CN114295263A - Pressure sensor and system based on optical waveguide structure - Google Patents
Pressure sensor and system based on optical waveguide structure Download PDFInfo
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- CN114295263A CN114295263A CN202111392159.9A CN202111392159A CN114295263A CN 114295263 A CN114295263 A CN 114295263A CN 202111392159 A CN202111392159 A CN 202111392159A CN 114295263 A CN114295263 A CN 114295263A
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Abstract
The application relates to a pressure sensor and a system based on an optical waveguide structure, in particular to the field of pressure detection. When the pressure sensor needs to detect the pressure, the pressure is acted on the stress part, the stress part transmits the pressure to the elastic material part through the transparent frame, the elastic material part deforms under the action of pressure, so that the transparent frame moves downwards, because the lens is arranged in the transparent frame, and the central position of the lens is provided with the fixed part which fixes the central position of the lens in the transparent frame, when the transparent frame moves downwards, the lens is contacted, so that the lens generates certain rotation around the fixed part, thereby changing the deflection angle of the optical axis passing through the lens, so that the amount of the optical signal output through the lens is changed, and detecting the optical signal, and obtaining the pressure to be measured according to the corresponding relation between the intensity of the output optical signal and the pressure to be measured.
Description
Technical Field
The application relates to the field of pressure detection, in particular to a pressure sensor and a system based on an optical waveguide structure.
Background
Pressure refers to the force that occurs at the contact surface of two objects, either the vertical force of a gas against a solid and the surface of a liquid, or the vertical force of a liquid against the surface of a solid. For measuring the pressure of the macroscopic object, pressure = pressure × stressed area (F = pS) is generally adopted, and it is required to measure the stressed area S and the pressure p first, and then obtain the pressure to be measured through calculation.
In engineering technology, sensors for pressure are mostly based on piezoresistive effect, that is, resistance changes under the action of pressure, and pressure is determined through resistance change. The medium-pressure sensor has low detection sensitivity. Pressure sensors based on optical principles have a high sensitivity. For example, the propagation characteristics of the grating fiber are changed by pressure. However, the use of a grating fiber is costly.
Disclosure of Invention
The present invention is directed to provide a pressure sensor and a system based on an optical waveguide structure, so as to solve the problem of high cost of the pressure sensor based on the optical principle in the prior art.
In order to solve the requirements of convenient detection and high precision, the embodiment of the invention adopts the following technical scheme:
in a first aspect, the present application provides a pressure sensor of an optical waveguide structure, the pressure sensor comprising: the optical waveguide cavity, the stress layer, the transparent frame, the lens and the elastic material part; the side wall of the optical waveguide cavity is provided with a hole, the transparent frame is arranged in the hole, the elastic material portion is arranged on the inner wall of the optical waveguide cavity and corresponds to the hole, one end, away from the hole, of the transparent frame is in contact with the elastic material portion, the lens is arranged inside the transparent frame, the central position of the lens is provided with a fixing portion, the fixing portion fixes the central position of the lens inside the transparent frame, and the stress layer is arranged at the top of one end, away from the elastic material portion, of the transparent frame.
Optionally, the lens is ellipsoidal in shape.
Optionally, an included angle between a long axis of the cross section of the ellipsoidal lens and the elastic material portion is larger than an included angle between a short axis of the cross section of the lens and the elastic material portion.
Optionally, the material of the lens is a thermoplastic polyester material.
Optionally, the surface of the lens is provided with a plurality of stripe structures.
Optionally, the lens is doped with noble metal nanoparticles.
Optionally, the lens is doped with germanium element and/or boron element.
Optionally, the transparent frame is made of tempered glass.
In a second aspect, the present application provides a pressure sensing system based on an optical waveguide structure, the system comprising: the pressure sensor comprises a light source, an optical signal detector, a computer and the pressure sensor based on the optical waveguide structure, wherein the light source and the optical signal detector are respectively arranged at two ends of an optical waveguide cavity of the pressure sensor, and the computer is electrically connected with the optical signal detector and is used for obtaining the output optical signal intensity of the optical waveguide cavity detected by the optical signal detector and obtaining the pressure to be detected according to the corresponding relation between the preset output optical signal intensity and the pressure to be detected.
The invention has the beneficial effects that:
the application provides a pressure sensor includes: the optical waveguide cavity, the stress layer, the transparent frame, the lens and the elastic material part; the side wall of the optical waveguide cavity is provided with a hole, the transparent frame is arranged in the hole, the elastic material part is arranged on the inner wall of the optical waveguide cavity and corresponds to the hole, one end of the transparent frame, which is far away from the hole, is in contact with the elastic material part, the lens is arranged in the transparent frame, the central position of the lens is provided with a fixing part, the fixing part fixes the central position of the lens in the transparent frame, the stress layer is arranged at the top of one end of the transparent frame, which is far away from the elastic material part, when pressure needs to be detected, pressure is acted on the stress part, because the transparent frame is arranged at the bottom of the stress part, the elastic material part is arranged at the bottom of the transparent frame, under the action of the pressure, the stress part transmits the pressure to the elastic material part through the transparent frame, the elastic material part deforms under the action of the pressure, so that the transparent frame moves downwards, and because the lens is arranged in the transparent frame, and the central point of lens puts and is provided with the fixed part, and the fixed part fixes the central point of lens inside the transparent frame, when the transparent frame moves down, contacts this lens for this lens produces certain rotation around this fixed part, and then makes the contained angle of the optical axis through this lens and horizontal direction change, thereby makes the volume of the light signal of output through this lens change, through detecting this light signal, and through this output light signal intensity and the corresponding relation of pressure that awaits measuring, obtains the pressure that awaits measuring. This application uses the output volume of light signal to detect pressure to make the pressure accuracy who obtains higher, and because the rotation of lens is tiny all can make the optical axis of this lens and the contained angle of horizontal direction change, then make also higher to the detectivity of pressure. In addition, the traditional optical waveguide cavity and the lens are applied, and the cost is low.
Drawings
Fig. 1 is a schematic structural diagram of a pressure sensor based on an optical waveguide structure according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of another pressure sensor based on an optical waveguide structure according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of another pressure sensor based on an optical waveguide structure according to an embodiment of the present invention.
Icon: 10-an optical waveguide cavity; 11-holes; 20-transparent frame; (ii) a 30-an elastic material portion; 40-a stress layer; 50-a lens; 51-a fixed part.
Detailed Description
The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings, and it should be understood that the preferred embodiments described herein are merely illustrative and explanatory of the embodiments of the present invention, and are not restrictive of the embodiments of the invention.
Fig. 1 is a schematic structural diagram of a pressure sensor based on an optical waveguide structure according to an embodiment of the present invention; as shown in fig. 1, the present application provides a pressure sensor based on an optical waveguide structure, the pressure sensor comprising: the optical waveguide cavity 10, the stress layer 40, the transparent frame 20, the lens 50 and the elastic material part 30; the side wall of the optical waveguide cavity 10 is provided with a hole 11, the transparent frame 20 is arranged in the hole 11, the elastic material portion 30 is arranged on the inner wall of the optical waveguide cavity 10 and corresponds to the position of the hole 11, one end, far away from the hole 11, of the transparent frame 20 is arranged in contact with the elastic material portion 30, the lens 50 is arranged inside the transparent frame 20, the central position of the lens 50 is provided with a fixing portion 51, the fixing portion 51 fixes the central position of the lens 50 inside the transparent frame 20, and the stress layer 40 is arranged at the top of one end, far away from the elastic material portion 30, of the transparent frame 20.
The specific geometric parameters of the optical waveguide cavity 10 are determined according to actual requirements, and are not specifically limited herein, in practical applications, the interior of the optical waveguide cavity 10 is a hollow cavity, the side wall of the optical waveguide cavity 10 is provided with a hole 11, the hole 11 penetrates through the side wall of the optical waveguide, the elastic material portion 30 is disposed at a position of the inner wall of the optical waveguide cavity 10 opposite to the hole 11, the elastic material portion 30 needs to have a certain elastic coefficient, so that under the action of pressure, the volume change of the elastic material portion 30 conforms to the change rule of a linear function, the transparent frame 20 is disposed inside the hole 11, so that one end of the transparent frame 20 is in contact with the elastic material portion 30, that is, the bottom of the transparent frame 20 is in contact with the elastic material portion 30, the top of the transparent frame 20, that is, that the end close to the hole 11, is provided with the stressed portion, in practical applications, the force-bearing portion is made of a rigid material, the transparent frame 20 is made of a rigid material, that is, the force-bearing portion and the transparent frame 20 are not deformed under the action of pressure, the material of the transparent frame 20 may be all transparent materials, or only two side surfaces of the transparent frame 20 opposite to two ends of the optical waveguide cavity 10 may be made of transparent materials, the lens 50 is disposed inside the transparent frame 20, the central position of the lens 50 is provided with a fixing portion 51, the central position of the lens 50 is fixed to the transparent frame 20, so that the central position of the lens 50 is not moved, that is, when the lens 50 contacts the lens 50 when the inside of the transparent frame 20 moves up and down, the lens 50 rotates along the fixing portion 51, and in practical applications, when the transparent frame 20 leaves the lens 50, the lens 50 rotates reversely, so that the lens 50 is restored to a state and an angle between no detection pressures, the volume of the inner cavity of the transparent frame 20 is larger than the volume of the lens 50, and when the transparent frame 20 moves up and down, one end of the transparent frame 20 close to the hole 11 contacts with the lens 50, when detecting pressure, a light source and a light signal detection device are arranged at two ends of the optical waveguide cavity 10, light of the light source is transmitted to the light signal detection device through the lens 50, the lens 50 is selected, an included angle between an optical axis passing through the lens 50 and a horizontal direction is changed, so that an emergent light signal of the lens 50 is changed, when detecting pressure is required, the light source and the light signal detection device at two ends of the optical waveguide cavity 10 are opened, and pressure is applied to the force-receiving portion, because the bottom of the force-receiving portion is provided with the transparent frame 20, and the bottom of the transparent frame 20 is provided with the elastic material portion 30, under the effect of pressure, the force-receiving portion transmits the pressure to the elastic material portion 30 through the transparent frame 20, the elastic material portion 30 deforms under the action of pressure, so that the transparent frame 20 moves downwards, because the lens 50 is arranged in the transparent frame 20, the fixing portion 51 is arranged at the central position of the lens 50, the fixing portion 51 fixes the central position of the lens 50 in the transparent frame 20, when the transparent frame 20 moves downwards, the lens 50 is contacted with the lens 50, so that the lens 50 rotates around the fixing portion 51 to a certain degree, further, an included angle between the optical axis of the lens 50 and the horizontal direction is changed, so that the quantity of optical signals output by the lens 50 is changed, the pressure to be detected is obtained by detecting the optical signals and according to the corresponding relation between the intensity of the output optical signals and the pressure to be detected, the output quantity of the optical signals is used for detecting the pressure, the accuracy of the obtained pressure is high, and because the slight rotation of the lens 50 can change the optical axis of the lens 50, so it is very sensitive and the precision is very high to measure the temperature through detecting the optical signal change to the pressure sensor of this application is because simple structure, makes this application simple manufacture, and is with low costs, easy operation in pressure detection, and detectivity is high.
Optionally, the lens 50 has a certain elasticity, and when the transparent frame 20 leaves the lens 50, the lens 50 rotates reversely due to the elasticity of the lens 50, so that the lens 50 returns to the state and angle between the states without detecting the pressure.
In the present invention, the lens 50 is also micro-deformed under pressure, thereby changing the focusing performance of the lens. Therefore, the present invention can realize higher sensitivity pressure detection.
Furthermore, the optical waveguide cavity is coated with a reflective film 10 so that the optical waveguide cavity 10 has good wave-guiding performance for light therein. In addition, the twisting and deformation of the lens 50 more severely changes the propagation characteristics of the light in the optical waveguide cavity 10. Therefore, such an arrangement enables higher sensitivity pressure detection.
Fig. 2 is a schematic structural diagram of another pressure sensor based on an optical waveguide structure according to an embodiment of the present invention; as shown in fig. 2, the transparent frame 20 may be a rectangular parallelepiped cavity structure, or may be a rectangular parallelepiped cavity structure, and if the transparent frame 20 is a rectangular parallelepiped cavity structure, one surface is removed, and then one end of the removed surface is disposed in contact with the elastic material portion 30, and the elastic material portion 30 is also correspondingly disposed to support two opposite sidewalls of the transparent frame 20, so as to reduce the loss of pressure during the process of transmitting the pressure to the elastic material portion 30 through the transparent frame 20.
Optionally, the lens 50 is ellipsoidal in shape.
The shape of the lens 50 is provided in an ellipsoidal shape, so that the amount of the output optical signal of the lens 50 is changed only when the lens 50 is selected along the fixing portion 51, and the ellipsoidal lens 50 is easy to process and low in cost.
Optionally, the included angle between the long axis of the cross section of the ellipsoidal lens 50 and the elastic material portion 30 is larger than the included angle between the short axis of the cross section of the lens 50 and the elastic material portion 30.
The lens 50 is formed in an ellipsoidal shape, and an included angle between a major axis of a cross section of the ellipsoidal lens 50 and the elastic material portion 30 is larger than an included angle between a minor axis of a cross section of the lens 50 and the elastic material portion 30, that is, the lens 50 is rotated by the transparent frame 20 at a maximum angle at which both the included angle between the major axis of the cross section of the ellipsoidal lens 50 and the elastic material portion 30 and the included angle between the minor axis of the cross section of the lens 50 and the elastic material portion 30 are close to 90 degrees, and at this time, since the lens 50 is formed in an ellipsoidal shape, if the pressure of the transparent frame 20 on the lens 50 is removed, the state of the lens 50 returns to an original state by the elastic force of the lens.
Optionally, the material of the lens 50 is a thermoplastic polyester material.
The thermoplastic polyester material has the advantages of excellent elasticity of rubber and easy processability of thermoplastic plastics, adjustable hardness and free design, and the ellipsoidal lens 50 made of the material is easy to deform under the change of pressure, so that an optical signal is easier to change, and the pressure measurement precision is higher and more sensitive.
Fig. 3 is a schematic structural diagram of another pressure sensor based on an optical waveguide structure according to an embodiment of the present invention; as shown in fig. 3, the surface of the lens 50 is optionally provided with a plurality of stripe structures.
The surface of the lens 50 is provided with a plurality of stripe structures, a plurality of stripes can form a layer of micro prisms on the surface of the lens 50, optical signals are easy to change due to prism deviation on the surface of the lens 50, the optical signal change is more obvious, and the pressure measurement precision is higher and more sensitive.
Optionally, the lens 50 is doped with noble metal nanoparticles.
The lens 50 is doped with precious metal nanoparticles, which generate surface plasmons when an optical signal passes through, and further change the output optical signal, so that the pressure measurement accuracy is higher and more sensitive, wherein the precious metal nanoparticles may be made of one or more of gold, silver and other precious metal materials.
Optionally, the lens 50 is doped with germanium and/or boron.
The lens 50 may be doped with germanium element, may also be doped with boron element, and may also be doped with germanium element and boron element at the same time, so that when the lens 50 is pressed by the transparent frame 20, not only the included angle between the optical axis of the lens 50 and the horizontal direction changes, but also the dopant in the lens 50 is pressed to cause the refractive index to change. The spectral change of the optical signal is more obvious, the pressure change of the transparent frame 20 is more obvious, and the pressure measurement is more sensitive and more accurate.
Optionally, the transparent frame 20 is made of tempered glass.
The transparent frame 20 of the toughened glass has three advantages, namely, the toughened glass has high strength and is not easy to deform and break when being pressed, the toughened glass cannot influence the measurement result because of friction with the waveguide tube wall when being pressed to move up and down, the inner sides of the two vertical glass walls of the toughened glass frame can reflect a part of optical signals and reflect back and forth between the two vertical glass walls, the optical signals are further changed through the elliptical lens 50, the optical signals are easier to change, and the pressure measurement precision is higher and more sensitive.
The application provides a pressure sensor includes: the optical waveguide cavity 10, the stress layer 40, the transparent frame 20, the lens 50 and the elastic material part 30; the side wall of the optical waveguide cavity 10 is provided with a hole 11, a transparent frame 20 is arranged in the hole 11, an elastic material part 30 is arranged on the inner wall of the optical waveguide cavity 10 and corresponds to the position of the hole 11, one end of the transparent frame 20 far away from the hole 11 is arranged in contact with the elastic material part 30, a lens 50 is arranged in the transparent frame 20, a fixing part 51 is arranged at the central position of the lens 50, the fixing part 51 fixes the central position of the lens 50 in the transparent frame 20, a stress layer 40 is arranged at the top of one end of the transparent frame 20 far away from the elastic material part 30, when pressure needs to be detected, pressure is applied to the stress part, due to the transparent frame 20 arranged at the bottom of the stress part and the elastic material part 30 arranged at the bottom of the transparent frame 20, the stress part transmits the pressure to the elastic material part 30 through the transparent frame 20 under the action of the pressure, and the elastic material part 30 deforms under the action of the pressure, and further make the transparent frame 20 move downwards, because the inside of the transparent frame 20 is provided with the lens 50, and the central position of the lens 50 is provided with the fixing part 51, the fixing part 51 fixes the central position of the lens 50 inside the transparent frame 20, when the transparent frame 20 moves downwards, the lens 50 contacts the lens 50, so that the lens 50 rotates around the fixing part 51 to a certain extent, and further the included angle between the optical axis passing through the lens 50 and the horizontal direction changes, so that the amount of the optical signal output through the lens 50 changes, the pressure to be measured is obtained by detecting the optical signal, and the corresponding relation between the intensity of the output optical signal and the pressure to be measured, the application uses the output amount of the optical signal to detect the pressure, so that the accuracy of the obtained pressure is high, and because the slight rotation of the lens 50 can change the included angle between the optical axis of the lens 50 and the horizontal direction, the sensitivity of detection of pressure is also made higher.
The application provides a pressure sensing system based on optical waveguide structure, the system includes: the pressure sensor comprises a light source, an optical signal detector, a computer and the pressure sensor with the optical waveguide structure, wherein the light source and the optical signal detector are respectively arranged at two ends of an optical waveguide cavity 10 of the pressure sensor, and the computer is electrically connected with the optical signal detector and is used for obtaining the output optical signal intensity of the optical waveguide cavity 10 detected by the optical signal detector and obtaining the pressure to be detected according to the corresponding relation between the preset output optical signal intensity and the pressure to be detected.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (9)
1. A pressure sensor based on an optical waveguide structure, the pressure sensor comprising: the optical waveguide cavity, the stress layer, the transparent frame, the lens and the elastic material part; be provided with the hole on the lateral wall in light waveguide chamber, the translucent frame sets up in the hole, elastic material portion sets up on the inner wall in light waveguide chamber, and with the hole position corresponds, the translucent frame is kept away from the one end of hole with elastic material portion contact sets up, lens set up inside the translucent frame, the central point of lens puts and is provided with the fixed part, the fixed part will the central point of lens puts and fixes inside the translucent frame, the atress layer sets up the translucent frame is kept away from the top of the one end of elastic material portion.
2. The pressure sensor based on optical waveguide structure of claim 1, wherein the shape of said lens is an ellipsoid shape.
3. The pressure sensor based on optical waveguide structure as claimed in claim 2, wherein the included angle between the major axis of the cross section of the lens of the ellipsoidal shape and the elastic material portion is larger than the included angle between the minor axis of the cross section of the lens and the elastic material portion.
4. The optical waveguide structure-based pressure sensor of claim 3, wherein the material of the lens is a thermoplastic polyester material.
5. The optical waveguide structure-based pressure sensor according to claim 4, wherein the surface of the lens is provided with a plurality of stripe structures.
6. The optical waveguide structure-based pressure sensor of claim 5, wherein the lens is doped with noble metal nanoparticles.
7. The optical waveguide structure-based pressure sensor according to claim 6, wherein the lens is doped with germanium element and/or boron element.
8. The pressure sensor based on the optical waveguide structure as claimed in claim 7, wherein the material of the transparent frame is tempered glass.
9. A pressure sensing system based on an optical waveguide structure, the system comprising: the pressure sensor based on the optical waveguide structure comprises a light source, an optical signal detector, a computer and the pressure sensor based on the optical waveguide structure as claimed in any one of claims 1 to 8, wherein the light source and the optical signal detector are respectively arranged at two ends of an optical waveguide cavity of the pressure sensor, and the computer is electrically connected with the optical signal detector and is used for acquiring the output optical signal intensity of the optical waveguide cavity detected by the optical signal detector and acquiring the pressure to be detected according to the preset corresponding relation between the output optical signal intensity and the pressure to be detected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111392159.9A CN114295263A (en) | 2021-11-23 | 2021-11-23 | Pressure sensor and system based on optical waveguide structure |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111392159.9A CN114295263A (en) | 2021-11-23 | 2021-11-23 | Pressure sensor and system based on optical waveguide structure |
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| CN114295263A true CN114295263A (en) | 2022-04-08 |
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| CN202111392159.9A Withdrawn CN114295263A (en) | 2021-11-23 | 2021-11-23 | Pressure sensor and system based on optical waveguide structure |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115014623A (en) * | 2022-06-10 | 2022-09-06 | 清华大学 | Optical waveguide touch sensor, sensing system, calibration method and robot |
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2021
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115014623A (en) * | 2022-06-10 | 2022-09-06 | 清华大学 | Optical waveguide touch sensor, sensing system, calibration method and robot |
| CN115014623B (en) * | 2022-06-10 | 2023-12-29 | 清华大学 | Optical waveguide touch sensor, sensing system, calibration method and robot |
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Application publication date: 20220408 |