CN114353699B - High-frequency-band aberration detection system and detection method for large-gradient convex optical free-form surface - Google Patents
High-frequency-band aberration detection system and detection method for large-gradient convex optical free-form surface Download PDFInfo
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Abstract
The invention discloses a system and a method for detecting high-frequency aberration of a large-gradient convex optical free-form surface, relates to the technical field of free-form surface optical detection, and aims to solve the technical problem of high-frequency aberration detection of the large-gradient convex optical free-form surface so as to guide the surface shape processing of a free-form surface optical element in the transition stage from grinding to polishing, remove surface shape residual errors as much as possible in the fine grinding stage, improve the convergence efficiency of optical free-form surface processing, and finally provide technical support for high-precision and high-performance optical free-form surface processing and detection. The invention comprises a high-frequency aberration detection system, a computer processing system and a light path clamping and adjusting system; the optical path clamping and adjusting system is used for adjusting the high-frequency aberration detection system; the detection system has the advantages of simple structure, low manufacturing cost, high measurement precision, large dynamic range of measurement slope, high spatial resolution and capability of measuring the slope of a large value which cannot be measured by an interferometer and Hartmann detection.
Description
Technical Field
The invention relates to the technical field of free-form surface optical detection, in particular to a high-frequency aberration detection system and a detection method for a large-gradient convex optical free-form surface.
Background
At present, the defects of China in the aspect of processing and producing high-precision photoelectric products are increasingly remarkable, and the industrial economic structure of China needs transformation urgently, so that the manufacturing industry is required to be accelerated to develop towards the direction of high technology and high added value. On one hand, the requirements of the fields of aerospace, navigation and the like on high-precision and high-quality photoelectric products are increasingly improved; on the other hand, in order to maintain and enhance the market competitiveness of products, the development cycle and production cycle of products are shorter and shorter, which promotes the development of these photoelectric products to be gradually miniaturized, high quality, small batch, multi-variety and low cost. Because the free-form surface has strong capability of correcting aberration and optimizing system structure, the performance index of the optical system can be improved, and higher degree of freedom is provided for the design of the optical system, so that the free-form surface is more and more favored by optical designers, and the application of the optical element with the free-form surface in modern photoelectric products is more and more extensive.
The optical free-form surface is a non-axisymmetric, irregular and randomly-structured surface, and the requirements on high precision and high performance of the optical free-form surface increase the processing and detection difficulty of the optical free-form surface, which is far more complex and difficult than the processing and detection of a spherical mirror. Especially, the detection of the high-frequency band aberration of the free-form surface of the convex surface with large steepness causes more limitations in the detection of the transition stage from grinding to polishing: insufficient measurement precision, immature technology, overlong detection period, undersized dynamic range, incapability of carrying out full-aperture in-situ detection and the like. As the prior art: (1) The three-coordinate measuring machine adopts a point-by-point scanning mode to carry out measurement, the measuring speed is low, and the full-field surface shape data of the element to be measured cannot be obtained at one time; the contourgraph can only measure the free-form surface with small deviation degree between the surface shape and the spherical base or the non-spherical base (the deviation between the local gradient and the global gradient is less than 5 degrees). (2) The swing arm type contour scanning method also has the problems of low measurement efficiency, errors in the whole surface shape splicing process and the like, and can only measure the off-axis aspheric surface type free-form surface at present, and no report is found on the research of measuring the high-freedom free-form surface with complicated shape, large local gradient change and difficult surface shape mathematical expression. (3) The shack-Hartmann wavefront detection method has the advantages of high measurement speed, high measurement precision, large dynamic measurement range and the like, but is influenced by the limitation of the size of a lens and the overlapping of light spots during the measurement of a large-gradient free-form surface. (4) the problems faced by the computer-generated holography are: the one-to-one compensation measurement mode causes poor measurement universality, so that the detection cost is high; for curved surface elements with large gradient, the CGH used as a compensator needs to realize the output of large gradient wave surface by a diffraction structure with high density, so the reticle density of the computer-generated hologram is limited by the current microstructure processing technology level. (5) the partial zero compensation technique faces the following problems: the more the test optical path deviates from the zero-position condition optical path, the larger the return error is, which brings great difficulty to the high-precision recovery of the detected surface shape; in the process of detecting the free-form surface by a partial zero compensation method, the alignment of the to-be-detected piece is difficult, and the surface shape detection precision is influenced; the non-rotational symmetry of the free-form surface can cause the interference pattern to generate non-rotational symmetric deformation, and the surface shape recovery precision is influenced. At present, the more complex free-form surface with large gradient change has fewer successful application cases. (6) When the inclined wave surface technology is used for measuring the large-caliber free curved surface, a large-caliber standard compensation lens is needed, the large-caliber standard compensation lens is very difficult to process, and the measuring caliber of the system is limited.
The invention aims to solve the technical problem of high-frequency-band aberration detection of a large-gradient convex optical free-form surface, guide the surface shape processing of a free-form surface optical element in the stage of transition from grinding to polishing, remove surface shape residual errors as much as possible in the stage of fine grinding, improve the convergence efficiency of optical free-form surface processing, provide theoretical reference and technical support for the research of optical free-form surface detection technology, promote the development of China in the technical field of high-precision and large-dynamic-range optical free-form surface detection, promote the progress in the aspect of high-performance photoelectric product processing, make a contribution to breaking monopoly of foreign high-precision free-form surface detection instruments and high-performance photoelectric product processing, and have important scientific significance.
Disclosure of Invention
The invention aims to solve the technical problem of detecting the shape of the large-gradient convex optical free-form surface, designs a high-frequency-range aberration detection system and a detection method for the large-gradient convex optical free-form surface, guides the surface shape processing of a free-form surface optical element in the stage from grinding to polishing, realizes the removal of surface shape residual errors as much as possible in the fine grinding stage, improves the convergence efficiency of the optical free-form surface processing, and finally provides technical support for the high-precision and high-performance optical free-form surface processing and detection.
The high-frequency aberration detection system of the large-gradient convex optical free-form surface comprises a high-frequency aberration detection system, a computer processing system and an optical path clamping and adjusting system; the optical path clamping and adjusting system is used for adjusting the high-frequency aberration detection system;
the high-frequency-band aberration detection system comprises a convex free-form surface to be detected, a light-emitting screen and a camera;
the computer processing system adopts a computer-aided ray tracing measurement method to preliminarily calibrate the structural parameters of the high-frequency aberration detection system, and then reversely optimizes the system element offset and inclination parameters including the convex free-form surface to be detected on the basis of preliminarily calibrating the structural parameters, so that effective correction of calibration errors is realized, and the distances among the light-emitting screen, the external pinhole and the convex free-form surface to be detected are obtained through calibration measurement;
in the calibration process, the external pinhole is arranged outside the camera lens, the light-emitting screen, the camera with the external pinhole and the convex free-form surface 1 to be measured are collimated, so that the optical axis of the camera 3 is superposed with the optical axis of the convex free-form surface 1 to be measured, the optical axis of the convex free-form surface 1 to be measured is parallel to the screen of the light-emitting screen 2, and the camera 3 is focused on the surface of the convex free-form surface 1 to be measured;
after the phase shift fringe pattern displaying the light intensity codes on the luminescent screen 2 passes through the convex free-form surface 1 to be detected, the phase shift fringe pattern is projected onto a focal plane of a corresponding camera through a camera pinhole to obtain the position of corresponding light, the wavefront slope is calculated according to the geometric relation of an optical system, the wavefront shape is reconstructed, and the wavefront aberration is calculated; obtaining a high-frequency section surface shape of the convex free-form surface to be detected;
the optical path clamping and adjusting system comprises an X-axis rotating table, a Y-axis rotating table, a Z-axis rotating table, a tooling piece, a single-axis connecting plate, a double-axis connecting plate and an air floatation vibration isolation platform;
the camera platform is fixed on the single-shaft connecting plate, the light-emitting screen is fixed on the double-shaft connecting plate, and the X-axis, Y-axis and Z-axis rotating platforms are fixed on the tooling part; the tool piece is vertically fixed on the air floatation vibration isolation platform, and the convex free-form surface to be measured is fixed on the X-axis rotating table, the Y-axis rotating table and the Z-axis rotating table through the clamping mechanism, so that the convex free-form surface to be measured can rotate around the X direction, the Y direction and the Z direction.
The method for detecting the high-frequency-band aberration of the optical free-form curved surface of the large-gradient convex surface is realized by the following steps:
and 3, processing the high-frequency aberration of the acquired image information by using a computer to obtain the surface shape information of the convex free-form surface to be detected.
The invention has the beneficial effects that: the invention provides a method for detecting high-frequency-band aberration of a high-steepness convex Optical free-form surface based on a computer modulated Optical detection System (SCOTS), which adopts a computer-assisted inverse Hartmann method to cooperatively measure the high-frequency-band aberration of the high-steepness convex Optical free-form surface, so as to solve the problems of insufficient measurement precision, immature technology, overlong detection period, small dynamic range, incapability of full-caliber in-situ detection and the like existing in the detection of a grinding-to-polishing transition stage, solve the technical problem of Optical free-form surface shape detection, guide surface shape processing of a free-form surface Optical element in the grinding-to-polishing transition stage, remove surface shape residual errors as much as possible in a fine grinding stage, improve the convergence efficiency of Optical free-form surface processing, and finally provide technical support for the high-precision and high-performance Optical free-form surface processing and detection. The detection system provided by the invention has the advantages of simple structure and low manufacturing cost, solves the problem of high-frequency-band aberration detection of the large-gradient convex optical free curve, has high measurement precision, large dynamic range of measurement slope and high spatial resolution, and can be used for measuring large numerical value slope which cannot be measured by an interferometer and Hartmann detection.
Drawings
FIG. 1 is a schematic diagram of the method for detecting high-frequency aberration of a high-steepness convex optical free-form surface according to the present invention;
FIG. 2 is a schematic diagram of a high-frequency aberration detection system for a large-steepness convex optical free-form surface;
FIG. 3 is a schematic diagram of a hardware structure in a high-frequency aberration detection system of a large-steepness convex optical free-form surface.
In the figure, 1, a convex free-form surface to be measured, 2, a luminescent screen, 3, a camera, 4, a pinhole, 5, a camera lens, 6, a target surface, 7, a computer, 8, an X-axis rotating platform, a Y-axis rotating platform, a Z-axis rotating platform, 9, a tooling part, 10, a single-axis connecting plate, 11, a double-axis connecting plate, 12 and an air flotation vibration isolation platform.
Detailed Description
In a first specific embodiment, the present embodiment is described with reference to fig. 1 to 3, and the high-frequency aberration detection system of the large-steepness convex optical free-form surface includes a high-frequency aberration detection system A1, a computer processing system A2, and an optical path clamping and adjusting system A3, where the optical path clamping and adjusting system A3 is used to adjust the high-frequency aberration detection system A1; the high-frequency-band aberration detection system A1 comprises a convex free-form surface 1 to be detected, a light-emitting screen 2 and a camera 3;
the high-frequency aberration detection system A1 takes a luminescent screen as a light source, a phase shift fringe pattern with light intensity coding displayed on the luminescent screen 2 passes through a convex free-form surface 1 to be detected and then is projected onto a corresponding camera focal plane 6 through a camera pinhole 4 and a camera lens 5, so that the position of corresponding light is obtained, the wavefront slope is calculated according to the geometric relationship of an optical system, the wavefront surface shape is reconstructed, and the wavefront aberration is calculated.
Because of the off-axis configuration in the detection system, it requires high calibration requirements for the system geometry, and therefore the calibration process of the calculation-aided optimization module is specifically performed in the issued patent (ZL 201911155752.4): 1. constructing an experimental system for detecting the aberration of the middle and high frequency bands, and performing pre-calibration on geometrical parameters of the system; 2. establishing a system model in the optical track tracking software; 3. obtaining a wavefront aberration W1 in a reverse Hartmann measurement system; 4. optimizing geometrical parameters of the system; 5. performing ray tracing in the system model to obtain updated wavefront aberration W2; 6. fitting W1 and W2 by using an orthogonal polynomial, and updating an objective function; 7. and if the objective function is smaller than the threshold epsilon, outputting a measured surface shape error Wsurf, otherwise, continuously optimizing the geometric parameters of the system, and repeating the steps 4 to 7.
The specific installation and adjustment (calibration) process of the high-frequency-band aberration detection system of the large-gradient convex optical free-form surface is as follows:
firstly, generating a group of horizontal and vertical sine phase shift fringe patterns on a luminescent screen 2;
since the corresponding relation between the pixel position on the luminescent screen 2 and the position of the convex free-form surface 1 to be measured illuminated by the luminescent screen needs to be determined, the pixel position on the screen needs to be encoded by light intensity, and a sine stripe pattern is selected for display. According to the screen size and the resolution of the luminescent screen 2, the number of the pixels of the sine stripes in one period is selected, and the actual size (unit millimeter) corresponding to the stripes in one period is determined. By using the phase shift technique, the phase shift step number N (adopting four-step phase shift) of the phase shift fringe is selected, and the phase shift fringe pattern modulated by the light intensity is obtained by using Matlab programming.
Secondly, collimating and calibrating a system consisting of the luminescent screen 2, the camera 3 and the convex free-form surface 1 to be measured to obtain the spatial coordinate positions of the luminescent screen, the camera and the convex free-form surface;
because the embodiment is different from the position relation between the luminescent screen 2 and the camera 3 in the granted patent (ZL 201911155752.4) and the position relation between the luminescent screen 2 and the convex free-form surface 1 to be measured, the calibration and adjustment difficulty is increased.
Thirdly, a phase shift fringe pattern displayed on the luminescent screen 2 deflected by the convex free-form surface 1 to be detected is photographed, and a group of horizontal and vertical phase shift fringe patterns are photographed as reference after the convex free-form surface 1 to be detected is removed;
the luminescent screen 2 displays a set of phase-shifted fringe patterns one after another, and the camera 3 takes pictures synchronously. And removing the convex free-form surface 1 to be measured, and then shooting a group of horizontal and vertical phase shift fringe patterns. Multiple sets of phase shifted fringe patterns are taken and averaged to eliminate the environmental effects.
And finally, combining the shot phase shift fringe pattern with a computer to perform phase expansion, calculating slope and restoring wavefront, and analyzing wavefront aberration according to the restored surface shape information of the lens to be detected.
And calculating a phase value corresponding to each pixel position of the luminescent screen 2 through a phase shift algorithm. And (4) performing phase expansion on the shot phase shift fringe pattern to obtain screen pixel positions corresponding to each part of the convex free-form surface 1 to be detected and calculating the slope. The resulting slope can be compared to the wavefront slope of an ideal test mirror. And finally, restoring the wavefront from the slope data so as to analyze the aberration. And converting the phase value into a world coordinate value according to the pose condition of the luminescent screen 2 in the world coordinate system and the pixel size of the luminescent screen 2.
In the embodiment, when the system is calibrated, the convex free-form surface 1 to be measured is kept perpendicular to the plane of the light-emitting screen 2. A certain point light source S (x) on the luminescent screen 2 s ,y s ,z s ) The emitted light is reflected by the corresponding mirror surface M (x) to be measured m ,y m ,z m ) After point reflection, the point passes through an external pinhole C (x) of the camera 3 c ,y c ,z c ) Finally, the corresponding image is obtained on the target surface 6 of the camera 3. It can also be considered that the light "emitted" by a certain pixel point on the target surface 6 of the camera passes through the pinhole 4 and then is reflected to the point S on the luminescent screen 2 by the point M on the convex free-form surface 1 to be measured. Each M point on the mirror surface to be measured is a sub-aperture or "mirror pixel" formed by dividing the camera pixel.
And (3) establishing a world coordinate system by taking the central position O of the surface to be measured as an original point and taking the tangent plane of the surface to be measured at the point O as an xOy plane (called a calibration plane). When the surface shape w (x) of the lens to be measured m ,y m ) Much smaller than the distance between the calibration plane and the camera 3 or the luminescent screen 2, i.e. w (x) m ,y m )＜＜z m2s And w (x) m ,y m )＜＜z m2c According to the triangulation principle, the slope of the M point on the convex free-form surface 1 of the lens to be measured can be obtained by the following formula:
in the formula z m2s And z m2c Respectively the z-direction distance of the calibration plane to the pixel point on the luminescent screen 2 and the pinhole 4 in the camera 3. Since a better initial value is needed in calculating the slope, an ideal surface shape model or a surface shape obtained by other detection methods can be used to provide a better initial surface shape estimate w 0 (x m ,y m ) W is to be 0 (x m ,y m ) Instead of w (x) in the formula m ,y m ) Then (x) is obtained m ,y m ) The x and y directional slope data of the position, and the surface shape w obtained by calculating the slope 1 (x m ,y m ) In place of w (x) in the formula m ,y m ) And then another group of slopes is obtained, and so on, the wavefront slope is repeatedly calculated in an iterative manner, the wavefront shape is reconstructed, the wavefront aberration is calculated, and the detected surface shape can be obtained.
In this embodiment, the computer processing system A2 generates a set of horizontal and vertical sinusoidal phase-shifted fringe patterns on the luminescent screen; the method comprises the following steps that a system consisting of a light-emitting screen 2, a camera 3 and a convex free-form surface 1 to be detected is collimated and calibrated by clamping and adjusting a light path, so that the optical axes of the camera and the convex free-form surface to be detected are superposed, the convex free-form surface to be detected is vertically placed with the light-emitting screen, the spatial position coordinates of the light-emitting screen, the camera and the convex free-form surface to be detected are obtained, the camera is focused on the surface of the convex free-form surface to be detected, and a computer-aided optimization module is adopted to effectively correct calibration errors; obtaining the distances among the light-emitting screen, the pinhole and the convex free-form surface to be measured which are calibrated and measured; shooting a phase shift fringe pattern displayed on a luminescent screen deflected by the convex free-form surface to be detected by a camera, removing the convex free-form surface to be detected, and shooting a group of horizontal and vertical phase shift fringe patterns as reference; and (3) performing phase expansion on the photographed phase shift fringe pattern by adopting a computer-aided optimization module, calculating the slope and recovering the wave front, and analyzing the wave front aberration according to the recovered surface shape information of the lens to be detected.
In this embodiment, the optical path clamping, installing and adjusting system A3 includes an X, Y, and Z axis rotary table 8, a tooling component 9, a single axis connection plate 10, a double axis connection plate 11, and an air-float vibration isolation platform 12; the optical axis of the camera 3 is coincident with the optical axis of the convex free-form surface 1 to be measured, and the optical axis of the convex free-form surface 1 to be measured is parallel to the screen of the luminescent screen 2 (namely, the convex free-form surface 1 to be measured and the luminescent screen 2 are in a vertical position relation), when the system is not collimated, the low-order aberration can be removed after the wavefront is recovered, and the measurement precision of the high-order aberration is ensured. The camera 3 is fixed on a single-shaft connecting plate 10, the light-emitting screen 2 is fixed on a double-shaft connecting plate 11, and the X-axis, Y-axis and Z-axis rotating tables 8 are fixed on the tooling part 9; the tool piece 9 is vertically fixed on the air flotation vibration isolation platform 12, and the clamping mechanism of the convex free-form surface 1 to be detected is fixed on the X-axis, Y-axis and Z-axis rotating platform 8, so that the clamped convex free-form surface 1 to be detected can rotate around the X direction, the Y direction and the Z direction.
In a second embodiment, the present embodiment is a method for detecting a high-frequency aberration of a high-steepness convex optical free-form surface according to the first embodiment, and the method is implemented by the following steps:
and 3, processing the high-frequency aberration of the acquired image information by using a computer to obtain the surface shape information of the convex free-form surface 1 to be detected.
Claims (4)
1. The high-frequency-band aberration detection system of the large-gradient convex optical free-form surface comprises a high-frequency-band aberration detection system (A1), a computer processing system (A2) and a light path clamping and adjusting system (A3), wherein the light path clamping and adjusting system (A3) is used for adjusting the high-frequency-band aberration detection system (A1); the method is characterized in that:
the high-frequency-band aberration detection system (A1) comprises a convex free-form surface (1) to be detected, a light-emitting screen (2) and a camera (3);
the computer processing system (A2) adopts a computer-aided ray tracing measurement method to preliminarily calibrate the structural parameters of the high-frequency aberration detection system (A1), and then reversely optimizes the system element offset and inclination parameters including the convex free-form surface (1) to be detected on the basis of preliminarily calibrating the structural parameters, so that effective calibration error is realized, and the distance between the luminescent screen (2), the external pinhole (4) and the convex free-form surface (1) to be detected is obtained through calibration measurement;
in the calibration process, the external pinhole (4) is arranged outside a lens of the camera (3), the luminescent screen (2), the camera (3) with the external pinhole and the convex free-form surface (1) to be detected are collimated, so that the optical axis of the camera (3) is superposed with the optical axis of the convex free-form surface (1) to be detected, the optical axis of the convex free-form surface (1) to be detected is parallel to the screen of the luminescent screen (2), and the camera (3) is focused on the surface of the convex free-form surface (1) to be detected;
after a phase shift fringe pattern displaying a light intensity code on the luminescent screen (2) passes through the convex free-form surface (1) to be detected, the phase shift fringe pattern is projected onto a focal plane of a corresponding camera through a camera pinhole to obtain the position of a corresponding light ray, the wavefront slope is calculated according to the geometric relation of an optical system, the wavefront shape is reconstructed, and the wavefront aberration is calculated; obtaining the high-frequency section surface shape of the convex free-form surface (1) to be detected;
the optical path clamping and adjusting system (A3) comprises an X-axis, Y-axis and Z-axis rotating table (8), a tooling part (9), a single-axis connecting plate (10), a double-axis connecting plate (11) and an air-float vibration isolation platform (12);
the camera (3) is fixed on the single-shaft connecting plate (10), the light-emitting screen (2) is fixed on the double-shaft connecting plate (11), and the X-axis, Y-axis and Z-axis rotating tables (8) are fixed on the tooling part (9); the tool piece (9) is vertically fixed on the air floatation vibration isolation platform (12), and the convex free-form surface (1) to be measured is fixed on the X, Y and Z axis rotating platform (8) through a clamping mechanism, so that the rotation in the X, Y and Z directions of the convex free-form surface (1) to be measured is realized.
2. The high-band aberration detection system of large steepness convex optical free-form surface according to claim 1, wherein:
determining the corresponding relation between the pixel position on the luminescent screen and the position of the convex free-form surface to be tested illuminated by the luminescent screen according to the phase-shift fringe pattern displayed on the luminescent screen, coding the pixel position of the screen by adopting light intensity, selecting a sine fringe pattern to display, selecting the number of pixels of a period of sine fringes according to the screen size and the resolution of the luminescent screen, and determining the actual size corresponding to the period fringe; and selecting the phase shift step number N of the phase shift fringe by using a phase shift technology, and obtaining a phase shift fringe pattern modulated by the light intensity by using Matlab programming.
3. The high-band aberration detection system of large steepness convex optical free-form surface according to claim 1, wherein: the computer processing system (A2) acquires a group of sinusoidal phase shift fringe patterns in the horizontal direction and the vertical direction generated on the luminescent screen (2), selects the phase shift step number N of the phase shift fringe by using a phase shift technology, and programs to obtain the phase shift fringe pattern modulated by the light intensity; shooting a phase shift fringe pattern displayed on the luminescent screen (2) deflected by the convex free-form surface (1) to be detected, and then shooting a group of horizontal and vertical phase shift fringe patterns as reference after removing the convex free-form surface (1) to be detected; and performing phase expansion, slope calculation and wavefront recovery on the shot phase shift fringe pattern according to a computer processing system (A2), and analyzing wavefront aberration according to the recovered wavefront of the to-be-detected convex free-form surface optical system.
4. The method for detecting the high-frequency-band aberration of the large-gradient convex optical free curved surface is characterized by comprising the following steps of: the method is realized on the basis of the high-frequency-band aberration detection system of the large-gradient convex optical free-form surface as claimed in any one of claims 1 to 3, and the method is realized by the following steps:
step 1, constructing and adjusting a high-frequency-band aberration detection system;
step 2, collecting image information of the convex free-form surface (1) to be detected by adopting the adjusted high-frequency aberration detection system;
and 3, processing the acquired image information by using a computer through high-frequency aberration to obtain the surface shape information of the convex free-form surface (1) to be detected.
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| 夏克—哈特曼波前传感器检测大口径非球面应用研究;张金平;《中国博士学位论文全文数据库》;20120915;全文 * |
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