CN114152672A - Flexible phased array electromagnetic ultrasonic detection probe, system and method - Google Patents

Flexible phased array electromagnetic ultrasonic detection probe, system and method Download PDF

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CN114152672A
CN114152672A CN202111467345.4A CN202111467345A CN114152672A CN 114152672 A CN114152672 A CN 114152672A CN 202111467345 A CN202111467345 A CN 202111467345A CN 114152672 A CN114152672 A CN 114152672A
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flexible
electromagnetic ultrasonic
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coil
magnetic field
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CN114152672B (en
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裴翠祥
邓洁
陈振茂
刘天浩
张远舸
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Xian Jiaotong University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/24Probes
    • G01N29/2412Probes using the magnetostrictive properties of the material to be examined, e.g. electromagnetic acoustic transducers [EMAT]
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/023Solids
    • G01N2291/0234Metals, e.g. steel

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Abstract

A flexible phased array electromagnetic ultrasonic detection probe, a system and a method are provided, wherein the system comprises a flexible phased array electromagnetic ultrasonic detection probe composed of a flexible bias magnetic field coil and a flexible array excitation receiving coil, a long pulse current source, a multi-channel electromagnetic ultrasonic signal transmitting and receiving module, a multi-channel time sequence control and signal acquisition module and a computer provided with control and signal acquisition processing software. The detection method comprises the steps that the flexible array electromagnetic ultrasonic detection probe is placed on the surface of a to-be-detected part, the multi-path time sequence control and signal acquisition module firstly triggers the long pulse current source to drive the bias magnetic field coil to generate a long pulse bias magnetic field, and when the magnetic field intensity is close to a peak value, the multi-channel electromagnetic ultrasonic signal transmitting and receiving module is sequentially triggered according to time sequence to drive the array excitation receiving coil to generate eddy current, so that the excitation and the receiving of the phased array electromagnetic ultrasonic are realized. The invention can be used for non-contact, high-sensitivity and rapid detection of rough or curved metal structures and the like, and greatly expands the application range of ultrasonic detection technology.

Description

Flexible phased array electromagnetic ultrasonic detection probe, system and method
Technical Field
The invention relates to the technical field of electromagnetic ultrasonic detection probes and system development, in particular to a flexible phased array electromagnetic ultrasonic detection probe, system and method.
Background
Ultrasonic detection is one of five conventional nondestructive detection methods, and is widely applied to safety monitoring and detection in important fields such as nuclear power, aerospace, energy and the like. The conventional piezoelectric ultrasonic detection technology has high requirements on the surface of a test piece, needs a liquid coupling agent in the detection process, and is not suitable for extreme environments such as high temperature, radiation, strong corrosion and the like. The electromagnetic ultrasonic detection technology has the advantages that a probe is not in contact with the surface of a test piece, a coupling agent is not needed in the detection process, various waveforms can be flexibly excited, the unique superiority of the electromagnetic ultrasonic detection technology is shown under special working conditions such as rough surface, high temperature and irradiation of the test piece, and the electromagnetic ultrasonic detection technology is an important research direction in the field of ultrasonic detection at present.
The traditional electromagnetic ultrasonic probe generally adopts a permanent magnet-coil structure or an electromagnet-coil structure, is rigid and large in volume, and is not suitable for the conditions of complex surface and narrow detection space, such as curved surfaces and the like. The electromagnetic ultrasonic probe adopting the double-coil structure is flexible as a whole and small in size, and has certain detection advantages under the condition that the surface of a test piece is complex. But because the energy conversion efficiency is low, the single-channel flexible electromagnetic ultrasonic probe has small excitation ultrasonic energy, poor detection sensitivity and low detection efficiency. The ultrasonic phased array detection technology is based on the acoustic wave interference principle, can enhance the acoustic wave energy of a specific area, improves the detection sensitivity, and has higher scanning speed, but the existing electromagnetic ultrasonic phased array system can only carry a rigid probe.
Disclosure of Invention
In order to solve the problems in the prior art, the invention aims to provide a flexible phased array electromagnetic ultrasonic detection probe, a system and a method, which can realize non-contact, high-sensitivity and rapid ultrasonic nondestructive detection of rough or curved metal structures under severe working conditions such as high temperature, irradiation and the like.
In order to achieve the above purpose, the invention adopts the following technical scheme:
a flexible phased array electromagnetic ultrasonic detection probe is composed of a flexible bias magnetic field coil 1 and a flexible array excitation receiving coil 2, wherein the flexible bias magnetic field coil 1 is a runway-shaped coil, the flexible array excitation receiving coil 2 is a coil set formed by sequentially arranging n small-size runway-shaped coils on the same plane, the flexible bias magnetic field coil 1 and the flexible array excitation receiving coil 2 are arranged in a mode of an upper layer and a lower layer, and the whole probe is flexible and can be suitable for detecting the surface shape of a to-be-detected part 7.
Preferably, the total length of the flexible array excitation and reception coil 2 is smaller than the width of the flexible bias magnetic field coil, and the array coil 2 is placed at the center of the flexible bias magnetic field coil 1, so that n coils in the flexible array excitation and reception coil 2 are all placed in the bias magnetic field during the ultrasonic excitation and reception process.
A flexible phased array electromagnetic ultrasonic detection system comprises a flexible bias magnetic field coil 1, a flexible array excitation receiving coil 2, a long pulse current source 3, a multi-channel electromagnetic ultrasonic signal transmitting and receiving module 4, a multi-channel time sequence control and signal acquisition module 5 and a computer 6 provided with control and signal acquisition processing software; the flexible bias magnetic field coil 1 is connected with a long pulse current source 3, each coil array element in the flexible array excitation receiving coil 2 is correspondingly connected with each channel of a multi-channel electromagnetic ultrasonic signal transmitting and receiving module 4, the other end of the long pulse current source 3 is connected with a multi-channel time sequence control and signal acquisition module 5, the other end of each channel of the multi-channel electromagnetic ultrasonic signal transmitting and receiving module 4 is connected with the multi-channel time sequence control and signal acquisition module 5, and the other end of the multi-channel time sequence control and signal acquisition module 5 is connected into a computer 6 provided with control and signal acquisition processing software.
The multi-channel time sequence control and signal acquisition module 5 is matched with a computer 6 provided with control and signal acquisition processing software together, and can control the trigger time sequence of each module of the system. Firstly triggering a long pulse current source 3 to introduce long pulse current into a flexible bias magnetic field coil 1 to generate a bias magnetic field, sequentially triggering a multi-channel electromagnetic ultrasonic signal transmitting and receiving module 4 to sequentially introduce short pulse current into corresponding n coils in a flexible array excitation receiving coil 2 according to a certain time sequence when the long pulse reaches a peak value and is in a stable stage, generating a plurality of eddy currents on the surface and near-surface areas of a to-be-tested piece 7, respectively vibrating mass points of the plurality of eddy current areas on the surface and near-surface of the to-be-tested piece under the action of the bias magnetic field, generating a plurality of ultrasonic waves with phase differences and carrying out interference superposition in a propagation process, increasing sound pressure and strengthening sound wave amplitude in a specific area, and realizing electromagnetic ultrasonic phased array excitation.
The acquisition triggering time of the multi-channel time sequence control and signal acquisition module 5 is the same as the triggering time of the first channel of the multi-channel electromagnetic ultrasonic signal transmitting and receiving module 4, when the long pulse reaches the peak value and is in a stable stage, the flexible array excites n coils in the receiving coil 2 to simultaneously and respectively receive ultrasonic waves, the ultrasonic waves are sent to n corresponding channels in the multi-channel electromagnetic ultrasonic signal transmitting and receiving module 4, then the ultrasonic waves enter the multi-channel time sequence control and signal acquisition module 5 to perform analog-to-digital conversion, and finally the multi-channel signals enter the computer 6 to perform post-processing such as time delay compensation and superposition.
A flexible phased array electromagnetic ultrasonic detection method comprises the following steps:
1) and (3) time sequence editing: triggering time sequences of n channels in the multi-channel electromagnetic ultrasonic signal transmitting and receiving module 4 are set based on the ultrasonic phased array focusing deflection rule, and the acoustic path difference deltas between each coil array element in the flexible array excitation receiving coil 2 and a target detection area is calculated according to the actual detection requirement of a test pieceiDividing by the sound velocity c of the material to be tested to calculate the delay time delta ti=ΔsiC; the triggering time of the long pulse current source 3 is earlier than that of the multi-channel electromagnetic ultrasonic signal transmitting and receiving module 4, and the pulse length is enough, so that the excitation and the receiving of n channels of the multi-channel electromagnetic ultrasonic signal transmitting and receiving module 4 are completed within the time period when the long pulse reaches the peak value and is stable; inputting the trigger sequence into the control software of the computer 6;
2) phased array excitation and reception: according to a set trigger time sequence, a computer 6 firstly triggers a long pulse current source 3 to introduce long pulse current into a flexible bias magnetic field coil 1 to generate a bias magnetic field, when the long pulse reaches a peak value and is in a stable stage, n channels of a multi-channel electromagnetic ultrasonic signal transmitting and receiving module 4 are sequentially triggered according to the set time sequence, short pulse current is sequentially introduced into corresponding n coils in a flexible array excitation receiving coil 2, and excitation and receiving of an electromagnetic ultrasonic phased array are completed;
3) signal processing and analysis: and a computer 6 provided with control and signal acquisition processing software is adopted to carry out averaging, filtering, delay compensation, superposition and other processing on the multi-channel signals, the amplitude of the defect signals is increased, and the positions of the defects of the test piece are calculated according to the sound velocity corresponding to the test piece to be tested and the time of the defect signals.
Compared with the prior art, the invention has the following advantages:
1) the flexible phased array electromagnetic ultrasonic detection probe is flexible, does not need a coupling agent, is not in contact with the surface of a test piece, can be widely applied to nondestructive detection of metal structures with rough surfaces and complex shapes under severe working conditions such as high temperature, irradiation and the like, and greatly expands the application range of ultrasonic detection technology.
2) The flexible phased array electromagnetic ultrasonic detection system can carry the flexible phased array electromagnetic ultrasonic probe to realize ultrasonic phased array excitation and reception, effectively overcomes the defects of low energy conversion efficiency and small excitation ultrasonic energy of the electromagnetic ultrasonic probe with a double-coil structure, and greatly improves the sensitivity and the detection efficiency of flexible electromagnetic ultrasonic detection.
Drawings
Fig. 1 is a schematic diagram of a flexible phased array electromagnetic ultrasonic detection probe and a system.
Fig. 2 is a schematic diagram of a flexible bias magnetic field coil and a flexible array excitation receive coil.
FIG. 3 is a schematic diagram of timing control and trigger signals.
Fig. 4 is a schematic diagram of flexible phased array electromagnetic ultrasonic excitation.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
The following detailed description is exemplary and is intended to provide further explanation of the invention as claimed. Unless otherwise indicated, the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of embodiments according to the present application. Exemplary embodiments according to the present application will now be described in more detail with reference to the accompanying drawings. These exemplary embodiments may, however, be embodied in many different forms and should not be construed as limited to only the embodiments set forth herein.
As shown in fig. 2, the present embodiment is a flexible phased array electromagnetic ultrasonic detection probe, which is composed of a flexible bias magnetic field coil 1 and a flexible array excitation receiving coil 2, wherein the flexible bias magnetic field coil 1 is a 50-turn racetrack-shaped coil tightly wound with an enameled wire with a diameter of 1mm, the coil is covered on a flexible thin film, each array element coil in the flexible array excitation receiving coil 2 is a 15-turn racetrack-shaped coil tightly wound with an enameled wire with a diameter of 0.1mm, n array elements are covered on the flexible thin film in a straight line arrangement, an array element gap is 2mm, an arrangement total length is smaller than a width of the flexible bias magnetic field coil, that is, n should satisfy 5n-2 and is less than or equal to 100. The flexible phased array electromagnetic ultrasonic detection probe is characterized in that the upper layer and the lower layer of the flexible bias magnetic field coil 1 and the flexible array excitation receiving coil 2 are fixed, the array coil 2 is placed in the center of the magnetic field coil 1 to form the flexible phased array electromagnetic ultrasonic detection probe and is placed near the surface of a to-be-detected piece, and the flexible array excitation receiving coil 2 is placed between the flexible bias magnetic field coil 1 and the to-be-detected piece.
As shown in fig. 1, the present embodiment is a flexible phased array electromagnetic ultrasonic detection system, which includes a flexible bias magnetic field coil 1, a flexible array excitation receiving coil 2, a long pulse current source 3, a multi-channel electromagnetic ultrasonic signal transmitting and receiving module 4, a multi-channel timing control and signal acquisition module 5, and a computer 6 equipped with control and signal acquisition processing software; the flexible bias magnetic field coil 1 is connected with a long pulse current source 3, each coil array element in the flexible array excitation receiving coil 2 is correspondingly connected with each channel of a multi-channel electromagnetic ultrasonic signal transmitting and receiving module 4, the other end of the long pulse current source 3 is connected with a multi-channel time sequence control and signal acquisition module 5, the other end of each channel of the multi-channel electromagnetic ultrasonic signal transmitting and receiving module 4 is connected with the multi-channel time sequence control and signal acquisition module 5, and the other end of the multi-channel time sequence control and signal acquisition module 5 is connected into a computer 6 provided with control and signal acquisition processing software.
As shown in fig. 3, the multi-channel timing control and signal acquisition module 5 cooperates with a computer 6 equipped with control and signal acquisition processing software to control the trigger timing of each module of the system. Firstly triggering a long pulse current source 3 to introduce a long pulse current 8 into a flexible bias magnetic field coil 1 to generate a bias magnetic field, when the long pulse reaches a peak value and is in a stable stage T, sequentially triggering a multi-channel electromagnetic ultrasonic signal transmitting and receiving module 4 to sequentially introduce short pulse currents 9 into corresponding n coils in a flexible array excitation receiving coil 2 according to a certain time sequence, generating a plurality of eddy currents on the surface and near surface areas of a to-be-tested piece 7, respectively vibrating mass points of the plurality of eddy current areas on the surface and near surface of the to-be-tested piece under the action of the bias magnetic field, generating a plurality of ultrasonic waves with phase differences and carrying out interference superposition in the transmission process, increasing the sound pressure of the sound wave amplitude of a specific area, and realizing electromagnetic ultrasonic phased array excitation.
The acquisition triggering time of the multi-channel time sequence control and signal acquisition module 5 is the same as the triggering time of the first channel of the multi-channel electromagnetic ultrasonic signal transmitting and receiving module 4, when the long pulse reaches the peak value and is in a stable stage, n coils in the flexible array excitation receiving coil 2 simultaneously and respectively receive the ultrasonic waves 10, the ultrasonic waves are sent to n corresponding channels in the multi-channel electromagnetic ultrasonic signal transmitting and receiving module 4, then the ultrasonic waves enter the multi-channel time sequence control and signal acquisition module 5 for analog-to-digital conversion, and finally the multi-channel signals enter the computer 6 for post-processing such as time delay compensation and superposition.
With reference to fig. 1, fig. 2, fig. 3 and fig. 4, the steps of the method for detecting the arched aluminum plate test piece by using the flexible phased array electromagnetic ultrasonic detection probe and the system are described as follows:
1) and (3) time sequence editing: the triggering time sequence of n channels in the multi-channel electromagnetic ultrasonic signal transmitting and receiving module 4 is set based on an ultrasonic phased array focusing deflection rule, for example, the sound wave energy is concentrated to detect the position x mm under the center of the array excitation receiving coil 2, the area can be taken as a focal point, and the sound path difference deltas between each coil array element in the flexible array excitation receiving coil 2 and the focal point is calculatediDividing by the sound velocity c of the material to be tested to calculate the delay time delta ti=ΔsiC; long pulse current source 3 long pulse current source ratio multi-channel electromagnetismThe triggering time of the ultrasonic signal transmitting and receiving module 4 is triggered 5 mus earlier, the pulse length is 10ms, the length of the short pulse current 9 is 1 mus, the total exciting and receiving time of n channels of the multi-channel electromagnetic ultrasonic signal transmitting and receiving module 4 is in microsecond level, and the triggering and receiving can be completed in a time period when the long pulse reaches the peak value and is stable; inputting the trigger sequence into the control software of the computer 6;
2) phased array excitation and reception: according to the set triggering time sequence, the computer 6 firstly triggers the long pulse current source 3 to introduce long pulse current 8 into the flexible bias magnetic field coil 1, generates a bias magnetic field 12 vertical to the surface of the test piece on the surface and near surface area of the arched aluminum plate test piece, firstly triggers the 1 channel and the n channel when the long pulse reaches the peak value and is in a stable stage T, and introduces short pulse current 9 into the 1 array element coil and the n array element coil to generate eddy current and delta T in the arched aluminum plate test piece1After time, triggering the 2 channel and the n-1 channel, and introducing the same current to the 2 array element coil and the n-1 array element coil to generate an eddy current, delta t, in the arched aluminum plate test piece2After time, triggering the 3 channel and the n-2 channel, introducing the same current to the 3 array element coil and the n-2 array element coil, and repeating the steps until all the array element coils are excited, wherein mass points in the surface and near surface array eddy current area of the aluminum plate test piece are acted by Lorentz force F under the action of a bias magnetic field to generate a plurality of ultrasonic transverse waves 13 with the propagation frequency of 1MHz vertical to the surface of the test piece, focusing is carried out at a position x mm away from the surface of the arched aluminum plate test piece, and the sound wave amplitude in the area is increased and the sound pressure is strengthened; the acquisition triggering time is the same as the excitation triggering time of the channel 1 and the channel n, n array element coils in the flexible array excitation receiving coil 2 simultaneously and respectively receive the signals 10 and send the signals to corresponding channels in the multi-channel electromagnetic ultrasonic signal transmitting and receiving module 4, and the multi-channel time sequence control and signal acquisition module 5 acquires and performs analog-to-digital conversion on the signals of the channel n and sends the signals to the computer 6 for signal processing and analysis;
3) signal processing and analysis: the computer 6 with control and signal acquisition processing software is adopted to carry out processing such as averaging, filtering, delay compensation and superposition on n channel signals, the amplitude of the defect signal is increased, the signal-to-noise ratio is improved, and the position d of the defect 11 of the test piece is calculated to be 0.5ct according to the sound velocity c of the aluminum plate test piece and the defect signal time t.

Claims (6)

1. The utility model provides a flexible phased array electromagnetic ultrasonic testing probe which characterized in that: the detection probe is composed of a flexible bias magnetic field coil (1) and a flexible array excitation receiving coil (2), the flexible bias magnetic field coil (1) is a runway-shaped coil, the flexible array excitation receiving coil (2) is a coil set formed by sequentially arranging n small-size runway-shaped coils on the same plane, the flexible bias magnetic field coil (1) and the flexible array excitation receiving coil (2) are arranged in a mode of an upper layer and a lower layer, and the whole probe is flexible and can be suitable for detecting the surface shape of a to-be-detected piece (7).
2. The flexible phased array electromagnetic ultrasonic inspection probe of claim 1, wherein: the total length of the flexible array excitation receiving coils (2) is smaller than the width of the flexible bias magnetic field coil, and the array coils (2) are placed in the center of the flexible bias magnetic field coil (1).
3. The utility model provides a flexible phased array electromagnetism ultrasonic testing system which characterized in that: the system comprises the flexible phased array electromagnetic ultrasonic detection probe of claim 1 or 2, a long pulse current source (3), a multi-channel electromagnetic ultrasonic signal transmitting and receiving module (4), a multi-channel time sequence control and signal acquisition module (5) and a computer (6) provided with control and signal acquisition processing software; the flexible bias magnetic field coil (1) of the flexible phased array electromagnetic ultrasonic detection probe is connected with the long pulse current source (3), each coil array element in the flexible array excitation receiving coil (2) of the flexible phased array electromagnetic ultrasonic detection probe is connected with each channel of the multichannel electromagnetic ultrasonic signal transmitting and receiving module (4) in a one-to-one correspondence mode, the other end of the long pulse current source (3) is connected with the multichannel time sequence control and signal acquisition module (5), the other end of each channel of the multichannel electromagnetic ultrasonic signal transmitting and receiving module (4) is connected with the multichannel time sequence control and signal acquisition module (5), and the other end of the multichannel time sequence control and signal acquisition module (5) is connected into the computer (6) with control and signal acquisition processing software.
4. The flexible phased array electromagnetic ultrasound inspection system of claim 3, wherein: the multi-channel time sequence control and signal acquisition module (5) is matched with a computer (6) provided with control and signal acquisition processing software together to control the trigger time sequence of each module of the system; the method comprises the steps of firstly triggering a long pulse current source (3) to introduce long pulse current into a flexible bias magnetic field coil (1) to generate a bias magnetic field, sequentially triggering a multi-channel electromagnetic ultrasonic signal transmitting and receiving module (4) to sequentially introduce short pulse current into corresponding n coils in a flexible array excitation receiving coil (2) according to a certain time sequence when the long pulse reaches a peak value and is in a stable stage, generating a plurality of eddy currents on the surface and near surface regions of a to-be-tested piece (7), vibrating mass points of the plurality of eddy current regions on the surface and near surface of the to-be-tested piece respectively under the action of the bias magnetic field to generate a plurality of ultrasonic waves with phase differences and generate interference superposition in the transmission process, increasing sound pressure and strengthening sound wave amplitude in a specific region, and realizing electromagnetic ultrasonic phased array excitation.
5. The flexible phased array electromagnetic ultrasound inspection system of claim 3, wherein: the acquisition triggering time of the multi-channel time sequence control and signal acquisition module (5) is the same as the triggering time of the first channel of the multi-channel electromagnetic ultrasonic signal transmitting and receiving module (4), when the long pulse reaches a peak value and is stable, n coils in the flexible array excitation receiving coil (2) simultaneously receive ultrasonic waves respectively, the ultrasonic waves are sent to n corresponding channels in the multi-channel electromagnetic ultrasonic signal transmitting and receiving module (4), then the ultrasonic waves enter the multi-channel time sequence control and signal acquisition module (5) for analog-to-digital conversion, and finally the multi-channel signals enter the computer (6) for time delay compensation and post-superposition processing.
6. The inspection method of the flexible phased array electromagnetic ultrasonic inspection system of any one of claims 3 to 5, wherein:
1) and (3) time sequence editing: the triggering time sequences of n channels in the multi-channel electromagnetic ultrasonic signal transmitting and receiving module (4) are set based on the ultrasonic phased array focusing deflection rule according to the actual test of the test pieceMeasuring requirements, calculating the acoustic path difference delta s between each coil array element in the flexible array excitation receiving coil (2) and a target detection areaiDividing by the sound velocity c of the material to be tested to calculate the delay time delta ti=ΔsiC; the triggering time of the long pulse current source (3) is earlier than that of the multi-channel electromagnetic ultrasonic signal transmitting and receiving module (4), and the length of the long pulse is enough to ensure that the excitation and the receiving of n channels of the multi-channel electromagnetic ultrasonic signal transmitting and receiving module (4) are completed within the time period when the long pulse reaches the peak value and is stable; control software for inputting the trigger sequence into a computer (6);
2) phased array excitation and reception: according to a set trigger time sequence, a computer (6) triggers a long pulse current source (3) to introduce long pulse current into a flexible bias magnetic field coil (1) to generate a bias magnetic field, when the long pulse reaches a peak value and is in a stable stage, n channels of a multi-channel electromagnetic ultrasonic signal transmitting and receiving module (4) are sequentially triggered according to the set time sequence, short pulse current is sequentially introduced into corresponding n coils in a flexible array excitation receiving coil (2), and excitation and receiving of an electromagnetic ultrasonic phased array are completed;
3) signal processing and analysis: and a computer (6) provided with control and signal acquisition processing software is adopted to carry out averaging, filtering, delay compensation and superposition processing on the multi-channel signals, increase the amplitude of the defect signals, and calculate the positions of the defects of the test piece according to the sound velocity corresponding to the test piece to be tested and the time of the defect signals.
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