CN114326314B

CN114326314B - Film warehouse device

Info

Publication number: CN114326314B
Application number: CN202011051862.9A
Authority: CN
Inventors: 刘凯
Original assignee: Shanghai Micro Electronics Equipment Co Ltd
Current assignee: Shanghai Micro Electronics Equipment Co Ltd
Priority date: 2020-09-29
Filing date: 2020-09-29
Publication date: 2023-05-30
Anticipated expiration: 2040-09-29
Also published as: CN114326314A

Abstract

The invention discloses a film stock device, which belongs to the technical field of photoetching machines, and comprises a frame, a film box and a cover shell, wherein the frame is provided with a containing cavity, and one side of the containing cavity is provided with a first opening for taking a film; the wafer box is arranged in the accommodating cavity; the housing is arranged in the accommodating cavity and covers the outer side of the wafer box, the housing is provided with a second opening, and the housing can rotate around a first axis relative to the rack so that the second opening faces the first opening to enable the wafer box to be accessed. The cover shell occupies small space when being opened and closed in a rotating way, the cover shell not only can seal the film box, but also can prevent external pollutants from entering the inside of the photoetching machine, and meanwhile, laser leakage during exposure of the photoetching machine can be prevented.

Description

Film warehouse device

Technical Field

The invention relates to the technical field of photoetching machines, in particular to a film warehouse device.

Background

In the photoetching machine, the wafer library is used as one of the external silicon wafer interface forms of the photoetching machine, and in the silicon wafer transmission process, the wafer library provides a wafer box interface to complete the positioning and loading functions of the wafer box and realize the transmission of materials from the outside to the inside of the system in cooperation with the mechanical arm.

In order to ensure that the silicon wafers in the wafer cassette are not polluted, the wafer library needs to design a housing for sealing the wafer cassette. The existing cover has two structures, one is that the cover can slide along a straight line to open and close the sheet stock, and the other is that the cover can rotate around one end of the cover to open and close the sheet stock. The covers with the two structures occupy larger space in the open state.

Disclosure of Invention

The invention aims to provide a film warehouse device which solves the technical problem that a cover shell occupies a large space in the prior art.

The technical scheme adopted by the invention is as follows:

a film library apparatus comprising:

the rack is provided with a containing cavity, and one side of the containing cavity is provided with a first opening for taking a piece;

the wafer box is arranged in the accommodating cavity;

the housing is arranged in the accommodating cavity and covers the outer side of the wafer box, the housing is provided with a second opening, and the housing can rotate around a first axis relative to the rack so that the second opening faces the first opening to enable the wafer box to be accessed.

The inner wall of the accommodating cavity is provided with a sealing element, and the outer wall of the housing can be abutted with the sealing element.

Wherein a gap is provided between the seal and an outer wall of the housing.

The section of the housing is arc-shaped and is a major arc along the direction perpendicular to the first axis.

The first axis is positioned at the center of the wafer box.

Wherein the first axis coincides with the second axis.

The device further comprises a first driving mechanism and a second driving mechanism, wherein the first driving mechanism is used for driving the housing to rotate, the second driving mechanism is used for driving the wafer box to rotate, and the first driving mechanism and the second driving mechanism are mutually independent.

The first driving mechanism comprises a first motor and a rotary table, the first motor is provided with a first motor shaft, the rotary table is fixedly connected with the housing, and the first motor shaft can drive the rotary table to rotate around the first axis.

The driving belt wheel is connected with the first motor shaft, and the driven belt wheel is connected with the turntable.

The second driving mechanism comprises a second motor and an output shaft, the film box is fixedly connected with the output shaft, the second motor can drive the output shaft to rotate, and the turntable is sleeved on the output shaft and is arranged with the output shaft at radial intervals.

The invention has the beneficial effects that:

the frame is provided with the accommodating cavity, the wafer box is arranged in the accommodating cavity, one side of the accommodating cavity is provided with the first opening for taking the wafer, the housing is arranged in the accommodating cavity and is covered on the outer side of the wafer box, the housing is provided with the second opening, the housing can rotate around the first axis relative to the frame to enable the second opening to face the first opening so that the wafer box can be accessed, the occupied space is small when the housing rotates to open and close, the wafer box can be sealed, external pollutants can be prevented from entering the inside of the photoetching machine, and laser leakage can be prevented when the photoetching machine is exposed.

Drawings

Fig. 1 is a schematic structural view of a casing of a film library apparatus in an open state;

fig. 2 is a schematic structural view of a casing of the film library apparatus in a closed state according to an embodiment of the present invention;

FIG. 3 is a top view of a case of the film magazine apparatus according to the embodiment of the present invention in an open state;

FIG. 4 is a top view of a housing of a magazine apparatus according to an embodiment of the present invention in a closed position;

fig. 5 is a schematic structural diagram of a rack of a film library apparatus according to an embodiment of the present invention;

fig. 6 is a schematic structural diagram of a film library apparatus according to an embodiment of the present invention;

fig. 7 is a schematic structural diagram of a film warehouse device and an automatic handling trolley according to an embodiment of the present invention;

fig. 8 is a schematic structural diagram of a device for a film library in cooperation with a manipulator according to an embodiment of the present invention;

fig. 9 is a schematic structural view of a cassette magazine apparatus according to an embodiment of the present invention in a rotated state;

fig. 10 is a schematic diagram of a second embodiment of a device for storing a film according to the present invention;

FIG. 11 is a schematic view of a part of a structure of a film library apparatus according to an embodiment of the present invention;

fig. 12 is a sectional view of a part of the structure of the magazine apparatus according to the embodiment of the present invention.

In the figure:

1. a frame; 11. an upper part; 12. a middle part; 13. a lower part;

2. a cassette; 21. a carrying platform; 22. a case body; 23. a bottom plate;

3. a housing;

4. a seal;

5. a first driving mechanism; 51. a first motor; 52. a turntable; 521. a connecting piece; 531. a driving pulley; 532. a driven pulley; 533. a synchronous belt; 54. a first collar; 55. a pressing plate;

6. a second driving mechanism; 61. a second motor; 62. an output shaft; 63. a thrust bearing; 64. a second collar;

100. automatic carrying trolley; 200. and a manipulator.

Detailed Description

Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative and intended to explain the present invention and should not be construed as limiting the invention.

In the description of the present invention, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.

In the present invention, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

The technical scheme of the invention is further described below by the specific embodiments with reference to the accompanying drawings.

Referring to fig. 1 to 4, an embodiment of the present invention provides a film library apparatus for use in a lithography machine. The film warehouse device comprises a frame 1, a film box 2 and a cover shell 3, wherein the frame 1 is provided with a containing cavity, the film box 2 is arranged in the containing cavity, one side of the containing cavity is provided with a first opening for taking a film, the cover shell 3 is arranged in the containing cavity and covers the outer side of the film box 2, the cover shell 3 is provided with a second opening, the cover shell 3 can rotate around a first axis relative to the frame 1 so that the second opening faces the first opening to enable the film box 2 to be accessed, the cover shell 3 occupies a smaller space when being opened and closed in a rotating mode, the film box 2 can be sealed, external pollutants can be prevented from entering the photoetching machine, and laser leakage can be prevented when the photoetching machine is exposed.

The cross section of the housing 3 is circular arc-shaped and is a major arc in a direction perpendicular to the first axis. That is, the housing 3 is cylindrical, and the housing 3 is not an entire cylinder but more than 1/2 half cylinders due to the provision of the second opening, and the first axis is at a center position with the housing 3, that is, the housing 3 rotates around its center.

In actual use, the frame 1 is connected with the photoetching machine, and the accommodating cavity is communicated with the inside of the photoetching machine. When the housing 3 is in an open state, the housing 3 is positioned at the rear side of the wafer cassette 2, so that the wafer cassette 2 is isolated from the interior of the lithography machine; when the housing 3 is in the closed state, the housing 3 is positioned at the front side of the cartridge 2, and seals the cartridge 2 in the accommodating cavity.

Referring to fig. 5, the frame 1 mainly plays a supporting role, and the structure of the frame 1 is not limited herein. In this embodiment, the frame 1 includes upper portion 11, middle part 12 and lower part 13, and the holding chamber sets up in upper portion 11, and case 2 is located the holding intracavity and is connected with middle part 12, and the bottom of lower part 13 is provided with the gyro wheel, is convenient for remove frame 1, and the top of upper portion 11 is provided with control button, is convenient for control housing 3 and case 2. The housing 3 is made of a laser-proof plexiglass, which is a conventional material and will not be described in detail here.

Referring to fig. 6, a sealing member 4 is provided on the inner wall of the accommodation chamber, and the outer wall of the housing 3 can abut against the sealing member 4. The seal 4 acts as a seal, so that the housing 3 can better seal the receiving chamber. Specifically, the seal 4 is disposed in a gap between the housing 3 and the accommodation chamber, and the extending length of the seal 4 is mainly capable of covering the gap.

The gap is formed between the sealing element 4 and the outer wall of the housing 3, the size of the gap does not influence the sealing effect, friction between the sealing element 4 and the housing 3 can be avoided due to the arrangement of the gap, and smooth rotation of the housing 3 is ensured. Specifically, since the outer wall of the housing 3 is in the shape of a circular arc, the inner wall of the sealing element 4 is arranged in the shape of a circular arc, and the center of the circular arc of the sealing element 4 coincides with the center of the housing 3, the sealing element 4 can smoothly seal the housing 3, and interference is prevented.

Referring to fig. 7, the automatic transfer cart 100 moves to the front of the rack 1, the cover 3 is opened, and the automatic transfer cart 100 can take and put the cassette 2.

Referring to fig. 8 and 9, as the types of silicon wafers processed by the photolithography machine are more and more, including wafers and square wafers, when square wafers are processed, the wafer cassette 2 containing square wafers needs to be obliquely placed in the accommodating cavity of the wafer library device, so that an operator is inconvenient to operate when picking and placing the wafer cassette 2, and meanwhile, the automation carrying trolley is inconvenient to pick and place the wafer cassette 2, so that the wafer cassette 2 is required to be rotatable.

The cassette 2 is rotatable relative to the frame 1 about a second axis, the first axis being located at a central position of the cassette 2. The cassette 2 may rotate, and the center of the cassette 2 may be directed to the center of the robot 200, and may be docked with the robot 200, so that the robot 200 may take and place the cassette 2. When the operator or the automated guided vehicle 100 takes and places the cassette 2, the cassette 2 is rotated in a direction facing the front of the operator or the automated guided vehicle 100.

The cassette 2 includes a carrying table 21 and a cassette body 22, the cassette body 22 is disposed on the carrying table 21, and the carrying table 21 can rotate relative to the frame 1.

Referring to fig. 10 to 12, the magazine apparatus further includes a first driving mechanism 5 and a second driving mechanism 6, the first driving mechanism 5 is used for driving the casing 3 to rotate, the second driving mechanism 6 is used for driving the cassette 2 to rotate, the first driving mechanism 5 and the second driving mechanism 6 are independent from each other, and the rotation of the cassette 2 and the casing 3 are independent from each other, so that the control is convenient. Specifically, the first driving mechanism 5 and the second driving mechanism 6 are both disposed in the middle portion 12 of the frame 1.

The first axis and the second axis may be coincident or may be spaced apart. In this embodiment, the first axis coincides with the second axis, so that the first driving mechanism 5 and the second driving mechanism 6 are compact in structure and occupy a small space.

The first driving mechanism 5 includes a first motor 51 and a turntable 52, the first motor 51 having a first motor shaft, the turntable 52 being fixedly connected to the housing 3, the first motor shaft being capable of driving the turntable 52 to rotate about a first axis. The turntable 52 is a revolution body, and the housing 3 is not a whole cylinder, so that the turntable 52 is driven by the first motor shaft through the connection of the turntable 52 and the housing 3, and the installation is more stable. The first motor 51 is fixedly connected with the frame 1.

A transmission mechanism is arranged between the first motor shaft and the turntable 52 and comprises a driving belt pulley 531, a driven belt pulley 532 and a synchronous belt 533 sleeved on the driving belt pulley 531 and the driven belt pulley 532, wherein the driving belt pulley 531 is connected with the first motor shaft, and the driven belt pulley 532 is connected with the turntable 52.

The turntable 52 is provided with a connecting member 521, and the connecting member 521 is fixedly connected with the housing 3. The first collar 54 is disposed outside the connecting member 521, the pressing plate 55 is fixedly disposed on the frame 1, and the first collar 54 is sandwiched between the connecting member 521 and the pressing plate 55. When the turntable 52 drives the connecting member 521 to rotate, the inner ring of the first collar 54 rotates along with the connecting member 521, and the outer ring of the first collar 54 is fixed to the pressing plate 55. The first collar 54 is capable of bearing both axial and radial loads, is relatively rigid, and provides some support.

The second driving mechanism 6 comprises a second motor 61 and an output shaft 62, the cassette 2 is fixedly connected with the output shaft 62, and the second motor 61 can drive the output shaft 62 to rotate so as to drive the cassette 2 to rotate. Specifically, the second motor 61 has a second motor shaft, and the second motor shaft is fixedly connected to the output shaft 62 through a connection plate. The second motor 61 is fixedly connected with the frame 1, specifically, a fixed plate is arranged on the frame 1, the second motor 61 is fixedly connected with the fixed plate, a thrust bearing 63 is arranged between the output shaft 62 and the fixed plate, the thrust bearing 63 is arranged at the lower end of the output shaft 62, the upper ring of the thrust bearing 63 can rotate along with the output shaft 62, the thrust bearing 63 can bear vertical load, namely, the load along the axial direction of the output shaft 62, so that the second motor 61 does not bear the vertical load, and the service life of the second motor 61 can be prolonged.

The turntable 52 is sleeved on the output shaft 62 and is arranged with the output shaft 62 at radial intervals, so that the first axis coincides with the second axis, and the first motor 51 and the second motor 61 are smaller in interval and compact in structure. The driven pulley 532 is used for driving the turntable 52 to rotate, the driven pulley 532 is coaxially arranged with the turntable 52, and the driven pulley 532 is sleeved on the output shaft 62 and is radially spaced from the output shaft 62.

The bottom of the bearing table 21 of the cassette 2 is provided with a bottom plate 23, and an output shaft 62 is fixedly connected with the bottom plate 23. Specifically, a boss is arranged on the bottom plate 23, the output shaft 62 is fixedly connected with the boss, a second collar 64 is arranged between the turntable 52 and the boss, the second collar 64 plays a supporting role, and when the turntable 52 rotates, the outer ring of the second collar 64 rotates along with the turntable 52; as cassette 2 rotates, base plate 23 rotates and the inner race of second collar 64 rotates with base plate 23. The thrust bearing 63 cooperates with the second collar 64 to stabilize the rotational movement of the cassette 2 and prevent the cassette 2 from rocking. The turntable 52 and the bottom plate 23 can be rotated independently or simultaneously.

In this embodiment, the first collar 54 and the second collar 64 are cross roller collars, which are conventional structures.

When the housing 3 needs to be rotated, the first motor shaft of the first motor 51 drives the driving pulley 531 to rotate, the driven pulley 532 is driven to rotate by the synchronous belt 533, the driven pulley 532 drives the turntable 52 to rotate, the turntable 52 drives the housing 3 to rotate by the connecting piece 521, at this time, the inner ring of the first collar 54 rotates along with the connecting piece 521, and the outer ring of the second collar 64 rotates along with the turntable 52.

When the cassette 2 needs to be rotated, the second motor shaft of the second motor 61 drives the output shaft 62 to rotate, and further drives the cassette 2 to rotate, and at this time, the inner ring of the second collar 64 rotates along with the cassette 2.

The above embodiments merely illustrate the basic principle and features of the present invention, and the present invention is not limited to the above embodiments, but may be varied and altered without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. A film magazine apparatus, comprising:

the rack (1) is provided with a containing cavity, and one side of the containing cavity is provided with a first opening for taking a piece;

the film box (2) is arranged in the accommodating cavity;

a housing (3) disposed in the accommodating cavity and covering the outside of the cassette (2), the housing (3) having a second opening, the housing (3) being rotatable about a first axis relative to the frame (1) such that the second opening faces the first opening to enable the cassette (2) to be accessed; the section of the housing (3) is arc-shaped and is a major arc along the direction perpendicular to the first axis;

the frame (1) is connected with the photoetching machine, and the accommodating cavity is connected with the inside of the photoetching machine;

the cassette (2) is rotatable relative to the frame (1) about a second axis, the first axis being located at a central position of the cassette (2).

2. The magazine arrangement according to claim 1, characterized in that a seal (4) is provided on the inner wall of the receiving chamber, the outer wall of the housing (3) being able to abut the seal (4).

3. A magazine arrangement according to claim 2, characterized in that there is a gap between the seal (4) and the outer wall of the housing (3).

4. The slide magazine apparatus of claim 1, wherein the first axis coincides with the second axis.

5. The magazine apparatus according to claim 1, further comprising a first driving mechanism (5) and a second driving mechanism (6), wherein the first driving mechanism (5) is configured to drive the casing (3) to rotate, the second driving mechanism (6) is configured to drive the cassette (2) to rotate, and the first driving mechanism (5) and the second driving mechanism (6) are independent from each other.

6. The magazine apparatus according to claim 5, wherein the first drive mechanism (5) comprises a first motor (51) and a turntable (52), the first motor (51) having a first motor shaft, the turntable (52) being fixedly connected with the housing (3), the first motor shaft being capable of driving the turntable (52) to rotate about the first axis.

7. The film magazine apparatus of claim 6, wherein a transmission mechanism is provided between the first motor shaft and the turntable (52), the transmission mechanism including a driving pulley (531), a driven pulley (532), and a timing belt (533) sleeved on the driving pulley (531) and the driven pulley (532), the driving pulley (531) being connected with the first motor shaft, the driven pulley (532) being connected with the turntable (52).

8. The film magazine apparatus as defined in claim 6, wherein the second driving mechanism (6) includes a second motor (61) and an output shaft (62), the film magazine (2) is fixedly connected with the output shaft (62), the second motor (61) can drive the output shaft (62) to rotate, and the turntable (52) is sleeved on the output shaft (62) and is disposed at a radial interval with the output shaft (62).