CN114487781A

CN114487781A - Vertical MEMS (micro-electromechanical system) bent probe pin inserting device and pin inserting method thereof

Info

Publication number: CN114487781A
Application number: CN202210107716.6A
Authority: CN
Inventors: 于海超; 徐兴光; 周培清
Original assignee: Maxone Semiconductor Suzhou Co Ltd
Current assignee: Strong Half Conductor Suzhou Co ltd
Priority date: 2022-01-28
Filing date: 2022-01-28
Publication date: 2022-05-13
Anticipated expiration: 2042-01-28
Also published as: CN114487781B

Abstract

The invention discloses a vertical MEMS (micro-electromechanical systems) bent probe pin inserting device and a pin inserting method thereof; the contact pin device comprises an upper fixing structure, a lower fixing structure, a translation structure, an inclined structure and a positioning guide structure visual detection structure, the contact pin device is configured to be in a working position, the inclined structure drives the inclined structure to incline, a pin tail of a probe is in the inclined and rotating freedom degree of a theta axis, an X axis and a Y axis in the space of the lower probe hole, the upper probe hole on the upper cover plate is in one-to-one vertical correspondence with the lower probe hole on the lower cover plate, and the guide hole on the upper cover plate is in one-to-one vertical correspondence with the guide columns on the lower fixing structure. The invention realizes that the contact pin can ensure that the upper cover plate and the lower cover plate are stable and separated without deviation by depending on a mechanical structure with simple structure but extremely high reliability and precision, does not have the problems of bent pin, repeated alignment, low efficiency and the like, has low cost and high precision, and ensures the contact pin yield of the MEMS bent probe with the special structure.

Description

Vertical MEMS (micro-electromechanical system) bent probe pin inserting device and pin inserting method thereof

Technical Field

The invention relates to the technical field of semiconductor chip testing, in particular to a vertical MEMS bent probe pin inserting device and a pin inserting method thereof for high-end probe card production.

Background

The probe card is an important tool for testing the yield of chips, and with the continuous shortening of the chip manufacturing process, the distance between chip pins is continuously reduced, and the conventional probe card can not be used for testing. In order to meet the test requirement, a chip pin test is carried out by adopting a vertical MEMS probe processed and manufactured by an MEMS process.

Aiming at different chip test requirements, some chips need to be tested by adopting a bent vertical MEMS probe.

Referring to fig. 2A to 2C, a schematic diagram of a vertical MEMS curved probe structure is shown, wherein the vertical MEMS curved probe is characterized by a small size (60 μm by 60 μm in cross section) and a curved structure in the middle; the probe card is characterized by a large number of pins (reaching between 2K and 10K). In the conventional operation, a layer of partition plate is arranged between an upper cover plate and a lower cover plate of a probe card, a gap is formed between the upper cover plate and the lower cover plate, then manual bending contact pins are carried out, and the partition plate is pulled out after the contact pins are finished. .

The problems of the pin inserting process method used at present are as follows:

(1) the upper cover plate and the lower cover plate are separated into manual vertical separation, and the hole positions of the upper cover plate and the lower cover plate of the probe card are staggered due to the condition of hand shaking;

(2) because the middle of the vertical MEMS bent probe is provided with the bent arc structure, when a pin is inserted, the pin penetrates through the probe hole of the upper cover plate and then is inserted into the probe hole of the lower cover plate, the pin is easy to pass through a wrong hole;

(3) because the middle of the vertical MEMS bent probe is provided with the bent arc structure, when a pin penetrates through the probe hole of the upper cover plate and is inserted into the probe hole of the lower cover plate, the pin is easy to be inserted in a blind manner, so that the probe is bent, the service life of the probe is influenced by a light person, and the probe is scrapped when the pin is heavy;

(4) when the clapboard is pulled out, the upper cover plate and the lower cover plate are deviated due to the friction force, and the needle is brought out of the probe hole and even the whole needle is scattered.

In view of the above, the present invention is directed to solving the above problems.

Disclosure of Invention

The invention aims to provide a vertical MEMS bent probe pin inserting device and a pin inserting method thereof, so that the vertical MEMS bent probe pin inserting device and the pin inserting method have the following functions:

(1) the upper cover plate and the lower cover plate can be separated stably and without deviation by adopting a method;

(2) the method can control the probe card to carry out slight freedom operations such as front and back, left and right, up and down, front and back inclination, left and right inclination, rotation and the like, so that holes on a lower cover plate of the probe card can be used for finding the vertical MEMS bent probe;

(3) by adopting the method, the pin inserting condition of the high-power microscope can be displayed, and manual timely correction is facilitated;

(4) the method for inserting the vertical MEMS bent probe pin solves the problems of pin position deviation, sprinkling, bending and the like caused by manual pin inserting and pin changing at present.

In order to achieve the above object, a first aspect of the present invention provides a vertical MEMS curved probe pin inserting apparatus for inserting a vertical MEMS curved probe into a probe card, where the probe has a hook, a needle point, a needle belly and a needle tail, the needle belly of the probe is a curved structure, a central axis extension line of the needle point is parallel to a central axis extension line of the needle tail, the probe card includes an upper cover plate and a lower cover plate, the upper cover plate is provided with an upper probe hole for the needle tail to pass through, the lower cover plate is provided with a lower probe hole for the needle point to pass through, and the innovation point is that a cross section of the lower probe hole is larger than that of the upper probe hole, the pin inserting apparatus includes:

the upper fixing structure is provided with an upper fixing plate which is used for positioning and installing an upper cover plate and is arranged downwards, an upper avoidance space which enables an upper probe hole to be opened in the probe pin inserting process is arranged on the upper fixing plate, and the upper fixing structure has the translation freedom degree in the direction of X, Y, Z;

the lower fixing structure is provided with an upward lower fixing plate for positioning and installing a lower cover plate, a lower avoidance space for opening a lower probe hole in the probe pin inserting process is arranged on the lower fixing structure, and the lower fixing plate has the freedom degrees of inclined rotation in a theta axis, an X axis and a Y axis;

the translation structure is matched and connected with the upper fixing structure and is used for driving the upper fixing structure to translate in the direction X, Y, Z;

the inclined structure is connected with the lower fixing structure in a matched mode and used for driving the lower fixing structure to incline in the angle of the theta axis, the angle of the X axis and the angle of the Y axis;

the positioning guide structure comprises guide posts arranged on the lower fixing structure and guide holes arranged on the upper cover plate and the lower cover plate corresponding to the guide posts, and is used for providing linear positioning guide in the vertical direction when the upper cover plate and the lower cover plate are separated or close to each other;

the visual detection structure is positioned in a space below the lower fixing structure and is positioned right below the lower cover plate;

the pin apparatus is configured to:

the upper fixing structure and the lower fixing structure are provided with an initial position and a working position; when the upper cover plate is at the initial position, the upper cover plate is far away from the lower cover plate, and when the upper cover plate is at the working position, the upper cover plate is close to the lower cover plate; the translation structure drives the upper fixing structure to translate in the direction X, Y, Z so as to enable the upper fixing structure and the upper cover plate to displace between the initial position and the working position; the lower fixing structure is driven by the tilting mechanism to tilt on the angles of a theta axis, an X axis and a Y axis;

and when the tilting mechanism drives the lower fixing structure to tilt at the working position, the needle tail of the probe has the freedom degrees of tilting and rotating on the theta axis, the X axis and the Y axis in the space of the lower probe hole.

The invention provides a vertical MEMS bent probe pin inserting method which is implemented based on the vertical MEMS bent probe pin inserting device.

The invention is explained below:

1. through the implementation of the technical scheme of the invention, the MEMS bent probe can ensure that the upper cover plate and the lower cover plate are stable and have no deviation to be separated before the contact pin by virtue of a mechanical structure which has a simple structure but extremely high reliability and precision, the relative parallelism position of the upper cover plate and the lower cover plate can be stably controlled by the device during the contact pin, the position of the upper cover plate and the lower cover plate can be ensured not to be deflected in the same process of combining the upper cover plate and the lower cover plate, the problems of bent pin, repeated alignment, low efficiency and the like can not occur, the cost is low, the precision is high, the yield of the contact pin with the probe with a special structure, namely the MEMS bent probe, is ensured, and the applicability is wide.

2. In the technical solution of the first aspect, the first direction is a vertical Z direction, and the second direction is a horizontal X direction perpendicular to the Z direction, and the Y direction is a direction perpendicular to the plane in which X, Z is located.

3. In the technical solution of the first aspect, the upper fixing structure is provided with an upper air passage, and an upper suction hole communicated with the upper air passage is formed in a downward surface of the upper fixing structure; the upper avoidance space comprises a first upper avoidance hole corresponding to the upper probe hole and a second upper avoidance hole corresponding to the screw mounting hole on the probe card and cooperating with the screw mounting hole on the probe card, the upper fixing plate is provided with an inner circle structure, and the inner circle structure is the first upper avoidance hole.

4. In the technical solution of the first aspect, the lower fixing structure is provided with a lower air duct, and an upward surface of the lower fixing structure is provided with a lower suction hole communicated with the lower air duct; the lower fixing structure is provided with a groove with an upward opening for placing a probe card, a lower avoidance space is arranged at a position, corresponding to the lower probe hole, of the lower fixing structure after the probe card is placed on the lower fixing structure, and the lower avoidance space is in a hole shape; the lower fixing structure is provided with a mounting hole for mounting the limiting column, and the limiting column plays a limiting role to limit overlarge pressure applied to the lower cover plate of the probe card caused by the descending of the Z axis.

5. In the technical scheme of the first aspect, the pin inserting device further comprises a base, the translation structure and the inclined structure are fixedly mounted on the base, and the base is provided with an observation port which is communicated up and down.

6. In the technical solution of the first aspect, the translation structure includes a first displacement mechanism for driving the upper fixing structure to translate along the X-axis direction, a second displacement mechanism for driving the upper fixing structure to translate along the Y-axis direction, and a third displacement mechanism for driving the upper fixing structure to translate along the Z-axis direction; wherein,

the first displacement mechanism comprises a first moving table, a first rotating knob and a first tightening knob, the first moving table is slidably mounted on the base along the X-axis direction, and the upper fixing structure is positioned and mounted on the first moving table; the first rotating knob is connected to the first moving table in a rotating mode and drives the first moving table to slide along the X-axis direction when rotating; the first tightening knob is arranged on the first mobile station and used for locking the first mobile station;

the second displacement mechanism comprises a second moving platform, a second rotating knob and a second tightening knob, and the second moving platform is slidably mounted on the second displacement mechanism along the Y-axis direction; the second rotating knob is connected to the second moving table in a screwing mode, and the second rotating knob drives the second moving table to slide along the Y-axis direction when rotating; the second tightening knob is arranged on the second mobile station and used for locking the second mobile station;

the third displacement mechanism comprises a third mobile platform, a third rotating knob and a third tightening knob, the third mobile platform is slidably mounted on the second displacement mechanism along the Z-axis direction, and the upper fixing structure is positioned and mounted on the third mobile platform; the third rotating knob is connected to the third mobile platform in a screwing mode, and the third rotating knob drives the third mobile platform to slide along the Z-axis direction when rotating; the third tightening knob is arranged on the third mobile station and used for locking the third mobile station.

7. In the technical solution of the first aspect, the tilting mechanism includes a first tilting mechanism for driving the lower fixing structure to tilt along the X-axis angle, a second tilting mechanism for driving the lower fixing structure to tilt along the Y-axis angle, and a third tilting mechanism for driving the lower fixing structure to tilt along the θ -axis angle; wherein,

the first tilting mechanism includes a first tilting table which is tiltably mounted on a base in a front-rear direction, a first tilting knob for controlling a rotation angle of the first tilting table at a minimum tilting angle of 10 ″ with respect to the base, a first tilting screw knob for locking of the first tilting table;

the second tilting mechanism includes a second tilting table tiltably mounted on the first tilting table in a left-right direction, a second tilting knob for controlling a rotation angle of the second tilting table at a minimum tilting angle of 10 ″ with respect to the base, a second tilting screw knob for locking of the second tilting table;

the third tilting mechanism includes a third tilting table tiltably mounted on the second tilting table in an up-down direction, a third tilting knob for controlling a rotation angle of the third tilting table at a minimum tilting angle of 10 ″ with respect to the base, and a third tilting tightening knob for locking of the third tilting table; and the lower fixing structure is positioned and installed on the third inclined table.

8. In the technical solution of the first aspect, the visual inspection structure includes a backlight source and a high power microscope, the backlight source is disposed above the base, and the high power microscope is disposed below the base and below the viewing port.

9. In the technical solution of the first aspect, the positioning guide structure includes a guide hole and a guide post, which are disposed between the upper fixing structure and the lower fixing structure, and when the upper fixing structure and the lower fixing structure are separated or approached in the first direction, the guide post and the guide hole are in sliding fit to provide parallel guidance.

10. In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; they may be mechanically coupled, directly coupled, indirectly coupled through intervening media, coupled between two elements, or coupled in any other manner that does not materially affect the operation of the device, unless otherwise specifically limited. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

11. In the present invention, the terms "center", "upper", "lower", "axial", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional arrangements shown in the drawings, and are only for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present application.

12. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present application, "plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

Due to the application of the scheme, compared with the prior art, the invention has the following advantages and effects:

(1) by implementing the technical scheme of the invention, the upper cover plate and the lower cover plate can be separated stably without offset;

(2) by implementing the technical scheme of the invention, the probe card can be controlled to carry out slight freedom degree operations such as front and back, left and right, up and down, front and back inclination, left and right inclination, rotation and the like, so that a hole of a lower cover plate of the probe card can find the vertical MEMS bent probe;

(3) by implementing the technical scheme of the invention, the pin inserting condition can be displayed by the high-power microscope, so that the manual timely correction is facilitated;

(4) through the implementation of the technical scheme of the invention, the problems of needle position deviation, sprinkling, bending and the like caused by manual needle inserting and needle changing at present are solved.

(5) By implementing the technical scheme of the invention, the cost is low and the precision is high.

Drawings

FIG. 1 is a schematic perspective view of a vertical MEMS bent probe pin device according to an embodiment of the present invention;

FIGS. 2A to 2C are schematic structural diagrams of a vertical MEMS bending probe according to an embodiment of the present invention;

FIGS. 3A-3B are schematic diagrams of a finished probe card and an assembly of the probe card according to an embodiment of the invention;

FIGS. 4A to 4C are front views of a lower fixing structure in an embodiment of the present invention;

FIG. 5 is a front view of an upper mounting structure in an embodiment of the present invention;

FIG. 6 is a schematic structural diagram of a first displacement mechanism in an embodiment of the present invention;

FIG. 7 is a schematic structural diagram of a second displacement mechanism in an embodiment of the present invention;

FIG. 8 is a schematic structural diagram of a third displacement mechanism according to an embodiment of the present invention;

FIG. 9 is a schematic structural view of a first tilting mechanism in the embodiment of the present invention;

FIG. 10 is a schematic structural view of a second tilting mechanism in the embodiment of the present invention;

FIG. 11 is a schematic structural view of a third reclining mechanism according to an embodiment of the present invention;

FIG. 12 is a schematic structural diagram of a visual inspection structure according to an embodiment of the present invention;

FIG. 13 is a schematic view showing a state where a second step of fixing a probe is performed in an example of the present invention;

FIG. 14 is a diagram illustrating a third step of separating the probe card according to an embodiment of the present invention;

FIG. 15 is a state diagram illustrating the fourth step of pin implementation according to the present invention.

The drawings are shown in the following parts:

1. an upper fixing structure; 11. an upper fixing plate; 111. an upper avoidance space; 1111. a first upper avoidance hole; 1112. a second upper avoidance hole; 112. an upper airway; 113. an upper suction hole;

2. a lower fixed structure; 21. a lower fixing plate; 211. a lower avoidance space; 212. a lower airway; 213. a lower suction hole; 214. a groove; 215. mounting holes;

3. a translation structure;

31. a first displacement mechanism; 311. a first mobile station; 312. a first rotary knob; 313. a first tightening knob;

32. a second displacement mechanism; 321. a second mobile station; 322. a second rotary knob; 323. a second tightening knob;

33. a third displacement mechanism; 331. a third mobile station; 332. a third rotary knob; 333. a third tightening knob;

4. a tilt structure;

41. a first tilting mechanism; 411. a first tilting table; 412. a first tilt knob; 413. a first inclined tightening knob;

42. a second tilting mechanism; 421. a second tilt table; 422. a second tilt knob; 423. a second inclined tightening knob;

43. a third tilting mechanism; 431. a third tilting table; 432. a third tilt knob; 433. a third inclined tightening knob;

5. a positioning guide structure; 51. a guide post; 52. a guide hole;

6. a visual inspection structure; 61. a backlight source; 62. a high power microscope;

7. a base; 71. a viewing port;

8. a probe; 81. a needle tip; 82. the needle abdomen; 83. needle tail; 84. a needle hook;

9. a probe card; 91. an upper cover plate; 911. an upper probe hole; 92. a lower cover plate; 921. and (5) descending a probe hole.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present application more comprehensible, embodiments accompanying the present application are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. This application is capable of embodiments in many different forms than those described herein and that modifications may be made by one skilled in the art without departing from the spirit and scope of the application and it is therefore not intended to be limited to the specific embodiments disclosed below.

The embodiment of the invention provides a vertical MEMS (micro electro mechanical systems) bent probe pin inserting device, a pin inserting method thereof, computer equipment and a storage medium, which are used for solving the following technical problems:

(1) the upper and lower cover plates 92 can be separated stably without offset by a method;

(2) by adopting the method, the probe card 9 can be controlled to carry out slight freedom degree operations such as front and back, left and right, up and down, front and back inclination, left and right inclination, rotation and the like, so that the lower cover plate 92 hole of the probe card 9 can be used for finding the vertical MEMS bent probe;

(3) by adopting the method, the pin inserting condition can be displayed by the high power microscope 62, so that the manual timely correction is convenient;

Example one

Referring to fig. 1 to 12, a vertical MEMS bending probe inserting apparatus according to an embodiment of the present invention is provided for inserting a vertical MEMS bending probe into a probe card 9, where the probe has a tip 81, an abdomen 82, a tail 83, and a hook 84, the abdomen 82 of the probe is a bent structure, a central axis extension line of the tip 81 is parallel to a central axis extension line of the tail 83, the probe card 9 includes an upper cover plate 91 and a lower cover plate 92, an upper probe hole 911 for the tail 83 to pass through is disposed on the upper cover plate 91, a lower probe hole 921 for the tip 81 to pass through is disposed on the lower cover plate 92, and a cross section of the lower probe hole 921 is larger than the upper probe hole 911, and the inserting apparatus includes: an upper fixing structure 1, wherein the upper fixing structure 1 is provided with a downward upper fixing plate 11 for positioning and installing an upper cover plate 91, an upper avoidance space 111 for opening an upper probe hole 911 in a probe pin inserting process is arranged on the upper fixing plate 11, and the upper fixing structure 1 has a translational degree of freedom in the direction of X, Y, Z; the lower fixing structure 2 is provided with an upward lower fixing plate 21 for positioning and installing the lower cover plate 92, a lower avoidance space 211 for opening a lower probe hole 921 in the probe pin inserting process is formed in the lower fixing structure 2, and the lower fixing plate 21 has the freedom degrees of inclined rotation of a theta axis, an X axis and a Y axis; the translation structure 3 is connected with the upper fixing structure 1 in a matching manner, and is used for driving the upper fixing structure 1 to translate in the direction X, Y, Z; the inclined structure 4 is connected with the lower fixing structure 2 in a matched mode and used for driving the lower fixing structure 2 to incline in the angle of the theta axis, the angle of the X axis and the angle of the Y axis; the positioning guide structure 5 comprises guide posts 51 arranged on the lower fixing structure 2 and guide holes 52 corresponding to the guide posts 51 and arranged on the upper cover plate 91 and the lower cover plate 92, and is used for providing linear positioning guide in the vertical direction when the upper cover plate 91 and the lower cover plate 92 are separated or close to each other; a visual inspection structure 6, wherein the visual inspection structure 6 is positioned in a space below the lower fixing structure 2, and the visual inspection structure 6 is positioned right below the lower cover plate 92;

by the arrangement of the components in the first embodiment, the pin device is configured to:

the upper fixed structure 1 and the lower fixed structure 2 have an initial position and a working position; in the initial position, the upper cover plate 91 is far away from the lower cover plate 92, and in the working position, the upper cover plate 91 is close to the lower cover plate 92; the upper fixed structure 1 is driven by the translation structure 3 to translate in the direction X, Y, Z, so that the upper fixed structure 1 and the upper cover plate 91 are displaced between the initial position and the working position; the lower fixing structure 2 is driven by the tilting mechanism to tilt on the angles of a theta axis, an X axis and a Y axis;

when the lower fixing structure 2 is driven to incline by the inclining mechanism at the working position, the needle tail 83 of the probe has the freedom degrees of inclining and rotating on the theta axis, the X axis and the Y axis in the space of the lower probe hole 921;

and in the working position, when the translation mechanism drives the upper fixing structure 1 to move towards the lower fixing structure 2, the upper probe holes 911 on the upper cover plate 91 vertically correspond to the lower probe holes 921 on the lower cover plate 92 one by one, and the guide holes 52 on the upper cover plate 91 vertically correspond to the guide posts 51 on the lower fixing structure 2 one by one.

The structure and components designed in the first embodiment of the present invention will be described below.

Vertical MEMS bent probe structures are shown in fig. 2A to 2C, the probe having a hook 84, a tip 81, a belly 82 and a tail 83, the vertical MEMS bent probe having a small cross-section (60 μm by 60 μm cross-section), a large length (8 mm) and a bent structure in the middle.

The structure of the probe card 9 is shown in fig. 3A and 3B. The probe card 9 is divided into an upper cover plate 91 and a lower cover plate 92, an upper probe hole 911 for the penetration of the probe tail 83 is arranged on the upper cover plate 91, a lower probe hole 921 for the penetration of the probe tip 81 is arranged on the lower cover plate 92, the size of the probe hole of the upper cover plate 91 (the cross section is 65 μm by 65 μm), the size of the probe hole of the lower cover plate 92 (the cross section is 80 μm by 80 μm), and the probe hole of the lower cover plate 92 is larger than the probe hole of the upper cover plate 91, so that the vertical MEMS bent probe can be inserted into the probe hole of the lower cover plate 92, and the edge of the probe hole can be hooked by a hook of the probe to be fixed.

The upper cover plate 91 of the probe card 9 is provided with a groove 214 at the position of a probe hole, the lower cover plate 92 of the probe card 9 is provided with a groove 214 at the position of a probe hole, and after the upper cover plate 91 and the lower cover plate 92 are installed, a cavity is formed at the position of the probe hole, and a probe is arranged in the cavity.

As shown in fig. 4A to 4B, the lower fixing structure 2 is provided with a lower air duct 212, and the upward surface of the lower fixing structure 2 is provided with a lower suction hole 213 communicated with the lower air duct 212; a groove 214 with an upward opening for placing a probe card 9 is formed in the lower fixing structure 2, a lower avoidance space 211 is formed in the position, corresponding to the lower probe hole 921, of the lower fixing structure 2 after the probe card 9 is placed, and the lower avoidance space 211 is in a hole shape; the lower fixing structure 2 is provided with a mounting hole 215 for mounting a limiting column, and the limiting column plays a limiting role to limit the excessive pressure applied to the lower cover plate 92 of the probe card 9 caused by the descending of the Z axis.

Specifically, the lower fixing structure 2 is a lower adsorption plate structure, and the lower adsorption plate structure is shown in fig. 4A. According to the lower clamping structure of the probe card 9, the lower adsorption plate is provided with air passages which are communicated with each other, the side wall of the lower adsorption plate is provided with a threaded hole, and a small hole is formed at the intersection of the path of the threaded hole and the air passage so as to communicate the air passages with the threaded hole. When the entire probe card 9 is mounted on the lower suction plate, the suction force generated by the vacuum suction firmly holds the lower cover plate 92 of the probe card 9.

The lower adsorption plate is provided with a positioning pin which is matched with a pin hole of the probe card 9 to play a role in guiding.

The lower adsorption plate is provided with two mounting holes 215 for mounting the limiting columns, and the limiting columns play a limiting role in limiting the over-pressure on the lower cover plate 92 of the probe card 9 possibly caused by the descending of the Z axis.

The bosses are arranged on the periphery of the lower adsorption plate to play a role in limiting and fixing, when the probe card 9 is placed on the lower adsorption plate, the position can be easily limited, and the fixing time is saved.

The lower adsorption plate is provided with a large hole for avoiding the lower cover plate 92 of the probe card 9, so that the lower cover plate 92 of the probe card 9 leaks, and the backlight 61 can emit light to be mapped into the high power microscope 62.

As shown in fig. 5, the upper fixing structure 1 is provided with an upper air flue 112, and the downward surface of the upper fixing structure 1 is provided with an upper suction hole 113 which is communicated with the upper air flue 112; the upper avoidance space 111 includes a first upper avoidance hole 1111 provided corresponding to the upper probe hole 911 and a second upper avoidance hole 1112 cooperating with the screw mounting hole 215 of the probe card 9, and the upper fixing plate 11 has an inner circular structure located at the first upper avoidance hole 1111.

Specifically, the upper fixing structure 1 is an upper suction plate structure, as shown in fig. 5, according to the upper clamping structure of the probe card 9, air passages communicated with each other are designed, a threaded hole is formed in the side wall of the upper suction plate, and a small hole is formed at the intersection of the threaded hole path and the air passage, so that the air passages are communicated with the threaded hole. When the upper suction plate contacts the upper cover plate 91 of the probe card 9, the suction force generated by the vacuum suction firmly holds the upper cover plate 91 of the probe card 9.

The upper adsorption plate is provided with an avoiding hole for avoiding the screw mounting hole 215 on the probe card 9, so that the upper adsorption plate is convenient to detach and mount.

The upper adsorption plate is designed to be an inner circle structure, and avoids the probe mounting hole 215 of the upper cover plate 91 of the probe card 9, so that the manual pin inserting operation is facilitated.

As shown in fig. 1, the pin inserting device further includes a base 7, the translation structure 3 and the inclined structure 4 are both fixedly mounted on the base 7, and the base 7 is provided with an observation port 71 which is through up and down.

As shown in fig. 1, the translation structure 3 includes a first displacement mechanism 31 for driving the upper fixing structure 1 to translate along the X-axis direction, a second displacement mechanism 32 for driving the upper fixing structure 1 to translate along the Y-axis direction, and a third displacement mechanism 33 for driving the upper fixing structure 1 to translate along the Z-axis direction.

As shown in fig. 6, the first displacement mechanism 31 includes a first moving stage 311, a first rotating knob 312, and a first tightening knob 313, the first moving stage 311 is slidably mounted on the base 7 along the X-axis direction, and the upper fixing structure 1 is positioned and mounted on the first moving stage 311; the first rotating knob 312 is screwed on the first moving stage 311, and when the first rotating knob 312 rotates, the first moving stage 311 is driven to slide along the X-axis direction; the first tightening knob 313 is disposed on the first moving stage 311, and the first tightening knob 313 is used for locking the first moving stage 311.

Specifically, the first displacement mechanism 31 is an X-axis sliding table structure, which is shown in fig. 6, the X-axis sliding table is installed on the bottom plate, the knob is rotated to control the front and back micro-precision movement of the upper cover plate 91 of the probe card 9, and the minimum displacement of the X-axis platform dividing head is 2 μm.

The X-axis slide has a tightening knob which fixes the position of the upper cover plate 91 of the probe card 9 in the X direction when the fixed position is fixed.

As shown in fig. 7, the second displacement mechanism 32 includes a second moving stage 321, a second rotating knob 322, and a second tightening knob 323, and the second moving stage 321 is slidably mounted on the second displacement mechanism 32 along the Y-axis direction; the second rotating knob 322 is screwed on the second moving stage 321, and when the second rotating knob 322 rotates, the second moving stage 321 is driven to slide along the Y-axis direction; the second tightening knob 323 is disposed on the second moving stage 321, and the second tightening knob 323 is used for locking the second moving stage 321.

Specifically, the second displacement mechanism 32 is a Y-axis sliding table structure, which is shown in fig. 7, the Y-axis sliding table is mounted on the X-axis moving table, and the knob is rotated to control the upper cover plate 91 of the probe card 9 to move slightly and precisely left and right, and the minimum displacement of the Y-axis table dividing head is 2 μm.

The Y-axis slide has a tightening knob that fixes the position of the upper cover 91 of the probe card 9 in the Y-direction when the fixed position is fixed.

As shown in fig. 8, the third displacement mechanism 33 includes a third moving stage 331, a third rotating knob 332, and a third tightening knob 333, the third moving stage 331 is slidably mounted on the second displacement mechanism 32 along the Z-axis direction, and the upper fixing structure 1 is fixedly mounted on the third moving stage 331; the third rotating knob 332 is screwed on the third moving stage 331, and when the third rotating knob 332 rotates, the third moving stage 331 is driven to slide along the Z-axis direction; the third tightening knob 333 is disposed on the third moving stage 331, and the third tightening knob 333 is used for locking the third moving stage 331.

Specifically, the third displacement mechanism 33 is a Z-axis sliding table structure, which is shown in fig. 8, and the Z-axis sliding table is connected to the Y-axis moving table through a transfer plate mounted on the Y-axis moving table, and the knob is rotated to control the upper cover plate 91 of the probe card 9 to move up and down in a micro-precision manner, where the minimum displacement of the kilominute head of the Z-axis table is 2 μm.

The Z-axis slide has a tightening knob which fixes the position of the cover plate 91 of the probe card 9 in the Z-direction when the fixed position is fixed.

As shown in fig. 1, the tilting mechanism 4 includes a first tilting mechanism 41 for driving the lower fixing structure 2 to tilt along the X-axis, a second tilting mechanism 42 for driving the lower fixing structure 2 to tilt along the Y-axis, and a third tilting mechanism 43 for driving the lower fixing structure 2 to tilt along the θ -axis.

As shown in fig. 9, the first tilting mechanism 41 includes a first tilting table 411, a first tilting knob 412, and a first tilting tightening knob 413, the first tilting table 411 is tiltably mounted on the base 7 in the front-rear direction, the minimum tilting angle of the first tilting table 411 with respect to the base 7 is 10 ″, the first tilting knob 412 is used to control the rotation angle of the first tilting table 411, and the first tilting tightening knob 413 is used to lock the first tilting table 411.

Specifically, the first tilting mechanism 41 is an X-axis angular tilting stage structure, which is mounted on the base 7, as shown in fig. 9, and the rotation knob controls the back and forth direction angle of the lower cover plate 92 of the probe card 9 to move slightly and precisely, and the minimum tilting angle of the X-axis angular tilting stage is 10 ".

The X-axis angular tilt stage has a tightening knob that fixes the angular position of the lower cover plate 92 of the probe card 9 in the forward and backward direction when the fixed position is not moved.

As shown in fig. 10, the second tilting mechanism 42 includes a second tilting table 421, a second tilting knob 422, and a second tilting tightening knob 423, the second tilting table 421 is tiltably mounted on the first tilting table 411 in the left-right direction, the minimum tilting angle of the second tilting table 421 with respect to the base 7 is 10 ″, the second tilting knob 422 is used to control the rotation angle of the second tilting table 421, and the second tilting tightening knob 423 is used to lock the second tilting table 421.

Specifically, the second tilting mechanism 42 is a Y-axis angular tilting stage structure, which is mounted on an X-axis angular tilting stage moving stage as shown in fig. 10, and the rotation knob controls the right and left angular minute movement of the lower cover plate 92 of the probe card 9, and the minimum tilting angle of the Y-axis angular tilting stage is 10 ".

The Y-axis angular tilt stage has a tightening knob that fixes the angular position of the lower cover plate 92 of the probe card 9 in the left-right direction when the position is determined to be stationary.

As shown in fig. 11, the third tilting mechanism 43 includes a third tilting table 431, a third tilting knob 432, and a third tilt tightening knob 433, the third tilting table 431 is tiltably mounted on the second tilting table 421 in the up-down direction, the minimum tilting angle of the third tilting table 431 with respect to the base 7 is 10 ″, the third tilting knob 432 is used to control the rotation angle of the third tilting table 431, and the third tilt tightening knob 433 is used to lock the third tilting table 431; the lower fixed structure 2 is positioned and mounted on a third tilting table 431.

Specifically, the third tilting mechanism 43 is a θ -axis sliding table structure, as shown in fig. 11, the θ -axis sliding table is mounted on a Y-axis angular tilting table moving table, and the rotation knob controls the Z-direction angle of the lower cover plate 92 of the probe card 9 to move slightly and accurately, where the minimum tilt angle of the θ -axis sliding table is 10 ".

The theta axis slide has a tightening knob which fixes the angular position of the lower cover plate 92 of the probe card 9 in the Z direction when the fixed position is fixed.

As shown in fig. 1, the positioning guide structure 5 includes a guide hole 52 and a guide post 51 disposed between the upper fixing structure 1 and the lower fixing structure 2, and when the upper fixing structure 1 and the lower fixing structure 2 are separated or approached in the first direction, a parallel guide is provided by the sliding fit of the guide post 51 and the guide hole 52.

Specifically, the guide posts 51 may be columnar objects such as positioning pins and pins provided on both sides of the probe card 9 and the lower fixing structure 2, one on each side, and the guide holes 52 are provided at positions of the lower fixing structure 2, the lower cover plate 92, and the upper cover plate 91 that are one-to-one and perpendicular to each other, so as to ensure parallelism when the lower cover plate 92 and the upper cover plate 91 are separated and approached with a low cost and high accuracy.

The visual inspection structure 6 includes a backlight 61 and a high power microscope 62, the backlight 61 is disposed above the base 7, the high power microscope 62 is disposed below the base 7 and below the viewing port 71, and the high power microscope 62 is as shown in fig. 12. The base 7 is provided with an avoiding hole, the backlight 61 can irradiate the probe hole of the lower cover plate 92 of the probe card 9 through the avoiding hole, and the high-power microscope 62 is arranged below the base 7 and used for observing the condition of the contact pin, so that misoperation during manual contact pin can be prevented.

Second embodiment, referring to fig. 13 to 15, a second embodiment of the present invention provides a Cobra probe pin insertion method, which is implemented by using the apparatus according to the first embodiment, and the method includes the following steps:

the first step is as follows: pin preparation

1. The first mobile station 311 moves to a secure location;

2. the second mobile station 321 moves to a secure location;

3. the third mobile station 331 ascends to move to a safe position;

4. the first tilt table 411 moves to a safe position;

5. the second tilting table 421 moves to the safety position;

6. the third tilting table 431 is moved to the safety position;

7. the upper fixing plate 11 is closed in a vacuumizing air path and is in a normal air pressure state;

8. the vacuumizing air path of the lower fixing plate 21 is closed and is in a normal air pressure state;

the second step is that: fixed probe card 9 (refer to FIG. 13)

1. Placing the probe card 9 on the lower fixing plate 21;

2. the first mobile station 311 moves to the working position;

3. the second mobile station 321 moves to the working position;

4. the first tilt table 411 moves to the working position;

5. the second tilting table 421 moves to the working position;

6. the third tilting table 431 is moved to the working position;

7. installing the guide post 51 for fine positioning and fixing the probe card 9;

the third step: separating probe card 9 (refer to FIG. 14)

1. Opening the vacuum-pumping air path of the lower fixing plate 21 to firmly fix the lower cover plate 92 of the probe card 9 on the lower fixing plate 21;

2. the third moving stage 331 is moved to be slowly lowered until the upper fixing plate 11 contacts the upper fixing plate 11 of the probe card 9;

3. opening the vacuumizing air passage of the upper fixing plate 11 to firmly fix the upper cover plate 91 of the probe card 9 on the upper fixing plate 11;

4. the screws of the upper cover plate 91 and the lower cover plate 92 of the probe card 9 are loosened through the screw avoiding holes of the upper fixing plate 11;

5. moving the third moving table 331 to slowly rise to a certain height, and then screwing the locking knob of the third moving table 331 for fixing;

the fourth step: contact pin (refer to the attached figure 15)

1. Manually inserting pins by means of a backlight 61 and a high power microscope 62;

2. when a probe is manually inserted or a manipulator pin is inserted through the upper cover plate 91 and cannot fall into a probe hole of the lower cover plate 92 of the probe card 9, the first screwing knob 313 is loosened, the first moving table 311 is moved slightly left and right, and the probe is driven to enter the probe hole of the lower cover plate 92 of the probe card 9;

3. loosening the second moving table 321 to tighten the knob, moving the second moving table 321 back and forth slightly, and driving the probes to enter the probe holes of the lower cover plate 92 of the probe card 9;

4. loosening the third tightening knob 333, moving the third moving table 331 slightly up and down, and driving the probes to enter the probe holes of the lower cover plate 92 of the probe card 9;

5. loosening the first inclined tightening knob 413, moving the first inclined table 411 by a slight left-right inclination angle, and driving the probes to enter the probe holes of the lower cover plate 92 of the probe card 9;

6. loosening the second inclined tightening knob 423 to move the second inclined table 421 at a slight front and back inclination angle, so as to drive the probes to enter the probe holes of the lower cover plate 92 of the probe card 9;

7. loosening the third inclined tightening knob 433, moving the third inclined table 431 by a left-right micro rotation angle, and driving the probes to enter the probe holes of the lower cover plate 92 of the probe card 9;

8. reciprocating in the above way, and inserting the rest vertical MEMS bent probes;

9. the remaining inserted probes do not slip out of the lower cover plate 92 of the probe card 9 because of the allowance left by the probe tips 81;

the fifth step: fixing the probe card 9

1. After the probe is inserted, the upper cover plate 92 and the lower cover plate 92 need to be closed and fixed by screws;

2. the first mobile station 311 moves to the working position;

3. the second mobile station 321 moves to the working position;

4. the first tilt table 411 moves to the working position;

5. the second tilting table 421 is moved to the working position;

6. the third tilting table 431 is moved to the working position;

7. loosening the third moving locking knob, moving the third moving table 331 to slowly descend, and enabling the upper cover plate 91 of the probe card 9 to be in contact with the lower cover plate 92 of the probe card 9;

8. screws for connecting the upper cover plate 91 of the probe card 9 with the lower cover plate 92 of the probe card 9 are screwed through the screw avoiding holes of the upper fixing plate 11;

9. closing the vacuum gas circuit of the upper fixing plate 11;

10. closing the vacuum gas circuit of the lower fixing plate 21;

the seventh step: taking out the Probe card 9

1. Slowly moving the third moving table 331 to a certain height, and separating the bottom surface of the upper fixing plate 11 from the upper cover plate 91 of the probe card 9;

2. the probe card 9 is taken out.

Through the implementation of the above specific embodiment, the following parts and bright points are provided:

(1) vacuum adsorption lower suction plate structure

One of the bright spots of the present invention: according to the lower clamping structure of the probe card 9, the air channel with reasonable design is provided with a small hole on the threaded hole channel arranged at the bottom. When the entire probe card 9 is mounted on the lower suction plate, the lower suction plate is firmly held by the vacuum.

(2) Vacuum adsorption upper suction plate structure

The second aspect of the present invention: according to the upper clamping structure of the probe card 9, the air channel with reasonable design is provided with small holes on the threaded hole channel arranged at the bottom. When the upper suction plate is pressed down to contact the upper card of the probe card 9, the upper suction plate is firmly fixed by vacuum pumping.

(3) X-axis sliding table controls left and right movement of upper cover plate 91 of probe card 9

The invention has the third bright point: the X-axis sliding table controls the upper cover plate 91 of the probe card 9 to move accurately in a left-right micro-scale mode, and can drive the vertical MEMS bent probe to move accurately in a left-right micro-scale mode, so that the vertical MEMS bent probe is inserted into a probe hole of a lower cover plate 92 of the probe card 9.

(4) Y-axis sliding table for controlling the upper cover plate 91 of the probe card 9 to move back and forth

The fourth of the bright spots of the present invention: the Y-axis sliding table controls the front and back micro-precision movement of the upper cover plate 91 of the probe card 9, and can drive the front and back micro-precision movement of the vertical MEMS bent probe, so that the vertical MEMS bent probe is inserted into a probe hole of the lower cover plate 92 of the probe card 9.

(5) Z-axis sliding table for controlling the upper cover plate 91 of the probe card 9 to move up and down

The invention has the following five points: the Z-axis sliding table controls the upper cover plate 91 of the probe card 9 to move up and down slightly and accurately, and can drive the vertical MEMS bent probe to move up and down slightly and accurately, so that the vertical MEMS bent probe is inserted into a probe hole of the lower cover plate 92 of the probe card 9.

(6) X-axis angle tilting table for controlling the left-right angle tilting micro-movement of the lower cover plate 92 of the probe card 9

The invention has six bright spots: the X-axis angle tilting table controls the lower cover plate 92 of the probe card 9 to tilt and slightly move left and right, so that the probe pin hole of the lower cover plate 92 of the probe card 9 can be driven to find the vertical MEMS bent probe pin point 81, and the probe pin can be inserted into the probe pin hole of the lower cover plate 92 of the probe card 9.

(7) Y-axis angle tilting table for controlling the front and back angle tilting micro-movement of the lower cover plate 92 of the probe card 9

The present invention is characterized by the seventh: the Y-axis angle tilting table controls the lower cover plate 92 of the probe card 9 to tilt and slightly move back and forth, so that the probe hole of the lower cover plate 92 of the probe card 9 can be driven to find the vertical MEMS bent probe tip 81, and the probe can be inserted into the probe hole of the lower cover plate 92 of the probe card 9.

(8) Theta axis sliding table for controlling probe card 9 upper cover plate 91 to move back and forth

Eight of the bright spots of the present invention: the theta axis sliding table controls the lower cover plate 92 of the probe card 9 to move precisely in the Z direction, and can drive the probe hole of the lower cover plate 92 of the probe card 9 to find the vertical MEMS curved probe tip 81, so as to be inserted into the probe hole of the lower cover plate 92 of the probe card 9.

(9) High power microscope 62 amplifying structure

The present invention is characterized by the ninth aspect: the base 7 is provided with a hole, the backlight 61 can be mapped to the hole of the probe card 9 through the hole, and the bottom of the lower cover plate 92 of the probe card 9 is provided with the high power microscope 62 for observing the condition of the pin insertion, helping the human eye to identify the condition of the pin insertion of the probe hole and the probe needle point 81, and preventing the human from misoperation during manual pin insertion.

(10) Method for separating pins of upper cover plate 92 and lower cover plate 92 of probe card 9

The invention is characterized by the following: the upper cover plate 92 and the lower cover plate 92 of the probe card 9 are separated in a vacuum suction mode, manual pins are displayed through the high power microscope 62 by people, when the probes are inserted into other holes by mistake, the probes can be pulled out and inserted again in real time, the efficiency is improved, and the error rate is greatly reduced.

The above embodiments are merely illustrative of the technical ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.

Claims

1. The utility model provides a rectilinear MEMS bent probe insertion needle device for in inserting rectilinear MEMS bent probe the probe card, the probe has needle point, needle abdomen, backshank and hook, the needle abdomen of probe is curved structure, be parallel between the center pin extension line of needle point and the center pin extension line of backshank, the probe card includes upper cover plate and lower cover plate, be provided with the last probe hole that is used for the backshank to pass on the upper cover plate, be provided with the lower probe hole that is used for the needle point to pass on the lower cover plate, its characterized in that, the cross-section of lower probe hole is greater than go up the probe hole, insertion needle device includes:

the inclined structure is connected with the lower fixing structure in a matched mode and used for driving the lower fixing structure to incline on the angles of a theta axis, an X axis and a Y axis;

the pin apparatus is configured to:

2. The vertical MEMS curved probe pin apparatus of claim 1, wherein: the first direction is the up-down Z direction, the second direction is the horizontal X direction perpendicular to the Z direction, and the Y direction is the direction perpendicular to the plane of X, Z.

3. The vertical MEMS curved probe pin apparatus of claim 1, wherein: the upper fixing structure is provided with an upper air passage, and the downward surface of the upper fixing structure is provided with an upper suction hole communicated with the upper air passage; the upper avoidance space comprises a first upper avoidance hole corresponding to the upper probe hole and a second upper avoidance hole corresponding to the screw mounting hole on the probe card and cooperating with the screw mounting hole on the probe card, the upper fixing plate is provided with an inner circle structure, and the inner circle structure is the first upper avoidance hole.

4. The vertical MEMS curved probe pin apparatus of claim 1, wherein: the lower fixing structure is provided with a lower air passage, and the upward surface of the lower fixing structure is provided with a lower suction hole communicated with the lower air passage; the lower fixing structure is provided with a groove with an upward opening for placing a probe card, a lower avoidance space is arranged at a position, corresponding to the lower probe hole, of the lower fixing structure after the probe card is placed on the lower fixing structure, and the lower avoidance space is in a hole shape; the lower fixing structure is provided with a mounting hole for mounting the limiting column, and the limiting column plays a limiting role to limit overlarge pressure applied to the lower cover plate of the probe card caused by the descending of the Z axis.

5. The vertical MEMS curved probe pin apparatus of claim 1, wherein: the pin inserting device further comprises a base, wherein the translation structure and the inclined structure are fixedly arranged on the base, and the base is provided with an observation port which is communicated up and down.

6. The vertical MEMS bent probe pin device of claim 5, wherein: the translation structure comprises a first displacement mechanism for driving the upper fixing structure to translate along the X-axis direction, a second displacement mechanism for driving the upper fixing structure to translate along the Y-axis direction, and a third displacement mechanism for driving the upper fixing structure to translate along the Z-axis direction; wherein,

the first displacement mechanism comprises a first moving platform, a first rotating knob and a first tightening knob, the first moving platform is slidably mounted on the base along the X-axis direction, and the upper fixing structure is positioned and mounted on the first moving platform; the first rotating knob is connected to the first moving table in a rotating mode and drives the first moving table to slide along the X-axis direction when rotating; the first tightening knob is arranged on the first mobile station and used for locking the first mobile station;

7. The vertical MEMS bent probe pin device of claim 5, wherein:

the tilting mechanism comprises a first tilting mechanism for driving the lower fixing structure to tilt along an X-axis angle, a second tilting mechanism for driving the lower fixing structure to tilt along a Y-axis angle, and a third tilting mechanism for driving the lower fixing structure to tilt along a theta-axis angle; wherein,

8. The vertical MEMS curved probe pin apparatus of claim 1, wherein: the visual detection structure comprises a backlight source and a high-power microscope, wherein the backlight source is arranged above the base, and the high-power microscope is arranged below the base and positioned below the observation port.

9. The vertical MEMS curved probe pin apparatus of claim 1, wherein: the positioning guide structure comprises a guide hole and a guide post which are arranged between the upper fixing structure and the lower fixing structure, and when the upper fixing structure and the lower fixing structure are separated or close to each other in the first direction, the guide post and the guide hole are in sliding fit to provide parallel guide.

10. A vertical MEMS curved probe pin method based on the vertical MEMS curved probe pin apparatus of any one of claims 1 to 9, the method comprising the steps of:

the first step is as follows: pin preparation

1. The first mobile station moving to a secure location;

2. the second mobile station moves to a secure position;

3. the third mobile station ascends and moves to a safe position;

4. the first tilting table is moved to a safe position;

5. the second tilting table is moved to a safe position;

6. the third tilting table is moved to a safety position;

7. the upper fixing plate is closed in a vacuumizing air path and is in a normal air pressure state;

8. the vacuumizing air path of the lower fixing plate is closed and is in a normal air pressure state;

the second step is that: fixed probe card

1. Placing a probe card on the lower fixing plate;

2. the first mobile station moves to the working position;

3. the second mobile station moves to the working position;

4. the first tilting table is moved to a working position;

5. the second tilting table is moved to the working position;

6. the third tilting table moves to the working position;

7. installing a guide post for fine positioning and fixing a probe card;

the third step: separating probe card

1. Opening a vacuumizing gas circuit of the lower fixing plate to firmly fix the lower cover plate of the probe card on the lower fixing plate;

2. moving the third movable table to slowly descend until the upper fixed plate contacts the upper fixed plate of the probe card;

3. opening a vacuumizing gas path of the upper fixing plate to firmly fix the upper cover plate of the probe card on the upper fixing plate;

4. loosening screws of an upper cover plate and a lower cover plate of the probe card through screw avoiding holes of the upper fixing plate;

5. moving the third mobile station to slowly rise to a certain height, and then screwing a locking knob of the third mobile station for fixing;

the fourth step: pin

1. Manually inserting pins by depending on a backlight source and a high power microscope;

2. when a probe is manually inserted into the probe hole of the lower cover plate of the probe card by a person or a manipulator, the first tightening knob is loosened, the first moving table is moved leftwards and rightwards slightly, and the probe is driven to enter the probe hole of the lower cover plate of the probe card;

3. loosening the second mobile station to screw down the knob, and moving the second mobile station back and forth slightly to drive the probe to enter the probe hole of the lower cover plate of the probe card;

4. loosening the third tightening knob, and slightly moving the third mobile station up and down to drive the probes to enter the probe holes of the lower cover plate of the probe card;

5. loosening the first inclined tightening knob, moving the first inclined table at a left and right micro inclined angle, and driving the probe to enter the probe hole of the lower cover plate of the probe card;

6. loosening the second inclined tightening knob, moving the second inclined table at a front and back micro inclined angle, and driving the probe to enter the probe hole of the lower cover plate of the probe card;

7. loosening the third inclined tightening knob, and moving the third inclined table by a left-right micro rotation angle to drive the probe to enter the probe hole of the lower cover plate of the probe card;

9. the rest inserted probes cannot slide out of the lower cover plate of the probe card because the probe tips have allowance;

the fifth step: fixed probe card

1. After the probe is inserted, the upper cover plate and the lower cover plate need to be closed and fixed by using screws;

2. the first mobile station moves to the working position;

3. the second mobile station moves to the working position;

4. the first tilting table is moved to a working position;

5. the second tilting table is moved to the working position;

6. the third tilting table moves to the working position;

7. loosening the third movable locking knob, and moving the third movable table to slowly descend to enable the upper cover plate of the probe card to be contacted with the lower cover plate of the probe card;

8. screws for connecting the upper cover plate of the probe card and the lower cover plate of the probe card are screwed through the screw avoiding holes of the upper fixing plate;

9. closing the vacuum gas circuit of the upper fixed plate;

10. closing the vacuum gas circuit of the lower fixing plate;

the seventh step: taking out probe card

1. Slowly moving the third mobile station to rise to a certain height, and keeping the bottom surface of the upper fixing plate away from the upper cover plate of the probe card;

2. and taking out the probe card.