CN114371124A - Droplet adhesive force detecting system based on micro-cantilever beam - Google Patents
Droplet adhesive force detecting system based on micro-cantilever beam Download PDFInfo
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- CN114371124A CN114371124A CN202210040004.7A CN202210040004A CN114371124A CN 114371124 A CN114371124 A CN 114371124A CN 202210040004 A CN202210040004 A CN 202210040004A CN 114371124 A CN114371124 A CN 114371124A
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- 239000000853 adhesive Substances 0.000 title claims description 20
- 230000001070 adhesive effect Effects 0.000 title claims description 20
- 239000007788 liquid Substances 0.000 claims abstract description 90
- 238000001514 detection method Methods 0.000 claims abstract description 40
- 238000000034 method Methods 0.000 claims abstract description 9
- 230000035945 sensitivity Effects 0.000 claims description 8
- 238000003795 desorption Methods 0.000 claims description 6
- 238000005452 bending Methods 0.000 claims description 4
- 238000012545 processing Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000007787 solid Substances 0.000 abstract description 6
- 238000002336 sorption--desorption measurement Methods 0.000 abstract 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
- 239000000758 substrate Substances 0.000 description 8
- 230000001276 controlling effect Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000005871 repellent Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N19/00—Investigating materials by mechanical methods
- G01N19/04—Measuring adhesive force between materials, e.g. of sealing tape, of coating
Abstract
The invention relates to a micro-cantilever beam-based liquid drop adhesion detection system, which specifically comprises a laser, a micro-cantilever beam, a micro-beam clamping table, a micro-liquid drop injector, an injector support, a photoelectric detector, a micro-camera, a camera support, a data acquisition card, a computer and the like, wherein the front end of the micro-cantilever beam is forwards suspended to form a free end, the bottom of the micro-sample injector is provided with an injector hydrophilic liquid hole, the injector hydrophilic liquid hole longitudinally moves under the clamping of the sample injector support so as to control the liquid drop to move up and down on the surface of the micro-cantilever beam, the tip of the micro-cantilever beam is irradiated by a laser beam, the adsorption-desorption process of the liquid drop on the surface of the micro-cantilever beam is detected, the adsorption-desorption mechanical curve of the liquid drop on the solid surface is obtained, and the longitudinal adhesion between the liquid drop and the surface of the micro-cantilever beam can be simply and accurately obtained.
Description
Technical Field
The invention relates to liquid drop adhesion detection, in particular to a solid-liquid interface liquid drop adhesion detection system.
Background
The adhesion between solid and liquid interfaces is a key factor influencing the dynamic performance of a liquid phase on the solid surface, the detection of the interface adhesion is widely concerned in theoretical research and practical application, and the detection is a key breakthrough point of the liquid-repellent surface moving to the practical application. The traditional measurement of the adhesion force of the liquid drop is to blow off the liquid drop on the substrate by utilizing air flows with different intensities so as to obtain the minimum air flow intensity capable of blowing off the liquid drop, and then the adhesion force of the liquid drop is calculated; during this measurement, part of the gas flow reaches the substrate and first changes direction and then acts on the droplets, thus disturbing the measurement.
Patent document No. CN211825620 discloses a liquid drop adhesion force measuring device, in which a substrate to be measured and a measuring assembly are placed on a table top of a workbench, the measuring assembly has an adsorption surface facing the substrate, the measuring assembly can move relative to the substrate, and is used for adsorbing liquid drops on the substrate at different angles and/or distances and reading the adsorption force applied to the measuring assembly; however, in the detection mode, the slider is controlled by the magnet to drive the measuring assembly, and the sensitivity of the large-scale substrate for adsorbing liquid drops cannot meet the requirement, so that the detection accuracy is greatly limited.
Disclosure of Invention
In order to avoid the defects in the prior art, the invention provides a liquid drop adhesive force detection system based on a micro-cantilever beam so as to realize high-sensitivity detection on the liquid drop adhesive force.
The invention relates to a liquid drop adhesive force detection system based on a micro-cantilever beam, which is characterized by comprising the following components: a liquid drop adhesive force detection system based on a micro-cantilever beam is characterized by comprising:
the tail part of the micro-cantilever beam is clamped by the micro-beam clamping table, and the front end of the micro-cantilever beam horizontally overhangs and extends to be a free end;
the laser emits laser beams to irradiate the free end of the micro-cantilever from bottom to top along the direction forming an angle of 45 degrees with the micro-cantilever, and a reflected light beam is generated at the free end of the micro-cantilever;
the microsyringe is arranged above the free end of the micro cantilever by using a microsyringe bracket, the microsyringe bracket can drive the microsyringe to vertically move up and down, the bottom of the microsyringe is provided with an injector liquid hole, and the sample liquid stored in the microsyringe can be pushed into the injector liquid hole by the injector and is kept as liquid drops to be hung on the injector liquid hole;
the micro camera is fixedly supported above the micro cantilever beam by a camera support and is used for shooting and obtaining an image of the adhesion-desorption process of the liquid drop and the micro cantilever beam;
and the photoelectric detector is arranged in the reflection loop of the reflected light and used for receiving the reflected light, and the data acquisition card transmits the acquired output signal of the photoelectric detector to a computer for signal processing so as to realize the detection of the adhesive force of the liquid drop.
The liquid drops in the liquid holes of the microsampler are not contacted with the micro-beam in the initial state, and light spots of laser beams emitted by the laser after being reflected by the micro-cantilever coincide with the central position of the detector;
firstly, controlling a sample injector bracket to enable a microsyringe to move downwards until liquid drops suspended in a liquid hole of the injector are contacted with the upper surface of the free end of a micro-cantilever beam, the micro-cantilever beam deflects downwards, and the position of a light spot changes;
adjusting the sample injector support again, dragging the liquid drop upwards to restore the micro-beam to be in a parallel state, and enabling the light spot to coincide with the center of the detector again;
finally, controlling the sample injector bracket to enable the micro sample injector to move upwards, and driving the free end of the micro cantilever beam to generate upward deviation by the liquid drop until the liquid drop is separated from the surface of the micro cantilever beam; and collecting the offset of the micro-beam in the process of upward movement of the liquid drop by using a data acquisition card.
The photoelectric detector is a four-quadrant detector, and the photosensitive target surface of the photoelectric detector is a circular surface with an O point as a central point and an R point as a radius; the spot is O' (x)0,y0) A circular surface with a central point and a radius of r;
with IA、IB、ICAnd IDRepresenting the current intensities of the I, II, III and IV quadrants detected and obtained by the photoelectric detector in a one-to-one correspondence manner;
when the position of a light spot on the photoelectric detector is changed, the output current intensity of each quadrant of the detector is changed, the relative offset of the light spot on the photosensitive surface is calculated according to the change of the photocurrent generated by the light spot by the following formula (1), and the bending deflection delta Z of the micro-cantilever beam is calculated by the formula (2):
wherein:
Kxthe detection sensitivity of the detector in the X-axis direction is obtained;
Kythe detection sensitivity of the detector in the Y-axis direction is obtained;
delta S is the linear offset of the central point of the light spot relative to the photosensitive target surface O;
l is the distance from the contact center point of the liquid drop and the micro-cantilever to the fixed end of the micro-cantilever;
l is the distance from the free end of the micro-cantilever to the photosensitive target surface of the photoelectric detector after the laser beam is reflected by the micro-cantilever;
then, the droplet adhesion force F is: f ═ k Δ Z
Wherein k is the spring constant of the micro-cantilever.
The invention relates to a liquid drop adhesive force detection system based on a micro-cantilever beam, which is also characterized in that: the injector liquid hole of the microsyringe (4) is flat and is subjected to hydrophilic treatment to enhance the adhesive force between the liquid drop and the liquid hole.
The invention relates to a liquid drop adhesive force detection system based on a micro-cantilever beam, which is also characterized in that: the capacity of the microsyringe is 10 mu L, and the diameter of a liquid hole of the injector is 0.05 mm; the laser is a semiconductor laser with output laser wavelength of 632nm-780 nm.
The invention relates to a liquid drop adhesive force detection system based on a micro-cantilever beam, which is also characterized in that: the photoelectric detector (6) is a position sensitive sensor PSD.
The invention relates to a liquid drop adhesive force detection system based on a micro-cantilever beam, which is also characterized in that: the micro cantilever beam is a rectangular single beam, the length of the beam is 500 mu m, the width of the beam is 9 mu m, and the thickness of the beam is 1 mu m.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, the laser is used for irradiating the free end of the micro-cantilever beam, so that the accurate detection of the surface stress change process on the micro-nano scale can be realized, the adhesive force of the liquid drop on the solid surface can be accurately detected, the adhesive force between the liquid drop and the substrate can be obtained more simply and reliably, the response speed is higher, and the sensitivity is higher;
2. the optical path structure is simple and easy to build, and dynamic desorption curves of liquid drops on the surface of a solid can be obtained more intuitively and vividly through information processing and measurement result display of a computer;
3. aiming at the specific application of the invention, the micro-cantilever is amplified and displayed by using the micro-camera, the surface of the micro-cantilever can be modified, the association between different microstructures on the surface of the solid and the adhesive force of liquid drops on the surface can be easily obtained, and a guiding direction is provided for constructing and regulating the lyophobic surface.
Drawings
FIG. 1 is a schematic diagram of the detection system of the present invention;
FIG. 2 is a schematic view of the deflection of a micro-cantilever in the detection system of the present invention;
FIG. 3 is a schematic process diagram of the principle of photodetection in the detection system of the present invention;
FIG. 4 is a visualization display operation page of Lab VIEW data in the inspection system of the present invention;
FIG. 5 is a graph showing the desorption of a droplet on the surface of a micro-cantilever in a detection system according to the present invention;
reference numbers in the figures: 1 laser, 2 micro-cantilever beams, 3 micro-beam clamping tables, 4 micro-sample injectors, 5 sample injector supports, 6 photoelectric detectors, 7 micro-cameras, 8 camera supports, 9 data acquisition cards and 10 computers.
Detailed Description
The invention is described in detail below with reference to the accompanying drawings so that the skilled person can understand the invention
Example 1
Fig. 1 shows a liquid drop adhesion detection system based on a micro-cantilever, which is characterized by comprising:
the tail part of the micro-cantilever beam (2) is clamped by a micro-beam clamping table (3), and the front end of the micro-cantilever beam horizontally overhangs to form a free end;
the laser device (1) emits laser beams to irradiate the free end of the micro cantilever beam from bottom to top along the direction forming an angle of 45 degrees with the micro cantilever beam (2), and generates a reflected light beam at the free end of the micro cantilever beam (2);
the microsyringe device comprises a microsyringe (4), wherein a microsyringe support (5) is arranged above the free end of a micro cantilever beam (2), the microsyringe support (5) can drive the microsyringe (4) to vertically move up and down, the bottom of the microsyringe (4) is an injector liquid hole, and sample liquid stored in the microsyringe (4) can be pushed into the injector liquid hole by the injector and is kept as liquid drops to be hung on the injector liquid hole;
the microscopic camera (7) is fixedly supported above the micro cantilever beam (2) by a camera support (8) and is used for shooting an image for obtaining the adhesion-desorption process of the liquid drop and the micro cantilever beam;
and the photoelectric detector (6) is arranged in the reflection loop of the reflected light and is used for receiving the reflected light, and the data acquisition card (9) transmits the acquired output signal of the photoelectric detector (6) to the computer (10) for signal processing so as to realize the detection of the adhesive force of the liquid drops.
The liquid drops in the liquid holes of the microsyringe (4) are not contacted with the micro-beam (2) in the initial state, and the light spot of the laser beam emitted by the laser (1) after being reflected by the micro-cantilever is superposed with the central position of the detector (6);
firstly, controlling a sample injector bracket (5) to enable a microsyringe (4) to move downwards until liquid drops suspended in a liquid hole of the syringe are contacted with the upper surface of the free end of a micro-cantilever beam, the micro-cantilever beam deflects downwards, and the position of a light spot changes;
adjusting the sample injector support (5) again, dragging the liquid drop upwards to restore the micro beam to be in a parallel state, and enabling the light spot to coincide with the center of the detector again;
finally, controlling the sample injector bracket (5) to enable the micro sample injector (4) to move upwards, and enabling the liquid drops to drive the free end of the micro cantilever beam to generate upward deviation until the liquid drops are separated from the surface of the micro cantilever beam; and the offset of the micro-beam in the process of moving the liquid drop upwards is collected by a data acquisition card (9).
The photoelectric detector (6) is a four-quadrant detector, and the photosensitive target surface of the photoelectric detector (6) is a circular surface with an O point as a central point and an R point as a radius; the spot is O' (x)0,y0) A circular surface with a central point and a radius of r;
with IA、IB、ICAnd IDThe current intensities of the I, II, III and IV quadrants obtained by the detection of the photoelectric detector (6) are represented in a one-to-one correspondence manner;
when the position of a light spot on the photoelectric detector is changed, the output current intensity of each quadrant of the detector is changed, the relative offset of the light spot on the photosensitive surface is calculated according to the change of the photocurrent generated by the light spot by the following formula (1), and the bending deflection delta Z of the micro-cantilever beam is calculated by the formula (2):
wherein:
Kxthe detection sensitivity of the detector in the X-axis direction is obtained;
Kythe detection sensitivity of the detector in the Y-axis direction is obtained;
delta S is the linear offset of the central point of the light spot relative to the photosensitive target surface O;
l is the distance from the contact center point of the liquid drop and the micro-cantilever to the fixed end of the micro-cantilever;
l is the distance from the free end of the micro-cantilever to the photosensitive target surface of the photoelectric detector after the laser beam is reflected by the micro-cantilever;
then, the droplet adhesion force F is: f ═ k Δ Z
Wherein k is the spring constant of the micro-cantilever.
Example 2
The use steps of the liquid drop adhesion detection system based on the micro-cantilever beam are as follows:
slowly extruding 0.4 mu L of water drops by using a microsyringe (4), keeping the water drops not to drip on a needle head of the microsyringe (4), ensuring the distance from a photosensitive target surface of a photoelectric detector (6) to the free end of a micro-cantilever (2) to be 3.7cm, finely adjusting a sample injector support (5), moving downwards for 20 mu m after the water drops are contacted with the surface of the micro-cantilever (2), ensuring that the water drops are fully contacted with the surface of the micro-cantilever (2) without destroying the surface tension of the water drops, ensuring the distance between a central point of the contact of the water drops and the micro-cantilever (2) and the fixed end of the micro-cantilever (2) to be 450 mu m, reversely finely adjusting the sample injector support (5), driving the water drops to be slowly separated from the surface of the micro-cantilever (2) by the needle head of the microsyringe (4), and displaying the deflection displacement of the micro-cantilever (2) on a Lab VIEW program at the end of a computer (10) in real time through a data acquisition card (9), when the water drops are separated from the surface of the micro-cantilever beam (2), the bending degree of the micro-cantilever beam (2) reaches a threshold value, the adhesive force of the water drops on the surface of the micro-cantilever beam (2) is calculated through a formula, and a mechanical curve of the desorption of the water drops on the surface of the micro-cantilever beam is obtained.
The present invention is described by way of specific embodiments, but these are not to be construed as limitations of the present invention, and various changes and modifications of the technical solution of the present invention by those skilled in the art are intended to fall within the scope of the present invention defined by the appended claims.
Claims (7)
1. A liquid drop adhesive force detection system based on a micro-cantilever beam is characterized by comprising:
the tail part of the micro-cantilever beam (2) is clamped by a micro-beam clamping table (3), and the front end of the micro-cantilever beam horizontally overhangs to form a free end;
the laser device (1) emits laser beams to irradiate the free end of the micro cantilever beam from bottom to top along the direction forming an angle of 45 degrees with the micro cantilever beam (2), and generates a reflected light beam at the free end of the micro cantilever beam (2);
the microsyringe device comprises a microsyringe (4), wherein a microsyringe support (5) is arranged above the free end of a micro cantilever beam (2), the microsyringe support (5) can drive the microsyringe (4) to vertically move up and down, the bottom of the microsyringe (4) is an injector liquid hole, and sample liquid stored in the microsyringe (4) can be pushed into the injector liquid hole by the injector and is kept as liquid drops to be hung on the injector liquid hole;
the microscopic camera (7) is fixedly supported above the micro cantilever beam (2) by a camera support (8) and is used for shooting an image for obtaining the adhesion-desorption process of the liquid drop and the micro cantilever beam;
and the photoelectric detector (6) is arranged in the reflection loop of the reflected light and is used for receiving the reflected light, and the data acquisition card (9) transmits the acquired output signal of the photoelectric detector (6) to the computer (10) for signal processing so as to realize the detection of the adhesive force of the liquid drops.
2. The micro-cantilever based droplet adhesion detection system of claim 1, wherein:
the liquid drops in the liquid holes of the microsyringe (4) are not contacted with the micro-beam (2) in the initial state, and the light spot of the laser beam emitted by the laser (1) after being reflected by the micro-cantilever is superposed with the central position of the detector (6);
firstly, controlling a sample injector bracket (5) to enable a microsyringe (4) to move downwards until liquid drops suspended in a liquid hole of the syringe are contacted with the upper surface of the free end of a micro-cantilever beam, the micro-cantilever beam deflects downwards, and the position of a light spot changes;
adjusting the sample injector support (5) again, dragging the liquid drop upwards to restore the micro beam to be in a parallel state, and enabling the light spot to coincide with the center of the detector again;
finally, controlling the sample injector bracket (5) to enable the micro sample injector (4) to move upwards, and enabling the liquid drops to drive the free end of the micro cantilever beam to generate upward deviation until the liquid drops are separated from the surface of the micro cantilever beam; and the offset of the micro-beam in the process of moving the liquid drop upwards is collected by a data acquisition card (9).
3. The micro-cantilever based droplet adhesion detection system of claim 1, wherein:
the photoelectric detector (6) is a four-quadrant detector, and the photosensitive target surface of the photoelectric detector (6) is a circular surface with an O point as a central point and an R point as a radius; the spot is O' (x)0,y0) A circular surface with a central point and a radius of r;
with IA、IB、ICAnd IDThe current intensities of the I, II, III and IV quadrants obtained by the detection of the photoelectric detector (6) are represented in a one-to-one correspondence manner;
when the position of a light spot on the photoelectric detector is changed, the output current intensity of each quadrant of the detector is changed, the relative offset of the light spot on the photosensitive surface is calculated according to the change of the photocurrent generated by the light spot by the following formula (1), and the bending deflection delta Z of the micro-cantilever beam is calculated by the formula (2):
wherein:
Kxthe detection sensitivity of the detector in the X-axis direction is obtained;
Kythe detection sensitivity of the detector in the Y-axis direction is obtained;
delta S is the linear offset of the central point of the light spot relative to the photosensitive target surface O;
l is the distance from the contact center point of the liquid drop and the micro-cantilever to the fixed end of the micro-cantilever;
l is the distance from the free end of the micro-cantilever to the photosensitive target surface of the photoelectric detector after the laser beam is reflected by the micro-cantilever;
then, the droplet adhesion force F is: f ═ k Δ Z
Wherein k is the spring constant of the micro-cantilever.
4. The micro-cantilever based droplet adhesion detection system of claim 1, wherein: the injector liquid hole of the microsyringe (4) is flat and is subjected to hydrophilic treatment to enhance the adhesive force between the liquid drop and the liquid hole.
5. The micro-cantilever based droplet adhesion detection system of claim 1, wherein: the capacity of the microsyringe is 10 mu L, and the diameter of a liquid hole of the injector is 0.05 mm; the laser is a semiconductor laser with output laser wavelength of 632nm-780 nm.
6. The micro-cantilever based droplet adhesion detection system of claim 1, wherein: the photoelectric detector (6) is a position sensitive sensor PSD.
7. The micro-cantilever based droplet adhesion detection system of claim 1, wherein: the micro cantilever beam is a rectangular single beam, the length of the beam is 500 mu m, the width of the beam is 9 mu m, and the thickness of the beam is 1 mu m.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115046921A (en) * | 2022-08-11 | 2022-09-13 | 四川至臻光电有限公司 | Testing method and testing device for representing film adhesion of plastic optical element |
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