CN114392961A - 一种硅片线切割加工用清洗工艺 - Google Patents
一种硅片线切割加工用清洗工艺 Download PDFInfo
- Publication number
- CN114392961A CN114392961A CN202111517095.0A CN202111517095A CN114392961A CN 114392961 A CN114392961 A CN 114392961A CN 202111517095 A CN202111517095 A CN 202111517095A CN 114392961 A CN114392961 A CN 114392961A
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- Prior art keywords
- silicon wafer
- pickling tank
- lactic acid
- soaking
- tank
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 135
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 135
- 239000010703 silicon Substances 0.000 title claims abstract description 135
- 238000004140 cleaning Methods 0.000 title claims abstract description 42
- 238000000034 method Methods 0.000 title claims abstract description 27
- 238000005520 cutting process Methods 0.000 title claims abstract description 22
- 230000008569 process Effects 0.000 title claims abstract description 22
- 238000012545 processing Methods 0.000 title claims abstract description 21
- 238000005554 pickling Methods 0.000 claims abstract description 105
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 claims abstract description 102
- 235000014655 lactic acid Nutrition 0.000 claims abstract description 51
- 239000004310 lactic acid Substances 0.000 claims abstract description 51
- 238000002791 soaking Methods 0.000 claims abstract description 45
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 40
- 238000005507 spraying Methods 0.000 claims abstract description 25
- 239000008213 purified water Substances 0.000 claims abstract description 19
- 238000005406 washing Methods 0.000 claims abstract description 17
- 239000002253 acid Substances 0.000 claims abstract description 15
- 238000001035 drying Methods 0.000 claims abstract description 10
- 235000012431 wafers Nutrition 0.000 claims description 125
- 239000007921 spray Substances 0.000 claims description 14
- 239000000243 solution Substances 0.000 abstract description 30
- 230000000694 effects Effects 0.000 abstract description 5
- 238000010790 dilution Methods 0.000 abstract description 3
- 239000012895 dilution Substances 0.000 abstract description 3
- 238000005265 energy consumption Methods 0.000 abstract description 3
- 238000004134 energy conservation Methods 0.000 abstract description 2
- 230000009467 reduction Effects 0.000 abstract description 2
- 230000006872 improvement Effects 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 238000010981 drying operation Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000003203 everyday effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
规格 | 机台数 | 药剂添加量 | 使用更换刀数 | 效率刀数/天 | 用酸次数 | 原用酸量/天 | 现药剂添加量 | 现用酸量/天 | 每天少用酸(KG) | 月节省量kg | 年节省量kg | 年节省费用(元) |
210 | 20 | 75kg | 80 | 180 | 2.25 | 168.75 | 40kg | 90 | 78.75 | 2362.5 | 28350 | 297675 |
182 | 58 | 75kg | 80 | 638 | 7.975 | 598.125 | 40kg | 319 | 279.125 | 8373.75 | 100485 | 1055092.5 |
合计 | 357.875 | 10736 | 1288835 | 13532767.5 |
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202111517095.0A CN114392961A (zh) | 2021-12-13 | 2021-12-13 | 一种硅片线切割加工用清洗工艺 |
Applications Claiming Priority (1)
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CN202111517095.0A CN114392961A (zh) | 2021-12-13 | 2021-12-13 | 一种硅片线切割加工用清洗工艺 |
Publications (1)
Publication Number | Publication Date |
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CN114392961A true CN114392961A (zh) | 2022-04-26 |
Family
ID=81226937
Family Applications (1)
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CN202111517095.0A Pending CN114392961A (zh) | 2021-12-13 | 2021-12-13 | 一种硅片线切割加工用清洗工艺 |
Country Status (1)
Country | Link |
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CN (1) | CN114392961A (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114670352A (zh) * | 2022-05-26 | 2022-06-28 | 广东高景太阳能科技有限公司 | 一种实时自动控制的硅片生产方法、***、介质及设备 |
CN115400503A (zh) * | 2022-09-23 | 2022-11-29 | 佛山市海天(高明)调味食品有限公司 | 一种压榨机滤布清洗方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1947870A (zh) * | 2006-05-12 | 2007-04-18 | 浙江昱辉阳光能源有限公司 | 一种废硅料清洗方法 |
CN103779256A (zh) * | 2014-01-23 | 2014-05-07 | 英利能源(中国)有限公司 | 一种硅基衬底扩散片的清洗方法 |
CN105170534A (zh) * | 2015-10-15 | 2015-12-23 | 京东方科技集团股份有限公司 | 一种清洗设备 |
CN106816497A (zh) * | 2017-02-22 | 2017-06-09 | 邢台晶龙电子材料有限公司 | 一种硅片脱胶清洗方法及装置 |
CN108296216A (zh) * | 2018-04-03 | 2018-07-20 | 湖州五石科技有限公司 | 一种硅片清洗方法 |
CN110976409A (zh) * | 2019-12-31 | 2020-04-10 | 广东盛田科技有限公司 | 一种五金件清洗槽 |
CN211412972U (zh) * | 2019-12-31 | 2020-09-04 | 广东盛田科技有限公司 | 一种五金件清洗槽 |
-
2021
- 2021-12-13 CN CN202111517095.0A patent/CN114392961A/zh active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1947870A (zh) * | 2006-05-12 | 2007-04-18 | 浙江昱辉阳光能源有限公司 | 一种废硅料清洗方法 |
CN103779256A (zh) * | 2014-01-23 | 2014-05-07 | 英利能源(中国)有限公司 | 一种硅基衬底扩散片的清洗方法 |
CN105170534A (zh) * | 2015-10-15 | 2015-12-23 | 京东方科技集团股份有限公司 | 一种清洗设备 |
CN106816497A (zh) * | 2017-02-22 | 2017-06-09 | 邢台晶龙电子材料有限公司 | 一种硅片脱胶清洗方法及装置 |
CN108296216A (zh) * | 2018-04-03 | 2018-07-20 | 湖州五石科技有限公司 | 一种硅片清洗方法 |
CN110976409A (zh) * | 2019-12-31 | 2020-04-10 | 广东盛田科技有限公司 | 一种五金件清洗槽 |
CN211412972U (zh) * | 2019-12-31 | 2020-09-04 | 广东盛田科技有限公司 | 一种五金件清洗槽 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114670352A (zh) * | 2022-05-26 | 2022-06-28 | 广东高景太阳能科技有限公司 | 一种实时自动控制的硅片生产方法、***、介质及设备 |
CN115400503A (zh) * | 2022-09-23 | 2022-11-29 | 佛山市海天(高明)调味食品有限公司 | 一种压榨机滤布清洗方法 |
CN115400503B (zh) * | 2022-09-23 | 2024-03-15 | 佛山市海天(高明)调味食品有限公司 | 一种压榨机滤布清洗方法 |
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Address after: 519000 404, 4th floor, No. 4 plant, No. 46, West Jinhai Avenue, Sanzao Town, Jinwan District, Zhuhai City, Guangdong Province Applicant after: Guangdong Jinwan Gaojing Solar Energy Technology Co.,Ltd. Applicant after: Gaojing Solar Co.,Ltd. Address before: 519000 404, 4th floor, No. 4 plant, No. 46, West Jinhai Avenue, Sanzao Town, Jinwan District, Zhuhai City, Guangdong Province Applicant before: Guangdong Jinwan Gaojing Solar Energy Technology Co.,Ltd. Applicant before: Guangdong Gaojing Solar Energy Technology Co.,Ltd. |
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Application publication date: 20220426 |
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