CN114526670A - White light interferometry device based on reference reflector differential detection - Google Patents
White light interferometry device based on reference reflector differential detection Download PDFInfo
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- 238000005259 measurement Methods 0.000 claims description 9
- 230000005484 gravity Effects 0.000 claims description 2
- 230000010363 phase shift Effects 0.000 claims description 2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02027—Two or more interferometric channels or interferometers
- G01B9/02028—Two or more reference or object arms in one interferometer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
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- G01B9/02056—Passive reduction of errors
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Abstract
The invention discloses a white light interferometry device based on reference reflector differential detection.A light emitted by a white light source passes through an iris diaphragm and a first lens group and then reaches a beam splitting prism group; the beam splitting prism group splits incident light into two beams, one beam reaches the sample stage after passing through the fifth lens group, and the other beam is split into two paths of p-polarized light and s-polarized light after passing through the second polarization beam splitting prism; the p-polarized light and the s-polarized light are reflected and then emitted from the second polarization beam splitter prism, and generate interference with the light reflected from the sample stage at the beam splitter prism group; the interference light is divided into two paths of p-polarized light and s-polarized light after reaching the first polarization beam splitting prism from the beam splitting prism group, and two groups of interference images are obtained; and obtaining a zero optical path difference point by using the difference value of the two groups of interference images. The device enhances the anti-noise capability of the white light interferometer light path and improves the precision of the three-dimensional shape recovery algorithm.
Description
Technical Field
The invention relates to the technical field of white light interference, in particular to a white light interference measuring device based on reference reflector differential detection.
Background
The ultra-precision processing technology refers to the processing technology with submicron and nanometer precision, the submicron processing surface roughness Ra is between 0.005 mu m and 0.03 mu m, and the nanometer processing surface roughness Ra is less than or equal to 0.005 mu m. With the progress and development of electronics, machinery, materials, optics and other industries, the requirement of part processing is continuously increased, the requirement on the detection of the three-dimensional shape of a processed surface is increasingly increased, the high-precision detection of the three-dimensional shape can find the problem of the surface of a part in the processing process, help to improve the processing technology, improve the processing quality of the surface of the part and finally determine whether the part is qualified or not.
Common surface detection methods include mechanical probe methods, scanning tunneling microscopes, scanning electron microscopes, atomic force microscopes, optical probe methods, optical triangulation methods, optical microscopic interferometry, and the like. The white light interference method is widely applied due to the characteristics of high measurement precision, wide range, high speed, wide range, non-contact with a sample, capability of measuring a discontinuous surface and the like. The development history of the white light interference technology is long, and at present, three structural systems are mainly provided, namely Michelson type, Linnk type and Mirau type.
Fig. 1 shows a schematic structural diagram of a Linnk type microscopic interference system in the prior art, which is a commonly used microscopic interference system, incident light is incident from the left side and is divided into two beams by a beam splitter prism, one beam irradiates a sample after being focused by a microscopic objective, reflected light becomes parallel light after passing through the microscopic objective, the other beam is reflected by a reference reflector after passing through the microscopic objective, the reflected light interferes with the reflected light of the sample after passing through the microscopic objective, and the interference light forms an image on a CCD after passing through a light collector. When the system is used, the system is easily influenced by environmental interference and noise, and when the noise is large, the three-dimensional shape measurement precision can be greatly reduced.
Disclosure of Invention
The invention aims to provide a white light interference measuring device based on reference reflector differential detection, which eliminates direct current components by subtracting two interference signals by adding one interference signal, and simultaneously removes the same noise in the two interference signals, thereby enhancing the noise resistance of a white light interferometer light path and improving the precision of a three-dimensional morphology recovery algorithm.
The purpose of the invention is realized by the following technical scheme:
a white light interferometry device based on reference reflector differential detection comprises a white light source, an iris diaphragm, a first lens group, a beam splitter prism group, a first CCD camera, a second lens group, a first polarization beam splitter prism, a third lens group, a second CCD camera, a second polarization beam splitter prism, a fourth lens group, a first reference reflector, a fifth lens group, a sample stage, a sixth lens group and a second reference reflector, wherein:
light emitted by the white light source passes through the variable diaphragm and the first lens group and then reaches the beam splitting prism group;
the beam splitting prism group splits incident light into two beams, one beam reaches the sample stage after passing through the fifth lens group, and the other beam is split into two paths of p-polarized light and s-polarized light after passing through the second polarization beam splitting prism;
after passing through the fourth lens group, the p polarized light is reflected by the first reference reflector; the s-polarized light is reflected by a second reference reflector after passing through a sixth lens group;
the p-polarized light and the s-polarized light are reflected and then emitted from the second polarization beam splitter prism, and generate interference with the light reflected from the sample stage at the beam splitter prism group;
interference light reaches the first polarization beam splitter prism from the beam splitter prism group and then is divided into two paths of p-polarized light and s-polarized light, and the p-polarized light is collected into an interference image by the second CCD camera after passing through the third lens group; the s-polarized light is collected into an interference image by the first CCD camera after passing through the second lens group;
obtaining a zero optical path difference point by using the difference value of the acquired p-polarized light and s-polarized light interference images, and realizing the three-dimensional shape measurement of the sample to be measured placed on the sample stage;
the sample stage, the first reference reflector and the second reference reflector are all provided with high-precision piezoelectric ceramic drivers; and moving the sample to be measured at equal intervals in the measuring process by using the piezoelectric ceramic driver of the sample stage to realize mechanical phase shifting.
According to the technical scheme provided by the invention, the device eliminates direct current components by subtracting two interference signals by adding one interference signal, and simultaneously removes the same noise in the two interference signals, so that the noise resistance of the light path of the white light interferometer is enhanced, and the precision of the three-dimensional morphology recovery algorithm is improved.
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In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a Linnk type micro-interference system of the prior art;
FIG. 2 is a schematic structural diagram of a white light interferometry device based on reference mirror differential detection according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of interference signals collected according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, not all embodiments, and this does not limit the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
Fig. 2 is a schematic structural diagram of a white light interferometry device based on reference mirror differential detection according to an embodiment of the present invention, where the device includes a white light source 1, an iris 2, a first lens group 3, a beam splitter group 4, a first CCD camera 5, a second lens group 6, a first polarization beam splitter 7, a third lens group 8, a second CCD camera 9, a second polarization beam splitter 10, a fourth lens group 11, a first reference mirror 12, a fifth lens group 13, a sample stage 14, a sixth lens group 15, and a second reference mirror 16, where:
light emitted by the white light source 1 passes through the variable diaphragm 2 and the first lens group 3 and then reaches the beam splitting prism group 4;
the beam splitting prism group 4 splits incident light into two beams, one beam reaches the sample stage 14 after passing through the fifth lens group 13, and the other beam is split into two paths of p-polarized light and s-polarized light after passing through the second polarization beam splitting prism 10;
wherein, the p polarized light is reflected by the first reference reflector 12 after passing through the fourth lens group 11; the s-polarized light is reflected by the second reference mirror 16 after passing through the sixth lens group 15;
the p-polarized light and the s-polarized light are reflected and then emitted from the second polarization beam splitter prism 10, and generate interference with the light reflected from the sample stage 14 at the beam splitter prism group 4;
interference light reaches the first polarization beam splitter 7 from the beam splitter group 4 and then is split into two paths of p-polarized light and s-polarized light, and the p-polarized light is collected into an interference image by the second CCD camera 9 after passing through the third lens group 8; the s-polarized light is collected to an interference image by the first CCD camera 5 after passing through the second lens group 6;
obtaining a zero optical path difference point by using the difference value of the acquired p-polarized light and s-polarized light interference images, and realizing the three-dimensional shape measurement of the sample to be measured placed on the sample stage 14;
the sample stage 14, the first reference reflector 12 and the second reference reflector 16 are all provided with high-precision piezoelectric ceramic drivers; and the piezoelectric ceramic driver of the sample stage 14 is utilized to move the sample to be measured at equal intervals in the measuring process, so that the mechanical phase shifting is realized.
In the specific implementation, the difference value of the collected p-polarized light and s-polarized light interference image is used to obtain a zero optical path difference point, so as to implement the three-dimensional shape measurement of the sample to be measured placed on the sample stage, and the specific process is as follows:
firstly, placing a sample to be detected on a sample table 14;
a piezoelectric ceramic driver is utilized to drive the sample stage 14 to move, and p-polarized light and s-polarized light interference images are collected by the second CCD camera 9 and the first CCD camera 5 in the process of scanning a sample to be detected at equal intervals;
subtracting interference images of the p-polarized light and the s-polarized light to obtain a difference signal, performing linear fitting on values of five points near the position of the median point of the difference signal by using a least square method, and calculating a position value of a zero-crossing point of a fitting linear, wherein the value is a zero optical path difference point of differential white light interference;
and calculating the actual height of the sample to be measured according to the value of the zero optical path difference point, thereby realizing the measurement of the three-dimensional shape of the sample to be measured.
In addition, the first reference mirror 12 and the second reference mirror 16 need to have a slight optical path difference, that is, a slight difference in distance from the two polarized light emitting end surfaces of the second polarization splitting prism 10 to the two reference mirrors, specifically:
in order to realize the reference reflector differential detection, firstly, a calibration sample is placed on a sample table 14, light from a second polarization beam splitter prism 10 to a second reference reflector 16 is shielded, the calibration sample is scanned to obtain a group of interference images, one point in the interference images is taken, and the position of a zero optical path difference point in the scanning process is calculated;
then, shielding the light from the second polarization beam splitter prism 10 to the first reference reflector 12, returning the sample stage 14 to the original scanning position, scanning the calibration sample to obtain another group of interference images, and calculating the position of a zero optical path difference point in the scanning process for the same point of the interference images;
calculating the difference between the first reference reflector 12 and the second reference reflector 16 from the second polarization splitting prism 10 according to the difference between the positions of the two zero optical path difference points;
then, a piezoelectric ceramic driver is utilized to move the first reference reflector 12 and the second reference reflector 16, so that the distances between the two reference reflectors and the second polarization beam splitter prism 10 are the same;
according to the calculated differential distance, a piezoelectric ceramic driver is used to enable the first reference reflector 12 to be away from the second polarization beam splitter prism 10 by a certain distance, and the second reference reflector 16 to be close to the second polarization beam splitter prism 10 by a certain distance, so that differential white light interference can be realized.
In the specific implementation, the differential distance between the first reference reflector 12 and the second reference reflector 16 has a certain influence on the three-dimensional shape recovery algorithm of the differential white light interference, and in the process of scanning the sample at equal intervals, the camera acquires two groups of interference signals of p polarization and s polarization, and subtracts the two interference signals to obtain a group of difference signals; the magnitude of the differential distance will affect the magnitude of the slope of the difference signal; when the slope of the difference signal is maximum, the accuracy of solving the zero optical path difference point is highest. The reference mirror differential distance at which the slope of the difference signal is maximum is therefore taken as the optimum differential distance for the first reference mirror 12 and the second reference mirror 16; wherein the difference signal is the difference of the collected p-polarized light and s-polarized light interference images.
It is noted that those skilled in the art will recognize that embodiments of the present invention are not described in detail herein.
For example, as shown in fig. 3, which is a schematic diagram of interference signals collected by the embodiment of the present invention, two sets of interference signals, p-polarization and s-polarization, are collected during the process of scanning a sample at equal intervals, as shown in fig. 3, a dotted line is a p-polarization signal, a dash-dot line is an s-polarization signal, an abscissa in the diagram is the number of steps of sampling at equal intervals, and an ordinate is a sampled light intensity value. And subtracting the light intensity values of the two interference signals to obtain a group of interference difference signals, as shown by a solid line in fig. 3.
In other three-dimensional shape recovery algorithms in the prior art, a zero optical path difference point is solved on an interference signal by an extreme value method, a gravity center method, a white light phase shift method and other methods, which are all based on a group of interference signals, and the solved zero optical path difference point is positioned on a curve; in the embodiment of the invention, one path of interference signal is added, so that the direct current component is eliminated by subtracting the two paths of interference signals, the same noise in the two paths of interference signals is removed, and a plurality of zero points are constructed, wherein one zero point is a zero optical path difference point, thereby improving the precision of the three-dimensional morphology recovery algorithm.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims. The information disclosed in this background section is only for enhancement of understanding of the general background of the invention and should not be taken as an acknowledgement or any form of suggestion that this information forms the prior art already known to a person skilled in the art.
Claims (5)
1. The white light interferometry device based on reference reflector differential detection is characterized by comprising a white light source, an iris diaphragm, a first lens group, a beam splitting prism group, a first CCD camera, a second lens group, a first polarization beam splitting prism, a third lens group, a second CCD camera, a second polarization beam splitting prism, a fourth lens group, a first reference reflector, a fifth lens group, a sample stage, a sixth lens group and a second reference reflector, wherein:
light emitted by the white light source passes through the variable diaphragm and the first lens group and then reaches the beam splitting prism group;
the beam splitting prism group splits incident light into two beams, one beam reaches the sample stage after passing through the fifth lens group, and the other beam is split into two paths of p-polarized light and s-polarized light after passing through the second polarization beam splitting prism;
after passing through the fourth lens group, the p polarized light is reflected by the first reference reflector; the s-polarized light is reflected by a second reference reflector after passing through a sixth lens group;
the p-polarized light and the s-polarized light are reflected and then emitted from the second polarization beam splitter prism, and generate interference with the light reflected from the sample stage at the beam splitter prism group;
interference light reaches the first polarization beam splitter prism from the beam splitter prism group and then is divided into two paths of p-polarized light and s-polarized light, and the p-polarized light is collected into an interference image by the second CCD camera after passing through the third lens group; the s-polarized light is collected into an interference image by the first CCD camera after passing through the second lens group;
obtaining a zero optical path difference point by using the difference value of the acquired p-polarized light and s-polarized light interference images, and realizing the three-dimensional shape measurement of a sample to be measured placed on a sample stage;
the sample stage, the first reference reflector and the second reference reflector are all provided with high-precision piezoelectric ceramic drivers; and the piezoelectric ceramic driver of the sample stage is utilized to move the sample to be measured at equal intervals in the measuring process, so that the mechanical phase shifting is realized.
2. The white light interferometry device based on reference mirror differential detection according to claim 1, wherein the difference between the collected p-polarized light and s-polarized light interference images is used to obtain a zero optical path difference point, so as to measure the three-dimensional topography of a sample to be measured placed on the sample stage, and the specific process is as follows:
firstly, placing a sample to be detected on a sample table;
the method comprises the following steps that a piezoelectric ceramic driver is utilized to drive a sample stage to move, and p-polarized light and s-polarized light interference images are collected by a second CCD camera and a first CCD camera in the process of scanning a sample to be detected at equal intervals;
subtracting interference images of the p-polarized light and the s-polarized light to obtain a difference signal, performing linear fitting on values of five points near the position of the median point of the difference signal by using a least square method, and calculating a position value of a zero-crossing point of a fitting linear, wherein the value is a zero optical path difference point of differential white light interference;
and calculating the actual height of the sample to be measured according to the value of the zero optical path difference point, thereby realizing the measurement of the three-dimensional shape of the sample to be measured.
3. The white light interferometry device based on reference mirror differential detection according to claim 1, wherein the first reference mirror and the second reference mirror need to have a slight optical path difference, i.e. a slight difference exists between the distances from the two polarized light emitting end surfaces of the second polarization splitting prism to the two reference mirrors respectively, specifically:
firstly, a calibration sample is placed on a sample table, light from a second polarization beam splitter prism to a second reference reflector is shielded, the calibration sample is scanned to obtain a group of interference images, one point in the interference images is taken, and the position of a zero optical path difference point in the scanning process is calculated;
then shielding the light from the second polarization beam splitter prism to the first reference reflector, returning the sample stage to the original scanning position, scanning the calibration sample to obtain another group of interference images, and calculating the position of a zero optical path difference point in the scanning process for the same point of the interference images;
calculating the difference between the first reference reflector and the second polarization beam splitter prism according to the difference between the positions of the two zero optical path difference points;
then, the first reference reflector and the second reference reflector are moved by utilizing a piezoelectric ceramic driver, so that the distances between the two reference reflectors and the second polarization beam splitter prism are the same;
and according to the calculated differential distance, a piezoelectric ceramic driver is used, so that the first reference reflector is far away from the second polarization beam splitter prism by a certain distance, and the second reference reflector is close to the second polarization beam splitter prism by a certain distance, thereby realizing the differential white light interference.
4. The white light interferometry device based on reference mirror differential detection according to claim 1, wherein the reference mirror differential distance at which the slope of the difference signal is maximum is used as the optimal differential distance between the first reference mirror and the second reference mirror;
wherein the difference signal is the difference of the collected p-polarized light and s-polarized light interference images.
5. The polarization camera differential white light interferometry device of claim 1, wherein compared with other interferometers which solve a zero optical path difference point for a single-path interference signal by an extremum method, a gravity center method, a white light phase shift method and other methods, the polarization camera differential white light interferometry device uses two CCD cameras and a polarization beam splitter prism, adds a path of interference signal, and uses two paths of signals to solve. Since the p-light has the same optical path as most of the s-light, the noise caused by the air flow and vibration is almost the same. Therefore, the direct current component is eliminated by subtracting the two interference signals, the same noise in the two interference signals is removed, a plurality of zero points are constructed, and one of the zero points is a zero optical path difference point, so that the noise resistance and the precision of the three-dimensional topography measurement are improved.
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| 王生怀;陈育荣;谢铁邦;: "一种新型垂直扫描白光显微干涉测量仪", no. 01, pages 81 - 84 * |
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| CN114526670B (en) | 2024-04-02 |
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