CN114324988B - Probe seat - Google Patents
Probe seat Download PDFInfo
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- CN114324988B CN114324988B CN202110855691.3A CN202110855691A CN114324988B CN 114324988 B CN114324988 B CN 114324988B CN 202110855691 A CN202110855691 A CN 202110855691A CN 114324988 B CN114324988 B CN 114324988B
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- probe
- bearing
- pin shaft
- point contact
- supporting plate
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- 239000000523 sample Substances 0.000 title claims abstract description 125
- 238000003825 pressing Methods 0.000 claims description 3
- 238000012360 testing method Methods 0.000 abstract description 22
- 238000000034 method Methods 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 5
- 230000007774 longterm Effects 0.000 abstract description 4
- 238000001514 detection method Methods 0.000 description 10
- 230000008859 change Effects 0.000 description 5
- 238000004891 communication Methods 0.000 description 4
- 230000032683 aging Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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Abstract
The invention discloses a probe seat, which comprises a body, a supporting plate, a probe used for being contacted with a chip to be tested and a moving point contact probe, wherein one end of the supporting plate is provided with a cantilever, the other end of the supporting plate is provided with the moving point contact probe, one side of the lower end surface of the body is provided with a dead point contact probe which is positioned at the upper part of the moving point contact probe and corresponds to the moving point contact probe, one end of the cantilever far away from the supporting plate is fixedly provided with a probe seat provided with the probe, a adapting seat is arranged on the upper surface of the middle part of the supporting plate, and two ends of a first pin shaft are respectively positioned in first through holes of a front baffle plate and a rear baffle plate; the mass moment of the support plate part, the cantilever, the probe seat and the probe which are positioned on the right side of the first pin shaft is larger than that of the rest part and the movable point contact probe which are positioned on the left side of the first pin shaft. The invention solves the problems of instability and inconsistency of test data in the long-term use process caused by fatigue in the prior art.
Description
Technical Field
The invention relates to a probe seat, and belongs to the technical field of chip testing.
Background
In the production test link of the Laser in the optical communication industry, before the aging process of the COC, the photoelectric performance test of a single Laser Diode (LD) is required to be carried out, so that the performance of the Laser Diode (LD) is screened once before aging, and the Laser with the problematic performance is selected in advance, thereby improving the overall yield after the aging of the COC.
In the testing process of an optical communication single laser chip (LD), the stability of a probe plays a very important role, because the size of the single chip is very small (generally in the range of 300 μm), the position or angle of the chip can be pushed to shift more or less by the test probe in the process of contacting the chip, once the position and angle of the chip change, the stability and the testing efficiency of a subsequent test index can be directly influenced, the pressure stability of the test probe can be directly fed back to the stability of a test value, and for a mass production test link, one probe needs to detect a large number of chips, and the stability and the durability of a power-on probe assembly can directly influence the consistency and the reproducibility of test data.
Disclosure of Invention
The inventors found that: the pressure change of the probe acting on the chip can cause the change of contact resistance, thereby affecting the consistency of test data, and in the long-time test process, if the pressure change is too large, the change of the test result can not be distinguished, which is brought by the chip itself or a machine, and the test result loses comparability. Based on the above findings, an object of the present invention is to provide a probe holder which solves the problems of unstable and inconsistent test data during long-term use due to fatigue of the probe holder in the prior art.
In order to achieve the above purpose, the invention adopts the following technical scheme: the probe seat comprises a body, a supporting plate, a probe used for being contacted with a chip to be tested and a moving point contact probe, wherein one end of the supporting plate is provided with a cantilever, the other end of the supporting plate is provided with the moving point contact probe, one side of the lower end surface of the body is provided with a stationary point contact probe which is positioned at the upper part of the moving point contact probe and corresponds to the moving point contact probe, and one end of the cantilever far away from the supporting plate is fixedly provided with the probe seat provided with the probe;
the front side and the rear side of the adapter seat are respectively provided with a front baffle plate and a rear baffle plate, the front baffle plate and the rear baffle plate are respectively provided with a first through hole and 2 guide grooves positioned at two sides of the first through hole, and two ends of a first pin shaft are respectively positioned in the first through holes of the front baffle plate and the rear baffle plate;
the lower convex block positioned on the other side of the lower end surface of the body is provided with a second pin shaft and a third pin shaft in parallel, the second pin shaft and the third pin shaft are positioned above the first pin shaft and positioned on two sides of the first pin shaft, the two ends of the second pin shaft and the third pin shaft extend from the front side and the rear side of the lower convex block respectively, the first bearing and the second bearing are sleeved at the two ends of the second pin shaft and positioned on the front side and the rear side of the lower convex block respectively, and the third bearing and the fourth bearing are sleeved at the two ends of the third pin shaft and positioned on the front side and the rear side of the lower convex block respectively;
the first bearing, the third bearing, the second bearing and the fourth bearing are respectively positioned between the lower protruding block and the front baffle and the rear baffle, one end of a first elastic piece positioned in a vertical through hole of the lower protruding block is connected with a middle area of the first pin shaft positioned between the front baffle and the rear baffle, the other end of the first elastic piece is connected with a fourth pin shaft positioned in the body and positioned above the second pin shaft and the third pin shaft, and the first elastic piece is in a stretching state, so that the moving coils of the first bearing, the second bearing, the third bearing and the fourth bearing are in pressing contact with the side surface of the first pin shaft;
the mass moment of the support plate part, the cantilever, the probe seat and the probe which are positioned on the right side of the first pin shaft is larger than that of the rest part and the movable point contact probe which are positioned on the left side of the first pin shaft.
The further improved scheme in the technical scheme is as follows:
1. in the above scheme, the first elastic piece is a spring.
2. In the above scheme, the cantilever further includes riser and the horizontal plate of being connected with the riser upper end, the riser lower extreme is connected with the backup pad, the probe seat is installed to horizontal plate one end of keeping away from the riser.
3. In the scheme, the body is connected with the stationary point contact probe through an extension plate.
4. In the above scheme, the first bearing, the second bearing, the third bearing and the fourth bearing are deep groove ball bearings.
Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages:
according to the probe seat, the first pin shaft which is perpendicular to the length direction of the support plate is arranged on the rotatable support plate provided with the probe, the second pin shaft and the third pin shaft which are fixed on the body are arranged on two sides above the first pin shaft, the four bearings which are attached to the first pin shaft are arranged on two ends of the second pin shaft and the third pin shaft, and finally the first pin shaft on the support plate and the fourth pin shaft in the body are tensioned through the first elastic piece, so that the outer rings of the four bearings are kept in pressing contact with the outer circumferential surface of the first pin shaft and can rotate relatively, the fatigue problem in the prior art is eliminated, the accurate setting of the position parameters in the horizontal and vertical directions is facilitated, and the stability of an initial pressure set value can be still maintained after long-term and high-frequency use, so that the stability, the repeatability, the comparability and the consistency of detection data are improved, the defect that when the probe is separated from a chip, the small shaking in the vertical direction exists in the probe is overcome, the time between adjacent detection is facilitated, the detection efficiency is improved, and unnecessary damage to the chip is avoided; and the tiny rotation offset of the probe in the horizontal direction is eliminated, the accuracy of detection data is ensured, and the stability, repeatability, comparability and consistency of the detection data are further improved.
Drawings
FIG. 1 is a schematic view of the structure of a probe seat according to the present invention;
FIG. 2 is a schematic diagram of a partial structure of a probe seat according to the present invention;
FIG. 3 is a partial structural cross-sectional view of the probe mount of the present invention in one direction;
FIG. 4 is a schematic diagram showing a partial structure of a probe seat according to the present invention;
fig. 5 is a partial structural cross-sectional view of the probe holder of the present invention in another direction.
In the above figures: 1. a body; 2. a support plate; 31. a moving point contact probe; 32. a stationary point contact probe; 4. a cantilever; 41. a riser; 42. a horizontal plate; 5. a probe seat; 51. a probe; 6. an adapter; 61. a front baffle; 62. a rear baffle; 7. a first through hole; 8. a guide groove; 9. a first pin; 10. a lower bump; 11. a second pin; 12. a third pin; 13. a first bearing; 14. a second bearing; 15. a third bearing; 16. a fourth bearing; 17. a vertical through hole; 18. a first elastic member; 19. a fourth pin; 20. an extension plate.
Detailed Description
In the description of this patent, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are based on directions or positional relationships shown in the drawings, are merely for convenience of description and simplification of description, and do not indicate or imply that the apparatus or element in question must have a specific direction, be configured and operated in a specific direction, and thus should not be construed as limiting the invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; furthermore, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in this patent will be understood by those of ordinary skill in the art in a specific context.
Example 1: the probe seat comprises a body 1, a supporting plate 2, a probe 51 and a moving point contact probe 31, wherein the probe 51 is used for contacting a chip to be tested, one end of the supporting plate 2 is provided with a cantilever 4, the other end of the supporting plate is provided with the moving point contact probe 31, one side of the lower end surface of the body 1 is provided with a stationary point contact probe 32 which is positioned at the upper part of the moving point contact probe 31 and corresponds to the moving point contact probe, and one end, far away from the supporting plate 2, of the cantilever 4 is fixedly provided with a probe seat 5 provided with the probe 51;
the adapter seat 6 is arranged on the upper surface of the middle part of the supporting plate 2, a front baffle plate 61 and a rear baffle plate 62 are respectively arranged on the front side and the rear side of the adapter seat 6, a first through hole 7 and 2 guide grooves 8 positioned on two sides of the first through hole 7 are respectively formed on the front baffle plate 61 and the rear baffle plate 62, and two ends of a first pin shaft 9 are respectively positioned in the first through holes 7 of the front baffle plate 61 and the rear baffle plate 62;
the lower lug 10 positioned on the other side of the lower end surface of the body 1 is provided with a second pin 11 and a third pin 12 in parallel, the second pin 11 and the third pin 12 are positioned above the first pin 9 and positioned on two sides of the first pin, the two ends of the second pin 11 and the third pin 12 extend from the front side and the rear side of the lower lug 10, a first bearing 13 and a second bearing 14 are respectively sleeved at the two ends of the second pin 11 and positioned on the front side and the rear side of the lower lug 10, and a third bearing 15 and a fourth bearing 16 are respectively sleeved at the two ends of the third pin 12 and positioned on the front side and the rear side of the lower lug 10;
the first bearing 13, the third bearing 15, the second bearing 14 and the fourth bearing 16 are respectively positioned between the lower protruding block 10 and the front baffle 61 and the rear baffle 62, one end of a first elastic piece 18 positioned in a vertical through hole 17 of the lower protruding block 10 is connected with a middle area of the first pin 9 positioned between the front baffle 61 and the rear baffle 62, the other end of the first elastic piece is connected with a fourth pin 19 positioned in the body 1 and positioned above the second pin 11 and the third pin 12, and the first elastic piece 18 is in a stretching state, so that the moving coils of the first bearing 13, the second bearing 14, the third bearing 15 and the fourth bearing 16 are respectively pressed and contacted with the side surface of the first pin 9;
the centroid moment of the support plate 2 part, the cantilever 4, the probe holder 5 and the probe 51 located on the right side of the first pin 9 is larger than the centroid moment of the rest of the support plate 2, the moving point contact probe 31 located on the left side of the first pin 9.
The first elastic member 18 is a spring; the body 1 is connected with the stationary point contact probe 32 through an extension plate 20; the first bearing 13, the second bearing 14, the third bearing 15 and the fourth bearing 16 are all deep groove ball bearings.
Example 2: the probe seat comprises a body 1, a supporting plate 2, a probe 51 and a movable point contact probe 31, wherein the probe 51 is used for being contacted with a chip to be tested, one end of the supporting plate 2 is provided with a cantilever 4, the other end of the supporting plate is provided with the movable point contact probe 31, one side of the lower end surface of the body 1 is provided with a stationary point contact probe 32 which is positioned at the upper part of the movable point contact probe 31 and corresponds to the movable point contact probe, when the probe is contacted with the chip to be tested, the movable point contact probe is rotated along with the supporting plate to be far away from the stationary point contact probe, the movable point contact probe and the stationary point contact probe are changed into a mutually separated state from each other from an initial state of mutual contact, a control system for chip testing receives signals of mutually separating the movable point contact probe and the stationary point contact probe, a power-on operation is carried out to enable the probe to be electrically conducted with the chip, and then the chip is tested for each parameter, and one end of the cantilever 4 far away from the supporting plate 2 is fixedly provided with a probe seat 5 provided with the probe 51;
the adapter seat 6 is arranged on the upper surface of the middle part of the supporting plate 2, a front baffle plate 61 and a rear baffle plate 62 are respectively arranged on the front side and the rear side of the adapter seat 6, a first through hole 7 and 2 guide grooves 8 positioned on two sides of the first through hole 7 are respectively formed on the front baffle plate 61 and the rear baffle plate 62, and two ends of a first pin shaft 9 are respectively positioned in the first through holes 7 of the front baffle plate 61 and the rear baffle plate 62;
the lower lug 10 positioned on the other side of the lower end surface of the body 1 is provided with a second pin 11 and a third pin 12 in parallel, the second pin 11 and the third pin 12 are positioned above the first pin 9 and positioned on two sides of the first pin, the two ends of the second pin 11 and the third pin 12 extend from the front side and the rear side of the lower lug 10, a first bearing 13 and a second bearing 14 are respectively sleeved at the two ends of the second pin 11 and positioned on the front side and the rear side of the lower lug 10, and a third bearing 15 and a fourth bearing 16 are respectively sleeved at the two ends of the third pin 12 and positioned on the front side and the rear side of the lower lug 10;
the first bearing 13, the third bearing 15, the second bearing 14 and the fourth bearing 16 are respectively positioned between the lower protruding block 10 and the front baffle 61 and the rear baffle 62, one end of a first elastic piece 18 positioned in a vertical through hole 17 of the lower protruding block 10 is connected with a middle area of the first pin 9 positioned between the front baffle 61 and the rear baffle 62, the other end of the first elastic piece is connected with a fourth pin 19 positioned in the body 1 and positioned above the second pin 11 and the third pin 12, and the first elastic piece 18 is in a stretching state, so that the moving coils of the first bearing 13, the second bearing 14, the third bearing 15 and the fourth bearing 16 are respectively pressed and contacted with the side surface of the first pin 9;
the centroid moment of the support plate 2 part, the cantilever 4, the probe holder 5 and the probe 51 located on the right side of the first pin 9 is larger than the centroid moment of the rest of the support plate 2, the moving point contact probe 31 located on the left side of the first pin 9.
The cantilever 4 further comprises a vertical plate 41 and a horizontal plate 42 connected with the upper end of the vertical plate 41, the lower end of the vertical plate 41 is connected with the supporting plate 2, and the probe seat 5 is arranged at one end, far away from the vertical plate 41, of the horizontal plate 42.
When the probe seat is adopted, the probe seat is generally arranged on a driving mechanism (such as a triaxial moving platform), the probe seat is moved to enable the probe to be in contact with a chip to be tested, the probe applies downward pressure to the chip and simultaneously receives upward reaction force from the chip to drive the supporting plate to rotate, a moving point contact probe arranged on the supporting plate moves downwards, an initial state of contact with the stationary point contact probe is changed into a state of separation from the stationary point contact probe, the probe is applied with proper pressure to the chip, at the moment, a control system for chip testing executes power-on operation to enable the probe to be electrically conducted with the chip to test various parameters of the chip, and after the test is completed, the supporting plate reversely rotates under the action of a second elastic piece to restore to the initial horizontal position, and meanwhile, the moving point contact probe is contacted with the stationary point contact probe;
in the process of testing a large number of chips for a long time and reciprocating rotation of the supporting plate, the first pin shafts arranged on the supporting plate are attached to the two sides and the two ends of the first pin shafts and the four bearings arranged on the body through the first elastic piece, so that the accurate limit of the first pin shafts is realized while the supporting plate can smoothly rotate by taking the first pin shafts as fulcrums, and the supporting plate can only rotate without offset in other directions; the fatigue problem existing in the prior art that the spring piece supporting structure is adopted to support the front-end probe structure can be eliminated, the accurate setting of the position parameters in the horizontal and vertical directions is facilitated, the stability of the initial pressure set value can be maintained after long-term and high-frequency use, the stability, the repeatability, the comparability and the consistency of detection data are improved, the defect that when the probe is separated from a chip, the probe has tiny shake in the vertical direction is overcome, the time between adjacent detection is shortened, the detection efficiency is improved, and unnecessary damage to the chip is avoided;
further, the micro rotation offset of the probe in the horizontal direction is eliminated, the accuracy of detection data is guaranteed, and the stability, repeatability, comparability and consistency of the detection data are further improved.
The probe seat can be expanded to other industries for testing semiconductor chips, is not limited to the optical communication industry, can be synchronously expanded and used in all industries needing the probe seat, and has wide application range.
The above embodiments are provided to illustrate the technical concept and features of the present invention and are intended to enable those skilled in the art to understand the content of the present invention and implement the same, and are not intended to limit the scope of the present invention. All equivalent changes or modifications made in accordance with the spirit of the present invention should be construed to be included in the scope of the present invention.
Claims (5)
1. A probe mount, comprising: the probe comprises a body (1), a supporting plate (2), a probe (51) and a moving point contact probe (31), wherein the probe is used for being contacted with a chip to be tested, one end of the supporting plate (2) is provided with a cantilever (4), the other end of the supporting plate is provided with the moving point contact probe (31), one side of the lower end face of the body (1) is provided with a stationary point contact probe (32) which is positioned at the upper part of the moving point contact probe (31) and corresponds to the moving point contact probe, and one end, far away from the supporting plate (2), of the cantilever (4) is fixedly provided with a probe seat (5) provided with the probe (51);
the adapter seat (6) is arranged on the upper surface of the middle part of the supporting plate (2), a front baffle (61) and a rear baffle (62) are respectively arranged on the front side and the rear side of the adapter seat (6), a first through hole (7) and 2 guide grooves (8) positioned on two sides of the first through hole (7) are respectively formed in the front baffle (61) and the rear baffle (62), and two ends of a first pin shaft (9) are respectively positioned in the first through holes (7) of the front baffle (61) and the rear baffle (62);
a second pin shaft (11) and a third pin shaft (12) are arranged on the lower protruding block (10) at the other side of the lower end surface of the body (1) in parallel, the second pin shaft (11) and the third pin shaft (12) are positioned above the first pin shaft (9) and at two sides of the first pin shaft, the two ends of the second pin shaft (11) and the third pin shaft (12) extend from the front side and the rear side of the lower protruding block (10), a first bearing (13) and a second bearing (14) are respectively sleeved at the two ends of the second pin shaft (11) and are positioned at the front side and the rear side of the lower protruding block (10), and a third bearing (15) and a fourth bearing (16) are respectively sleeved at the two ends of the third pin shaft (12) and are positioned at the front side and the rear side of the lower protruding block (10);
the first bearing (13), the third bearing (15), the second bearing (14) and the fourth bearing (16) are respectively positioned between the lower protruding block (10) and the front baffle (61) and the rear baffle (62), one end of a first elastic piece (18) positioned in a vertical through hole (17) of the lower protruding block (10) is connected with an intermediate area of the first pin shaft (9) positioned between the front baffle (61) and the rear baffle (62), the other end of the first elastic piece is connected with a fourth pin shaft (19) positioned in the body (1) and positioned above the second pin shaft (11) and the third pin shaft (12), and the first elastic piece (18) is in a stretching state, so that moving coils of the first bearing (13), the second bearing (14), the third bearing (15) and the fourth bearing (16) are in pressing contact with the side surfaces of the first pin shaft (9);
the mass moment of the support plate (2) part, the cantilever (4), the probe seat (5) and the probe (51) which are positioned on the right side of the first pin shaft (9) is larger than the mass moment of the rest part, the moving point contact probe (31), of the support plate (2) which is positioned on the left side of the first pin shaft (9).
2. The probe mount of claim 1, wherein: the first elastic member (18) is a spring.
3. The probe mount of claim 1, wherein: the cantilever (4) further comprises a vertical plate (41) and a horizontal plate (42) connected with the upper end of the vertical plate (41), the lower end of the vertical plate (41) is connected with the supporting plate (2), and a probe seat (5) is arranged at one end, far away from the vertical plate (41), of the horizontal plate (42).
4. The probe mount of claim 1, wherein: the body (1) is connected with the stationary point contact probe (32) through an extension plate (20).
5. The probe mount of claim 1, wherein: the first bearing (13), the second bearing (14), the third bearing (15) and the fourth bearing (16) are deep groove ball bearings.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110855691.3A CN114324988B (en) | 2021-07-28 | 2021-07-28 | Probe seat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110855691.3A CN114324988B (en) | 2021-07-28 | 2021-07-28 | Probe seat |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114324988A CN114324988A (en) | 2022-04-12 |
| CN114324988B true CN114324988B (en) | 2024-03-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110855691.3A Active CN114324988B (en) | 2021-07-28 | 2021-07-28 | Probe seat |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114660442B (en) * | 2022-05-24 | 2022-08-05 | 苏州联讯仪器有限公司 | Multi-probe testing device for chip |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102313827A (en) * | 2010-05-19 | 2012-01-11 | 木本军生 | Probe |
| CN102621426A (en) * | 2012-03-31 | 2012-08-01 | 山东鲁能智能技术有限公司 | Detection robot for suspension porcelain insulator string |
| CN207541154U (en) * | 2017-11-07 | 2018-06-26 | 江苏凯尔生物识别科技有限公司 | Becket testing impedance mechanism in fingerprint recognition module |
| CN109387773A (en) * | 2018-10-22 | 2019-02-26 | 青岛海信宽带多媒体技术有限公司 | Powering on mechanism |
| CN112557867A (en) * | 2019-09-25 | 2021-03-26 | 成都辰显光电有限公司 | Detection device and detection method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT201800001170A1 (en) * | 2018-01-17 | 2019-07-17 | Technoprobe Spa | Cantilever-type measuring head and relative contact probe |
| CN111141191A (en) * | 2018-11-05 | 2020-05-12 | 康宁股份有限公司 | Method and device for determining the height of an edge portion of a product |
-
2021
- 2021-07-28 CN CN202110855691.3A patent/CN114324988B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102313827A (en) * | 2010-05-19 | 2012-01-11 | 木本军生 | Probe |
| CN102621426A (en) * | 2012-03-31 | 2012-08-01 | 山东鲁能智能技术有限公司 | Detection robot for suspension porcelain insulator string |
| CN207541154U (en) * | 2017-11-07 | 2018-06-26 | 江苏凯尔生物识别科技有限公司 | Becket testing impedance mechanism in fingerprint recognition module |
| CN109387773A (en) * | 2018-10-22 | 2019-02-26 | 青岛海信宽带多媒体技术有限公司 | Powering on mechanism |
| CN112557867A (en) * | 2019-09-25 | 2021-03-26 | 成都辰显光电有限公司 | Detection device and detection method |
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| CN114324988A (en) | 2022-04-12 |
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Address after: Building 5, No. 1508, Xiangjiang Road, Suzhou High-tech Zone, Suzhou City, Jiangsu Province 215129 Applicant after: Suzhou Lianxun Instrument Co.,Ltd. Address before: 215011 Building 5, no.1508 Xiangjiang Road, high tech Zone, Suzhou City, Jiangsu Province Applicant before: STELIGHT INSTRUMENT Inc. |
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