CN114470930A - Filter equipment and photoresist waste liquid regeneration system - Google Patents
Filter equipment and photoresist waste liquid regeneration system Download PDFInfo
- Publication number
- CN114470930A CN114470930A CN202210150461.1A CN202210150461A CN114470930A CN 114470930 A CN114470930 A CN 114470930A CN 202210150461 A CN202210150461 A CN 202210150461A CN 114470930 A CN114470930 A CN 114470930A
- Authority
- CN
- China
- Prior art keywords
- valve
- filter
- waste liquid
- filter element
- filtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002699 waste material Substances 0.000 title claims abstract description 241
- 239000007788 liquid Substances 0.000 title claims abstract description 239
- 230000008929 regeneration Effects 0.000 title claims abstract description 11
- 238000011069 regeneration method Methods 0.000 title claims abstract description 11
- 229920002120 photoresistant polymer Polymers 0.000 title claims description 8
- 238000001914 filtration Methods 0.000 claims abstract description 225
- 239000007787 solid Substances 0.000 claims abstract description 98
- 238000001514 detection method Methods 0.000 claims abstract description 74
- 238000007599 discharging Methods 0.000 claims abstract description 53
- 239000000706 filtrate Substances 0.000 claims description 33
- 238000004891 communication Methods 0.000 claims description 18
- 239000012530 fluid Substances 0.000 claims 1
- 239000012535 impurity Substances 0.000 abstract description 17
- 230000002349 favourable effect Effects 0.000 abstract description 5
- 230000005611 electricity Effects 0.000 abstract description 4
- 230000001737 promoting effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 6
- 238000010079 rubber tapping Methods 0.000 description 6
- 239000002910 solid waste Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000004480 active ingredient Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/50—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with multiple filtering elements, characterised by their mutual disposition
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/60—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor integrally combined with devices for controlling the filtration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D36/00—Filter circuits or combinations of filters with other separating devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/3092—Recovery of material; Waste processing
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Filtration Of Liquid (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
The invention provides a filtering device and a waste liquid regeneration system, which comprise a filter, a feeding pipe, a discharging pipe, a detection piece and a control piece, wherein the feeding pipe, the filter and the discharging pipe are sequentially communicated along the flowing direction of waste liquid; the filter comprises a first filter element and a second filter element, a first pipeline provided with a first valve is communicated with the first filter element and the second filter element, a feed pipe and a discharge pipe are both connected with the first filter element and the second filter element, the feed pipe is provided with a feed valve, and the discharge pipe is provided with a discharge valve; the detection piece is connected with the control electricity, and the detection piece is used for detecting the solid content of waste liquid around filtering to convey the result of solid content to the control, the control is connected with first valve, feed valve and bleeder valve electricity, is used for satisfying above-mentioned structure through making filter equipment according to the switch of the result control first valve of solid content, feed valve and bleeder valve, is favorable to promoting filtration efficiency and avoids impurity to block up.
Description
Technical Field
The invention relates to the field of waste liquid recovery, in particular to a filtering device and a photoresist waste liquid regeneration system.
Background
With the rapid development of the electronic manufacturing industry, the amount of waste liquid generated in the production process is greatly increased, and the waste liquid is collected and treated in order to protect the environment, save the cost and effectively recover effective substances in the waste liquid. However, the conventional treatment method generally uses a pump to pump the waste liquid to a filter for simple filtration, and the filtration process cannot be controlled during the filtration process, so that the waste liquid needs to pass through the entire filter for filtration whether the filtration requirement is met during the filtration process, resulting in low filtration efficiency and easy blockage of the filter by impurities in the waste liquid.
Disclosure of Invention
The invention aims to provide a filtering device and a waste liquid regeneration system, which solve the problems that in the prior art, waste liquid needs to pass through a whole filter for filtering, so that the filtering efficiency is low, and impurities in the waste liquid easily block the filter.
In order to realize the purpose of the invention, the invention provides the following technical scheme:
in a first aspect, the present invention provides a filtering apparatus for filtering a photoresist waste solution, comprising a filter, a feeding pipe, a discharging pipe, a detecting member and a control member; the feed pipe, the filter and the discharge pipe are communicated in sequence along the flowing direction of waste liquid; the filter comprises a first filter element and a second filter element; a first pipeline is communicated with the first filter element and the second filter element and is provided with a first valve which is used for switching the communication state of the first filter element and the second filter element; the feeding pipe and the discharging pipe are connected with the first filtering piece and the second filtering piece, the feeding pipe is used for conveying the waste liquid, the discharging pipe is used for conveying the filtrate, a feeding valve is arranged on the feeding pipe, a discharging valve is arranged on the discharging pipe, and the feeding valve and the discharging valve are respectively used for switching the communication states of the feeding pipe and the discharging pipe with the first filtering piece and the second filtering piece; the detection piece is electrically connected with the control piece, the detection piece is used for detecting the solid content of the waste liquid and the filtrate and transmitting the solid content result to the control piece, the control piece is electrically connected with the first valve, the feeding valve and the discharging valve, and the control piece is used for controlling the opening and closing of the first valve, the feeding valve and the discharging valve according to the solid content result.
In one embodiment, the first filter element and the second filter element have different filter fineness.
In one embodiment, the filter further includes a third filter element, the inlet pipe with the outlet pipe all with the third filter element intercommunication, second pipeline intercommunication the third filter element with the second filter element, be equipped with the second valve on the second pipeline, the second valve with the control electricity is connected, the second valve is used for switching the second filter element with the third filter element's connected state.
In one embodiment, the first pipeline further communicates the third filter element with the first filter element, and the first valve is configured to switch the communication state between the first filter element and the second and third filter elements.
In one embodiment, the first filter element, the second filter element and the third filter element have different filter fineness.
In one embodiment, the detection element is configured to detect a solid content of the waste liquid at the inlet valve, and the detection element is further configured to detect a solid content of the filtrate at the first valve and at the outlet valve.
In one embodiment, the detection member is used for detecting the solid content of the waste liquid at the feeding valve, and the detection member is also used for detecting the solid content of the filtrate at the first valve, the second valve and the discharging valve.
In one embodiment, the filter further comprises a third filter element, the feeding pipe and the discharging pipe are both communicated with the third filter element, a second pipeline is communicated with the third filter element and the second filter element, and a second valve is arranged on the second pipeline and is electrically connected with the control element for switching the communication state of the second filter element and the third filter element; the first filter element, the second filter element and the third filter element have the same filtration precision and different solution treatment capacities.
In one embodiment, the detecting element is configured to detect a solid content of the waste liquid at the inlet valve, and the detecting element is further configured to detect a solid content of the filtrate at the outlet valve.
In a second aspect, the present invention further provides a photoresist waste liquid regeneration system, including a storage tank, a rectification column and the filtering device according to the various embodiments of the first aspect, wherein the storage tank, the filtering device and the rectification column are sequentially communicated along a waste liquid flowing direction, and the storage tank and the rectification column are respectively used for storing and purifying waste liquid to be regenerated.
Through setting up a filter equipment, make the device include along inlet pipe, filter and the discharging pipe that the direction that the waste liquid flows communicates in proper order, wherein, the inlet pipe is used for carrying to the filter and needs by filterable waste liquid, and the filter is used for becoming filtrating and filter residue with waste liquid filtering separation, and the discharging pipe is used for carrying filtrating, is favorable to realizing the transmission and the filtration of waste liquid.
Specifically, the inlet pipe is equipped with the feed valve, and the discharging pipe is equipped with the bleeder valve, and the filter includes that first filtration piece and second filter the impurity in the waste liquid, and first pipeline intercommunication is first to be filtered and is filtered with the second, and is equipped with first valve on the first pipeline. The detection piece is used for detecting the solid content of waste liquid and filtrating, the detection piece, the feed valve, bleeder valve and first valve all are connected with the control electricity, the control controls the feed valve according to the testing result that the detection piece obtained, the switch of bleeder valve and first valve, and then realize filtering the selection of piece operating condition to first filtration piece and second, only need to make first filtration piece and second filter at least one of the piece work in the filter promptly, it need pass whole filter and filter to have solved the waste liquid, lead to filtration efficiency low, and the problem of the filter is blockked up easily to impurity in the waste liquid.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a system block diagram of a filtration device of an embodiment;
FIG. 2 is a schematic flow diagram of a filtration apparatus according to an embodiment;
FIG. 3 is a schematic flow diagram of another embodiment of a filtration apparatus;
FIG. 4 is a schematic flow diagram of another embodiment of a filtration apparatus;
FIG. 5 is a schematic flow diagram of another embodiment of a filtration apparatus;
FIG. 6 is a schematic flow diagram of an exemplary waste regeneration system.
Description of reference numerals:
1-a filter, 2-a storage tank, 3-a rectifying tower and 4-a condenser;
11-a first filter element, 12-a second filter element, 13-a third filter element, 14-a detection element, 15-a control element;
101-an inlet pipe, 102-a first pipeline, 103-a second pipeline, 104-an outlet pipe;
111-inlet valve, 112-first valve, 113-second valve, 114-outlet valve.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
The embodiment of the invention provides a filtering device for filtering photoresist waste liquid, referring to fig. 1 and fig. 2, comprising a filter 1, a feeding pipe 101, a discharging pipe 104, a detecting member 14 and a control member 15, wherein the feeding pipe 101, the filter 1 and the discharging pipe 104 are sequentially communicated along the flow direction of the waste liquid. The inlet pipe 101 is used for conveying waste liquid to be filtered to the filter 1, the filter 1 is used for filtering and separating the waste liquid into filtrate and filter residue, and the outlet pipe 104 is used for conveying the filtrate.
Specifically, the waste liquid in the inlet pipe 101 is pumped to the filter 1 in a continuous mode, and the filter 1 carries out preliminary solid-liquid separation to the waste liquid, not only is favorable to realizing the recovery of active ingredient in the waste liquid, but also is favorable to getting rid of the solid waste residue in the waste liquid and the foreign matter that probably exists, prevents that the foreign matter from damaging the instrument in subsequent processing procedure, leads to the unable smooth progress of processing procedure of waste liquid. The kinds of the filter 1 include, but are not limited to, a gravity filter 1, a vacuum filter 1, and a pressure filter 1, and the filter 1 includes a first filter member 11 and a second filter member 12, and the first filter member 11 and the second filter member 12 are each used for filtering impurities in the waste liquid.
Wherein, inlet pipe 101 and discharging pipe 104 all with first filter 11 and the second filter 12 and be connected, inlet pipe 101 is used for carrying the waste liquid, discharging pipe 104 is used for carrying filtrating, still is equipped with first pipeline 102 in the filter 1, first pipeline 102 intercommunication first filter 11 and second filter 12. The feeding pipe 101 is provided with a feeding valve 111, the discharging pipe 104 is provided with a discharging valve 114, the first pipeline 102 is provided with a first valve 112, the feeding valve 111 and the discharging valve 114 are respectively used for switching the communication state of the feeding pipe 101 and the discharging pipe 104 with the first filtering piece 11 and the second filtering piece 12, and the first valve 112 is used for switching the communication state of the first filtering piece 11 and the second filtering piece 12.
The filter 1 is also provided with a detection member 14 and a control member 15, wherein the detection member 14 is electrically connected with the control member 15 and is used for detecting the solid content of the waste liquid and the filtrate and outputting the content result as an electric signal. The control member 15 is electrically connected to the first valve 112, the inlet valve 111 and the outlet valve 114, and is configured to receive the electrical signal from the detecting member 14 and control the opening and closing of the first valve 112, the inlet valve 111 and the outlet valve 114 according to the electrical signal. The control member 15 sets a preset value for the solid content of the waste liquid and the solid content of the filtrate, and the preset value is not particularly limited in this embodiment and may be set according to actual needs.
When the waste liquid is conveyed from the feeding pipe 101 to the filter 1, the detecting member 14 detects the solid content in the waste liquid, including but not limited to the measurement of the viscosity of the waste liquid, and converts the viscosity of the waste liquid into the solid content of the waste liquid. After the detection is completed, the detection member 14 transmits the detection result to the control member 15, and the control member 15 selects the opening and closing of the feed valve 111 according to the solid content result of the waste liquid, i.e. controls the flow of the waste liquid to the first filter member 11 or the second filter member 12. Optionally, when the control component 15 controls the feed valve 111 to enable the waste liquid to flow to the first filter component 11, a part of solid waste residues in the waste liquid is filtered out in the first filter component 11, after the waste liquid flows out of the first filter component 11, the waste liquid enters the first pipeline 102, the detection component 14 detects the solid content of the waste liquid in the first pipeline 102, and then transmits a detection result to the control component 15, the control component 15 selects a switch of the first valve 112 according to the detection result, that is, when the control component 15 determines that the solid content of the waste liquid is less than or equal to a preset value, the first valve 112 is controlled to enable the first pipeline 102 to be communicated with the discharge pipe 104, and the waste liquid is directly discharged as a filtrate; when the control member 15 determines that the solid content of the waste liquid is greater than the predetermined value, the first valve 112 is controlled to communicate the first conduit 102 with the second filter member 12, so as to convey the waste liquid to the second filter member 12 for further filtering.
When the waste liquid passes through the first filtering part 11 or the second filtering part 12, the generated filtrate is conveyed by the discharging pipe 104, and the control part 15 further controls the opening and closing of the discharging pipe 104 according to the selection of the opening and closing of the feeding valve 111 and the first valve 112 in the pre-flow process, so that the waste liquid is prevented from flowing backwards in the discharging pipe 104, and the filtering result and the filtering efficiency are influenced. Meanwhile, the detection part 14 detects the solid content of the waste liquid in the discharge pipe 104, and then transmits the detection result to the control part 15, and if the control part 15 judges that the solid content of the waste liquid is greater than a preset value, filtrate can be filtered again subsequently; when the control member 15 determines that the solid content of the waste liquid is less than or equal to the preset value, the filtrate can be subjected to subsequent further purification.
Through setting up a filter equipment, make the device include inlet pipe 101, filter 1 and discharging pipe 104 that communicate in proper order along the direction that the waste liquid flows, wherein, inlet pipe 101 is used for carrying to filter 1 and needs by filterable waste liquid, and filter 1 is used for filtering the waste liquid and separates into filtrating and filter residue, and discharging pipe 104 is used for carrying filtrating, is favorable to realizing the transmission and the filtration of waste liquid. Specifically, inlet pipe 101 is equipped with feed valve 111, and discharging pipe 104 is equipped with bleeder valve 114, and filter 1 includes that first filtration piece 11 and second filter piece 12, all can be used to filter the impurity in the waste liquid, and first pipeline 102 intercommunication is first to be filtered piece 11 and second and to be filtered piece 12, and is equipped with first valve 112 on the first pipeline 102, and feed valve 111, bleeder valve 114 and first valve 112 all can be used to switch the flow direction of waste liquid in filter equipment. The detection piece 14 is used for detecting the solid content of waste liquid and filtrate, the detection piece 14, the feed valve 111, the bleeder valve 114 and the first valve 112 are all electrically connected with the control piece 15, the control piece 15 controls the feed valve 111, the bleeder valve 114 and the switch of the first valve 112 according to the detection result obtained by the detection piece 14, and then the selection of a waste liquid filtering route is realized, namely, the waste liquid in the filter 1 only needs to pass through at least one of the first filtering piece 11 and the second filtering piece 12, the problem that the waste liquid needs to pass through the whole filter 1 for filtering, the filtering efficiency is low, and the filter 1 is easily blocked by impurities in the waste liquid is solved.
In one embodiment, referring to fig. 2, the first filter element 11 and the second filter element 12 have different filter fineness. Preferably, the filtering precision of the second filtering member 12 is greater than that of the first filtering member 11, when the waste liquid is conveyed from the feeding pipe 101 to the filter 1, the detecting member 14 detects the solid content in the waste liquid, and after the control member 15 receives the detection result, if the solid content in the waste liquid is judged to be less than or equal to the preset value, the feeding pipe 101 is controlled to be only communicated with the second filtering member 12, the waste liquid is conveyed to the second filtering member 12 for fine filtering, and the discharging valve 114 is controlled to enable the discharging pipe 104 to be only communicated with the second filtering member 12; if the control member 15 determines that the solid content of the waste liquid is greater than the predetermined value but not outside a certain range, the feed pipe 101 is also controlled to communicate only with the second filtering member 12.
Further, if the control component 15 determines that the solid content in the waste liquid is greater than the preset value and exceeds a certain range, the feeding pipe 101 is controlled to be communicated with the first filtering component 11 only, the waste liquid is firstly conveyed to the first filtering component 11 for preliminary filtering, then the detection component 14 is adopted to detect the waste liquid filtered by the first filtering component 11, and the solid content result of the waste liquid is transmitted to the control component 15. If the control part 15 judges that the solid content in the waste liquid is less than or equal to the preset value, the first valve 112 is controlled to enable the first pipeline 102 to be communicated with the discharge pipe 104, and the discharge pipe 104 is controlled to be communicated with the first filtering piece 11 only; if the control member 15 determines that the solid content in the waste liquid is greater than the predetermined value, the first valve 112 is controlled to communicate the first pipe 102 with the second filter member 12, to deliver the waste liquid to the second filter member 12 for fine filtration, and the discharge valve 114 is controlled to communicate the discharge pipe 104 with only the second filter member 12.
By selecting filter pieces with different precisions, the first filter piece 11 and the second filter piece 12 have different filtering capabilities, so that different filtering routes are selected for waste liquid with different solid contents, the filtering mode of the waste liquid is more flexible, specifically, the detection piece 14 detects the solid contents of the waste liquid in the feeding pipe 101, the first pipeline 102 and the discharging pipe 104, the control piece 15 controls the on-off of the feeding valve 111, the discharging valve 114 and the first valve 112 according to the detection result obtained by the detection piece 14, so that the selection of the filtering routes of the waste liquid with different solid contents is realized, namely, when the solid contents of the waste liquid are smaller than or close to a preset value, the waste liquid only needs to pass through the second filter piece 12; when the solid content of the waste liquid is much greater than the preset value, it needs to pass through the first filter element 11 and possibly the second filter element 12. The selection of multiple filtration route like this has not only practiced thrift the service degree of filtering a piece, has still improved the filtration efficiency of waste liquid, has solved the waste liquid and need pass whole filter 1 and filter, leads to filtration efficiency low, and the impurity in the waste liquid blocks up the problem of filter 1 easily.
In one embodiment, referring to fig. 3, the filter 1 further comprises a third filter element 13, and the feed pipe 101 and the discharge pipe 104 are both in communication with the third filter element 13, i.e. the feed valve 111 can control the feed pipe 101 to communicate with the first filter element 11, the second filter element 12, or the third filter element 13, and the discharge valve 114 can control the discharge pipe 104 to communicate with the first filter element 11, the second filter element 12, or the third filter element 13. The filter 1 is further provided with a second pipeline 103, the second pipeline 103 is communicated with the third filtering element 13 and the second filtering element 12, the second pipeline 103 is provided with a second valve 113 for switching the communication state of the second filtering element 12 and the third filtering element 13, the detecting element 14 detects the solid content of the waste liquid in the second pipeline 103 and transmits the detection result to the control element 15, and the control element 15 is electrically connected with the second valve 113 and controls the opening and closing of the second valve 113 according to the solid content result in the second pipeline 103.
When the waste liquid is fed from the feeding pipe 101 to the filter 1, the detecting member 14 detects the solid content of the waste liquid, and then sends the detection result to the control member 15, and the control member 15 selects the opening and closing of the feeding valve 111 according to the solid content result of the waste liquid, i.e. controls the waste liquid to flow to the first filtering member 11, the second filtering member 12 or the third filtering member 13. Optionally, when the control element 15 controls the feed valve 111 to make the waste liquid flow to the first filter element 11, a part of solid waste residues of the waste liquid is filtered at the first filter element 11, and after the waste liquid flows out of the first filter element 11, the waste liquid enters the first pipeline 102, the detection element 14 detects the solid content of the waste liquid in the first pipeline 102, and then transmits the detection result to the control element 15, the control element 15 selects the switch of the first valve 112 according to the detection result, that is, when the control element 15 determines that the solid content of the waste liquid is less than or equal to the preset value, the first valve 112 is controlled to communicate the first pipeline 102 with the discharge pipe 104, and the waste liquid is directly discharged as a filtrate; when the control member 15 determines that the solids content of the waste liquid is greater than the predetermined value, the first valve 112 is controlled to connect the first conduit 102 to the second filter member 12, and the waste liquid is sent to the second filter member 12 for further filtration.
Further, after the waste liquid flows out of the second filtering member 12, the waste liquid enters the second pipeline 103, the detecting member 14 detects the solid content of the waste liquid in the second pipeline 103, and then transmits the detection result to the control member 15, the control member 15 selects the switch of the second valve 113 according to the detection result, that is, when the control member 15 judges that the solid content of the waste liquid is less than or equal to the preset value, the second valve 113 is controlled to communicate the second pipeline 103 with the discharge pipe 104, and the waste liquid is directly discharged as filtrate; when the control member 15 determines that the solid content of the waste liquid is still greater than the preset value, the second valve 113 is controlled to communicate the second pipe 103 with the third filtering member 13, so as to convey the waste liquid to the third filtering member 13 for further filtering.
When the waste liquid passes through the first filtering member 11, the second filtering member 12 or the third filtering member 13, the generated filtrate is conveyed by the discharge pipe 104, and the control member 15 further controls the opening and closing of the discharge pipe 104 according to the selection of the opening and closing of the feed valve 111, the first valve 112 and the second valve 113 in the previous flow, so that the waste liquid is prevented from flowing backwards in the discharge pipe 104, and the filtering result and the filtering efficiency are influenced. Meanwhile, the detection part 14 detects the solid content of the waste liquid in the discharge pipe 104, and then transmits the detection result to the control part 15, and if the control part 15 judges that the solid content of the waste liquid is greater than a preset value, filtrate can be filtered again subsequently; when the control member 15 determines that the solid content of the waste liquid is less than or equal to the preset value, the filtrate can be subjected to subsequent further purification.
Through increasing third and filtering piece 13 in filter equipment, and adopt second pipeline 103 intercommunication second and filter piece 12 and third and filter piece 13, and set up the second valve 113 that receives control 15 control on second pipeline 103, make waste liquid can also choose to lead to third and filter piece 13 after second filters piece 12, the processing degree of depth to solid waste residue in the waste liquid has been improved, the filtration route of waste liquid has been increased, the filtration mode of making the waste liquid is more nimble, still improve the filtration efficiency of waste liquid, and simultaneously, the realization is filtered the selection of route to waste liquid, waste liquid in filter 1 only need pass through first filtration piece 11, second filters piece 12 and at least one of third and filter piece 13, it need pass whole filter 1 and filter still to have solved the waste liquid, lead to the filtration inefficiency, and the easy problem of blockking up filter 1 of impurity in the waste liquid.
In one embodiment, referring to fig. 4, the first pipeline 102 further communicates the third filter element 13 with the first filter element 11, and the first valve 112 is used for switching the communication state between the first filter element 11 and the second and third filter elements 12 and 13. Optionally, when the control element 15 controls the feed valve 111 to make the waste liquid flow to the first filter element 11, a part of solid waste residues of the waste liquid is filtered at the first filter element 11, and after the waste liquid flows out of the first filter element 11, the waste liquid enters the first pipeline 102, the detection element 14 detects the solid content of the waste liquid in the first pipeline 102, and then transmits the detection result to the control element 15, the control element 15 selects the switch of the first valve 112 according to the detection result, that is, when the control element 15 determines that the solid content of the waste liquid is less than or equal to the preset value, the first valve 112 is controlled to communicate the first pipeline 102 with the discharge pipe 104, and the waste liquid is directly discharged as a filtrate; when the control member 15 determines that the solid content of the waste liquid is greater than the predetermined value, the first valve 112 is controlled to communicate the first conduit 102 with the second filter member 12 or the third filter member 13, so as to convey the waste liquid to the second filter member 12 or the third filter member 13 for further filtering.
Through increasing the third in filter equipment and filtering piece 13, adopt second pipeline 103 to communicate second and third and filter piece 12 and 13, and make first pipeline 102 communicate first and third and filter piece 11 and 13, make the waste liquid can choose to lead to the discharging pipe 104 after first filtering piece 11, second filter piece 12 or third filter piece 13, the waste liquid can choose to lead to the discharging pipe 104 or third filter piece 13 after second filtering piece 12, the depth of treatment to the solid waste residue in the waste liquid is improved, the filtration route of waste liquid is increased, make the filtration mode of waste liquid more flexible, still improve the filtration efficiency of waste liquid, simultaneously, realize the selection to the waste liquid filtration route, namely the waste liquid in filter 1 only needs to pass through at least one of first filtering piece 11, second filtering piece 12 and third filtering piece 13, still solved the waste liquid and need pass through whole filter 1 and filter, resulting in a problem that the filtration efficiency is low and the filter 1 is easily clogged with impurities in the waste liquid.
In one embodiment, referring to fig. 3 and 4, the first filter member 11, the second filter member 12, and the third filter member 13 have different filtering accuracies. Preferably, the filtering precision of the first filtering part 11, the second filtering part 12 and the third filtering part 13 is sequentially increased, when the waste liquid is conveyed to the filter 1 through the feeding pipe 101, the detecting part 14 detects the solid content in the waste liquid, after the detecting result is received by the control part 15, if the solid content in the waste liquid is judged to be smaller than or equal to the preset value, the feeding pipe 101 is controlled to be only communicated with the third filtering part 13, the waste liquid is conveyed to the third filtering part 13 for fine filtering, and the discharging valve 114 is controlled to enable the discharging pipe 104 to be only communicated with the third filtering part 13.
If the control element 15 judges that the solid content in the waste liquid is larger than the preset value but not beyond a certain range, the feeding pipe 101 is controlled to be communicated with the second filtering element 12 only, the waste liquid is conveyed to the second filtering element 12 for primary filtering, the detection element 14 is used for detecting the waste liquid filtered by the second filtering element 12, the solid content result of the waste liquid is transmitted to the control element 15, and if the control element 15 judges that the solid content in the waste liquid is smaller than or equal to the preset value, the second valve 113 is controlled, the second pipeline 103 is communicated with the discharging pipe 104, and the discharging pipe 104 is controlled to be communicated with the second filtering element 12 only; if the control member 15 determines that the solid content in the waste liquid is greater than the predetermined value, the second valve 113 is controlled to communicate the second pipe 103 with the third filtering member 13, the waste liquid is delivered to the third filtering member 13 for further fine filtering, and the discharge valve 114 is controlled to communicate the discharge pipe 104 with only the third filtering member 13.
If the control element 15 determines that the solid content in the waste liquid is greater than the preset value and exceeds a certain range, the feeding pipe 101 is controlled to be communicated with the first filtering element 11 only, the waste liquid is firstly conveyed to the first filtering element 11 for preliminary filtering, then the detection element 14 is adopted to detect the waste liquid filtered by the first filtering element 11, and the solid content result of the waste liquid is transmitted to the control element 15. If the control part 15 judges that the solid content in the waste liquid is less than or equal to the preset value, the first valve 112 is controlled to enable the first pipeline 102 to be communicated with the discharge pipe 104, and the discharge pipe 104 is controlled to be communicated with the first filtering piece 11 only; if the control part 15 judges that the solid content in the waste liquid is larger than the preset value but not beyond a certain range, the first valve 112 is controlled to enable the first pipeline 102 to be communicated with the third filtering piece 13, and the discharge pipe 104 is controlled to be communicated with the third filtering piece 13 only; if the control element 15 determines that the solid content in the waste liquid is greater than the preset value and exceeds a certain range, the first valve 112 is controlled to communicate the first pipeline 102 with the second filter element 12, the waste liquid is firstly conveyed to the second filter element 12 for fine filtration, then the waste liquid filtered by the second filter element 12 is detected by the detection element 14, and the solid content result of the waste liquid is conveyed to the control element 15, if the control element 15 determines that the solid content of the waste liquid in the second pipeline 103 is less than or equal to the preset value, the second valve 113 is controlled to communicate the second pipeline 103 with the discharge pipe 104, and the discharge pipe 104 is controlled to communicate only with the second filter element 12; if the control member 15 determines that the solid content in the waste liquid is greater than the predetermined value, the second valve 113 is controlled to communicate the second pipe 103 with the third filtering member 13, the waste liquid is delivered to the third filtering member 13 for further fine filtering, and the discharge valve 114 is controlled to communicate the discharge pipe 104 with only the third filtering member 13.
By selecting the filtering pieces with different precisions, the first filtering piece 11, the second filtering piece 12 and the third filtering piece 13 all have different filtering capacities, so that different filtering routes are selected for waste liquid with different solid contents, the filtering mode of the waste liquid is more flexible, specifically, the detection piece 14 detects the solid contents of the waste liquid in the feeding pipe 101, the first pipeline 102, the second pipeline 103 and the discharging pipe 104, and the control piece 15 controls the opening and closing of the feeding valve 111, the discharging valve 114, the first valve 112 and the second valve 113 according to the detection result obtained by the detection piece 14, so that the selection of the filtering routes of the waste liquid with different solid contents is realized, namely when the solid contents of the waste liquid are smaller than or close to the preset value, the waste liquid only needs to pass through the third filtering piece 13; when the solid content of the waste liquid is much greater than the preset value, it needs to pass through the first filter element 11 or the second filter element 12, and possibly the third filter element 13. The selection of multiple filtration route like this has not only practiced thrift the service degree of filtering a piece, has still improved the filtration efficiency of waste liquid, has solved the waste liquid and need pass whole filter 1 and filter, leads to filtration efficiency low, and the impurity in the waste liquid blocks up the problem of filter 1 easily.
In one embodiment, referring to fig. 2, when the filter 1 comprises the first filter element 11 and the second filter element 12, the detecting element 14 is used for detecting the solid content of the waste liquid in the feeding pipe 101 that has not passed through the feeding valve 111, and the control element 15 controls the opening and closing of the feeding valve 111 according to the detection result; the detecting element 14 is also used for detecting the solid content of the filtrate in the first pipeline 102 which does not pass through the first valve 112, and the control element 15 controls the opening and closing of the first valve 112 according to the detection result; the detection element 14 is also used to detect the solids content of the filtrate in the tapping pipe 104 that has not yet passed the tapping valve 114, and the control element 15 controls the opening and closing of the first valve 112 according to the detection result.
Through setting up the solid content that detects piece 14 detection waste liquid and filtrating, control 15 controls feed valve 111, bleeder valve 114 and first valve 112's switch according to the testing result that detection piece 14 obtained, and then realizes the selection to the waste liquid filtration route, and the waste liquid in the filter 1 only need pass through at least one of first filter piece 11 and second filter piece 12 promptly, has solved the waste liquid and need passed through whole filter 1 and filter, leads to the filtration inefficiency, and the problem of filter 1 is blockked up easily to impurity in the waste liquid.
In one embodiment, referring to fig. 3 and 4, when the filter 1 comprises the first filter element 11, the second filter element 12 and the third filter element 13, the detecting element 14 is used for detecting the solid content of the waste liquid in the feeding pipe 101 which has not passed through the feeding valve 111, and the control element 15 controls the opening and closing of the feeding valve 111 according to the detection result; the detecting element 14 is also used for detecting the solid content of the filtrate in the first pipeline 102, which has not passed through the first valve 112, and the control element 15 controls the opening and closing of the first valve 112 according to the detection result; the detection part 14 is also used for detecting the solid content of the filtrate in the second pipeline 103 which does not pass through the second valve 113, and the control part 15 controls the opening and closing of the second valve 113 according to the detection result; the detection element 14 is also used to detect the solids content of the filtrate in the tapping pipe 104 that has not yet passed the tapping valve 114, and the control element 15 controls the opening and closing of the first valve 112 according to the detection result.
Through setting up the solid content that detects piece 14 detection waste liquid and filtrating, control 15 controls feed valve 111 according to the testing result control that detection piece 14 obtained, bleeder valve 114, the switch of first valve 112 and second valve 113, and then realize the selection to the waste liquid filtration route, the waste liquid in filter 1 only need pass through first filtration piece 11, at least one in second filtration piece 12 and the third filtration piece 13, it need pass whole filter 1 and filter to have solved the waste liquid, lead to filtration efficiency low, and the problem of filter 1 is blockked up easily to impurity in the waste liquid.
In one embodiment, referring to fig. 5, the filter 1 further includes a third filtering member 13, the feeding pipe 101 and the discharging pipe 104 are both connected to the third filtering member 13, the second pipeline 103 is connected to the third filtering member 13 and the second filtering member 12, the second pipeline 103 is provided with a second valve 113, the second valve 113 is electrically connected to the control member 15 for switching the connection state between the second filtering member 12 and the third filtering member 13, wherein the first filtering member 11, the second filtering member 12 and the third filtering member 13 have the same filtering precision and different solution throughput.
Preferably, the solution treatment capacities of the first filter element 11, the second filter element 12 and the third filter element 13 are sequentially increased, when the waste liquid is conveyed from the feeding pipe 101 to the filter 1, the detection element 14 detects the solid content in the waste liquid, and after the control element 15 receives the detection result, if the solid content value is smaller, the filter element with the smaller solution treatment capacity is selected to be communicated with the feeding pipe 101; if the solid content value is large, two filtering pieces with different solution treatment capacities can be selected to simultaneously filter the waste liquid, such as: the first filter member 11 and the second filter member 12 simultaneously filter the waste liquid. A first pipeline 102 is arranged between the first filtering piece 11 and the second filtering piece 12, a second pipeline 103 is arranged between the second filtering piece 12 and the third filtering piece 13, a first valve 112 and a second valve 113 are respectively arranged on the first pipeline 102 and the second pipeline 103, and the first valve 112 and the second valve 113 are normally closed to prevent waste liquid from flowing backwards in the filter 1 to influence the filtering result and the filtering efficiency.
By providing the first filter member 11, the second filter member 12 and the third filter member 13 in the filter device, and the first filter member 11, the second filter member 12 and the third filter member 13 have the same filtering accuracy, but the solution treatment amounts are different, meanwhile, the first pipeline 102 is adopted to communicate the first filtering piece 11 and the second filtering piece 12, and the second pipeline 103 is communicated with the second filtering piece 12 and the third filtering piece 13, so that the filtering route of the waste liquid is increased, the filtering mode of the waste liquid is more flexible, the filtering efficiency of the waste liquid is improved, and meanwhile, the selection of the filtering route of the waste liquid is realized, that is, the waste liquid in the filter 1 only needs to pass through at least one of the first filter element 11, the second filter element 12 and the third filter element 13, and the problems that the waste liquid needs to pass through the whole filter 1 for filtering, so that the filtering efficiency is low and impurities in the waste liquid easily block the filter 1 are solved.
In one embodiment, referring to fig. 5, when the filter 1 includes the first filter element 11, the second filter element 12 and the third filter element 13, and the first filter element 11, the second filter element 12 and the third filter element 13 have the same filtering precision but different solution treatment capacities, the detecting element 14 is used for detecting the solid content of the waste liquid in the feeding pipe 101 that has not passed through the feeding valve 111, and the control element 15 controls the opening and closing of the feeding valve 111 according to the detection result; the detection element 14 is also used to detect the solids content of the filtrate in the tapping pipe 104 that has not yet passed the tapping valve 114, and the control element 15 controls the opening and closing of the first valve 112 according to the detection result.
Through setting up the solid content that detects piece 14 detection waste liquid and filtrating, control 15 controls the switch of feed valve 111 and bleeder valve 114 according to the testing result that detection piece 14 obtained, and then realize filtering the selection of route to the waste liquid, the waste liquid in the filter 1 only need pass through first filter piece 11, at least one of second filter piece 12 and third filter piece 13, it need pass through all filter pieces in whole filter 1 and filter to have solved the waste liquid, lead to the filtration efficiency low, and the problem of filter 1 is blockked up easily to impurity in the waste liquid.
In addition, based on the above-mentioned filtering device, the present invention further provides a waste liquid regeneration system, please refer to fig. 6, which includes a storage tank 2, a rectifying tower 3 and the filtering device provided in any of the above embodiments, the storage tank 2, the filtering device and the rectifying tower 3 are sequentially communicated along the flow direction of the waste liquid, wherein a feeding pipe 101 is communicated with the storage tank 2 and the filtering device, and a discharging pipe 104 is communicated with the filtering device and the rectifying tower 3. The storage tank 2 is used for storing waste liquid to be regenerated, and the rectifying tower 3 is provided with a condenser 4 for purifying filtrate filtered by the filtering device and realizing regeneration of the waste liquid.
By making the waste liquid regeneration system include the filtering apparatus provided in any of the foregoing embodiments, it is beneficial to detect the solid content of the waste liquid and the filtrate through the detecting element 14, and the control element 15 controls the on/off of the inlet valve 111, the outlet valve 114 and the first valve 112 according to the detection result obtained by the detecting element 14, thereby realizing the selection of the filtering route of the waste liquid, that is, the waste liquid in the filter 1 only needs to pass through at least one of the first filtering element 11 and the second filtering element 12, and solving the problems that the waste liquid needs to pass through the whole filter 1 for filtering, resulting in low filtering efficiency, and the filter 1 is easily blocked by impurities in the waste liquid.
While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention.
Claims (10)
1. A filtering device is characterized in that the filtering device is used for filtering photoresist waste liquid;
the filtering device comprises a filter, a feeding pipe, a discharging pipe, a detecting piece and a control piece;
the feed pipe, the filter and the discharge pipe are communicated in sequence along the flowing direction of waste liquid;
the filter comprises a first filter element and a second filter element; a first pipeline is communicated with the first filter element and the second filter element and is provided with a first valve which is used for switching the communication state of the first filter element and the second filter element;
the feeding pipe and the discharging pipe are connected with the first filtering piece and the second filtering piece, the feeding pipe is used for conveying the waste liquid, the discharging pipe is used for conveying the filtrate, a feeding valve is arranged on the feeding pipe, a discharging valve is arranged on the discharging pipe, and the feeding valve and the discharging valve are respectively used for switching the communication states of the feeding pipe and the discharging pipe with the first filtering piece and the second filtering piece;
the detection piece is electrically connected with the control piece, the detection piece is used for detecting the solid content of the waste liquid and the filtrate and transmitting the solid content result to the control piece, the control piece is electrically connected with the first valve, the feeding valve and the discharging valve, and the control piece is used for controlling the opening and closing of the first valve, the feeding valve and the discharging valve according to the solid content result.
2. The filtration device according to claim 1, wherein the first filter member and the second filter member have different filtration precisions.
3. The filtration device according to claim 2, wherein the filter further comprises a third filter element, the feed pipe and the discharge pipe are both in communication with the third filter element, a second pipe is in communication with the third filter element and the second filter element, the second pipe is provided with a second valve, the second valve is electrically connected to the control element, and the second valve is used for switching the communication state between the second filter element and the third filter element.
4. The filter apparatus according to claim 3, wherein the first conduit further communicates the third filter element with the first filter element, and the first valve is adapted to switch the communication between the first filter element and the second and third filter elements.
5. The filtration device according to claim 3 or 4, wherein the first filter member, the second filter member and the third filter member have different filtration precisions.
6. The filtration apparatus of claim 1, wherein said sensing member is adapted to sense the solids content of said waste liquid at said inlet valve, and said sensing member is further adapted to sense the solids content of said filtrate at said first valve and at said outlet valve.
7. A filter unit as claimed in claim 3 or 4 wherein said sensing means is adapted to sense the solids content of said waste liquid at said inlet valve and said sensing means is further adapted to sense the solids content of said filtrate at said first valve, at said second valve and at said outlet valve.
8. The filtration apparatus according to claim 1, wherein the filter further comprises a third filter element, the feed pipe and the discharge pipe are both in communication with the third filter element, a second pipe is in communication with the third filter element and the second filter element, and a second valve is disposed on the second pipe and electrically connected to the control element for switching the communication state between the second filter element and the third filter element;
the first filter element, the second filter element and the third filter element have the same filtering precision and different waste liquid treatment capacities.
9. The filtration apparatus of claim 8, wherein the sensing member is configured to sense the solids content of the waste fluid at the inlet valve and the sensing member is further configured to sense the solids content of the filtrate at the outlet valve.
10. A photoresist waste liquid regeneration system is characterized by comprising a storage tank, a rectifying tower and the filtering device as claimed in any one of claims 1 to 9, wherein the storage tank, the filtering device and the rectifying tower are sequentially communicated along the flowing direction of waste liquid, and the storage tank and the rectifying tower are respectively used for storing and purifying the waste liquid to be regenerated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210150461.1A CN114470930A (en) | 2022-02-18 | 2022-02-18 | Filter equipment and photoresist waste liquid regeneration system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210150461.1A CN114470930A (en) | 2022-02-18 | 2022-02-18 | Filter equipment and photoresist waste liquid regeneration system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114470930A true CN114470930A (en) | 2022-05-13 |
Family
ID=81482672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210150461.1A Pending CN114470930A (en) | 2022-02-18 | 2022-02-18 | Filter equipment and photoresist waste liquid regeneration system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114470930A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0931578A1 (en) * | 1997-12-24 | 1999-07-28 | G. van Wijnsberghe en Co. NV | Method and apparatus for controlling the continuous filtration of liquids out of solid material from a substance to be thickened |
| JP2012201729A (en) * | 2011-03-24 | 2012-10-22 | Nippon Shokubai Co Ltd | Method for producing thermoplastic resin containing reduced amount of foreign matter, method for producing thermoplastic resin composition containing reduced amount of foreign matter, and method for producing thermoplastic resin molded article containing reduced amount of foreign matter |
| CN103463858A (en) * | 2013-09-02 | 2013-12-25 | 嵩县开拓者钼业有限公司 | Filter system and method for collecting solid mineral grains from lean-phase superfine mineral suspension liquid |
| CN205391932U (en) * | 2016-03-10 | 2016-07-27 | 张婷 | Desulfurization decarbonization solvent filtration purification device |
| DE102015002767A1 (en) * | 2015-03-05 | 2016-09-08 | Hydac Process Technology Gmbh | filter means |
| US20160264442A1 (en) * | 2014-11-25 | 2016-09-15 | Renewable Energy Alternatives, Llc | Nutrient concentration and water recovery system and associated methods |
| CN108568131A (en) * | 2018-05-13 | 2018-09-25 | 四川久远化工技术有限公司 | A kind of stripper regenerating unit and regeneration technology |
| JP2019127585A (en) * | 2018-01-22 | 2019-08-01 | ニッタ・ハース株式会社 | Polishing composition |
-
2022
- 2022-02-18 CN CN202210150461.1A patent/CN114470930A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0931578A1 (en) * | 1997-12-24 | 1999-07-28 | G. van Wijnsberghe en Co. NV | Method and apparatus for controlling the continuous filtration of liquids out of solid material from a substance to be thickened |
| JP2012201729A (en) * | 2011-03-24 | 2012-10-22 | Nippon Shokubai Co Ltd | Method for producing thermoplastic resin containing reduced amount of foreign matter, method for producing thermoplastic resin composition containing reduced amount of foreign matter, and method for producing thermoplastic resin molded article containing reduced amount of foreign matter |
| CN103463858A (en) * | 2013-09-02 | 2013-12-25 | 嵩县开拓者钼业有限公司 | Filter system and method for collecting solid mineral grains from lean-phase superfine mineral suspension liquid |
| US20160264442A1 (en) * | 2014-11-25 | 2016-09-15 | Renewable Energy Alternatives, Llc | Nutrient concentration and water recovery system and associated methods |
| DE102015002767A1 (en) * | 2015-03-05 | 2016-09-08 | Hydac Process Technology Gmbh | filter means |
| CN205391932U (en) * | 2016-03-10 | 2016-07-27 | 张婷 | Desulfurization decarbonization solvent filtration purification device |
| JP2019127585A (en) * | 2018-01-22 | 2019-08-01 | ニッタ・ハース株式会社 | Polishing composition |
| CN108568131A (en) * | 2018-05-13 | 2018-09-25 | 四川久远化工技术有限公司 | A kind of stripper regenerating unit and regeneration technology |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102802769B (en) | Filtering method, and membrane-filtering apparatus | |
| CN105036391B (en) | Purifier | |
| CN114470930A (en) | Filter equipment and photoresist waste liquid regeneration system | |
| CN108314204B (en) | Process system for treating geothermal tail water by utilizing tubular membrane | |
| US10478833B2 (en) | Fluid treatment system, a fluid processing apparatus and method of treating a mixture | |
| CN210736276U (en) | Filter membrane fault detection device of water treatment system | |
| CN211612271U (en) | Environment-friendly semiconductor cutting grinding water microporous filtration system | |
| CN108097049B (en) | Integrated membrane separation and filtration method and device | |
| CN215048892U (en) | Water purification machine steady voltage system | |
| CN114804244A (en) | Water treatment system for electrolysis and hydrogen production system | |
| CN211799306U (en) | Water purifying device and water purifying machine | |
| CN207941399U (en) | A kind of Integrated Films separating and filtering device | |
| CN205740584U (en) | Blockage resisting ultrafiltration water cleaning systems | |
| CN207418405U (en) | A kind of multiple stage circulation purifier and multiple stage circulation water cleaning systems | |
| JP4569772B2 (en) | Sludge concentration apparatus and sludge concentration method | |
| CN218642532U (en) | Device for self-flushing reverse osmosis filter element | |
| CN215480075U (en) | Water purifying device for water dispenser | |
| CN217265123U (en) | Reverse osmosis water purification unit | |
| CN216336775U (en) | Emergency protection system of direct drinking water treatment unit | |
| CN216550811U (en) | Plating solution regeneration device | |
| EP0691151A2 (en) | Filtration device for waste liquids | |
| CN210410225U (en) | Split type membrane filtration filter core structure and large-flux water purifier | |
| CN218290671U (en) | Emulsion wash kettle water treatment system | |
| JP4277335B2 (en) | Activated sludge method | |
| CN210620468U (en) | Electroplating rinse water recycling equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |