CN114161482A - Dual-cycle constant-temperature humidity-control clean glove box system - Google Patents
Dual-cycle constant-temperature humidity-control clean glove box system Download PDFInfo
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- CN114161482A CN114161482A CN202111468710.3A CN202111468710A CN114161482A CN 114161482 A CN114161482 A CN 114161482A CN 202111468710 A CN202111468710 A CN 202111468710A CN 114161482 A CN114161482 A CN 114161482A
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- box body
- glove box
- temperature
- control
- humidity
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J21/00—Chambers provided with manipulation devices
- B25J21/02—Glove-boxes, i.e. chambers in which manipulations are performed by the human hands in gloves built into the chamber walls; Gloves therefor
Abstract
The invention provides a dual-circulation constant-temperature humidity-control clean glove box which comprises a base and a box body made of SUS304 stainless steel, wherein a laminar flow ventilation bedplate is arranged on an operating platform in the box body, double-layer laminated toughened glass is arranged on the front surface of the box body, the toughened glass is subjected to tapping treatment, rubber gloves are installed in a tapping hole, a large transition bin and a small transition bin are arranged on one side outside the box body, an internal circulation temperature control and hundred-level purification module is arranged at the top of the box body, and the internal circulation temperature control and hundred-level purification module is connected with an internal circulation pipeline at the bottom of the box body, so that the control of the temperature, the cleanliness and the laminar flow rate in the glove box can be realized; the system is provided with a multi-stage purification air source module which can supply clean air with controllable humidity for the glove box, and an external circulation interface which is externally connected with an air processing device; the glove box system comprises a temperature control instrument, a humidity control instrument, an organic matter total content detector and a laminar flow rate controller, and meanwhile, the box body is further provided with an illumination light source and a plurality of quick-release flange interfaces, so that the glove box system is convenient to use individually. The temperature, the humidity, the cleanliness and the like in the glove box are accurately controlled, so that the total content of organic matters in the working process of the box body is effectively reduced, and the uniformity and the controllability of the atmosphere of the glove box are improved; through system modular configuration, various personalized collocation can be provided, and the method has wide application scenes and extremely high operability.
Description
Technical Field
The invention relates to the field of environmental temperature and humidity isolation, organic matter isolation and cleanliness control equipment, in particular to a dual-cycle constant-temperature humidity-control clean glove box system.
Background
The existing scientific research and production workshop isolation environment is popularized by mainly adopting a solution of sealing a glove box in an inert atmosphere. Inert nitrogen or argon is used as a gas source, and a water removal device and a deoxidization device are matched to realize inertia of a closed space; as is well known, the technology entering the industrialization does not need too harsh preparation environment, the common ultra-clean room is the high-precision industrialization workshop which is popularized in a large range at present, and the high-power large-scale air purification equipment is adopted, so that huge cost is avoided, and a stable production environment can be created. However, for the development of the current semiconductor technology, the inert atmosphere glove box is difficult to satisfy the multiple requirements of the humidity, the temperature, the cleanliness, the total content of organic matters and the like of the closed system, and the ultra-clean room is expensive and difficult to maintain for a long time.
Although partial humidity control glove boxes have been developed, it is still difficult to achieve good control in the face of heavy workload; obviously, the current environmental system controls the equipment and is difficult to meet the requirements of modern research and pilot plant.
Disclosure of Invention
The invention provides a double-circulation constant-temperature humidity-control clean glove box system which can accurately control the humidity, the temperature, the cleanliness, the total content of organic matters and the like in a box body.
The technical scheme of the invention is as follows: a double-circulation constant-temperature humidity-control clean glove box comprises a base and a box body which are made of stainless steel, wherein a laminar flow ventilation bedplate is arranged on an operating platform in the box body, double-layer laminated toughened glass is arranged on the front surface of the box body, the toughened glass is subjected to tapping treatment, rubber gloves are installed in a tapping hole, a large transition bin and a small transition bin are arranged on one side of the box body, an internal circulation temperature control and hundred-level purification module is arranged at the top of the box body, and the internal circulation temperature control and hundred-level purification module is connected with an internal circulation pipeline at the bottom of the box body, so that the control of the temperature, the cleanliness and the laminar flow rate in the glove box can be realized; the system is provided with a multi-stage purification air source module which can supply clean air with controllable humidity for the glove box, and an external circulation exhaust interface which is externally connected with a tail gas treatment device; the glove box system comprises a temperature control instrument, a humidity control instrument, an organic matter total content detector and a laminar flow rate controller, and meanwhile, the box body is further provided with an illumination light source and a plurality of quick-release flange interfaces, so that the glove box system is convenient to use individually.
Preferably, the internal circulation temperature control and purification module is arranged above the box body and is arranged in a manner of temperature control, a fan and a purification device in a gradient manner.
Preferably, the multistage purification gas source module and the tail gas treatment device are respectively connected with the box body through pipelines so as to realize external circulation.
Preferably, the internal circulation temperature control and purification module is controlled by the heat exchange module, and the purification of the circulating gas in the box body is realized through the fan and the hundred-grade filtering device.
Preferably, the multi-stage purified gas source module is composed of an air compressor, a filter, a freeze dryer and a moisture absorber which are arranged in sequence, and all the components are commercially available.
Preferably, the exhaust port is externally connected with an active carbon filter element, so that periodic regeneration and recycling can be realized.
Preferably, the control instrument is arranged between the internal circulation temperature control and hundred-grade purification module and the box body and is fixed on the base; the lighting source is arranged on the upper edge of the toughened glass of the cavity, and the quick-release flange interfaces are arranged on the top and the back side of the box body.
Drawings
FIG. 1 is a front view of the present invention;
FIG. 2 is a left side view of the present invention;
FIG. 3 is a schematic view of a multi-stage purge gas source of the present invention;
FIG. 1, base; 2. a box body; 3. double-layer laminated toughened glass; 4. opening a hole; 5. a big transition bin and a small transition bin; 6. a temperature control and hundred-level purification module; 7. a multi-stage purified gas source; 8. an exhaust port; 9. a control instrument; 10. an illumination light source; 11. and a flange unloading connector 12 connected with an internal circulation pipeline.
Detailed Description
The technical solutions in the embodiments of the present invention will be fully described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the embodiments described are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example (b): referring to fig. 1, 2 and 3, a dual-cycle constant-temperature humidity-control clean glove box system comprises a base (1) and a box body (2) which are made of stainless steel, wherein a laminar flow ventilation bedplate is arranged on an operation table in the box body, double-layer laminated toughened glass (3) is arranged on the front surface of the box body, openings (4) are formed in the toughened glass and used for installing rubber gloves, a large transition bin (5) and a small transition bin are arranged on one side of the box body, an internal-cycle temperature-control and hundred-level purification module (6) is arranged at the top of the box body, and the internal-cycle temperature-control and hundred-level purification module is connected with an internal-cycle pipeline (12) at the bottom, so that the control of the temperature, the cleanliness and the laminar flow rate in the glove box can be realized; the system is provided with a multi-stage purification air source module (7) which can supply clean air with controllable humidity for the glove box, and an external circulation exhaust port (8) which is externally connected with a tail gas treatment device; the glove box system comprises a temperature control instrument, a humidity instrument, an organic matter total content instrument, a laminar flow rate instrument and other control instruments (9), and meanwhile, the box body is further provided with an illumination light source (10) and a plurality of quick-release flange interfaces (11).
Preferably, the internal circulation temperature control and purification module (6) is arranged above the box body and is arranged in a gradient manner by the temperature control, the fan and the purification device respectively.
Preferably, the multi-stage purification air source module (7) and the tail gas treatment device (8) are respectively connected with the box body through pipelines so as to realize external circulation.
Preferably, the internal circulation temperature control and purification module (6) is controlled by the heat exchange module, and the purification of the circulating gas in the box body is realized through the fan and the hundred-grade filtering device.
Preferably, the multi-stage purified gas source module (7) is composed of an air compressor, a filter, a freeze dryer and a moisture absorber which are arranged in sequence, and all the components are commercially available.
Preferably, the exhaust port is externally connected with an activated carbon filter element, so that periodic regeneration and recycling can be realized.
Preferably, the control instrument (9) is arranged between the internal circulation temperature control and hundred-grade purification module (6) and the box body (2) and is fixed on the base (1); the lighting source (10) is arranged on the upper edge of the cavity toughened glass (3), and the quick-release flange interfaces (11) are arranged on the top and the back side of the box body.
The base (1), the box body (2) and the porous bedplate are made of high-grade stainless steel (SUS304), are high-temperature resistant, corrosion resistant, easy to clean and difficult to raise dust, the outer surface of the base is subjected to spray plastic treatment and corrosion resistant and difficult to peel off, the temperature control and purification module (6) is adhered with a heat insulation film and a multi-stage internal circulation control panel, and main parameters such as humidity, temperature, total content of organic matters, cleanliness and the like in the box body can be read at any time; and water cooling circulation at-30 to +35 ℃ is carried out, and the temperature range of the box body is controlled to be 0-35 ℃. (ii) a The flow rate of the external circulation gas is controllable, the gas flow rate is 0-350 liters per minute, and the positive pressure type tail gas is discharged; the inner circulation pipeline adopts KF50 sealed bellows. The toughened glass (3) of the transition bin (5) is sealed by silica gel, and the flange plate is sealed by fluororubber. The height of the table top of the porous table can be automatically adjusted according to the cup. The lighting source (10) adopts an LED lamp tube light source, and a KF40 interface is arranged at the quick-release flange port.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the present invention, and any modifications, equivalents, improvements, etc. made within the spirit and scope of the present invention are included therein.
Claims (7)
1. A dual-cycle constant-temperature humidity-control clean glove box system comprises a base (1) and a box body (2) which are made of stainless steel, wherein a laminar flow ventilation bedplate is arranged on an operating platform in the box body, double-layer laminated toughened glass (3) is arranged on the front surface of the box body, the toughened glass is provided with an opening (4) for installing rubber gloves, a large transition bin (5) and a small transition bin (5) are arranged on one side of the box body, an internal-cycle temperature-control and hundred-level purification module (6) is arranged at the top of the box body, and the internal-cycle temperature-control and hundred-level purification module is connected with an internal-cycle pipeline (12) at the bottom of the box body, so that the control of the temperature, the cleanliness and the laminar flow rate in the glove box can be realized; the system is provided with a multi-stage purification air source module (7) which can supply clean air with controllable humidity for the glove box, and an external circulation exhaust interface (8) which is externally connected with a tail gas treatment device; the glove box system comprises a temperature control instrument, a humidity instrument, an organic matter total content instrument, a laminar flow rate instrument and other control instruments (9), and meanwhile, the box body is further provided with an illumination light source (10) and a plurality of quick-release flange interfaces (11).
2. The dual cycle constant temperature and humidity controlled clean glove box system according to claim 1, wherein: the internal circulation temperature control and purification module (6) is arranged above the box body (2) and is arranged side by side in a gradient manner by the temperature control, the fan and the purification device respectively.
3. The dual cycle constant temperature and humidity controlled clean glove box system according to claim 2, wherein: the multi-stage purification air source module (7) and the external circulation exhaust interface (8) are respectively connected with the box body through pipelines so as to realize external circulation.
4. The dual cycle constant temperature and humidity controlled clean glove box system according to claim 3, wherein: the internal circulation temperature control and purification module (6) is controlled by the heat exchange module, and the purification of the circulating gas in the box body is realized through the fan and the hundred-grade filter device.
5. The dual cycle constant temperature and humidity controlled clean glove box system according to claim 4, wherein: the multistage purification air source module (7) is formed by sequentially arranging an air compressor, a filter, a freeze dryer and a moisture absorber, and the components are commercially available parts.
6. The dual cycle constant temperature and humidity controlled clean glove box system according to claim 5, wherein: the exhaust port (8) is externally connected with an active carbon filter element, so that periodic regeneration and recycling can be realized.
7. The dual cycle constant temperature and humidity controlled clean glove box system according to claim 6, wherein: the control instrument (9) is arranged between the internal circulation temperature control and hundred-grade purification module (6) and the box body (2) and is fixed on the base (1); the lighting source (10) is arranged on the upper edge of the cavity toughened glass (3), and the quick-release flange interfaces (11) are arranged on the top and the back side of the box body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111468710.3A CN114161482A (en) | 2021-12-03 | 2021-12-03 | Dual-cycle constant-temperature humidity-control clean glove box system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111468710.3A CN114161482A (en) | 2021-12-03 | 2021-12-03 | Dual-cycle constant-temperature humidity-control clean glove box system |
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| Publication Number | Publication Date |
|---|---|
| CN114161482A true CN114161482A (en) | 2022-03-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111468710.3A Pending CN114161482A (en) | 2021-12-03 | 2021-12-03 | Dual-cycle constant-temperature humidity-control clean glove box system |
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| CN (1) | CN114161482A (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19510857A1 (en) * | 1995-03-17 | 1996-09-19 | Hertz Inst Heinrich | Glove box for clean-room operations, e.g. semiconductor mfr. |
| JP2013240850A (en) * | 2012-05-18 | 2013-12-05 | Manzen Koki Kk | Glove box having inert gas circulation refining apparatus |
| CN103545479A (en) * | 2013-08-02 | 2014-01-29 | 奇瑞汽车股份有限公司 | Glove box device |
| CN108342320A (en) * | 2018-04-24 | 2018-07-31 | 苏州汇艺空调科技有限公司 | A kind of cell culture one operation console of constant temperature and humidity hundred-level laminar flow cleanliness factor |
| US20180236672A1 (en) * | 2017-02-17 | 2018-08-23 | Huys Industries Limited | Controlled environment processing apparatus and method |
| CN110202616A (en) * | 2019-07-04 | 2019-09-06 | 成都德力斯实业有限公司 | Humid control seal box |
| CN210522533U (en) * | 2019-08-22 | 2020-05-15 | 常熟市威尔博电子设备有限公司 | Split type glove box testing device |
| CN210968971U (en) * | 2019-09-25 | 2020-07-10 | 南京牧科纳米科技有限公司 | Glove box for inert gas protection test |
| CN211615677U (en) * | 2019-11-26 | 2020-10-02 | 华锂（天津）机电装备技术有限公司 | Plasma dust collector that glove box was used |
| CN214193263U (en) * | 2020-12-11 | 2021-09-14 | 阿鲁科尔沁同济医院 | Medical biological safety cabinet |
-
2021
- 2021-12-03 CN CN202111468710.3A patent/CN114161482A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19510857A1 (en) * | 1995-03-17 | 1996-09-19 | Hertz Inst Heinrich | Glove box for clean-room operations, e.g. semiconductor mfr. |
| JP2013240850A (en) * | 2012-05-18 | 2013-12-05 | Manzen Koki Kk | Glove box having inert gas circulation refining apparatus |
| CN103545479A (en) * | 2013-08-02 | 2014-01-29 | 奇瑞汽车股份有限公司 | Glove box device |
| US20180236672A1 (en) * | 2017-02-17 | 2018-08-23 | Huys Industries Limited | Controlled environment processing apparatus and method |
| CN108342320A (en) * | 2018-04-24 | 2018-07-31 | 苏州汇艺空调科技有限公司 | A kind of cell culture one operation console of constant temperature and humidity hundred-level laminar flow cleanliness factor |
| CN110202616A (en) * | 2019-07-04 | 2019-09-06 | 成都德力斯实业有限公司 | Humid control seal box |
| CN210522533U (en) * | 2019-08-22 | 2020-05-15 | 常熟市威尔博电子设备有限公司 | Split type glove box testing device |
| CN210968971U (en) * | 2019-09-25 | 2020-07-10 | 南京牧科纳米科技有限公司 | Glove box for inert gas protection test |
| CN211615677U (en) * | 2019-11-26 | 2020-10-02 | 华锂（天津）机电装备技术有限公司 | Plasma dust collector that glove box was used |
| CN214193263U (en) * | 2020-12-11 | 2021-09-14 | 阿鲁科尔沁同济医院 | Medical biological safety cabinet |
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