CN114487744A - Information collecting equipment before power failure of test head and collecting method thereof - Google Patents

Information collecting equipment before power failure of test head and collecting method thereof Download PDF

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Publication number
CN114487744A
CN114487744A CN202111515522.1A CN202111515522A CN114487744A CN 114487744 A CN114487744 A CN 114487744A CN 202111515522 A CN202111515522 A CN 202111515522A CN 114487744 A CN114487744 A CN 114487744A
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test
module
power failure
voltage threshold
cpu
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徐波波
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Shanghai Ncatest Technologies Co Ltd
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Shanghai Ncatest Technologies Co Ltd
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Priority to CN202111515522.1A priority Critical patent/CN114487744A/en
Priority to PCT/CN2021/143488 priority patent/WO2023108829A1/en
Publication of CN114487744A publication Critical patent/CN114487744A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices

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  • General Physics & Mathematics (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

A test head information collection device before power failure and its collection method, locate N pieces of single-boards of different trench positions, each single-board includes power supply, power failure detection module, interrupt module, CPU, test module and memory module; all the test modules are connected with the DUT; when detecting, each power failure detection module receives and detects whether the voltage of the respective power supply is lower than a first voltage threshold value, and if so, sends a power failure indication signal to the interrupt module and the CPU of the N single boards; the CPU in each single board informs the test module to interrupt the test, saves the current test progress and the test result before the voltage signal of the power supply is lower than a second voltage threshold, and stores the current test progress and the test result; if not, each CPU controls the corresponding test module to test the DUT, sends the test result back to the corresponding test module, and stores the test result through the storage module; wherein the first voltage threshold is greater than the second voltage threshold.

Description

Information collecting equipment before power failure of test head and collecting method thereof
Technical Field
The invention relates to the field of Automatic Test Equipment (ATE for short) of semiconductors, in particular to information collection Equipment before power failure of a Test head and a collection method thereof.
Background
As the complexity of integrated circuits increases, the complexity of their testing increases, and even the cost of testing some devices may account for even a large portion of the cost of a chip. Large scale integrated circuits may require hundreds of tests of voltage and current and timing, as well as millions of functional test steps to ensure that the devices are properly functioning. Therefore, Automatic Test Equipment (ATE) for semiconductors has come into operation.
Typically, in an ATE tester, a test head is directly connected to a wafer (wafer) or a chip under test. Both the wafer/chip under test and the test head are expensive to manufacture.
Referring to fig. 1, fig. 1 is a schematic diagram illustrating a test head structure of an automatic semiconductor test equipment in the prior art. As shown in fig. 1, N boards (board 1, board 2 …, board N) are connected to a Device Under Test (DUT) through a backplane.
Each single board comprises a central processing module CPU, a test module, a storage module and a Hard Disk Drive (HDD). The central processing module controls the test module to test the DUT (device under test) of the customer, sends the test result back to the corresponding single board and stores the test result through the storage module.
During testing, if the test head encounters some abnormal condition or environmental fault, etc., the semiconductor automatic test equipment is usually powered down urgently. Although emergency power-down of semiconductor automatic test equipment is a rare event, the emergency causes forced interruption of the ATE test and makes it impossible to effectively save test results and data before power failure.
Especially, in the large-scale batch production stage, if the tests of a large number of wafers to be tested and chips to be tested are not completed, the data cannot be effectively counted. After the subsequent environment is recovered, the worker needs to start the detection and test from the beginning, which causes resource waste and affects the test efficiency.
Disclosure of Invention
The invention aims to provide information collecting equipment and a collecting method thereof before power failure of a test head, which can collect various types of information before power failure of the test head, effectively store the information, facilitate next test recovery and can be continuously used.
In order to achieve the purpose, the technical scheme of the invention is as follows:
a kind of test head loses the information gathering unit before the electricity, it includes:
the system comprises N single boards (a single board 1 and a single board 2 … N) located in different slot positions, wherein each single board comprises a power supply, a power failure detection module, an interrupt module, a central processing module (CPU), a test module and a storage module; all the test modules receive a tested device DUT;
when the test head is in the detection process, each power failure detection module receives and detects whether the voltage of the power supply is lower than a first voltage threshold value, if so, the power failure detection module sends a power failure indication signal to the interrupt module, and the interrupt module sends an interrupt signal to a central processing module (CPU) of the N single boards (board 1, board 2 … board N); the CPU of each single board informs the respective test module to interrupt the test, stores the current test progress and the test result before the voltage signal of the power supply is lower than a second voltage threshold value, and stores the current test progress and the test result; if not, each CPU controls the corresponding test module to test the CPU of the tested device of the client, sends the test result back to the corresponding test module and stores the test result through the storage module; the first voltage threshold is greater than a second voltage threshold, and the second voltage threshold is a voltage value at which the test module stops testing and is greater than zero.
Further, all the test modules interface with the customer device under test CPU through a backplane.
In order to achieve the above object, another technical solution of the present invention is as follows:
a method for collecting information before power failure of a test head adopts the device for collecting information before power failure of the test head, which comprises the following steps:
step S1: receiving N single boards (single board 1 and single board 2 …, single board N) located in different slot positions to a customer tested device DUT; each single board comprises a power supply, a power failure detection module, an interrupt module, a Central Processing Unit (CPU), a test module and a storage module;
step S2: each CPU controls the corresponding test module to test the DUT (device under test) of the client, sends a test result back to the corresponding test module and stores the test result through the storage module;
step S3: each power failure detection module receives and detects whether a voltage signal of the power supply is lower than a first voltage threshold, and if the detection result of one power failure detection module is yes, step S4 is executed; if not, go to step S2:
step S4: the power failure detection module sends a power failure indication signal to the interruption module and simultaneously informs the interruption modules of other slot positions, and the interruption modules report and send interruption signals to Central Processing Units (CPUs) located in different slot positions; the CPU of each single board informs the test module to interrupt the test, stores the current test progress and the test result when the voltage signal of the power supply is lower than a second voltage threshold value, and stores the current test progress and the test result; the first voltage threshold is greater than a second voltage threshold, and the second voltage threshold is a voltage value at which the test module stops testing and is greater than zero.
According to the technical scheme, the information collection equipment before the power failure of the test head and the collection method thereof can realize the purpose of detecting the power failure of the equipment in advance, collect the test progress and the test result of all current resources before the equipment is completely powered down, so that the test can be recovered from a power failure point after the equipment is powered on again after the fault is eliminated, the test efficiency of the equipment is improved, and the performance of a tested equipment DUT (device under test) of a client is protected from the influence of the fault.
Drawings
FIG. 1 is a schematic diagram of a test head structure of an automatic semiconductor test equipment in the prior art
FIG. 2 is a schematic diagram of an information collecting apparatus before power down for a test head according to a preferred embodiment of the present invention
FIG. 3 is a schematic flow chart of the method for collecting information before power down of the test head according to the present invention
FIG. 4 is a diagram of a preferred embodiment of the method for collecting information before power down of a test head according to the present invention
Detailed Description
The following description of the present invention will be made in detail with reference to the accompanying drawings 1 to 4.
It should be noted that, in the case of sudden power failure of the test head, the present invention monitors N single boards (boards) located in different slot positions based on a specific detection circuit1Single plate2… veneerN) The power supply of (1); information collecting device before power failure of test headAnd at the moment of starting power failure, outputting a power failure indication signal to inform a downstream module. The key of the design of the power failure detection circuit is that the time point of power failure indication is detected in advance, and the information collection device really completes power failure before the power failure of the test head, so that enough time is needed to meet the requirement that a downstream module completes related operations. Therefore, the invention can solve the problems that the related test information can not be effectively collected, and the waste of resources and the low efficiency are caused.
Referring to fig. 1, fig. 1 is a schematic diagram of an information collecting apparatus before power down of a test head according to the present invention. As shown in fig. 1, the information collecting apparatus before power down of the test head includes N single boards (single boards) located in different slot positions1Single board2… veneerN) Each single board comprises a power supply, a power failure detection module, an interrupt module, a central processing module (CPU), a test module and a storage module; all the test modules receive a device under test DUT. Preferably, all of said test modules interface with said customer Device Under Test (DUT) through a backplane.
Specifically, the power supply supplies power to the information collecting device before the power failure of the test head, and is usually a fixed dc voltage value V1, different from the prior art, the power failure detection circuit and the interrupt module are connected in series between the power supply and the central processing module CPU and are mainly used for detecting and finding in advance whether the single board or the DUT is powered down.
When the test head is in the detection process, N single boards (single boards)1Single board2… veneerN) Receives and detects whether a voltage signal of the power supply is below a first voltage threshold V2 (where V2 is less than V1). At this time, although the voltage of the power supply is lower than the first voltage threshold V2, the information collection device before the test head is powered down can still work, and the information collection device before the test head is powered down does not stop working until the voltage of the power supply is lower than the second voltage threshold V3.
In the embodiment of the invention, the information collecting device before the power failure of the test head can utilize the time period that the voltage of the power supply gradually falls from the first voltage threshold V2 to the second voltage threshold V3, namely before the power failure of the test head, the test information is collected in advance and effectively stored, so that the test head can be continuously used after the next test recovery.
Specifically, when the power supply voltage is smaller than the first voltage threshold V2, the power failure detection module sends a power failure indication signal to the interrupt module, and the interrupt module detects the power failure indication signal. Once received, the interrupt module reports and sends an interrupt signal to the N-block boards (boards)1Single board2… veneerN) A central processing module CPU; and the CPU of each single board informs the test module to interrupt the test, stores the current test progress and the test result when the voltage signal of the power supply is lower than a second voltage threshold, and stores the current test progress and the test result.
In the embodiment of the invention, the interruption of all single board slots is in AND logic relation, and any interruption generated will report to N single boards (single boards)1Single board2… veneerN) The CPU, namely the interrupt modules between different single boards, can report and receive interrupts mutually, and can also report interrupts directly to the CPU.
If the power supply voltage is not less than the first voltage threshold V2, each CPU controls the corresponding test module to test the DUT, and sends the test result back to the corresponding test module and stores the test result through the storage module.
The CPU is mainly responsible for the management of the whole single board and the control of the test module. The test module directly drives the test resources and is in butt joint with the DUT (device under test) of the customer through the backboard. The CPU receives the interrupt reported by the interrupt module, immediately informs the test module to store the current test progress and test result, interrupts the test, and prepares for powering off the test device.
And the storage module receives the test data and the test result fed back by the test module and writes the test data and the test result into the nonvolatile storage medium in real time. For example, a sata hard disk may be employed.
Referring to fig. 3, fig. 3 is a schematic flow chart illustrating a method for collecting information before power down of a test head according to the present invention. As shown in fig. 3, the information collecting method may include the steps of:
step S1: n single boards (single boards) in different slot positions1Single board2… veneerN) Receiving a tested device DUT; each single board comprises a power supply, a power failure detection module, an interrupt module, a Central Processing Unit (CPU), a test module and a storage module;
step S2: each CPU controls the corresponding test module to test the DUT (device under test) of the client, sends a test result back to the corresponding test module and stores the test result through the storage module;
step S3: each power failure detection module receives and detects whether a voltage signal of the power supply is lower than a first voltage threshold, and if the detection result of one power failure detection module is yes, step S4 is executed; if not, go to step S2:
step S4: the power failure detection module sends a power failure indication signal to the interruption module and simultaneously informs the interruption modules of other slot positions, and the interruption modules report and send interruption signals to Central Processing Units (CPUs) located in different slot positions; the CPU of each single board informs the test module to interrupt the test, stores the current test progress and the test result when the voltage signal of the power supply is lower than a second voltage threshold value, and stores the current test progress and the test result; the first voltage threshold is greater than a second voltage threshold, and the second voltage threshold is a voltage value at which the test module stops testing and is greater than zero.
Referring to fig. 4, fig. 4 is a schematic diagram illustrating a method for collecting information before power down of a test head according to a preferred embodiment of the present invention. As shown in fig. 4, the flow mainly illustrates that after a board detects a power failure and before the board completely fails, other modules coordinate to complete collection of various types of information, so that a retest after the next environmental recovery is performed, and the test efficiency is improved.
The following description takes the single board 1 as an example, and the specific operation steps are as follows:
firstly, carrying out normal power failure detection on a single board 1, and if the power failure is detected, generating power failure interruption by an interruption module and informing single boards positioned in other slot positions;
secondly, the CPU of each single board informs the test module to stop testing and test the nodes;
thirdly, all the test modules stop driving all the test resources, and the test data and the test results on the respective single boards are summarized;
fourthly, the storage module stores the test data and the test result to a local hard disk.
The above description is only for the preferred embodiment of the present invention, and the embodiment is not intended to limit the scope of the present invention, so that all the equivalent structural changes made by using the contents of the description and the drawings of the present invention should be included in the scope of the present invention.

Claims (3)

1. The utility model provides a test head information acquisition device before power failure which characterized in that includes:
n single boards (single boards) in different slot positions1Single board2… veneerN) Each single board comprises a power supply, a power failure detection module, an interrupt module, a central processing module (CPU), a test module and a storage module; all of the test modules receive a Device Under Test (DUT);
when the test head is in the detection process, each power failure detection module receives and detects whether the voltage of the power supply is lower than a first voltage threshold value, if so, the power failure detection module sends a power failure indication signal to the interrupt module, and the interrupt module sends an interrupt signal to the N single boards (single boards)1Single board2… veneerN) A central processing module (CPU); a Central Processing Unit (CPU) of each single board informs the respective test module to interrupt the test, stores the current test progress and the test result before the voltage signal of the power supply is lower than a second voltage threshold value, and stores the current test progress and the test result in the memoryCurrent test progress and test results; if not, each Central Processing Unit (CPU) controls the corresponding test module to test the customer tested Device (DUT), and sends the test result back to the corresponding test module and stores the test result through a storage module; the first voltage threshold is greater than a second voltage threshold, and the second voltage threshold is a voltage value at which the test module stops testing and is greater than zero.
2. The method of claim 1, wherein all of said test modules interface with said customer Device Under Test (DUT) through a backplane.
3. A method for collecting information before a test head fails, which uses the apparatus for collecting information before a test head fails according to any one of claims 1 to 2, comprising:
step S1: n single boards (single boards) in different slot positions1Single board2… veneerN) Receiving a customer Device Under Test (DUT); each single board comprises a power supply, a power failure detection module, an interrupt module, a Central Processing Unit (CPU), a test module and a storage module;
step S2: each central processing module (CPU) controls the corresponding test module to test the customer tested Device (DUT), and sends the test result back to the corresponding test module and stores the test result through the storage module;
step S3: each power failure detection module receives and detects whether a voltage signal of the power supply is lower than a first voltage threshold, and if the detection result of one power failure detection module is yes, step S4 is executed; if not, go to step S2:
step S4: the power failure detection module sends a power failure indication signal to the interruption module and simultaneously informs the interruption modules of other slot positions, and the interruption modules report and send interruption signals to Central Processing Units (CPUs) located in different slot positions; a Central Processing Unit (CPU) of each single board informs the test module to interrupt the test, stores the current test progress and the test result when the voltage signal of the power supply is lower than a second voltage threshold value, and stores the current test progress and the test result; the first voltage threshold is greater than a second voltage threshold, and the second voltage threshold is a voltage value at which the test module stops testing and is greater than zero.
CN202111515522.1A 2021-12-13 2021-12-13 Information collecting equipment before power failure of test head and collecting method thereof Pending CN114487744A (en)

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CN202111515522.1A CN114487744A (en) 2021-12-13 2021-12-13 Information collecting equipment before power failure of test head and collecting method thereof
PCT/CN2021/143488 WO2023108829A1 (en) 2021-12-13 2021-12-31 Device and method for collecting information before power failure of test head

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CN102403987A (en) * 2010-09-14 2012-04-04 三星半导体(中国)研究开发有限公司 Circuit and method for achieving data retention after power off under low voltage
CN102033826B (en) * 2010-12-03 2012-05-30 创新科存储技术有限公司 Power failure data protection device and method for internal memory
CN106557438A (en) * 2015-09-30 2017-04-05 中兴通讯股份有限公司 A kind of method of power down protection, device and electronic equipment
CN109782888A (en) * 2018-12-29 2019-05-21 京信通信***(中国)有限公司 Power-down protection circuit, electronic equipment and the method for DRAM data
CN115210589B (en) * 2020-03-25 2023-07-18 华为技术有限公司 Chip testing device and testing method
CN112269463A (en) * 2020-11-02 2021-01-26 珠海格力电器股份有限公司 Power-down protection circuit and method and electric energy meter
CN112562764A (en) * 2020-12-15 2021-03-26 上海维宏电子科技股份有限公司 Circuit and method for power-down protection of embedded system
CN112946562B (en) * 2021-02-07 2023-02-24 南方电网数字电网研究院有限公司 Power failure protection method and device for double-core intelligent electric meter and double-core intelligent electric meter

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