CN114374137B - Optical fiber ultraviolet femtosecond laser - Google Patents

Optical fiber ultraviolet femtosecond laser Download PDF

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Publication number
CN114374137B
CN114374137B CN202111637255.5A CN202111637255A CN114374137B CN 114374137 B CN114374137 B CN 114374137B CN 202111637255 A CN202111637255 A CN 202111637255A CN 114374137 B CN114374137 B CN 114374137B
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optical fiber
module
fiber amplifier
laser
femtosecond laser
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CN114374137A (en
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邹锶
何飞
陈正泽
万威
陈抗抗
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WUHAN ANYANG LASER TECHNOLOGY CO LTD
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WUHAN ANYANG LASER TECHNOLOGY CO LTD
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067Fibre lasers
    • H01S3/06754Fibre amplifiers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067Fibre lasers
    • H01S3/06708Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
    • H01S3/06712Polarising fibre; Polariser
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067Fibre lasers
    • H01S3/0675Resonators including a grating structure, e.g. distributed Bragg reflectors [DBR] or distributed feedback [DFB] fibre lasers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/094042Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a fibre laser
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/108Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
    • H01S3/109Frequency multiplication, e.g. harmonic generation

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Lasers (AREA)

Abstract

The invention provides an optical fiber ultraviolet femtosecond laser, and relates to the field of lasers; the fiber ultraviolet femtosecond laser comprises: the device comprises an optical fiber femtosecond seed source, a primary optical fiber amplifier, a widening module, a double-refraction flat filter, a secondary optical fiber amplifier, a tertiary optical fiber amplifier, a compression module and a frequency tripling module, wherein the primary optical fiber amplifier, the widening module, the double-refraction flat filter, the secondary optical fiber amplifier, the tertiary optical fiber amplifier, the compression module and the frequency tripleing module are sequentially arranged in the laser path direction of the optical fiber femtosecond seed source; the stretching module is used for stretching the laser output by the primary optical fiber amplifier into nanosecond laser; the birefringence flat patch filter is used for modulating a recess at the center wavelength of the nanosecond laser; the compression module is used for converting laser output by the three-stage optical fiber amplifier into femtosecond laser; the frequency tripling module is used for outputting ultraviolet femtosecond laser; the invention can effectively improve the frequency tripling efficiency and increase the output power of the ultraviolet femtosecond laser.

Description

Optical fiber ultraviolet femtosecond laser
Technical Field
The invention relates to the field of lasers, in particular to an optical fiber ultraviolet femtosecond laser.
Background
The fiber ultraviolet femtosecond laser obtained through infrared femtosecond frequency tripling is very sensitive to femtosecond pulses, and the width of the pulses and the size of the base can greatly influence the frequency doubling efficiency. The narrow pulse width and the smaller foot of the infrared femtosecond laser can produce higher frequency multiplication efficiency. The gain medium and the transmission medium of the fiber laser are optical fibers, and the optical fibers have high amplification efficiency and good heat dissipation performance, but for the femtosecond laser, the mode field of the fiber laser is small, the nonlinearity is high, the high-order dispersion causes serious spectrum narrowing effect, the width and the quality of output pulses are limited, and the fiber femtosecond laser is difficult to obtain high frequency multiplication efficiency.
Disclosure of Invention
The invention aims to solve the technical problem that the prior optical fiber femtosecond laser is difficult to obtain high frequency multiplication efficiency.
The invention provides an optical fiber ultraviolet femtosecond laser, which comprises: the device comprises an optical fiber femtosecond seed source, a primary optical fiber amplifier, a widening module, a double-refraction flat filter, a secondary optical fiber amplifier, a tertiary optical fiber amplifier, a compression module and a frequency tripling module, wherein the primary optical fiber amplifier, the widening module, the double-refraction flat filter, the secondary optical fiber amplifier, the tertiary optical fiber amplifier, the compression module and the frequency tripleing module are sequentially arranged in the laser path direction of the optical fiber femtosecond seed source; the stretching module is used for stretching the laser output by the primary optical fiber amplifier into nanosecond laser; the birefringence flat patch filter is used for modulating a recess at the center wavelength of the nanosecond laser; the compression module is used for converting laser output by the three-stage optical fiber amplifier into femtosecond laser; the frequency tripling module is used for outputting ultraviolet femtosecond laser.
Further, the birefringent flat-plate filter comprises a birefringent crystal, a first half-wave plate, a linear polarizer and a second half-wave plate which are sequentially arranged; the recess is modulated by adjusting the rotation angle of the birefringent crystal.
Further, the 0-degree angle position of the birefringent crystal is plated with an antireflection film or the brewster angle position is not plated with an antireflection film.
Further, the birefringent crystal is an α -BBO crystal or a quartz crystal.
Further, the optical fiber ultraviolet femtosecond laser also comprises a first detector, a controller, a driving mechanism and a second detector;
the driving mechanism is used for driving the birefringent crystal to rotate around the geometric central axis of the birefringent crystal, so that the rotation angle of the birefringent crystal is adjusted;
the first detector is used for converting part of the ultraviolet femtosecond laser output by the frequency tripling module into a first electric signal;
the second detector is used for converting part of laser output by the second-stage optical fiber amplifier into a second electric signal;
the controller is used for controlling the driving mechanism to drive the birefringent crystal to rotate according to the first electric signal, so that the change amplitude of the first electric signal is smaller than a first threshold value, and is used for adjusting the pumping current of the secondary optical fiber amplifier according to the second electric signal, so that the change amplitude of the second electric signal is smaller than a second threshold value.
Further, the optical fiber femtosecond seed source is a passive mode locking optical fiber laser based on a semiconductor saturable absorber mirror.
Further, the gain media of the primary optical fiber amplifier, the secondary optical fiber amplifier and the tertiary optical fiber amplifier are all ytterbium-doped polarization-maintaining optical fibers.
Further, the stretching module is a polarization-maintaining chirped Bragg diffraction grating.
Further, the compression module comprises a first diffraction grating, a second diffraction grating and a turning mirror which are sequentially arranged.
Further, the frequency doubling module comprises a frequency doubling crystal, a frequency tripling crystal, a harmonic separator and a beam splitter which are sequentially arranged.
The technical scheme provided by the embodiment of the invention has the beneficial effects that: the optical fiber ultraviolet femtosecond laser in the embodiment of the invention can modulate the concave near the central wavelength by introducing the double refraction flat filter, so that the spectrum narrowing effect is relieved, the high-order phase generated by nonlinear combination high-order dispersion in the optical fiber is reduced, the width and the base of the femtosecond laser pulse are reduced, the proportion of the main pulse to the whole pulse is improved, and the high-quality high-energy femtosecond laser pulse is obtained, thereby improving the frequency tripling efficiency and increasing the output power of the ultraviolet femtosecond laser.
Further, by arranging the first detector, the controller, the driving mechanism and the second detector, feedback control is carried out on the output power of the ultraviolet femtosecond laser, the stability of the pulse width shape of the ultraviolet femtosecond laser is ensured, the time for stabilizing the power of the optical fiber ultraviolet femtosecond laser is shortened, and the requirement of industrial application can be better met.
Drawings
FIG. 1 is a schematic diagram of a fiber UV femtosecond laser according to one embodiment of the invention;
FIG. 2 is a side view of a birefringent crystal 40 in the fiber optic UV femtosecond laser of FIG. 1;
FIG. 3 is a graph of pulse width of an ultraviolet femtosecond laser output by an optical fiber femtosecond ultraviolet laser (left) and a graph of pulse width of an ultraviolet femtosecond laser output when a birefringent flat-chip filter is not introduced (right) according to an embodiment of the present invention;
FIG. 4 is a pulse width graph of an ultraviolet femtosecond laser output when a fiber femtosecond ultraviolet laser is not introduced into a birefringent flat-chip filter according to an embodiment of the present invention;
1, an optical fiber femtosecond seed source; 2. a primary optical fiber amplifier; 3. a widening module; 4. a birefringent flat-chip filter; 40. a birefringent crystal; 401. an incidence surface; 402. an exit surface; 41. a first half-wave plate; 42. a linear polarizer; 43. a second half-wave plate; 5. a second-stage optical fiber amplifier; 6. a three-stage optical fiber amplifier; 7. a compression module; 70. a first diffraction grating; 71. a second diffraction grating; 72. a return mirror; 8. a frequency tripling module; 80. a frequency doubling crystal; 81. a frequency tripled crystal; 82. a harmonic separator; 83. a light splitting sheet; 9. a first detector; 10. a controller; 11. and a second detector.
Detailed Description
Preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, which form a part hereof, and together with the description serve to explain the principles of the invention, and are not intended to limit the scope of the invention.
Referring to fig. 1 and 2, an optical fiber ultraviolet femtosecond laser provided in the embodiment includes: the optical fiber femtosecond seed source 1 is sequentially arranged in the laser light path direction of the optical fiber femtosecond seed source 1, and comprises a primary optical fiber amplifier 2, a widening module 3, a double-refraction flat filter 4, a secondary optical fiber amplifier 5, a tertiary optical fiber amplifier 6, a compression module 7 and a frequency tripling module 8; the stretching module 3 is used for stretching the laser output by the primary optical fiber amplifier 2 into nanosecond laser; the birefringent flat-chip filter 4 is used for modulating the concave at the center wavelength of the nanosecond laser; the compression module 7 is used for converting the laser output by the three-stage optical fiber amplifier 6 into femtosecond laser; the frequency tripler module 8 is used for outputting ultraviolet femtosecond laser.
Specifically, in this embodiment, the optical fiber femtosecond seed source 1 is a passive mode-locked fiber laser based on a semiconductor saturable absorber mirror, the center wavelength is 1030nm, the repetition frequency is 1MHz, and the linewidth is 10nm; the primary optical fiber amplifier 2 is a 10/125 ytterbium polarization maintaining optical fiber with the length of 1.5m, and amplifies the power of the laser output by the optical fiber femtosecond seed source 1 to 100mW; the stretching module 3 is a Chirped Fiber Bragg Grating (CFBG) and stretches the laser output by the primary optical fiber amplifier 2 to 1ns; the widened laser passes through a double refraction flat-sheet filter 4 and is modulated into a concave near 1030nm spectrum; the birefringent flat-plate filter 4 includes a birefringent crystal 40, a first half-wave plate 41, a linear polarizer 42, and a second half-wave plate 42, which are arranged in this order; wherein the birefringent crystal 40 is a uniaxial crystal, and may be an α -BBO crystal or a quartz crystal; the laser pulse stretched by the stretching module 3 is set to be in a horizontal polarization state (P light), the birefringent crystal 40 is in a thin cylinder shape, the round surfaces at two ends are respectively an incident surface 401 and an emergent surface 402, 1030nm antireflection films are respectively plated, the distance between the incident surface 401 and the emergent surface 402 is the thickness of the birefringent crystal 40, and the axial direction of the birefringent crystal 40 is in the round surface; rotating the birefringent crystal 40 around the geometric center axis of the birefringent crystal 40, the extraordinary light (e-light) and the ordinary light (o-light) of the birefringent crystal 40 may generate different phase differences; the first half-wave plate 41 is used to further fine tune the phase difference between the o-light and the e-light, and coherent addition of light of different phases in the same polarization state (polarization direction of the linear polarizer 42) can generate a concave spectrum, and the width, depth and center of the concave are determined by the axial direction, thickness and refractive index difference of the birefringent crystal 40; spectral modulation can be achieved by rotating the birefringent crystal 40 about its geometric central axis 40; it should be noted that, the optical path is not changed by rotating the birefringent crystal 40, and the transmission efficiency between the primary optical fiber amplifier 2 and the secondary optical fiber amplifier 5 is not affected; the linear polarizer 42 is a polarization beam splitter prism, and outputs P light; the second half-wave plate 42 is used for adjusting the polarization state of the laser light output by the birefringent plate filter 4 to be the same as the polarization state of the second-stage optical fiber amplifier 5; the second-stage optical fiber amplifier 5 is a 30/200 ytterbium polarization-preserving optical fiber and is a photonic crystal optical fiber, the length is 1.6m, and the power of the laser output by the double-refraction flat filter 4 is amplified to 3W; the power of the laser output by the secondary optical fiber amplifier 5 is amplified to 125W by the tertiary optical fiber amplifier 6, the tertiary optical fiber amplifier 6 is a 40/200 ytterbium polarization maintaining optical fiber, and is a photonic crystal optical fiber with the length of 2m;125W 1030nm infrared light enters the compression module 7, and femtosecond laser with 100W output power is output, and the compression efficiency is 80%; the compression module 7 comprises a first diffraction grating 70, a second diffraction grating 71 and a turning mirror 72 which are sequentially arranged, wherein the first diffraction grating 70 and the second diffraction grating 71 are all 1740 lines, and the diffraction efficiency is more than 95%.
Referring to fig. 3, a birefringent flat-chip filter 4 is introduced, a suitable notch is modulated near the center wavelength, the spectrum narrowing effect is relieved, the high-order phase generated by nonlinear combination high-order dispersion in the optical fiber is reduced, the femtosecond pulse width is narrowed, the base is reduced, the pulse quality is improved obviously, and higher frequency doubling efficiency is generated. 100W of femtosecond laser enters a frequency tripling module 8, the output power is 40W of ultraviolet femtosecond laser, the frequency tripling efficiency is 40%, and the frequency doubling efficiency is greatly improved; wherein, the frequency tripling module 8 comprises a frequency doubling crystal 80, a frequency tripling crystal 81, a harmonic separator 82 and a beam splitter 83 which are sequentially arranged; the frequency doubling crystal 80 and the frequency tripling crystal 81 are both BBO crystals with phase matching, and are used for generating high-efficiency frequency tripling effect, and the harmonic separator 82 is used for extracting ultraviolet femtosecond laser.
Referring to fig. 4, when the optical fiber ultraviolet femtosecond laser without the birefringent flat-chip filter 4 is operated, the change of temperature and stress easily causes the change of mode field and nonlinearity, and the change of high-order phase causes the change of spectrum and pulse width, so that the fluctuation of ultraviolet femtosecond power is obvious. Adjusting the temperature of the stretching module 3 and changing the dispersion of the distance between the grating pairs in the compressor cannot compensate for the change of pulse width and cannot stabilize the ultraviolet femtosecond power.
In order to solve the problem of unstable ultraviolet femtosecond laser power, the optical fiber ultraviolet femtosecond laser in the embodiment further comprises a first detector 9, a controller 10, a driving mechanism (not shown in the figure) and a second detector 11; the driving mechanism is used for driving the birefringent crystal 40 to rotate around the geometric central axis of the birefringent crystal 40, so as to adjust the rotation angle of the birefringent crystal 40; the first detector 9 is used for converting part of the ultraviolet femtosecond laser output by the frequency tripling module 8 into a first electric signal; the second detector 11 is used for converting part of laser light output by the second-stage optical fiber amplifier 5 into a second electric signal; the controller 10 is configured to control the driving mechanism to drive the birefringent crystal 40 to rotate according to the first electrical signal, so that the variation amplitude of the first electrical signal is smaller than a first threshold value, and to adjust the pumping current of the second optical fiber amplifier 5 according to the second electrical signal, so that the variation amplitude of the second electrical signal is smaller than a second threshold value.
Illustratively, in this embodiment, the first threshold and the second threshold are both 0.5%.
A part of the ultraviolet femtosecond laser is injected into the first detector 9 through the light splitting sheet 83 and converted into the first electric signal; wherein the magnitude of the first electrical signal is proportional to the power of the ultraviolet femtosecond laser; the controller 10 controls the driving mechanism to drive the birefringent crystal 40 to rotate according to the first electric signal, so as to adjust the rotation angle of the birefringent crystal 40, thereby modulating the spectrum, compensating the spectrum and pulse width variation caused by temperature and stress, ensuring the variation amplitude of the first electric signal to be less than 0.5%, and realizing feedback control; in addition, since the transmittance of the birefringent flat-chip filter 4 varies due to the modulation of the spectrum, the second-stage optical fiber amplifier 5 needs to be compensated. Specifically, part of the laser output by the second optical fiber amplifier 5 enters the second detector 11 through the beam splitter and is converted into a second electric signal, the magnitude of the second electric signal is in direct proportion to the power of the laser output by the second optical fiber amplifier, and the controller 10 adjusts the pumping current of the second optical fiber amplifier 5 according to the second electric signal, so that the variation amplitude of the second electric signal is less than 0.5%, the stability of the output power of the second amplification is ensured, and the stability of the power of the optical fiber femtosecond ultraviolet laser is ensured.
It should be noted that the driving mechanism is in the prior art, and is used for driving the birefringent crystal 40 to rotate around its axis so as to adjust its rotation angle.
Illustratively, in this embodiment, the drive mechanism is an electric rotary table.
The above is not relevant and is applicable to the prior art.
In this document, terms such as front, rear, upper, lower, etc. are defined with respect to the positions of the components in the drawings and with respect to each other, for clarity and convenience in expressing the technical solution. It should be understood that the use of such orientation terms should not limit the scope of the protection sought herein.
The embodiments described above and features of the embodiments herein may be combined with each other without conflict.
The foregoing description of the preferred embodiments of the invention is not intended to limit the invention to the precise form disclosed, and any such modifications, equivalents, and alternatives falling within the spirit and scope of the invention are intended to be included within the scope of the invention.

Claims (8)

1. An optical fiber ultraviolet femtosecond laser, comprising: the device comprises an optical fiber femtosecond seed source, a primary optical fiber amplifier, a widening module, a double-refraction flat filter, a secondary optical fiber amplifier, a tertiary optical fiber amplifier, a compression module and a frequency tripling module, wherein the primary optical fiber amplifier, the widening module, the double-refraction flat filter, the secondary optical fiber amplifier, the tertiary optical fiber amplifier, the compression module and the frequency tripleing module are sequentially arranged in the laser path direction of the optical fiber femtosecond seed source; the stretching module is used for stretching the laser output by the primary optical fiber amplifier into nanosecond laser; the birefringence flat patch filter is used for modulating a recess at the center wavelength of the nanosecond laser; the compression module is used for converting laser output by the three-stage optical fiber amplifier into femtosecond laser; the frequency tripling module is used for outputting ultraviolet femtosecond laser;
the birefringent flat-plate filter comprises a birefringent crystal, a first half-wave plate, a linear polarizer and a second half-wave plate which are sequentially arranged; modulating the depression by adjusting a rotation angle of the birefringent crystal;
the driving mechanism is used for driving the birefringent crystal to rotate around the geometric central axis of the birefringent crystal, so that the rotation angle of the birefringent crystal is adjusted;
the first detector is used for converting part of the ultraviolet femtosecond laser output by the frequency tripling module into a first electric signal;
the second detector is used for converting part of laser output by the second-stage optical fiber amplifier into a second electric signal;
and the controller is used for controlling the driving mechanism to drive the birefringent crystal to rotate according to the first electric signal so that the change amplitude of the first electric signal is smaller than a first threshold value, and is used for adjusting the pumping current of the secondary optical fiber amplifier according to the second electric signal so that the change amplitude of the second electric signal is smaller than a second threshold value.
2. The fiber uv femtosecond laser according to claim 1, wherein the 0 degree angular position of the birefringent crystal is coated with an anti-reflection film or the brewster angular position is not coated with an anti-reflection film.
3. The fiber uv femtosecond laser according to claim 1, wherein the birefringent crystal is an α -BBO crystal or a quartz crystal.
4. The fiber uv femtosecond laser according to claim 1, wherein the fiber femtosecond seed source is a semiconductor saturable absorber mirror based passive mode-locked fiber laser.
5. The fiber ultraviolet femtosecond laser of claim 1, wherein gain media of the primary fiber amplifier, the secondary fiber amplifier and the tertiary fiber amplifier are all ytterbium-doped polarization-maintaining fibers.
6. The fiber uv femtosecond laser of claim 1, wherein said stretching module is a polarization maintaining chirped bragg diffraction grating.
7. The fiber uv femtosecond laser of claim 1, wherein the compression module comprises a first diffraction grating, a second diffraction grating, and a fold back mirror sequentially disposed.
8. The fiber optic ultraviolet femtosecond laser according to claim 1, wherein the frequency doubling module comprises a frequency doubling crystal, a frequency tripling crystal, a harmonic separator and a beam splitter which are sequentially arranged.
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CN107086430A (en) * 2017-06-09 2017-08-22 武汉安扬激光技术有限责任公司 A kind of third harmonic generation ultraviolet laser
CN108281877A (en) * 2018-03-14 2018-07-13 成都师范学院 Chirped laser pulse frequency spectrum shaping system based on spectrum angle dispersion
CN109378689A (en) * 2018-10-29 2019-02-22 北京理工大学 A kind of method of the continuous single-frequency laser output of achievable super wideband and tunable
CN209766848U (en) * 2019-03-14 2019-12-10 苏州龙格库塔光电科技有限公司 780nm femtosecond laser based on full polarization maintaining optical fiber system

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