CN114427905A - Manufacturing method of optical fiber vibration sensor - Google Patents
Manufacturing method of optical fiber vibration sensor Download PDFInfo
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- CN114427905A CN114427905A CN202210036478.4A CN202210036478A CN114427905A CN 114427905 A CN114427905 A CN 114427905A CN 202210036478 A CN202210036478 A CN 202210036478A CN 114427905 A CN114427905 A CN 114427905A
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 84
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 32
- 239000000835 fiber Substances 0.000 claims abstract description 224
- 238000002360 preparation method Methods 0.000 claims abstract description 15
- 230000006698 induction Effects 0.000 claims abstract description 13
- 239000011521 glass Substances 0.000 claims abstract description 11
- 238000003466 welding Methods 0.000 claims abstract description 7
- 238000005253 cladding Methods 0.000 claims abstract description 5
- 238000005520 cutting process Methods 0.000 claims abstract description 5
- 230000004927 fusion Effects 0.000 claims description 20
- 238000000411 transmission spectrum Methods 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 12
- 229920000742 Cotton Polymers 0.000 claims description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 5
- 239000011247 coating layer Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 206010063385 Intellectualisation Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
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- 239000010410 layer Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/245—Removing protective coverings of light guides before coupling
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/255—Splicing of light guides, e.g. by fusion or bonding
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The invention relates to the technical field of sensors, and provides a manufacturing method of an optical fiber vibration sensor, which comprises the following steps: s1, straightening the single-mode optical fiber core on the preparation platform, wherein one end of the single-mode optical fiber core is fixed, and the other end of the single-mode optical fiber core is movable; s2, scanning the fiber core of the single-mode fiber by the laser device to form a long-period fiber grating; s3, smoothly cutting the written long-period fiber grating from the single-mode fiber core, and taking out the fiber Bragg grating with one end smoothly cut; s4, fusing the long-period fiber grating and the fiber Bragg grating; s5, fixing the end part of the fiber Bragg grating on a preparation platform, and welding a section of single-mode fiber core on the end part of the fiber Bragg grating to form a glass ball; and S6, wrapping the upper cladding on the outer side of the induction fiber core, and finishing the manufacture of the optical fiber vibration sensor. Compared with the prior art, the invention solves the technical problem that the existing optical fiber vibration sensor is not in line with the expectation in manufacturing, reduces the production cost and has short manufacturing time.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a manufacturing method of an optical fiber vibration sensor.
Background
The sensor is a detection device, can realize automated inspection and automatic control, and is widely applied to the fields of automation and intellectualization, and plays an increasingly important role in modern life and production. The vibration sensor is one of the sensor fields, is the most important component part in engineering vibration detection, vehicle vibration detection or other aspects of vibration tests, and has been produced at present, the vibration sensor made of fiber bragg gratings has the advantages of small volume, high sensitivity, strong anti-electromagnetic interference capability and the like, is easy to realize distributed sensing, is high-temperature resistant and corrosion resistant, and has very excellent sensing characteristics.
In the existing fiber bragg grating, a fiber sensor which is formed by cascading a Fiber Bragg Grating (FBG) and a long-period fiber bragg grating (LPG) appears, the advantages of the fiber bragg grating and the long-period fiber bragg grating are combined, and the fiber bragg grating has a good development prospect. However, the research of the optical fiber sensor is still not complete at present, and particularly in the manufacturing process of the optical fiber sensor, the manufacturing quality of the optical fiber sensor is difficult to ensure, so that the manufactured optical fiber sensor does not meet the expected performance, and the use effect of the sensor is greatly reduced.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide a manufacturing method of an optical fiber vibration sensor, which aims to solve the technical problem that the existing optical fiber vibration sensor is not manufactured according to expectations, ensure the production quality of the optical fiber vibration sensor and reduce the failure rate.
In order to solve the problems, the technical scheme adopted by the invention is as follows:
the manufacturing method of the optical fiber vibration sensor comprises the following steps: s1, straightening the single-mode optical fiber core on the preparation platform, and fixing one end of the single-mode optical fiber core and enabling the other end of the single-mode optical fiber core to be movable; s2, controlling a laser device to scan the fiber core of the single-mode fiber along the axial orthogonal direction, carrying out laser scanning once every time of deviation, wherein the deviation is a grating period every time, and forming a long-period fiber grating on the fiber core of the single-mode fiber; s3, smoothly cutting the written long-period fiber grating from the single-mode fiber core, and taking out the fiber Bragg grating with one end smoothly cut; s4, welding the flat end of the long-period fiber bragg grating and the flat end of the fiber bragg grating to form an induction fiber core; s5, fixing one end, close to the fiber Bragg grating, of the induction fiber core on the preparation platform, taking out a section of single-mode fiber core, and enabling the single-mode fiber core to be welded on the fiber Bragg grating end of the induction fiber core to form a glass ball welded with the fiber Bragg grating; and S6, wrapping the upper cladding on the outer side of the induction fiber core, and finishing the manufacture of the optical fiber vibration sensor.
Compared with the prior art, the manufacturing method of the optical fiber vibration sensor at least has the following beneficial effects: the straightening effect of the single-mode fiber core on the preparation platform is utilized, the broadband length of the transmission spectrum of the long-period fiber grating is ensured, the loss of the resonant wavelength is reduced, the writing period of the long-period fiber grating is controlled within a reasonable range, the property of the long-period fiber grating is ensured, meanwhile, the long-period fiber grating and the fiber Bragg grating are combined together in a fusion mode, and a glass ball is formed on the end part of the fiber Bragg grating in a fusion mode, so that the use characteristic of the fiber vibration sensor is ensured, the fiber vibration sensor is in a linear shape, the fiber vibration sensor has good vibration detection performance in a cantilever measurement state, the manufacturing is simple, the cost is low, the production quality of the fiber vibration sensor is improved, and the factory requirements are met; in addition, when the long-period fiber grating prepared under the high-energy laser is in a free state or a cantilever beam state, the grating observed by a microscope is straight, so that the transmission spectrum of the long-period fiber grating at the resonance wavelength in the cantilever beam state has higher transmittance, the intensity of the reflection spectrum obtained by the fiber vibration sensor is greatly changed, and the measurement range is wider.
Optionally, in steps S1 and S5, a wire stripper is used to remove the coating layer of the single-mode fiber to obtain the core of the single-mode fiber.
Optionally, in step S1, one end of the single-mode fiber core is fixedly clamped on a first fiber clamp of the preparation platform, and the other end of the single-mode fiber core is straightened and placed on a fiber guide groove of a second fiber clamp, where the first fiber clamp and the second fiber clamp are coaxially arranged at the same height.
Optionally, a fixed pulley is arranged on the second optical fiber clamp in the direction away from the first optical fiber clamp in the axial extension direction, and the single-mode optical fiber core is located at one end of the second optical fiber clamp and is stretched by a weight on the fixed pulley.
Optionally, alcohol cotton is padded in the fiber guide rail groove of the second fiber clamp.
Optionally, in step S2, a transmission spectrum of the manufactured long-period fiber grating is recorded by a spectrometer, wherein the transmission spectrum light source is provided by a broadband light source.
Optionally, in step S2, the writing period of the long-period fiber grating is set to 570um, the resonant wavelength is controlled to 1570 ± 2nm, and the depth of the transmission spectrum is ≧ 15 dB.
Optionally, in step S4, the long-period fiber grating and the fiber bragg grating are placed in close proximity in the optical fiber fusion splicer, and the flat surfaces of the two are opposite to each other, so that the optical fiber fusion splicer can fuse the long-period fiber grating and the fiber bragg grating firmly.
Optionally, the long-period fiber grating and the fiber bragg grating are placed at an interval of 10mm in the fusion splicer.
Optionally, in step S5, the length of the core of the single-mode optical fiber is taken to be 3 cm.
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without inventive exercise.
FIG. 1 is a schematic diagram of a system for manufacturing a fiber optic vibration sensor used in the present invention;
fig. 2 is a schematic structural diagram of an optical fiber vibration sensor prepared according to the present invention.
The reference numbers illustrate:
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects to be solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
The method for manufacturing the optical fiber vibration sensor according to the embodiment of the present invention will now be described with reference to the accompanying drawings.
Referring to fig. 1, the devices required to be used for manufacturing the optical fiber vibration sensor include a preparation platform, a computer, a laser device, a first optical fiber clamp, a second optical fiber clamp, a fixed pulley, a weight, an optical fiber cutter, a spectrometer and an optical fiber fusion splicer, wherein the selected manufacturing materials are a single-mode optical fiber core and an optical fiber bragg grating.
A manufacturing method of an optical fiber vibration sensor comprises the following specific steps:
s1, straightening the single-mode fiber core and placing the single-mode fiber core on a preparation platform, so that one end of the single-mode fiber core is fixed, and the other end of the single-mode fiber core can move, and the single-mode fiber core is ensured not to bend after laser is used for writing long-period fiber gratings;
s2, controlling a laser device through a computer, enabling laser on the laser device to scan towards the fiber core of the single-mode fiber along the axial orthogonal direction of the fiber core of the single-mode fiber, after each scanning is finished, axially shifting along the axial direction of the fiber core of the single-mode fiber, carrying out one laser scanning for each shifting, wherein the shift is one grating period every time, and forming a long-period fiber grating on the fiber core of the single-mode fiber;
s3, smoothly cutting off the written long-period fiber bragg grating from the fiber core of the single-mode fiber, reserving part of the fiber core of the single-mode fiber which is not written by laser, making the cut at the outer end of the fiber core of the single-mode fiber smooth, and processing the fiber bragg grating to make the welding interface of the fiber bragg grating smooth;
s4, welding the flat end of the long-period fiber grating and the flat end of the fiber Bragg grating together to form a linear induction fiber core, wherein a light source input from the end of the long-period fiber grating can directly enter the fiber Bragg grating after passing through the long-period fiber grating, so that a smooth welding process is realized, and the joint quality of the long-period fiber grating and the fiber Bragg grating is ensured;
s5, fixing one end of the induction fiber core close to the fiber Bragg grating on a preparation platform, taking out a section of single-mode fiber core, and welding the single-mode fiber core on the fiber Bragg grating end of the induction fiber core to form a glass ball outside the fiber Bragg grating;
and S6, wrapping the upper cladding on the outer side of the induction fiber core to enable the whole optical fiber vibration sensor to be in a linear shape, and finishing the manufacturing of the optical fiber vibration sensor.
The cladding layer is made of a hard material with a certain deformation capacity, so that the sensing fiber core observed by a microscope in a free state or a cantilever beam state of the manufactured optical fiber vibration sensor is straight, and can generate vibration microbending deformation after receiving a vibration signal.
Compared with the prior art, the method has the advantages that the straightening effect of the single-mode fiber core on the preparation platform is utilized, the broadband length of the transmission spectrum of the long-period fiber grating is ensured, the loss of the resonant wavelength is reduced, the writing period of the long-period fiber grating is controlled within a reasonable range, the property of the long-period fiber grating is ensured, meanwhile, the long-period fiber grating and the fiber Bragg grating are combined together in a fusion mode, and a glass ball is formed on the end part of the fiber Bragg grating in a fusion mode, so that the use characteristic of the fiber vibration sensor is ensured, the fiber vibration sensor is made to be in a straight line shape, the fiber vibration sensor has good vibration detection performance in a cantilever measurement state, the manufacture is simple, the cost is low, the production quality of the fiber vibration sensor is improved, and the factory requirements are met.
In an embodiment of the present invention, in steps S1 and S5, a wire stripper is used to remove the coating layer of the single-mode fiber to obtain the single-mode fiber core, which provides a material for preparing the long-period fiber grating and the glass sphere.
In another embodiment of the present invention, the first fiber clamp and the second fiber clamp are coaxially and symmetrically disposed on the preparation platform at the same height, one end of the single mode fiber core is fixedly clamped on the first fiber clamp of the preparation platform, and the other end of the single mode fiber core is straightened and placed on the fiber guide groove of the second fiber clamp, so that one end of the single mode fiber core is fixed and the other end of the single mode fiber core is movable, so as to axially elongate the single mode fiber core by an external force and keep a linear state. It should be noted that, the first optical fiber clamp and the second optical fiber clamp both adopt adjustable fixed optical fiber clamps, and the fixing degree of the single-mode optical fiber core can be controlled, so that the technical effect that one end of the single-mode optical fiber core is fixed and the other end of the single-mode optical fiber core is movable is achieved.
Further, the second optical fiber clamp is equipped with the fixed pulley on keeping away from the axial extending direction of first optical fiber clamp, the winding mouth of fixed pulley is on the axial extending direction of second optical fiber clamp, and around there being the stay cord on the fixed pulley, the one end of stay cord is tied up tightly on the tip that single mode fiber core is close to the second optical fiber clamp, the other end then is tied up tightly there is the weight, the stay cord is after walking around the fixed pulley, the weight provides the axial pretightning force of stay cord to single mode fiber core, make single mode fiber core keep linear state.
And alcohol cotton is filled in the optical fiber guide rail groove of the second optical fiber clamp, so that the alcohol cotton can prevent the single-mode optical fiber core from being polluted and ensure that the single-mode optical fiber core can move at one end of the second optical fiber clamp.
In another embodiment of the invention, the spectrometer records the transmission spectrum of the manufactured long-period fiber grating, observes the writing result of the fiber core of the single-mode fiber, and checks whether the written long-period fiber grating meets the manufacturing requirements of the fiber vibration sensor. The transmission spectrum light source is provided by a broadband light source, and light provided by the broadband light source enters the spectrometer after passing through the long-period fiber grating after the writing is finished so as to be recorded by the spectrometer.
Specifically, the writing cycle of the long-period fiber grating used in this embodiment is set to 570um, the resonant wavelength is controlled to 1570 ± 2nm, and the depth of the transmission spectrum is not less than 15dB, so that the long-period fiber grating has good performance, and it is ensured that the transmission spectrum at the resonant wavelength of the LPG transmission spectrum damage in the cantilever state has a large transmittance, and further, it is ensured that the reflection spectrum obtained after the fiber bragg grating is bonded has a large intensity change, so that the fiber vibration sensor has a wide measurement range.
In another embodiment of the present invention, in step S4, the long-period fiber grating and the fiber bragg grating are placed close to each other in the optical fiber fusion splicer, and the cut flat surfaces of the long-period fiber grating and the fiber bragg grating are arranged opposite to each other, and then the optical fiber fusion splicer is started to fuse the long-period fiber grating and the fiber bragg grating firmly and stably into the linear sensing fiber core. Through adopting the optical fiber splicer structure, guaranteed the butt fusion quality of long period fiber grating and optic fibre bragg grating, and the mode of placing that is close to each other before the butt fusion between the two makes two grating butt fusion firm and level.
In the embodiment, the placement interval of the long-period fiber bragg grating and the fiber bragg grating in the optical fiber fusion splicer is 10mm, so that fusion damage is smaller than 0.01dB while the two gratings are ensured to be firmly fused.
In another embodiment of the present invention, in step S5, the length of the single mode fiber core is taken to be 3cm to form a glass sphere with a suitable size on the fiber bragg grating. Make this single mode fiber fine in-process, can get 5 cm's single mode fiber, utilize handheld wire stripper to remove its coating, cut 3cm down through the optical fiber cutting knife, guarantee the roughness of single mode fiber core, wipe optical fiber with the cotton that dips in alcohol gently, then fix on optical fiber splicer's right-hand member optic fibre fixation clamp, choose optical fiber splicer's manual mode for use, set up the discharge current size, discharge time, the distance of both ends butt fusion optic fibre, make optical fiber splicer form the glass ball on optical fiber bragg grating tip after the butt fusion is accomplished.
In another embodiment of the present invention, the method further includes step S6, placing the manufactured optical fiber vibration sensor on a vibration platform in a cantilever manner for testing, detecting a detection signal generated by the optical fiber vibration sensor after receiving the signal by a spectrometer or a photodetector, and displaying the detection signal by an oscilloscope to check whether the optical fiber vibration sensor is qualified.
Referring to fig. 2, the long-period fiber grating 200 of the fiber vibration sensor may be manufactured by processing a carbon dioxide laser, an ultraviolet laser, or the like, and the fiber bragg grating 100 may be manufactured by processing an ultraviolet laser, a femtosecond laser, or the like. In the optical fiber vibration sensor, the resonance wavelength of the fiber bragg grating 100 is near the wavelength corresponding to the 3dB bandwidth of the long-period fiber bragg grating 200, and the sensitivity and the measurement range of the optical fiber vibration sensor are controlled by the length of the single-mode fiber 300 between the long-period fiber bragg grating 200 and the fiber bragg grating 100 and the mass of the glass ball 400 welded to the end of the fiber bragg grating 100.
The above embodiments are only preferred embodiments of the present invention, and the protection scope of the present invention is not limited thereby, and any insubstantial changes and substitutions made by those skilled in the art based on the present invention are within the protection scope of the present invention.
Claims (10)
1. The manufacturing method of the optical fiber vibration sensor is characterized by comprising the following steps of:
s1, straightening the single-mode optical fiber core on the preparation platform, and fixing one end of the single-mode optical fiber core and enabling the other end of the single-mode optical fiber core to move;
s2, controlling a laser device to scan the fiber core of the single-mode fiber along the axial orthogonal direction, carrying out laser scanning once every time of deviation, wherein the deviation is one grating period every time, and forming a long-period fiber grating on the fiber core of the single-mode fiber;
s3, smoothly cutting the written long-period fiber grating from the single-mode fiber core, and taking out the fiber Bragg grating with one end smoothly cut;
s4, welding the flat end of the long-period fiber bragg grating and the flat end of the fiber bragg grating to form an induction fiber core;
s5, fixing one end, close to the fiber Bragg grating, of the induction fiber core on the preparation platform, taking out a section of single-mode fiber core, and enabling the single-mode fiber core to be welded on the fiber Bragg grating end of the induction fiber core to form a glass ball welded with the fiber Bragg grating;
and S6, wrapping the upper cladding on the outer side of the induction fiber core, and finishing the manufacturing of the optical fiber vibration sensor.
2. The method of claim 1, wherein in steps S1 and S5, a wire stripper is used to remove the coating layer of the single mode fiber to obtain the core of the single mode fiber.
3. The method of claim 1, wherein in step S1, one end of the single-mode fiber core is fixedly clamped on a first fiber clamp of the preparation platform, and the other end of the single-mode fiber core is straightened and placed on a fiber guide groove of a second fiber clamp, wherein the first fiber clamp and the second fiber clamp are coaxially arranged at the same height.
4. The method according to claim 3, wherein a fixed pulley is disposed on an axial extension direction of the second fiber clamp away from the first fiber clamp, and an end of the single-mode fiber core located on the second fiber clamp is stretched by a weight on the fixed pulley.
5. The method of claim 3, wherein the second fiber clamp has alcohol cotton padded in the fiber guide groove.
6. The method of claim 1, wherein in step S2, the transmission spectrum of the manufactured long-period fiber grating is recorded by a spectrometer, and the transmission spectrum light source is provided by a broadband light source.
7. The method of claim 6, wherein in step S2, the writing period of the long-period fiber grating is set to 570um, the resonant wavelength is controlled to 1570 ± 2nm, and the depth of the transmission spectrum is ≧ 15 dB.
8. The method for manufacturing an optical fiber vibration sensor according to claim 1, wherein in step S4, the long-period fiber grating and the fiber bragg grating are placed in close proximity in an optical fiber fusion splicer, and flat surfaces of the long-period fiber grating and the fiber bragg grating are disposed opposite to each other, so that the optical fiber fusion splicer can firmly splice the long-period fiber grating and the fiber bragg grating.
9. The method of manufacturing an optical fiber vibration sensor according to claim 8, wherein the long-period fiber grating and the fiber bragg grating are placed at an interval of 10mm in the optical fiber fusion splicer.
10. The method of manufacturing an optical fiber vibration sensor according to any of claims 1 to 9, wherein in step S5, the length of the core of the single mode optical fiber is 3 cm.
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Cited By (1)
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CN114952023A (en) * | 2022-06-24 | 2022-08-30 | 长沙麓邦光电科技有限公司 | Clamp for preparing grating ruler and joint control method thereof |
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CN1232547A (en) * | 1996-10-23 | 1999-10-20 | 美国3M公司 | Apparatus and process for manufacture of optical fiber Bragg gratings |
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CN114952023A (en) * | 2022-06-24 | 2022-08-30 | 长沙麓邦光电科技有限公司 | Clamp for preparing grating ruler and joint control method thereof |
CN114952023B (en) * | 2022-06-24 | 2024-01-30 | 长沙麓邦光电科技有限公司 | Clamp for preparing grating ruler and joint control method thereof |
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