CN114406959A - Clamp for particle impact noise test of semiconductor integrated circuit - Google Patents
Clamp for particle impact noise test of semiconductor integrated circuit Download PDFInfo
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- CN114406959A CN114406959A CN202111150125.9A CN202111150125A CN114406959A CN 114406959 A CN114406959 A CN 114406959A CN 202111150125 A CN202111150125 A CN 202111150125A CN 114406959 A CN114406959 A CN 114406959A
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- 238000012360 testing method Methods 0.000 title claims abstract description 70
- 239000004065 semiconductor Substances 0.000 title claims abstract description 19
- 239000002245 particle Substances 0.000 title claims abstract description 18
- 230000007246 mechanism Effects 0.000 claims abstract description 16
- 238000012856 packing Methods 0.000 claims abstract description 15
- 230000008878 coupling Effects 0.000 claims abstract description 3
- 238000010168 coupling process Methods 0.000 claims abstract description 3
- 238000005859 coupling reaction Methods 0.000 claims abstract description 3
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- 235000017491 Bambusa tulda Nutrition 0.000 claims description 21
- 241001330002 Bambuseae Species 0.000 claims description 21
- 235000015334 Phyllostachys viridis Nutrition 0.000 claims description 21
- 239000011425 bamboo Substances 0.000 claims description 21
- 230000000087 stabilizing effect Effects 0.000 claims description 11
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- 238000000034 method Methods 0.000 abstract description 9
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- 238000003780 insertion Methods 0.000 description 8
- 230000037431 insertion Effects 0.000 description 8
- 230000008569 process Effects 0.000 description 6
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- 230000000149 penetrating effect Effects 0.000 description 3
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/08—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for attachment of work holders
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
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Abstract
The invention relates to the technical field of integrated circuit particles, and discloses a clamp for a semiconductor integrated circuit particle collision noise test, which comprises a base, wherein an operation table is arranged above the base, a test sample piece conveying device and a packing box are arranged above the operation table, a support column is connected to one side of the operation table, support legs connected with the base are arranged at the bottom ends of the operation table and the support column, an accommodating groove is formed in the support column, and a moving rod positioned above the operation table is arranged at the top end of one side of the support column; through the design that the coupling mechanism was adsorbed in the cooperation, the realization is to the absorption of test sample piece, and then has improved the centre gripping stability of test sample piece, can avoid test sample piece to drop and shorten test sample piece life at the packing in-process, and then realizes the protection to test sample piece, has improved the packing efficiency of test sample piece simultaneously to the labour has been reduced and has been dropped into.
Description
Technical Field
The invention belongs to the technical field of semiconductor integrated circuits, and particularly relates to a clamp for a particle impact noise test of a semiconductor integrated circuit.
Background
An integrated circuit is a microelectronic device or component. The transistor, the resistor, the capacitor, the inductor and other elements and wires required in a circuit are interconnected together by adopting a certain process, are manufactured on a small or a plurality of small semiconductor wafers or medium substrates, and are then packaged in a tube shell to form a micro structure with the required circuit function; all the elements are structurally integrated, so that the electronic elements are greatly miniaturized, low in power consumption, intelligent and high in reliability.
In the semiconductor integrated circuit particle collision noise test, the clamp is easy to influence the experiment effect due to unstable taking in the process of taking again, and after the experiment, the clamp is inconvenient to pack and transmit, so that the experiment efficiency is reduced.
Disclosure of Invention
In view of the above, to overcome the defects in the prior art, the present invention provides a clamp for particle impact noise test of semiconductor integrated circuit, so as to solve the above technical problems.
In order to achieve the purpose, the invention provides the following technical scheme: the clamp for the semiconductor integrated circuit particle collision noise test comprises a base, wherein an operating table is arranged above the base, a test sample piece conveying device and a packing box are arranged above the operating table, a supporting column is connected to one side of the operating table, supporting legs connected with the base are arranged at the bottom ends of the operating table and the supporting column, a containing tank is arranged inside the supporting column, a moving rod located above the operating table is arranged at the top end of one side of the supporting column, clamping rods are symmetrically arranged at the bottom end of the moving rod and connected with each other through a distance adjusting group, an adsorption connecting mechanism located between the two clamping rods is arranged at the bottom end of the moving rod, and a height adjusting mechanism connected with the moving rod is arranged inside the containing tank;
height adjusting mechanism includes the backup pad, the fixed leg, T shape screw thread, an internal thread section of thick bamboo one, a supporting seat, the sliding sleeve, the slide bar, electric telescopic handle two, driver and drive unit, the interior bottom in the holding tank is installed to the backup pad, the bottom of backup pad is equipped with the fixed leg, the top of backup pad is rotated and is connected with T shape screw thread, T shape threaded outside threaded connection has an internal thread section of thick bamboo one, the top of backup pad is equipped with the slide bar, one side of an internal thread section of thick bamboo one is equipped with the sliding sleeve with slide bar sliding connection, the cover is equipped with gear one on the T shape screw thread, the top of an internal thread section of thick bamboo one is equipped with the supporting seat, the top of supporting seat is equipped with electric telescopic handle two, electric telescopic handle two's output is connected with one side top of carriage release lever, the top of backup pad is equipped with gear one and the driver of group link apart from adjusting, be equipped with drive unit in the backup pad.
Preferably, one side of the supporting column, which is close to the operating platform, is provided with a slot, and the output end of the electric telescopic rod II penetrates through the inside of the slot.
Preferably, the driver includes motor one, dwang, gear two, loop bar and bevel gear one, and the top of backup pad is equipped with motor one, and the output shaft of motor one has the dwang, and the outside joint cover of dwang has the loop bar, and the top of loop bar is equipped with bevel gear one, is equipped with the gear two of being connected with the meshing of gear one on the dwang.
Preferably, the bottom of the motor I is provided with a movable block, the top end of the supporting plate is provided with a movable groove in sliding connection with the movable block, and one side of the movable block is provided with a spring I connected with the side wall of the movable groove.
Preferably, the distance adjusting set comprises a support shaft, a second conical gear, a two-way screw rod, an inner thread block and a movable groove, the support shaft is rotatably connected to one side of the support seat, the second conical gear meshed with the first conical gear is arranged outside the support shaft, the two-way screw rod mounted inside the movable rod is sleeved at one end of the support shaft, the inner thread block is symmetrically in threaded connection with the two-way screw rod, the inner thread block is mounted at the top end of the clamping rod, and the movable groove in sliding connection with the clamping rod is symmetrically formed in the bottom end of the movable rod.
Preferably, the top end of the internal thread block is symmetrically provided with a clamping rod, and the inner wall of the movable rod is provided with a clamping groove in sliding connection with the clamping rod.
Preferably, the transmission unit is including leading to the groove, the altitude mixture control pole, the ejector pad, the mount pad, the swinging arms, the apparatus further comprises a rotating shaft, the push rod, the thread piece, internal thread section of thick bamboo two and retaining member, logical groove has been seted up in the backup pad, the inside interlude that leads to the groove has the altitude mixture control pole, the top of altitude mixture control pole is equipped with the ejector pad that is located between motor one and the T shape screw thread, the bottom of altitude mixture control pole is equipped with the mount pad, the slot has been seted up to the bottom of mount pad, the interior bottom end of holding tank is equipped with the cassette of interlude in the inside of slot, one side of mount pad is rotated and is connected with the swinging arms, the intermediate position of swinging arms is through pivot and holding tank wall connection, the one end of swinging arms is rotated and is connected with the push rod, the bottom of push rod is equipped with the thread piece, the outside threaded connection of thread piece has internal thread section of thick bamboo two that is located the support column below, be equipped with the retaining member on the internal thread section of thick bamboo two.
Preferably, the retaining member includes solid fixed ring, joint groove, stabilizer ring, peg graft pole and spring three, and the outside of an internal thread section of thick bamboo two is equipped with solid fixed ring, and the joint groove has been seted up to solid fixed ring equidistance, and the below of support column is equipped with the cover and locates the outside stabilizer ring of solid fixed ring, and the both sides activity interlude of stabilizer ring has the peg graft pole with joint groove joint, and the cover is equipped with on the peg graft pole to be located the inside spring three of stabilizer ring.
Preferably, adsorb coupling mechanism includes electric telescopic handle one, a fixed section of thick bamboo, the sucking disc, a telescopic section of thick bamboo, the baffle, electric putter, piston rod and air vent, electric telescopic handle one is installed in the bottom intermediate position of carriage release lever, the below of electric telescopic handle one is equipped with a fixed section of thick bamboo, the inside intermediate position of a fixed section of thick bamboo is equipped with the baffle, the output shaft of electric telescopic handle one runs through a fixed section of thick bamboo and baffle and is connected with the sucking disc, the air vent has been seted up to the bottom equidistance of sucking disc, the inside top of a telescopic section of thick bamboo is equipped with electric putter, electric putter's output shaft has the piston rod.
Preferably, pull rods connected with the clamping rods are symmetrically inserted into two sides of the fixed cylinder in a penetrating mode, and a second spring located inside the fixed cylinder is sleeved on each pull rod.
Compared with the prior art, the invention has the beneficial effects that:
(1) in the work, the clamping rod is convenient to control the height of the clamping rod and simultaneously realize the distance adjustment of the clamping rod through the arrangement of the base, the operating platform, the supporting columns, the supporting legs, the moving rod, the clamping rods, the height adjusting mechanism and the distance adjusting group, so that test samples of different sizes can be clamped conveniently, and the adsorption of the test samples is realized by matching with the design of the adsorption connecting mechanism, thereby improving the clamping stability of the test samples, avoiding the test samples from falling off in the test and shortening the service life of the test samples, and further realizing the protection of the test samples;
(2) through the design of the through groove, the height adjusting rod, the push block, the mounting seat, the swinging rod, the rotating shaft, the push rod, the thread block, the internal thread cylinder II and the locking part, the possibility is effectively provided for the distance adjustment of the clamping rods and the height adjustment of the clamping rods;
(3) through the design of the electric telescopic rod I, the fixed cylinder, the sucker, the telescopic cylinder, the partition plate, the electric push rod, the piston rod and the vent hole, the vacuum adsorption of the test sample piece is realized, the clamping stability of the test sample piece is further improved, and the temperature property is improved for clamping the test sample piece;
(4) through the design of the supporting shaft, the conical gear II, the bidirectional screw rod, the inner thread block and the movable groove, the distance between the two clamping rods is convenient to adjust according to the size of the test sample piece, so that the test sample piece is clamped, and the application range of the device is improved;
(5) the design of the first motor, the rotating rod, the second gear, the sleeve rod and the first bevel gear effectively provides power for height adjustment of the clamping rods and distance adjustment of the clamping rods, and therefore convenience is brought to packing of test sample pieces.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention.
In the drawings:
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of the internal structure of FIG. 1 according to the present invention;
FIG. 3 is a schematic cross-sectional view of FIG. 2 in accordance with the present invention;
FIG. 4 is a schematic diagram of a portion of the structure of FIG. 3 in accordance with the present invention;
FIG. 5 is an enlarged view of the structure at A in FIG. 3 according to the present invention;
FIG. 6 is a schematic structural view of the transmission unit of the present invention;
FIG. 7 is an enlarged view of the structure at B in FIG. 6 according to the present invention
In the figure: 1. a base; 2. an operation table; 3. a support pillar; 4. supporting legs; 5. accommodating grooves; 6. a travel bar; 7. a clamping rod; 8. a first electric telescopic rod; 9. a fixed cylinder; 10. a suction cup; 11. a support plate; 12. t-shaped threads; 13. a first internal thread cylinder; 14. a supporting seat; 15. a sliding sleeve; 16. a slide bar; 17. a first gear; 18. a first motor; 19. rotating the rod; 20. a second gear; 21. a loop bar; 22. grooving; 23. a first conical gear; 24. a support shaft; 25. a second bevel gear; 26. a second electric telescopic rod; 27. a bidirectional screw rod; 28. an internal thread block; 29. a clamping rod; 30. a card slot; 31. a movable groove; 32. a movable block; 33. a first spring; 34. a through groove; 35. a movable groove; 36. a telescopic cylinder; 37. a partition plate; 38. an electric push rod; 39. a piston rod; 40. a pull rod; 41. a second spring; 42. a vent hole; 43. a height adjustment lever; 44. a push block; 45. a mounting seat; 46. a swing lever; 47. a rotating shaft; 48. a push rod; 49. a thread block; 50. a second internal thread cylinder; 51. a card holder; 52. a slot; 53. a fixing ring; 54. a clamping groove; 55. a stabilizing ring; 56. a plug rod; 57. and a third spring.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments; all other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
First embodiment, as shown in fig. 1 to 7, the present invention comprises a base 1, a console 2 is disposed above the base 1, a test sample piece conveying device and a packing box are disposed above the console 2, it should be noted that the test sample piece conveying device is a traditional belt conveying device, the test sample piece conveying device is the prior art, details are not described here, one side of the operating platform 2 is connected with the supporting column 3, the bottom ends of the operating platform 2 and the supporting column 3 are both provided with the supporting leg 4 connected with the base 1, the inside of the supporting column 3 is provided with the accommodating tank 5, the top end of one side of the supporting column 3 is provided with the moving rod 6 positioned above the operating platform 2, the bottom end of the moving rod 6 is symmetrically provided with the clamping rods 7, the two clamping rods 7 are connected through the distance adjusting group, the bottom end of the moving rod 6 is provided with the adsorption connecting mechanism positioned between the two clamping rods 7, and the inside of the accommodating tank 5 is provided with the height adjusting mechanism connected with the moving rod 6;
the height adjusting mechanism comprises a supporting plate 11, a fixing leg, a T-shaped thread 12, a first internal thread cylinder 13, a supporting seat 14, a sliding sleeve 15, a sliding rod 16, a second electric telescopic rod 26, a driver and a transmission unit, wherein the supporting plate 11 is installed at the inner bottom of the accommodating groove 5, the bottom end of the supporting plate 11 is provided with the fixing leg, the top end of the supporting plate 11 is rotatably connected with the T-shaped thread 12, the external thread of the T-shaped thread 12 is connected with the first internal thread cylinder 13, the top end of the supporting plate 11 is provided with the sliding rod 16, one side of the first internal thread cylinder 13 is provided with the sliding sleeve 15 in sliding connection with the sliding rod 16, the T-shaped thread 12 is sleeved with a first gear 17, the top end of the first internal thread cylinder 13 is provided with the supporting seat 14, the top end of the supporting seat 14 is provided with the second electric telescopic rod 26, the output end of the second electric telescopic rod 26 is connected with the top end of one side of the moving rod 6, the top end of the supporting plate 11 is provided with the driver connected with the first gear 17 and a distance adjusting group, a transmission unit is arranged on the supporting plate 11, a slot 22 is formed in one side, close to the operating platform 2, of the supporting column 3, and the output end of the electric telescopic rod II 26 penetrates through the slot 22;
through the transmission unit and the driver, the first gear 17 rotates, the first gear 17 drives the T-shaped thread 12 to rotate, the first internal thread cylinder 13 can be adjusted in height outside the T-shaped thread 12 through the threaded connection relation between the T-shaped thread 12 and the first internal thread cylinder 13 and the sliding relation between the sliding sleeve 15 and the sliding rod 16, the first internal thread cylinder 13 drives the second electric telescopic rod 26 to move upwards through the supporting seat 14, the second electric telescopic rod 26 drives the moving rod 6 to adjust in height, the moving rod 6 drives the clamping rod 7 and the adsorption connection mechanism to adjust in height, the clamping rod 7 moves downwards to the test sample piece conveying device, and the design of the distance adjusting group is matched to facilitate clamping the test sample piece, the second electric telescopic rod 26 is started, the second electric telescopic rod 26 drives the moving rod 6 to move horizontally, and the moving rod 6 drives the test sample piece to move horizontally through the clamping rod 7, and then move the test sample to the packing case on, and then be convenient for make the packing of test sample in the packing case, and then accomplish the automatic transportation packing process of test sample.
Embodiment two, on the basis of embodiment one, as shown in fig. 2, 3 and 4, the driver includes a first motor 18, a rotating rod 19, a second gear 20, a sleeve rod 21 and a first bevel gear 23, the top end of the supporting plate 11 is provided with the first motor 18, an output shaft of the first motor 18 is connected with the rotating rod 19, the outer portion of the rotating rod 19 is snap-fitted with the sleeve rod 21, the top end of the sleeve rod 21 is provided with the first bevel gear 23, the rotating rod 19 is provided with the second gear 20 engaged with the first gear 17, it is to be noted here that the sleeve rod 21 is elastically connected to the turning rod 19 by means of a spring, here a compression spring, the initial state of the spring is an extension state, a movable block 32 is arranged at the bottom end of the motor I18, a movable groove 31 connected with the movable block 32 in a sliding mode is formed in the top end of the supporting plate 11, and a spring I33 connected with the side wall of the movable groove 31 is arranged on one side of the movable block 32;
through a starter motor 18, it is rotatory to make a motor 18 drive dwang 19, dwang 19 drives two 20 rotations of gear, dwang 19 can drive the loop bar 21 rotatory simultaneously, loop bar 21 drives a conical gear 23 rotation, when needs carriage release lever 6 carries out altitude mixture control, then make two 20 and a 17 meshing of gear through the drive unit, and then make things convenient for carriage release lever 6 to drive supporting rod 7 and carry out the lift process, when needs adjust the interval of two supporting rods 7, then make a conical gear 23 and two 25 meshing of conical gear, and then conveniently control the interval of two supporting rods 7, and then conveniently make supporting rod 7 carry out centre gripping work to experimental sample spare, stability has been improved for the conveying of experimental sample spare.
In a third embodiment, based on the first embodiment, as shown in fig. 2, 3 and 4, the distance adjusting group includes a supporting shaft 24, a second bevel gear 25, a bidirectional screw rod 27, an internal thread block 28 and a movable groove 35, one side of the supporting base 14 is rotatably connected with the supporting shaft 24, the second bevel gear 25 meshed with the first bevel gear 23 is arranged outside the supporting shaft 24, one end of the supporting shaft 24 is sleeved with the bidirectional screw rod 27 installed inside the moving rod 6, the bidirectional screw rod 27 is symmetrically and threadedly connected with the internal thread block 28, the internal thread block 28 is installed at the top end of the clamping rod 7, the movable groove 35 slidably connected with the clamping rod 7 is symmetrically arranged at the bottom end of the moving rod 6, the clamping rod 29 is symmetrically arranged at the top end of the internal thread block 28, and the clamping groove 30 slidably connected with the clamping rod 29 is arranged on the inner wall of the moving rod 6;
when the first conical gear 23 is meshed with the second conical gear 25, the first motor 18 drives the rotating rod 19 to rotate, the rotating rod 19 drives the sleeve rod 21 to rotate, the sleeve rod 21 drives the first conical gear 23 to rotate, the first conical gear 23 drives the second conical gear 25 to rotate, the second bevel gear 25 drives the support shaft 24 to rotate, the rotation of the bidirectional screw rod 27 is realized through the rotary connection relationship between the support shaft 24 and the bidirectional screw rod 27, through the threaded connection relationship between the bidirectional screw rod 27 and the internal thread block 28 and the sliding relationship between the matching clamping rod 29 and the clamping groove 30, the two internal thread blocks 28 can be close to or far away from each other, and the internal thread blocks 28 drive the clamping rods 7 to slide on the movable groove 35, so that the distance between the clamping rods 7 can be conveniently adjusted, and then make things convenient for supporting rod 7 to test sample spare centre gripping work, the effectual packing conveying that is test sample spare has improved stability.
Fourth embodiment, based on the first embodiment, as shown in fig. 1, 2, 3, 6 and 7, the transmission unit includes a through slot 34, a height adjustment rod 43, a pushing block 44, a mounting seat 45, a swing rod 46, a rotating shaft 47, a push rod 48, a thread block 49, a second internal thread cylinder 50 and a locking member, the supporting plate 11 is provided with the through slot 34, the height adjustment rod 43 is inserted into the through slot 34, the top end of the height adjustment rod 43 is provided with the pushing block 44 located between the motor one 18 and the T-shaped thread 12, the bottom end of the height adjustment rod 43 is provided with the mounting seat 45, the bottom end of the mounting seat 45 is provided with a slot 52, the inner bottom end of the receiving groove 5 is provided with a clamping seat 51 inserted into the slot 52, one side of the mounting seat 45 is rotatably connected with the swing rod 46, the middle position of the swing rod 46 is connected with the inner wall of the receiving groove 5 through the rotating shaft 47, one end of the swing rod 46 is rotatably connected with the push rod 48, the bottom end of the push rod 48 is provided with the thread block 49, the external thread of the thread block 49 is connected with a second internal thread cylinder 50 positioned below the support column 3, a locking piece is arranged on the second internal thread cylinder 50 and comprises a fixing ring 53, a clamping groove 54, a stabilizing ring 55, an inserting rod 56 and a third spring 57, the fixing ring 53 is arranged outside the second internal thread cylinder 50, the clamping groove 54 is formed in the fixing ring 53 at equal distance, the stabilizing ring 55 sleeved outside the fixing ring 53 is arranged below the support column 3, the inserting rod 56 clamped with the clamping groove 54 is movably inserted in two sides of the stabilizing ring 55 in a penetrating mode, and the third spring 57 positioned inside the stabilizing ring 55 is sleeved on the inserting rod 56;
firstly, the inserting rod 56 is pulled out to disconnect the inserting rod 56 from the clamping groove 54, so that the spring three 57 is compressed, then the internal thread cylinder two 50 is rotated, the push rod 48 can be lifted through the threaded connection relationship between the internal thread cylinder two 50 and the thread block 49 and the connection relationship between the rotating shaft 47 and the swinging rod 46, the push rod 48 drives the swinging rod 46 to rotate around the rotating shaft 47, so that the swinging rod 46 drives the mounting seat 45 to adjust the height on the clamping seat 51, so that the mounting seat 45 drives the height adjusting rod 43 to adjust the height, the height adjusting rod 43 drives the push block 44 to adjust the height, when the push block 44 moves upwards, the push block 44 moves to a position between the T-shaped thread 12 and the rotating rod 19, so that the stop of the motor one 18 is loosened, the movable block 32 is pushed to slide in the movable groove 31 under the action force of the spring one 33, so that the movable block 32 drives the motor one 18 to approach to the T-shaped thread 12, and the gear two 20 is meshed with the gear one 17, thereby facilitating the lifting work of the moving rod 6 in the later period, when the height adjusting rod 43 drives the push block 44 to move downwards, the push block 44 between the T-shaped thread 12 and the turning rod 19 is moved between the T-shaped thread 12 and the first motor 18, thereby increasing the spacing between the motor one 18 and the T-shaped thread 12, which in turn causes the spring one 33 to compress, and the rotating rod 19 drives the first conical gear 23 to move through the loop rod 21, and the first conical gear 23 is meshed with the second conical gear 25, thereby bringing convenience to the adjustment of the distance between the clamping rods 7, further improving the height stability of the push block 44, loosening the insertion rod 56, inserting the insertion rod 56 into the clamping groove 54, further, the stabilizing ring 55 fixes the fixing ring 53 to fasten the second internal thread cylinder 50, thereby achieving a high fixation of the push block 44 and further improving the stability of the spacing of the clamping bars 7 and the height of the moving bar 6.
Fifth embodiment, based on the first embodiment, as shown in fig. 1, 2, 3 and 5, the suction connection mechanism includes a first electric telescopic rod 8, a fixed cylinder 9 and a suction cup 10, the telescopic cylinder 36, the partition plate 37, the electric push rod 38, the piston rod 39 and the vent hole 42, the electric telescopic rod I8 is installed at the middle position of the bottom end of the moving rod 6, the fixed cylinder 9 is arranged below the electric telescopic rod I8, the partition plate 37 is arranged at the middle position inside the fixed cylinder 9, an output shaft of the electric telescopic rod I8 penetrates through the fixed cylinder 9 and the partition plate 37 and is connected with the suction disc 10, the vent holes 42 are formed in the bottom end of the suction disc 10 at equal intervals, the electric push rod 38 is arranged at the top end inside the telescopic cylinder 36, the piston rod 39 is connected with the output shaft of the electric push rod 38, pull rods 40 connected with the clamping rods 7 are symmetrically inserted in the two sides of the fixed cylinder 9 in a penetrating mode, and a second spring 41 located inside the fixed cylinder 9 is sleeved on the pull rods 40;
starting the electric push rod 38, enabling the electric push rod 38 to push the piston rod 39, enabling gas inside the telescopic cylinder 36 to be discharged through the sucker 10, enabling the clamping rod 7 to move downwards to the bottom of the test sample piece and controlling the distance between the clamping rods 7, enabling the clamping rods 7 to drive the pull rod 40 to move in the fixed cylinder 9, and starting the electric push rod 38 to drive the piston rod 39 to move upwards in order to increase the clamping stability of the test sample piece, and enabling the electric push rod 8 to drive the telescopic cylinder 36 to move downwards in the fixed cylinder 9 and enabling the sucker 10 to move downwards, so that the sucker 10 moves to the top surface of the test sample piece, and further enabling the electric push rod 38 to drive the piston rod 39 to move upwards, and further because the telescopic cylinder 36 is a negative pressure device, the adsorption of the sucker 10 to the test sample piece is further improved, and the clamping stability of the test sample piece is effectively improved.
The working principle is as follows: when the device works, a worker places a baling box at the top end of the operating platform 2, firstly pulls the insertion rod 56 to separate the insertion rod 56 from the clamping groove 54, so as to compress the spring three 57, then rotates the internal thread cylinder two 50, through the threaded connection relationship between the internal thread cylinder two 50 and the thread block 49 and the connection relationship between the rotating shaft 47 and the swinging rod 46, the push rod 48 can be lifted, the push rod 48 drives the swinging rod 46 to rotate around the rotating shaft 47, the swinging rod 46 drives the mounting seat 45 to move upwards on the clamping seat 51, the mounting seat 45 drives the height adjusting rod 43 to move upwards, the height adjusting rod 43 drives the push block 44 to move upwards, when the push block 44 moves upwards, the push block 44 moves to a position between the T-shaped thread 12 and the rotating rod 19, so as to loosen the stop to the motor I18, the movable block 32 is pushed to slide in the movable groove 31 under the action force of the spring I33, and then the movable block 32 drives the motor I18 to approach to the T-shaped thread 12, and the second gear 20 is engaged with the first gear 17, and the insertion rod 56 is loosened, so that the insertion rod 56 is inserted in the clamping groove 54, and further the stabilizing ring 55 fixes the fixing ring 53, so as to fasten the second internal thread cylinder 50, and further to realize the height fixing of the push block 44, by starting the first motor 18, the first motor 18 drives the rotating rod 19 to rotate, the rotating rod 19 drives the second gear 20 to rotate, through the engagement of the second gear 20 and the first gear 17, the first gear 17 rotates, the first gear 17 drives the T-shaped thread 12 to rotate, through the threaded connection relationship between the T-shaped thread 12 and the first internal thread cylinder 13 and the sliding relationship between the sliding sleeve 15 and the sliding rod 16, the first internal thread cylinder 13 can be adjusted in height at the outside of the T-shaped thread 12, and further the first internal thread cylinder 13 drives the second electric telescopic rod 26 to move upwards through the supporting seat 14, and further the second electric telescopic rod 26 can drive the moving rod 6 to be adjusted in height, the movable rod 6 drives the clamping rods 7 to move downwards to the test sample piece conveying device, then the test sample piece conveying device transmits the test sample pieces, and when the test sample pieces move to one side of the packing box, the test sample piece conveying device stops acting to further adjust the distance between the clamping rods 7;
firstly, the insertion rod 56 is disconnected with the clamping groove 54, and then the internal thread cylinder II 50 is rotated reversely, so that the pushing block 44 can move downwards, the pushing block 44 moves to a position between the motor I18 and the T-shaped thread 12, the distance between the motor I18 and the T-shaped thread 12 is increased, and then the spring I33 can be compressed, meanwhile, the motor I18 can drive the rotating rod 19 to translate, and the gear II 20 is disconnected with the gear I17, meanwhile, the rotating rod 19 drives the sleeve rod 21 and the bevel gear I23 to translate, and the bevel gear I23 is meshed with the bevel gear II 25, then the insertion rod 56 is clamped with the clamping groove 54, and further, by starting the motor I18, the rotation of the bevel gear I23 is realized through the connection relationship between the rotating rod 19 and the sleeve rod 21, and further, the bevel gear II 25 drives the bevel gear I23 to rotate, the bevel gear I23 drives the bidirectional screw rod 27 to rotate, through the threaded connection relationship between the bidirectional screw rod 27 and the internal thread block 28 and the sliding relationship between the clamping rod 29 and the clamping groove 30, the two internal thread blocks 28 can be close to or far away from each other, the internal thread blocks 28 drive the clamping rods 7 to slide on the movable grooves 35, the distance between the clamping rods 7 is convenient to adjust, the clamping rods 7 are further convenient to clamp the test sample piece, in order to improve the clamping stability of the test sample piece, the electric push rod 38 is started, the electric push rod 38 pushes the piston rod 39, gas in the telescopic cylinder 36 is discharged through the suction disc 10, then the clamping rods 7 are moved downwards to the bottom of the test sample piece and control the distance between the clamping rods 7, meanwhile, the clamping rods 7 drive the pull rod 40 to move in the fixed cylinder 9, in order to increase the clamping stability of the test sample piece, the electric telescopic rod I8 is started, the electric telescopic rod I8 drives the telescopic cylinder 36 to move downwards in the fixed cylinder 9, the suction disc 10 moves downwards, and then the suction disc 10 moves to the top surface of the test sample piece, then, the electric push rod 38 is started to drive the piston rod 39 to move upwards, and further, the expansion cylinder 36 is a negative pressure device, so that the adsorption of the sucker 10 to the test sample piece is improved, the clamping stability of the test sample piece is effectively improved, and further, the electric telescopic rod two 26 is started, so that the moving rod 6 drives the test sample piece to move horizontally through the clamping rod 7, the test sample piece is conveniently moved into a packing box, and the packing operation of the test sample piece is completed.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. A anchor clamps for semiconductor integrated circuit particle impact noise test, including base (1), its characterized in that: an operation table (2) is arranged above the base (1), a test sample piece conveying device and a packing box are arranged above the operation table (2), one side of the operation table (2) is connected with a support column (3), support legs (4) connected with the base (1) are arranged at the bottom ends of the operation table (2) and the support column (3), an accommodating groove (5) is formed in the support column (3), a moving rod (6) located above the operation table (2) is arranged at the top end of one side of the support column (3), clamping rods (7) are symmetrically arranged at the bottom end of the moving rod (6), the two clamping rods (7) are connected through a distance adjusting group, an adsorption connecting mechanism located between the two clamping rods (7) is arranged at the bottom end of the moving rod (6), and a height adjusting mechanism connected with the moving rod (6) is arranged in the accommodating groove (5);
the height adjusting mechanism comprises a supporting plate (11), a fixing leg, a T-shaped thread (12), a first internal thread cylinder (13), a supporting seat (14), a sliding sleeve (15), a sliding rod (16), a second electric telescopic rod (26), a driver and a transmission unit, wherein the supporting plate (11) is installed at the inner bottom of the accommodating groove (5), the fixing leg is arranged at the bottom end of the supporting plate (11), the T-shaped thread (12) is rotatably connected to the top end of the supporting plate (11), the first internal thread cylinder (13) is connected to the outer thread of the T-shaped thread (12), the sliding rod (16) is arranged at the top end of the supporting plate (11), the sliding sleeve (15) which is in sliding connection with the sliding rod (16) is arranged on one side of the first internal thread cylinder (13), a first gear (17) is sleeved on the T-shaped thread (12), the supporting seat (14) is arranged at the top end of the first internal thread cylinder (13), the second electric telescopic rod (26) is arranged at the top end of the supporting seat (14), the output end of the electric telescopic rod II (26) is connected with the top end of one side of the moving rod (6), the top end of the supporting plate (11) is provided with a driver connected with the gear I (17) and the distance adjusting group, and the supporting plate (11) is provided with a transmission unit.
2. The jig for semiconductor integrated circuit particle impact noise test of claim 1, wherein: one side of the supporting column (3) close to the operating platform (2) is provided with a slot (22), and the output end of the electric telescopic rod II (26) penetrates through the inside of the slot (22).
3. The jig for semiconductor integrated circuit particle impact noise test of claim 1, wherein: the driver comprises a first motor (18), a rotating rod (19), a second gear (20), a loop bar (21) and a first bevel gear (23), the first motor (18) is arranged at the top end of the supporting plate (11), the rotating rod (19) is connected to an output shaft of the first motor (18), the loop bar (21) is sleeved on the outer portion of the rotating rod (19) in a clamping mode, the first bevel gear (23) is arranged at the top end of the loop bar (21), and the second gear (20) meshed with the first gear (17) and connected with the second bevel gear is arranged on the rotating rod (19).
4. The jig for semiconductor integrated circuit particle impact noise test of claim 3, wherein: the bottom end of the first motor (18) is provided with a movable block (32), the top end of the supporting plate (11) is provided with a movable groove (31) which is in sliding connection with the movable block (32), and one side of the movable block (32) is provided with a first spring (33) which is connected with the side wall of the movable groove (31).
5. The jig for semiconductor integrated circuit particle impact noise test of claim 1, wherein: distance adjustment group is including back shaft (24), bevel gear two (25), two-way lead screw (27), internal thread piece (28) and activity groove (35), one side of supporting seat (14) is rotated and is connected with back shaft (24), the outside of back shaft (24) is equipped with bevel gear two (25) of being connected with bevel gear (23) meshing, the pot head of back shaft (24) is equipped with installs in inside two-way lead screw (27) of carriage release lever (6), symmetrical threaded connection has internal thread piece (28) on two-way lead screw (27), install in the top of holding rod (7) internal thread piece (28), activity groove (35) with holding rod (7) sliding connection are seted up to the bottom symmetry of carriage release lever (6).
6. The jig for semiconductor integrated circuit particle impact noise test of claim 5, wherein: clamping rods (29) are symmetrically arranged at the top ends of the inner thread blocks (28), and clamping grooves (30) which are connected with the clamping rods (29) in a sliding mode are formed in the inner wall of the movable rod (6).
7. The jig for semiconductor integrated circuit particle impact noise test of claim 1, wherein: the transmission unit comprises a through groove (34), a height adjusting rod (43), a push block (44), a mounting seat (45), a swing rod (46), a rotating shaft (47), a push rod (48), a thread block (49), an internal thread cylinder II (50) and a locking piece, wherein the through groove (34) is formed in the support plate (11), the height adjusting rod (43) is inserted into the through groove (34), the push block (44) positioned between a motor I (18) and a T-shaped thread (12) is arranged at the top end of the height adjusting rod (43), the mounting seat (45) is arranged at the bottom end of the height adjusting rod (43), a slot (52) is formed in the bottom end of the mounting seat (45), a clamping seat (51) inserted into the slot (52) is arranged at the inner bottom end of the accommodating groove (5), the swing rod (46) is rotatably connected to one side of the mounting seat (45), and the middle position of the swing rod (46) is connected with the inner wall of the accommodating groove (5) through the rotating shaft (47), one end of the swing rod (46) is rotatably connected with a push rod (48), a thread block (49) is arranged at the bottom end of the push rod (48), an internal thread cylinder II (50) located below the supporting column (3) is in threaded connection with the outside of the thread block (49), and a locking piece is arranged on the internal thread cylinder II (50).
8. The jig for semiconductor integrated circuit particle impact noise test of claim 7, wherein: the retaining member includes solid fixed ring (53), joint groove (54), stabilizing ring (55), peg graft pole (56) and three (57) of spring, the outside of an internal thread section of thick bamboo two (50) is equipped with solid fixed ring (53), joint groove (54) have been seted up on solid fixed ring (53) equidistance, the below of support column (3) is equipped with the stabilizing ring (55) of cover in solid fixed ring (53) outside, the both sides activity interlude of stabilizing ring (55) have with the peg graft pole (56) of joint groove (54) joint, the cover is equipped with three (57) of spring that are located stabilizing ring (55) inside on peg graft pole (56).
9. The jig for semiconductor integrated circuit particle impact noise test of claim 1, wherein: adsorb coupling mechanism includes electric telescopic handle (8), a fixed section of thick bamboo (9), sucking disc (10), a telescopic section of thick bamboo (36), baffle (37), electric putter (38), piston rod (39) and air vent (42), electric telescopic handle (8) are installed in the bottom intermediate position of carriage release lever (6), the below of electric telescopic handle (8) is equipped with a fixed section of thick bamboo (9), the inside intermediate position of a fixed section of thick bamboo (9) is equipped with baffle (37), the output shaft of electric telescopic handle (8) runs through a fixed section of thick bamboo (9) and baffle (37) and is connected with sucking disc (10), air vent (42) have been seted up to the bottom equidistance of sucking disc (10), the inside top of a telescopic section of thick bamboo (36) is equipped with electric putter (38), the output shaft of electric putter (38) has piston rod (39).
10. The jig for semiconductor integrated circuit particle impact noise test of claim 9, wherein: the two sides of the fixed cylinder (9) are symmetrically inserted with pull rods (40) connected with the clamping rods (7), and a second spring (41) located inside the fixed cylinder (9) is sleeved on each pull rod (40).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111150125.9A CN114406959A (en) | 2021-09-29 | 2021-09-29 | Clamp for particle impact noise test of semiconductor integrated circuit |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111150125.9A CN114406959A (en) | 2021-09-29 | 2021-09-29 | Clamp for particle impact noise test of semiconductor integrated circuit |
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| CN114406959A true CN114406959A (en) | 2022-04-29 |
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| CN202111150125.9A Pending CN114406959A (en) | 2021-09-29 | 2021-09-29 | Clamp for particle impact noise test of semiconductor integrated circuit |
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Cited By (1)
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