CN114324982B - Scanning measurement method for SPM dynamic self-adjusting sliding window sampling - Google Patents
Scanning measurement method for SPM dynamic self-adjusting sliding window sampling Download PDFInfo
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Abstract
The invention discloses a scanning measurement method for SPM dynamic self-adjusting sliding window sampling, which comprises the following steps: initializing scanning parameters of a sliding window sampling method, 2 calculating data variance in the sliding window, 3 dynamically self-adjusting the scanning parameters according to the calculation result of the previous step, 4 scanning the next point according to the adjusted parameters, 5 sliding the window, 6 completing one-line scanning, and 7 completing integral scanning according to the scanning mode. The invention can realize the increase of the equidistant line-by-line and point-by-point scanning speed of the SPM, and simultaneously realize the purpose of reasonably distributing the measuring points by dynamically and self-adjusting the stepping value and the speed, thereby improving the quality of the scanning image and having certain theoretical significance and practical value for the technology of the scanning probe microscope.
Description
Technical Field
The invention relates to the field of atomic force microscope sampling control and imaging, in particular to a scanning measurement method for SPM dynamic self-adjusting sliding window sampling.
Background
The sampling method of the scanning probe microscope at equal intervals point by point line has the advantage of high measurement precision, but simultaneously has the problems of low scanning speed, low sampling efficiency and poor imaging quality of the edge area and the area with severe variation, and along with the improvement of the performance requirements of the scanning probe microscope in various fields, the defects of the sampling method of the scanning probe microscope at the point by point line start to be prominent, and the development and the application of the scanning probe microscope are restricted. To increase the sampling efficiency and imaging quality, a continuous sampling method can be used, namely, the probe is not separated from the surface of the measured object in the scanning measurement process, but the method has certain defects of being easy to scratch the surface of the measured object, has high requirements on the dynamic characteristics of the system, and has larger image distortion when measuring the edge of the step feature morphology.
Disclosure of Invention
The invention provides a scanning measurement method for SPM dynamic self-adjusting sliding window sampling, which aims to realize the improvement of the efficiency and scanning speed of a progressive point-by-point sampling algorithm and the improvement of imaging quality of areas with poor morphology, thereby improving the capability of a scanning probe microscope for acquiring high-precision images and measuring, and having certain theoretical significance and practical value for the technology of the scanning probe microscope.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows:
the invention relates to a scanning measurement method for SPM dynamic self-adjusting sliding window sampling, which is applied to a scanning platform consisting of a high-precision piezoelectric micro-motion platform, an SPM probe system and a computer; a scanning object is placed on the piezoelectric micro-motion platform, and an SPM probe is arranged above the scanning object; the scanning measurement method is characterized by comprising the following steps of:
step 1, defining and initializing scanning parameters, including: the fixed step distance is X, the length of the sliding window is N, the threshold value is Z, the coefficient is Y, the sampling point number of each row is Imax, the sampling line number is JMax, wherein X is the distance between two sampling points; n represents the number of sampling points contained in the sliding window, Z represents an ideal value of the degree of data dispersion in the sliding window, and Y represents the adjustment scale of the step distance;
step 2, defining the current sampling point number as i and the current sampling line number as j;
step 3, initializing i=1, j=1;
step 4, defining the variance of a sliding window for scanning the ith sampling point of the current jth line as H i,j The method comprises the steps of carrying out a first treatment on the surface of the Defining the step distance of scanning the ith sampling point of the current jth line as X i,j ；
Step 5, calculating all the sliding windows in the j-th rowVariance H of sampling point i,j When i=1, let H i,j ＝Z；
Step 6, calculating the step distance X of scanning the ith sampling point of the current jth line by using the formula (1) i,j ：
X i,j ＝X+Y×(Z-H i,j ) (1)
Step 7, the piezoelectric micro-motion platform is used for adjusting the step distance X i,j Moving and driving the scanning object to reach the ith measuring point of the jth line, so that the ith scanning of the jth line is carried out on the scanning object on the ith measuring point of the jth line by utilizing the SPM probe to obtain the ith sampling point of the jth line;
step 8, judging whether i > N is met, if so, indicating that the sampling point number of the current sliding window reaches N, executing step 9, otherwise, executing step 10;
step 9, replacing the ith sampling point with the ith-N sampling points in the sliding window, so that the sliding window moves forwards by one sampling point;
step 10, judging whether i > Imax is true, if so, finishing the scanning of the current j line, and executing step 11, otherwise, assigning i+1 to i, and executing step 5;
and step 11, judging whether j > JMax is met, if yes, finishing scanning, otherwise, assigning j+1 to j, and executing step 5 after i=1.
Compared with the prior art, the invention has the beneficial effects that:
1. the invention adopts the sampling algorithm of the sliding window, realizes the real-time dynamic self-adjustment of the sampling parameters, and can improve the performance of the equidistant point-by-point and line-by-line sampling method, thereby improving the speed of scanning images.
2. The invention adopts the sampling algorithm of the sliding window, when the morphology of the scanning area changes severely, the algorithm can reduce the stepping distance and the sampling speed, and when the morphology of the scanning area is intersected and flattened, the stepping distance and the sampling speed can be increased, so that the precision of the sampled data is improved, the three-dimensional morphology fitted by the sampled data is more close to the real morphology, and the precision of the scanned image is improved.
Drawings
FIG. 1 is a schematic diagram of a sliding window sampling strategy of the present invention;
FIG. 2 is a schematic diagram of a sliding window sampling strategy workflow of the present invention.
Detailed Description
In the embodiment, the scanning measurement method of SPM dynamic self-adjusting sliding window sampling is applied to a scanning platform formed by a high-precision piezoelectric micro-motion platform and an SPM probe system and a computer; a scanning object is placed on the piezoelectric micro-motion platform, and an SPM probe is arranged above the scanning object; as shown in fig. 2, the scanning measurement method is performed as follows:
step 1, defining and initializing scanning parameters, including: the fixed stride is X, the sliding window length is N, the threshold value is Z, the coefficient is Y, the sampling point number of each line is Imax, the sampling line number is JMax, wherein X is the interval between two sampling points in one line of scanning as shown in figure 1; the sampling point is a point measured when the SPM scans and measures the sample; the sliding window is defined as a data structure containing a plurality of measured points, N represents the number of sampling points contained in the sliding window, Z represents an ideal value of the degree of data dispersion in the sliding window, and is a reference value for dynamically and self-adjusting other parameters of the system, Y represents the adjustment scale of the step distance and is used for controlling the step distance;
step 2, defining the current sampling point number as i and the current sampling line number as j, wherein i and j are used for controlling the size of a two-dimensional scanning area, so that the scanning of the size of the appointed area is completed;
step 3, initializing i=1, j=1, representing that scanning measurement is performed from the first point of the first row;
step 4, defining the variance of a sliding window for scanning the ith sampling point of the current jth line as H i,j The method comprises the steps of carrying out a first treatment on the surface of the Defining the step distance of scanning the ith sampling point of the current jth line as X i,j The sliding window algorithm can dynamically adjust corresponding numerical values through calculation in the scanning process;
step 5, calculating the variance H of all sampling points in the j-th row sliding window i,j When i=1, let H i,j =z because the first is being performedWhen scanning and measuring a point, the number of sampling points contained in the sliding window at the moment is 0, and the calculated value is directly set to be the threshold value, namely, the fixed step is adopted for sampling, and the first point is not required to be adjusted;
step 6, calculating the step distance X of scanning the ith sampling point of the current jth line by using the formula (1) i,j ：
X i,j ＝X+Y×(Z-H i,j ) (1)
In a sliding window sampling algorithm, the discrete degree of sampling data in a window is used as a basis for adjusting the step distance, the step distance and the speed need to be reduced at the moment because the large discrete degree indicates that the measured morphology is changed severely, otherwise, the step distance and the speed need to be increased, and the variance can well represent the discrete degree of the data, so that the variance is selected as a calculation formula;
step 7, the piezoelectric micro-motion platform is used for adjusting the step distance X i,j Moving and driving the scanning object to reach the ith measuring point of the jth line, so that the ith scanning of the jth line is carried out on the scanning object on the ith measuring point of the jth line by utilizing the SPM probe to obtain the ith sampling point of the jth line;
step 8, judging whether i > N is true, if so, indicating that the number of sampling points in the current sliding window reaches N, namely the number of sampling points contained in the sliding window reaches the set length N, wherein the size of the sliding window influences the scanning measurement result, the excessive length can reduce the scanning measurement precision, the too small length can reduce the scanning measurement speed, so that a proper length N is selected to control, and step 9 is executed, otherwise, step 10 is executed;
step 9, replacing the ith sampling point with the ith-N sampling points in the sliding window, so that the sliding window slides forwards by one sampling point along with the scanning measurement direction, namely, one point which is just sampled is added into the sliding window, and the earliest point is removed from the window, so that the window slides forwards;
step 10, judging whether i > Imax is true, if so, finishing the scanning of the current j line, and executing step 11, otherwise, assigning i+1 to i, and executing step 5;
and step 11, judging whether j > JMax is met, if yes, finishing scanning, otherwise, assigning j+1 to j, and executing step 5 after i=1.
Claims (1)
1. A scanning measurement method for SPM dynamic self-adjusting sliding window sampling is applied to a scanning platform composed of a high-precision piezoelectric micro-motion platform, an SPM probe system and a computer; a scanning object is placed on the piezoelectric micro-motion platform, and an SPM probe is arranged above the scanning object; the scanning measurement method is characterized by comprising the following steps of:
step 1, defining and initializing scanning parameters, including: the fixed step distance is X, the length of the sliding window is N, the threshold value is Z, the coefficient is Y, the sampling point number of each row is Imax, the sampling line number is JMax, wherein X is the distance between two sampling points; n represents the number of sampling points contained in the sliding window, Z represents an ideal value of the degree of data dispersion in the sliding window, and Y represents the adjustment scale of the step distance;
step 2, defining the current sampling point number as i and the current sampling line number as j;
step 3, initializing i=1, j=1;
step 4, defining the variance of a sliding window for scanning the ith sampling point of the current jth line as H i,j The method comprises the steps of carrying out a first treatment on the surface of the Defining the step distance of scanning the ith sampling point of the current jth line as X i,j ；
Step 5, calculating the variance H of all sampling points in the j-th row sliding window i,j When i=1, let H i,j ＝Z；
Step 6, calculating the step distance X of scanning the ith sampling point of the current jth line by using the formula (1) i,j ：
X i,j ＝X+Y×(Z-H i,j ) (1)
Step 7, the piezoelectric micro-motion platform is used for adjusting the step distance X i,j Moving and driving the scanning object to reach the ith measuring point of the jth line, so that the ith scanning of the jth line is carried out on the scanning object on the ith measuring point of the jth line by utilizing the SPM probe to obtain the ith sampling point of the jth line;
step 8, judging whether i > N is met, if so, indicating that the sampling point number of the current sliding window reaches N, executing step 9, otherwise, executing step 10;
step 9, replacing the ith sampling point with the ith-N sampling points in the sliding window, so that the sliding window moves forwards by one sampling point;
step 10, judging whether i > Imax is true, if so, finishing the scanning of the current j line, and executing step 11, otherwise, assigning i+1 to i, and executing step 5;
and step 11, judging whether j > JMax is met, if yes, finishing scanning, otherwise, assigning j+1 to j, and executing step 5 after i=1.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103472266A (en) * | 2013-09-06 | 2013-12-25 | 南开大学 | Atomic force microscope dynamic imaging method based on step response curve of piezoelectric scanning tube |
| CN109142797A (en) * | 2018-09-05 | 2019-01-04 | 西安交通大学 | A kind of drop type scanning Ion Conductance Microscope and its probe and scan method |
| CN112955996A (en) * | 2018-06-29 | 2021-06-11 | 江苏集萃微纳自动化***与装备技术研究所有限公司 | SEM (scanning Electron microscope) guided AFM (atomic force microscope) morphology scanning method with dynamically changed scanning speed |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103472266A (en) * | 2013-09-06 | 2013-12-25 | 南开大学 | Atomic force microscope dynamic imaging method based on step response curve of piezoelectric scanning tube |
| CN112955996A (en) * | 2018-06-29 | 2021-06-11 | 江苏集萃微纳自动化***与装备技术研究所有限公司 | SEM (scanning Electron microscope) guided AFM (atomic force microscope) morphology scanning method with dynamically changed scanning speed |
| CN109142797A (en) * | 2018-09-05 | 2019-01-04 | 西安交通大学 | A kind of drop type scanning Ion Conductance Microscope and its probe and scan method |
Non-Patent Citations (1)
| Title |
|---|
| 用于并行SPM的图像合成技术研究;孔雯;赵钢;刘勇;张晋弘;褚家如;;现代制造工程;20100918(第09期);全文 * |
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