CN114264448B - Compound eye unit working environment simulation and performance evaluation system and use method thereof - Google Patents
Compound eye unit working environment simulation and performance evaluation system and use method thereof Download PDFInfo
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- CN114264448B CN114264448B CN202111541828.4A CN202111541828A CN114264448B CN 114264448 B CN114264448 B CN 114264448B CN 202111541828 A CN202111541828 A CN 202111541828A CN 114264448 B CN114264448 B CN 114264448B
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Abstract
The invention discloses a compound eye unit working environment simulation and performance evaluation system and a using method thereof, belongs to the technical field of precision instruments and precision measurement, and aims to solve the problem that equipment for performance test and stable test environment construction of a compound eye unit is lacked in the prior art. In the vacuum environment simulation system, a closed-loop system is formed by utilizing a vacuum pump and a vacuum gauge, and meanwhile, a closed-loop system is formed by utilizing an electric heating film and a water cooling plate of a temperature sensor in a temperature control system, so that the vacuum degree and the temperature of the environment where the compound eye unit is located are ensured to be within a certain error range, the test requirement is met, meanwhile, a measurement system based on a photosensitive displacement sensor is adopted, compared with a measurement system utilizing an interferometer, the system composition is simplified, and the measurement precision is further improved.
Description
Technical Field
The invention belongs to the technical field of precision instruments and precision measurement, and particularly relates to a compound eye unit working environment simulation and performance evaluation system and a using method thereof.
Background
The lithography technology is one of the core technologies in the chip manufacturing industry, and the lithography technology relates to the cooperative coordination among a large number of complex optical unit mechanisms and is very important for the preparation of nano-scale crystal elements. The photoetching machine relates to a large number of subsystem units, wherein a light source and an illumination system are mainly used for splitting and guiding ultra-precision machining laser generated by a light source system in the photoetching machine, so that a template circuit in a mask system in the photoetching machine and a machining contour of the surface of a workpiece table wafer are scaled proportionally. Therefore, the motion accuracy, motion stability and reliability of the objective lens system of the lithography machine are very important.
The photoetching machine light source and the illumination system are complex and precise in composition, and have the characteristics of high integration degree and high motion precision. The compound eye unit is used as a core element for light splitting and guiding in a light source and lighting system, and the precision and stability of the motion of the compound eye unit have strict requirements. In addition, considering the influence of the internal environment of the lithography machine on the movement of the precision mechanism, the internal modules of the lithography machine, including the objective lens module, usually require more strict environmental conditions. It mainly includes stable gas environment or vacuum environment, vibration-resisting or vibration-isolating property and thermal stability. In addition, the lens of the compound eye unit directly acts on the laser, and the heat generated by the laser also needs to be dissipated in time. Therefore, in the process of developing the compound eye unit, the influence of a plurality of environmental factors on the performance and the function of the compound eye unit needs to be considered.
At present, the compound eye unit mechanism of the photoetching machine has more design schemes, but the research on the performance test of the compound eye unit and the construction of a stable test environment of the compound eye unit is less, and the project provides a compound eye unit working environment and a test system aiming at a plurality of environmental factors such as the vacuum and the thermal stability of the compound eye unit, and fills the blank in the compound eye unit test in China.
Disclosure of Invention
The invention aims to solve the problem that equipment is not constructed aiming at the performance test and the stable test environment of the compound eye unit in the prior art, and further provides a compound eye unit working environment simulation and performance evaluation system and a using method thereof;
a compound eye unit working environment simulation and performance evaluation system comprises a vacuum unit, a temperature control unit, a vibration isolation base, a measurement unit and a compound eye unit;
the vacuum unit comprises a negative pressure container, a vacuum pump and a vacuum gauge, the vacuum pump is arranged on the outer side of the negative pressure container, the air exhaust end of the vacuum pump is communicated with the inside of the negative pressure container through a guide pipe, the vacuum gauge is arranged on one end, far away from the installation position of the vacuum pump, of the outer side of the negative pressure container, and the detection end of the vacuum gauge is arranged in the negative pressure container;
the vibration isolation base, the measuring unit and the compound eye unit are all arranged in the negative pressure container, the vibration isolation base is installed on the bottom surface of an inner cavity of the negative pressure container, the measuring unit is installed on the vibration isolation base, the compound eye unit is arranged at the center of the measuring unit, the compound eye unit is installed on the vibration isolation base, and the temperature control unit is installed on the compound eye unit;
furthermore, the vibration isolation base comprises a mounting base and four air floatation support legs, the four corners of the lower surface of the mounting base are respectively provided with one air floatation support leg, the top of each air floatation support leg is fixedly connected with the lower surface of the mounting base, and the bottom of each air floatation support leg is fixedly connected with the bottom surface of the inner cavity of the negative pressure container;
furthermore, the measuring unit comprises a three-degree-of-freedom micro-motion platform, a light source, an annular grating and a photosensitive displacement sensor, the light source is fixed on the three-degree-of-freedom micro-motion platform, the light source is arranged towards the compound eye unit, the annular grating is fixed at the light source emergent end, the photosensitive displacement sensor is fixed on the three-degree-of-freedom micro-motion platform, the photosensitive displacement sensor is arranged towards the compound eye unit, and the light source and the photosensitive displacement sensor are arranged oppositely in a matched mode;
furthermore, the three-degree-of-freedom micro-motion platform comprises an X-axis motion platform, a light source Y-axis motion platform, a sensor Y-axis motion platform, a light source Z-axis motion platform and a sensor Z-axis motion platform, wherein the light source Y-axis motion platform and the sensor Y-axis motion platform are oppositely arranged on the X-axis motion platform, the light source Y-axis motion platform and the sensor Y-axis motion platform are both in sliding connection with a guide rail part of the X-axis motion platform, the light source Z-axis motion platform is arranged on the light source Y-axis motion platform, the light source Z-axis motion platform is in sliding connection with the guide rail part of the light source Y-axis motion platform, the sensor Z-axis motion platform is arranged on the sensor Y-axis motion platform, the sensor Z-axis motion platform is in sliding connection with the guide rail part of the sensor Y-axis motion platform, the light source is fixed on the light source Z-axis motion platform, and the photosensitive displacement sensor is fixed on the sensor Z-axis motion platform;
further, the compound eye unit comprises a driving device and an optical element, the driving device is arranged at the central position of the measuring system, the driving device is fixed on the mounting base, the optical element is arranged at the output end of the driving device, and the driving device drives the optical element to generate rotary motion with two degrees of freedom;
furthermore, the temperature control unit comprises two flexible temperature sensors, two electrothermal film groups and a water cooling plate, the two flexible temperature sensors are symmetrically attached to two sides of the optical element along the central line of the optical element in the width direction, each electrothermal film group is arranged at one end of the optical element and comprises two electrothermal films, the two electrothermal films are symmetrically attached to two sides of one end of the optical element along the central line of the optical element in the width direction, and the water cooling plate is arranged at one end, close to the optical element, of the driving device shell;
further, when the light source Y-axis motion table and the sensor Y-axis motion table move, the relative position between the light source Y-axis motion table and the sensor Y-axis motion table is kept unchanged;
further, the photosensitive displacement sensor is a four-quadrant photodetector;
furthermore, the sensor Z-axis motion platform comprises two Z-axis sliding blocks and a connecting block, the two Z-axis sliding blocks are arranged on the sensor Y-axis motion platform, each Z-axis sliding block is connected with the sensor Y-axis motion platform in a sliding mode, the connecting block is sleeved on the two Z-axis sliding blocks, the two Z-axis sliding blocks move synchronously, and the photosensitive displacement sensor is fixed at the center of one side, facing the compound eye unit, of the connecting block;
a use method of a compound eye unit working environment simulation and performance evaluation system is realized by the following steps:
step one, vacuum treatment of a compound eye unit working environment simulation system:
vacuumizing the negative pressure container by a vacuum pump, and when the pressure measured by a vacuum gauge pipe is reduced to 10 -4 When Pa, the vacuum pump stops working;
step two, alignment of a measuring system:
turning on a light source, and adjusting the three-degree-of-freedom micro-motion stage to enable the offset measured by the photosensitive displacement sensor to be zero;
step three, reference displacement measurement:
a driving device for driving the compound eye unit to enable the optical element to generate rotary motion with two degrees of freedom, and simultaneously, the rotation angle of the optical element is calculated by information fed back by the photosensitive displacement sensor and is used as a reference value;
step four, high-temperature treatment of the compound eye unit working environment simulation system:
electrifying the electrothermal film to heat the light source element to cause thermal deformation, starting the water cooling plate after the temperature measured by the flexible temperature sensor reaches the highest working temperature, and controlling the heat dissipation capacity of the water cooling plate to cause the temperature of the light source element to fluctuate within an acceptable range;
step five, evaluating the working performance of the compound eye unit after heating:
driving the driving device of the compound eye unit to enable the optical element to generate rotary motion with two degrees of freedom, calculating the rotation angle of the optical element according to information fed back by the photosensitive displacement sensor, and comparing the measured result with data in the third step to obtain motion error brought by temperature;
step six, evaluating the working stability of the compound eye unit at different working temperatures:
and C, adjusting the current of the electric heating film and the heat dissipation capacity of the water cooling plate in the fourth step to obtain different working temperatures, repeating the fifth step to obtain performance parameters of the compound eye unit at different working temperatures, and accordingly providing data support for evaluating the working stability of the compound eye unit.
Compared with the prior art, the invention has the following beneficial effects:
the compound eye unit environment simulation and performance evaluation system simultaneously considers the vacuum and high-temperature working environment of the compound eye unit. In the vacuum environment simulation system, utilize vacuum pump and vacuum gauge to constitute closed-loop system, utilize temperature sensor's electric heat membrane, water-cooling plate to constitute closed-loop system simultaneously in temperature control system, guarantee that the vacuum degree and the temperature of compound eye unit environment are in certain error range, satisfy the test requirement, this application has adopted a measurement system based on photosensitive displacement sensor simultaneously, compares in the measurement system who utilizes the interferometer, has simplified the system composition, has further improved measurement accuracy.
Drawings
FIG. 1 is a schematic structural view of the present invention
FIG. 2 is a schematic view of the structure of a compound eye unit and a temperature control unit in the present invention
FIG. 3 is a schematic view of the vibration isolation mount and the measurement unit of the present invention
FIG. 4 is a top view of the photosensitive displacement sensor of the present invention;
FIG. 5 is a schematic view of the structure of the driving device of the present invention;
FIG. 6 is a schematic main sectional view of the driving apparatus of the present invention;
FIG. 7 is a schematic structural view of an input end two-dimensional rotation hinge in the driving apparatus of the present invention;
FIG. 8 is a schematic structural view of a straight line compensating mechanism in the driving apparatus of the present invention;
in the figure: 1 vacuum unit, 11 negative pressure container, 12 vacuum pump, 13 vacuum gauge, 2 temperature control unit, 21 flexible temperature sensor, 22 electrothermal film, 23 water-cooling plate, 3 vibration isolation base, 31 air floating support, 32 installation base, 4 measurement unit, 41 three-freedom micro-motion platform, 411X-axis motion platform, 412 light source Y-axis motion platform, 413 sensor Y-axis motion platform, 414 light source Z-axis motion platform, 415 sensor Z-axis motion platform, 42 light source, 43 ring grating, 44 photosensitive displacement sensor, 5 compound eye unit, 51 driving device, 511 shell, 512 linear actuator, 513 input end two-dimensional rotation hinge, 514 driving rod, 515 linear compensation mechanism, 5151 input end connecting frame, 5152 output end connecting frame, 5153 quadrilateral flexible linear motion mechanism, 551 531 input end motion block, 51533 follow-up block, 51534 flexible spring plectrum, 515 input end two-dimensional rotation hinge, 516 output end two-dimensional rotation hinge, 517 memory alloy strain recovery driving device and 52 optical element.
Detailed Description
The first embodiment is as follows: the present embodiment is described with reference to fig. 1 to 8, and provides a system for simulating a working environment and evaluating performance of a compound-eye unit, the system including a vacuum unit 1, a temperature control unit 2, a vibration isolation base 3, a measurement unit 4, and a compound-eye unit 5;
the vacuum unit 1 comprises a negative pressure container 11, a vacuum pump 12 and a vacuum gauge 13, wherein the vacuum pump 12 is arranged outside the negative pressure container 11, the pumping end of the vacuum pump 12 is communicated with the inside of the negative pressure container 11 through a conduit, the vacuum gauge 13 is arranged on one end, far away from the installation position of the vacuum pump 12, of the outside of the negative pressure container 11, and the detection end of the vacuum gauge 13 is arranged in the negative pressure container 11;
the vibration isolation base 3, the measuring unit 4 and the compound eye unit 5 are all arranged in the negative pressure container 11, the vibration isolation base 3 is installed on the bottom surface of an inner cavity of the negative pressure container 11, the measuring unit 4 is installed on the vibration isolation base 3, the compound eye unit 5 is arranged at the center of the measuring unit 4, the compound eye unit 5 is installed on the vibration isolation base 3, and the temperature control unit 2 is installed on the compound eye unit 5.
In the present embodiment, a vacuum and high-temperature working environment of the compound eye unit is considered. In the vacuum environment simulation system, a closed loop system is formed by using a vacuum pump 12 and a vacuum gauge 13, and meanwhile, a closed loop system is formed by using a temperature sensor, an electrothermal film and a water cooling plate in a temperature control system 2, so that the vacuum degree and the temperature of the environment where the compound eye unit 5 is located are ensured to be within a certain error range, and the test requirements are met.
The second embodiment is as follows: the present embodiment is described with reference to fig. 1 to 8, and the present embodiment is further limited to the vibration isolation base 3 described in the first embodiment, in the present embodiment, the vibration isolation base 3 includes a mounting base 32 and four air-float support legs 31, one air-float support leg 31 is respectively disposed at four corners of the lower surface of the mounting base 32, the top of each air-float support leg 31 is fixedly connected with the lower surface of the mounting base 32, and the bottom of each air-float support leg 31 is fixedly connected with the bottom surface of the inner cavity of the negative pressure container 11. Other components and connection modes are the same as those of the first embodiment.
In this embodiment, the vibration isolation base 3 supports the measurement unit 4 and the compound eye unit 5, and meanwhile, when the measurement unit 4 works, the four air floatation support legs 31 can have a good vibration isolation effect, so that the measurement stability is ensured.
The third concrete implementation mode: the present embodiment is described with reference to fig. 1 to 8, and the present embodiment further defines the measurement unit 4 according to the first embodiment, in the present embodiment, the measurement unit 4 includes a three-degree-of-freedom micro-stage 41, a light source 42, an annular grating 43, and a photosensitive displacement sensor 44, the light source 42 is fixed on the three-degree-of-freedom micro-stage 41, the light source 42 is disposed toward the compound eye unit 5, the annular grating 43 is fixed at an exit end of the light source 42, the photosensitive displacement sensor 44 is fixed on the three-degree-of-freedom micro-stage 41, the photosensitive displacement sensor 44 is disposed toward the compound eye unit 5, and the light source 42 and the photosensitive displacement sensor 44 are disposed in a matching manner and opposite to each other. Other components and connection modes are the same as those of the first embodiment.
In the present embodiment, the ring-shaped incident beam is formed by the ring-shaped grating 43 through which the light beam emitted from the light source 42 passes and is irradiated on the surface of the optical element, and the reflected light source is formed by reflection and is irradiated on the photosensitive displacement sensor 44, the ring-shaped aperture is moved on the photosensitive displacement sensor 44, and the photosensitive displacement sensor 44 calculates the rotation angle of the optical element in two degrees of freedom by evaluating the light intensity distribution of the reflected ring-shaped light beam in each quadrant.
The fourth concrete implementation mode is as follows: referring to fig. 1 to 8, this embodiment is described, and the three-degree-of-freedom micro-motion stage 41 described in the first embodiment is further defined, in this embodiment, the three-degree-of-freedom micro-motion stage 41 includes an X-axis motion stage 411, a light source Y-axis motion stage 412, a sensor Y-axis motion stage 413, a light source Z-axis motion stage 414, and a sensor Z-axis motion stage 415, the light source Y-axis motion stage 412 and the sensor Y-axis motion stage 413 are disposed on the X-axis motion stage 411 opposite to each other, the light source Y-axis motion stage 412 and the sensor Y-axis motion stage 413 are both slidably connected to a guide portion of the X-axis motion stage 411, the light source Z-axis motion stage 414 is disposed on the light source Y-axis motion stage 412, the light source Z-axis motion stage 414 is slidably connected to a guide portion of the light source Y-axis motion stage 412, the sensor Z-axis motion stage 415 is disposed on the sensor Y-axis motion stage 413, the sensor Z-axis motion stage 415 is slidably connected to a guide portion of the sensor Y-axis motion stage 413, the light source 42 is fixed on the light source Z-axis motion stage 414, and the photosensitive displacement sensor Z-axis motion stage 415 is fixed on the sensor Z-axis motion stage 415. Other components and connection modes are the same as those of the first embodiment.
The fifth concrete implementation mode is as follows: the present embodiment is described with reference to fig. 1 to 8, and the present embodiment further defines the compound eye unit 5 according to the second embodiment, in the present embodiment, the compound eye unit 5 includes a driving device 51 and an optical element 52, the driving device 51 is disposed at a central position of the measuring system 4, the driving device 51 is fixed on the mounting base 32, the optical element 52 is mounted at an output end of the driving device 51, and the driving device 51 drives the optical element 52 to generate a rotational motion with two degrees of freedom. Other components and connection modes are the same as those of the first embodiment.
In this embodiment, the driving device 51 is a compound eye structure to be simulated, the optical element 52 is used as a component for measuring, receiving and feeding back light beams, the driving device 52 can mainly drive the optical element 52 to slightly rotate around two orthogonal axes Rx and Ry, and when the driving device 51 is in a home position, a plane defined by the two orthogonal axes is overlapped with an upper surface of the optical element 52, the driving device 51 comprises a housing 511, a linear actuator 512, an input end two-dimensional rotating hinge 513, a driving rod 514, a linear compensation mechanism 515, an output end two-dimensional rotating hinge 516 and a memory alloy strain recovery driving device 517, the linear actuator 512 is fixed on the housing 511, and the input end two-dimensional rotating hinge 513 is installed on the linear actuator 512. The two ends of the driving rod 514 are respectively connected with the input end two-dimensional rotation hinge 513 and the output end two-dimensional rotation hinge 516. The straight line compensation mechanism 515 is disposed in the middle of the driving rod 514. The bottom end of the output end two-dimensional rotating hinge 516 is fixed on the shell 511;
the input end two-dimensional rotating hinge 513 and the output end two-dimensional rotating hinge 516 have the same structure and are composed of three rigid supports, the three rigid supports are connected through memory alloy, the rigid support positioned at the top is matched with the rigid support positioned at the center to swing in the Ry axial direction, the rigid support positioned at the center is matched with the rigid support positioned at the bottom to swing in the Rx axial direction, the rigid support positioned at the bottom in the input end two-dimensional rotating hinge 513 is driven through the linear actuator 512 to realize the action of the input end two-dimensional rotating hinge 513, the action of the two-dimensional rotating hinge 513 is specially transmitted to the output end two-dimensional rotating hinge 516 through the driving rod 514 along with the action of the two-dimensional rotating hinge 513, and the optical element 33 positioned on the output end two-dimensional rotating hinge 516 is driven to swing in two degrees of freedom (the Rx axial direction swing and the Ry axial swing). During measurement, the driving device 51 drives the optical element 33 to extend the Z-axis variation of the point to be measured of the X axis in the reference coordinate system and the optical element 33 to extend the Z-axis variation of the point to be measured of the Y axis in the reference coordinate system, the memory alloy strain recovery driving device 517 comprises a flexible electrothermal film attached to the memory alloy in the input end two-dimensional rotating hinge 513, and the deformation of the memory alloy is controlled by adjusting the temperature of the flexible electrothermal film during working, so that the input end two-dimensional rotating hinge 513 is recovered to the initial state after being distorted;
further, in order to ensure the transmission accuracy of the driving rod 514, a linear compensation mechanism 515 is arranged in the driving rod 514, the linear compensation mechanism 515 is composed of an input end connecting frame 5151, an output end connecting frame 5152 and a quadrilateral flexible linear motion mechanism 5153, the input end connecting frame 5151 and the output end connecting frame 5152 are connected through the quadrilateral flexible linear motion mechanism 5153, the input end connecting frame 5151 is connected with a connecting part of the driving rod 514 and the input end two-dimensional rotating hinge 513, the output end connecting frame 5152 is connected with a connecting part of the driving rod 514 and the output end two-dimensional rotating hinge 516, the quadrilateral flexible linear motion mechanism 5153 comprises an input end motion block 51531, an output end motion block 51551, two follower blocks 51533 and a plurality of groups of flexible spring shifting pieces 51534, wherein the input end motion block 51531 is connected with an input end connection frame 5151, the output end motion block 51551 is connected with an output end connection frame 5152, the two follower blocks 51533 are arranged at two sides of the input end motion block 51531 and the output end motion block 51551, each follower block 51533 is connected with the input end motion block 51531 and the output end motion block 51551 through the flexible spring shifting piece 51534, and under the action of the flexible spring shifting pieces 51534, the relative position between the input end connection frame 5151 and the output end connection frame 5152 can be flexibly changed, so that the length of the driving rod 514 can be compensated.
The sixth specific implementation mode is as follows: the present embodiment is described with reference to fig. 1 to 8, and the present embodiment is further limited to the temperature control unit 2 according to the first embodiment, in the present embodiment, the temperature control unit 2 includes two flexible temperature sensors 21, two electrothermal film groups and a water cooling plate 23, the two flexible temperature sensors 21 are symmetrically attached to two sides of the optical element 52 along a center line of the optical element 52 in a width direction, each electrothermal film group is disposed at one end of the optical element 52, each electrothermal film group includes two electrothermal films 22, the two electrothermal films 22 are symmetrically attached to two sides of one end of the optical element 52 along the center line of the optical element 52 in the width direction, and the water cooling plate 23 is mounted on one end of a casing of the driving device 51 close to the optical element 52. Other components and connection modes are the same as those of the first embodiment.
The seventh embodiment: the present embodiment is described with reference to fig. 1 to 8, and is further limited to the light source Y-axis motion stage 412 and the sensor Y-axis motion stage 413 described in the fourth embodiment, and in the present embodiment, when the light source Y-axis motion stage 412 and the sensor Y-axis motion stage 413 move, the relative position between the light source Y-axis motion stage 412 and the sensor Y-axis motion stage 413 is kept unchanged. Other components and connection modes are the same as those of the fourth embodiment.
The specific implementation mode is eight: the present embodiment is described with reference to fig. 1 to 8, and the present embodiment further defines the photosensitive displacement sensor 44 described in the third embodiment, and in the present embodiment, the photosensitive displacement sensor 44 is a four-quadrant photodetector. Other components and connection modes are the same as those of the third embodiment.
The specific implementation method nine: the present embodiment is described with reference to fig. 1 to 8, and is further limited to the sensor Z-axis moving stage 415 described in the fourth embodiment, in the present embodiment, the sensor Z-axis moving stage 415 includes two Z-axis sliders and a connecting block, the two Z-axis sliders are both disposed on the sensor Y-axis moving stage 413, each Z-axis slider is slidably connected to the sensor Y-axis moving stage 413, one connecting block is sleeved on the two Z-axis sliders, the connecting block enables the two Z-axis sliders to move synchronously, and the photosensitive displacement sensor 44 is fixed at the center of one side of the connecting block facing the compound eye unit 5. The other components and the connection mode are the same as those of the fourth embodiment.
The detailed implementation mode is ten: the present embodiment is described with reference to fig. 1 to 8, and provides a method for using a compound eye unit working environment simulation and performance evaluation system, which is implemented by the following steps:
step one, vacuum treatment of a compound eye unit working environment simulation system:
the vacuum pump 12 is used for vacuumizing the negative pressure container 11, when the pressure measured by the vacuum gauge 13 is reduced to 10 -4 When Pa, the vacuum pump 12 stops working;
step two, alignment of a measuring system:
turning on the light source 42, and adjusting the three-degree-of-freedom micropositioner 41 to make the offset measured by the photosensitive displacement sensor 44 be zero;
step three, reference displacement measurement:
a driving device 51 for driving the compound eye unit to make the optical element 52 generate two degrees of freedom of rotational movement, and simultaneously calculate the rotation angle of the optical element 52 as a reference value from the information fed back by the photosensitive displacement sensor 44;
step four, high-temperature treatment of the compound eye unit working environment simulation system:
the electric heating film 22 is electrified to heat the light source element 52, so that the heat deformation of the light source element occurs, after the temperature measured by the flexible temperature sensor 21 reaches the highest working temperature, the water cooling plate 23 is started, and the heat dissipation capacity of the water cooling plate 23 is controlled so that the temperature of the light source element 52 fluctuates within an acceptable range;
step five, evaluating the working performance of the compound eye unit after heating:
driving device 51 of compound eye unit to make optical element 52 produce two-freedom rotation movement, at the same time calculating rotation angle of optical element 52 by information fed back by photosensitive displacement sensor 44, comparing measured result with data in step three to obtain movement error brought by temperature;
step six, evaluating the working stability of the compound eye unit at different working temperatures:
and adjusting the current of the electrothermal film 22 and the heat dissipation capacity of the water cooling plate 23 in the fourth step to obtain different working temperatures, repeating the fifth step to obtain performance parameters of the compound eye unit at different working temperatures, and thus providing data support for evaluating the working stability of the compound eye unit.
The present invention is not limited to the above embodiments, and any person skilled in the art can make many modifications and equivalent variations by using the above-described structures and technical contents without departing from the scope of the present invention.
Claims (8)
1. A compound eye unit working environment simulation and performance evaluation system is characterized in that: the system comprises a vacuum unit (1), a temperature control unit (2), an isolation base (3), a measuring unit (4) and a compound eye unit (5);
the vacuum unit (1) comprises a negative pressure container (11), a vacuum pump (12) and a vacuum gauge pipe (13), the vacuum pump (12) is installed on the outer side of the negative pressure container (11), the air exhaust end of the vacuum pump (12) is communicated with the inside of the negative pressure container (11) through a guide pipe, the vacuum gauge pipe (13) is installed on one end, away from the installation position of the vacuum pump (12), of the outer side of the negative pressure container (11), and the detection end of the vacuum gauge pipe (13) is arranged in the negative pressure container (11);
the vibration isolation base (3), the measuring unit (4) and the compound eye unit (5) are all arranged in the negative pressure container (11), the vibration isolation base (3) is arranged on the bottom surface of the inner cavity of the negative pressure container (11), the measuring unit (4) is arranged on the vibration isolation base (3), the compound eye unit (5) is arranged at the center of the measuring unit (4), the compound eye unit (5) is arranged on the vibration isolation base (3), and the temperature control unit (2) is arranged on the compound eye unit (5);
the measuring unit (4) comprises a three-degree-of-freedom micro-motion platform (41), a light source (42), an annular grating (43) and a photosensitive displacement sensor (44), the light source (42) is fixed on the three-degree-of-freedom micro-motion platform (41), the light source (42) is arranged towards the compound eye unit (5), the annular grating (43) is fixed at the emergent end of the light source (42), the photosensitive displacement sensor (44) is fixed on the three-degree-of-freedom micro-motion platform (41), the photosensitive displacement sensor (44) is arranged towards the compound eye unit (5), and the light source (42) and the photosensitive displacement sensor (44) are arranged oppositely in a matched mode;
the three-degree-of-freedom micro-motion platform (41) comprises an X-axis motion platform (411), a light source Y-axis motion platform (412), a sensor Y-axis motion platform (413), a light source Z-axis motion platform (414) and a sensor Z-axis motion platform (415), the light source Y-axis motion platform (412) and the sensor Y-axis motion platform (413) are arranged on the X-axis motion platform (411) in a relative mode, the light source Y-axis motion platform (412) and the sensor Y-axis motion platform (413) are connected with a guide rail part of the X-axis motion platform (411) in a sliding mode, the light source Z-axis motion platform (414) is arranged on the light source Y-axis motion platform (412), the sensor Z-axis motion platform (415) is arranged on the sensor Y-axis motion platform (413) in a sliding mode, the sensor Z-axis motion platform (415) is connected with a guide rail part of the sensor Y-axis motion platform (413) in a sliding mode, a light source (42) is fixed on the light source Z-axis motion platform (414), and a photosensitive sensor Z-axis motion platform (415) is fixed on the sensor Z-axis motion platform (415).
2. The system for compound eye unit working environment simulation and performance evaluation as claimed in claim 1, wherein: the vibration isolation base (3) comprises a mounting base (32) and four air flotation support legs (31), wherein the four corners of the lower surface of the mounting base (32) are respectively provided with one air flotation support leg (31), the top of each air flotation support leg (31) is fixedly connected with the lower surface of the mounting base (32), and the bottom of each air flotation support leg (31) is fixedly connected with the bottom surface of the inner cavity of the negative pressure container (11).
3. The system for simulating a working environment and evaluating performance of a compound-eye unit as claimed in claim 2, wherein: the compound eye unit (5) comprises a driving device (51) and an optical element (52), the driving device (51) is arranged at the central position of the measuring unit (4), the driving device (51) is fixed on the mounting base (32), the optical element (52) is mounted at the output end of the driving device (51), and the driving device (51) drives the optical element (52) to generate rotary motion with two degrees of freedom.
4. A compound eye unit working environment simulation and performance evaluation system as claimed in claim 3, wherein: temperature control unit (2) include two flexible temperature sensor (21), two electrothermal film group (22) and water-cooling plate (23), two flexible temperature sensor (21) are attached in the both sides of optical element (52) along optical element (52) width direction's central line symmetry, every electrothermal film group sets up the one end at optical element (52), including two electrothermal film (22) in every electrothermal film group, two electrothermal film (22) are attached in the both sides of place optical element (52) one end along optical element (52) width direction's central line symmetry, water-cooling plate (23) are installed and are served in one that drive arrangement (51) shell is close to optical element (52).
5. The system for compound eye unit working environment simulation and performance evaluation as claimed in claim 4, wherein: when the light source Y-axis motion table (412) and the sensor Y-axis motion table (413) move, the relative position between the light source Y-axis motion table (412) and the sensor Y-axis motion table (413) is kept unchanged.
6. The system for compound-eye unit working environment simulation and performance evaluation as claimed in claim 5, wherein: the photosensitive displacement sensor (44) is a four-quadrant photodetector.
7. The system for compound eye unit working environment simulation and performance evaluation as claimed in claim 6, wherein: including two Z axle sliders and a connecting block in sensor Z axle motion platform (415), two Z axle sliders all set up in sensor Y axle motion platform (413), and every Z axle slider and sensor Y axle motion platform (413) sliding connection, a connecting block suit is on two Z axle sliders, and the connecting block makes two Z axle sliders synchronous motion, and photosensitive displacement sensor (44) are fixed in the connecting block towards the center department of compound eye unit (5) one side.
8. A method for using the compound eye unit working environment simulation and performance evaluation system of any one of claims 1 to 7, wherein: the method is realized by the following steps:
step one, vacuum treatment of a compound eye unit working environment simulation system:
the vacuum pump (12) is used for vacuumizing the negative pressure container (11), and when the pressure measured by the vacuum gauge pipe (13) is reduced to 10 -4 When Pa, the vacuum pump (12) stops working;
step two, alignment of a measuring system:
turning on a light source (42), and adjusting the three-degree-of-freedom micropositioner (41) to enable the offset measured by the photosensitive displacement sensor (44) to be zero;
step three, reference displacement measurement:
a driving device (51) for driving the compound eye unit to make the optical element (52) generate two degrees of freedom of rotational motion, and simultaneously calculate the rotation angle of the optical element (52) as a reference value from the information fed back by the photosensitive displacement sensor (44);
step four, high-temperature treatment of the compound eye unit working environment simulation system:
the electric heating film (22) is electrified to heat the optical element (52) to generate thermal deformation, after the temperature measured by the flexible temperature sensor (21) reaches the highest working temperature, the water cooling plate (23) is started, and the heat dissipation capacity of the water cooling plate (23) is controlled to enable the temperature of the optical element (52) to fluctuate within an acceptable range;
step five, evaluating the working performance of the compound eye unit after heating:
a driving device (51) for driving the compound eye unit to enable the optical element (52) to generate rotary motion with two degrees of freedom, simultaneously, the rotation angle of the optical element (52) is calculated according to information fed back by the photosensitive displacement sensor (44), and the measured result is compared with data in the third step to obtain a motion error brought by temperature;
step six, evaluating the working stability of the compound eye unit at different working temperatures:
and adjusting the current of the electrothermal film (22) and the heat dissipation capacity of the water cooling plate (23) in the fourth step to obtain different working temperatures, repeating the fifth step to obtain performance parameters of the compound eye unit at different working temperatures, and thus providing data support for evaluating the working stability of the compound eye unit.
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