CN114234857A - Visible and infrared multi-optical-axis parallelism detection device and method - Google Patents

Visible and infrared multi-optical-axis parallelism detection device and method Download PDF

Info

Publication number
CN114234857A
CN114234857A CN202111564583.7A CN202111564583A CN114234857A CN 114234857 A CN114234857 A CN 114234857A CN 202111564583 A CN202111564583 A CN 202111564583A CN 114234857 A CN114234857 A CN 114234857A
Authority
CN
China
Prior art keywords
optical
light source
detector
light
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202111564583.7A
Other languages
Chinese (zh)
Inventor
郭帅
耿莽河
张浩海
王亮
余强
郭鹏
李高文
李欣林
方刚
李鹏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Jiuhang Electronics Co ltd
Original Assignee
Shanghai Jiuhang Electronics Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Jiuhang Electronics Co ltd filed Critical Shanghai Jiuhang Electronics Co ltd
Priority to CN202111564583.7A priority Critical patent/CN114234857A/en
Publication of CN114234857A publication Critical patent/CN114234857A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

The invention discloses a visible and infrared multi-optical-axis parallelism detection device, which comprises: an optical platform; a spectrally tunable light source disposed on the optical platform; the off-axis parabolic mirror is arranged on the optical platform and used for reflecting light beams emitted by the spectrum adjustable light source; the plane reflector is arranged on the optical platform and used for reflecting the light beam reflected by the off-axis parabolic mirror; the multiband photoelectric detection assembly is arranged on the optical platform and positioned on a focal plane of the off-axis parabolic mirror, and is used for receiving a laser signal of a light beam reflected by the plane mirror; the master control management unit is used for analyzing and processing the laser signals received by the multiband photoelectric detection assembly; and the display control unit is connected with the main control management unit and is used for displaying the detection result of the optical axis parallelism of the laser signal received by the multiband photoelectric detection component. The invention also discloses a visible and infrared multi-optical-axis parallelism detection method.

Description

Visible and infrared multi-optical-axis parallelism detection device and method
Technical Field
The invention relates to the technical field of photoelectric detection, in particular to a visible and infrared multi-optical-axis parallelism detection device and method.
Background
Modern laser recognition system adopts infrared, visible etc. multiband laser timesharing work, because of having integrateed a plurality of optical system, each laser emission system generally parallel mount becomes an entirety, in order to can catch, monitor, aim at same target, must pass through accurate optical axis school and transfer, make each optical axis strictly parallel, keep the directional uniformity of each optical axis to realize that the target is accurately discerned.
The light beam emitted by the general equipment consists of three parts, namely a (630nm) calibration light beam, a (905nm) distance measuring light beam and a (1550nm) eye safety light beam. Because the parallelism among multiple optical axes of multiple wavelengths is difficult to achieve high precision due to the limitation of processing conditions, precise detection and debugging are required in the process of system design and assembly and adjustment, so that the parallelism error among the optical axes is controlled within a certain precision range. However, the system contains 905nm and 1550nm near infrared invisible light, which brings great difficulty to the adjustment and detection of the system, so that the detection of the optical axis parallelism is more difficult.
The traditional method for measuring the optical axis parallelism deviation of the multi-optical-axis system aims at a remote target to carry out direct calibration, but the target which is far enough is difficult to find in cities and factories, and the method is inconvenient if an external field test is carried out.
Disclosure of Invention
The present invention is directed to a device and method for detecting parallelism between visible and infrared light axes, which solves the above-mentioned problems.
The technical problem solved by the invention can be realized by adopting the following technical scheme:
a visible and infrared multi-optical axis parallelism detection apparatus, comprising:
an optical platform;
a spectrally tunable light source disposed on the optical platform;
an off-axis parabolic mirror disposed on the optical platform, the off-axis parabolic mirror to reflect the light beam emitted by the spectrally tunable light source;
a planar mirror disposed on the optical platform, the planar mirror configured to reflect the light beam reflected by the off-axis parabolic mirror;
a multiband photodetection assembly disposed on the optical platform and located at a focal plane of the off-axis parabolic mirror, the multiband photodetection assembly to receive a laser signal of the light beam reflected by the planar mirror;
the master control management unit is used for analyzing and processing the laser signals received by the multiband photoelectric detection assembly;
and the display control unit is connected with the main control management unit and is used for displaying the detection result of the optical axis parallelism of the laser signal received by the multiband photoelectric detection component.
In a preferred embodiment of the present invention, the spectrally adjustable light source is disposed on a storage platform that is adjustable in a height direction and is disposed on the optical platform.
In a preferred embodiment of the present invention, the spectrally tunable light source includes a full-band light source, a filtering mechanism and a focusing mirror, and laser light emitted from the full-band light source passes through the filtering mechanism and the focusing mirror in sequence and then is emitted.
In a preferred embodiment of the present invention, the filter mechanism comprises a plurality of filters with different wavelengths, and each filter corresponds to a filter switching button.
In a preferred embodiment of the present invention, the multi-band photoelectric detection assembly comprises a rotating wheel arranged on a wheel adjusting frame and a plurality of four-quadrant detectors distributed on the rotating wheel at intervals in the circumferential direction, and each four-quadrant detector is connected with an auto-collimation adjusting mechanism.
In a preferred embodiment of the present invention, the auto-collimation adjustment mechanism includes a four-quadrant detector fixing shaft, an X-direction driving mechanism and a Y-direction driving mechanism, the four-quadrant detector fixing shaft is used for mounting the four-quadrant detector, the four-quadrant detector fixing shaft is connected to one of the X-direction driving mechanism and the Y-direction driving mechanism, and the other driving mechanism is connected to one of the X-direction driving mechanism and the Y-direction driving mechanism.
In a preferred embodiment of the present invention, the main control management unit is connected to the X-direction driving mechanism and the Y-direction driving mechanism, the detector transmits a real-time detection image to the main control management unit, the main control management unit analyzes detection data of the detector to obtain a deviation between the calibration light and an optical axis of the four-quadrant detector, and the main control management unit sends an instruction to control the X-direction driving mechanism or/and the Y-direction driving mechanism to operate so as to adjust the four-quadrant detector and the calibration optical axis to be consistent, thereby achieving automatic collimation.
In a preferred embodiment of the present invention, the X-direction driving mechanism and the Y-direction driving mechanism include a micro driving motor.
A visible and infrared multi-optical-axis parallelism detection method utilizes the visible and infrared multi-optical-axis parallelism detection device of any one technical scheme, and comprises the following steps:
the method comprises the following steps: the first laser beam emitted by the spectrum adjustable light source is firstly reflected to the plane reflector through the off-axis parabolic mirror and then reaches the multiband photoelectric detection assembly after being reflected by the plane reflector, and the multiband photoelectric detection assembly rotates the first laser beam detector to a focal plane of the off-axis parabolic mirror, so that the first laser beam is normally incident to a photosensitive surface of the four-quadrant detector to form uniform light spots;
the four elephantsThe output light currents of the limit detectors corresponding to four quadrants are respectively IA、IB、IC、IDThe relative current magnitude depends on the area S of the light spot on each quadrant surfaceA、SB、SC、SDThe current value is input to the master control management unit;
the master control management unit calculates the position parameter (sigma) of the light spot through a built-in normalized light spot position calculation algorithmX,σY) The calculation formula is as follows:
Figure BDA0003421688230000031
Figure BDA0003421688230000041
when the centroid of the laser is moved near the center of the detector, no matter the laser is a uniform light spot or a Gaussian light spot, the actual position of the light spot is in a linear relation with the calculation value of the four-quadrant detector, the light spot position (delta X, delta Y) is irrelevant to the absolute magnitude of the output current of the detector, the actual position of the light spot can be calculated as long as the output electric signal of the detector is measured, and then the deviation of a laser emission shaft relative to the center of the detector is calculated, and the following formula is adopted:
Figure BDA0003421688230000042
Figure BDA0003421688230000043
according to the position relation of two points in the rectangular coordinate system, calculating the angle deviation value between the optical axis of the spectrum adjustable light source and the center of the detector as follows:
Figure BDA0003421688230000044
Figure BDA0003421688230000045
wherein f is the focal length of the off-axis parabolic mirror;
the main control management unit calculates (theta)x、θy) Sending an instruction to an auto-collimation adjusting mechanism of the multiband photoelectric detection assembly, adjusting the position of the four-quadrant detector until the light spot positions (delta X and delta Y) are superposed with the centers (0 and 0) of the detectors, and completing the consistency calibration of the optical axis of the spectrum adjustable light source, the optical system and the optical axis of the corresponding four-quadrant detector;
adjusting the wavelength of the spectrum adjustable light source, and adjusting all four-quadrant detector optical axes, adjustable light source optical axes and optical systems in the multiband photoelectric detection assembly to be consistent according to the calibration method;
step two: fixing the tested equipment on the optical platform, turning on visible light of a mixed light source of the tested equipment, rotating a four-quadrant detector corresponding to the visible light in the multiband photoelectric detection assembly to a focal plane of the off-axis parabolic mirror, displaying the angle deviation between the position of a visible light spot and the central axis of the four-quadrant detector on a display and control unit screen, adjusting the posture of the visible light source through the self-adjusting function of the tested equipment, enabling the light spot to coincide with the center of the detector, and completing the detection of the parallelism of the visible light axis;
step three: the infrared light of the mixed light source of the tested device is turned on, the four-quadrant detector corresponding to the infrared light in the multiband photoelectric detection assembly rotates to the focal plane of the off-axis parabolic mirror, the angular deviation between the position of an infrared light spot and the central axis of the four-quadrant detector can be displayed on the screen of the display and control unit, the posture of the infrared light source is adjusted through the self-adjusting function of the tested device, the light spot is overlapped with the center of the detector, and the detection of the parallelism of the infrared optical axis is completed.
In a preferred embodiment of the invention, the principle that parallel light enters the off-axis parabolic mirror and light beams are converged at the focal plane of the parabolic mirror is adopted, a system-level adjusting method is adopted, the off-axis parabolic mirror and the plane reflector are used for aligning the optical axes of the spectrum adjustable light source and the detector, and the parallelism of the optical axes of the multi-beam multi-band is finally adjusted and measured by detecting the parallelism of different light beams and the alignment light beams successively.
In a preferred embodiment of the present invention, the spectrally tunable light source is a full-band light source, and the wavelength of the outgoing laser is continuously tunable by electrically switching the optical filter assembly, covering all bands from visible to infrared.
Due to the adoption of the technical scheme, the visible and infrared multi-optical-axis parallelism detection device and method provided by the invention can be used for carrying out high-precision detection on spatial angles of multiple wavelengths such as laser communication, laser identification, laser ranging and laser trackers and outputting a test result. The detection result can be directly used for the parallelism adjustment of the multiple optical axes, and the result is fed back to the system for error correction. The device has the advantages of simple structural design, high testing precision, convenience in operation, strong adaptability, wide testing range and the like.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a visible and infrared multi-optical-axis parallelism detection apparatus according to an embodiment of the present invention.
Fig. 2 is a second schematic structural diagram of a visible and infrared multi-optical axis parallelism detection apparatus according to an embodiment of the invention.
Fig. 3 is a schematic structural diagram of a spectrally tunable light source according to an embodiment of the present invention.
Fig. 4 is a front view of a multi-band photodetection assembly according to an embodiment of the present invention.
Fig. 5 is a side view of fig. 4.
FIG. 6 is a schematic diagram of the distribution of the light spot on the four-quadrant detector according to an embodiment of the present invention.
Fig. 7 is a schematic structural diagram of an auto-collimation adjustment mechanism according to an embodiment of the invention.
Detailed Description
In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further explained below.
Referring to fig. 1 to 5, the visible and infrared multi-optical-axis parallelism detection apparatus includes an optical platform 100, a spectrally-tunable light source 300 disposed on the optical platform 100, an off-axis parabolic mirror 700, a planar mirror 400, a multi-band photoelectric detection assembly 800, a master control management unit 500, and a display control unit 600.
The placement platform 200, which is disposed on the optical platform 100 and can be adjusted in a lifting manner, of the spectrally adjustable light source 300 in this embodiment can change the height of the spectrally adjustable light source 300 by using the placement platform 200. In addition, the platform 200 can also adjust and fix the detection device. The spectrum tunable light source 300 is used for generating a multiband laser beam, the spectrum tunable light source 300 includes a full-band light source 301, a filtering mechanism 302 and a focusing mirror 303, and laser emitted from the full-band light source 301 passes through the filtering mechanism 302 and the focusing mirror 303 in sequence and then is emitted. The filter mechanism 302 comprises a plurality of filters 304 with different wavelengths, each filter 304 corresponds to one filter switching button 305, the filter mechanism 302 is a group of narrow-band filters which are electrically switched and cover all visible and infrared wave bands, the wavelength ranges of the filters include 300-450 nm, 450-600 nm, 600-750 nm, 750-900 nm, 900-1050 nm and 16000-20000 nm), the wavelengths corresponding to the filters 304 are printed on the filter switching buttons 305, and lasers with different wavelengths can be selected by pressing the filter switching buttons 305, so that the spectrum of a light source can be continuously adjusted.
An off-axis parabolic mirror 700 is disposed on the optical platform 100 on one side of the spectrally tunable light source 300, and the off-axis parabolic mirror 700 is configured to reflect the light beam emitted by the spectrally tunable light source 300.
The plane mirror 400 is disposed on the optical platform 100 at one side of the off-axis parabolic mirror 700, and the plane mirror 400 is used for reflecting the light beam reflected by the off-axis parabolic mirror 700 to reflect the laser beam to the multi-band photodetection assembly 800.
The multiband photoelectric detection assembly 800 is disposed on the optical platform 100 and located on the focal plane of the off-axis parabolic mirror 700, and the multiband photoelectric detection assembly 800 is configured to receive the laser signal of the light beam reflected by the planar mirror 400 and the focused light spot of the detection light beam reflected by the planar mirror 400. The multi-band photoelectric detection assembly 800 in the present embodiment includes a rotating wheel 803 disposed on a wheel adjustment frame 802, and a plurality of four-quadrant detectors 805 circumferentially distributed on the rotating wheel 803 at intervals, wherein the wheel adjustment frame 802 is disposed on a base 801, and each four-quadrant detector 805 is connected to an auto-collimation adjustment mechanism 804. Referring to fig. 7, the auto-collimation adjustment mechanism 804 includes a four-quadrant detector fixing shaft 811, an X-direction driving mechanism 812, and a Y-direction driving mechanism 813. The four-quadrant detector fixing shaft 811 is used for mounting the four-quadrant detector, and the X-direction driving mechanism 812 and the Y-direction driving mechanism 813 are preferably micro driving motors. In this embodiment, the fixed shaft 811 of the four-quadrant detector is connected to the X-direction driving mechanism 812, and the Y-direction driving mechanism 813 is connected to the X-direction driving mechanism 812, so that the X-direction position and the Y-direction position of the fixed shaft 811 of the four-quadrant detector can be changed by the cooperation of the X-direction driving mechanism 812 and the Y-direction driving mechanism 813. The main control management unit 500 is connected to the X-direction drive mechanism 812 and the Y-direction drive mechanism 813. The detector transmits the real-time detection image to the master control management unit 500, the master control management unit 500 analyzes the detection data of the detector to obtain the deviation between the calibration light and the optical axis of the four-quadrant detector, and the master control management unit 500 sends an instruction to control the X-direction driving mechanism 812 or/and the Y-direction driving mechanism 813 to work so as to adjust the four-quadrant detector to be consistent with the calibration optical axis, so that automatic collimation is realized. The 804 auto-collimation adjustment mechanism receives the angular deviation between the four-quadrant detector and the optical axis of the spectrally adjustable light source 300, which is fed back by the master control management system 500, automatically adjusts the posture to make the optical axes coincide, and the rotary wheel disc 803 rotates the corresponding four-quadrant detector according to the wavelength of the light source detected by the system through the instruction of the master control management system 500.
The main control management unit 500 is disposed on the optical platform 100, and the main control management unit is configured to analyze and process the laser signal received by the multi-band photoelectric detection assembly 800, that is, the main control management unit 500 is configured to analyze the system light spot position and perform system control on the entire detection apparatus.
The display control unit 600 is disposed on the optical platform 100, and the display control unit 600 is connected to the main control management unit 500 and is configured to display a detection result of optical axis parallelism of the laser signal received by the multiband photoelectric detection assembly 800.
The detection principle of the visible and infrared multi-optical-axis parallelism detection device is as follows: the method comprises the steps that a first laser beam (with the wavelength of 650nm) emitted by the measured multiband optical axis optical equipment is firstly reflected to a plane reflector 400 through an off-axis parabolic mirror 700, then is reflected to a first four-quadrant detector 805 corresponding to the first laser beam through the plane reflector 400, the optical axis of the first laser beam is adjusted to be coincident with that of the first four-quadrant detector 805, similarly, a second laser beam (with the wavelength of 905nm) emitted by the multiband optical axis optical equipment is adjusted to be coincident with that of the first four-quadrant detector 805 according to the process, and the process is repeated until all the laser beams are adjusted.
In order to ensure that the central axes of the detectors coincide when each four-quadrant detector rotates to the detection position, the spectrally adjustable light source 300 needs to sequentially emit laser beams of different wave bands, the imaging result of the laser beams on the four-quadrant detector 805 is transmitted to the master control management system 500, the master control management system 500 analyzes and processes the position data of the light spots, sends an instruction to the auto-collimation adjusting mechanism 804, and controls each four-quadrant detector 805 to automatically align.
With reference to fig. 1 to 6, a method for detecting parallelism between visible and infrared multiple optical axes, which uses the device for detecting parallelism between visible and infrared multiple optical axes, includes the following steps:
the method comprises the following steps: a first beam of laser emitted by the spectrum adjustable light source 300 is firstly reflected to the plane reflector 400 through the off-axis parabolic mirror 700 and then reflected to the multiband photoelectric detection assembly 800 through the plane reflector 400, and the multiband photoelectric detection assembly 800 rotates the first beam of laser detector to the focal plane of the off-axis parabolic mirror 700, so that the first beam of laser is normally incident to the photosensitive surface of the four-quadrant detector 805 to form uniform light spots;
the four-quadrant detector 805 outputs optical currents of four quadrants IA、IB、IC、IDThe relative current magnitude depends on the area S of the light spot on each quadrant surfaceA、SB、SC、SDThe current value is input to the main control management unit 500;
the main control management unit 500 calculates the position parameter (sigma) of the light spot through a built-in normalized light spot position calculation algorithmX,σY) The calculation formula is as follows:
Figure BDA0003421688230000091
Figure BDA0003421688230000092
when the laser is imaged on the four-quadrant detector 805, whether the laser is a uniform light spot or a gaussian light spot, and the centroid of the laser moves near the center of the detector, the actual position of the light spot is in a linear relation with the calculation value of the four-quadrant detector, so that the light spot position (delta X, delta Y) is irrelevant to the absolute magnitude of the output current of the detector, the actual position of the light spot can be calculated as long as the output electric signal of the detector is measured, and further the deviation of a laser emission axis relative to the center of the detector is calculated, and the following formula is adopted:
Figure BDA0003421688230000093
Figure BDA0003421688230000094
according to the position relation of two points in the rectangular coordinate system, calculating the angle deviation value between the optical axis of the spectrum adjustable light source and the center of the detector as follows:
Figure BDA0003421688230000095
Figure BDA0003421688230000096
wherein f is the focal length of the off-axis parabolic mirror;
the main control management unit 500 calculates (theta)x、θy) Sending an instruction to an auto-collimation adjusting mechanism 804 of the multiband photoelectric detection assembly 800, adjusting the position of the four-quadrant detector 805 until the light spot positions (delta X and delta Y) coincide with the centers (0 and 0) of the detectors, and completing the consistency calibration of the optical axis of the spectrum adjustable light source, the optical system and the optical axis of the corresponding four-quadrant detector;
adjusting the wavelength of the spectrally tunable light source 300, and adjusting all four-quadrant detector optical axes, tunable light source optical axes and optical systems in the multiband photodetection assembly 800 to be consistent according to the calibration method;
step two: fixing the tested equipment on an optical platform, preferably fixing the tested equipment on the object placing platform 200, turning on visible light of a mixed light source of the tested equipment, rotating a four-quadrant detector 805 corresponding to the visible light in the multiband photoelectric detection assembly 800 to a focal plane of the off-axis parabolic mirror 700, displaying the angle deviation between the position of a visible light spot and the central axis of the four-quadrant detector on a screen of the display and control unit 600, adjusting the posture of the visible light source through the self-adjusting function of the tested equipment, enabling the light spot to coincide with the center of the detector, and completing the detection of the parallelism of the visible light axis;
step three: the infrared light of the mixed light source of the tested device is turned on, the four-quadrant detector 805 corresponding to the infrared light in the multiband photoelectric detection assembly 800 rotates to the focal plane of the off-axis parabolic mirror 700, the display and control unit 600 can display the angle deviation between the infrared light spot position and the central axis of the four-quadrant detector on the screen, the posture of the infrared light source is adjusted through the self-adjusting function of the tested device, the light spot is overlapped with the center of the detector, and the detection of the parallelism of the infrared optical axis is completed.
In the embodiment, the principle that parallel light enters the off-axis parabolic mirror and light beams are converged on the focal plane of the parabolic mirror is adopted, a system-level adjusting method is adopted, the off-axis parabolic mirror and the plane reflector are used for aligning the optical axes of the spectrum adjustable light source and the detector to be consistent, and the parallelism of the multi-beam multi-band optical axis is finally adjusted and measured by detecting the parallelism of different light beams and the alignment light beams successively.
The spectrum tunable light source adopts a full-waveband light source, and the continuous tunable of the emergent laser wavelength is realized by electrically switching the optical filter component, so that all visible to infrared wavebands are covered.
The parallelism of multiple light beams of the tested device is measured by taking any light beam of the spectrum adjustable light source 300 as a reference. After completing step one of the above-mentioned detection method, step two and step three are further explained with reference to fig. 6 and the following examples:
fixing the tested device on the object placing platform 200, opening a first laser beam to enable the emergent laser beam to enter a first four-quadrant detector 805 with a corresponding wave band, wherein the central position of the detector is A (0, 0), and the position of a light spot is B (x)1、y1) The specific position of the light spot can be seen in the display and control unit 600, as shown in fig. 6. At this time, B (x)1、y1) And the coordinate relative relation of A (0, 0) is known, and according to the rectangular coordinate transformation relation, the spatial included angle of the calibration beam of the first laser beam can be obtained by the following formula:
Figure BDA0003421688230000111
Figure BDA0003421688230000112
where f is the focal length of the off-axis parabolic mirror 700.
As can be seen from the formula, the included angle θ is inversely proportional to the focal length f of the off-axis parabolic mirror 700, and the larger the focal length is, the higher the resolution of the included angle θ that can be detected is.
According to the calculation result of the included angle, the posture of the first beam of laser is adjusted, so that the display control unit 600 observes that A and B are overlapped, and the optical axis adjustment of the first beam of laser is completed;
similarly, according to the above method, the second beam of laser light is turned on, so that the display and control unit 600 observes that a and C coincide, and the optical axis adjustment of the second beam of laser light is completed;
and adjusting all light beams to be adjusted to coincide with the calibration laser according to the method, namely completing the detection and adjustment of the multi-optical-axis multiband optical axis parallelism.
Therefore, the visible and infrared multi-optical-axis parallelism detection device and method provided by the invention adopt a means of calibrating the external optical axis and the optical axis of the detector to adjust the coincidence degree of the detected optical axis and the calibrated optical axis to realize the detection of the multi-beam parallelism, thereby improving the adaptability of the device.
The visible and infrared multi-optical-axis parallelism detection device and method provided by the invention can detect laser beams in visible, near-infrared, intermediate-infrared and far-infrared bands, accurately calculate the spatial angle of the multi-band beam and output results, and the results can be used for optical axis adjustment and error correction. The device has the advantages of simple structural design, high testing precision, convenience in operation, strong adaptability, wide testing range and the like.
The foregoing shows and describes the general principles and broad features of the present invention and advantages thereof. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims (11)

1. A visible and infrared multi-optical-axis parallelism detection apparatus, comprising:
an optical platform;
a spectrally tunable light source disposed on the optical platform;
an off-axis parabolic mirror disposed on the optical platform, the off-axis parabolic mirror to reflect the light beam emitted by the spectrally tunable light source;
a planar mirror disposed on the optical platform, the planar mirror configured to reflect the light beam reflected by the off-axis parabolic mirror;
a multiband photodetection assembly disposed on the optical platform and located at a focal plane of the off-axis parabolic mirror, the multiband photodetection assembly to receive a laser signal of the light beam reflected by the planar mirror;
the master control management unit is used for analyzing and processing the laser signals received by the multiband photoelectric detection assembly;
and the display control unit is connected with the main control management unit and is used for displaying the detection result of the optical axis parallelism of the laser signal received by the multiband photoelectric detection component.
2. The apparatus according to claim 1, wherein the spectrally adjustable light source is arranged on a platform that is adjustable in elevation on the optical platform.
3. The apparatus according to claim 1, wherein the spectrally tunable light source comprises a full-band light source, a filter mechanism and a focusing mirror, and the laser light emitted from the full-band light source passes through the filter mechanism and the focusing mirror in sequence and then is emitted.
4. The apparatus according to claim 3, wherein the filter mechanism comprises a plurality of filters having different wavelengths, each filter corresponding to a filter switch button.
5. The visible and infrared multi-optical axis parallelism detection apparatus of claim 1, wherein the multi-band photodetection assembly comprises a rotating wheel disposed on a wheel adjustment frame and a plurality of four-quadrant detectors circumferentially spaced on the rotating wheel, each four-quadrant detector being connected to an auto-collimation adjustment mechanism.
6. The apparatus according to claim 5, wherein the self-alignment adjustment mechanism comprises a fixed shaft of the four-quadrant detector for mounting the four-quadrant detector, an X-direction driving mechanism and a Y-direction driving mechanism, the fixed shaft of the four-quadrant detector is connected to one of the X-direction driving mechanism and the Y-direction driving mechanism, and the other driving mechanism is connected to the other driving mechanism.
7. The visible and infrared multi-optical-axis parallelism detection device according to claim 6, wherein the main control management unit is connected with the X-direction driving mechanism and the Y-direction driving mechanism, the detector transmits a real-time detection image to the main control management unit, the main control management unit analyzes detection data of the detector to obtain deviation of the calibration light and the optical axis of the four-quadrant detector, and the main control management unit sends an instruction to control the X-direction driving mechanism or/and the Y-direction driving mechanism to work so as to adjust the four-quadrant detector to be consistent with the calibration optical axis, thereby achieving automatic collimation.
8. The apparatus according to claim 6 or 7, wherein the X-direction driving mechanism and the Y-direction driving mechanism comprise micro driving motors.
9. A method for detecting parallelism of visible and infrared multiple optical axes, which comprises the steps of:
the method comprises the following steps: the first laser beam emitted by the spectrum adjustable light source is firstly reflected to the plane reflector through the off-axis parabolic mirror and then reaches the multiband photoelectric detection assembly after being reflected by the plane reflector, and the multiband photoelectric detection assembly rotates the first laser beam detector to a focal plane of the off-axis parabolic mirror, so that the first laser beam is normally incident to a photosensitive surface of the four-quadrant detector to form uniform light spots;
the output photocurrents of the four-quadrant detector corresponding to the four quadrants are I respectivelyA、IB、IC、IDThe relative current magnitude depends on the area S of the light spot on each quadrant surfaceA、SB、SC、SDThe current value is input to the master control management unit;
the master control management unit calculates the position parameter (sigma) of the light spot through a built-in normalized light spot position calculation algorithmX,σY) The calculation formula is as follows:
Figure FDA0003421688220000031
Figure FDA0003421688220000032
when the centroid of the laser is moved near the center of the detector, no matter the laser is a uniform light spot or a Gaussian light spot, the actual position of the light spot is in a linear relation with the calculation value of the four-quadrant detector, the light spot position (delta X, delta Y) is irrelevant to the absolute magnitude of the output current of the detector, the actual position of the light spot can be calculated as long as the output electric signal of the detector is measured, and then the deviation of a laser emission shaft relative to the center of the detector is calculated, and the following formula is adopted:
Figure FDA0003421688220000033
Figure FDA0003421688220000034
according to the position relation of two points in the rectangular coordinate system, calculating the angle deviation value between the optical axis of the spectrum adjustable light source and the center of the detector as follows:
Figure FDA0003421688220000035
Figure FDA0003421688220000036
wherein f is the focal length of the off-axis parabolic mirror;
the main control management unit calculates (theta)x、θy) Sending an instruction to an auto-collimation adjusting mechanism of the multiband photoelectric detection assembly, adjusting the position of the four-quadrant detector until the light spot positions (delta X and delta Y) are superposed with the centers (0 and 0) of the detectors, and completing the consistency calibration of the optical axis of the spectrum adjustable light source, the optical system and the optical axis of the corresponding four-quadrant detector;
adjusting the wavelength of the spectrum adjustable light source, and adjusting all four-quadrant detector optical axes, adjustable light source optical axes and optical systems in the multiband photoelectric detection assembly to be consistent according to the calibration method;
step two: fixing the tested equipment on the optical platform, turning on visible light of a mixed light source of the tested equipment, rotating a four-quadrant detector corresponding to the visible light in the multiband photoelectric detection assembly to a focal plane of the off-axis parabolic mirror, displaying the angle deviation between the position of a visible light spot and the central axis of the four-quadrant detector on a display and control unit screen, adjusting the posture of the visible light source through the self-adjusting function of the tested equipment, enabling the light spot to coincide with the center of the detector, and completing the detection of the parallelism of the visible light axis;
step three: the infrared light of the mixed light source of the tested device is turned on, the four-quadrant detector corresponding to the infrared light in the multiband photoelectric detection assembly rotates to the focal plane of the off-axis parabolic mirror, the angular deviation between the position of an infrared light spot and the central axis of the four-quadrant detector can be displayed on the screen of the display and control unit, the posture of the infrared light source is adjusted through the self-adjusting function of the tested device, the light spot is overlapped with the center of the detector, and the detection of the parallelism of the infrared optical axis is completed.
10. The method for detecting the parallelism of visible and infrared multi-optical axes according to claim 9, wherein the method comprises the steps of adopting a principle that parallel light is incident on the off-axis parabolic mirror and light beams are converged on a focal plane of the parabolic mirror, adopting a system-level calibration method, using the off-axis parabolic mirror and the plane reflector to calibrate the optical axes of the spectrally-tunable light source and the detector to be consistent, and finally completing the calibration of the parallelism of the multi-beam multi-band optical axes by sequentially detecting the parallelism of different light beams and calibration light beams.
11. The method of claim 9, wherein the spectrally tunable light source is a full-band light source, and the wavelength of the outgoing laser is continuously tunable by electrically switching the filter elements to cover all bands from visible to infrared.
CN202111564583.7A 2021-12-20 2021-12-20 Visible and infrared multi-optical-axis parallelism detection device and method Pending CN114234857A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111564583.7A CN114234857A (en) 2021-12-20 2021-12-20 Visible and infrared multi-optical-axis parallelism detection device and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111564583.7A CN114234857A (en) 2021-12-20 2021-12-20 Visible and infrared multi-optical-axis parallelism detection device and method

Publications (1)

Publication Number Publication Date
CN114234857A true CN114234857A (en) 2022-03-25

Family

ID=80759516

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202111564583.7A Pending CN114234857A (en) 2021-12-20 2021-12-20 Visible and infrared multi-optical-axis parallelism detection device and method

Country Status (1)

Country Link
CN (1) CN114234857A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114994860A (en) * 2022-07-19 2022-09-02 北京易兴元石化科技有限公司 But angle regulation's interference reflector mobile device

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105444700A (en) * 2015-12-25 2016-03-30 中国科学院光电研究院 Multi-wavelength multi-optical axis parallelism detection device and detection method
WO2017041335A1 (en) * 2015-09-07 2017-03-16 南京华图信息技术有限公司 Device and method for collaborative moving target detection with imaging and spectrogram detection in full optical waveband
CN106767543A (en) * 2016-12-29 2017-05-31 西安理工大学 A kind of hot spot alignment methods based on 4 quadrant detector
CN108050933A (en) * 2017-12-18 2018-05-18 中国科学院西安光学精密机械研究所 Prism of corner cube retroeflection hot spot positioning accuracy detection device and method
CN109374261A (en) * 2018-11-22 2019-02-22 中国航空工业集团公司洛阳电光设备研究所 A kind of multi-light axis consistency detection device and method based on target switching
CN209895098U (en) * 2019-05-14 2020-01-03 北京东方锐镭科技有限公司 Light source switching multiplexing unit coaxiality debugging system
CN112985775A (en) * 2021-02-08 2021-06-18 西安应用光学研究所 Light spot tracker optical axis calibrating device based on accurate angle measurement
CN113804651A (en) * 2021-09-17 2021-12-17 南京森林警察学院 Lens refractive index measuring device and method based on multi-wavelength astigmatic probe

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017041335A1 (en) * 2015-09-07 2017-03-16 南京华图信息技术有限公司 Device and method for collaborative moving target detection with imaging and spectrogram detection in full optical waveband
CN105444700A (en) * 2015-12-25 2016-03-30 中国科学院光电研究院 Multi-wavelength multi-optical axis parallelism detection device and detection method
CN106767543A (en) * 2016-12-29 2017-05-31 西安理工大学 A kind of hot spot alignment methods based on 4 quadrant detector
CN108050933A (en) * 2017-12-18 2018-05-18 中国科学院西安光学精密机械研究所 Prism of corner cube retroeflection hot spot positioning accuracy detection device and method
CN109374261A (en) * 2018-11-22 2019-02-22 中国航空工业集团公司洛阳电光设备研究所 A kind of multi-light axis consistency detection device and method based on target switching
CN209895098U (en) * 2019-05-14 2020-01-03 北京东方锐镭科技有限公司 Light source switching multiplexing unit coaxiality debugging system
CN112985775A (en) * 2021-02-08 2021-06-18 西安应用光学研究所 Light spot tracker optical axis calibrating device based on accurate angle measurement
CN113804651A (en) * 2021-09-17 2021-12-17 南京森林警察学院 Lens refractive index measuring device and method based on multi-wavelength astigmatic probe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114994860A (en) * 2022-07-19 2022-09-02 北京易兴元石化科技有限公司 But angle regulation's interference reflector mobile device

Similar Documents

Publication Publication Date Title
US7701592B2 (en) Method and apparatus for combining a targetless optical measurement function and optical projection of information
CN108759862B (en) Multi-optical axis automatic calibration system and method
US4141652A (en) Sensor system for detecting wavefront distortion in a return beam of light
CN103913227B (en) Based on Infrared Imaging Spectrometer and the method for making of light-duty beam splitter
CN111055030A (en) Device and method for monitoring and feeding back light beam pointing stability
CN101813520B (en) Two-dimensional spectrum measuring device
CN110186653B (en) Optical axis consistency calibration and split image fixed focus adjustment device and method for non-imaging system
CN108387175B (en) Coordinate measuring device
CN110118959A (en) The photoelectric sensor and method of object in detection monitoring region
CN112284302B (en) Device and method for measuring laser receiving and transmitting coaxiality of active photoelectric system by scanning method
US20210372920A1 (en) Handheld non-contact multispectral measurement device with position correction
CN116429375B (en) Photoelectric axis pointing consistency calibration method
US11598874B2 (en) Surveying instrument and surveying instrument system
US20230133662A1 (en) Method for calibrating one or more optical sensors of a laser machining head, laser machining head, and laser machining system
CN114234857A (en) Visible and infrared multi-optical-axis parallelism detection device and method
CN212470240U (en) Light beam pointing stability monitoring and feedback device
CN201780164U (en) Two-dimensional spectrum measuring device
CN111693257B (en) Array collimation laser parameter detection device
CN108351250B (en) Automated delay line alignment
CN112665532A (en) High-precision laser warning device based on four-quadrant detector and two-dimensional grating
CN115031841B (en) Optical measurement equipment, installation method and application method
CN115031840A (en) Measuring equipment, installation method and application method
CN115014526A (en) Multichannel optical measurement equipment, installation method and application method
Zatta et al. CMOS camera-type THz compact antenna test range for far-field radiation pattern analysis
CN204228607U (en) The automatic locating calibration device of a kind of infrared modulation photoluminescence two-dimensional imaging light path

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20220325