CN114235230B - Flexible six-dimensional force sensor based on mortise and tenon structure - Google Patents
Flexible six-dimensional force sensor based on mortise and tenon structure Download PDFInfo
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- CN114235230B CN114235230B CN202111485310.3A CN202111485310A CN114235230B CN 114235230 B CN114235230 B CN 114235230B CN 202111485310 A CN202111485310 A CN 202111485310A CN 114235230 B CN114235230 B CN 114235230B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
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Abstract
The invention discloses a flexible six-dimensional force sensor based on a mortise and tenon structure. The flexible printed circuit board comprises a flexible boss, a PTFE film, an FPCB flexible printed circuit board and a flexible base which are sequentially arranged from top to bottom; the flexible boss is of a quadrangular frustum pyramid structure, square bumps are arranged at four corner positions of the bottom surface, a cross structure matched with the square bumps of the flexible boss is arranged on the top surface of the flexible base, and the bottom of the flexible boss and the top of the flexible base are in concave-convex interlocking to form a mortise-tenon structure; the PTFE film and the FPCB flexible circuit board are of a layered folding structure embedded with the bottom surface of the flexible boss or the top surface of the flexible base, the sensing unit is reasonably arranged on the flexible circuit board through the base, and the flexible six-dimensional force sensor can generate unique signal response under various deformation through the encapsulation of the PTFE film. Under different external stimuli, the independent deformation mechanism of the interlocking structure enables the sensor to decouple translational force and torsional moment in x, y and z directions.
Description
Technical Field
The invention belongs to the technical field of sensors, and particularly relates to a flexible six-dimensional force sensor based on a mortise and tenon structure.
Background
In recent years, as an important module of intelligent wearable electronic devices, flexible sensors have gradually replaced traditional sensors and become research hotspots of artificial intelligence and wearable physical devices. In order to better realize man-machine interaction, flexible wearable sensors such as pressure sensors, strain sensors, temperature sensors, optical sensors, etc. have been widely developed and applied in the fields of medical diagnosis, man-machine interaction, motion detection, and biomimetic robots. Although these sensors have achieved excellent effects in terms of sensitivity, detection limit and detection range, and their performance is also remarkably improved, common pressure sensors cannot accurately identify the strain direction due to the fact that they can only monitor external force caused by pressing, and they can only detect unidirectional stimulus, limiting the application of motion strain detection or bending deformation detection in multiaxial directions, for the interference of force stimuli in different directions or external variables.
Most external stimuli in the environment are six-dimensional, including forces and moments in the x, y and z directions. The ideal wearable physical equipment has the capability of identifying the motion with multiple degrees of freedom and can be suitable for complex environments with different loading conditions. For a multi-dimensional sensor, such as a six-dimensional force sensor, six-dimensional force and moment information of a three-dimensional space can be sensed simultaneously: force components along the x, y, z coordinate axes and three moment components around the coordinate axes. The sensor can accurately evaluate the magnitude and position of the external load and distinguish the type and direction of the stimulus. The multi-dimensional sensor is capable of simultaneously identifying a plurality of external stimuli, indicating respective directions without being disturbed by external variables.
Therefore, the flexible six-dimensional sensor technology can be applied to various complex environments, and the feasibility of the flexible six-dimensional sensor technology is imperative.
Disclosure of Invention
In order to solve the problems in the background art, the invention provides the flexible six-dimensional force sensor based on the mortise and tenon structure, solves the limitation of single-side stimulation response, and realizes that the six-dimensional force sensor recognizes the strain direction and distinguishes the stimulation types; the independent deformation mechanism of the interlocking structure of the present invention enables the present sensor to decouple translational forces and torsional moments in the x, y and z directions under different external stimuli. .
The technical scheme adopted by the invention is as follows:
the invention discloses a flexible six-dimensional force sensor based on a mortise and tenon structure, which comprises a flexible boss, a PTFE film, an FPCB flexible printed circuit board and a flexible base, wherein the flexible boss, the PTFE film, the FPCB flexible printed circuit board and the flexible base are sequentially arranged from top to bottom; the flexible boss is of a quadrangular frustum pyramid structure, square bumps are arranged at four corner positions of the bottom surface, a cross structure matched with the square bumps of the flexible boss is arranged on the top surface of the flexible base, and the bottom of the flexible boss and the top of the flexible base are in concave-convex interlocking to form a mortise-tenon structure; the FPCB flexible printed circuit board is of a layered folding structure embedded with the top surface of the flexible base, four inverted U-shaped bulges are formed in the middle of the layered folding structure in a hollowed-out mode, twelve flexible piezoresistive sensing units are arranged on the upper surface of the FPCB flexible printed circuit board and are respectively adhered to the top surface and two side surfaces of the four bulges, and the twelve flexible piezoresistive sensing units are packaged through PTFE films attached to the upper surface of the FPCB flexible printed circuit board; the PTFE film is provided with the foam-rubber cushion which is consistent with the thickness of the flexible piezoresistance sensing unit at four corners of the upper surface corresponding to the square convex blocks of the flexible boss, so that gaps are prevented from being generated when the flexible boss and the flexible base are assembled up and down.
The flexible boss and the flexible base are made of flexible silica gel materials. The preparation methods of the flexible boss 1 and the flexible base 6 are as follows: and (3) manually stirring and mixing Polydimethylsiloxane (PDMS) and a curing agent (10:1) for 10 minutes through a glass rod, putting the mixture into a vacuum freeze dryer for vacuumizing operation, removing bubbles in the solution to prevent the vacuum phenomenon from occurring in the cured silica gel, filling the vacuumized solvent into an external processing mold coated with a surface treating agent, putting the external processing mold into an oven, heating and curing the external processing mold at the temperature of 70 ℃, and demolding the external processing mold.
The PTFE film, the flexible piezoresistive sensing unit and the FPCB flexible printed circuit board form a force sensing layer, and the force sensing bottom is adhered to the flexible base through an acrylic adhesive tape.
And interpolation electrodes are plated at the positions of the FPCB flexible printed circuit boards corresponding to each flexible piezoresistive sensing unit, one lead of all interpolation electrodes is integrated at the interface of the front surface of the flexible piezoresistive sensing unit, and the other lead of all interpolation electrodes is integrated at the interface of the back surface of the flexible piezoresistive sensing unit.
When the flexible six-dimensional force sensor is acted by six-dimensional force in the space, the flexible boss generates pressure on the piezoresistive sensing unit after deformation, and the piezoresistive sensing unit transmits a voltage signal to the upper computer.
The six-dimensional force is specifically: a three-dimensional coordinate system is built by taking the center of the top surface of the flexible boss as an origin, six-dimensional forces are Fx, fy, fz, mx, my, mz, fx and Fy are transverse forces applied to the flexible boss in the directions of the x axis and the y axis respectively, fz is positive pressure applied to the top surface of the flexible boss in the direction of the z axis, my and Mz are transverse torque forces applied to the flexible boss in the directions of the x axis and the y axis, and Mx is longitudinal torque force applied to the flexible boss in the direction of the z axis.
The flexible six-dimensional force sensor is applied to intelligent external force detection equipment such as robot fingertips, wearable medical devices and other occasions for detecting stimulation in complex environments.
The invention has the beneficial effects that:
when the flexible six-dimensional force sensor is used, the lower surface of the flexible six-dimensional force sensor is attached to an object to be detected due to small size, light weight and portability, and twelve piezoresistive sensing units positioned in the sensor receive stimulation when the upper surface is pressed or distorted and loaded from the outside, so that the sensor generates resistance change.
The flexible six-dimensional force sensor can be applied to intelligent external force detection equipment such as a robot finger tip, a wearable medical device and other occasions for detecting stimulation in complex environments according to the characteristics of the flexible six-dimensional force sensor. For example, when a robot needs to perform complex operations of moving and rotating an object, such as tightening a bottle cap, solving a magic cube, or assembling parts, its fingertips and joints will be subjected to forces and moments in three directions, and force sensing information during the operation is requiring six-dimensional force sensors to detect and decouple.
Drawings
FIG. 1 is an exploded schematic view of a flexible six-dimensional force sensor of the present invention;
FIG. 2 is a schematic view of a flexible silicone boss on a flexible six-dimensional force sensor of the present invention;
fig. 3 is a schematic view showing a folding structure of an FPCB flexible printed circuit board according to the present invention;
FIG. 4 is a schematic diagram of a flexible piezoresistive sensing elements of a flexible six-dimensional force sensor according to the present invention;
FIG. 5 is a schematic illustration of a flexible six-dimensional force sensor foam pad of the present invention;
FIG. 6 is a schematic diagram of a flexible silicone base for a flexible six-dimensional force sensor of the present invention;
fig. 7 is a schematic view of the front and back sides of an FPCB flexible printed circuit board according to the present invention;
FIG. 8 is a schematic diagram showing the position distribution of twelve flexible piezoresistive sensor elements according to the present invention;
FIG. 9 is a schematic diagram of a flexible six-dimensional force sensor of the present invention;
fig. 10 is a data graph of a flexible six-dimensional force sensor detecting spatial six-dimensional forces (Fx, fy, fz, mx, my, mz) in accordance with the present invention.
In the figure: the flexible pressure-resistant sensing device comprises a flexible boss 1, a PTFE film 2, a flexible pressure-resistant sensing unit 3, a foam cushion 4, an FPCB flexible printed circuit board 5 and a flexible base 6.
Detailed Description
The invention is described in detail below with reference to the drawings and examples.
As shown in fig. 1 and 9, the present invention includes a quadrangular frustum pyramid-shaped flexible boss 1 having a four-foot structure, a PTFE film 2 having a space folding structure and capable of being fitted into the quadrangular frustum pyramid, a flexible piezoresistive sensing unit 3, an FPCB flexible printed circuit board 5 having a space folding structure and capable of being fitted into the quadrangular frustum pyramid, and a flexible chassis 6 having a cross mechanism. The flexible boss and the cross structure flexible base 6 are inspired by a mortise and tenon structure of a traditional ancient Chinese building, and the upper boss and the lower base of the sensor are in concave-convex interlocking. The boss with the quadrangular frustum pyramid shape is formed by pouring flexible silica gel in a custom mold for demolding, the whole body is soft, six-degree-of-freedom external load can be realized, and the PTFE film 2 is used for receiving the signal of the piezoresistive sensing unit and is embedded in an interlocking structure and needs to be folded into a space structure; the flexible piezoresistive sensing units are cut into square blocks, twelve flexible piezoresistive sensing units are required for the sensor, and the sensor is uniformly distributed on the FPCB flexible printed circuit board and is packaged by a PTFE film to obtain a force sensing layer; the FPCB flexible printed circuit board is a layer which has the same structure as the PTFE film and can be ensured to be embedded into the flexible silica gel base with the cross structure, and leads are respectively arranged on the front side and the back side of the FPCB flexible printed circuit board. Because of the existence of the flexible piezoresistive sensing units, gaps are generated during assembly of the flexible interlocking structure, the foam cushion 4 with the same thickness as the piezoresistive sensing units is used for filling the gaps, and the foam cushion is respectively attached to four vertex angles of the upper surface of the force sensing layer, so that the balance and stability of the sensor during operation are ensured.
The flexible boss 1 and the flexible base 6 are prepared by manually stirring and mixing Polydimethylsiloxane (PDMS) and a curing agent (10:1) for 10 minutes through a glass rod, then placing the mixture into a vacuum freeze drier for vacuumizing operation, wherein the vacuumizing operation is used for removing bubbles in a solution to prevent the vacuum phenomenon in the cured silica gel, filling the vacuumized solvent into an external processing mould coated with a surface treating agent, and placing the external processing mould into an oven for heating and curing at 70 ℃ and then demoulding; the electrode layer is formed by plating an electrode on a magnetron sputtering instrument;
as shown in FIG. 7, the flexible piezoresistive sensor unit is purchased from a commercial sensor unit, twelve sensor units are divided according to the thickness of 1mm multiplied by 0.1mm, a solvent obtained after the PDMS and the curing agent (10:1) are stirred and mixed and vacuumized is used as an adhesive, and the twelve sensor units are respectively adhered to the upper surface of the FPCB flexible printed circuit board and the two sides of the four ends of the cross structure.
When the flexible six-dimensional force sensor is used, due to the excellent characteristics of small volume (7 mm multiplied by 7 mm) and light and portable resolution (0.05N and 0.2 N.mm), the lower surface is attached to an object to be detected, and when the upper surface is pressed or distorted and loaded from the outside, twelve piezoresistive sensing units in the sensor receive stimulation, so that the sensor generates resistance change. The flexible six-dimensional force sensor can be applied to intelligent external force detection equipment such as a robot finger tip, a wearable medical device and other occasions for detecting stimulation in complex environments according to the characteristics of the flexible six-dimensional force sensor.
The composite dielectric layer of the flexible six-dimensional force sensor integrates a PTFE film, an FPCB flexible printed circuit board and twelve sensing units, and the basal plane is formed by continuously bending a plane at 90 degrees, so that the basal body can maintain the stability of the structure while undergoing certain deformation, and the planar design thinking of the traditional flexible touch sensor is broken. The electrode layer is specially customized according to the whole structure and is obtained by external processing, so that the signal change of twelve units can be conveniently detected, and meanwhile, the decoupling is easy.
External stimuli of six-dimensional forces (Fx, fy, fz, mx, my, mz) in space can be detected by four deformations of the upper flexible silicone protrusion and the flexible base interlock structure. Drawing a calibration curve according to the data obtained by the calibrated data collector, wherein the detection range of the positive pressure Fz of the sensor is 0.1N-3N, the detection range of the lateral force Fx and Fy is-1N, the detection range of the torque Mz and Mx is-4 N.mm, and the detection range of My is 0.4 N.mm-4 N.mm. When the stress exceeds 20% of the detection range, the upper bulge and the lower base of the sensor are separated, and the voltage change of the sensing unit is too small, so that the pressure change cannot be identified. As can be seen from the measurement data of the attached drawings, the flexible six-dimensional force sensor not only can effectively solve the problem of single-side stimulation response limitation, but also can identify the strain direction generated by the spatial six-dimensional force and distinguish different stimulation types.
As shown in fig. 8, twelve flexible piezoresistive sensing units 3 are arranged between the PTFE membrane 2 and the FPCB flexible printed circuit board 5, reasonably spatially arranged so that each sensing unit can feed back a signal individually; four piezoresistive sensing units (R11, R12, R13 and R14) are arranged at the corresponding positions of the four end parts of the cross structure, two piezoresistive sensing units are respectively arranged at two sides of the four end parts, R21 and R22 are arranged at two sides of the R11, R31 and R32 are arranged at two sides of the R12, R41 and R42 are arranged at two sides of the R13, and R51 and R52 are arranged at two sides of the R14.
Six-dimensional calibration force is applied to the flexible six-dimensional force sensor for calibration, and four loading methods are designed for static calibration of the sensor by positive pressure, transverse force, longitudinal torque and transverse torque respectively. To facilitate and accurate loading operations, a mechanical test system (INSTRON leg 2345) is used to load the pressure and a data collector (DAQVANTECH USB _hrf 4028) is used to connect to the sensor to collect the voltage signal. The positive pressure calibration method is simple, the positive pressure is calibrated after pressure is directly applied to the upper surface of the sensor, the four pressure sensing units on the top surface of the flexible base are stressed to send data signal changes, and the calibration is stopped when the data collector cannot recognize the voltage signal changes; the transverse force is obtained after the load is applied through horizontal feeding, then the sensor is calibrated by using the transverse force (Fx, fy), after the horizontal force is applied, the data signal change can occur when the two pressure sensing units on one side of one beam of the cross structure of the flexible base are stressed, and the sensor stops when the voltage signal change cannot be recognized by the data collector; the calibration principle of the transverse torque (Mx, my) is that the torque is generated by a moment arm, and after the torque is applied, four pressure sensing units on the single side surface and the upper surface of one beam in the cross structure of the flexible base can bear the stress to generate data signal change, and the calibration is stopped when the data acquisition device cannot recognize the voltage signal change; the calibration mode of the longitudinal torque (Mz) is similar to that described above, the z-axis torque calibration device is used for calibrating the longitudinal torque Mz of the sensor, when the sensor is applied with (reversely) forward rotation, the four corresponding sensing units on the side surface of the flexible base can generate data signal change, and the calibration is stopped when the data collector cannot recognize the voltage signal change.
Carrying out stress detection on the flexible six-dimensional force sensor: and calculating the six-dimensional calibration force and the calibration voltage signal through an orthogonal parallel six-dimensional force sensor static calibration algorithm to obtain a mapping relation matrix between the six-dimensional force and the calibration voltage signal, and calculating the acting force born by the six-dimensional force sensor according to the mapping relation matrix and the voltage signal output during detection of the flexible six-dimensional force sensor. Or calibrating the flexible six-dimensional force sensor for a plurality of times, taking the applied six-dimensional force and the corresponding calibration voltage signals as sample sets, dividing the sample sets into training sets and testing sets, inputting the training sets and the testing sets into the DNN deep neural network for training, inputting the voltage signals output during the detection of the flexible six-dimensional force sensor into the DNN deep neural network after training, and outputting the applied force received by the six-dimensional force sensor.
The invention relates to a stress loading condition of a flexible six-dimensional force sensor, which comprises the steps of firstly defining a coordinate system, taking an upper flexible substrate of the flexible six-dimensional force sensor as a force measuring body, establishing a coordinate axis on the upper surface of the force measuring body, taking a Z axis as the upward direction perpendicular to the center of the surface, taking an axis which is perpendicular to the Z axis and points to the right front side as an X axis, taking an axis which is perpendicular to the Z axis and points to the left front side as a Y axis, and establishing a coordinate system origin at the center of the upper surface of the sensor as shown in figure 1; the sensing units clamped in the middle layer of the sensor are analyzed as shown in fig. 8, when the sensor is subjected to external normal (Z-axis) pressure, the sensor is equivalent to extruding the whole sensor from top to bottom, the electrode layer changes, and four piezoresistive sensing units (R11, R12, R13 and R14) for detecting positive pressure output four changed signal values to the outside; when the flexible six-dimensional force sensor is subjected to external force in a horizontal tangential direction (X axis or Y axis), two piezoresistive sensing units respectively receive signals according to the loading in different directions, for example, when the sensor is subjected to horizontal force in the positive direction of the X axis, two piezoresistive sensing units (R21 and R41) correspondingly generate signal changes, and when the sensor is subjected to horizontal force in the opposite direction of the X axis, R22 and R42 generate signals; when the sensor receives a horizontal force in the positive direction of the Y axis, two piezoresistive sensing units (R32 and R52) generate signal changes, and when the sensor receives a horizontal force in the negative direction of the Y axis, R31 and R51 generate signal changes; when the flexible six-dimensional force sensor is subjected to external loading torsion force (Mx, my or Mz), the deformation of the sensor under the action of the torsion force is more complex than the deformation under the action of the torsion force, the torsion force along the three axes X, Y, Z can enable the flexible matrix to rotate, when the sensor is subjected to the torsion force in the positive direction of the Z axis, the lower flexible matrix keeps stable and does not move, the upper flexible matrix rotates around the Z axis, the extrusion deformation caused by the rotation enables the piezoresistive sensing units to be stimulated so as to output changed signal values to the outside, when the applied torsion force is positive rotation force (clockwise rotation), four piezoresistive sensing units R21, R31, R42 and R52 can generate signals, and when the sensor is subjected to the anticlockwise rotation force, R22, R32, R41 and R51 can generate signals; when the sensor is subjected to a tangential (X-axis or Y-axis) torque, the deformation of the flexible substrate is similar to the deformation under tangential force, since both the force and the moment in this direction will move the upper flexible substrate to one side, except that the lateral torque will rotate, resulting in more sensing unit response.
Taking the coordinate axis shown in fig. 8 as an example, when clockwise torque is applied in the Y-axis forward direction, signals of R11, R21, R13 and R41 change, and when clockwise torque is applied in the X-axis forward direction, signals of R51, R14, R31 and R12 are generated, and correspondingly, under anticlockwise transverse torque, four piezoresistive sensing units generate signals.
The measured force values of the sensor in various directions and the standard load force values are plotted as shown in fig. 10. Wherein (a) the output value for each dimension is when loading a force in the x-direction; (b) When the output value for each dimension is a force in the y-direction; (c) The output value for each dimension is when loading a force in the z-direction; (d) When the output value for each dimension is the moment in the x direction; (e) When the output value for each dimension is the moment in the y direction; (f) The output value for each dimension is when a moment in the z-direction is loaded.
Claims (7)
1. The flexible six-dimensional force sensor based on the mortise and tenon structure is characterized by comprising a flexible boss (1), a PTFE film (2), an FPCB flexible printed circuit board (5) and a flexible base (6) which are sequentially arranged from top to bottom;
the flexible boss (1) is of a quadrangular frustum pyramid structure, square bumps are arranged at four corner positions of the bottom surface, a cross structure matched with the square bumps of the flexible boss (1) is arranged on the top surface of the flexible base (6), and the bottom of the flexible boss (1) and the top of the flexible base (6) are in concave-convex interlocking to form a mortise-tenon structure;
the FPCB flexible printed circuit board (5) is of a layered folding structure embedded with the top surface of the flexible base (6), four inverted U-shaped bulges are formed in the middle of the layered folding structure in a hollowed-out mode, twelve flexible piezoresistive sensing units (3) are arranged on the upper surface of the FPCB flexible printed circuit board (5), the twelve flexible piezoresistive sensing units are respectively adhered to the top surface and two side surfaces of the four bulges, and the twelve flexible piezoresistive sensing units (3) are packaged through PTFE films (2) attached to the upper surface of the FPCB flexible printed circuit board (5);
four corners of the upper surface of the PTFE film (2) are provided with sponge pads (4) with the thickness consistent with that of the flexible piezoresistive sensing units.
2. The flexible six-dimensional force sensor based on the mortise and tenon structure according to claim 1, wherein the flexible boss (1) and the flexible base (6) are made of flexible silica gel materials.
3. The flexible six-dimensional force sensor based on the mortise and tenon structure according to claim 1 is characterized in that a force sensing layer is formed by a PTFE film (2), a flexible piezoresistive sensing unit (3) and an FPCB flexible printed circuit board (5), the force sensing layer is embedded between a flexible boss (1) and a flexible base (6), and the bottom is adhered to the flexible base (6) through an acrylic adhesive tape.
4. The flexible six-dimensional force sensor based on the mortise and tenon structure according to claim 1, wherein interpolation electrodes are plated at the positions of the FPCB flexible printed circuit board (5) corresponding to each flexible piezoresistive sensing unit, one lead of all interpolation electrodes is integrated at the interface of the front surface of the flexible piezoresistive sensing unit, and the other lead of all interpolation electrodes is integrated at the interface of the back surface of the flexible piezoresistive sensing unit.
5. The flexible six-dimensional force sensor based on the mortise and tenon structure according to claim 1 is characterized in that when the flexible six-dimensional force sensor is acted by six-dimensional force in a space, the flexible boss (1) generates pressure on the piezoresistive sensing unit after being deformed, and the piezoresistive sensing unit transmits a voltage signal to the upper computer.
6. The flexible six-dimensional force sensor based on a mortise and tenon structure according to claim 5, wherein the six-dimensional force is specifically: a three-dimensional coordinate system is built by taking the center of the top surface of the flexible boss as an origin, six-dimensional forces are Fx, fy, fz, mx, my, mz, fx and Fy are transverse forces applied to the flexible boss in the directions of the x axis and the y axis respectively, fz is positive pressure applied to the top surface of the flexible boss in the direction of the z axis, my and Mz are transverse torque forces applied to the flexible boss in the directions of the x axis and the y axis, and Mx is longitudinal torque force applied to the flexible boss in the direction of the z axis.
7. The flexible six-dimensional force sensor based on the mortise and tenon joint structure according to claim 1, wherein the flexible six-dimensional force sensor is applied to a robotic fingertip and a wearable medical device.
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| CN101281067A (en) * | 2008-05-21 | 2008-10-08 | 中国科学院合肥物质科学研究院 | Underwater robot four dimensional fingertip force sensor and information acquisition method |
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