CN114150372A - Transverse magnetic field variable frequency current control system and single crystal growth defect control method - Google Patents
Transverse magnetic field variable frequency current control system and single crystal growth defect control method Download PDFInfo
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- CN114150372A CN114150372A CN202210123584.6A CN202210123584A CN114150372A CN 114150372 A CN114150372 A CN 114150372A CN 202210123584 A CN202210123584 A CN 202210123584A CN 114150372 A CN114150372 A CN 114150372A
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B30/00—Production of single crystals or homogeneous polycrystalline material with defined structure characterised by the action of electric or magnetic fields, wave energy or other specific physical conditions
- C30B30/04—Production of single crystals or homogeneous polycrystalline material with defined structure characterised by the action of electric or magnetic fields, wave energy or other specific physical conditions using magnetic fields
Abstract
The invention discloses a transverse magnetic field frequency conversion current control system and a single crystal growth defect control method. This horizontal magnetic field frequency conversion current control system and single crystal growth defect control method, through setting up frequency conversion mechanism, change the position of sliding ring on the resistance stick through sliding the sliding ring, with the electric current that changes the inside control circuit of converter, thereby through the accurate and quick regulation of different current values in order to carry out horizontal magnetic field line frequency conversion electric current, satisfy the demand of single crystal stick growth in-process, avoid the disappearance of single crystal stick growth interface, the inconvenient problem that leads to single crystal stick growth interface defect easily of converter manual operation in the single crystal growth process has been solved through the combination of above-mentioned structure.
Description
Technical Field
The invention relates to the technical field of single crystal production, in particular to a transverse magnetic field variable frequency current control system and a single crystal growth defect control method.
Background
The single crystal, namely the particles in the crystal are regularly and periodically arranged in a three-dimensional space, or the whole crystal is formed by the same space lattice in the three-dimensional direction, and the arrangement of particles in the whole crystal in the space is long-range order; the entire crystal lattice of a single crystal is continuous and has important industrial applications.
Silicon single crystal adopts the czochralski method to grow the in-process, the electric current size of horizontal magnetic field line needs to change according to the demand among the single crystal growth process, make the convection current of melt obtain the crystal quality who suppresses in order to improve the single crystal stick, thereby avoid single crystal growth in-process growth interface to have the defect, circuit current frequency conversion regulation adopts the converter usually, but the converter needs artifical manual operation, and among the single crystal growth process, the manual work carries out the converter operation and adjusts, at first appear easily that the operation is inaccurate, secondly appear easily the operation untimely, and lead to the single crystal stick at the defect of growth in-process growth interface, consequently, need solve to above-mentioned problem.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a transverse magnetic field frequency conversion current control system and a single crystal growth defect control method, and solves the problem that the defect of a single crystal rod growth interface is easily caused due to the inconvenience of manual operation of a frequency converter in the single crystal growth process.
In order to achieve the purpose, the invention is realized by the following technical scheme: the utility model provides a horizontal magnetic field frequency conversion current control system, includes combustion chamber and base, the combustion chamber sets up the top at the base, the outside of base is provided with frequency conversion mechanism.
The frequency conversion mechanism comprises a frequency converter and a bottom plate, the outer surface of the frequency converter is fixedly connected with the outer surface of a base, the outer surface of the bottom plate is fixedly connected with the outer surface of the base, a protective cover is arranged outside the bottom plate, support plates are fixedly connected to the left side and the right side of the outer surface of the bottom plate, the outer surfaces of the two support plates are movably connected with the outer surface of the protective cover, a resistance rod is arranged between the adjacent sides of the outer surfaces of the two support plates and is connected with the support plates through an installation assembly, a slip ring is sleeved on the outer surface of the resistance rod and slides on the resistance rod through a driving assembly, a connecting column is fixedly connected inside the protective cover in a penetrating manner, the connecting end of the connecting column is electrically connected with a control circuit of the frequency converter through a lead, and the output end of the resistance rod is electrically connected with one end of the connecting column through a lead, the input end of the slip ring is electrically connected with one end of the connecting column through a lead;
the installation component comprises an embedded groove, a left clamping groove and a right clamping groove, the embedded groove is formed in the outer surface of the support plate, the inner surface of the embedded groove is movably connected with an embedded plate, the outer surface of the embedded plate is fixedly connected with the outer surface of the protective cover, a bolt penetrates through the inner portion of the embedded plate and is movably connected with the outer surface of the support plate, the outer surface of the bolt is in threaded connection with the inner portion of the support plate, the left clamping groove is formed in the outer surface of the support plate, the right clamping groove is formed in the left side of the outer surface of the protective cover, a clamping block is clamped in the inner surface of the left clamping groove, the outer surface of the right clamping groove is clamped with the outer surface of the clamping block, and the outer surface of the clamping block is fixedly connected with the outer surface of the resistance rod.
Preferably, the driving assembly comprises a servo motor and a movable plate, the outer surface of the servo motor is fixedly connected with the outer surface of the support plate, a through screw groove is formed in the movable plate, and the movable plate is connected with the slip ring through a connecting unit.
Preferably, the output end of the servo motor is fixedly connected with a screw rod through a coupler, and the outer surface of the screw rod is in threaded connection with the inner surface of the screw groove.
Preferably, the outer surface of the screw rod is rotatably connected with a rotating sleeve, and the outer surface of the rotating sleeve is fixedly connected with the outer surface of the support plate.
Preferably, the connecting unit comprises connecting plates which are arranged in bilateral symmetry, the left connecting plate is arranged on the left side and the right side of the outer surface of the movable plate, the right connecting plate is arranged on the left side and the right side of the outer surface of the sliding ring, and a through groove is formed in the connecting plate.
Preferably, the surface swing joint of connecting plate has right splint, the surface swing joint of connecting plate has left splint, the equal fixedly connected with centre gripping post in the left and right sides of right splint surface.
Preferably, the inside left and right sides of left splint all sets up the centre gripping groove that link up, the internal surface in centre gripping groove and the surface swing joint of centre gripping post, the internal surface in groove and the surface swing joint of centre gripping post lead to.
Preferably, the outer surface of the clamping column is in threaded connection with a nut, and the outer surface of the nut is clamped with the outer surface of the left clamping plate.
The invention also discloses a method for controlling the defects of the single crystal growth, which comprises the following steps:
s1, assembly installation: firstly, the bottom plate is fixedly connected with the base, then the slip ring is sleeved on the resistance rod, the output end of the slip ring and the output end of the resistance rod are electrically connected with one end of the connecting column on the protective cover through conducting wires, then the resistance rod is clamped with the left clamping groove through the clamping block and is connected with the two support plates, then the protective cover is connected with the embedded plate through the embedded groove, and the right clamping groove is connected with the clamping block, thereby connecting the right clamping plate with the support plate, connecting the embedded plate with the support plate through the bolt, enhancing the connection stability of the protective cover and the resistance rod, connecting the right clamping plate with the through groove through the clamping column, connecting the connecting plates on the left side and the right side so as to connect the movable plate and the slip ring together, connecting the left clamping plate with the clamping groove through the clamping column and the connecting plate, and then connecting the nut with the clamping column and the left clamping plate;
s2, circuit closing: firstly, connecting a frequency converter with a base, then electrically connecting a frequency conversion circuit in the frequency converter with a transverse magnetic field line in the base, and then electrically connecting a control circuit in the frequency converter with a connecting column on a protective cover through a conducting wire;
s3, electric control driving: when the frequency of the transverse magnetic field needs to be changed by current is adjusted in the process of growing the single crystal, the servo motor drives the movable plate to move left and right on the screw rod, so that the movable plate drives the sliding ring to slide left and right on the resistance rod, the sliding ring slides to change the resistance of the control circuit inside the frequency converter, the current of the control circuit inside the frequency converter is changed, and the current of the frequency conversion circuit is controlled to be changed by the change of the current of the control circuit.
Preferably, the servo motor mentioned in S2-S3 is electrically connected to an external PLC control circuit, and the frequency conversion circuit of the frequency converter is electrically connected to an external power supply.
Advantageous effects
The invention provides a transverse magnetic field variable frequency current control system and a single crystal growth defect control method. Compared with the prior art, the method has the following beneficial effects:
(1) the transverse magnetic field frequency conversion current control system and the single crystal growth defect control method are characterized in that a frequency conversion mechanism comprises a frequency converter and a bottom plate, the outer surface of the frequency converter is fixedly connected with the outer surface of a base, the outer surface of the bottom plate is fixedly connected with the outer surface of the base, a protective cover is arranged outside the bottom plate, support plates are fixedly connected to the left side and the right side of the outer surface of the bottom plate, the outer surfaces of the two support plates are movably connected with the outer surface of the protective cover, a resistance rod is arranged between the mutually adjacent sides of the outer surfaces of the two support plates and is connected with the support plates through a mounting assembly, a slip ring is sleeved on the outer surface of the resistance rod and slides on the resistance rod through a driving assembly, a connecting column is fixedly connected inside the protective cover in a penetrating manner, the connecting end of the connecting column is electrically connected with a control circuit of the frequency converter through a lead, and the output end of the resistance rod is electrically connected with one end of the connecting column through a lead, the input end of the slip ring is electrically connected with one end of the connecting column through a lead; the mounting assembly comprises an embedded groove, a left clamping groove and a right clamping groove, the embedded groove is arranged on the outer surface of the support plate, the inner surface of the embedded groove is movably connected with an embedded plate, the outer surface of the embedded plate is fixedly connected with the outer surface of the protective cover, a bolt is movably connected inside the embedded plate in a penetrating manner, the outer surface of the bolt is in threaded connection with the inside of the support plate in a penetrating manner, the left clamping groove is arranged on the outer surface of the support plate, the right clamping groove is arranged on the left side and the right side of the outer surface of the protective cover, a clamping block is clamped on the inner surface of the left clamping groove, the outer surface of the right clamping groove is clamped with the outer surface of the clamping block, the outer surface of the clamping block is fixedly connected with the outer surface of the resistance rod, through the arrangement of the frequency conversion mechanism, the protective cover is connected with the support plate through the connection of the embedded groove and the embedded plate, the connection of the protective cover and the support plate is stabilized through the action of the bolt, and the clamping of the clamping block is fixed through the left clamping groove and the right clamping groove, so as to clamp the resistance rod, not only strengthened protectiveness and convenient to detach and changed the maintenance, secondly electric connection through resistance rod and sliding ring and spliced pole, and spliced pole and converter internal control circuit's electric connection, and change the position of sliding ring on the resistance rod through sliding the sliding ring, with the electric current that changes converter internal control circuit, thereby through the accurate and quick regulation of different current values in order to carry out horizontal magnetic field line variable frequency current, satisfy the demand of single crystal stick growth in-process, avoid the disappearance of single crystal stick growth interface, the inconvenient problem that leads to single crystal stick growth interface defect easily of converter manual operation in the single crystal growth process has been solved through the combination of above-mentioned structure.
(2) The transverse magnetic field frequency conversion current control system and the single crystal growth defect control method are characterized in that the driving assembly comprises a servo motor and a movable plate, the outer surface of the servo motor is fixedly connected with the outer surface of the support plate, a through screw groove is formed in the movable plate, the movable plate is connected with the sliding ring through a connecting unit, the output end of the servo motor is fixedly connected with a screw rod through a coupler, the outer surface of the screw rod is in threaded connection with the inner surface of the screw groove, the outer surface of the screw rod is rotatably connected with a rotating sleeve, the outer surface of the rotating sleeve is fixedly connected with the outer surface of the support plate, the servo motor is firstly electrically connected with an external PLC control circuit through the driving assembly, the rotation is controlled by the external control circuit and is connected with the screw groove through the screw rod through the screw thread, the movable plate moves along the screw rod when the screw rod rotates, so that the sliding ring is driven to move on the rod, and the resistance and the current of the internal control circuit of the frequency converter are adjusted through changing the position of the sliding ring, the precision and timeliness of operation are realized by utilizing electric control, and the problem that the defect of a growth interface of a single crystal rod is easily caused due to the inconvenience of manual operation of a frequency converter in the single crystal growth process is solved through the combination of the structure.
(3) The transverse magnetic field variable frequency current control system and the single crystal growth defect control method are characterized in that the connecting unit comprises connecting plates which are bilaterally symmetrically arranged, the left connecting plate is arranged on the left side and the right side of the outer surface of the movable plate, the right connecting plate is arranged on the left side and the right side of the outer surface of the sliding ring, a through groove is formed in the connecting plate, a right clamping plate is movably connected to the outer surface of the connecting plate, a left clamping plate is movably connected to the outer surface of the connecting plate, clamping columns are fixedly connected to the left side and the right side of the outer surface of the right clamping plate, through clamping grooves are formed in the left side and the right side of the inner part of the left clamping plate, the inner surfaces of the clamping grooves are movably connected with the outer surfaces of the clamping columns, nuts are in threaded connection with the outer surfaces of the left clamping plates, and the right clamping plate is connected with the through the clamping columns through the connecting unit, the connecting plates of the left side and the right side are connected together, so that the movable plate and the sliding ring are connected together, the movable plate and the sliding ring are connected under the clamping action of the left clamping plate and the nut, the stability of the movable plate and the sliding ring is enhanced, the sliding of the electronic control adjustment of the sliding ring is facilitated, the resistance current adjustment of a frequency converter control circuit is performed, and meanwhile, the sliding ring and the resistance rod are convenient to disassemble and replace after being abraded.
Drawings
FIG. 1 is a perspective view of the external structure of the present invention;
FIG. 2 is a perspective view of the external structure of the base plate of the present invention;
FIG. 3 is a sectional view showing the outer structure of the shield according to the present invention;
FIG. 4 is an enlarged view of a portion of the invention at A in FIG. 3;
fig. 5 is a perspective view showing the external structure of the resistance rod of the present invention;
FIG. 6 is an exploded view of the outer structure of the brace of the present invention;
FIG. 7 is a perspective view of an outer knot of the screw of the present invention;
FIG. 8 is a perspective view of an external tie of the movable plate of the present invention;
FIG. 9 is an exploded view of the outer structure of the left splint of the present invention;
FIG. 10 is a flow chart of the method of operation of the present invention.
In the figure: 1-combustion chamber, 2-base, 3-frequency conversion mechanism, 31-frequency converter, 32-bottom plate, 33-protective cover, 34-support plate, 35-resistance rod, 36-installation component, 361-embedded groove, 362-left clamping groove, 363-right clamping groove, 364-embedded plate, 365-bolt, 366-fixture block, 37-slip ring, 38-driving component, 381-servo motor, 382-movable plate, 383-spiral groove, 384-connecting unit, 3841-connecting plate, 3842-through groove, 3843-right clamping plate, 3844-left clamping plate, 3845-clamping column, 3846-clamping groove, 3847-nut, 385-screw, 386-swivel sleeve and 39-connecting column.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-10, the present invention provides the following technical solutions: a transverse magnetic field frequency conversion current control system comprises a combustion chamber 1 and a base 2, wherein the combustion chamber 1 is arranged at the top of the base 2, and a frequency conversion mechanism 3 is arranged outside the base 2; the frequency conversion mechanism 3 comprises a frequency converter 31 and a bottom plate 32, the type of the frequency converter 31 is VFD-EL, the output end of a frequency conversion circuit of the frequency converter 31 is electrically connected with the input end of a transverse magnetic field line in the combustion chamber 1, the outer surface of the frequency converter 31 is fixedly connected with the outer surface of the base 2, the outer surface of the bottom plate 32 is fixedly connected with the outer surface of the base 2, a protective cover 33 is arranged outside the bottom plate 32, the protective cover 33 is made of insulating and corrosion-resistant materials and plays roles of electric shock protection and dust shielding, support plates 34 are fixedly connected to the left side and the right side of the outer surface of the bottom plate 32, the support plates 34 are made of insulating and corrosion-resistant materials and play a role of supporting, the outer surfaces of the two support plates 34 are movably connected with the outer surface of the protective cover 33, a resistance rod 35 is arranged between the mutually close sides of the outer surfaces of the two support plates 34, and the resistance rod 35 is made of conductive materials, the resistance of the resistance rod 35 is uniform, the resistance rod 35 is connected with the support plate 34 through the mounting assembly 36, the outer surface of the resistance rod 35 is sleeved with the slip ring 37, the size of the inner wall of the slip ring 37 is matched with that of the resistance rod and is made of a conductive material, the slip ring 37 slides on the resistance rod 35 through the driving assembly 38, the inside of the protective cover 33 is fixedly connected with a connecting column 39 in a penetrating mode, the connecting column 39 is made of the conductive material, protective measures are set when external connection positions are electrically connected, the connecting end of the connecting column 39 is electrically connected with a control circuit of the frequency converter 31 through a lead, the output end of the resistance rod 35 is electrically connected with one end of the connecting column 39 through a lead, and the input end of the slip ring 37 is electrically connected with one end of the connecting column 39 through a lead; the mounting assembly 36 comprises an embedded groove 361, a left clamping groove 362 and a right clamping groove 363, the embedded groove 361 is arranged on the outer surface of the support plate 34, an embedded plate 364 is movably connected to the inner surface of the embedded groove 361, the outer surface of the embedded plate 364 is fixedly connected with the outer surface of the protective cover 33, a bolt 365 is movably connected inside the embedded plate 364 in a penetrating manner, the outer surface of the bolt 365 is in penetrating threaded connection with the inside of the support plate 34, the left clamping groove 362 is arranged on the outer surface of the support plate 34, the right clamping groove 363 is arranged on the left side and the right side of the outer surface of the protective cover 33, a fixture block 366 is clamped on the inner surface of the left clamping groove 362, the fixture block 366 is made of an insulating material, the outer dimension is smaller than the diameter length of the resistance rod 35, the outer surface of the right clamping groove 363 is clamped with the outer surface of the fixture block 366, the outer surface of the fixture block 366 is fixedly connected with the outer surface of the resistance rod 35, the driving assembly 38 comprises a servo motor and a movable plate 382, the servo motor 381 is GM20-20BY, the outer surface of the servo motor 381 is fixedly connected with the outer surface of the support plate 34, a through screw groove 383 is formed in the movable plate 382, the movable plate 382 is connected with the sliding ring 37 through a connecting unit 384, the output end of the servo motor 381 is fixedly connected with a screw 385 through a coupler, the outer surface of the screw 385 is in threaded connection with the inner surface of the screw groove 383, the outer surface of the screw 385 is rotatably connected with a rotating sleeve 386, the screw 385 is supported by the rotating sleeve 386 to enhance the stability of the screw 385, the outer surface of the rotating sleeve 386 is fixedly connected with the outer surface of the support plate 34, the connecting unit 384 comprises connecting plates 3841 which are arranged in bilateral symmetry, the connecting plates 3841 are made of insulating materials, the left connecting plates 3841 are arranged on the left side and the right side of the outer surface of the movable plate 382, the right connecting plates 3841 are arranged on the left side and the right side of the outer surface of the sliding ring 37, a through groove 3842 is formed in the connecting plates 3841, and a right clamping plate 3843 is movably connected to the outer surface of the connecting plates 3841, the outer surface swing joint of connecting plate 3841 has left splint 3844, the equal fixedly connected with centre gripping post 3845 in the left and right sides of right splint 3843 surface, the centre gripping groove 3846 that link up has all been seted up to the inside left and right sides of left splint 3844, the internal surface of centre gripping groove 3846 and the surface swing joint of centre gripping post 3845, the internal surface and the surface swing joint of centre gripping post 3845 of logical groove 3842, the external dimension of centre gripping post 3845 and the inside size looks adaptation that leads to groove 3842, in order to strengthen the stability of sliding ring 37 and movable plate 382 connection, the surface threaded connection of centre gripping post 3845 has nut 3847, the surface of nut 3847 and the surface looks joint of left splint 3844.
The invention also discloses a method for controlling the defects of the single crystal growth, which comprises the following steps:
s1, assembly installation: firstly, the bottom plate 32 is fixedly connected with the base 2, then the slip ring 37 is sleeved on the resistance rod 35, the output end of the slip ring 37 and the output end of the resistance rod 35 are electrically connected with one end of a connecting column 39 on the protective cover 33 through conducting wires, then the resistance rod 35 is clamped with the left clamping groove 362 through a clamping block 366, the resistance rod 35 is connected with the two support plates 34, then the protective cover 33 is connected with the embedded plate 364 through an embedded groove 361 and connected with the clamping block 363 through a clamping block 366 so as to be connected with the support plates 34, and then connected with the embedded plate 364 and the support plates 34 through bolts 365, so that the connection stability of the protective cover 33 and the resistance rod 35 is enhanced, and then the right clamping plate 3843 is connected with the through groove 3842 through a clamping column 3845, so as to connect the connecting plates 3841 on the left side and the right side, so as to connect the movable plate 382 with the slip ring 37, and then the left clamping plate 3844 is connected with the clamping groove 3846 through the clamping column 3845, and a connecting plate 3841, followed by connecting a nut 3847 with a clamping post 3845 and a left clamping plate 3844;
s2, circuit closing: firstly, connecting the frequency converter 31 with the base 2, then electrically connecting a frequency conversion circuit inside the frequency converter 31 with a transverse magnetic field line inside the base 2, and electrically connecting a control circuit inside the frequency converter 31 with a connecting column 39 on the protective cover 33 through a conducting wire;
s3, electric control driving: when the frequency of the current change is needed by the transverse magnetic field lines during the growth of the single crystal, the servo motor 381 drives the movable plate 382 to move left and right on the screw 385, so that the movable plate 382 drives the slip ring 37 to slide left and right on the resistance rod 35, the slip ring 37 slides to change the resistance of the control circuit inside the frequency converter 31, the current of the control circuit inside the frequency converter 31 changes, and the current of the frequency conversion circuit is controlled to perform frequency change adjustment through the change of the current of the control circuit.
In the present invention, the servo motor 381 mentioned in S2-S3 is electrically connected to an external PLC control circuit, and the frequency conversion circuit of the frequency converter 31 is electrically connected to an external power supply.
And those not described in detail in this specification are well within the skill of those in the art.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. The utility model provides a horizontal magnetic field frequency conversion current control system, includes combustion chamber (1) and base (2), combustion chamber (1) sets up the top at base (2), its characterized in that: a frequency conversion mechanism (3) is arranged outside the base (2);
the frequency conversion mechanism (3) comprises a frequency converter (31) and a bottom plate (32), the outer surface of the frequency converter (31) is fixedly connected with the outer surface of the base (2), the outer surface of the bottom plate (32) is fixedly connected with the outer surface of the base (2), a protective cover (33) is arranged outside the bottom plate (32), support plates (34) are fixedly connected to the left side and the right side of the outer surface of the bottom plate (32), the outer surfaces of the two support plates (34) are movably connected with the outer surface of the protective cover (33), a resistance rod (35) is arranged between the mutually close sides of the outer surfaces of the two support plates (34), the resistance rod (35) is connected with the support plates (34) through a mounting assembly (36), a slip ring (37) is sleeved on the outer surface of the resistance rod (35), and the slip ring (37) slides on the resistance rod (35) through a driving assembly (38), a connecting column (39) penetrates through and is fixedly connected with the inside of the protective cover (33), the connecting end of the connecting column (39) is electrically connected with a control circuit of the frequency converter (31) through a conducting wire, the output end of the resistance rod (35) is electrically connected with one end of the connecting column (39) through a conducting wire, and the input end of the slip ring (37) is electrically connected with one end of the connecting column (39) through a conducting wire;
the mounting component (36) comprises an embedded groove (361), a left clamping groove (362) and a right clamping groove (363), the embedded groove (361) is arranged on the outer surface of the support plate (34), the inner surface of the embedded groove (361) is movably connected with an embedded plate (364), the outer surface of the embedded plate (364) is fixedly connected with the outer surface of the protective cover (33), a bolt (365) is movably connected inside the embedded plate (364) in a penetrating way, the outer surface of the bolt (365) is in threaded connection with the inside of the support plate (34) in a penetrating way, the left clamping groove (362) is arranged on the outer surface of the support plate (34), the right clamping groove (363) is arranged on the left side and the right side of the outer surface of the protective cover (33), a clamping block (366) is clamped on the inner surface of the left clamping groove (362), the outer surface of the right clamping groove (363) is clamped with the outer surface of the clamping block (366), the outer surface of the clamping block (366) is fixedly connected with the outer surface of the resistance rod (35).
2. The transverse magnetic field variable frequency current control system according to claim 1, wherein: the driving assembly (38) comprises a servo motor (381) and a movable plate (382), the outer surface of the servo motor (381) is fixedly connected with the outer surface of the support plate (34), a through thread groove (383) is formed in the movable plate (382), and the movable plate (382) is connected with the slip ring (37) through a connecting unit (384).
3. The transverse magnetic field variable frequency current control system according to claim 2, wherein: the output end of the servo motor (381) is fixedly connected with a screw rod (385) through a coupler, and the outer surface of the screw rod (385) is in threaded connection with the inner surface of a thread groove (383).
4. A transverse magnetic field variable frequency current control system according to claim 3, wherein: the outer surface of the screw (385) is rotatably connected with a rotating sleeve (386), and the outer surface of the rotating sleeve (386) is fixedly connected with the outer surface of the support plate (34).
5. The transverse magnetic field variable frequency current control system according to claim 2, wherein: the connecting unit (384) comprises connecting plates (3841) which are arranged in a bilateral symmetry mode, the left connecting plates (3841) are arranged on the left side and the right side of the outer surface of the movable plate (382), the right connecting plates (3841) are arranged on the left side and the right side of the outer surface of the sliding ring (37), and a through groove (3842) is formed in the connecting plates (3841).
6. The transverse magnetic field variable frequency current control system according to claim 5, wherein: the surface swing joint of connecting plate (3841) has right splint (3843), the surface swing joint of connecting plate (3841) has left splint (3844), the equal fixedly connected with centre gripping post (3845) of the left and right sides of right splint (3843) surface.
7. The transverse magnetic field variable frequency current control system according to claim 6, wherein: the inside left and right sides of left splint (3844) all seted up centre gripping groove (3846) that link up, the internal surface of centre gripping groove (3846) and the surface swing joint of centre gripping post (3845), the internal surface that leads to groove (3842) and the surface swing joint of centre gripping post (3845).
8. The transverse magnetic field variable frequency current control system according to claim 6, wherein: the surface threaded connection of centre gripping post (3845) has nut (3847), the surface looks joint of the surface of nut (3847) and left splint (3844).
9. A method for controlling defects in single crystal growth, comprising: the method specifically comprises the following steps:
s1, assembly installation: firstly, a bottom plate (32) is fixedly connected with a base (2), then a slip ring (37) is sleeved on a resistance rod (35), the output end of the slip ring (37) and the output end of the resistance rod (35) are electrically connected with one end of a connecting column (39) on a protective cover (33) through conducting wires, then the resistance rod (35) is clamped with a left clamping groove (362) through a clamping block (366), the resistance rod (35) is connected with two support plates (34), then the protective cover (33) is connected with an embedded plate (364) through an embedded groove (361), a right clamping groove (363) is connected with the clamping block (366) so as to be connected with the support plates (34), and then the embedded plate (364) and the support plates (34) are connected through bolts (365), so that the stability of connection between the protective cover (33) and the resistance rod (35) is enhanced, and then a right clamping plate (3843) is connected with a through a clamping column (3845) and a through groove (3842), thereby connecting the left and right connection plates (3841) to connect the movable plate (382) with the slip ring (37), connecting the left clamping plate (3844) with the clamping groove (3846) through the clamping post (3845) and the connection plate (3841), and then connecting the nut (3847) with the clamping post (3845) and the left clamping plate (3844);
s2, circuit closing: firstly, a frequency converter (31) is connected with a base (2), then a frequency conversion circuit in the frequency converter (31) is electrically connected with a transverse magnetic field line in the base (2), and then a control circuit in the frequency converter (31) is electrically connected with a connecting column (39) on a protective cover (33) through a lead;
s3, electric control driving: when the frequency of current change is needed by transverse magnetic field lines in the process of growing single crystals, the servo motor (381) drives the movable plate (382) to move left and right on the screw rod (385), so that the movable plate (382) drives the slip ring (37) to slide left and right on the resistance rod (35), the slip ring (37) slides to change the resistance of an internal control circuit of the frequency converter (31), the current of the internal control circuit of the frequency converter (31) is changed, and the current of the frequency conversion circuit is controlled to carry out frequency change adjustment through the change of the current of the control circuit.
10. A single crystal growth defect control method as defined in claim 9, wherein: the servo motor (381) mentioned in S2-S3 is electrically connected with an external PLC control circuit, and a frequency conversion circuit of the frequency converter (31) is electrically connected with an external power supply.
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| US6001170A (en) * | 1995-08-10 | 1999-12-14 | Wacker Siltronik Gesellschaft fur Halbleitermaterialien AG | Process and apparatus for the growth of single crystals |
| US20050092236A1 (en) * | 2003-11-03 | 2005-05-05 | Bender David L. | System for continuous growing of monocrystalline silicon |
| US20150037516A1 (en) * | 2012-02-23 | 2015-02-05 | Shin-Etsu Chemical Co., Ltd. | Polycrystalline silicon rod manufacturing method |
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| CN113992079A (en) * | 2021-10-25 | 2022-01-28 | 杭州江南电机股份有限公司 | Fan-based single-phase direct current motor driving control system and driving method |
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2022
- 2022-02-10 CN CN202210123584.6A patent/CN114150372A/en active Pending
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|---|---|---|---|---|
| US6001170A (en) * | 1995-08-10 | 1999-12-14 | Wacker Siltronik Gesellschaft fur Halbleitermaterialien AG | Process and apparatus for the growth of single crystals |
| US20050092236A1 (en) * | 2003-11-03 | 2005-05-05 | Bender David L. | System for continuous growing of monocrystalline silicon |
| US20150037516A1 (en) * | 2012-02-23 | 2015-02-05 | Shin-Etsu Chemical Co., Ltd. | Polycrystalline silicon rod manufacturing method |
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Application publication date: 20220308 |