CN114335097A - Display substrate, manufacturing method thereof and display device - Google Patents

Display substrate, manufacturing method thereof and display device Download PDF

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Publication number
CN114335097A
CN114335097A CN202111611813.0A CN202111611813A CN114335097A CN 114335097 A CN114335097 A CN 114335097A CN 202111611813 A CN202111611813 A CN 202111611813A CN 114335097 A CN114335097 A CN 114335097A
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China
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pixel
opening area
sub
area
opening
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张渊明
王好伟
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BOE Technology Group Co Ltd
Beijing BOE Technology Development Co Ltd
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BOE Technology Group Co Ltd
Beijing BOE Technology Development Co Ltd
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Priority to CN202111611813.0A priority Critical patent/CN114335097A/en
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Abstract

The invention provides a display substrate, a manufacturing method thereof and a display device. The display substrate comprises a plurality of pixel units, each pixel unit comprises a non-opening area and opening areas of a plurality of sub-pixels, and the opening areas of the sub-pixels comprise a first opening area, a second opening area and a third opening area; the first opening area and the second opening area are positioned in the same circle, the third opening area is positioned outside the circle, and the area of the first opening area and the area of the second opening area are both larger than twice of the area of the third opening area. According to the display substrate provided by the embodiment of the invention, the first opening area and the second opening area in the opening areas of the plurality of sub-pixels are arranged in the same circle, the third opening area is positioned outside the circle, and the area of the first opening area and the area of the second opening area are both larger than twice of the area of the third opening area, so that the pixel resolution can be effectively improved, and the display effect is improved.

Description

Display substrate, manufacturing method thereof and display device
Technical Field
The invention relates to the technical field of display, in particular to a display substrate, a manufacturing method thereof and a display device.
Background
With the continuous development of display technology, people have higher and higher requirements on the definition of image display, and therefore, high resolution has become a great development trend of the current display panel. The resolution generally refers to the number of pixels of the display panel, and the more pixels of the display panel, the finer the displayed picture.
At present, to improve the resolution of the display panel, the resolution is generally achieved by increasing the number of pixels of the display panel, and especially for the display panel with a fixed screen size, the resolution can only be achieved by increasing the number of pixels per unit area, that is, reducing the area of the pixels. However, the smaller the area of the pixel in the display panel, the more difficult the manufacturing process and the higher the cost. The traditional pixel arrangement mode is combined with an ink-jet printing process, and the resolution is usually about 300, and the highest resolution cannot reach more than 400.
Disclosure of Invention
In view of the above, the present invention provides a display substrate, a manufacturing method thereof and a display device, which can solve the problem in the related art that the pixel resolution of the display panel cannot be further improved, so as to improve the display effect.
In order to solve the technical problems, the invention adopts the following technical scheme:
an embodiment of an aspect of the present invention provides a display substrate, where the display substrate includes a plurality of pixel units, each of the pixel units includes a non-open area and a plurality of open areas of sub-pixels, and the open areas of the sub-pixels include a first open area, a second open area, and a third open area;
the first opening area and the second opening area are positioned in the same circle, the third opening area is positioned outside the circle, and the area of the first opening area and the area of the second opening area are both larger than twice of the area of the third opening area.
Optionally, a planar shape of any one of the first open area, the second open area, and the third open area is any one of a circle, an ellipse, and a regular polygon having a side length number greater than or equal to 6.
Optionally, the non-opening area is formed by a first pixel isolation structure and a second pixel isolation structure, the first pixel isolation structure has a circular opening, and the second pixel isolation structure is disposed in the circular opening and divides the circular opening into two parts to form the first opening area and the second opening area.
Optionally, an included angle formed between the second pixel isolation structure and the first pixel isolation structure is an obtuse angle, and a distance between two farthest points on the second pixel isolation structure is greater than two-thirds of the diameter of the circular opening and smaller than the diameter of the circular opening.
Optionally, the height of the first pixel isolation structure in the direction perpendicular to the display panel is 1 to 2 μm, the height of the second pixel isolation structure in the direction perpendicular to the display panel is 1.5 to 3.5 μm, and the height of the second pixel isolation structure in the direction perpendicular to the display panel is greater than the height of the first pixel isolation structure in the direction perpendicular to the display panel.
Optionally, the first opening area and the second opening area are both elliptical, the area of the first opening area and the area of the second opening area are both greater than or equal to one fourth of the circular area, and the area of the third opening area is less than one fourth of the circular area.
Another embodiment of the present invention further provides a manufacturing method of a display substrate, where the manufacturing method includes:
providing a substrate, and forming a plurality of pixel units on the substrate, wherein each pixel unit comprises a non-opening area and a plurality of opening areas of sub-pixels, and the opening areas of the sub-pixels comprise a first opening area, a second opening area and a third opening area;
the first opening area and the second opening area are positioned in the same circle, the third opening area is positioned outside the circle, and the area of the first opening area and the area of the second opening area are both larger than twice of the area of the third opening area.
Optionally, the forming of the plurality of pixel units on the substrate includes:
forming a first sub-pixel and a second sub-pixel of the pixel unit on the substrate, and forming a third sub-pixel of the pixel unit on the substrate;
or, forming a third sub-pixel of the pixel unit on the substrate, and then forming a first sub-pixel and a second sub-pixel of the pixel unit on the substrate on which the third sub-pixel is formed;
wherein the opening area of the first sub-pixel is the first opening area, the opening area of the second sub-pixel is the second opening area, and the opening area of the third sub-pixel is the third opening area.
Optionally, the forming the first sub-pixel and the second sub-pixel of the pixel unit on the substrate and then forming the third sub-pixel of the pixel unit on the substrate first includes:
manufacturing a first pixel isolation structure and a second pixel isolation structure on the substrate to form a non-opening area of the pixel unit, an opening area of the first sub-pixel, an opening area of the second sub-pixel and an opening area of the third sub-pixel;
forming a first light emitting layer in the first opening region and the second opening region using an inkjet printing process, and forming a second light emitting layer in the third opening region using an electrospray technique.
Optionally, the forming a third sub-pixel of the pixel unit on the substrate, and then forming a first sub-pixel and a second sub-pixel of the pixel unit on the substrate on which the third sub-pixel is formed includes:
coating a photoresist layer on the substrate and patterning to form a plurality of opening regions of the third sub-pixels;
stripping the photoresist layer after forming a second light emitting layer in the opening area of the third sub-pixel;
manufacturing a first pixel isolation structure and a second pixel isolation structure on the substrate to form a non-opening area of the pixel unit, an opening area of the first sub-pixel and an opening area of the second sub-pixel;
and forming a second light emitting layer in the opening region of the first sub-pixel and the opening region of the second sub-pixel.
In an embodiment of another aspect of the present invention, there is also provided a display device, which includes the display substrate as described in the above embodiments.
The technical scheme of the invention has the following beneficial effects:
in the embodiment of the invention, the first opening area and the second opening area in the opening areas of the plurality of sub-pixels are arranged in the same circle, the third opening area is arranged outside the circle, and the area of the first opening area and the area of the second opening area are both larger than twice of the area of the third opening area, so that the pixel resolution can be effectively improved and the display effect can be improved.
Drawings
Fig. 1 is a schematic structural diagram of a display substrate according to an embodiment of the present invention;
FIG. 2 is an enlarged schematic view of a second pixel isolation structure according to an embodiment of the present invention;
fig. 3 is a second schematic structural diagram of a display substrate according to an embodiment of the invention;
fig. 4 is a schematic flow chart illustrating a manufacturing method of a display substrate according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention, are within the scope of the invention.
In the related art, the pixel light emitting layer can be manufactured by an inkjet printing process, the nozzles used for inkjet printing are 30pl, 10pl, 7pl, 4pl, 2pl, 1pl and the like, the inkjet printing is limited in precision, and at present, the stable impact precision of +/-5 μm cannot be achieved, the impact precision represents the deviation degree of the actual position and the preset position of the inkjet printing, the theoretical pixel resolution limit obtained by the inkjet printing is 350ppi, and the pixel resolution is difficult to improve.
Accordingly, an embodiment of an aspect of the present invention provides a display substrate, which includes a plurality of pixel units, each pixel unit including a non-open area and open areas of a plurality of sub-pixels, the open areas of the plurality of sub-pixels including a first open area, a second open area, and a third open area; wherein the first opening area and the second opening area are positioned in the same circle, the circle can be an actual circular structure or a virtual circle, and the third opening area is positioned outside the circle; further, the sizes of the first opening area, the second opening area, and the third opening area are not all equal, and more specifically, the area of the first opening area and the area of the second opening area are both larger than twice the area of the third opening area. The first opening area and the second opening area are designed in a circle, so that the occupied area can be reduced, the area of the third opening area is smaller than one half of the area of the first opening area and the area of the second opening area, namely, the area of the third opening area is designed to be smaller, the luminous layers of the first opening area and the second opening area are still prepared by adopting an ink-jet printing process, and the luminous layer of the third opening area can be prepared by processes except ink-jet printing, such as a photoetching process, an electric jet printing technology and the like, so that the whole pixel area is reduced, the pixel resolution is improved, different opening areas adopt different processes, the pixel manufacturing cost and time are balanced, the pixel resolution is improved, and a better effect is achieved.
Therefore, the plurality of sub-pixels are arranged in the arrangement mode, namely, the first opening area and the second opening area in the opening areas of the plurality of sub-pixels are arranged in the same circle, the third opening area is positioned outside the circle, and the area of the first opening area and the area of the second opening area are both larger than twice of the area of the third opening area, so that the pixel resolution can be effectively improved, and the display effect is improved.
In some embodiments of the present invention, the plurality of sub-pixels includes a red sub-pixel, a green sub-pixel, and a blue sub-pixel, wherein the first open area is an open area of the red sub-pixel, the second open area is an open area of the green sub-pixel, and the third open area is an open area of the blue sub-pixel.
In some embodiments of the present invention, the area of the first open region, the area of the second open region, and the area of the third open region may be areas of patterns formed by orthographic projection outlines of the first open region, the second open region, and the third open region on a side of the display substrate facing away from the pixel unit.
In some embodiments of the present invention, the radius of the circle where the first opening area and the second opening area are located is in a range of 10 μm to 25 μm, and the light emitting layer in the first opening area and the second opening area can be prepared by ink jet printing; the third opening area can be surrounded by a minimum circle, the radius of the minimum circle ranges from 6.35 mu m to 9 mu m, and the light-emitting layer in the third opening area is not suitable for being prepared by ink-jet printing in consideration of the impact precision of ink-jet printing and can be prepared by a photoetching process, an electrospray printing technology and the like. It should be noted that, the areas of the first opening region, the second opening region and the third opening region are set to different sizes, so that the first opening region, the second opening region and the third opening region can be applied to different manufacturing processes of the light emitting layer.
In some embodiments of the present invention, a planar shape of any one of the first open area, the second open area, and the third open area is any one of a circle, an ellipse, and a regular polygon having a number of sides greater than or equal to 6. That is, the first opening region may have any one of a circular shape, an elliptical shape, a regular polygon having a side number of 6 or more, and the like, the second opening region may have any one of a circular shape, an elliptical shape, a regular polygon having a side number of 6 or more, and the like, the third opening region may have any one of a circular shape, an elliptical shape, a regular polygon having a side number of 6 or more, and the like, and the planar shapes of the first opening region, the second opening region, and the third opening region may be the same or different.
Referring to fig. 1 and fig. 2, fig. 1 is a schematic structural diagram of a display substrate according to an embodiment of the present invention, and fig. 2 is an enlarged schematic structural diagram of a second pixel isolation structure according to an embodiment of the present invention. As shown in fig. 1 and 2, in some embodiments of the present invention, the non-opening area is formed by a first pixel isolation structure 11 and a second pixel isolation structure 12, wherein the first pixel isolation structure 11 has a circular opening, the second pixel isolation structure 12 is disposed in the circular opening formed by the first pixel isolation structure 11, and the second pixel isolation structure 12 divides the circular opening into two parts, thereby forming a first opening area 101 and a second opening area 102, i.e., the two parts divided by the second pixel isolation structure 12 correspond to the first opening area 101 and the second opening area 102, respectively. That is, the planar shape of the first and second opening regions 101 and 102 may be an irregular shape.
In some embodiments of the present invention, the orthographic shape of the second pixel isolation structure 12 on the surface of the display substrate 10 facing away from the pixel unit may be a straight line, an arc line, or other irregular line shape.
In some embodiments of the present invention, the first pixel isolation structure 11 and the second pixel isolation structure 12 may be integrally disposed or separately disposed.
In some embodiments of the present invention, an included angle between the second pixel isolation structure 12 and the first pixel isolation structure 11 is an obtuse angle, that is, any inner angle formed by the edge profile of the first opening region 101 is an obtuse angle, and any inner angle formed by the edge profile of the second opening region 102 is an obtuse angle, and the obtuse opening structure facilitates the light-emitting layer to spread out in the first opening region 101 and the second opening region 102 during inkjet printing, so as to form a light-emitting layer with a uniform thickness. Here, the angle formed by the second pixel isolation structure 12 and the first pixel isolation structure 11 may be represented by an angle formed by tangents at corresponding positions on the two lines when the angle is not formed by two straight lines.
In some embodiments of the present invention, in order to make an obtuse angle between the second pixel isolation structure 12 and the first pixel isolation structure 11, both ends of the second pixel isolation structure 12 may be configured to have a shape with a certain arc. Alternatively, since the second pixel isolation structure 12 divides the circular opening of the first pixel isolation structure 11 into two parts, two end parts of the second pixel isolation structure 12 may be set to have a certain thickness, and of the two end parts, a surface enclosing the first opening region 101 has a curvature, and a surface enclosing the second opening region 102 also has a curvature.
In some embodiments of the present invention, the distance between the farthest two points on the second pixel isolation structure 12 is greater than two-thirds of the diameter of the circular opening where the first opening region 101 and the second opening region 102 are located, and is smaller than the diameter of the circular opening. By such a design, the first opening area 101 and the second opening area 102 can be designed to be unequal in size, and the smaller one of the first opening area 101 and the second opening area 102 is not too small, thereby ensuring the luminous display effect of the pixel unit.
In some embodiments of the present invention, the two farthest points on the second pixel isolation structure 12 may be two farthest points in the orthographic projection of the second pixel isolation structure 12 on the surface of the display substrate 10 facing away from the pixel unit.
In some embodiments of the present invention, the height of the first pixel isolation structure 11 in the direction perpendicular to the display panel (display plane) is 1-2 μm, and the height of the second pixel isolation structure 12 in the direction perpendicular to the display panel is 1.5-3.5 μm. By setting the heights of the first pixel isolation structure 11 and the second pixel isolation structure 12 to the above values, and setting the height of the second pixel isolation structure 12 to be greater than the height of the first pixel isolation structure, it is possible to avoid mixing of light emitting layer materials of different colors when preparing light emitting layers in the first opening region 101 and the second opening region 102 by an inkjet printing process as much as possible, ensure the purity of the respective light emitting layers, and ensure the light emitting effect.
In some embodiments of the present invention, the second pixel isolation structure 12 is made of an organic material containing fluorine, which has better hydrophobicity and is helpful for improving the flatness of the organic layer.
Referring to fig. 3, fig. 3 is a second schematic structural diagram of a display substrate according to an embodiment of the invention. In other embodiments of the present invention, as shown in FIG. 3, the first open area 101 and the second open area 102 are both oval, the area of the first open area 101 and the area of the second open area 102 are both greater than or equal to one quarter of the area of a circle in which they are located, and the area of the third open area 103 is less than one quarter of the area of the circle. By setting the opening area of the pixel to the above form, the pixel resolution can be improved.
In some embodiments of the present invention, the non-opening region is formed by the first pixel isolation structure 11, wherein the first pixel isolation structure 11 has the first opening region 101 and the second opening region 102.
In some embodiments of the present invention, the pixel resolution of the display substrate 10 may reach 500 ppi.
In summary, in the embodiment of the present invention, the first opening area and the second opening area in the opening areas of the plurality of sub-pixels are disposed in the same circle, the third opening area is disposed outside the circle, and the area of the first opening area and the area of the second opening area are both greater than twice the area of the third opening area, so that the pixel resolution can be effectively improved, and the display effect can be improved.
Referring to fig. 4, fig. 4 is a schematic flow chart illustrating a manufacturing method of a display substrate according to an embodiment of the invention. As shown in fig. 4, another embodiment of the present invention further provides a manufacturing method of a display substrate, where the manufacturing method can be used to prepare the display substrate described in the above embodiment, and the manufacturing method includes the following steps:
step 401: providing a substrate, and forming a plurality of pixel units on the substrate, wherein each pixel unit comprises a non-opening area and a plurality of opening areas of sub-pixels, and the opening areas of the sub-pixels comprise a first opening area, a second opening area and a third opening area;
the first opening area and the second opening area are positioned in the same circle, the third opening area is positioned outside the circle, and the area of the first opening area and the area of the second opening area are both larger than twice of the area of the third opening area.
In the embodiment of the invention, the area occupied by the first opening area and the second opening area can be reduced by designing the first opening area and the second opening area in a concentric circle, the area of the third opening area is smaller than half of the area of the first opening area and the area of the second opening area, namely the area of the third opening area is designed to be smaller, the luminous layers of the first opening area and the second opening area are still prepared by adopting an ink-jet printing process, and the luminous layer of the third opening area can be prepared by adopting processes except the ink-jet printing, such as a photoetching process, an electronic jet printing technology and the like, so that the whole pixel area is reduced, the pixel resolution is improved, different opening areas adopt different processes, the pixel manufacturing cost and time are balanced, the pixel resolution is improved, and a better effect is achieved.
In some embodiments of the invention, the forming a plurality of pixel cells on the substrate comprises:
forming a first sub-pixel and a second sub-pixel of the pixel unit on the substrate, and forming a third sub-pixel of the pixel unit on the substrate;
or, forming a third sub-pixel of the pixel unit on the substrate, and then forming a first sub-pixel and a second sub-pixel of the pixel unit on the substrate on which the third sub-pixel is formed;
wherein the opening area of the first sub-pixel is the first opening area, the opening area of the second sub-pixel is the second opening area, and the opening area of the third sub-pixel is the third opening area.
That is to say, in the embodiment of the present invention, the first sub-pixel and the second sub-pixel may be manufactured first, and then the third sub-pixel may be manufactured, or the third sub-pixel may be manufactured first, and then the first sub-pixel and the second sub-pixel are manufactured, where the light emitting layers of the first sub-pixel and the second sub-pixel may be manufactured by using the same process, specifically, an inkjet printing process, and the light emitting layer of the third sub-pixel may be manufactured by using a process different from that of the first sub-pixel and the second sub-pixel, specifically, an electro-jet printing technology, a photolithography process, and the like. Therefore, through the pixel design mode, the sub-pixels are manufactured by adopting different processes, so that the manufacturing cost and difficulty of the display substrate added by each different process can be balanced, and the pixel resolution can be improved.
In the embodiment of the present invention, optionally, the first sub-pixel is a red sub-pixel, the second sub-pixel is a green sub-pixel, and the third sub-pixel is a blue sub-pixel.
The following exemplarily describes the two different sequences of sub-pixel fabrication processes.
In some embodiments of the present invention, the forming the first sub-pixel and the second sub-pixel of the pixel unit on the substrate and then forming the third sub-pixel of the pixel unit on the substrate includes:
manufacturing a first pixel isolation structure and a second pixel isolation structure on the substrate to form a non-opening area of the pixel unit, an opening area of the first sub-pixel, an opening area of the second sub-pixel and an opening area of the third sub-pixel;
forming a first light emitting layer in the first opening region and the second opening region using an inkjet printing process, and forming a second light emitting layer in the third opening region using an electrospray technique.
Illustratively, a structure such as a driving circuit layer can be formed on the substrate, and a cathode pattern, an electron transport layer, an electron injection layer and the like are sequentially formed on the substrate; then, a first pixel isolation structure and a second pixel isolation structure are manufactured on the obtained substrate, the first pixel isolation structure forms a circular opening, the second pixel isolation structure is arranged in the circular opening and divides the circular opening into two parts to form a first opening area and a second opening area, and the first pixel isolation structure also forms an opening area of a third sub-pixel; then, carrying out ink jet printing in the first opening area and the second opening area through an ink jet printing process to form a light-emitting layer of the first sub-pixel and a light-emitting layer of the second sub-pixel, and carrying out ink jet printing in the third opening area by adopting an electrospray printing technology to form a light-emitting layer of the third sub-pixel; and subsequently, continuously manufacturing a hole injection layer, a hole transport layer, an anode pattern and the like, and finally packaging to obtain the display substrate.
In other embodiments of the present invention, the forming the third sub-pixel of the pixel unit on the substrate and then forming the first sub-pixel and the second sub-pixel of the pixel unit on the substrate on which the third sub-pixel is formed includes:
coating a photoresist layer on the substrate and patterning to form a plurality of opening regions of the third sub-pixels;
stripping the photoresist layer after forming a second light emitting layer in the opening area of the third sub-pixel;
manufacturing a first pixel isolation structure and a second pixel isolation structure on the substrate to form a non-opening area of the pixel unit, an opening area of the first sub-pixel and an opening area of the second sub-pixel;
and forming a second light emitting layer in the opening region of the first sub-pixel and the opening region of the second sub-pixel.
Illustratively, a structure such as a driving circuit layer can be formed on the substrate, and a cathode pattern and the like are formed on the substrate in sequence; then, spin-coating photoresist on the obtained substrate for exposure patterning, so that the formed photoresist layer is provided with a plurality of opening areas of third sub-pixels; then, spin-coating an electron transport layer, an electron injection layer, a light-emitting layer and the like on the whole surface in sequence, and then stripping the photoresist, so that the electron transport layer, the electron injection layer and the light-emitting layer can be formed only in the opening area of the third sub-pixel in a deposition manner, and the electron transport layer, the electron injection layer, the light-emitting layer and the like on the rest area are stripped along with the photoresist; then, continuously manufacturing a first pixel isolation structure and a second pixel isolation structure on the substrate to form a non-opening area of the pixel unit, an opening area of the first sub-pixel and an opening area of the second sub-pixel, when manufacturing the first pixel isolation structure and the second pixel isolation structure, protecting the third sub-pixel (namely covering the opening area of the third sub-pixel) by adopting a mode of coating protective glue so as to avoid influencing the structures such as the luminous layer of the manufactured third sub-pixel, and removing the protective glue after the preparation of the luminous layers of the subsequent first sub-pixel and the second sub-pixel is finished; after the opening area of the first sub-pixel and the opening area of the second sub-pixel are formed, the light emitting layers of the first sub-pixel and the second sub-pixel can be prepared by adopting ink jet printing and other processes; after the light emitting layers of the first sub-pixel, the second sub-pixel and the third sub-pixel are manufactured, the manufacture of the hole injection layer, the hole transport layer, the anode pattern and the like can be integrally continued, and finally the display substrate is obtained through encapsulation.
In some embodiments of the present invention, optionally, the light emitting layer in the sub-pixel may be an organic light emitting layer, or a quantum dot light emitting layer, and the present invention is not limited specifically.
In the embodiment of the invention, the area occupied by the first opening area and the second opening area can be reduced by designing the first opening area and the second opening area in a concentric circle, the area of the third opening area is smaller than half of the area of the first opening area and the area of the second opening area, namely the area of the third opening area is designed to be smaller, the luminous layers of the first opening area and the second opening area are still prepared by adopting an ink-jet printing process, and the luminous layer of the third opening area can be prepared by adopting processes except the ink-jet printing, such as a photoetching process, an electronic jet printing technology and the like, so that the whole pixel area is reduced, the pixel resolution is improved, different opening areas adopt different processes, the pixel manufacturing cost and time are balanced, the pixel resolution is improved, and a better effect is achieved.
Therefore, the plurality of sub-pixels on the prepared display substrate are arranged in the arrangement mode, namely, the first opening area and the second opening area in the opening areas of the plurality of sub-pixels are arranged in the same circle, the third opening area is positioned outside the circle, and the area of the first opening area and the area of the second opening area are both larger than twice of the area of the third opening area, so that the pixel resolution can be effectively improved, and the display effect is improved.
The following describes a method for manufacturing a display substrate according to an embodiment of the present invention.
In some embodiments of the invention, the method of making comprises the steps of:
step 51: depositing a layer of Mg-doped ZnO on a substrate with a driving circuit, wherein ZnMgO can be deposited by adopting a sputter process, the deposition thickness is 20-70 nm, the doping proportion of Mg can be 1-40%, the deposition process can select the process conditions of oxygen introduction and the like, and the flow of oxygen can be controlled to be 0-10 sccm;
step 52: carrying out patterned etching on ZnMgO;
step 53: preparing a first pixel isolation structure and a second pixel isolation structure on a ZnMgO back plate to form a first opening region and a second opening region;
step 54: carrying out ink jet printing on the first sub-pixel and the second sub-pixel by adopting an ink jet printing process, carrying out ink jet printing on the third sub-pixel by using an ink jet printing technology, and when the resolution of the display substrate is 500ppi, placing the display substrate in an electric field after the ink jet is finished, and carrying out an SPD (selective electrophoretic deposition) film forming process, wherein the SPD film forming process is beneficial to deposition and layering of a luminescent layer, so that the uniformity of the thickness of the luminescent layer is improved; taking the display substrate out of the electric field, placing the display substrate in a reduced pressure drying chamber (VCD) to remove the redundant solvent, and finally forming the light emitting layers of the first sub-pixel and the second sub-pixel;
step 55: depositing a hole transport layer/a hole injection layer and an electrode by using an evaporation process, wherein the hole transport layer/the hole injection layer can be an existing evaporation material;
step 56: and packaging to obtain the final display substrate.
In other embodiments of the present invention, the method of making includes the steps of:
step 61: sequentially forming a cathode pattern and the like on a substrate on which a driving circuit is formed;
step 62: spin-coating photoresist on the front surface, and performing exposure patterning to form an opening region with a plurality of third sub-pixels on the photoresist layer;
and step 63: spin-coating an electron transport layer, an electron injection layer, a light emitting layer and the like on the whole surface in sequence, and then stripping the photoresist, namely depositing the electron transport layer, the electron injection layer and the light emitting layer only in the opening area of the third sub-pixel, and stripping the electron transport layer, the electron injection layer, the light emitting layer and the like on the rest areas along with the photoresist;
step 64: preparing a first pixel isolation structure and a second pixel isolation structure to form a first opening area and a second opening area;
step 65: carrying out ink jet printing on the first sub-pixel and the second sub-pixel by adopting an ink jet printing process, when the resolution of the display substrate is 500ppi, placing the display substrate in an electric field after the ink jet is finished, and carrying out an SPD (selective electrophoretic deposition) film forming process, wherein the SPD film forming process is beneficial to deposition and layering of a luminescent layer, and then the uniformity of the thickness of the luminescent layer is improved; taking the display substrate out of the electric field, placing the display substrate in a reduced pressure drying chamber (VCD) to remove the redundant solvent, and finally forming the light emitting layers of the first sub-pixel and the second sub-pixel;
and step 66: depositing a hole transport layer/a hole injection layer and an electrode by using an evaporation process, wherein the hole transport layer/the hole injection layer can be an existing evaporation material;
step 67: and packaging to obtain the final display substrate.
In the embodiment of the invention, the area occupied by the first opening area and the second opening area can be reduced by designing the first opening area and the second opening area in a concentric circle, the area of the third opening area is smaller than half of the area of the first opening area and the area of the second opening area, namely the area of the third opening area is designed to be smaller, the luminous layers of the first opening area and the second opening area are still prepared by adopting an ink-jet printing process, and the luminous layer of the third opening area can be prepared by adopting processes except the ink-jet printing, such as a photoetching process, an electronic jet printing technology and the like, so that the whole pixel area is reduced, the pixel resolution is improved, different opening areas adopt different processes, the pixel manufacturing cost and time are balanced, the pixel resolution is improved, and a better effect is achieved.
Optionally, an embodiment of the present invention further provides a display device, where the display device includes the display substrate in the foregoing method or device embodiment, and the same technical effect can be achieved, and details are not repeated here to avoid repetition.
While the foregoing is directed to embodiments of the present invention, it will be appreciated by those skilled in the art that various changes and modifications may be made without departing from the principles of the invention, and it is intended that all such changes and modifications be considered as within the scope of the invention.

Claims (11)

1. A display substrate is characterized in that the display substrate comprises a plurality of pixel units, each pixel unit comprises a non-opening area and a plurality of opening areas of sub-pixels, and the opening areas of the sub-pixels comprise a first opening area, a second opening area and a third opening area;
the first opening area and the second opening area are positioned in the same circle, the third opening area is positioned outside the circle, and the area of the first opening area and the area of the second opening area are both larger than twice of the area of the third opening area.
2. The display substrate according to claim 1, wherein a planar shape of any one of the first open region, the second open region, and the third open region is any one of a circle, an ellipse, and a regular polygon having a number of sides of 6 or more.
3. The display substrate according to claim 1, wherein the non-opening region is composed of a first pixel isolation structure having a circular opening and a second pixel isolation structure disposed in the circular opening and dividing the circular opening into two parts to form the first opening region and the second opening region.
4. The display substrate according to claim 3, wherein the second pixel isolation structure forms an obtuse angle with the first pixel isolation structure, and a distance between two farthest points on the second pixel isolation structure is greater than two-thirds and smaller than a diameter of the circular opening.
5. The display substrate according to claim 3, wherein the first pixel isolation structures have a height in a direction perpendicular to the display panel of 1 to 2 μm, the second pixel isolation structures have a height in a direction perpendicular to the display panel of 1.5 to 3.5 μm, and the second pixel isolation structures have a height in a direction perpendicular to the display panel greater than the first pixel isolation structures.
6. The display substrate of claim 2, wherein the first opening area and the second opening area are both oval, the area of the first opening area and the area of the second opening area are both greater than or equal to one quarter of the area of the circle, and the area of the third opening area is less than one quarter of the area of the circle.
7. A method for manufacturing a display substrate is characterized by comprising the following steps:
providing a substrate, and forming a plurality of pixel units on the substrate, wherein each pixel unit comprises a non-opening area and a plurality of opening areas of sub-pixels, and the opening areas of the sub-pixels comprise a first opening area, a second opening area and a third opening area;
the first opening area and the second opening area are positioned in the same circle, the third opening area is positioned outside the circle, and the area of the first opening area and the area of the second opening area are both larger than twice of the area of the third opening area.
8. The method of claim 7, wherein the forming a plurality of pixel cells on the substrate comprises:
forming a first sub-pixel and a second sub-pixel of the pixel unit on the substrate, and forming a third sub-pixel of the pixel unit on the substrate;
or, forming a third sub-pixel of the pixel unit on the substrate, and then forming a first sub-pixel and a second sub-pixel of the pixel unit on the substrate on which the third sub-pixel is formed;
wherein the opening area of the first sub-pixel is the first opening area, the opening area of the second sub-pixel is the second opening area, and the opening area of the third sub-pixel is the third opening area.
9. The method of claim 8, wherein the first sub-pixel and the second sub-pixel of the pixel unit are formed on the substrate, and the second sub-pixel of the pixel unit is formed on the substrate further comprises:
manufacturing a first pixel isolation structure and a second pixel isolation structure on the substrate to form a non-opening area of the pixel unit, an opening area of the first sub-pixel, an opening area of the second sub-pixel and an opening area of the third sub-pixel;
forming a first light emitting layer in the first opening region and the second opening region using an inkjet printing process, and forming a second light emitting layer in the third opening region using an electrospray technique.
10. The method of claim 8, wherein the forming a third sub-pixel of the pixel unit on the substrate and then forming a first sub-pixel and a second sub-pixel of the pixel unit on the substrate with the third sub-pixel comprises:
coating a photoresist layer on the substrate and patterning to form a plurality of opening regions of the third sub-pixels;
stripping the photoresist layer after forming a second light emitting layer in the opening area of the third sub-pixel;
manufacturing a first pixel isolation structure and a second pixel isolation structure on the substrate to form a non-opening area of the pixel unit, an opening area of the first sub-pixel and an opening area of the second sub-pixel;
and forming a second light emitting layer in the opening region of the first sub-pixel and the opening region of the second sub-pixel.
11. A display device comprising the display substrate according to any one of claims 1 to 6.
CN202111611813.0A 2021-12-27 2021-12-27 Display substrate, manufacturing method thereof and display device Pending CN114335097A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230131455A1 (en) * 2020-05-14 2023-04-27 Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd. Display panel

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230131455A1 (en) * 2020-05-14 2023-04-27 Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd. Display panel
US11903260B2 (en) * 2020-05-14 2024-02-13 Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd. OLED display panel with same color sub-pixel groups

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