of the second cover 41, so that the area where the one kind of raw material in the first passage 11 falls into the molten soup 210 along the first cover 31 is the same as the area where the second kind of raw material in the second passage 21 falls into the molten soup 210 along the second cover 41. From this, through releasing one kind of raw materials earlier afterwards releasing two kinds of raw materials, make the one kind of raw materials that fall into earlier in the melt 210 can form the buffer layer on melt 210, make follow-up two kinds of raw materials that fall can fall on the buffer layer that has formed on melt 210, thereby can reduce the melt 210 that two kinds of raw materials and melt 210 striking caused to splash and the liquid level is undulant better, and then can prevent that melt 210 from splashing and causing the waste and the interference of raw materials on other parts, and do benefit to and promote single crystal growth device's reliability. In addition, the liquid level 211 of the molten liquid can be quickly restored to a relatively calm state, so that the influence of the fluctuation of the liquid level 211 of the molten liquid on the growth of the single crystal is reduced.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims (13)

1. A feed assembly for a single crystal growing apparatus, the feed assembly adapted to replenish a feedstock material within a crucible of the single crystal growing apparatus, the feed assembly comprising:
the inner cylinder is internally provided with a first channel, one end of the inner cylinder facing the crucible is provided with a first opening communicated with the first channel, and the raw material in the first channel is suitable for falling into the crucible through the first opening;
the outer cylinder is sleeved on the outer peripheral side of the inner cylinder, a second channel and a second opening which faces the crucible and is communicated with the second channel are defined between the inner cylinder and the outer cylinder, and raw materials in the second channel are suitable for falling into the crucible through the second opening;
a first switching mechanism adapted to open or close the first opening;
a second switching mechanism adapted to open or close the second opening.
2. The feed assembly for a single crystal growing apparatus of claim 1, wherein the first switching mechanism comprises:
the first cover body is movably arranged on one side of the inner cylinder close to the first opening;
the first driving piece is suitable for driving the first cover body to be far away from or close to the inner barrel so as to open or close the first opening.
3. The feed assembly for a single crystal growing apparatus of claim 2, wherein the first cover comprises:
the main body part is provided with a plurality of embedded grooves which are arranged at intervals along the circumferential direction;
the embedding portion, the embedding portion with the same and the one-to-one of quantity of embedding recess, the embedding portion movably is located between extended position and withdrawal position in the embedding recess extended position on the circumferential direction of inner tube, adjacent two the part of embedding portion overlaps.
4. The feed assembly for a single crystal growing apparatus of claim 3, wherein the embedding recess comprises: a first insertion groove and a second insertion groove that are layered in an axial direction of the main body,
the insertion portion includes: a first insertion portion movably disposed in the first insertion groove between an extended position and a retracted position, and a second insertion portion movably disposed in the second insertion groove between an extended position and a retracted position,
wherein a plurality of first embedding grooves are arranged along the circumferential direction of the main body part, a plurality of second embedding grooves are arranged along the circumferential direction of the main body part, and in the circumferential direction of the main body part, the plurality of second embedding grooves and the plurality of first embedding grooves are arranged in a staggered manner, the plurality of first embedding parts are arranged in a one-to-one correspondence manner, the plurality of first embedding parts and the plurality of first embedding grooves are arranged in a one-to-one correspondence manner, the plurality of second embedding parts are arranged in a one-to-one correspondence manner, and the plurality of second embedding parts and the plurality of second embedding grooves are arranged in a one-to-one correspondence manner,
and when the first embedding portion and the second embedding portion are both in the extended position, the adjacent first embedding portion and the second embedding portion partially overlap in the circumferential direction of the inner tube.
5. The feed assembly for a single crystal growing apparatus of claim 2, wherein the second switch mechanism comprises:
the second cover body is arranged on one side of the outer cylinder close to the second opening;
a second driving member adapted to drive one of the second cover and the outer cylinder to move relative to the other to open or close the second opening.
6. The feed assembly for a single crystal growing apparatus of claim 5, wherein the first lid and the second lid each extend obliquely downward in a direction radially outward of the inner cylinder.
7. The charging assembly for a single crystal growing apparatus of claim 6, wherein the angle of inclination of the first cover relative to horizontal is the same as the angle of inclination of the second cover relative to horizontal.
8. The charging assembly for a single crystal growing apparatus according to claim 6, wherein a peripheral edge of the first lid body is flush with a peripheral edge of the second lid body in a radial direction of the inner cylinder.
9. The feed assembly for a single crystal growing apparatus of claim 8, wherein the first cover is inclined at a smaller angle relative to the horizontal than the second cover.
10. A feed assembly for a single crystal growing apparatus as recited in claim 1, further comprising: a plurality of agitation bars disposed within the first channel and the second channel, the agitation bars adapted to agitate the material within the first channel and the second channel;
the extension direction of the stirring rod is vertical to the axis of the inner cylinder or the stirring rod extends downwards in an inclined mode; and/or the stirring rod is provided with a plurality of stirring rods at intervals along the vertical direction, in the axial direction of the inner cylinder, the distance between the lower edge of the stirring rod positioned at the lowest side and the top wall of the inner cylinder is a, the axial dimension of the inner cylinder is b, and the requirements are that: a/b is less than 0.5.
11. A single crystal growing apparatus, comprising: the charging assembly according to any one of claims 1-10.
12. A charging method for a single crystal growing apparatus, characterized in that the single crystal growing apparatus is the single crystal growing apparatus according to claim 11, the charging method comprising:
adding feedstock into the first and second channels;
and controlling the first switch mechanism to open the first opening to throw the raw material in the first channel into the crucible, and then controlling the second switch mechanism to open the second opening to throw the raw material in the second channel into the crucible.
13. The charging method as defined in claim 12, wherein said first opening and closing mechanism includes a first lid and a first driving member provided on a side of said inner cylinder adjacent to said first opening, said second opening and closing mechanism includes a second lid and a second driving member provided on a side of said outer cylinder adjacent to said second opening and located radially outside said first opening, said first lid and said second lid each extend obliquely downward in a direction toward radially outside said inner cylinder, an outer peripheral edge of said first lid is flush with an outer peripheral edge of said second lid, and said charging of the raw material into said first passage and said second passage includes:
adding a first type of raw material into the first channel, and adding a second type of raw material into the second channel, wherein the diameter of the first type of raw material is smaller than that of the second type of raw material.
CN202210348157.8A 2022-03-31 2022-03-31 Feeding assembly, single crystal growing device with same and feeding method Pending CN114561690A (en)

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TW112102110A TW202325905A (en) 2022-03-31 2023-01-17 Feeding assembly and single crystal growth device having the same, and feeding method

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115142139A (en) * 2022-09-01 2022-10-04 浙江求是半导体设备有限公司 Material system is sent again to single crystal growing furnace

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115142139A (en) * 2022-09-01 2022-10-04 浙江求是半导体设备有限公司 Material system is sent again to single crystal growing furnace
CN115142139B (en) * 2022-09-01 2022-11-22 浙江求是半导体设备有限公司 Single crystal growing furnace material system of throwing again

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