CN114494460A - Calibration method, multi-camera probe device and flying probe tester - Google Patents

Calibration method, multi-camera probe device and flying probe tester Download PDF

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CN114494460A
CN114494460A CN202210088304.2A CN202210088304A CN114494460A CN 114494460 A CN114494460 A CN 114494460A CN 202210088304 A CN202210088304 A CN 202210088304A CN 114494460 A CN114494460 A CN 114494460A
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朱春雷
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Suzhou Grani Vision Technology Co ltd
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Abstract

The invention discloses a calibration method, a multi-camera probe device and a flying probe tester. According to the calibration method, the multi-camera probe device and the flying probe testing machine, the calibration process of the camera system is simple, the calibration precision is high, and after the calibration of the camera system is completed, one-key calibration of the probe can be realized without manually teaching an actual position for many times; after the probe is replaced, the position of the probe does not need to be manually taught again, and the actual position of the new probe in the system can be directly determined on the premise of previous calibration through visual shooting. The calibration method has the advantages that the calibration precision of the camera can reach below 0.7 mu m, and the calibration precision of the probe can reach below 3.5 mu m.

Description

Calibration method, multi-camera probe device and flying probe tester
Technical Field
The invention relates to the technical field of machine vision, in particular to a calibration method, a multi-camera probe device and a flying probe tester.
Background
The camera calibration refers to a process of shooting an image of a calibration plate by using a camera system, and calculating camera parameters by using three-dimensional coordinates of known characteristic points in the calibration plate and corresponding image coordinates on the image. In the field of machine vision and image measurement, the main equipment for completing measurement and positioning tasks is a camera, and in order to determine the correlation between the three-dimensional geometric position of a certain point on the surface of a space object and the corresponding point in an image, a geometric model for camera imaging needs to be established, and the parameters of the geometric model are accurately calibrated. In image measurement or machine vision application, calibration of camera parameters is a very critical link, and the accuracy of a calibration result and the stability of an algorithm directly influence the accuracy of a result generated by the operation of a camera.
At present, external execution components of a calibration camera, such as a probe, a cutting tool bit, a laser ink jet head and the like, are generally calibrated by manually teaching actual positions for many times and then by taking a picture with the camera, so that the calibration is time-consuming and labor-consuming, the precision is very low, and the high-precision positioning application scene cannot be met.
Therefore, in order to solve the above technical problems, it is necessary to provide a new calibration method.
Disclosure of Invention
The invention aims to provide a calibration method, a multi-camera probe device and a flying probe tester.
In order to achieve the purpose, the technical scheme provided by the invention is as follows:
in a first aspect, the present invention provides a multi-camera calibration method, which includes the following steps:
establishing an image coordinate system XYZ of a first camerap1And mechanical coordinate system XYZm1XYZ image coordinate system of the second camerap2And mechanical coordinate system XYZm2And XYZ image coordinate system of the third camerap3；
Establishing a physical coordinate system XYZ of a calibration plate by using a preset point on the calibration plate as an originmbCalculating the physical coordinate [ x ] of the calibration point according to the actual physical distance between the preset point on the calibration plate and the calibration pointmb,ymb]T；
Shooting images of the calibration plate through the first camera, the second camera and the third camera, and determining the calibration point in a coordinate system XYZp1、XYZp2And XYZp3Image coordinate [ x ] ofp1,yp1]T、[xp2,yp2]TAnd [ x ]p3,yp3]T；
From the physical coordinates [ x ] of the index pointmb,ymb]TAnd the image coordinates [ x ] of the index pointp1,yp1]T、[xp2,yp2]T、[xp3,yp3]TObtaining a coordinate system XYZ through homogeneous transformationmbTo a coordinate systemXYZp1、XYZp2And XYZp3Is transformed into a matrix Mmb→p1、Mmb→p2And Mmb→p3；
From the image coordinates of the index point [ x ]p1,yp1]T、[xp2,yp2]TAcquiring the calibration point in the coordinate system XYZm1And XYZm2Obtaining the XYZ coordinate system by affine transformation of the mechanical coordinatesp1To the coordinate system XYZm1Is transformed into a matrix Mp1→m1And coordinate system XYZp2To the coordinate system XYZm2Is transformed into a matrix Mp2→m2；
According to a transformation matrix Mmb→p1、Mmb→p2、Mmb→p3、Mp1→m1And Mp2→m2Obtaining the mechanical coordinate system XYZ of the first cameram1XYZ mechanical coordinate system of the second cameram2And image coordinate system XYZ of the third camerap3The conversion relationship between them.
In one or more embodiments, the coordinate system XYZp1Is the center of the image taken by the first camera, the coordinate system XYZp2Is the image center of the image captured by the second camera, the coordinate system XYZp3Is the image center of the image taken by the third camera.
In one or more embodiments, the coordinate system XYZm1Is the mechanical position of the first camera when the first camera shoots the calibration board, and the coordinate system XYZm2The origin of (a) is the mechanical position where the second camera is located when the second camera photographs the calibration plate.
In one or more embodiments, the images of the calibration plate are captured by the first camera, the second camera and the third camera, and the calibration point is determined to be in the coordinate system XYZp1、XYZp2And XYZp3Image coordinate [ x ] ofp1,yp1]T、[xp2,yp2]TAnd [ x ]p3,yp3]TThe method comprises the following steps:
shooting calibration board through first camera, second camera and third cameraAcquiring a first image, a second image and a third image of the calibration plate, and determining the position of the calibration point in a coordinate system XYZ according to the pixel positions of the calibration point in the first image, the second image and the third imagep1、XYZp2And XYZp3Image coordinate [ x ] ofp1,yp1]T、[xp2,yp2]TAnd [ x ]p3,yp3]T。
In one or more embodiments, the homogeneous transformation formula is:
Figure BDA0003488598420000031
wherein Z iscFor the vertical height of the calibration plane of the calibration plate to the plane of the image coordinate system of the camera, (u, v) for the point within the calibration plate image acquired by the camera, dX by dY is the physical dimension of a single pixel, (u0,v0) The translation amount from the upper left corner of a calibration plate image acquired by a camera to the origin of a camera image coordinate system is obtained, f is the focal length of a camera lens, (X)w,Yw,Zw) Is the point coordinate in physical space, and M is the transformation matrix between the calibration plate physical coordinate system and the camera image coordinate system.
In one or more embodiments, the image coordinates x from the index pointp1,yp1]T、[xp2,yp2]TAcquiring the calibration point in the coordinate system XYZm1And XYZm2The mechanical coordinates of (1), comprising:
from the image coordinates of the index point [ x ]p1,yp1]T、[xp2,yp2]TCalculating the pixel distance between the calibration point and the center of the image, obtaining the physical distance between the calibration point and the centers of the first camera and the second camera through single pixel quantity, and obtaining the distance between the calibration point and the centers of the first camera and the second camera in a coordinate system XYZ according to the center of the first cameram1The mechanical coordinate and the second camera center in the coordinate system XYZm2Obtaining the mechanical coordinate of the calibration point in a coordinate system XYZm1And XYZm2Mechanical coordinates of (2).
At one endIn one or more embodiments, the transformation matrix Mmb→p1、Mmb→p2、Mmb→p3、Mp1→m1And Mp2→m2Obtaining the mechanical coordinate system XYZ of the first cameram1XYZ mechanical coordinate system of the second cameram2And image coordinate system XYZ of the third camerap3The conversion relationship between the two, including:
let coordinate system XYZmbOne point in the graph is (x)mb1,ymb1) In the coordinate system XYZm1Has the coordinate of (x)m11,ym11) In the coordinate system XYZm2Has the coordinate of (x)m21,ym21) In the coordinate system XYZp3Has the coordinate of (x)p31,yp31) Then there is
Figure BDA0003488598420000041
From the formula (1), the coordinate system XYZm2To the coordinate system XYZm1Has a projection matrix of Mmb→p1·Mp1→m1·Mp2→m2 -1·Mmb→p2 -1(ii) a Coordinate system XYZm1To the coordinate system XYZm2Has a projection matrix of Mmb→p2·Mp2→m2·Mp1→m1 -1·Mmb→p1 -1(ii) a Coordinate system XYZp3To the coordinate system XYZm1Has a projection matrix of Mmb→p1·Mp1→m1·Mmb→p3 -1(ii) a Coordinate system XYZp3To the coordinate system XYZm2Has a projection matrix of Mmb→p2·Mp2→m2·Mmb→p3 -1。
In one or more embodiments, the preset points and the calibration points on the calibration plate are set to be visible on both sides, the first camera and the second camera capture the preset points and the calibration points through the first side of the calibration plate, and the third camera captures the preset points and the calibration points through the second side of the calibration plate.
In one or more embodiments, the targetThe fixed plate is provided with a physical coordinate system XYZ for determining the position of the preset point and the position of the calibration platembThe identification of the direction of (c).
In a second aspect, the present invention provides a probe calibration method, which is applied to a flying probe tester, the flying probe tester includes a first test shaft, a second test shaft and a third camera, the first test shaft is provided with a first camera and a first probe, the second test shaft is provided with a second camera and a second probe, the probe calibration method includes the following steps:
completing the calibration of the first camera, the second camera and the third camera based on the multi-camera calibration method;
moving the first probe to the visual field range of the third camera, and shooting the image of the first probe by the third camera to obtain the tip of the first probe in the coordinate system XYZp3Coordinate of (x)P1 needle,yP1 needle1), according to the coordinate system XYZp3And coordinate system XYZm1Obtaining the transformation relation between the first probe tip and the second probe tip in a coordinate system XYZm1Coordinate of (x)m1 needle,ym1 needle,1)T；
According to the mechanical position (x) of the first test shaft when the first camera shoots the calibration platem1c,ym1c) And the mechanical position (x) of the first testing axis when the third camera shoots the first probe1 needle,y1 needle,z1 needle) Obtaining the actual offset (Deltax) of the first probe tip to the first camera center1,Δy1) Completing the calibration of the first probe on the first camera;
moving the second probe to the visual field range of the third camera, and shooting the image of the second probe by the third camera to obtain the tip of the second probe in the coordinate system XYZp3Coordinate of (x)P2 needle,yP2 needle1), according to the coordinate system XYZp3And coordinate system XYZm2The transformation relationship between the probe tips and the reference probe tip is obtained in the coordinate system XYZm2Coordinate of (x)m2 needle,ym2 needle,1)T；
According to the position of the second test axis when the second camera shoots the calibration plateMechanical position (x)m2c,ym2c) And the mechanical position (x) of the second test axis when the second probe is shot by the third camera2 needles,y2 needles,z2 needles) Obtaining the actual offset (Deltax) of the second probe tip to the second camera center2,Δy2) And completing the calibration of the second probe on the second camera.
In one or more embodiments, the first probe tip is in coordinate system XYZm1Coordinate of (x)m1 needle,ym1 needle,1)TComprises the following steps:
(xm1 needle,ym1 needle,1)T＝Mmb→p1·Mp1→m1·Mmb→p3 -1·(xP1 needle,yP1 needle,1)T。
In one or more embodiments, the actual offset (Δ χ) of the first probe tip to the first camera center1,Δy1) Comprises the following steps:
(Δx1,Δy1)＝(x1 needle-xm1c+xm1 needle,y1 needle-ym1c+ym1 needle)。
In one or more embodiments, the second probe tip is in coordinate system XYZm2Coordinate of (x)m2 needle,ym2 needle,1)TComprises the following steps:
(xm2 needle,ym2 needle,1)T＝Mmb→p2·Mp2→m2·Mmb→p3 -1·(xP2 needle,yP2 needle,1)T。
In one or more embodiments, the actual offset (Δ x) of the second probe tip to the second camera center2,Δy2) Comprises the following steps:
(Δx2,Δy2)＝(x2 needles-xm2c+xm2 needle,y2 needles-ym2c+ym2 needle)。
In a third aspect, the present invention provides a multi-camera probe apparatus for the aforementioned probe calibration method, which includes: the device comprises a base frame, a first driving module, a second driving module, a first testing shaft, a second testing shaft and a third camera; the first driving module and the second driving module are arranged on the base frame, the first testing shaft is arranged on the first driving module, and the second testing shaft is arranged on the second driving module; the first test shaft comprises a first bracket, a first camera and a first probe, the first bracket is mounted on the first driving module, and the first camera and the first probe are mounted on the first bracket; the second testing shaft comprises a second support, a second camera and a second probe, the second support is installed on the second driving module, and the second camera and the second probe are installed on the second support.
In one or more embodiments, a calibration plate fixing member is further disposed on the base frame, and the third camera is fixed below the calibration plate fixing member.
In a fourth aspect, the present invention provides a flying probe testing machine comprising a memory, a processor and the multi-camera probe device, wherein the memory stores a computer program, and the computer program, when executed by the processor, causes the processor to perform the steps of the probe calibration method of claim 7.
Compared with the prior art, the calibration method, the multi-camera probe device and the flying probe testing machine provided by the invention have the advantages that the calibration process of the camera system is simple, the calibration precision is high, and after the calibration of the camera system is completed, one-key calibration of the probe can be realized without manually teaching an actual position for many times; after the probe is replaced, the position of the probe does not need to be manually taught again, and the actual position of the new probe in the system can be directly determined on the premise of previous calibration through visual shooting. The calibration method has the advantages that the calibration precision of the camera can reach below 0.7 mu m, and the calibration precision of the probe can reach below 3.5 mu m.
Drawings
Fig. 1 is a schematic perspective view of a multi-camera probe apparatus according to an embodiment of the present invention;
FIG. 2 is a flow chart of a multi-camera calibration method according to an embodiment of the present invention;
FIG. 3 is a flow chart of a method for calibrating a probe according to an embodiment of the present invention;
fig. 4 is a block diagram of a flying probe tester according to an embodiment of the present invention.
Description of the main reference numerals:
1-a multi-camera probe device, 11-a pedestal, 12-a first driving module, 13-a second driving module, 14-a first testing shaft, 15-a second testing shaft, 16-a third camera, 17-a calibration plate fixing part, 121-a first moving shaft mechanism, 122-a first transfer mechanism, 131-a second moving shaft mechanism, 132-a second transfer mechanism, 141-a first support, 142-a first camera, 143-a first probe, 151-a second support, 152-a second camera, 153-a second probe.
Detailed Description
The following detailed description of the present invention is provided in conjunction with the accompanying drawings, but it should be understood that the scope of the present invention is not limited to the specific embodiments.
Throughout the specification and claims, unless explicitly stated otherwise, the word "comprise", or variations such as "comprises" or "comprising", will be understood to imply the inclusion of a stated element or component but not the exclusion of any other element or component.
Referring to fig. 1, a multi-camera probe apparatus 1 according to an embodiment of the present invention can be applied to a flying probe tester, and the multi-camera probe apparatus 1 includes: the test device comprises a base frame 11, a first driving module 12, a second driving module 13, a first test shaft 14, a second test shaft 15 and a third motor 16.
In an exemplary embodiment, the base frame 11 is configured in a substantially rectangular parallelepiped shape, and the first and second driving modules 12 and 13 are mounted on the top of the base frame 11. The first testing shaft 14 is mounted on the first driving module 12, and the first testing shaft 14 can move under the driving of the first driving module 12. The second testing shaft 15 is mounted on the second driving module 13, and the second testing shaft 15 can move under the driving of the second driving module 13.
Specifically, the first driving module 12 includes a first moving axis mechanism 121 disposed along the x-axis direction and a first transfer mechanism 122 disposed along the y-axis direction. Wherein, the first moving shaft mechanism 121 is installed on the top of the base frame 11, the first transferring mechanism 122 is installed on the first moving shaft mechanism 121, and the first testing shaft 14 is installed on the first transferring mechanism 122; the first transfer mechanism 122 can be driven by the first moving axis mechanism 121 to move in the x-axis direction, and the first test axis 14 mechanism can be driven by the first transfer mechanism 122 to move in the y-axis direction.
Specifically, the second driving module 13 includes a second moving axis mechanism 131 disposed in the x-axis direction and a second transfer mechanism 132 disposed in the y-axis direction. Wherein, the second moving shaft mechanism 131 is installed on the top of the base frame 11, the second transferring mechanism 132 is installed on the second moving shaft mechanism 131, and the second testing shaft 15 is installed on the second transferring mechanism 132; the second transfer mechanism 132 can be driven by the second moving axis mechanism 131 to move in the x-axis direction, and the second test axis 15 mechanism can be driven by the second transfer mechanism 132 to move in the y-axis direction.
The first driving module 12 and the second driving module 13 are independent of each other, and the first testing shaft 14 and the second testing shaft 15 can move independently under the driving of the first driving module 12 and the second driving module 13.
Specifically, the first test axis 14 includes a first holder 141, a first camera 142, and a first probe 143. The first frame 141 is mounted on the first transfer mechanism 122 of the first driving module 12, and the first camera 142 and the first probe 143 are mounted on the first frame 141. The first camera 142 and the first probe 143 can move synchronously under the driving of the first driving module 12.
Specifically, the second test shaft 15 includes a second holder 151, a first human camera, and a second probe. The second holder 151 is attached to the first transfer mechanism 122 of the second drive module 13, and the second camera 152 and the first human probe are attached to the second holder 151. The second camera 152 and the second probe 153 can move synchronously under the driving of the second driving module 13.
In an exemplary embodiment, a calibration plate fixing member 17 is further provided on the base frame 11. When carrying out the camera calibration, can be fixed in this calibration board mounting 17 with the calibration board on to the camera shoots the calibration board, acquires the image information of calibration board.
Specifically, the third camera 16 is fixed below the calibration plate fixing member 17. In the multi-camera probe device 1, the third camera 16 is fixedly arranged, so that the camera center of the third camera 16 is fixed during calibration, i.e. the image coordinate system established based on the third camera 16 is also fixed, and there is no positional shift.
Specifically, the first camera 142, the second camera 152 and the third camera 16 are further provided with light sources, and the light sources can provide illumination when the first camera 142, the second camera 152 and the third camera 16 take images, so that the cameras can take clearer images.
Fig. 2 is a flowchart of a multi-camera calibration method according to an embodiment of the invention, which can be used for the multi-camera probe apparatus 1. The multi-camera calibration method comprises the following steps:
s101: establishing an image coordinate system XYZ of the first camera 142p1And mechanical coordinate system XYZm1XYZ, image coordinate system of the second camera 152p2And mechanical coordinate system XYZm2And XYZ image coordinate system of the third camera 16p3。
Specifically, the image coordinate system XYZ of the first camera 142p1Is a coordinate system established based on the image captured by the first camera 142, the coordinate system XYZ beingp1Is the center of the image captured by the first camera 142. For example, XYZ coordinate system may be a plane perpendicular to the shooting direction (lens orientation) of the first camera 142 and passing through the center of the first camera 142p1An XY plane of (2); at this time, the center of the first camera 142 is the center of the image captured by the first camera 142, i.e., the coordinate system XYZp1Of the origin.
Image coordinate system XYZ of the second camera 152p2Is a coordinate system established based on the image taken by the second camera 152, and is XYZp2Is the center of the image captured by the second camera 152. For example, the plane perpendicular to the shooting direction (lens orientation) of the second camera 152 and passing through the center of the second camera 152 may be used as the coordinate system XYZp2An XY plane of (2); at this time, the center of the second camera 152 is the center of the image of the second camera, i.e., the coordinate system XYZp2Of the origin.
Image coordinate system XYZ of the third camera 16p3Is a coordinate system established based on the image captured by the third camera 16, and the coordinate system XYZ isp3Is the center of the image taken by the third camera 16. For example, the coordinate system XYZ may be a plane perpendicular to the shooting direction (lens orientation) of the third camera 16 and passing through the center of the third camera 16p3An XY plane of (2); at this time, the center of the third camera 16 is the center of the image captured by the third camera 16, i.e., the coordinate system XYZp3Of the origin.
In other embodiments, coordinate system XYZp1、XYZp2And XYZp3The origin of (2) can also be selected from other points on the image, and can be set according to actual needs.
Specifically, the mechanical coordinate system XYZ of the first camera 142m1The origin of (a) is the mechanical position of the first camera 142 when the first camera 142 shoots the calibration board, and the mechanical position can pass through the position (x) of the first testing axis 14 on the first driving module 12m1c,ym1c) To be determined.
Mechanical coordinate system XYZ of the second camera 152m2The origin of (a) is the mechanical position of the second camera 152 when the second camera 152 shoots the calibration board, and the mechanical position can pass through the position (x) of the second testing axis 15 on the second driving module 13m2c,ym2c) To be determined.
S102: establishing a physical coordinate system XYZ of a calibration plate by using a preset point on the calibration plate as an originmbCalculating the physical coordinate [ x ] of the calibration point according to the actual physical distance between the preset point on the calibration plate and the calibration pointmb,ymb]T。
XYZ physical coordinate system for establishing calibration platembBefore, the calibration plate needs to be positioned on the calibration plate fixing member 17 of the multi-camera probe device 1.
In particular, the physical coordinate system XYZ of the calibration platembCan be constructed from the calibration points captured by the camera, canSelecting a preset point from the field of view acquired by the camera as the coordinate system XYZmbCan be used as the coordinate system XYZ, and the calibration plane of the calibration plate can be used as the coordinate system XYZmbXY plane of (c).
The preset point and the index point are both in a coordinate system XYZmbCan calculate the actual physical distance between the preset point and the index point to obtain the index point in the coordinate system XYZmbPhysical coordinate of (1) [ x ]mb,ymb]T。
S103: the images of the calibration plate are captured by the first camera 142, the second camera 152, and the third camera 16, and the calibration point is determined to be in the coordinate system XYZp1、XYZp2And XYZp3Image coordinate [ x ] ofp1,yp1]T、[xp2,yp2]TAnd [ x ]p3,yp3]T。
Specifically, a calibration board is photographed by a first camera 142, a second camera 152 and a third camera 16, a first image photographed by the first camera 142, a second image photographed by a second camera and a third image photographed by the third camera 16 of the calibration board are acquired, and a pixel position relationship of the calibration point in the first image, the second image and the third image with respect to each image center (origin of image coordinate system of each camera) is calculated from the pixel position of the calibration point in the first image, the second image and the third image to determine a calibration point coordinate system XYZp1、XYZp2And XYZp3Image coordinate [ x ] ofp1,yp1]T、[xp2,yp2]TAnd [ x ]p3,yp3]T。
Specifically, the preset points and the calibration points on the calibration board are set to be visible on both sides, the first camera 142 and the second camera 152 may photograph the preset points and the calibration points of the calibration board through a first side (top surface) of the calibration board, and the third camera 16 may photograph the preset points and the calibration points of the calibration board through a second side (bottom surface) of the calibration board. The calibration plate is also provided with a physical coordinate system XYZ for determining the position of the preset point and the calibration platembThe identification of the direction of (c). By the identification in combination with image analysis, the first camera 142, the second cameraThe two-camera 152 and the third camera 16 can automatically recognize the position of the preset point and the coordinate system XYZmbSo as to correspond the same calibration point on the calibration plate in the first image, the second image and the third image.
S104: from the physical coordinates [ x ] of the index pointmb,ymb]TAnd the image coordinates [ x ] of the index pointp1,yp1]T、[xp2,yp2]T、[xp3,yp3]TObtaining a coordinate system XYZ through homogeneous transformationmbTo the coordinate system XYZp1、XYZp2And XYZp3Is transformed into a matrix Mmb→p1、Mmb→p2And Mmb→p3。
Specifically, the homogeneous transformation formula is:
Figure BDA0003488598420000111
wherein Z iscFor the calibration plane of the calibration plate (coordinate system XYZ)mbXY plane) to the image coordinate system plane of the camera (coordinate system XYZp1、XYZp2And XYZp3XY plane of (u, v) is a point within the calibration plate image acquired by the camera, dX × dY is the physical size of a single pixel, and (u, v) is the vertical height of the calibration plate image0,v0) The translation from the top left corner of the calibration plate image acquired by the camera to the origin of the camera image coordinate system (camera center), f is the focal length of the camera lens, (X)w,Yw,Zw) Is the point coordinate in physical space, and M is the transformation matrix between the calibration plate physical coordinate system and the camera image coordinate system.
S105: from the image coordinates of the index point [ x ]p1,yp1]T、[xp2,yp2]TAcquiring the calibration point in the coordinate system XYZm1And XYZm2Obtaining the XYZ coordinate system by affine transformation of the mechanical coordinatesp1To the coordinate system XYZm1Is transformed into a matrix Mp1→m1And coordinate system XYZp2To the coordinate system XYZm2Is transformed into a matrix Mp2→m2。
In particular, from the image coordinates [ x ] of the index pointp1,yp1]T、[xp2,yp2]TCalculating the pixel distance between the calibration point and the center of the image (corresponding to the center of the camera), obtaining the physical distance between the calibration point and the centers of the first camera 142 and the second camera 152 by the single pixel quantity, and determining the coordinate system XYZ according to the center of the first camera 142m1In (3) and the center of the second camera 152 is in the coordinate system XYZm2The mechanical coordinate in (1) can be obtained, and the calibration point can be located in the coordinate system XYZm1And XYZm2Mechanical coordinates of (2).
Image coordinates [ x ] based on index pointsp1,yp1]TAnd [ x ]p2,yp2]TAnd the index point is in the coordinate system XYZm1And XYZm2The mechanical coordinates in (1) are affine transformed to obtain a coordinate system XYZp1To the coordinate system XYZm1Is transformed into a matrix Mp1→m1And coordinate system XYZp2To the coordinate system XYZm2Is transformed into a matrix Mp2→m2。
S106: according to a transformation matrix Mmb→p1、Mmb→p2、Mmb→p3、Mp1→m1And Mp2→m2Obtaining the mechanical coordinate system XYZ of the first camera 142m1XYZ mechanical coordinate system of the second camera 152m2And XYZ image coordinate system of the third camera 16p3The conversion relationship between them.
Specifically, a transformation matrix M is obtainedmb→p1、Mmb→p2、Mmb→p3、Mp1→m1And Mp2→m2Then, the mechanical coordinate system XYZ of the first camera 142 can be obtained from the coordinate system common to the respective transformation matricesm1XYZ, a mechanical coordinate system of the second camera 152m2And the image coordinate system XYZ of the third camera 16p3The conversion relationship between them. The process is as follows:
let coordinate system XYZmbOne point in the graph is (x)mb1,ymb1) In the coordinate system XYZm1Has the coordinate of (x)m11,ym11) In the coordinate system XYZm2Has the coordinate of (x)m21,ym21) In the coordinate system XYZp3Has the coordinate of (x)p31,yp31) Then there is
Figure BDA0003488598420000121
From the above formula, the coordinate system XYZ can be obtainedm2To the coordinate system XYZm1Has a projection matrix of Mmb→p1·Mp1→m1·Mp2→m2 -1·Mmb→p2 -1(ii) a Coordinate system XYZm1To the coordinate system XYZm2Has a projection matrix of Mmb→p2·Mp2→m2·Mp1→m1 -1·Mmb→p1 -1(ii) a Coordinate system XYZp3To the coordinate system XYZm1Has a projection matrix of Mmb→p1·Mp1→m1·Mmb→p3 -1(ii) a Coordinate system XYZp3To the coordinate system XYZm2Has a projection matrix of Mmb→p2·Mp2→m2·Mmb→p3 -1And completing the calibration of the camera system.
Based on the multi-camera calibration method, the invention also provides a probe calibration method. Fig. 3 is a flowchart illustrating a probe calibration method according to an embodiment of the invention. The probe calibration method can be applied to a flying probe tester having the aforementioned multi-camera probe device 1. The multi-camera calibration method comprises the following steps:
s201: based on the multi-camera calibration method, calibration of the first camera 142, the second camera 152, and the third camera 16 is completed.
Specifically, after the calibration of the camera is completed, the calibration plate positioned on the calibration plate fixing member 17 needs to be removed, so as to avoid the calibration plate from affecting the subsequent shooting of the probe by the third camera 16.
S202: the first probe 143 is moved to the field of view of the third camera 16, and an image of the first probe 143 is captured by the third camera 16, thereby obtaining the XYZ coordinate system of the tip of the first probe 143p3Coordinate of (5), according to coordinate system XYZp3And coordinate system XYZm1The transformation relationship between the probe tips of the first probe 143 and the second probe is obtained in the coordinate system XYZm1Coordinates of (2).
Specifically, after the third camera 16 acquires the image of the first probe 143, the BLOB analysis can be performed to obtain the tip of the first probe 143 in the XYZ coordinate systemp3Coordinate of (x)P1 needle,yP1 needle,1)。
According to the coordinate system XYZp3And coordinate system XYZm1The transformation relationship between the probe tips of the first probe 143 and the second probe is obtained in the coordinate system XYZm1Coordinate of (x)m1 needle,ym1 needle,1)T. The method specifically comprises the following steps:
(xm1 needle,ym1 needle,1)T＝Mmb→p1·Mp1→m1·Mmb→p3 -1·(xP1 needle,yP1 needle,1)T。
S203: and obtaining the actual offset from the tip of the first probe 143 to the center of the first camera 142 according to the mechanical position of the first testing shaft 14 when the first camera 142 shoots the calibration plate and the mechanical position of the first testing shaft 14 when the third camera 16 shoots the first probe 143, thereby completing the calibration of the first camera 142 by the first probe 143.
Specifically, the mechanical position of the first testing axis 14 when the first camera 142 shoots the calibration board is (x)m1c,ym1c) When the third camera 16 photographs the first probe 143, the mechanical position of the first testing axis 14 is (x)1 needle,y1 needle,z1 needle) Then the deviation between the nominal position of the first probe 143 and the nominal position of the first camera 142 is (x)1 needle-xm1c,y1 needle-ym1c)。
Then according to the tip of the first probe 143 in the coordinate system XYZm1Coordinate of (x)m1 needle,ym1 needle,1)TThe actual offset (Δ x) from the tip of the first probe 143 to the center of the first camera 142 can be obtained1,Δy1)＝(x1 needle-xm1c+xm1 needle,y1 needle-ym1c+ym1 needle) And the calibration of the first probe 143 to the center of the first camera 142 is completed.
S204: will be firstThe second probe 153 is moved to the field of view of the third camera 16, and the third camera 16 captures an image of the second probe 153 to obtain the XYZ coordinate system of the tip of the second probe 153p3Coordinate of (5), according to coordinate system XYZp3And coordinate system XYZm2The transformation relationship between the probe tips of the second probe 153 in the coordinate system XYZ is obtainedm2Coordinates of (2).
Specifically, after the third camera 16 acquires the image of the second probe 153, the BLOB analysis can be performed to obtain the tip of the second probe 153 in the XYZ coordinate systemp3Coordinate of (x)P2 needle,yP2 needle,1)。
According to the coordinate system XYZp3And coordinate system XYZm2The transformation relationship between the probe tips of the first probe 143 and the second probe is obtained in the coordinate system XYZm2Coordinate of (x)m2 needle,ym2 needle,1)T. The method specifically comprises the following steps:
(xm2 needle,ym2 needle,1)T＝Mmb→p2·Mp2→m2·Mmb→p3 -1·(xP2 needle,yP2 needle,1)T。
S205: and obtaining the actual offset of the tip of the second probe 153 to the center of the second camera 152 according to the mechanical position of the second testing shaft 15 when the second camera 152 shoots the calibration plate and the mechanical position of the second testing shaft 15 when the third camera 16 shoots the second probe 153, thereby completing the calibration of the second probe 153 to the second camera 152.
Specifically, the mechanical position of the second testing axis 15 when the second camera 152 photographs the calibration board is (x)m2c,ym2c) When the third camera 16 photographs the second probe 153, the mechanical position of the second test axis is (x)2 needles,y2 needles,z2 needles) The deviation between the nominal position of the second probe 153 and the nominal position of the second camera 152 is (x)2 needles-xm2c,y2 needles-ym2c)。
Then according to the tip of the second probe 153 in the coordinate system XYZm2Coordinate of (x)m2 needle,ym2 needle,1)TThe actual offset (Δ x) from the tip of the second probe 153 to the center of the second camera 152 can be obtained2,Δy2)＝(x2 needles-xm2c+xm2 needle,y2 needles-ym2c+ym2 needle) That is, the calibration of the second probe 153 to the center of the second camera 152 is completed.
As shown in fig. 4, an embodiment of the present invention further provides a flying probe tester 2, the flying probe tester 2 includes a processor 21, a storage 22 (e.g., a non-volatile storage), a memory 23, a communication interface 24, and the multi-camera probe device 1 as described above, and the processor 21, the storage 22, the memory 23, and the communication interface 24 are connected together via a bus 25. The processor 21 is operative to invoke at least one program instruction stored or encoded in the memory 22 to cause the processor 21 to perform various operational steps and functions of the probe calibration method described in the various embodiments of the present specification. The specific operation steps can be realized by the multi-camera probe device 1 when the processor 21 executes the probe calibration method described in the various embodiments of the present specification.
The memory 22 may be any available media or data storage device that is accessible by a computer, including but not limited to magnetic memory (e.g., floppy disks, hard disks, magnetic tape, magneto-optical disks (MOs), etc.), optical memory (e.g., CDs, DVDs, BDs, HVDs, etc.), and semiconductor memory (e.g., ROMs, EPROMs, EEPROMs, nonvolatile memory (NAND FLASH), Solid State Disks (SSDs), etc.).
In summary, the calibration method, the multi-camera probe device and the flying probe tester provided by the invention have the advantages that the calibration process of the camera system is simple, the calibration precision is high, and after the calibration of the camera system is completed, the one-key calibration of the probe can be realized without manually teaching an actual position for many times; after the probe is replaced, the position of the probe does not need to be manually taught again, and the actual position of the new probe in the system can be directly determined on the premise of previous calibration through visual shooting. The calibration method has the advantages that the calibration precision of the camera can reach below 0.7 mu m, and the calibration precision of the probe can reach below 3.5 mu m.
The foregoing descriptions of specific exemplary embodiments of the present invention have been presented for purposes of illustration and description. It is not intended to limit the invention to the precise form disclosed, and obviously many modifications and variations are possible in light of the above teaching. The exemplary embodiments were chosen and described in order to explain certain principles of the invention and its practical application to enable one skilled in the art to make and use various exemplary embodiments of the invention and various alternatives and modifications as are suited to the particular use contemplated. It is intended that the scope of the invention be defined by the claims and their equivalents.

Claims (13)

1. A multi-camera calibration method, comprising the steps of:
establishing an image coordinate system XYZ of a first camerap1And mechanical coordinate system XYZm1XYZ image coordinate system of the second camerap2And mechanical coordinate system XYZm2And XYZ image coordinate system of the third camerap3；
Establishing a physical coordinate system XYZ of a calibration plate by using a preset point on the calibration plate as an originmbCalculating the physical coordinate [ x ] of the calibration point according to the actual physical distance between the preset point on the calibration plate and the calibration pointmb，ymb]T；
Shooting images of the calibration plate through the first camera, the second camera and the third camera, and determining the calibration point in a coordinate system XYZp1、XYZp2And XYZp3Image coordinate [ x ] ofp1，yp1]T、[xp2，yp2]TAnd [ x ]p3，yp3]T；
From the physical coordinates [ x ] of the index pointmb，ymb]TAnd the image coordinates of the index points [ x ]p1，yp1]T、[xp2，yp2]T、[xp3，yp3]TObtaining a coordinate system XYZ through homogeneous transformationmbTo the coordinate system XYZp1、XYZp2And XYZp3Is transformed into a matrix Mmb→p1、Mmb→p2And Mmb→p3；
From the image coordinates of the index point [ x ]p1，yp1]T、[xp2，yp2]TAcquiring the calibration point in the coordinate system XYZm1And XYZm2Obtaining the XYZ coordinate system by affine transformation of the mechanical coordinatesp1To the coordinate system XYZm1Is transformed into a matrix Mp1→m1And coordinate system XYZp2To the coordinate system XYZm2Is transformed into a matrix Mp2→m2；
According to a transformation matrix Mmb→p1、Mmb→p2、Mmb→p3、Mp1→m1And Mp2→m2Obtaining the mechanical coordinate system XYZ of the first cameram1XYZ mechanical coordinate system of the second cameram2And image coordinate system XYZ of the third camerap3The conversion relationship between them.
2. Multi-camera calibration method according to claim 1, characterized in that said coordinate system XYZp1Is the center of the image taken by the first camera, the coordinate system XYZp2Is the image center of the image captured by the second camera, the coordinate system XYZp3Is the image center of the image taken by the third camera.
3. Multi-camera calibration method according to claim 1, characterized in that said coordinate system XYZm1Is the mechanical position of the first camera when the first camera shoots the calibration board, and the coordinate system XYZm2The origin of (a) is the mechanical position where the second camera is located when the second camera photographs the calibration plate.
4. Multi-camera calibration method according to claim 1, wherein said images of the calibration plate are taken by a first camera, a second camera and a third camera, determining the calibration points in the coordinate system XYZp1、XYZp2And XYZp3Image coordinate [ x ] ofp1，yp1]T、[xp2，yp2]TAnd [ x ]p3，yp3]TThe method comprises the following steps:
shooting a calibration plate through a first camera, a second camera and a third camera to obtain calibrationDetermining the position of the index point in the coordinate system XYZ according to the pixel positions of the index point in the first image, the second image and the third imagep1、XYZp2And XYZp3Image coordinate [ x ] ofp1，yp1]T、[xp2，yp2]TAnd [ x ]p3，yp3]T。
5. A multi-camera calibration method according to claim 1, wherein the homogeneous transformation formula is:
Figure FDA0003488598410000021
wherein Z iscFor the vertical height of the calibration plane of the calibration plate to the plane of the image coordinate system of the camera, (u, v) for the point within the calibration plate image acquired by the camera, dX by dY is the physical dimension of a single pixel, (u0，v0) The translation amount from the upper left corner of a calibration plate image acquired by a camera to the origin of a camera image coordinate system is obtained, f is the focal length of a camera lens, (X)w，Yw，Zw) Is the point coordinate in physical space, and M is the transformation matrix between the calibration plate physical coordinate system and the camera image coordinate system.
6. Multi-camera calibration method according to claim 1, wherein said image coordinates [ x ] according to calibration pointsp1，yp1]T、[xp2，yp2]TAcquiring the calibration point in the coordinate system XYZm1And XYZm2The mechanical coordinates of (1), comprising:
from the image coordinates of the index point [ x ]p1，yp1]T、[xp2，yp2]TCalculating the pixel distance between the calibration point and the center of the image, obtaining the physical distance between the calibration point and the centers of the first camera and the second camera through single pixel quantity, and obtaining the distance between the calibration point and the centers of the first camera and the second camera in a coordinate system XYZ according to the center of the first cameram1Mechanical coordinates and secondCamera centered on coordinate system XYZm2Obtaining the mechanical coordinate of the calibration point in a coordinate system XYZm1And XYZm2Mechanical coordinates of (2).
7. Multi-camera calibration method according to claim 1, wherein said transformation matrix M is based onmb→p1、Mmb→p2、Mmb→p3、Mp1→m1And Mp2→m2Obtaining the mechanical coordinate system XYZ of the first cameram1XYZ mechanical coordinate system of the second cameram2And image coordinate system XYZ of the third camerap3The conversion relationship between the two, including:
let coordinate system XYZmbOne point in the graph is (x)mb1，ymb1) In the coordinate system XYZm1Has the coordinate of (x)m11，ym11) In the coordinate system XYZm2Has the coordinate of (x)m21，ym21) In the coordinate system XYZp3Has the coordinate of (x)p31，yp31) Then there is
Figure FDA0003488598410000031
From the formula (1), the coordinate system XYZm2To the coordinate system XYZm1Has a projection matrix of Mmb→p1·Mp1→m1·Mp2→m2 -1·Mmb→p2 -1(ii) a Coordinate system XYZm1To the coordinate system XYZm2Has a projection matrix of Mmb→p2·Mp2→m2·Mp1→m1 -1·Mmb→p1 -1(ii) a Coordinate system XYZp3To the coordinate system XYZm1Has a projection matrix of Mmb→p1·Mp1→m1·Mmb→p3 -1(ii) a Coordinate system XYZp3To the coordinate system XYZm2Has a projection matrix of Mmb→p2·Mp2→m2·Mmb→p3 -1。
8. A multi-camera calibration method according to claim 1, wherein the preset points and the calibration points on the calibration plate are arranged to be visible on both sides, the first camera and the second camera taking the preset points and the calibration points through a first side of the calibration plate, and the third camera taking the preset points and the calibration points through a second side of the calibration plate.
9. Multi-camera calibration method according to claim 8, wherein said calibration plate is provided with a physical coordinate system XYZ for determining the position of said preset point and for determining said calibration platembThe direction of (a).
10. A probe calibration method is applied to a flying probe testing machine, the flying probe testing machine comprises a first testing shaft, a second testing shaft and a third camera, a first camera and a first probe are arranged on the first testing shaft, a second camera and a second probe are arranged on the second testing shaft, and the probe calibration method is characterized by comprising the following steps:
completing the calibration of the first camera, the second camera and the third camera based on the multi-camera calibration method of any one of claims 1-9;
moving the first probe to the visual field range of the third camera, and shooting the image of the first probe by the third camera to obtain the tip of the first probe in the coordinate system XYZp3Coordinate of (x)P1 needle，yP1 needle1), according to a coordinate system XYZp3And coordinate system XYZm1Obtaining the transformation relation between the first probe tip and the second probe tip in a coordinate system XYZm1Coordinate of (x)m1 needle，ym1 needle，1)T；
According to the mechanical position (x) of the first test shaft when the first camera shoots the calibration platem1c，ym1c) And the mechanical position (x) of the first testing axis when the third camera shoots the first probe1 needle，y1 needle，z1 needle) Obtaining the actual offset (Deltax) of the first probe tip to the first camera center1，Δy1) Completing the calibration of the first probe on the first camera;
moving the second probe to the visual field range of the third camera, and shooting the image of the second probe by the third camera to obtain the tip of the second probe in the coordinate system XYZp3Coordinate of (x)P2 needle，yP2 needle1), according to the coordinate system XYZp3And coordinate system XYZm2The transformation relationship between the probe tips and the reference probe tip is obtained in the coordinate system XYZm2Coordinate of (x)m2 needle，ym2 needle，1)T；
According to the mechanical position (x) of the second test shaft when the second camera shoots the calibration platem2c，ym2c) And the mechanical position (x) of the second test axis when the second probe is shot by the third camera2 needles，y2 needles，z2 needles) Obtaining the actual offset (Deltax) of the second probe tip to the second camera center2，Δy2) Completing the calibration of the second probe on the second camera; wherein,
(xm1 needle，ym1 needle，1)T＝Mmb→p1·Mp1→m1·Mmb→p3 -1·(xP1 needle，yP1 needle，1)T
(Δx1，Δy1)＝(x1 needle-xm1c+xm1 needle，y1 needle-ym1c+ym1 needle)
(xm2 needle，ym2 needle，1)T＝Mmb→p2·Mp2→m2·Mmb→p3 -1·(xP2 needle，yP2 needle，1)T
(Δx2，Δy2)＝(x2 needles-xm2c+xm2 needle，y2 needles-ym2c+ym2 needle)。
11. A famous camera probe apparatus for use in the probe calibration method as claimed in claim 10, characterized by comprising: the device comprises a base frame, a first driving module, a second driving module, a first testing shaft, a second testing shaft and a third camera;
the first driving module and the second driving module are arranged on the base frame, the first testing shaft is arranged on the first driving module, and the second testing shaft is arranged on the second driving module;
the first test shaft comprises a first bracket, a first camera and a first probe, the first bracket is mounted on the first driving module, and the first camera and the first probe are mounted on the first bracket;
the second testing shaft comprises a second support, a second camera and a second probe, the second support is installed on the second driving module, and the second camera and the second probe are installed on the second support.
12. The multi-camera probe device of claim 11, wherein a calibration plate fixing member is further provided on the base frame, and the third camera is fixed below the calibration plate fixing member.
13. A flying probe testing machine comprising a memory, a processor and a multi-camera probe device according to claim 11 or 12, the memory having stored therein a computer program which, when executed by the processor, causes the processor to carry out the steps of the probe calibration method of claim 10.
CN202210088304.2A 2022-01-25 2022-01-25 Calibration method, multi-camera probe device and flying probe tester Pending CN114494460A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115932555A (en) * 2023-02-23 2023-04-07 长春光华微电子设备工程中心有限公司 Probe position obtaining method and probe station

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115932555A (en) * 2023-02-23 2023-04-07 长春光华微电子设备工程中心有限公司 Probe position obtaining method and probe station

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