CN114526419B - Single-degree-of-freedom deflection platform - Google Patents
Single-degree-of-freedom deflection platform Download PDFInfo
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- CN114526419B CN114526419B CN202210031681.2A CN202210031681A CN114526419B CN 114526419 B CN114526419 B CN 114526419B CN 202210031681 A CN202210031681 A CN 202210031681A CN 114526419 B CN114526419 B CN 114526419B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/06—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting
- F16M11/12—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting in more than one direction
- F16M11/121—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting in more than one direction constituted of several dependent joints
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/18—Heads with mechanism for moving the apparatus relatively to the stand
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/70—Wind energy
- Y02E10/72—Wind turbines with rotation axis in wind direction
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Abstract
The invention relates to a single-degree-of-freedom deflection platform, which comprises a driving mechanism and a deflection mechanism which are connected through a pre-tightening mechanism, wherein the deflection mechanism comprises a top plate and a bottom plate which are arranged in parallel; the two flexible units are provided with at least two groups, each group of flexible amplifying unit and flexible reducing unit comprises two groups of elastic beams which are obliquely arranged to form an opening and a middle beam which is longitudinally arranged in the middle of the opening, and the two elastic beams are connected with the corresponding driving fixing units; the two driving fixing units are driven by the driving mechanism to be away from or close to each other, the middle beam of the flexible amplifying unit pushes or pulls the top plate through the two elastic beams, and meanwhile, the middle beam of the flexible reducing unit pulls or pushes the top plate, so that the deflection motion of the top plate is realized.
Description
Technical Field
The invention relates to the technical field of machining, in particular to a single-degree-of-freedom deflection platform.
Background
The statements in this section merely provide background information related to the present disclosure and may not constitute prior art.
The high-precision deflection platform is a common important part in a modern precision motion positioning platform, and is widely applied to a plurality of fields of image processing, scanning and detecting microscopes, optical capturing, laser scanning, light beam stabilization and the like.
The existing high-precision deflection mechanism has many defects, for example, the overall structure is not compact enough, so that the volume is large, and more installation space is occupied; the design of a notch-type flexible hinge is adopted for realizing the deflection motion, the stress concentration phenomenon is obvious, and the damage is easy to cause; the deflection angle of the platform is small, and the requirement for large-angle deflection motion is difficult to meet; the whole structure adopts a material reduction manufacturing mode, and the processing is difficult.
Disclosure of Invention
In order to solve the technical problems in the background art, the invention provides a single-degree-of-freedom deflection platform, which adopts an amplifying mechanism and a reducing mechanism which are arranged on two sides of piezoelectric ceramics in parallel, and the deflection platform is arranged right above a structure, so that the structure is spatially distributed in the peripheral space of the piezoelectric ceramics, thereby the whole structure is more compact, and the deflection angle is larger due to a push-pull type movement mode formed by a flexible amplifying unit and a flexible reducing unit.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides a single-degree-of-freedom deflection platform, which comprises a driving mechanism and a deflection mechanism which are connected through a pre-tightening mechanism, wherein the deflection mechanism comprises a top plate and a bottom plate which are arranged in parallel;
the flexible amplifying unit and the flexible reducing unit are provided with at least two groups, each group of flexible amplifying unit and each group of flexible reducing unit comprise two groups of elastic beams which are obliquely arranged to form an opening and a middle beam which is longitudinally arranged in the middle of the opening, and the two elastic beams are connected with the corresponding driving fixing units;
the two driving fixing units are driven by the driving mechanism to be away from or close to each other, the middle beam of the flexible amplifying unit pushes or pulls the top plate through the two elastic beams, and meanwhile, the middle beam of the flexible reducing unit pulls or pushes the top plate, so that the deflection motion of the top plate is realized.
One end of the vertically arranged middle beam is connected with the top plate, and the other end of the vertically arranged middle beam is connected with the bottom end of the V-shaped elastic beam.
The other group of flexible amplification units are provided with two obliquely arranged elastic beams, the opening formed by the elastic beams faces the bottom plate and forms an inverted V shape, one end of the vertically arranged middle beam is connected with the bottom plate, and the other end of the vertically arranged middle beam is connected with the bottom end of the inverted V-shaped elastic beam.
One end of the middle beam which is vertically arranged is connected with the top plate, and the other end of the middle beam is connected with the bottom end of the inverted V-shaped elastic beam.
The other group of flexible reducing units is provided with two obliquely arranged elastic beams, the opening formed by the elastic beams faces the top plate and forms a V shape, one end of the vertically arranged middle beam is connected with the bottom plate, and the other end of the vertically arranged middle beam is connected with the bottom end of the V-shaped elastic beam.
The flexible magnification unit and the flexible reduction unit move simultaneously.
The flexible amplifying unit and the flexible reducing unit are respectively positioned at two opposite sides of the driving mechanism.
The driving mechanism is a piezoelectric ceramic driver, generates displacement in the horizontal axial direction, and acts on the flexible amplifying unit and the flexible reducing unit through the driving fixing unit.
The bottom plate is provided with a lower mode adjusting unit, the lower mode adjusting unit is respectively connected with the bottom plate and the driving fixing unit, and the lower mode adjusting unit is used for improving the natural frequency of the deflection platform.
The top plate is provided with an upper mode adjusting unit, the upper mode adjusting unit is respectively connected with the top plate and the driving fixing unit, and the upper mode adjusting unit is used for improving the natural frequency of the deflection platform.
Compared with the prior art, the above one or more technical schemes have the following beneficial effects:
1. the flexible amplifying mechanism and the flexible reducing mechanism are arranged on two sides of the driving mechanism, the deflection platform is arranged right above the driving mechanism, and the deflection platform is spatially distributed in the peripheral space of the driving mechanism, so that the whole structure is more compact, and the deflection angle is larger by using a push-pull type movement mode formed by the flexible amplifying unit and the flexible reducing unit.
2. The flexible amplifying unit and the flexible reducing unit are distributed in a staggered mode through space, the area mutation of the traditional notch type flexible hinge is avoided through the integral structure, and stress concentration is avoided.
3. The flexible amplifying unit and the flexible reducing unit respectively convert the displacement of the driving mechanism in the horizontal direction into the ascending or descending displacement of the top plate in the vertical direction, so that the top plate moves, and the large-angle deflection motion of the top plate is realized.
4. All structures are uniformly distributed in six directions of the space of the driving mechanism, so that the overall size of the deflection platform is greatly reduced, the structure is more compact, and the requirement of the deflection platform on the space is reduced.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate exemplary embodiments of the invention and together with the description serve to explain the invention and not to limit the invention.
FIG. 1 is a schematic diagram of an overall structure of a yaw platform according to one or more embodiments of the present invention;
FIG. 2 is a schematic structural diagram of a yaw mechanism in a yaw platform according to one or more embodiments of the present invention;
FIG. 3 is a schematic diagram illustrating a side view configuration of a yaw mechanism in a yaw platform according to one or more embodiments of the present invention;
FIG. 4 is a schematic cross-sectional view of a yaw mechanism in a yaw platform according to one or more embodiments of the present invention;
in the figure: 1-a pre-tightening mechanism, 101-a pre-tightening nut, 102-a pre-tightening screw, 2-a driving mechanism, 3-a deflection mechanism, 301-a bottom plate, 302-a lower mode adjusting unit, 303-an upper mode adjusting unit, 304-a top plate, 305-a flexible amplifying unit, 306-a driving fixing unit and 307-a flexible reducing unit.
Detailed Description
The invention is further described with reference to the following figures and examples.
It is to be understood that the following detailed description is exemplary and is intended to provide further explanation of the invention as claimed. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.
As described in the background art, the existing high-precision deflection mechanism has many disadvantages, for example, the overall structure is not compact enough, which results in a larger volume and occupies more installation space; the design of a notch-type flexible hinge is adopted for realizing the deflection motion, the stress concentration phenomenon is obvious, and the damage is easy to cause; the deflection angle of the platform is small, and the requirement for large-angle deflection motion is difficult to meet; the whole structure adopts a material reduction manufacturing mode, and the processing is difficult.
Therefore, the following embodiment provides a single-degree-of-freedom deflection platform, an amplifying mechanism and a reducing mechanism are arranged on two sides of piezoelectric ceramics in parallel, and the deflection platform is arranged right above a structure to be spatially distributed in the peripheral space of the piezoelectric ceramics, so that the whole structure is more compact, and the deflection angle is larger due to a push-pull type movement mode formed by a flexible amplifying unit and a flexible reducing unit.
The first embodiment is as follows:
as shown in fig. 1 to 4, a single degree of freedom deflection platform includes a driving mechanism 2 and a deflection mechanism 3 connected by a pre-tightening mechanism 1, the deflection mechanism 3 includes a top plate 304 and a bottom plate 301 arranged in parallel, the driving mechanism 2 is located in a space between the top plate 304 and the bottom plate 301, two ends of the driving mechanism 2 are connected with driving fixing units 306, two sides of the driving mechanism 2 are provided with a flexible amplifying unit 305 and a flexible reducing unit 307, and the two flexible units are respectively located between the two groups of driving fixing units 306;
the flexible amplifying unit 305 and the flexible reducing unit 307 are provided with at least two groups, each group of flexible amplifying unit 305 and flexible reducing unit 307 comprises two groups of elastic beams which are obliquely arranged to form an opening and a middle beam which is longitudinally arranged in the middle of the opening, and the two elastic beams are connected with the corresponding driving and fixing units 306;
the driving mechanism 2 drives the two driving fixing units 306 to move away from or close to each other, so that the middle beam of the flexible amplifying unit 305 pushes or pulls the top plate 304, and the middle beam of the flexible reducing unit 307 pulls or pushes the top plate 304, thereby realizing the deflection motion of the top plate 304.
The flexible amplifying unit 305 and the flexible reducing unit 307 are respectively arranged in pairs and respectively located at two sides of the driving mechanism 2, in this embodiment, the driving mechanism 2 is a piezoelectric ceramic driver, and the piezoelectric ceramic driver can generate mechanical deformation under the action of an electric field.
In this embodiment, the top plate 304 and the bottom plate 301 parallel to each other and the drive fixing units 306 provided at both ends form a structure with a cavity inside, and the drive mechanism 2 is placed in the cavity inside. By adjusting the voltage of the drive mechanism 2, a displacement in the horizontal axial direction can be generated. The displacement acts on the flexible amplifying unit 305 and the flexible reducing unit 307 through the driving fixing unit 306, the two units convert the horizontal axial displacement into the displacement in the vertical direction, and act on the two sides of the top plate 304 respectively to generate the effect of pushing force and pulling force on the two sides of the top plate 304 respectively, so that the deflection motion of the top plate 304 is realized, and finally the deflection is realized.
As shown in fig. 2, the flexible amplifying unit 305 has two sets, in this embodiment, the two sets of flexible amplifying units 305 are both located at the front side of the top plate 304 (taking the view of fig. 2 as an example);
one set of the flexible amplifying units 305 has two elastic beams obliquely arranged, an opening of the elastic beams faces the top plate 304, the middle beam is vertically arranged, one end of the middle beam is connected with the top plate 304, the other end of the middle beam is connected with the two elastic beams, the two elastic beams form a V shape, and when the driving unit 2 generates displacement in the horizontal axial direction, taking the two driving fixing units 306 away from each other as an example, the two elastic beams forming the opening push the middle beam to jack up one side of the top plate 304 under the action of the movement of the two elastic beams away from each other;
and the other set of flexible amplification units 305 has two obliquely arranged elastic beams, the opening of which is towards the bottom plate 301, the middle beam is vertically arranged, one end of the middle beam is connected with the bottom plate 301, the other end of the middle beam is connected with the two elastic beams, the two elastic beams form an inverted V shape, when the driving unit 2 generates displacement in the horizontal axial direction, taking the example that the two driving fixing units 306 are away from each other, the middle beam pushes the bottom plate 301 under the action of the movement of the two elastic beams forming the opening, and the middle beam of the previous set of flexible amplification units 305 is matched, so that one side of the top plate 304 is jacked up to be away from the bottom plate 301.
As shown in fig. 3, the flexible reducing unit 307 has two sets, in this embodiment, the two sets of flexible reducing units 307 are both located at the rear side of the top plate 304 (the side view of fig. 3 is the rear side of fig. 2, that is, the flexible enlarging unit 305 and the flexible reducing unit 307 are respectively located at two opposite sides of the top plate 304);
one set of flexible reducing units 307 has two obliquely arranged elastic beams, the opening of the elastic beams faces the bottom plate 301, the middle beam is vertically arranged, one end of the middle beam is connected with the top plate 304, the other end of the middle beam is connected with the two elastic beams, the two elastic beams form an inverted V shape, when the driving unit 2 generates displacement in the horizontal axial direction, taking the example that the two driving fixing units 306 are away from each other, the middle beam pulls one side of the bottom plate 301 under the action of the movement of the two elastic beams forming the opening away from each other;
and the other set of flexible reducing units 307 has two obliquely arranged elastic beams, the opening of which faces the top plate 304, the middle beam is vertically arranged, one end of the middle beam is connected with the bottom plate 301, the other end of the middle beam is connected with the two elastic beams, the two elastic beams form a V shape, when the driving unit 2 generates displacement in the horizontal axial direction, taking the example that the two driving fixing units 306 are away from each other, the two elastic beams forming the opening pull one side of the bottom plate 301 under the action of the movement of the two elastic beams away from each other, and the middle beam of the previous set of flexible reducing units 307 is matched to pull one side of the top plate 304 towards the bottom plate 301.
The flexible amplifying unit 305 and the flexible reducing unit 307 move simultaneously, when the driving mechanism 2 drives the two driving fixing units 306 to move away from or close to each other, the middle beam of the flexible amplifying unit 305 pushes or pulls the top plate 304, meanwhile, the middle beam of the flexible reducing unit 307 pulls or pushes the top plate 304, and the moving directions of the middle beams of the two flexible units are opposite, so that the deflection movement of the top plate 304 is realized.
As shown in fig. 1 and 4, the pretensioning mechanism 1 in this embodiment is in the form of a combination of a flat-end clinch screw 102 and a thin hexagonal nut 101, which is placed in a groove of a driving fixing unit 306 in the integrated yaw mechanism 3, and the driving mechanism 2 is fixed and pretensioned by the screw. The driving mechanism 2 is a piezoelectric ceramic driver.
In this embodiment, the driving mechanism enters the middle of the integrated deflection mechanism 3 through the space in the middle of the bottom plate 301, and is pre-tightened by the pre-tightening mechanisms 1 at the left and right ends. The bottom plate is provided with four screw through holes for fixing the whole structure.
In this embodiment, the flexible reducing unit 307 and the flexible enlarging unit 305 are respectively disposed on the left and right sides of the driving mechanism 2, each flexible unit exists in a pair, is disposed on one side, and the size of the beam in the flexible unit is uniform. The output end of the flexible unit is connected to the top plate and the bottom plate, respectively, and both ends are connected to the driving fixing unit 306. Under the driving acting force of the driving mechanism 2, the expansion deformation in the vertical direction of the flexible amplifying unit 305 and the contraction deformation in the vertical direction of the flexible reducing unit 307 are respectively realized through the deformation of the flexible units, so that the pushing and pulling effect on the top plate is realized, and the deflection motion of the top plate is driven.
In this embodiment, the lower mode adjustment unit 302 is connected to the bottom plate 301 and the drive fixing unit 306, respectively, and the upper mode adjustment unit 303 is connected to the top plate 304 and the drive fixing unit 306, respectively. The upper mode adjusting unit 302 and the lower mode adjusting unit 303 respectively adopt a reciprocating beam structure, and the natural frequency of the structure is improved under the condition that the influence on the output displacement is reduced as much as possible.
The structure utilizes the effect of pushing and pulling the flexible units at the left side and the right side of the plane of the top plate to realize a larger deflection angle; by utilizing the characteristic of spatial distribution, all the parts are structurally distributed around the piezoelectric ceramics, so that the whole structure is very compact; the motion structure is integrally formed, is manufactured in an additive manufacturing mode, has the characteristics of high rigidity, no friction and the like, and simplifies the manufacturing process; the flexible unit adopts a balanced size design, and the stress concentration phenomenon of the flexible hinge is avoided. Therefore, the integral deflection platform has the advantages of compact structure, large output stroke, small stress concentration phenomenon and the like, and can be applied to various fields.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. A single degree of freedom beat platform which characterized in that: the device comprises a driving mechanism and a deflection mechanism which are connected through a pre-tightening mechanism, wherein the deflection mechanism comprises a top plate and a bottom plate which are arranged in parallel, the driving mechanism is positioned in a space between the top plate and the bottom plate, two ends of the driving mechanism are connected with driving fixing units, two sides of the driving mechanism are provided with a flexible amplifying unit and a flexible reducing unit, and the two flexible units are respectively positioned between the two groups of driving fixing units;
the flexible amplifying unit and the flexible reducing unit are provided with at least two groups, each group of flexible amplifying unit and each group of flexible reducing unit comprise two groups of elastic beams which are obliquely arranged to form an opening and a middle beam which is longitudinally arranged in the middle of the opening, and the two elastic beams are connected with the corresponding driving fixing units;
the driving mechanism drives the two driving fixing units to be far away from or close to each other, the middle beam of the flexible amplifying unit pushes or pulls the top plate through the two elastic beams, and the middle beam of the flexible reducing unit pulls or pushes the top plate at the same time, so that the deflection motion of the top plate is realized;
one end of the middle beam which is vertically arranged is connected with the top plate, and the other end of the middle beam is connected with the bottom end of the inverted V-shaped elastic beam.
2. The single degree of freedom yaw platform of claim 1, characterized in that: one end of the vertically arranged middle beam is connected with the top plate, and the other end of the vertically arranged middle beam is connected with the bottom end of the V-shaped elastic beam.
3. The single degree of freedom yaw platform of claim 2, wherein: the other group of flexible amplification units are provided with two obliquely arranged elastic beams, the opening formed by the elastic beams faces the bottom plate and forms an inverted V shape, one end of the vertically arranged middle beam is connected with the bottom plate, and the other end of the vertically arranged middle beam is connected with the bottom end of the inverted V-shaped elastic beam.
4. The single degree of freedom yaw platform of claim 1, wherein: the other group of flexible reducing units is provided with two obliquely arranged elastic beams, the opening formed by the elastic beams faces the top plate and forms a V shape, one end of the vertically arranged middle beam is connected with the bottom plate, and the other end of the vertically arranged middle beam is connected with the bottom end of the V-shaped elastic beam.
5. The single degree of freedom yaw platform of claim 1, wherein: the flexible magnifying unit and the flexible reducing unit move simultaneously.
6. The single degree of freedom yaw platform of claim 1, wherein: the flexible amplifying unit and the flexible reducing unit are respectively positioned at two opposite sides of the driving mechanism.
7. The single degree of freedom yaw platform of claim 1, wherein: the driving mechanism is a piezoelectric ceramic driver, generates displacement in the horizontal axial direction, and acts on the flexible amplifying unit and the flexible reducing unit through the driving fixing unit.
8. The single degree of freedom yaw platform of claim 1, wherein the bottom plate is provided with a lower mode adjustment unit, the lower mode adjustment unit is connected with the bottom plate and the driving fixing unit respectively, and the lower mode adjustment unit is used for increasing the natural frequency of the yaw platform.
9. The single-degree-of-freedom yaw platform of claim 1, wherein the top plate is provided with an upper mode adjusting unit, the upper mode adjusting unit is respectively connected with the top plate and the driving fixing unit, and the upper mode adjusting unit is used for improving the natural frequency of the yaw platform.
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| CN202210031681.2A CN114526419B (en) | 2022-01-12 | 2022-01-12 | Single-degree-of-freedom deflection platform |
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| CN202210031681.2A CN114526419B (en) | 2022-01-12 | 2022-01-12 | Single-degree-of-freedom deflection platform |
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| CN114526419A (en) | 2022-05-24 |
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Effective date of registration: 20240208 Address after: Room 101, 1st Floor, Building 15, New Generation Information Technology Industrial Park, High tech Zone, Rizhao City, Shandong Province, 276801 Patentee after: Ami Precision Control Technology (Shandong) Co.,Ltd. Country or region after: China Address before: 250061, No. ten, No. 17923, Lixia District, Ji'nan City, Shandong Province Patentee before: SHANDONG University Country or region before: China |
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Effective date of registration: 20240228 Address after: Room 101, 1st Floor, Building 15, New Generation Information Technology Industrial Park, High tech Zone, Rizhao City, Shandong Province, 276801 Patentee after: Ami Precision Control Technology (Shandong) Co.,Ltd. Country or region after: China Address before: 250061, No. ten, No. 17923, Lixia District, Ji'nan City, Shandong Province Patentee before: SHANDONG University Country or region before: China |
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Correction item: transfer of patent right Correct: Revoke False: Transfer Number: 09-01 Volume: 40 |