CN114448320B - Electromagnetic compliance device based on voice coil motor - Google Patents
Electromagnetic compliance device based on voice coil motor Download PDFInfo
- Publication number
- CN114448320B CN114448320B CN202111580018.XA CN202111580018A CN114448320B CN 114448320 B CN114448320 B CN 114448320B CN 202111580018 A CN202111580018 A CN 202111580018A CN 114448320 B CN114448320 B CN 114448320B
- Authority
- CN
- China
- Prior art keywords
- force
- polishing head
- polishing
- voice coil
- electromagnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005498 polishing Methods 0.000 claims abstract description 62
- 230000008054 signal transmission Effects 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims abstract description 15
- 230000008569 process Effects 0.000 claims abstract description 15
- 238000004891 communication Methods 0.000 claims abstract description 7
- 238000007517 polishing process Methods 0.000 claims description 11
- 229910000976 Electrical steel Inorganic materials 0.000 claims description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 2
- 230000000694 effects Effects 0.000 description 8
- 230000007246 mechanism Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P23/00—Arrangements or methods for the control of AC motors characterised by a control method other than vector control
- H02P23/14—Estimation or adaptation of motor parameters, e.g. rotor time constant, flux, speed, current or voltage
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/26—Accessories, e.g. stops
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
- H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
- H02P25/032—Reciprocating, oscillating or vibrating motors
- H02P25/034—Voice coil motors
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Power Engineering (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
The invention provides an electromagnetic compliance device based on a voice coil motor, which comprises: the control system is used for adjusting the electromagnetic force of the electromagnetic compliance device by controlling the magnitude of the power supply current; the output system is connected with the polishing head and outputs controllable torque for providing power for the polishing head; and the signal transmission system is used for being in communication connection with an external operating system in the use process, and simultaneously ensuring that parameters in the working process of the electromagnetic compliance device are adjustable.
Description
Technical Field
The invention relates to the field of machining of parts of robots, in particular to an electromagnetic compliance device based on a voice coil motor.
Background
In the machining scene of the mechanical parts, the common polishing process mainly adopts mechanical compliance, and the working mode is to ensure the stability of the tail end polishing device through mechanical structures such as springs and the like. In the actual use process of the mechanical structure, due to the problems of low feedback speed, poor feedback effect and the like, the problems of poor polishing effect, slow corresponding speed, low applicability and the like exist in the actual polishing process.
Through searching, for example, the Chinese patent application with the publication number of CN107932278A discloses a blade full-feature robot polishing device. The blade grinding and polishing device comprises a self-adaptive abrasive belt grinding and polishing mechanism, a contact wheel type abrasive belt grinding and polishing mechanism and a self-adaptive abrasive wheel grinding and polishing mechanism, wherein the back and edge of the blade, the blade basin, the damping table and the corner position of the blade root of the blade are respectively ground and polished, so that grinding and polishing of all the characteristics of the blade are realized; wherein, every mechanism all includes flange, voice coil motor, force transducer, motor and module of polishing, and voice coil motor sets up on flange, and is connected through the slider between with the force transducer, and force transducer is connected with the module of polishing and is used for measuring the actual grinding force of module of polishing, and the motor is connected with the module of polishing and is used for driving the module of polishing, and flange is used for being connected with polishing device and external robot. According to the invention, variable force polishing according to different grinding allowance is realized, and simultaneously, full-characteristic polishing of the surface of the blade is realized, the force feedback response speed is high, and the polishing precision is high.
The invention application of China with publication number CN110977760A discloses a single-degree-of-freedom high-bandwidth force control polishing device and application thereof. The device comprises a connecting base, a driving module, a transmission module, a measuring module and a polishing module, wherein the connecting base is used for connecting a single-degree-of-freedom high-bandwidth force control polishing device with the tail end of an industrial robot; the driving module is a voice coil motor which is vertically arranged and comprises a stator and a rotor, the upper end of the stator is connected with the connecting base, and the lower end of the rotor is connected with the transmission module; the lower end of the transmission module is connected with the polishing module; the measuring module is used for measuring displacement and contact force of the polishing module. The driving module adopts the voice coil motor, and the displacement of the voice coil motor is adjusted in real time by controlling the input current of the voice coil motor, so that the displacement and the contact force of the polishing module are adjusted in real time.
The above-mentioned patent is a polishing device suitable for manufacturing complex curved surfaces, and there is still a need for further improvement in electromagnetic compliance portions of voice coil motors.
Disclosure of Invention
In view of the defects in the prior art, the invention aims to provide an electromagnetic compliance device based on a voice coil motor.
According to an object of the present invention, there is provided an electromagnetic compliance device based on a voice coil motor, comprising:
The control system is used for adjusting the electromagnetic force of the electromagnetic compliance device by controlling the magnitude of the power supply current;
the output system is connected with the polishing head and outputs controllable torque for providing power for the polishing head; and
And the signal transmission system is used for being mutually in communication connection with an external operating system in the use process, and simultaneously ensuring that parameters in the working process of the electromagnetic compliance device are adjustable.
Further, the output system includes:
a motor base for fixing and connecting;
The voice coil motor is connected to the motor base and comprises a permanent magnet, a coil and a connecting rod; and
The force sensor is arranged at the front end of the voice coil motor and is used for measuring acting force on the polishing head in real time.
Further, the permanent magnet is correspondingly connected with the force sensor and the polishing head through connecting rods, and the permanent magnet interacts with the coil to generate electromagnetic force.
Further, the connecting rod is used for connecting a polishing head, penetrates through the permanent magnet and the force sensor through threaded connection and is fixedly connected to the motor base.
Further, the coil is wound on the silicon steel core.
Further, the connecting rod is connected with the motor base through an oil-free bushing.
Further, the signal transmission system supports RS485 and Modbus rtu mode communication.
Compared with the prior art, the invention has the following beneficial effects:
according to the device, the current of the voice coil motor is controlled by controlling the power supply current in the working process, namely the current duty ratio, so that the IGBT control board is controlled to control the current of the voice coil motor, and the current of the voice coil motor directly determines the electromagnetic force of the coil, so that the output effect is influenced. The problem that different workpieces need to be changed in the actual polishing process can be solved, and the application range is wider.
The device is provided with the force sensor and the signal transmission system, so that the acting force generated by the electromagnetic compliance device can be fed back in real time, and the parameter target force and the control parameter KP/KI/KD parameters can be adjusted through the signal transmission system, so that the feedback state of the cis-stress is controlled. The electromagnetic compliance device has feedback on axial force, so that the problems of poor polishing effect and low polishing efficiency caused by vibration generated by other reasons in the polishing process can be solved.
Drawings
Other features, objects and advantages of the present invention will become more apparent upon reading of the detailed description of non-limiting embodiments, given with reference to the accompanying drawings in which:
Fig. 1 is a schematic diagram of an electromagnetic compliance device based on a voice coil motor according to a preferred embodiment of the present invention.
Fig. 2 is a schematic diagram of an output system of an electromagnetic compliance device based on a voice coil motor according to a preferred embodiment of the present invention.
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the present invention, but are not intended to limit the invention in any way. It should be noted that variations and modifications could be made by those skilled in the art without departing from the inventive concept. These are all within the scope of the present invention.
Referring to fig. 1, an embodiment of the present invention provides an electromagnetic compliance device based on a voice coil motor, which includes a control system, an output system, and a signal transmission system. Wherein:
the control system is used for controlling the voice coil motor, the force sensor and the signal transmission system, and the current of the voice coil motor is controlled in the working process by controlling the magnitude of the power supply current, namely the current magnitude duty ratio, so that the IGBT control board is controlled. The current of the voice coil motor directly determines the electromagnetic force of the coil, so that the output force is influenced.
And the signal transmission system is used for being mutually communicated and connected with an external operating system in the use process, and simultaneously ensuring that parameters of the electromagnetic compliance device in the working process are adjustable.
The output system outputs controllable moment through electromagnetic force generated by coil current in the voice coil motor, and is used for providing power for the polishing head. In the polishing process, the polishing head connected with the output system is directly connected with the permanent magnet, and the permanent magnet interacts with the coil to generate electromagnetic force for driving the polishing action of the polishing head. The output system comprises a motor base with a fixed connection function, a voice coil motor connected to the motor base and a force sensor arranged at the front end of the voice coil motor. The voice coil motor comprises a permanent magnet, a coil and a connecting rod, and the coil is wound on the silicon steel iron core. Reference is made to figure 2.
Because the current of voice coil motor will directly determine the size of coil electromagnetic force, this embodiment is through the size of the power supply current in the control working process to control IGBT control panel realization is to the control of voice coil motor current size, finally influences output effect, can solve the problem that different work pieces need to change the type of polishing in the actual process of polishing.
Fig. 2 is a schematic diagram of an output system of an electromagnetic compliance device based on a voice coil motor according to a preferred embodiment of the present invention. Referring to fig. 2, in some preferred embodiments, the permanent magnet is correspondingly connected to the force sensor and the polishing head through a connecting rod, and the connecting rod penetrates through the permanent magnet and the force sensor through a threaded connection and is fixedly connected to the motor base. The permanent magnet interacts with the coil, and the permanent magnet receives the magnetic field acting force and drives the connecting rod to generate axial force, so that the polishing head is driven to realize polishing. In the use process, the acting force of the polishing head can be detected through the force sensor and fed back to the control system through the signal transmission system, and then the coil current is adjusted through the cascade PID algorithm, so that the size adjustment of the permanent magnetic force is realized, and finally the electromagnetic compliance function is realized.
The electromagnetic force generated by the voice coil motor is determined by the coil current and the position of the permanent magnet in the coil during the polishing process. If the current is unchanged in the polishing process, the magnitude of the acting force detected and fed back by the force sensor is determined by the axial position of the polishing head, namely the polishing protrusion condition of the polishing head. Therefore, in order to ensure the stability of the acting force of the polishing head in the polishing process, the magnitude of the power supply current needs to be controlled. The force sensor detects fluctuation of acting force of the polishing head in the polishing process, and the force signal is converted into a voltage difference through the bridge type strain gauge type sensor. And converting the voltage difference into a 4-20mA standard current signal through an operational amplifier in the control system, and finally transmitting the signal to the controller.
In some preferred embodiments, the connecting rod is connected with the motor base through an oilless bushing to ensure lubrication effect and maintain stable axial movement.
In some preferred embodiments, the electromagnetic compliance device supports RS485, modbus rtu mode communications.
The specific operation process comprises the following steps:
When the operator needs to use, the corresponding controller switch is turned on. After the switch is opened, the control system controls the on-off of the output thyristor circuit according to the internal information, and outputs the coil current of the voice coil motor. After the coil current is input, the coil generates acting force on the permanent magnet, the polishing device is controlled, and finally, the compliance effect of the polishing device is realized.
When the internal control information of the system needs to be modified, the internal control system can be modified by adopting an RS485 communication mode through a PC system. Among the variables that can be modified are PID parameter values, target force signal values, and modified values.
The embodiment of the invention is provided with the force sensor and the signal transmission system, so that the acting force generated by the electromagnetic compliance device can be fed back in real time, and the parameter target force and the control parameter KP/KI/KD parameters can be adjusted through the signal transmission system, thereby realizing the control of the feedback state of the cis-stress. The electromagnetic compliance device has feedback on axial force, so that the problems of poor polishing effect and low polishing efficiency caused by vibration generated by other reasons in the polishing process can be solved.
In the description of the present invention, it should be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the present invention and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention. Furthermore, in the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
The foregoing describes specific embodiments of the present invention. It is to be understood that the invention is not limited to the particular embodiments described above, and that various changes and modifications may be made by one skilled in the art within the scope of the claims without affecting the spirit of the invention. The above-described preferred features may be used in any combination without collision.
Claims (2)
1. An electromagnetic compliance device based on a voice coil motor, comprising:
The control system is used for adjusting the electromagnetic force of the electromagnetic compliance device by controlling the magnitude of the power supply current;
the output system is connected with the polishing head and outputs controllable torque for providing power for the polishing head; and
The signal transmission system is used for being in communication connection with an external operating system in the use process, and meanwhile, parameters in the working process of the electromagnetic compliance device are guaranteed to be adjustable;
the output system includes:
a motor base for fixing and connecting;
The voice coil motor is connected to the motor base and comprises a permanent magnet, a coil and a connecting rod, the connecting rod is connected with the motor base through an oilless bushing, the permanent magnet is correspondingly connected with the force sensor and the polishing head through the connecting rod, and the connecting rod penetrates through the permanent magnet and the force sensor and is fixedly connected to the motor base; the permanent magnet interacts with the coil, the permanent magnet receives the acting force of the magnetic field and drives the connecting rod to generate axial force, so that the polishing head is driven to realize polishing work; and
The force sensor is arranged at the front end of the voice coil motor and is used for measuring acting force on the polishing head in real time;
The force sensor detects fluctuation of acting force of the polishing head in the polishing process, a force signal is converted into a voltage difference through the bridge strain gauge type sensor, the voltage difference is converted into a 4-20mA standard current signal through an operational amplifier in the control system, and the standard current signal is finally transmitted to the controller;
The acting force of the polishing head is detected through a force sensor, and is fed back to the control system through the signal transmission system, and then the coil current is adjusted through a cascade PID algorithm, so that the size of the permanent magnetic force is adjusted, and finally the electromagnetic compliance function is realized;
The force sensor and the signal transmission system can feed back acting force generated by the electromagnetic compliance device in real time, and can adjust the target force of parameters and the KP/KI/KD parameters of control parameters through the signal transmission system so as to control the feedback state of the cis-stress;
the permanent magnet is correspondingly connected with the force sensor and the polishing head through connecting rods, and interacts with the coil to generate electromagnetic force;
the connecting rod is used for connecting a polishing head, penetrates through the permanent magnet and the force sensor through threaded connection and is fixedly connected to the motor base;
The coil is wound on the silicon steel iron core.
2. The voice coil motor based electromagnetic compliance device of claim 1, wherein the signal transmission system supports RS485, modbus rtu mode communications.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111580018.XA CN114448320B (en) | 2021-12-22 | 2021-12-22 | Electromagnetic compliance device based on voice coil motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111580018.XA CN114448320B (en) | 2021-12-22 | 2021-12-22 | Electromagnetic compliance device based on voice coil motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114448320A CN114448320A (en) | 2022-05-06 |
| CN114448320B true CN114448320B (en) | 2024-05-24 |
Family
ID=81364718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111580018.XA Active CN114448320B (en) | 2021-12-22 | 2021-12-22 | Electromagnetic compliance device based on voice coil motor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114448320B (en) |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104723210A (en) * | 2015-02-14 | 2015-06-24 | 广东工业大学 | Electromagnetism one-dimensional constant force device and control method thereof |
| CN107932278A (en) * | 2017-11-21 | 2018-04-20 | 华中科技大学 | A kind of full feature robot grinding and polishing apparatus of blade |
| CN110977760A (en) * | 2019-12-24 | 2020-04-10 | 华中科技大学 | Single-degree-of-freedom high-bandwidth force-controlled grinding and polishing device and application thereof |
| CN111478631A (en) * | 2020-05-25 | 2020-07-31 | 南京工程学院 | Voice coil motor control system and control method for chip mounter |
| CN111745536A (en) * | 2019-03-26 | 2020-10-09 | 中国科学院宁波材料技术与工程研究所 | Gas-electric hybrid power control end effector for robot |
| CN111843766A (en) * | 2020-07-17 | 2020-10-30 | 大连理工大学 | High-precision force and position hybrid control device for grinding and polishing of robot |
| CN112108998A (en) * | 2020-10-15 | 2020-12-22 | 广东工业大学 | Robot power control polishing and grinding end effector with active damping |
| CN112202374A (en) * | 2020-09-28 | 2021-01-08 | 广东工业大学 | Voice coil motor micro-positioning platform, motion control method, device and system |
| CN112548848A (en) * | 2019-09-26 | 2021-03-26 | 清华大学 | Bearing head and chemical mechanical polishing equipment |
| CN113021086A (en) * | 2021-03-29 | 2021-06-25 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Polishing device for tail end of robot and polishing method thereof |
| CN113400143A (en) * | 2020-09-25 | 2021-09-17 | 天津理工大学 | Robot force control end effector and control method thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102001621B1 (en) * | 2011-11-30 | 2019-07-18 | 엘지이노텍 주식회사 | Voice coil motor and method for driving thereof |
-
2021
- 2021-12-22 CN CN202111580018.XA patent/CN114448320B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104723210A (en) * | 2015-02-14 | 2015-06-24 | 广东工业大学 | Electromagnetism one-dimensional constant force device and control method thereof |
| CN107932278A (en) * | 2017-11-21 | 2018-04-20 | 华中科技大学 | A kind of full feature robot grinding and polishing apparatus of blade |
| CN111745536A (en) * | 2019-03-26 | 2020-10-09 | 中国科学院宁波材料技术与工程研究所 | Gas-electric hybrid power control end effector for robot |
| CN112548848A (en) * | 2019-09-26 | 2021-03-26 | 清华大学 | Bearing head and chemical mechanical polishing equipment |
| CN110977760A (en) * | 2019-12-24 | 2020-04-10 | 华中科技大学 | Single-degree-of-freedom high-bandwidth force-controlled grinding and polishing device and application thereof |
| CN111478631A (en) * | 2020-05-25 | 2020-07-31 | 南京工程学院 | Voice coil motor control system and control method for chip mounter |
| CN111843766A (en) * | 2020-07-17 | 2020-10-30 | 大连理工大学 | High-precision force and position hybrid control device for grinding and polishing of robot |
| CN113400143A (en) * | 2020-09-25 | 2021-09-17 | 天津理工大学 | Robot force control end effector and control method thereof |
| CN112202374A (en) * | 2020-09-28 | 2021-01-08 | 广东工业大学 | Voice coil motor micro-positioning platform, motion control method, device and system |
| CN112108998A (en) * | 2020-10-15 | 2020-12-22 | 广东工业大学 | Robot power control polishing and grinding end effector with active damping |
| CN113021086A (en) * | 2021-03-29 | 2021-06-25 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Polishing device for tail end of robot and polishing method thereof |
Non-Patent Citations (2)
| Title |
|---|
| 基于音圈电机的力/位控制及应用;黄浩;CNKI博硕士学位论文工程科技Ⅱ辑(第2010年第05期期);第1-43页 * |
| 面向机器人抛光打磨的一维恒力装置及控 制***;何伟崇;硕士论文;第1-85页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114448320A (en) | 2022-05-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8203299B2 (en) | Machine tool or production machine with signal generation by means of direct drive and method for generating signals in such a machine | |
| US5105135A (en) | Feedback controller for NC controlled machine tools | |
| US11899420B2 (en) | Apparatus and method for controlling resonance suppression of machine tool | |
| CN114448320B (en) | Electromagnetic compliance device based on voice coil motor | |
| US6727666B2 (en) | XY table for a semiconductor manufacturing apparatus | |
| CN203738176U (en) | Tension control device of wire cutting machine and wire cutting machine | |
| CN107598869B (en) | Damping-adjustable precise direct-drive air floating platform | |
| US6886436B2 (en) | Method and device for damping a chatter oscillation in a processing machine | |
| WO2023087792A1 (en) | Machining electric spindle and numerical control machine tool | |
| JP2003208230A (en) | Method and device for controlling vibration damping of machine and vibration damping type machine | |
| JPS61214942A (en) | Driving means | |
| CN114683286A (en) | Damping-controllable robot arm and control system thereof | |
| CN105071739B (en) | The control system and its control method of a kind of linear motor | |
| CN101661293B (en) | Machine control device | |
| JPH03500112A (en) | linear drive motor | |
| CN1087209C (en) | Device for compensating deformation of machine element and possible supporting means | |
| CN105099327A (en) | Motor position control system based on power supply controller | |
| JP2002355730A (en) | Table positioning device | |
| Schinstock et al. | Loop shaping design for tracking performance in machine axes | |
| CN111940773B (en) | Omnidirectional constant-torque machining auxiliary device for cutting machining | |
| CN113938061B (en) | Method for reducing speed fluctuation of linear feeding system | |
| CN215954157U (en) | Amplitude and frequency adjustable one-way excitation device | |
| CN212543674U (en) | Device for realizing motor tracking error reduction method based on micro-drive unit | |
| Nomura et al. | Design of Acceleration Command for Feed Drive System in Corner Motion. | |
| CN202539965U (en) | Cutting tool clamping system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |