CN114279338B - Reading head mounting tool, integration method thereof and reading head mounting method - Google Patents
Reading head mounting tool, integration method thereof and reading head mounting method Download PDFInfo
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- CN114279338B CN114279338B CN202111597218.6A CN202111597218A CN114279338B CN 114279338 B CN114279338 B CN 114279338B CN 202111597218 A CN202111597218 A CN 202111597218A CN 114279338 B CN114279338 B CN 114279338B
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- 238000000034 method Methods 0.000 title claims abstract description 33
- 230000010354 integration Effects 0.000 title claims abstract description 14
- 239000000758 substrate Substances 0.000 claims abstract description 84
- 238000009434 installation Methods 0.000 claims abstract description 34
- 238000005259 measurement Methods 0.000 claims abstract description 10
- 238000006073 displacement reaction Methods 0.000 claims description 20
- 238000009966 trimming Methods 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 6
- 230000001105 regulatory effect Effects 0.000 claims description 4
- 230000003014 reinforcing effect Effects 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 5
- 229910052710 silicon Inorganic materials 0.000 abstract description 5
- 239000010703 silicon Substances 0.000 abstract description 5
- 238000011166 aliquoting Methods 0.000 abstract description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 230000000712 assembly Effects 0.000 description 3
- 238000000429 assembly Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000003754 machining Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 210000005069 ears Anatomy 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 210000001503 joint Anatomy 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000003351 stiffener Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The invention relates to the field of grating measurement, in particular to a reading head installation tool, an integration method thereof and a reading head installation method. The reading head mounting tool comprises a substrate, a plurality of plane gratings and a fine adjustment assembly; the base plate is used for being installed on the reading head mounting plate of the workpiece table, the fine adjustment assembly is installed on the base plate, the plane grating is installed in the fine adjustment assembly, the fine adjustment assembly is at least used for adjusting the pose of the plane grating relative to the base plate, and the plane grating corresponds to the reading heads on the reading head mounting plate one by one. The integration method of the reading head installation tool is used for realizing the integration assembly of the reading head installation tool. The reading head installation method is used for realizing accurate installation of the reading head. The reading head mounting tool, the integration method thereof and the reading head mounting method can improve the mounting precision and the mounting consistency of the reading head, thereby ensuring the positioning precision of a double-workpiece table, leveling and focusing, silicon wafer alignment and aliquoting system.
Description
Technical Field
The invention relates to the field of grating measurement, in particular to a reading head installation tool, an integration method thereof and a reading head installation method.
Background
The displacement of the workpiece table is mainly measured by the workpiece table plane grating measuring system, so that the measuring precision of the workpiece table plane grating position measuring system directly influences the positioning precision of the workpiece table, and the reading head is a main component of the workpiece table plane grating position measuring system, and the precision of the installation position of the reading head directly influences the measuring precision.
When the reading head in the existing workpiece table plane grating position measuring system is installed, the reading head can be installed and positioned with the workpiece table clamping disc only through screws, the installation precision of the reading head is determined by the machining precision of the reading head installation hole, and the positioning precision of the double-workpiece table, leveling and focusing and silicon wafer alignment aliquoting systems is seriously affected due to the influences of the machining errors of the workpiece table clamping disc reading head installation hole position and the reading head installation errors, the relative installation precision of the reading head and the workpiece table is lower, the consistency is poor, the measuring signal intensity of the workpiece table plane grating position measuring system is directly influenced, and the positioning precision of the double-workpiece table, leveling and focusing and silicon wafer alignment aliquoting systems is seriously influenced.
In summary, how to overcome the above-mentioned drawbacks of the existing mounting method of the reading head is a technical problem to be solved by those skilled in the art.
Disclosure of Invention
The invention aims to provide a reading head installation tool, an integration method thereof and a reading head installation method, so as to solve the technical problems of low relative installation precision and poor consistency of a reading head and a workpiece table in the reading head installation method in the prior art.
The invention provides a reading head mounting tool which comprises a substrate, a planar grating and a fine adjustment assembly;
the substrate is used for being mounted on a reading head mounting disc of a workpiece table, the fine adjustment assembly is mounted on the substrate, the fine adjustment assembly is mounted on the edge of the substrate, the plane grating is mounted on the fine adjustment assembly, the fine adjustment assembly is used for adjusting the relative position and parallelism of the plane grating and the substrate, and the plane grating corresponds to the reading heads on the reading head mounting disc one by one.
Compared with the prior art, the invention has the beneficial effects that:
The reading head mounting tool provided by the invention can adjust the pose of the planar grating relative to the substrate by utilizing the fine adjustment assembly, so that the position and the pose of the planar grating relative to the substrate meet the precision requirement, at the moment, all the planar gratings are positioned on the same plane, the distances between the planar gratings relative to the substrate in the direction vertical to the substrate are the same, and the trend of the grating lines of all the planar gratings meet the requirement.
After the substrate is mounted on the reading head mounting disc of the workpiece table, the plane grating can provide a high-precision reference standard for signals of the reading head mounted on the reading head mounting disc so as to adjust the reading head, and even if errors exist in the mounting hole position of the reading head, the position of the reading head can be adjusted to be within the range conforming to the mounting precision by adjusting the reading head.
Preferably, as an implementation manner, the fine adjustment assembly includes a mounting seat, a linear adjustment sliding table, an adapter seat and a rotation angle adjustment sliding table.
One side of the linear adjustment sliding table is fixedly connected with the mounting seat, the adapter seat is fixedly connected with the other side of the linear adjustment sliding table, the corner adjustment sliding table is mounted on the adapter seat, the plane grating is fixed on a rotating table top of the corner adjustment sliding table, and the mounting seat is fixed on the substrate.
Preferably, as an implementation manner, the linear adjustment sliding table comprises a first fixed table, a mobile table and a locking assembly, wherein the first fixed table is fixedly connected with the mounting seat, and the mobile table is fixedly connected with the adapter seat.
A displacement adjusting bolt is connected between the first fixed table and the mobile table, and the displacement adjusting bolt is used for adjusting the displacement of the mobile table relative to the first fixed table; the locking assembly is used for locking the mobile station to the first fixed station.
Preferably, as an implementation manner, the displacement adjusting bolt comprises a Z-direction adjusting bolt, the length direction of the Z-direction adjusting bolt is perpendicular to the base plate, a first side lug is arranged at the edge part of the first fixing table, a first threaded hole is formed in the first side lug, a first adjusting plate is arranged at the edge part of the mobile table, the Z-direction adjusting bolt is matched with the first threaded hole, and the tail end of the Z-direction adjusting bolt is abutted to the first adjusting plate;
And/or, displacement adjusting bolt includes Y to adjusting bolt, Y to adjusting bolt's length direction with the face of base plate is parallel, the edge of first fixed station is provided with the second side ear, the second screw hole has been seted up on the second side ear, the edge of mobile station is provided with the second regulating plate, Y to adjusting bolt with the cooperation of second screw hole, Y to adjusting bolt's tail end with the butt of second regulating plate.
Preferably, as an implementation manner, the rotation angle adjusting sliding table comprises a second fixed table and a rotating table, and the second fixed table is fixedly connected with the adapter seat; the rotating table is arranged opposite to the second fixed table, an elastic connecting piece is connected between the rotating table and the second fixed table, and the plane grating is arranged on the table top of the rotating table, which is opposite to the second fixed table.
And a corner adjusting bolt is arranged between the second fixed table and the rotating table and used for adjusting the deflection angle of the rotating table relative to the second fixed table.
Preferably, as an implementation manner, the corner adjusting bolt comprises a first corner adjusting bolt, the length direction of the first corner adjusting bolt is perpendicular to the rotating table, a first threaded hole is formed in the rotating table, the first corner adjusting bolt is matched with the first threaded hole, and the tail end of the first corner adjusting bolt is abutted against the second fixed table;
And/or, the corner adjusting bolt comprises a second corner adjusting bolt, the second corner adjusting bolt is parallel to the rotating table, an elastic plate is connected between the edge of the second fixing table and the rotating table, a third side lug is arranged at the edge part of the second fixing table, a second threaded hole is formed in the third side lug, the second corner adjusting bolt is matched with the second threaded hole, and the tail end of the second corner adjusting bolt is in butt joint with the elastic plate.
Preferably, as an implementation manner, the fine tuning component is detachably connected with the substrate;
And/or, be provided with the reference column on the base plate, be provided with the locating hole on the fine setting subassembly, the reference column with the locating hole one-to-one, just the reference column with the locating hole cooperation that corresponds.
Preferably, as an implementation manner, the fine adjustment assembly is mounted at an edge part of the substrate, and a reinforcing plate is fixedly attached to a middle area of the substrate;
and/or the plane grating is stuck to a bearing plate, and the bearing plate is detachably connected with the fine adjustment assembly;
and/or the bottom of the base plate is provided with at least two adjusting pieces, and the adjusting pieces are used for being in butt fit with the reading head mounting plate, are used for adjusting the height difference between the base plate and the reading head mounting plate and are used for adjusting the levelness of the base plate.
The invention provides an integration method of a reading head installation tool, which comprises the following steps:
Firstly, mounting a planar grating on a fine tuning assembly, then mounting the fine tuning assembly on a substrate, measuring the pose of the planar grating relative to the substrate by using a three-coordinate measuring instrument, and adjusting the fine tuning assembly according to the measurement result of the three-coordinate measuring instrument until the measurement result of the three-coordinate measuring instrument meets the mounting requirement.
Compared with the prior art, the invention has the beneficial effects that:
According to the integrated method of the mounting tool for the reading head, the three-coordinate measuring instrument is adopted to measure the pose of the plane grating relative to the substrate, the pose of the plane grating is reflected through the measuring result of the three-coordinate measuring instrument, and then the fine adjustment component is adjusted according to the measuring result, so that the position and the pose of the plane grating relative to the substrate can reach higher precision, and the mounting precision and the consistency of the reading head debugged by the mounting tool for the reading head are higher.
The reading head installation method provided by the invention is applied to the reading head installation tool, and comprises the following steps:
Firstly, mounting a reading head mounting tool on a reading head mounting disc, then mounting the reading head on the reading head mounting disc, and providing a reference standard for signals of the reading head by utilizing a plane grating on the reading head mounting tool;
Acquiring the ratio of the alternating current electric signal to the direct current electric signal of the reading head, and judging that the optical power of the reading head reaches the standard if the ratio is larger than or equal to a preset value, so as to meet the installation requirement; if the ratio is smaller than the preset value, judging that the optical power of the reading head does not reach the standard, and adjusting the reading head until the ratio is larger than or equal to the preset value;
And disassembling the reading head mounting tool.
Compared with the prior art, the invention has the beneficial effects that:
the reading head mounting tool applied to the reading head mounting method can provide a high-precision reference standard for signals of the reading head, and on the basis, the position and the gesture of the reading head can be reflected by the ratio of alternating current signals to direct current signals of the reading head, so that the reading head can be debugged according to the ratio result, and the debugged reading head can obtain higher mounting precision and consistency.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present invention, and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of an assembly structure of a read head mounting tool and a read head mounting plate according to an embodiment of the present invention;
FIG. 2 is a schematic top view of a mounting fixture for a read head according to an embodiment of the present invention;
FIG. 3 is a schematic front view of a fine tuning assembly in a tool for installing a read head according to an embodiment of the present invention;
Fig. 4 is a schematic perspective view of a fine tuning assembly in a mounting fixture for a reading head according to an embodiment of the present invention;
FIG. 5 is a schematic bottom view of a trimming assembly in a mounting fixture for a read head according to an embodiment of the present invention;
fig. 6 is a schematic perspective view of a linear adjustment sliding table in a read head installation tool according to an embodiment of the present invention;
Fig. 7 is a schematic perspective view of a substrate in a mounting fixture for a reading head according to an embodiment of the present invention;
Fig. 8 is a schematic perspective view of another view angle of a substrate in the read head mounting tool according to the embodiment of the present invention.
Reference numerals illustrate:
1000-a reading head mounting tool;
1100-a substrate; 1110-positioning columns; 1120-stiffener; 1130-an adjustment; 1140-first mounting holes;
1200-a trimming assembly; 1210-mount; 1211-positioning holes; 1220-linearly adjusting the sliding table; 1221-a first stationary stage; 1222-a mobile station; 1223-locking assembly; 1224-Z adjusting bolt; 1225-first side ear; 1226-a first adjustment plate; 1227-Y adjusting bolt; 1228-second side ears; 1229-a second adjustment plate; 1230-an adapter; 1240-adjusting the sliding table by rotating angle; 1241-a second stationary station; 1242-a turret; 1243-first angle adjusting bolt; 1244-a second rotation angle adjustment bolt; 1245-third side ear; 1246-elastic plate;
1300-plane grating;
1400-carrier plate;
2000-reading head mounting plate;
3000-reading head.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the azimuth or positional relationship indicated by the term "horizontal" or the like is based on the azimuth or positional relationship shown in the drawings, and is merely for convenience of description and simplification of the description, and does not indicate or imply that the apparatus or element referred to must have a specific azimuth, be configured and operated in a specific azimuth, and thus should not be construed as limiting the present invention.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted", "connected" and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
The invention will now be described in further detail by way of specific examples of embodiments in connection with the accompanying drawings.
Referring to fig. 1-5, the present embodiment provides a read head mounting tool 1000, which includes a substrate 1100, a planar grating 1300, and a fine tuning assembly 1200; the substrate 1100 is used for being mounted on the reading head mounting plate 2000 of the workpiece table, the fine tuning assembly 1200 is mounted on the substrate 1100, the fine tuning assembly 1200 is mounted on the edge portion of the substrate 1100, the planar grating 1300 is mounted on the fine tuning assembly 1200, the fine tuning assembly 1200 is used for adjusting the relative position and parallelism of the planar grating 1300 and the substrate 1100, and the planar grating 1300 corresponds to the reading heads 3000 on the reading head mounting plate 2000 one by one.
The mounting fixture 1000 for the reading head provided in this embodiment can utilize the fine adjustment assembly 1200 to adjust the pose of the planar grating 1300 relative to the substrate 1100, so that the position and the pose of the planar grating 1300 relative to the substrate 1100 meet the precision requirement, at this time, each planar grating 1300 is located on the same plane, the spacing of each planar grating 1300 relative to the substrate 1100 in the direction perpendicular to the substrate 1100 is the same, and the trend of the grid line of each planar grating 1300 meets the requirement.
After the substrate 1100 is mounted on the reading head mounting disc 2000 of the workpiece table, the planar grating 1300 can provide a high-precision reference standard for signals of the reading head 3000 mounted on the reading head mounting disc 2000 so as to adjust the reading head 3000, and even if errors exist in mounting holes of the reading head, the pose of the reading head 3000 can be adjusted to be within a range conforming to the mounting precision by adjusting the reading head 3000, so that the reading head 3000 debugged by the reading head mounting tool 1000 provided by the embodiment has higher mounting precision and consistency, and ensures the positioning precision of a system for uniformly dividing the workpiece table, leveling and focusing, and aligning silicon wafers.
The mounting seat 1210, the linear adjustment sliding table 1220, the adapter seat 1230 and the rotation angle adjustment sliding table 1240 may be disposed in the specific structure of the fine adjustment assembly 1200, where one side of the linear adjustment sliding table 1220 is fixedly connected with the mounting seat 1210, and the other side is fixedly connected with the adapter seat 1230, so that the adapter seat 1230 can perform linear movement relative to the mounting seat 1210 by adjusting the linear adjustment sliding table 1220; the rotation angle adjusting sliding table 1240 is arranged on the adapter seat 1230, and the plane grating 1300 is fixed on the rotating table surface of the rotation angle adjusting sliding table 1240, so that the plane grating 1300 can rotate relative to the adapter seat 1230 by adjusting the rotation angle adjusting sliding table 1240, and the posture adjustment of the plane grating 1300 relative to the adapter seat 1230 is realized; the mounting seat 1210 is fixed on the substrate 1100 to realize the mounting and fixing of the fine adjustment assembly 1200 and the substrate 1100, and the movement and rotation of the planar grating 1300 relative to the substrate 1100 can be realized under the combined action of the linear adjustment sliding table 1220 and the rotation angle adjustment sliding table 1240, so that the position adjustment and the posture adjustment of the planar grating 1300 relative to the substrate 1100 can be realized.
Specifically, referring to fig. 3,4 and 6, a first fixed stage 1221, a movable stage 1222 and a locking assembly 1223 may be disposed in the linear adjustment slide 1220, the first fixed stage 1221 is fixedly connected to the mount 1210, the movable stage 1222 is fixedly connected to the adapter 1230, a displacement adjustment bolt is connected between the first fixed stage 1221 and the movable stage 1222, the displacement adjustment bolt is capable of adjusting the displacement of the movable stage 1222 relative to the first fixed stage 1221, the locking assembly 1223 is capable of locking the movable stage 1222 and the first fixed stage 1221 with each other, and when the relative position of the planar grating 1300 relative to the substrate 1100 in the length direction of the displacement adjustment bolt needs to be adjusted, the locking assembly 1223 is released first, so that the movable stage 1222 can move relative to the first fixed stage 1221, and then the displacement adjustment bolt is rotated, so that the movable stage 1222 can move by a certain displacement, and thus, the linear movement of the planar grating 1300 relative to the substrate 1100 in the length direction of the displacement adjustment bolt can be achieved.
The displacement adjusting bolt may include a Z-direction adjusting bolt 1224, wherein the length direction of the Z-direction adjusting bolt 1224 is perpendicular to the substrate 1100, a first side lug 1225 is provided at an edge portion of the first fixed stage 1221, a first threaded hole is provided in the first side lug 1225, and a first adjusting plate 1226 is provided at an edge portion of the movable stage 1222; the Z-adjust bolt 1224 is mated with the first threaded bore and the trailing end of the Z-adjust bolt 1224 is abutted against the first adjustment plate 1226.
When the Z-adjusting bolt 1224 is rotated, the tail end of the Z-adjusting bolt 1224 naturally moves in the Z direction, so that the first adjusting plate 1226 abutting against the tail end of the Z-adjusting bolt 1224 naturally also moves in the Z direction, and further, the moving table 1222 also moves in the Z direction, so that the planar grating 1300 can move relative to the substrate 1100 along the direction perpendicular to the substrate 1100.
Correspondingly, the displacement adjusting bolt may further include a Y-direction adjusting bolt 1227, wherein the length direction of the Y-direction adjusting bolt 1227 is parallel to the base plate 1100, a second side lug 1228 is disposed at the edge position of the first fixed stage 1221, a second threaded hole is formed in the second side lug 1228, and a second adjusting plate 1229 is disposed at the edge position of the moving stage 1222; the Y-direction adjusting bolt 1227 is fitted with the second screw hole, and the tail end of the Y-direction adjusting bolt 1227 is abutted against the second adjusting plate 1229.
When the Y-direction adjusting bolt 1227 is rotated, the tail end of the Y-direction adjusting bolt 1227 moves in the Y-direction, and thus, the second adjusting plate 1229 abutting against the tail end of the Y-direction adjusting bolt 1227 naturally also moves in the Y-direction, and further, the moving table 1222 also moves in the Y-direction, so that the movement of the planar grating 1300 relative to the substrate 1100 in the direction parallel to the substrate 1100 can be realized.
In particular, the Y direction is a direction extending along an edge of the substrate 1100.
Specifically, referring to fig. 3 to 5, a second fixed table 1241 and a rotating table 1242 may be disposed in the rotation angle adjustment sliding table 1240, and the second fixed table 1241 is fixedly connected with the adaptor 1230, so as to fix the rotation angle adjustment sliding table 1240 and the adaptor 1230, and thus, the rotation angle adjustment sliding table 1240 may linearly move along with the adaptor 1230; the rotating table 1242 and the second fixed table 1241 are oppositely arranged, and an elastic connecting piece is connected between the rotating table 1242 and the second fixed table 1241, so that the rotating table 1242 and the second fixed table 1241 are connected, and the planar grating 1300 is mounted on a table surface of the rotating table 1242, which is opposite to the second fixed table 1241. A rotation angle adjusting bolt is provided between the second fixed stage 1241 and the rotating stage 1242, and the rotation angle of the rotating stage 1242 relative to the second fixed stage 1241 is adjusted by the rotation angle adjusting bolt.
When a certain rotation angle adjusting bolt is rotated, the rotating table 1242 can deflect correspondingly under the action of the elastic force of the elastic connecting piece, so that the posture of the plane grating 1300 mounted on the rotating table 1242 can be adjusted at least, and the plane grating 1300 and the substrate 1100 can meet the requirement of parallelism.
The elastic connecting piece is one or more.
The corner adjusting bolt comprises a first corner adjusting bolt 1243, the length direction of the first corner adjusting bolt 1243 is perpendicular to the rotating table 1242, a first threaded hole is formed in the rotating table 1242, the first corner adjusting bolt 1243 is matched with the first threaded hole in the rotating table 1242, and the tail end of the first corner adjusting bolt 1243 is abutted against the second fixed table 1241.
Because the second fixing table 1241 is fixedly disposed relative to the adapter 1230, when the first rotation angle adjusting bolt 1243 is rotated, the tail end of the first rotation angle adjusting bolt 1243 does not move, and under the action of the elastic force of the elastic connecting piece, the position of the rotating table 1242 matched with the first rotation angle adjusting bolt 1243 moves vertically to the rotating table 1242, and the rotating table 1242 deflects, so that the posture adjustment of the planar grating 1300 mounted on the rotating table 1242 can be realized.
Specifically, the length direction of the first rotation angle adjustment bolt 1243 is the Z direction.
The corner adjusting bolt further comprises a second corner adjusting bolt 1244, the length direction of the second corner adjusting bolt 1244 is parallel to the rotating table 1242, an elastic plate 1246 is connected between the edge of the second fixing table 1241 and the rotating table 1242, a third side lug 1245 is arranged at the edge of the second fixing table 1241, a second threaded hole is formed in the third side lug 1245, the second corner adjusting bolt 1244 is matched with the second threaded hole in the third side lug 1245, and the tail end of the second corner adjusting bolt 1244 is abutted against the elastic plate 1246.
Because the second fixing table 1241 is fixedly arranged relative to the adapter 1230, when the second rotation angle adjusting bolt 1244 is rotated, the part of the elastic plate 1246 abutted against the second rotation angle adjusting bolt 1244 can move synchronously along with the second rotation angle adjusting bolt 1244 under the action of the elastic force of the elastic connecting piece, at this time, the elastic plate 1246 can generate certain elastic deformation, and the rotating table 1242 can correspondingly deflect, so that the posture adjustment of the plane grating 1300 mounted on the rotating table 1242 can be realized, and the plane grating 1300 and the substrate 1100 can meet the requirement of parallelism.
It should be noted that, when the second rotation angle adjusting bolt 1244 moves toward the elastic plate 1246, the elastic plate 1246 is pushed to move at the contact position thereof, so that the elastic plate 1246 is elastically deformed; when the second rotation angle adjusting bolt 1244 moves away from the elastic plate 1246, the elastic plate 1246 will recover to deform under the action of its own elastic force, and still keep abutting with the tail end of the second rotation angle adjusting bolt 1244.
Specifically, the elastic plate 1246 may be manufactured using a steel plate.
Specifically, the length direction of the second rotation angle adjustment bolt 1244 is the X direction, the direction in which the X direction extends toward the inside of the substrate 1100, and the reverse direction thereof.
Preferably, referring to fig. 1 and 7, the micro-adjustment assembly 1200 and the substrate 1100 may be detachably connected, so that after the micro-adjustment assembly 1200 is adjusted, the micro-adjustment assembly 1200 may be detached, then the substrate 1100 is mounted on the reading head mounting plate 2000, and then the micro-adjustment assembly 1200 is re-mounted on the substrate 1100, at this time, it is not necessary to consider whether the fixing position of the substrate 1100 and the reading head mounting plate 2000 will interfere with the micro-adjustment assembly 1200, the difficulty of structural design is low, and convenient fixing of the substrate 1100 and the reading head mounting plate 2000 is convenient.
Further, the positioning columns 1110 may be disposed on the substrate 1100, and accordingly, the positioning holes 1211 are disposed on the fine tuning assembly 1200, the positioning columns 1110 and the positioning holes 1211 are in one-to-one correspondence, when the fine tuning assembly 1200 is mounted on the substrate 1100, the positioning columns 1110 may be inserted into the corresponding positioning holes 1211, and the positioning columns 1110 are positioned by using the positioning holes 1211, so that the fine tuning assembly 1200 can be mounted at a predetermined position with high position accuracy.
Specifically, the set of trimming assemblies 1200 corresponds to two positioning holes 1211, wherein the cross-section of one of the positioning holes 1211 has the same shape and size as the positioning post 1110; the cross section of the other positioning hole 1211 is a waist-shaped hole, and the corresponding positioning column 1110 is a cylinder, so that higher positioning accuracy can be obtained, and the mounting difficulty is reduced.
The trimming module 1200 is mounted on the edge portion of the substrate 1100, and the reinforcing plate 1120 is bonded and fixed to the middle region of the substrate 1100, and the reinforcing plate 1120 can improve the structural strength of the substrate 1100 without affecting the mounting of the trimming module 1200.
A plurality of first mounting holes 1140 may be disposed at the edge of the substrate 1100 in a scattered manner, so that the first mounting holes 1140 are in one-to-one correspondence with the second mounting holes on the reading head mounting plate 2000, and the corresponding first mounting holes 1140 and the second mounting holes are locked by using the threaded connection assembly, so that the substrate 1100 and the reading head mounting plate 2000 can be fixedly connected.
Specifically, referring to fig. 5, the planar grating 1300 is adhered to the carrier plate 1400, and the carrier plate 1400 is mounted on the fine adjustment assembly 1200 through a detachable connection manner, the carrier plate 1400 is utilized to realize indirect fixation of the planar grating 1300 and the fine adjustment assembly 1200, the adhesion manner can reduce the deformation probability of the planar grating 1300, and the existence of the carrier plate 1400 realizes the detachability of the planar grating 1300.
Referring to fig. 8, at least two adjusting members 1130 may be disposed at the bottom of the base plate 1100, the adjusting members 1130 are in abutting engagement with the head mounting plate 2000, and the height difference between the base plate 1100 and the head mounting plate 2000 and the levelness of the base plate 1100 are adjusted by using the adjusting members 1130.
The adjusting member 1130 may be an adjusting pad or an adjusting bolt. When the adjusting piece 1130 is an adjusting pad, it is just needed to directly pad between the substrate 1100 and the reading head mounting plate 2000; during debugging, the height difference between the substrate 1100 and the reading head mounting plate 2000 and the levelness of the substrate 1100 can be adjusted by replacing gaskets with different thicknesses. When the adjusting member 1130 is an adjusting bolt, it is simply screwed on the base plate 1100; in the adjustment, the height difference between the base plate 1100 and the top surface of the reading head mounting plate 2000, and the levelness of the base plate 1100 can be adjusted by rotating the adjustment bolts.
Preferably, the three adjusting members 1130 are arranged at three, and the three adjusting members 1130 are uniformly distributed at the bottom of the substrate 1100, so that the three adjusting members 1130 can stably support the substrate 1100, and the substrate 1100 is more stable and is not easy to shake under the support of the three adjusting members 1130, so that the mounting precision of the reading head mounting tool 1000 can be ensured, and the mounting precision of the reading head 3000 can be ensured.
In actual use, the substrate 1100 may be configured as a square plate structure with cut corners, and the edges formed by the cut corners and the edges of the substrate form an included angle of 45 degrees; the trimming assemblies 1200 are provided in four, and the four trimming assemblies 1200 are respectively provided at four corners of the substrate 1100, and edges of the corners are taken as the Y direction.
Referring to fig. 5, on the basis of the above structure, the first rotation angle adjusting bolts 1243 may be provided in three, and accordingly, the second fixed stage 1241 and the rotating stage 1242 may be provided in a rectangular structure (including a square structure), and the sides of the second fixed stage 1241 and the rotating stage 1242 opposite to the substrate 1100 may be provided in parallel with the corner cutting edges of the substrate 1100, and the three first rotation angle adjusting bolts 1243 may be respectively installed at the portions of the rotating stage 1242 near the four corners.
The embodiment also provides an integration method of the reading head installation tool 1000, which comprises the following steps:
The planar grating 1300 is firstly mounted on the fine tuning assembly 1200, then the fine tuning assembly 1200 is mounted on the substrate 1100, the pose of the planar grating 1300 relative to the substrate 1100 is measured by using the three-coordinate measuring instrument, and the fine tuning assembly 1200 is adjusted according to the measurement result of the three-coordinate measuring instrument until the measurement result of the three-coordinate measuring instrument meets the mounting requirement.
According to the integration method of the reading head mounting tool provided by the embodiment, the three-coordinate measuring instrument is adopted to measure the pose of the plane grating 1300 relative to the substrate 1100, so that the pose of the plane grating 1300 is reflected through the measurement result of the three-coordinate measuring instrument, and then the fine adjustment assembly 1200 is adjusted according to the measurement result, so that the position and the pose of the plane grating 1300 relative to the substrate 1100 can reach higher precision, and the reading head 3000 debugged by the reading head mounting tool 1000 provided by the embodiment is higher in mounting precision and consistency.
The method for installing the reading head provided in this embodiment is applied to the above-mentioned tool 1000 for installing the reading head, and the method for installing the reading head includes:
firstly, a reading head mounting tool 1000 is mounted on a reading head mounting disc 2000, then a reading head 3000 is mounted on the reading head mounting disc 2000, and a plane grating 1300 on the reading head mounting tool 1000 is utilized to provide a reference for signals of the reading head 3000;
Acquiring the ratio of the alternating current signal to the direct current signal of the reading head 3000, and judging that the optical power of the reading head 3000 reaches the standard if the ratio is larger than or equal to a preset value, so as to meet the installation requirement; if the ratio is smaller than the preset value, judging that the optical power of the reading head 3000 does not reach the standard, and adjusting the reading head 3000 until the ratio is larger than or equal to the preset value;
the read head mounting fixture 1000 is disassembled.
The above-mentioned reading head installation tool 1000 applied to the reading head installation method provided by the embodiment can provide a high-precision reference standard for the signal of the reading head 3000, on the basis, the position and the gesture of the reading head 3000 can be reflected by the ratio of the alternating current signal and the direct current signal of the reading head 3000, so that the reading head can be debugged according to the ratio result, and the debugged reading head 3000 can obtain higher installation precision and consistency.
In summary, the embodiment of the invention discloses a reading head installation tool, an integration method thereof and a reading head installation method, which overcome a plurality of technical defects of the traditional reading head installation method. According to the reading head mounting tool, the integration method thereof and the reading head mounting method provided by the embodiment of the invention, the mounting precision and the mounting consistency of the reading head can be improved, so that the positioning precision of a double-workpiece table, leveling and focusing, silicon wafer alignment and aliquoting system is ensured.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and not for limiting the same; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the invention.
Claims (10)
1. The reading head mounting tool is characterized by comprising a substrate (1100), a plurality of plane gratings (1300) and a fine adjustment assembly (1200);
The substrate (1100) is used for being mounted on a reading head mounting disc (2000) of a workpiece table, the fine adjustment assembly (1200) is mounted on the substrate (1100), the plane grating (1300) is mounted on the fine adjustment assembly (1200), the fine adjustment assembly (1200) is at least used for adjusting the pose of the plane grating (1300) relative to the substrate (1100), and the plane grating (1300) corresponds to reading heads (3000) on the reading head mounting disc (2000) one by one.
2. The tool according to claim 1, wherein the fine tuning assembly (1200) comprises a mounting base (1210), a linear adjustment slide (1220), an adapter base (1230), and a rotation angle adjustment slide (1240);
One side of the linear adjustment sliding table (1220) is fixedly connected with the mounting seat (1210), the adapter seat (1230) is fixedly connected with the other side of the linear adjustment sliding table (1220), the corner adjustment sliding table (1240) is mounted on the adapter seat (1230), the plane grating (1300) is fixed on a rotating table surface of the corner adjustment sliding table (1240), and the mounting seat (1210) is fixed on the substrate (1100).
3. The tool according to claim 2, wherein the linear adjustment slide (1220) comprises a first fixed stage (1221), a mobile stage (1222) and a locking assembly (1223), the first fixed stage (1221) being fixedly connected to the mounting base (1210), the mobile stage (1222) being fixedly connected to the adapter base (1230);
A displacement adjusting bolt is connected between the first fixed table (1221) and the mobile table (1222), and the displacement adjusting bolt is used for adjusting the displacement of the mobile table (1222) relative to the first fixed table (1221); the locking assembly (1223) is used to lock the mobile station (1222) to the first stationary station (1221).
4. The reading head installation tool according to claim 3, wherein the displacement adjusting bolt comprises a Z-direction adjusting bolt (1224), the length direction of the Z-direction adjusting bolt (1224) is perpendicular to the base plate (1100), a first side lug (1225) is arranged at the edge part of the first fixed table (1221), a first threaded hole is formed in the first side lug (1225), a first adjusting plate (1226) is arranged at the edge part of the movable table (1222), the Z-direction adjusting bolt (1224) is matched with the first threaded hole, and the tail end of the Z-direction adjusting bolt (1224) is abutted to the first adjusting plate (1226);
And/or, displacement adjusting bolt includes Y to adjusting bolt (1227), Y to the length direction of adjusting bolt (1227) with the face of base plate (1100) is parallel, the edge position of first fixed station (1221) is provided with second side ear (1228), second screw hole has been seted up on second side ear (1228), the edge position of mobile station (1222) is provided with second regulating plate (1229), Y to adjusting bolt (1227) with second screw hole cooperation, Y to the tail end of adjusting bolt (1227) with second regulating plate (1229) butt.
5. The mounting fixture for the reading head according to claim 2, wherein the rotation angle adjusting sliding table (1240) comprises a second fixed table (1241) and a rotating table (1242), and the second fixed table (1241) is fixedly connected with the adapter seat (1230); the rotating table (1242) is opposite to the second fixed table (1241), an elastic connecting piece is connected between the rotating table (1242) and the second fixed table (1241), and the plane grating (1300) is installed on a table top of the rotating table (1242) opposite to the second fixed table (1241);
A corner adjusting bolt is arranged between the second fixed table (1241) and the rotating table (1242), and the corner adjusting bolt is used for adjusting the deflection angle of the rotating table (1242) relative to the second fixed table (1241).
6. The mounting fixture for the reading head according to claim 5, wherein the corner adjusting bolt comprises a first corner adjusting bolt (1243), the length direction of the first corner adjusting bolt (1243) is perpendicular to the rotating table (1242), a first threaded hole is formed in the rotating table (1242), the first corner adjusting bolt (1243) is matched with the first threaded hole, and the tail end of the first corner adjusting bolt (1243) is abutted against the second fixed table (1241);
And/or, corner adjusting bolt includes second corner adjusting bolt (1244), second corner adjusting bolt (1244) with rotating table (1242) is parallel, the edge of second fixed station (1241) with be connected with elastic plate (1246) between rotating table (1242), the edge of second fixed station (1241) is provided with third side ear (1245), the second screw hole has been seted up on third side ear (1245), second corner adjusting bolt (1244) with second screw hole cooperation, just the tail end of second corner adjusting bolt (1244) with elastic plate (1246) butt.
7. The tool according to claim 2, wherein the trimming assembly (1200) is detachably connected to the base plate (1100);
and/or, a positioning column (1110) is arranged on the substrate (1100), positioning holes (1211) are arranged on the fine adjustment assembly (1200), the positioning columns (1110) are in one-to-one correspondence with the positioning holes (1211), and the positioning columns (1110) are matched with the corresponding positioning holes (1211).
8. The mounting fixture for the reading head according to claim 1, wherein the fine adjustment assembly (1200) is mounted on an edge portion of the substrate (1100), and a reinforcing plate (1120) is fixedly attached to a middle area of the substrate (1100);
And/or, the planar grating (1300) is adhered to a bearing plate (1400), and the bearing plate (1400) is detachably connected with the fine adjustment assembly (1200);
And/or, the bottom of the base plate (1100) is provided with at least two adjusting pieces (1130), the adjusting pieces (1130) are used for being in abutting fit with the reading head mounting plate (2000), are used for adjusting the height difference between the base plate (1100) and the reading head mounting plate (2000), and are used for adjusting the levelness of the base plate (1100).
9. An integration method of a reading head installation tool is characterized by comprising the following steps:
Firstly, mounting a planar grating (1300) on a fine tuning assembly (1200), then mounting the fine tuning assembly (1200) on a substrate (1100), measuring the pose of the planar grating (1300) relative to the substrate (1100) by using a three-coordinate measuring instrument, and adjusting the fine tuning assembly (1200) according to the measurement result of the three-coordinate measuring instrument until the measurement result of the three-coordinate measuring instrument meets the mounting requirement.
10. A method of installing a readhead, wherein the tooling of any one of claims 1-8 is used, the method comprising:
firstly, a reading head mounting tool (1000) is mounted on a reading head mounting disc (2000), then a reading head (3000) is mounted on the reading head mounting disc (2000), and a plane grating (1300) on the reading head mounting tool (1000) is utilized to provide a reference for signals of the reading head (3000);
Acquiring the ratio of the alternating current signal to the direct current signal of the reading head (3000), and judging that the optical power of the reading head (3000) reaches the standard if the ratio is more than or equal to a preset value, so as to meet the installation requirement; if the ratio is smaller than a preset value, judging that the optical power of the reading head (3000) does not reach the standard, and adjusting the reading head (3000) until the ratio is larger than or equal to the preset value;
and (3) disassembling the reading head mounting tool (1000).
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