CN114167550A - One-input multi-output multi-core optical fiber optical switch and design method thereof - Google Patents

One-input multi-output multi-core optical fiber optical switch and design method thereof Download PDF

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Publication number
CN114167550A
CN114167550A CN202111505774.6A CN202111505774A CN114167550A CN 114167550 A CN114167550 A CN 114167550A CN 202111505774 A CN202111505774 A CN 202111505774A CN 114167550 A CN114167550 A CN 114167550A
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array
core
spatial light
micro
optical fiber
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刘子晨
江风
邱英
尤全
陶金
肖希
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Wuhan Research Institute of Posts and Telecommunications Co Ltd
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Wuhan Research Institute of Posts and Telecommunications Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/351Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/27Optical coupling means with polarisation selective and adjusting means
    • G02B6/2753Optical coupling means with polarisation selective and adjusting means characterised by their function or use, i.e. of the complete device
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/351Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3524Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being refractive
    • G02B6/3526Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being refractive the optical element being a lens
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/354Switching arrangements, i.e. number of input/output ports and interconnection types
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Liquid Crystal (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

The application relates to a one-input multi-output multi-core optical fiber optical switch and a design method thereof, wherein a multi-core optical fiber array comprises a plurality of multi-core optical fibers which are arranged in an array, wherein one multi-core optical fiber is used for outputting a light beam; the micro lens array comprises a plurality of small lenses which are arranged in an array, the small lenses correspond to the multi-core optical fibers one by one, and the micro lens array is used for converting light beams output by the multi-core optical fiber array into space light and collimating the space light; the large lens is used for converging the space light output by the micro lens array; the spatial light phase modulator is used for receiving the spatial light converged by the large lens, performing switching and beam shaping processing on the received spatial light, and returning the processed spatial light to different multi-core fibers of the multi-core fiber array. The multi-core optical fiber switch has more channels on the premise of keeping the volume of the optical fiber unchanged, can realize higher integration level under the condition of basically same cost, and improves space benefit and cost benefit.

Description

One-input multi-output multi-core optical fiber optical switch and design method thereof
Technical Field
The application relates to the technical field of optical communication, in particular to a one-input and multi-output multi-core optical fiber optical switch and a design method thereof.
Background
Currently, the capacity of optical transmission systems is rapidly approaching the theoretical capacity limit of conventional single mode optical fibers.
In order to meet the increasing service demand, the related art proposes a novel optical fiber structure based on a Space Division Multiplexing (SDM) technology, such as a multi-core fiber MCF, and a novel optical node technology supporting the SDM fiber is also extensively studied. Such optical node technologies include joint switching of spatial super-channels and subsystem modules — wavelength cross-connects (WXCs). However, it should be noted that in the optical node technology proposed in the related art, all the traffic entering the node is still processed in the fine-grained spectrum domain, and the problem of approaching the theoretical capacity limit still exists.
The multi-core fiber technology also requires a large number of optical switches for signal routing. The traditional single-mode optical switch is connected with a multi-core optical fiber, and the problems of interface conversion and complex volume exist. The market is eager for functional devices that can directly utilize multi-core fibers for optical switching.
Disclosure of Invention
The embodiment of the application provides a multi-core optical fiber switch with one input and multiple outputs and a design method thereof, more channels are provided on the premise that the volume of an optical fiber is not changed, and under the condition that the cost is basically the same, higher integration level can be realized, and the space benefit and the cost benefit are improved.
In a first aspect, a one-input-multiple-output multi-core optical fiber switch is provided, which includes:
the optical fiber array comprises a plurality of multi-core optical fibers arranged in an array, wherein one multi-core optical fiber is used for outputting a light beam;
the micro lens array comprises a plurality of small lenses which are arranged in an array, the small lenses correspond to the multi-core optical fibers one by one, and the micro lens array is used for converting light beams output by the multi-core optical fiber array into space light and collimating the space light;
a large lens for condensing the spatial light output through the micro lens array;
and the spatial light phase modulator is used for receiving the spatial light converged by the large lens, performing switching and beam shaping processing on the received spatial light, and returning the processed spatial light to different multi-core fibers of the multi-core fiber array.
In some embodiments, the spatial optical phase modulator employs a micro-electromechanical system mirror; or,
the spatial light phase modulator adopts a silicon-based liquid crystal spatial light modulator, the multi-core optical fiber switch further comprises a polarization conversion unit, and the polarization conversion unit is used for converting the spatial light output by the micro-lens array into single-polarization spatial light and sending the single-polarization spatial light to the large lens.
In some embodiments, the multi-core fiber optic switch further comprises a controller;
when the space optical phase modulator adopts a micro-electro-mechanical system reflector, the controller is connected with the micro-electro-mechanical system reflector and is used for controlling the angle of a micro-reflector of the micro-electro-mechanical system reflector;
when the spatial light phase modulator adopts a liquid crystal on silicon spatial light modulator, the controller is connected with the liquid crystal on silicon spatial light modulator and is used for controlling the Liquid Crystal On Silicon (LCOS) gray scale of the liquid crystal on silicon spatial light modulator.
In some embodiments, a central multicore fiber is used for the output beam in the multicore fiber array.
In some embodiments, the multicore fiber array and the microlens array are each in a square array, a circular array, a regular hexagonal array, or a regular octagonal array.
In a second aspect, a method for designing a multi-core optical fiber switch with one input and multiple outputs is provided, which includes the following steps:
providing a multi-core optical fiber array and a micro-lens array, wherein the multi-core optical fiber array comprises a plurality of multi-core optical fibers arranged in an array, one of the multi-core optical fibers outputs a light beam, the micro-lens array comprises a plurality of small lenses arranged in an array, and the small lenses correspond to the multi-core optical fibers one to one;
converting the light beams output by the multi-core fiber array into space light by using the micro-lens array, and collimating the space light;
converging the space light output by the micro lens array by using a large lens;
and receiving the space light converged by the large lens by using a space light phase modulator, switching and shaping the received space light, and returning the processed space light to different multi-core fibers of the multi-core fiber array.
In some embodiments, the spatial optical phase modulator employs a micro-electromechanical system mirror; or,
the spatial light phase modulator adopts a silicon-based liquid crystal spatial light modulator, and the design method further comprises the following steps: and converting the spatial light output by the micro lens array into spatial light with single polarization by using a polarization conversion unit, and sending the spatial light with single polarization to the large lens.
In some embodiments, the design method further comprises:
when the space optical phase modulator adopts a micro-electromechanical system reflector, controlling the angle of a micro-reflector of the micro-electromechanical system reflector;
and when the spatial light phase modulator adopts a silicon-based liquid crystal spatial light modulator, controlling the silicon-based liquid crystal LCOS gray scale of the silicon-based liquid crystal spatial light modulator.
In some embodiments, in the multi-core fiber array, a multi-core fiber located in the middle outputs a light beam.
In some embodiments, the multicore fiber array and the microlens array are each in a square array, a circular array, a regular hexagonal array, or a regular octagonal array.
The beneficial effect that technical scheme that this application provided brought includes:
the one-input-multiple-output multi-core optical fiber switch and the design method thereof have more channels on the premise of keeping the volume of the optical fiber unchanged, can realize higher integration level under the condition of basically same cost, and improve space benefit and cost benefit.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic diagram of a one-input-multiple-output multi-core optical fiber switch according to an embodiment of the present application.
In the figure: 1. a multi-core fiber array; 10. a multi-core optical fiber; 2. a microlens array; 20. a lenslet; 3. a large lens; 4. a spatial optical phase modulator.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Referring to fig. 1, an embodiment of the present application provides a one-input-multiple-output multi-core fiber optical switch, which includes a multi-core fiber array 1, a micro-lens array 2, a large lens 3, and a spatial optical phase modulator 4.
The multi-core fiber array 1 includes a plurality of multi-core fibers 10 arranged in an array, the array may be a square array, a circular array, a regular hexagonal array, a regular octagonal array, or an array of other shapes, only the array formed by symmetrical arrangement is needed, and the multi-core fibers 10 may be arranged in an equidistant manner.
In all the multi-core fibers 10 of the multi-core fiber array 1, one multi-core fiber 10 is used for outputting light beams, and in order to ensure that the spatial light modulated by the spatial light phase modulator 4 can smoothly enter the corresponding multi-core fiber 10, the multi-core fiber 10 located in the middle is used for outputting light beams, for example, in fig. 1, the multi-core fiber array 1 has 9 multi-core fibers 10 and is arranged in a 3 × 3 manner, wherein the second row and the second column of the multi-core fibers 10 are used for outputting light beams.
The micro lens array 2 comprises a plurality of small lenses 20 arranged in an array, the small lenses 20 correspond to the multi-core optical fibers 10 one by one, the array form of the micro lens array 2 is the same as that of the multi-core optical fiber array 1, and the micro lens array 2 is used for converting light beams output by the multi-core optical fiber array 1 into space light and collimating the space light.
The large lens 3 is used to condense the spatial light output through the microlens array 2.
The spatial light phase modulator 4 is configured to receive the spatial light collected by the large lens 3, perform switching and beam shaping processing on the received spatial light, and return the processed spatial light to different multi-core fibers 10 of the multi-core fiber array 1.
There are many options for the spatial optical phase modulator 4, for example, the spatial optical phase modulator 4 may be a mems mirror.
For another example, the spatial light phase modulator 4 may adopt a liquid crystal on silicon spatial light modulator, and when the liquid crystal on silicon spatial light modulator is adopted, a polarization conversion unit needs to be used in cooperation, the spatial light output by the microlens array 2 is converted into spatial light with single polarization by using the polarization conversion unit, and the spatial light with single polarization is sent to the large lens 3.
Further, the multi-core optical fiber switch further comprises a controller.
When the spatial light phase modulator 4 employs a mems mirror, the controller is connected to the mems mirror and is configured to control an angle of a micromirror of the mems mirror.
When the spatial light phase modulator 4 adopts a liquid crystal on silicon spatial light modulator, the controller is connected with the liquid crystal on silicon spatial light modulator and is used for controlling the liquid crystal on silicon LCOS gray scale of the liquid crystal on silicon spatial light modulator.
Referring to fig. 1, the working process of the one-input-multiple-output multi-core fiber optical switch in this embodiment is as follows: one multi-core fiber 10 of the multi-core fiber array 1 outputs a light beam, the light beam is converted into space light after passing through the micro lens array 2 and is collimated, and then is converged by the large lens 3, the size of the formed light spot is just matched with the chip of the space light phase modulator 4, namely if the space light phase modulator 4 adopts a micro electromechanical system reflector, the light spot is matched with the size of a micro reflector of the micro electromechanical system reflector, and if the space light phase modulator 4 adopts a silicon-based liquid crystal space light modulator, the light spot is matched with the effective area size of the silicon-based liquid crystal space light modulator for controlling the deflection of the light spot. The angle of a micro-mirror of a micro-electro-mechanical system reflector is controlled or the LCOS gray scale of the LCOS spatial light modulator is controlled, so that the spatial light is reflected back to the large lens 3 and the micro-lens array 2 and finally enters different multi-core fibers 10 of the multi-core fiber array 1.
The multi-core optical fiber switch with one input and multiple outputs has more channels on the premise that the volume of the optical fiber is not changed, can achieve higher integration level under the condition that the cost is basically the same, and improves space benefit and cost benefit.
Referring to fig. 1, an embodiment of the present application further provides a design method of a one-input-multiple-output multi-core optical fiber switch, where the design method includes the following steps:
101: providing a multi-core fiber array 1 and a micro-lens array 2, wherein the multi-core fiber array 1 comprises a plurality of multi-core fibers 10 arranged in an array, the array can adopt a square array, a circular array, a regular hexagonal array or a regular octagonal array, or other arrays, may be formed only by symmetrical arrangement, the multi-core fibers 10 may be arranged in an equidistant manner, and in all the multi-core fibers 10 of the multi-core fiber array 1, one of the multi-core fibers 10 outputs a light beam, in order to ensure that the spatial light modulated by the spatial light phase modulator 4 can smoothly enter the corresponding multi-core fiber 10, the multi-core fiber 10 located in the middle is used for outputting light beams, for example, the multi-core fiber array 1 in fig. 1 has 9 multi-core fibers 10, and are arranged in a 3 x 3 arrangement in which a second row and a second column of multi-core fibers 10 are used to output the light beams.
The micro lens array 2 comprises a plurality of small lenses 20 arranged in an array, the small lenses 20 correspond to the multi-core optical fibers 10 one by one, and the array form of the micro lens array 2 is the same as that of the multi-core optical fiber array 1.
102: the light beams output from the multi-core fiber array 1 are converted into spatial light by the microlens array 2 and collimated.
103: the spatial light output through the microlens array 2 is condensed by the large lens 3.
104: the spatial light collected by the large lens 3 is received by the spatial light phase modulator 4, the received spatial light is switched and subjected to beam shaping, and the processed spatial light is returned to different multi-core fibers 10 of the multi-core fiber array 1.
Further, the spatial optical phase modulator 4 has many options, for example, the spatial optical phase modulator 4 uses a mirror of a micro electro mechanical system.
For another example, the spatial light phase modulator 4 adopts a liquid crystal on silicon spatial light modulator, and when the liquid crystal on silicon spatial light modulator is adopted, the design method further includes: the spatial light output from the microlens array 2 is converted into spatial light of a single polarization by a polarization conversion unit, and the spatial light of the single polarization is sent to the large lens 3.
Further, the design method further comprises:
when the spatial light phase modulator 4 adopts a micro-electromechanical system reflector, controlling the angle of a micro-reflector of the micro-electromechanical system reflector;
when the spatial light phase modulator 4 adopts the liquid crystal on silicon spatial light modulator, the liquid crystal on silicon LCOS gray scale of the liquid crystal on silicon spatial light modulator is controlled.
The design method of the one-input-multiple-output multi-core optical fiber optical switch has more channels on the premise that the volume of the optical fiber is not changed, can realize higher integration level under the condition that the cost is basically the same, and improves the space benefit and the cost benefit.
In the description of the present application, it should be noted that the terms "upper", "lower", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are only for convenience in describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and operate, and thus, should not be construed as limiting the present application. Unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are intended to be inclusive and mean, for example, that they may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
It is noted that, in the present application, relational terms such as "first" and "second", and the like, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The above description is merely exemplary of the present application and is presented to enable those skilled in the art to understand and practice the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (10)

1. A one-input-multiple-output multi-core optical fiber switch is characterized by comprising:
the optical fiber array comprises a multi-core optical fiber array (1) and a plurality of optical fibers (10), wherein the multi-core optical fibers (10) are arranged in an array, and one optical fiber is used for outputting a light beam;
the micro-lens array (2) comprises a plurality of small lenses (20) which are arranged in an array, the small lenses (20) correspond to the multi-core optical fibers (10) one by one, and the micro-lens array (2) is used for converting light beams output by the multi-core optical fiber array (1) into space light and collimating the space light;
a large lens (3) for condensing the spatial light output through the microlens array (2);
and the spatial light phase modulator (4) is used for receiving the spatial light converged by the large lens (3), performing switching and beam shaping processing on the received spatial light, and returning the processed spatial light to different multi-core fibers (10) of the multi-core fiber array (1).
2. The one-in-multiple-out multi-core fiber optic switch of claim 1, wherein:
the space optical phase modulator (4) adopts a micro-electro-mechanical system reflector; or,
the space light phase modulator (4) adopts a silicon-based liquid crystal space light modulator, the multi-core optical fiber switch further comprises a polarization conversion unit, and the polarization conversion unit is used for converting the space light output by the micro lens array (2) into single-polarization space light and sending the single-polarization space light to the large lens (3).
3. The one-in-multiple-out multi-core fiber optic switch of claim 2, wherein:
the multi-core optical fiber switch further comprises a controller;
when the space optical phase modulator (4) adopts a micro-electro-mechanical system reflector, the controller is connected with the micro-electro-mechanical system reflector and is used for controlling the angle of a micro-reflector of the micro-electro-mechanical system reflector;
when the spatial light phase modulator (4) adopts a silicon-based liquid crystal spatial light modulator, the controller is connected with the silicon-based liquid crystal spatial light modulator and is used for controlling the silicon-based liquid crystal LCOS gray scale of the silicon-based liquid crystal spatial light modulator.
4. The one-in-multiple-out multi-core fiber optic switch of claim 1, wherein: in the multi-core fiber array (1), a multi-core fiber (10) positioned in the middle is used for outputting light beams.
5. The one-in-multiple-out multi-core fiber optic switch of claim 1, wherein: the multi-core optical fiber array (1) and the micro-lens array (2) are square arrays, circular arrays, regular hexagonal arrays or regular octagonal arrays.
6. A design method of a one-input multi-output multi-core optical fiber switch is characterized by comprising the following steps:
providing a multi-core optical fiber array (1) and a micro-lens array (2), wherein the multi-core optical fiber array (1) comprises a plurality of multi-core optical fibers (10) which are arranged in an array, one of the multi-core optical fibers (10) outputs a light beam, the micro-lens array (2) comprises a plurality of small lenses (20) which are arranged in an array, and the small lenses (20) correspond to the multi-core optical fibers (10) in a one-to-one manner;
converting the light beams output by the multi-core optical fiber array (1) into space light by using the micro lens array (2), and collimating;
converging the spatial light output by the micro lens array (2) by using a large lens (3);
and receiving the space light converged by the large lens (3) by using a space light phase modulator (4), carrying out switching and beam shaping processing on the received space light, and returning the processed space light to different multi-core fibers (10) of the multi-core fiber array (1).
7. The design method of the one-in-multiple-out multi-core optical fiber switch of claim 6, wherein:
the space optical phase modulator (4) adopts a micro-electro-mechanical system reflector; or,
the spatial light phase modulator (4) adopts a silicon-based liquid crystal spatial light modulator, and the design method further comprises the following steps: and converting the spatial light output by the micro lens array (2) into spatial light with single polarization by using a polarization conversion unit, and sending the spatial light with the single polarization to the large lens (3).
8. The method of designing an in-out multicore fiber optical switch of claim 7, further comprising:
when the space optical phase modulator (4) adopts a micro-electromechanical system reflector, controlling the angle of a micro-reflector of the micro-electromechanical system reflector;
and when the spatial light phase modulator (4) adopts a silicon-based liquid crystal spatial light modulator, controlling the silicon-based liquid crystal LCOS gray scale of the silicon-based liquid crystal spatial light modulator.
9. The design method of the one-in-multiple-out multi-core optical fiber switch of claim 6, wherein: in the multi-core fiber array (1), the multi-core fiber (10) positioned in the middle outputs light beams.
10. The design method of the one-in-multiple-out multi-core optical fiber switch of claim 6, wherein: the multi-core optical fiber array (1) and the micro-lens array (2) are square arrays, circular arrays, regular hexagonal arrays or regular octagonal arrays.
CN202111505774.6A 2021-12-10 2021-12-10 One-input multi-output multi-core optical fiber optical switch and design method thereof Pending CN114167550A (en)

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CN111562653A (en) * 2020-04-12 2020-08-21 桂林电子科技大学 Multicore fiber exchanger based on array MEMS reflector
CN111596412A (en) * 2020-04-12 2020-08-28 桂林电子科技大学 Multi-core optical fiber programmable multifunctional device based on array MEMS reflector

Cited By (2)

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CN116184653A (en) * 2023-04-24 2023-05-30 深圳市致尚科技股份有限公司 Micro-lens array MEMS optical switch based switching method, micro-lens array MEMS optical switch based switching equipment and medium
CN116184653B (en) * 2023-04-24 2023-06-30 深圳市致尚科技股份有限公司 Micro-lens array MEMS optical switch based switching method, micro-lens array MEMS optical switch based switching equipment and medium

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