CN114444948A - Control system and method for intelligently acquiring and dispatching WPH (WPH) in wafer production line - Google Patents

Control system and method for intelligently acquiring and dispatching WPH (WPH) in wafer production line Download PDF

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CN114444948A
CN114444948A CN202210108131.6A CN202210108131A CN114444948A CN 114444948 A CN114444948 A CN 114444948A CN 202210108131 A CN202210108131 A CN 202210108131A CN 114444948 A CN114444948 A CN 114444948A
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wph
production capacity
wafer
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刘欣欣
张峰
何瑜
刘少贵
程杰
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Shanghai Huali Microelectronics Corp
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Abstract

A wafer production line intelligent acquisition and dispatch WPH control system comprises: the synchronization module is used for requesting the synchronization equipment to operate the production capacity peak value (PWPH) of the wafer per hour according to the dispatching preprocessing program so as to automatically acquire standard basic data; the method comprises the steps that a production capacity (WPH) module of an operation wafer per hour for automatic dispatching is intelligently obtained, and the production capacity (WPH) of the operation wafer per hour for automatic dispatching is intelligently obtained by taking the production capacity peak value (PWPH) of the operation wafer per hour of the automatically obtained equipment as basic data; and the application module is used for displaying the production capacity (WPH) of the operation wafers per hour for final edition automatic dispatching in a visual interface mode, applying the WPH to the intelligent dispatching Q-time model to calculate the downstream capacity, and judging whether the Q-time starting site puts the good or not according to the calculation result. The invention not only can accurately control automatic dispatching and reduce human intervention, but also can reduce the product quality risk, and is worth popularizing and using in the industry.

Description

Control system and method for intelligently acquiring and dispatching WPH (WPH) of wafer production line
Technical Field
The invention relates to the technical field of semiconductor manufacturing, in particular to a control system and a control method for intelligently acquiring and dispatching WPH (WPH) in a wafer production line.
Background
As is known, due to process limitations, the semiconductor wafer fabrication requires a maximum waiting Time (Q-Time) at a critical site, and if the waiting Time is exceeded and equipment operation is not performed, there is a risk of rejection of the unit of wafer fabrication (LOT). Therefore, the capacity of each site needs to be considered when dispatching, i.e. the capacity of each site downstream is considered when dispatching from the Q-time starting site.
The equipment capacity is related to the Peak production capacity of the operating wafers per Hour (PWPH) of the equipment, but if the Peak production capacity of the operating wafers per Hour (PWPH) is directly used for dispatching guidance, the over-Q-time is inevitably caused. On the other hand, if the peak production capacity (PWPH) of an operating wafer per hour of automatic dispatch is estimated only by empirical values or simply by collecting data, there are problems of poor accuracy and low intelligence.
The search for a process and an algorithm to automatically acquire the WPH for automatic dispatch has become one of the technical problems to be solved by those skilled in the art.
Therefore, aiming at the problems in the prior art, the designer of the scheme actively researches and improves by means of years of experience in the industry, and then the invention provides a control system and a control method for intelligently acquiring and dispatching WPH in a wafer production line.
Disclosure of Invention
The first purpose of the invention is to provide a control system for intelligently acquiring dispatching WPH of a wafer production line, aiming at the defects of poor accuracy, poor intellectualization and the like of the traditional automatic dispatching process and algorithm in the prior art.
The second objective of the present invention is to provide a control method of a control system for intelligently acquiring a WPH for dispatch in a wafer production line, aiming at the defects of poor accuracy and poor intelligence in the traditional automatic dispatch process and algorithm in the prior art.
In order to achieve the first objective of the present invention, the present invention provides a control system and method for intelligently obtaining and dispatching WPH in a wafer production line, wherein the control system for intelligently obtaining and dispatching WPH in a wafer production line comprises:
a synchronization module, which is used for automatically obtaining standard basic data from a Peak Wafer Per Hour (PWPH) of the production capacity of the operation Wafer of the automatic synchronization equipment of the manufacture execution system server to the manufacture server of the dispatching preprocessing program according to the requirement of the dispatching preprocessing program;
the system comprises a production capacity (WPH) module for intelligently acquiring production capacity of an hourly work wafer for automatic dispatching, a preprocessing module, a calculation module and an output module, wherein the production capacity (WPH) module intelligently acquires the production capacity of the hourly work wafer for automatic dispatching by taking the production capacity peak value (PWPH) of the hourly work wafer of the automatically acquired equipment as basic data, and further comprises the preprocessing module, the calculation module and the output module which are controlled by a control module;
And the application module is used for displaying the production capacity (WPH) of the operation wafers per hour for final edition automatic dispatching in a visual interface mode, applying the WPH to the intelligent dispatching Q-time model to calculate the downstream capacity, and judging whether the Q-time starting site puts the good or not according to the calculation result.
Optionally, the automatic dispatching production capacity per hour (WPH) of the work wafer is divided into a whole machine automatic dispatching WPH and a cavity automatic dispatching WPH.
Optionally, when the peak production capacity per hour (PWPH) of the synchronous device is required, the device with the cavity provides the peak production capacity per hour (PWPH) of the cavity corresponding to the working wafer, and the device without the cavity provides the peak production capacity per hour (PWPH) of the whole machine corresponding to the working wafer.
Optionally, the synchronization module further includes a first unit of an immediate update process and a second unit of an arrival time frequency update process.
Optionally, the first unit triggering condition of the real-time updating process includes adding new equipment, increasing production capacity, changing production capacity, and causing a peak value of production capacity (PWPH) of the work wafer per hour to be greater than or equal to 10% due to equipment improvement, and causing at least one of the peak value of production capacity (PWPH) of the work wafer per hour to be less than or equal to 10% due to equipment damage.
Optionally, the second unit triggering condition of the arrival time frequency updating process is a fixed time per month.
To achieve another object of the present invention, the present invention provides a control method for a control system of a wafer production line for intelligently acquiring a dispatch WPH, the control method for the control system of the line intelligent acquisition dispatch WPH, comprising:
step S1 is executed: the synchronization module is used for automatically acquiring standard basic data from a production capacity peak (PeakWaferPer Hour, PWPH) of an operation wafer per Hour of the synchronization equipment of the manufacturing execution system server to a manufacturing part server of the dispatching preprocessing program according to the requirement of the dispatching preprocessing program;
step S2 is executed: the production capacity (WPH) module for intelligently acquiring the operation wafers per hour of automatic dispatching takes the automatically acquired production capacity peak value (PWPH) of the operation wafers per hour of equipment as basic data, and intelligently acquires the production capacity (WPH) of the operation wafers per hour of automatic dispatching;
step S3 is executed: the control module is used for controlling and outputting the production capacity (WPH) of the operation wafer per hour by the output module through the automatic final edition dispatching which is adjusted by the production line personnel and the automatic dispatching personnel according to the actual condition of the production line and the capacity control;
Step S4 is executed: the application module displays the production capacity (WPH) of the operation wafer per hour for final edition automatic dispatching in an interface mode, is applied to the Q-time model for intelligent dispatching, is used for calculating the downstream capacity, and judges whether the Q-time starting station puts the good or not according to the calculation result.
Optionally, the intelligently acquiring a production capacity (WPH) of an automatically dispatched work wafer per hour further includes:
step S21 is executed: screening effective Flow (Flow) by using a preprocessing module to screen effective comprehensive efficiency (OEE) of Equipment, and screening pass ratio M corresponding to production capacity related to Q-timeiAnd weighting the average pass ratio C;
step S22 is executed: according to the data of the step S21, the calculation module calculates to obtain the production capacity (WPH) of the work wafer per hour of the initial automatic dispatch, and the production line personnel and the automatic dispatch personnel adjust to obtain the production capacity (WPH) of the work wafer per hour of the final automatic dispatch according to the actual conditions of the production line and the capacity control.
Optionally, the pass ratio MiIs composed of
Figure BDA0003494566410000041
Then C is
Figure BDA0003494566410000042
Optionally, the production capacity per hour (WPH) of the automatically dispatched work wafer is: the WPH is an hourly peak production throughput (PWPH) x Ratio of work wafers.
In summary, the control system for intelligently acquiring the WPH for dispatching in the Wafer production line of the present invention requests the Peak productivity (PWPH) of the operation Wafer Per Hour of the synchronous equipment through the synchronization module according to the dispatching preprocessing program, automatically acquires the standard basic data, and intelligently acquires the production capacity (WPH) of the operation Wafer Per Hour of the automatic dispatching by using the automatically acquired Peak productivity (PWPH) of the operation Wafer Per Hour of the equipment as the basic data through the synchronization module, so as to guide the actual dispatching, not only accurately control the automatic dispatching, reduce human intervention, but also reduce the product quality risk, and is worthy of popularization and application in the industry.
Drawings
FIG. 1 is a schematic diagram of a frame structure of a WPH control system for intelligently acquiring and dispatching in a wafer production line according to the present invention;
FIG. 2 is a flow chart illustrating real-time peak production power (PWPH) updating of wafers per hour for a MES server device;
FIG. 3 is a flowchart illustrating a peak production power (PWPH) arrival time frequency update of an hourly job wafer for a manufacturing execution system server device;
FIG. 4 is a flowchart illustrating a control method for intelligently acquiring a WPH for dispatching in a wafer manufacturing line according to the present invention;
FIG. 5 is a schematic diagram of a production throughput (WPH) of automatically dispatching work wafers per hour in an interface format;
FIG. 6 is a diagram illustrating an example of an automatic dispatch hourly production capacity (WPH) for a work wafer applied to a put model;
fig. 7 is a diagram illustrating an application result of the control system for intelligently acquiring the dispatch WPH in the wafer production line.
Detailed Description
The invention will be described in detail with reference to the following embodiments and drawings for illustrating the technical content, structural features, and achieved objects and effects of the invention.
Referring to fig. 1, fig. 1 is a schematic diagram illustrating a frame structure of a control system for intelligently acquiring a WPH for dispatching in a wafer fabrication line according to the present invention. Wafer production line intelligence obtains dispatch WPH's control system, includes:
a synchronization module 10, wherein the synchronization module 10 is used for automatically obtaining standard basic data from a Peak Wafer Per Hour (PWPH) of a synchronization device of a manufacturing execution system server to a manufacturing server of the dispatching preprocessing program according to the requirement of the dispatching preprocessing program;
an intelligent get-work-hourly-production-capacity (WPH) module 20 for automatically dispatching work wafers, wherein the intelligent get-work-hourly-production-capacity (WPH) module 20 intelligently gets the production capacity (WPH) of the automatically dispatched work wafers based on the automatically obtained peak production capacity (PWPH) of the work wafers per hour, and further comprises a pre-processing module 22, a calculation module 23, and an output module 24 controlled by a control module 21;
And the application module 30 is used for displaying the production capacity (WPH) of the operation wafer per hour for final edition automatic dispatching in a visual interface mode, applying the WPH in an intelligent dispatching Q-time model, calculating the downstream capacity, and judging whether the Q-time starting station puts the good or not according to the calculation result.
In order to more intuitively disclose the technical scheme of the present invention, and to highlight the beneficial effects of the present invention, the control system and method for intelligently acquiring and dispatching WPH in the wafer production line will now be described with reference to the specific embodiments. In the specific embodiment, the IE engineer, the PE engineer, the production line personnel, the automatic dispatching personnel, and the specific values related to the application are only examples, and should not be construed as limiting the technical solution of the present invention.
With continued reference to FIG. 1, as will be readily appreciated by those skilled in the art, the peak production capacity (PWPH) of a device hourly work wafer is provided by the IE engineer, since the peak production capacity (PWPH) of a device hourly work wafer is obtained at the MES server and the Dispatch Process is at the fab server, it is desirable to synchronize the peak production capacity (PWPH) of a device hourly work wafer according to the Dispatch Process.
In addition, the production capacity (WPH) of the operation wafer per hour of automatic dispatching is divided into the WPH of the automatic dispatching of the whole machine and the WPH of the automatic dispatching of the cavity, namely, the equipment does not have the cavity, the operation is carried out in the form of the whole machine, and the capability of the machine station is the WPH of the automatic dispatching of the whole machine; if the equipment has cavities, the equipment operates in the form of cavities, and the capacity of each cavity in operation is different, the capacity of the cavity with the minimum machine operation capacity is the machine capacity, namely, the bottle neck cavity (Bottleneck) automatically dispatches the WPH. When the peak production capacity (PWPH) of the wafers operated by the synchronous equipment per hour is needed, the equipment with the cavity provides the peak production capacity (PWPH) of the wafers operated by the cavity corresponding to the hour, and the equipment without the cavity provides the peak production capacity (PWPH) of the wafers operated by the whole machine corresponding to the hour.
Referring to FIGS. 2 and 3 in conjunction with FIG. 1, FIG. 2 is a flow chart illustrating real-time wafer production peak (PWPH) updates for hourly work wafers from the MES server equipment. FIG. 3 is a flow chart illustrating the peak production throughput (PWPH) arrival time frequency of Job wafers per hour by the MES server equipment. The synchronization module 10 further includes a first unit of an instant update process and a second unit of an arrival time frequency update process, which specifically include:
1. First unit of immediate updating flow
1.1 define the update criteria: the method includes but is not limited to adding new equipment, increasing production capacity, changing production capacity, and leading the peak production capacity (PWPH) of the operation wafers per hour to be more than or equal to 10% due to equipment improvement and less than or equal to 10% due to equipment damage.
1.2 the update flow is as follows: the PE engineer sends a text to inform the manufacturing department that the peak production capacity (PWPH) of the operation wafers per hour is changed, a machine manager of the manufacturing department maintains the area where the capacity belongs, then the automatic dispatching determines whether the bottleneck cavity is changed according to the data provided by the PE engineer, and then the production line personnel determine the final peak production capacity (PWPH) of the operation wafers per hour of the bottleneck cavity according to the data provided by the PE engineer.
2. Second unit of arrival time frequency updating flow
2.1 define the update criteria: the time frequency is a fixed time per month.
2.2 the update procedure is as follows: the IE engineer and the PE engineer provide the peak hourly production capacity (PWPH) of the Job wafers each month, and the automatic dispatch checks whether there is a defect based on the latest peak hourly production capacity (PWPH) of the Job wafers. If the defect exists, acquiring the production capacity peak value (PWPH) of the operation wafer per hour which is missing from the corresponding PE engineer by the equipment responsible person corresponding to the manufacturing part, and carrying out manual maintenance; if no, the updating is finished.
Referring to fig. 4 in conjunction with fig. 1, fig. 4 is a flowchart illustrating a control method for intelligently acquiring a dispatch WPH in a wafer fabrication line according to the present invention. The control method for intelligently acquiring the dispatching WPH of the wafer production line comprises the following steps:
step S1 is executed: the synchronization module 10 is used for automatically obtaining standard basic data from a Peak Wafer Per Hour (PWPH) of an hourly work Wafer of a synchronization device of a manufacturing execution system server to a server of a manufacturing part where the dispatching preprocessing program is located according to the requirement of the dispatching preprocessing program;
step S2 is executed: the intelligent get productivity per hour (WPH) module 20 for automatically dispatching work wafers intelligently gets the productivity per hour (WPH) of the automatically dispatched work wafers based on the automatically obtained peak productivity per hour (PWPH) of the work wafers of the equipment, and further comprises:
step S21 is executed: the effective comprehensive efficiency (OEE) of the Equipment is screened through the preprocessing module 22, the effective Flow (Flow) is screened, and the corresponding pass ratio M of the production capacity related to Q-time is screenediAnd weighting the average pass ratio C;
step S22 is executed: according to the data in the step S21, calculating by the calculating module 23 to obtain the production capacity (WPH) of the work wafer per hour for the initial automatic dispatch, and adjusting by the production line personnel and the automatic dispatch personnel according to the actual conditions of the production line and the capacity control to obtain the production capacity (WPH) of the work wafer per hour for the final automatic dispatch;
Step S3 is executed: the control module 21 is used for controlling and outputting the production capacity (WPH) of the operation wafer per hour by the automatic final edition dispatching which is regulated by the production line personnel and the automatic dispatching personnel according to the actual conditions of the production line and the capacity control through the output module 24;
step S4 is executed: the application module 30 displays the production capacity (WPH) of the final-edition automatic dispatching hourly operation wafer in a visual interface mode, is applied to the intelligent dispatching Q-time model, is used for calculating the downstream capacity, and judges whether the Q-time starting site puts the product according to the calculation result.
Referring to fig. 1, the intelligent get per hour WPH module 20 further includes a pre-process module 22, a calculation module 23, and an output module 24 controlled by the control module 21. The preprocessing module 22 is used for screening the effective comprehensive efficiency (OEE) of the Equipment, screening the effective Flow (Flow), and screening the pass ratio M corresponding to the production capacity related to Q-timeiAnd the average pass ratio C is weighted. In particular, the amount of the solvent to be used,
1. effective Overall efficiency (OEE) of the screening apparatus: and recording the OEE of each equipment every day, and taking a 3 sigma value as an effective OEE, namely rejecting an abnormal value.
2. Screening an effective flow: the effective flow is marked as F according to the production plan and the production line WIP (work In progress) put into each month In the beginning of each monthi。
3. Screening the throughput corresponding pass ratio M related to Q-timeiAnd the weighted average pass ratio C: each flow defines the production capacity used by each site, and each production capacity is classified as (i) Q-time free production capacity. ② all the production capacity of Q-time. ③ portionPartially without Q-time production capacity. Let pass ratio MiIn order to realize the purpose,
Figure BDA0003494566410000091
when the production capacity does not relate to Q-time, MiIs 0; when the productivity part relates to Q-time, MiE (0, 1); m when the production capacities all relate to Q-timeiIs 1.
4. Weighted average throughput pass ratio C
Without limitation, if:
ratio of M1 M2 M3 …… Mk
Frequency of occurrence N1 N2 N3 …… Nk
The weighted average capacity pass ratio is,
Figure BDA0003494566410000092
the definition of the method is that,
Figure BDA0003494566410000093
referring to Table 1, for non-limiting enumeration, the Ratio is calculated as follows:
TABLE 1 Ratio calculation procedure
Figure BDA0003494566410000101
Referring to fig. 1, the calculation module 23 calculates to obtain a production capacity (WPH) of the work wafer per hour from the initial automatic dispatch, and the production line personnel and the automatic dispatch personnel adjust to obtain the production capacity (WPH) of the work wafer per hour from the final automatic dispatch according to the actual conditions of the production line and the capacity control. In particular, the amount of the solvent to be used,
1. Obtaining an initial edition automatic dispatch WPH: the automatic dispatch WPH is that,
the WPH is an hourly peak production throughput (PWPH) x Ratio of work wafers.
More specifically, the first month and month of each month checks for effective OEE when M isiWhen the work wafer per hour is 0 or 1, the production capacity (WPH) of the automatic dispatching work wafer per hour is as follows: WPH (WPH) is automatically dispatched, namely PWPH multiplied by OEE; when M isiWhen the new product belongs to (0,1), the automatic dispatch WPH is equal to PWPH multiplied by C multiplied by OEE.
2. Aiming at the production capacity (WPH) of the initial-edition automatic dispatching hourly operation wafer, the production line personnel and the automatic dispatching personnel adjust according to the actual conditions of the production line and the capacity control to obtain the production capacity (WPH) of the final-edition automatic dispatching hourly operation wafer.
Referring to fig. 1, the output module 24 outputs the production capacity (WPH) of the work wafer per hour from the final edition automatic dispatch, which is adjusted by the production line personnel and the automatic dispatch personnel according to the actual conditions of the production line and the capacity control, under the control of the control module 21.
Referring to fig. 5 and 6, fig. 5 is a schematic diagram illustrating a production capacity per hour (WPH) of an automatically dispatched work wafer displayed as a visual interface. FIG. 6 is a diagram illustrating an example of an automated dispatch hourly work capacity (WPH) for a work wafer as applied to a put model. The application module 30 displays the production capacity (WPH) of the final-edition automatic dispatching hourly operation wafer in a visual interface mode, is applied to the intelligent dispatching Q-time model, is used for calculating the downstream capacity, and judges whether the Q-time starting site puts the product according to the calculation result. The interface settings include, but are not limited to, device name, production capacity, PWPH, automatic dispatch WPH information.
The production capacity (WPH) of an automatically dispatched hourly job wafer is applied to an intelligent dispatch Q-time model to calculate downstream capacity, and whether the Q-time origin site is put is determined according to the calculation result, and the underlying data is applied to determine whether the product at each origin site relates to the upper limit calculated by the WPH of the automatically dispatched WPH to the production capacity of each downstream site capable of accommodating the product.
Referring to fig. 7, fig. 7 is a diagram illustrating an application result of the control system for intelligently acquiring the WPH for dispatching in the wafer production line according to the present invention. As can be seen from FIG. 7, the number of over Q-time per day wafer manufacturing units (LOT) decreased and remained stable after the improvement. Specifically, the number of wafer fabrication unit products (LOTs) for ultra Q-time was reduced from 120/day to 56/day.
In summary, the control system for intelligently acquiring the WPH for dispatching in the wafer production line of the present invention utilizes the synchronization module to request the peak production capacity (PWPH) of the operation wafer per hour of the synchronization equipment according to the dispatching preprocessing program, automatically acquires the standard basic data, and utilizes the module for intelligently acquiring the peak production capacity (WPH) of the operation wafer per hour of the automatic dispatching to intelligently acquire the peak production capacity (PWPH) of the operation wafer per hour of the automatic dispatching equipment as the basic data, so as to intelligently acquire the production capacity (WPH) of the operation wafer per hour of the automatic dispatching, so as to guide the actual dispatching.
It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Thus, it is intended that the present invention cover the modifications and variations of this invention provided they come within the scope of the appended claims and their equivalents.

Claims (10)

1. The utility model provides a wafer production line intelligence acquires control system who dispatches WPH, a serial communication port, wafer production line intelligence acquires the control system who dispatches WPH, includes:
a synchronization module, which is used for automatically obtaining standard basic data from a Peak Wafer Per Hour (PWPH) of the production capacity of the operation Wafer of the synchronization equipment of the manufacturing execution system server to the manufacturing department server of the dispatching pretreatment program according to the requirement of the dispatching pretreatment program;
the system comprises a production capacity (WPH) module for intelligently acquiring production capacity of an hourly work wafer for automatic dispatching, a preprocessing module, a calculation module and an output module, wherein the production capacity (WPH) module intelligently acquires the production capacity of the hourly work wafer for automatic dispatching by taking the production capacity peak value (PWPH) of the hourly work wafer of the automatically acquired equipment as basic data, and further comprises the preprocessing module, the calculation module and the output module which are controlled by a control module;
and the application module is used for displaying the production capacity (WPH) of the operation wafers per hour for final edition automatic dispatching in a visual interface mode, applying the WPH to the intelligent dispatching Q-time model to calculate the downstream capacity, and judging whether the Q-time starting site puts the good or not according to the calculation result.
2. The system of claim 1, wherein the WPH is automatically assigned to the wafer production line, and the WPH is automatically assigned to the whole machine and the chamber.
3. The system of claim 2, wherein when a peak hourly production capacity (PWPH) of a work wafer for a synchronous tool is required, the cavity-containing tool provides the peak hourly production capacity (PWPH) of the work wafer for the cavity, and the cavity-free tool provides the peak hourly production capacity (PWPH) of the work wafer for the whole tool.
4. The system for controlling intelligent WPH dispatch in a wafer fabrication line as claimed in claim 1, wherein the synchronization module further comprises a first unit for real-time update and a second unit for time-of-arrival frequency update.
5. The system as claimed in claim 4, wherein the first unit trigger condition of the real-time update process includes at least one of equipment addition, capacity change, equipment improvement resulting in peak production capacity (PWPH) of Job wafers per hour being greater than or equal to 10%, and equipment damage resulting in peak production capacity (PWPH) of Job wafers per hour being less than or equal to 10%.
6. The WPH control system as set forth in claim 4, wherein the second unit triggering condition of the arrival time frequency updating process is a fixed time per month.
7. The method for controlling the WPH intelligent acquisition/dispatch control system in the wafer fabrication line as claimed in claim 1, wherein the method for controlling the WPH intelligent acquisition/dispatch control system comprises:
step S1 is executed: the synchronization module is used for automatically acquiring standard basic data from Peak Wafer Per Hour (PWPH) production capacity of a synchronization device of a manufacturing execution system server to a manufacturing part server where the dispatching pretreatment program is located according to the requirement of the dispatching pretreatment program;
step S2 is executed: the production capacity (WPH) module for intelligently acquiring the operation wafers per hour of automatic dispatching takes the automatically acquired production capacity peak value (PWPH) of the operation wafers per hour of equipment as basic data, and intelligently acquires the production capacity (WPH) of the operation wafers per hour of automatic dispatching;
step S3 is executed: the control module is used for controlling and outputting the production capacity (WPH) of the operation wafer per hour by the output module through the automatic final edition dispatching which is adjusted by the production line personnel and the automatic dispatching personnel according to the actual condition of the production line and the capacity control;
Step S4 is executed: the application module displays the production capacity (WPH) of the operation wafer per hour for final edition automatic dispatching in a visual interface mode, is applied to the Q-time model for intelligent dispatching, is used for calculating the downstream capacity, and judges whether the Q-time starting site puts the good or not according to the calculation result.
8. The method as claimed in claim 7, wherein the method for intelligently obtaining a WPH for dispatching in a wafer fabrication line further comprises:
step S21 is executed: screening effective Flow (Flow) by using a preprocessing module to screen effective comprehensive efficiency (OEE) of Equipment, and screening pass ratio M corresponding to production capacity related to Q-timeiAnd weighting the average pass ratio C;
step S22 is executed: according to the data of the step S21, the calculation module calculates to obtain the production capacity (WPH) of the work wafer per hour of the initial automatic dispatch, and the production line personnel and the automatic dispatch personnel adjust to obtain the production capacity (WPH) of the work wafer per hour of the final automatic dispatch according to the actual conditions of the production line and the capacity control.
9. The method as claimed in claim 8, wherein the pass ratio M is a value obtained by a control system of WPH for wafer manufacturing line iIs composed of
Figure FDA0003494566400000031
Then C is
Figure FDA0003494566400000032
10. The method as claimed in claim 9, wherein the WPH for automatically dispatching work wafers per hour is as follows: the WPH is an hourly peak production throughput (PWPH) x Ratio of work wafers.
CN202210108131.6A 2022-01-28 2022-01-28 Control system and method for intelligently acquiring and dispatching WPH (WPH) in wafer production line Pending CN114444948A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116777182A (en) * 2023-08-15 2023-09-19 北京珂阳科技有限公司 Task dispatch method for semiconductor wafer manufacturing
CN117291378A (en) * 2023-09-26 2023-12-26 江苏道达智能科技有限公司 RTD dispatch system and visual analysis system thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116777182A (en) * 2023-08-15 2023-09-19 北京珂阳科技有限公司 Task dispatch method for semiconductor wafer manufacturing
CN116777182B (en) * 2023-08-15 2023-11-03 北京珂阳科技有限公司 Task dispatch method for semiconductor wafer manufacturing
CN117291378A (en) * 2023-09-26 2023-12-26 江苏道达智能科技有限公司 RTD dispatch system and visual analysis system thereof
CN117291378B (en) * 2023-09-26 2024-04-09 江苏道达智能科技有限公司 RTD dispatch system and visual analysis system thereof

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