CN114397729B - 基于连续曲率弯曲波导起偏器的SiN集成光学芯片 - Google Patents
基于连续曲率弯曲波导起偏器的SiN集成光学芯片 Download PDFInfo
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- CN114397729B CN114397729B CN202111472068.6A CN202111472068A CN114397729B CN 114397729 B CN114397729 B CN 114397729B CN 202111472068 A CN202111472068 A CN 202111472068A CN 114397729 B CN114397729 B CN 114397729B
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- waveguide
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- 239000013307 optical fiber Substances 0.000 claims description 32
- 230000010287 polarization Effects 0.000 claims description 14
- 238000009826 distribution Methods 0.000 claims description 6
- 238000013461 design Methods 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 4
- 230000008569 process Effects 0.000 abstract description 2
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- 238000005253 cladding Methods 0.000 description 2
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- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
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- 238000011160 research Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12038—Glass (SiO2 based materials)
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12116—Polariser; Birefringent
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12147—Coupler
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12152—Mode converter
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Gyroscopes (AREA)
- Optical Integrated Circuits (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202111472068.6A CN114397729B (zh) | 2021-12-06 | 2021-12-06 | 基于连续曲率弯曲波导起偏器的SiN集成光学芯片 |
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CN202111472068.6A CN114397729B (zh) | 2021-12-06 | 2021-12-06 | 基于连续曲率弯曲波导起偏器的SiN集成光学芯片 |
Publications (2)
Publication Number | Publication Date |
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CN114397729A CN114397729A (zh) | 2022-04-26 |
CN114397729B true CN114397729B (zh) | 2024-05-28 |
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Families Citing this family (2)
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CN114636413B (zh) * | 2022-05-19 | 2022-08-02 | 深圳奥斯诺导航科技有限公司 | 基于绝缘衬底上碳化硅光子集成平台的光学陀螺集成芯片 |
CN115808739B (zh) * | 2022-12-12 | 2024-05-03 | 北京自动化控制设备研究所 | 一种基于soi的光纤陀螺用片上紧凑起偏器 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013107984A1 (fr) * | 2012-01-19 | 2013-07-25 | Ixblue | Circuit optique integre a zone d'attenuation traversante |
CN106338800A (zh) * | 2016-10-31 | 2017-01-18 | 华中科技大学 | 一种用于光纤与芯片间光信号传输的水平耦合器 |
CN111458795A (zh) * | 2020-05-18 | 2020-07-28 | 浙江大学 | 一种基于硅波导的全波段起偏器 |
EP3785659A1 (de) * | 2019-09-02 | 2021-03-03 | Schott AG | Beleuchtungssystem mit einem lichtleiter und einem abstrahlelement |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20210084492A (ko) * | 2018-10-11 | 2021-07-07 | 케이브이에이치 인더스트리즈, 인코포레이티드 | 광 집적 회로, 섬유광 자이로스코프, 및 그 제조 방법 |
US11353655B2 (en) * | 2019-05-22 | 2022-06-07 | Kvh Industries, Inc. | Integrated optical polarizer and method of making same |
-
2021
- 2021-12-06 CN CN202111472068.6A patent/CN114397729B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013107984A1 (fr) * | 2012-01-19 | 2013-07-25 | Ixblue | Circuit optique integre a zone d'attenuation traversante |
CN106338800A (zh) * | 2016-10-31 | 2017-01-18 | 华中科技大学 | 一种用于光纤与芯片间光信号传输的水平耦合器 |
EP3785659A1 (de) * | 2019-09-02 | 2021-03-03 | Schott AG | Beleuchtungssystem mit einem lichtleiter und einem abstrahlelement |
CN111458795A (zh) * | 2020-05-18 | 2020-07-28 | 浙江大学 | 一种基于硅波导的全波段起偏器 |
Non-Patent Citations (1)
Title |
---|
超高宽深比结构氮化硅波导的研究;杨聚朋;刘惠兰;冯丽爽;王琪伟;杨照华;;半导体光电;20170815(04);全文 * |
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