CN114121592A

CN114121592A - Vacuum light source

Info

Publication number: CN114121592A
Application number: CN202111260357.XA
Authority: CN
Inventors: 赵子淳; 王艳会; 邹洁; 鹿建; 谢斌平
Original assignee: Fermi Instruments Shanghai Co ltd; Feimian Instrument Technology Nanjing Co ltd
Current assignee: Fermi Instruments Shanghai Co ltd; Feimian Instrument Technology Nanjing Co ltd
Priority date: 2021-10-28
Filing date: 2021-10-28
Publication date: 2022-03-01

Abstract

The present disclosure provides a vacuum light source, comprising: a light source for emitting light; light guide device, be used for with the light source is connected, includes: a light pipe for providing a transmission channel of the light emitted from the light source; the sealing element is arranged on the light guide pipe and used for vacuum sealing connection; and the lens component is connected with the light guide pipe in a sealing way.

Description

Vacuum light source

Technical Field

The present disclosure relates to vacuum light source technology, and more particularly, to a vacuum light source.

Background

Mass spectrometry is an analytical method by which a sample to be measured is analyzed by determining its ion mass-to-charge ratio. The sample to be analyzed is first ionized to form ions of various mass-to-charge ratios (M/Q), and then the ions are separated according to different mass-to-charge ratios by using the electromagnetic principle and the intensities of the various ions are measured to determine the molecular weight and structure of the substance to be measured. And the qualitative and quantitative result of the sample can be obtained through the mass spectrum and the related information of the sample. Mass spectrometers are currently widely used in various fields such as chemistry, chemical engineering, materials, environment, geology, energy, medicine, criminal investigation, life science, and sports medicine, and are classified into isotope mass spectrometers, inorganic mass spectrometers, and organic mass spectrometers according to their application ranges.

Ionization techniques are a prerequisite for mass spectrometry, where a sample can only be detected by mass spectrometry after ionization, and can be divided into hard ionization and soft ionization. Electron impact ionization (EI) used by a traditional organic spectrometer is a hard ionization technology, and a measured substance is ionized by electron impact or other modes, but because the electron energy is too high, more fragments are easily generated in the ionization process, too many unnecessary ion peaks are generated, great difficulty is brought to subsequent analysis, and the accuracy of the analysis is interfered. Therefore, soft ionization technologies such as Chemical Ionization (CI), electrospray ionization (ESI), Matrix Assisted Laser Desorption Ionization (MALDI), and the like appear in many cases. Compared with hard ionization, soft ionization generates few fragment ions, is suitable for samples which are easy to break or ionize, and has great influence on the development of mass spectrometry. The ionization energy of most molecules and free radicals is about 10eV and is located in the vacuum ultraviolet band of light, so that the molecules can be ionized near the ionization energy by absorbing the energy of a single vacuum ultraviolet photon. The process belongs to soft ionization, does not need any matrix, can directly ionize almost all organic macromolecules without generating fragments, and does not need sample pretreatment. The photoionization mass spectrum can cover polar and nonpolar, large-mass and small-mass organic molecules, and the spectrogram is clean and easy to analyze, so that the technology has universality.

Currently, common photoionization sources include vacuum ultraviolet lamps, vacuum ultraviolet lasers, synchrotron radiation light sources, and the like. The synchrotron radiation light source is a high-performance strong light source which generates synchrotron radiation when relativistic electrons (or positrons) are deflected in a magnetic field, and has the advantages of wide waveband, high collimation, high brightness, narrow pulse and the like. But the structure is extremely complex, the volume is huge, the cost is expensive, and the device is usually used as a national-level large scientific device and is built and operated by national force. Due to limited time, the user can submit application materials according to the research requirement, and the beam line generated by the synchrotron radiation light source can be used only by reserving time. The current synchrotron radiation light source cannot meet the increasing use requirements of the majority of researchers on the high-brightness deep ultraviolet photon source.

Vacuum ultraviolet lasers primarily utilize laser bombardment of a sample to generate ions. The laser light source mainly used is Nd: YAG laser (1064nm) and its quadruple and quintupling frequency, ArF excimer laser (193 nm). The vacuum ultraviolet laser has the characteristics of good monochromaticity, good directivity, high brightness and the like, but has complex installation and high light emitting difficulty, and the light path is detuned if regular maintenance is needed. In particular, vacuum ultraviolet lasers are generally generated outside the vacuum chamber and cannot avoid losing most of the light intensity when introduced into the vacuum chamber.

In addition, vacuum ultraviolet light sources or other vacuum light sources are widely applied to various fields such as production, scientific research and the like. There is a need for a reliable, efficient vacuum light source.

Disclosure of Invention

The present disclosure provides a vacuum light source, comprising: a light source for emitting light; light guide device for be connected with the light source, include: a light pipe for providing a transmission channel of light emitted from the light source; the sealing element is arranged on the light guide pipe and used for vacuum sealing connection; and the lens component is connected with the light pipe in a sealing way.

In some embodiments, a lens assembly, comprising: the first lens is connected with the light guide pipe in a sealing mode.

In some embodiments, the lens assembly further comprises: an extension tube connected with the light pipe; and a second lens connected with an extension tube disposed between the first lens and the second lens.

In some embodiments, the lens assembly further comprises: the first sealing ring is arranged on the first lens and used for connecting the first lens and the light guide pipe in a sealing manner; and a locking ring for mounting the first lens on the light pipe.

In some embodiments, the lens assembly further comprises: the second sealing ring is arranged on the second lens and used for connecting the second lens with the extension pipe in a sealing manner; and a sealing cover for mounting the second lens on the extension tube.

In some embodiments, the vacuum light source further comprises an adjusting device connected with the light guide device for adjusting the extending distance and/or the extending angle of the light guide device.

In some embodiments, the adjustment device comprises: the fixed flange is fixedly connected with the sealing element; the adjusting flange is used for vacuum sealing connection; the corrugated pipe is fixedly and hermetically connected with the fixed flange and the adjusting flange and is sleeved outside the light guide pipe; and the at least one adjusting screw rod assembly is arranged on the fixing flange and the adjusting flange in a penetrating manner and is used for adjusting the extending distance and/or the extending angle of the light guide device.

In some embodiments, the adjustment flange includes a knife edge structure for vacuum tight connection, and the at least one adjustment screw assembly is disposed outside the knife edge structure.

In some embodiments, the vacuum light source further comprises: the differential chamber, set up between light source and leaded light device, includes: the first window is connected with the light source in a sealing mode; and the second window is connected with the light guide device in a sealing way.

In some embodiments, the differential cavity further comprises: and the third window is used for connecting a vacuum pump.

In some embodiments, the vacuum light source further comprises: and a light transmitting tube coupled to the output end of the light source for transmitting light to the lens assembly.

In some embodiments, the light source comprises: the radio frequency focusing excitation device is used for forming a radio frequency electric field; and an ion holder for emitting ultraviolet light under the action of the radio frequency electric field.

In some embodiments, the ion holder includes an output cavity terminating in an output end of the ultraviolet light source.

Drawings

In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only one embodiment of the present disclosure, and other drawings can be obtained by those skilled in the art without creative efforts.

FIG. 1 shows a schematic structural diagram of an organic mass spectrometry DUV light source according to some embodiments of the present disclosure;

FIG. 2 illustrates a schematic cross-sectional view of an organic mass spectrometry DUV light source, according to some embodiments of the present disclosure;

FIG. 3 illustrates an exploded view of a structure of an organic mass spectrometry DUV light source according to some embodiments of the present disclosure;

FIG. 4 illustrates a schematic structural view of a light guide device according to some embodiments of the present disclosure;

FIG. 5 illustrates a schematic structural diagram of a lens assembly according to some embodiments of the present disclosure;

FIG. 6 illustrates a schematic structural view of an ultraviolet light source, according to some embodiments of the present disclosure;

figure 7 illustrates a schematic structural view of an ion holder according to some embodiments of the present disclosure.

In the above drawings, the respective reference numerals denote:

100 vacuum light source

110 light source

111 radio frequency focusing exciting device

112 ion holder

1121 holding cavity

1122 holder base

1123 gas inlet

120 light guide device

121 light pipe

122 seal

123 lens assembly

1231 first lens

1233 first seal ring

1235 first Teflon ring

1236 transition ring

1237 locking ring

1238 sealing cover

1234 extension tube

130 adjustment device

131 fixed flange

132 adjusting flange

133 corrugated tube

134 screw assembly

135 nut

140 differential cavity

141 first window

142 second window

143 third window

150 light transmitting tube

Detailed Description

Some embodiments of the present disclosure will be described below with reference to the accompanying drawings. It is to be understood that the described embodiments are merely exemplary of the disclosure and that not all embodiments are intended to be considered.

In the description of the present disclosure, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "top", "bottom", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are merely for convenience of describing the present disclosure and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be configured in a specific orientation, and operate, and thus, should not be construed as limiting the present disclosure. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the present disclosure, it should be noted that, unless explicitly stated or limited otherwise, the terms "mounted," "connected," and "coupled" are to be construed broadly and may include, for example, fixed and removable connections; can be mechanically or electrically connected; the connection can be direct connection or indirect connection through an intermediate medium; there may be communication between the interiors of the two elements. The specific meaning of the above terms in the present disclosure can be understood by those of ordinary skill in the art as appropriate.

In some embodiments of the present disclosure, a vacuum light source is disclosed, comprising: a light source for emitting light; and the light guide device is used for being connected with the light source. The light guide device may include: a light pipe providing a transmission channel of light emitted from the light source; the sealing element is arranged on the light guide pipe and used for vacuum sealing connection; and the lens component is connected with the light pipe in a sealing way.

Vacuum light sources according to some embodiments of the present disclosure can bring beneficial technical effects. For example, the vacuum light source of some embodiments of the present disclosure may be an organic mass spectrometry deep ultraviolet light source, which can solve the problems of extremely complex structure, large volume, high cost and the like of a synchrotron radiation light source in the conventional technology, and can also solve the problems of complex installation, high light extraction difficulty, need of regular maintenance or the like of the existing vacuum ultraviolet laser, which otherwise causes optical path detuning, and the like of the vacuum ultraviolet laser generally generated outside vacuum. Most of light intensity can inevitably be lost when introducing the light that sends out outside the vacuum cavity in the prior art in the vacuum cavity, but some embodiments of this disclosure can high-efficient conduction light, reduce the loss. In some embodiments of the present disclosure, the vacuum chamber and the light source can be separated from each other, thereby preventing the vacuum chamber and the light source from being contaminated with each other and extending the working distance of the light source. In addition, light is focused into small light spots and transmitted to an ionization region, so that the photon utilization rate can be improved, and the device is simple to install and convenient to maintain.

Fig. 1 illustrates a schematic structural view of a vacuum light source 100 according to some embodiments of the present disclosure. Fig. 2 illustrates a cross-sectional schematic view of a vacuum light source 100 according to some embodiments of the present disclosure. Fig. 3 illustrates an exploded view of the structure of the vacuum light source 100 according to some embodiments of the present disclosure. Those skilled in the art will appreciate that the organic mass spectrometry duv light source is merely exemplary. Similarly, the vacuum light source 100 may also be other types of vacuum light sources, such as vacuum visible light sources, vacuum infrared light sources, and the like.

As shown in FIGS. 1-3, the present disclosure provides a vacuum light source (e.g., an organic mass spectrometry deep ultraviolet light source) 100 comprising: a light source 110 for emitting light, and a light guide 120 for connecting with the light source 110.

Fig. 4 illustrates a schematic structural view of a light guide 120 according to some embodiments of the present disclosure.

As shown in fig. 4, the light guide 120 of the present disclosure includes a light guide 121, a sealing member 122, and a lens assembly 123. The light guide 121 may provide a transmission channel of light emitted from the light source 110. The light pipe 121 may be installed in the vacuum chamber to facilitate transmission of light emitted from the light source 110 into the vacuum chamber. A seal 122 is provided on the light pipe that can be used for a vacuum tight connection. For example, the seal 122 may be sealingly connected to the vacuum chamber and/or to the differential chamber 140 (as shown in FIGS. 1-3). Lens assembly 123 can be sealingly connected to the light pipe. For example, lens assembly 123 can be sealingly connected to one end of the light pipe or can be sealingly connected to the light pipe to isolate the vacuum atmosphere within the light pipe from the vacuum atmosphere within the vacuum chamber.

Fig. 5 illustrates a schematic structural diagram of lens assembly 123 according to some embodiments of the present disclosure.

As shown in fig. 5, in some embodiments of the present disclosure, the lens assembly 123 may include a first lens 1231, the first lens 1231 being in sealed connection with the light pipe 121. For example, as shown in fig. 5, a first lens 1231 is disposed at the left end of the light guide 121. In some embodiments, the first lens 1231 is a plano-convex lens.

As shown in fig. 4, in some embodiments of the present disclosure, the lens assembly 123 may further include an extension tube 1234 coupled to the light pipe 121.

In some embodiments of the present disclosure, the lens assembly 123 may further include a second lens (not shown) coupled to the extension tube 1234, which may be, for example, hermetically or non-hermetically coupled. The extension tube 1234 may be disposed between the first lens 1231 and the second lens. The length of the extension tube 1234 may be used to adjust the distance between the first lens 1231 and the second lens. In some embodiments, the second lens is a plano-convex lens, and the first lens 1231 is disposed opposite the planar surface of the second lens.

It will be appreciated by those skilled in the art that lens assembly 123 may also include other devices to process, e.g., focus, collimate, filter, etc., the light emitted by light source 110. Other devices may include additional lenses, prisms, filters, switches, waveguides, etc.

In some embodiments of the present disclosure, the lens assembly 123 may further include a first sealing ring 1233 disposed on the first lens 1231 for sealing the first lens 1231 with the light pipe 121. Lens assembly 123 can also include a locking ring 1237 for mounting the first lens on the light pipe.

As shown in fig. 5, a first sealing ring 1233, a first lens 1231, a first teflon ring 1235, a first transition ring 1236, and a locking ring 1237 are sequentially installed at the left end of the light guide 121. The locking ring 1237 is provided with threads that can be engaged with and locked to the threads on the inner wall of the light pipe 121, thereby fixing the first lens 1231 to the light pipe 121. The first sealing ring 1233 may be a high temperature resistant rubber ring, and has a sealing function, so that the first lens 1231 can be hermetically connected to the light pipe 121, thereby completely separating the vacuum chamber from the light source 110 and preventing the light source 110 and the vacuum chamber from being contaminated by each other. The first lens 1231 is located between the first sealing ring 1233 and the first teflon ring 1235, and can be used to prevent the surface of the first lens 1231 from being damaged, thereby affecting light transmission. The first transition ring 1236 is located between the first teflon ring 1235 and the locking ring 1237, which can prevent the first teflon ring 1235 from being damaged or displaced when locking.

In some embodiments of the present disclosure, the lens assembly 123 may further include a second sealing ring disposed on the second lens for sealingly connecting the second lens to the extension tube 1234. Lens assembly 123 may also include a seal cap 1238 for mounting the second lens to extension tube 1234.

As shown in fig. 4, the sealing cover 1238 is installed at the end of the extension pipe 1234, and is integrally frustum-shaped, and the second lens is installed on the extension pipe 1234 through the second sealing ring and the sealing cover 1238 in a sealing manner, which is similar to the installation manner of the first lens 1232 and is not described herein again. The optical system formed by the first lens 1231 and the second lens can be used for reducing light spots, meeting different experimental requirements and simultaneously improving the utilization efficiency of photons. Also, by changing the parameters of the first lens 1231 and the second lens, the working distance of the light source 110 can also be changed.

It will be understood by those skilled in the art that although the embodiment of the present disclosure uses the first lens 1231 and the second lens to hermetically connect the light source 110 and the vacuum chamber and focus the light emitted from the light source 110, this is only one embodiment of the present disclosure, and in practical applications, the technical effect of separating the light source 110 and the vacuum chamber and focusing the light emitted from the light source 110 can be achieved by using only the first lens 1231.

It will be appreciated by those skilled in the art that although the first seal ring 1233 in the disclosed embodiment is a high temperature resistant rubber ring, any material capable of sealing may be used. Accordingly, it can be understood by those skilled in the art that although the first sealing ring 1233, the first lens 1231, the first teflon ring 1235, the first transition ring 1236 and the locking ring 1237 are sequentially installed in the embodiment of the present disclosure, so that the first lens 1231 is hermetically connected to the light guide 121, other installation methods can be used to hermetically connect the first lens 1231 to the light guide 121.

In some embodiments, the extension tube 1234 is threaded at both ends, with one end mating with the threads of the light pipe 121 and the other end mating with the threads of the sealing cap 1238, and is removably mounted between the light pipe 121 and the sealing cap 1238. The length of the extension tube 1234 may be between 20mm and 200mm, enabling a variety of length changes between the first lens 1231 and the second lens to accommodate vacuum chambers of different volumes.

It should be understood by those skilled in the art that although the extension 1234 is removably connected to the light pipe 121 and the sealing cover 1238 by threads in the embodiments of the present disclosure, the extension 1234 may be removably connected to the light pipe 121 and the sealing cover 1238 by a plug-in connection, a snap-in connection, or the like.

In some embodiments of the present disclosure, the vacuum light source 100 further comprises a conditioning device 130. The adjusting device 130 is connected to the light guide 120 and can be used to adjust the extending distance or the extending angle of the light guide 121. In the embodiment of the present disclosure, the distance that the end of the sealing cover 1238 extends forward in the vacuum chamber is taken as the extending distance, and the angle of the light guided by the light guide device 121 (for example, transmitted along the direction of the extension line of the end of the sealing cover 1238) in the coordinate system of the vacuum chamber is taken as the extending angle.

The adjusting device 130 may include a fixing flange 131, an adjusting flange 132, and a bellows 133. The fixing flange 131 is fixedly connected to the sealing member 122. The adjustment flange 132 is used for vacuum-tight connection, for example with a vacuum chamber. The bellows 133 is fixedly and hermetically connected with the fixing flange 131 and the adjusting flange 132 and is sleeved outside the light pipe 121.

The adjustment device 130 may include at least one adjustment screw assembly 134. The adjusting screw assembly 134 is disposed through the fixing flange 131 and the adjusting flange 132 for adjusting the extending distance and/or the extending angle of the light guide device 120. As shown in fig. 1 or 3, the fixing flange 131 and the adjusting flange 132 are fixed together by at least three screw assemblies 134. For example, the screw assembly 134 may include a threaded screw, and the distance and angle between the fixing flange 131 and the adjusting flange 132 are adjusted by rotating the screw. For another example, the screw assembly 134 may include a screw and a nut 135 engaged with the screw, and the distance and angle between the fixing flange 131 and the adjusting flange 132 are adjusted by rotating the nut. One end of the bellows 133 is fixedly connected to the fixing flange 131, and the other end is fixed to the adjusting flange 132. In some embodiments, the adjustment flange 132 may include a knife edge configuration for a vacuum tight connection. At least one adjustment screw assembly 134 may be provided outside the knife edge structure to remain outside the vacuum chamber for adjustment during use.

As shown in fig. 1-3, the adjusting device 130 is sleeved on the light pipe 121, the light pipe 121 is inserted into the bellows 133, the fixing flange 131 is fixed on the sealing member 122, and the adjusting flange 132 is hermetically connected with the window of the vacuum chamber. By loosening the three nuts on the adjusting flange 132, the fixing flange 131 and the light source 110 connected to the fixing flange 131 can be deflected or linearly moved, thereby adjusting the extending distance and the extending angle of the vacuum light source 100. In the embodiment of the mass spectrometer, the extension distance and the extension angle of the vacuum light source 100 can be adjusted by the adjusting device 130, so as to improve the imaging effect of the mass spectrometer.

It will be appreciated by those skilled in the art that although three nuts and bolts are used to secure the adjustment flange 132 and the fixed flange 131 in the embodiments of the present disclosure, two or more bolt assemblies may be used to secure the adjustment flange 132 and the fixed flange 131.

In some embodiments of the present disclosure, the vacuum light source 100 further comprises a differential cavity 140. The differential cavity 140 is disposed between the light source 110 and the light guide 120, and includes: a first window 141 sealingly connected to the light source 110 and a second window 142 sealingly connected to the light guide 120.

In some embodiments of the present disclosure, the differential cavity 140 may further include a third window 143, which may be used to connect a vacuum pump, thereby ensuring a vacuum atmosphere between the light source 110 and the differential cavity 140 and the encapsulant 122 and the first lens 1231.

It will be appreciated by those skilled in the art that although the embodiment of the present disclosure includes the differential cavity 140, this is only an exemplary embodiment of the present disclosure, and in practical applications, the light source 110 may be directly connected to the sealing member 122 of the light guide 120 in a sealing manner.

In some embodiments of the present disclosure, the vacuum light source 100 may further include a light transmitting tube 150 coupled to an output end of the light source 110, which may be used to guide light toward the lens assembly 123. In some embodiments, the light transmitting tube 150 may include a waveguide, such as an optical fiber. The light transmitting tube 150 may extend within the differential cavity 140 and may extend through the differential cavity 140 into the light pipe 121, as shown in fig. 1-3.

Fig. 6 illustrates a schematic diagram of a structure of the ultraviolet light source 110 according to some embodiments of the present disclosure. As shown in fig. 6, in some embodiments of the present disclosure, the light source 110 includes: a radio frequency focus excitation means 111 operable to form a radio frequency electric field; and an ion holder 112 operable to emit ultraviolet light under the influence of a radio frequency electric field.

It will be understood by those skilled in the art that although the housing of the rf focus excitation device 111 shown in fig. 6 is cylindrical, the housing of the rf focus excitation device 111 may be a cylindrical structure with a square, rectangular, or polygonal cross-section.

Fig. 7 illustrates a schematic structural view of an ion holder 112 according to some embodiments of the present disclosure. As shown in fig. 7, in some embodiments of the present disclosure, the ion holder 112 includes a holding cavity 1121, and the holding cavity 1121 ends in an output end of the light source 110.

The ion holder 112 also includes a holder base 1122 and a gas inlet 1123. The holder base 1122 is connected on one side to the rf focus excitation device 111 and on the other side to the seal 122 or the first window of the differential cavity 140. The holding cavity 1121 is installed on a side connected to the rf focusing excitation device 111 and is disposed inside the rf focusing excitation device 111. The working gas enters the holding cavity 1121 from the gas inlet 1123 and is distributed along the light transmission tube 150, the rf focusing excitation device 111 can form a high-density rf electric field in a local space, and the working gas becomes plasma and emits uv light under the action of the rf focusing excitation device 111.

The vacuum light source 100, such as the organic mass spectrometry deep ultraviolet light source 100, improves light intensity by using the radio frequency focusing excitation device 111 to perform plasma excitation, extends the working distance of the light source 110 through the light transmission tube 150, and focuses ultraviolet light into small light spots through an optical system composed of the first lens 1231 and the second lens to be transmitted into the vacuum chamber, so that the utilization efficiency of photons can be effectively improved. The structures of the vacuum light source 100 are detachably connected to facilitate replacement and maintenance, and most of the structures are located outside the vacuum cavity, so that vacuum is not broken during maintenance, and maintenance time and cost are reduced.

It should be understood that the above-mentioned embodiments are merely preferred embodiments of the present disclosure, and are not intended to limit the present disclosure, so that any modification, equivalent replacement, or improvement made within the spirit and principle of the present disclosure should be included in the scope of protection of the present disclosure.

Claims

1. A vacuum light source, comprising:

a light source for emitting light;

light guide device, be used for with the light source is connected, includes:

a light pipe for providing a transmission channel of the light emitted from the light source;

the sealing element is arranged on the light guide pipe and used for vacuum sealing connection; and

and the lens component is connected with the light pipe in a sealing way.

2. The vacuum light source of claim 1, wherein the lens assembly comprises:

the first lens is connected with the light guide pipe in a sealing mode.

3. The vacuum light source of claim 2, wherein the lens assembly further comprises:

an extension tube connected with the light pipe; and

a second lens connected with the extension tube, the extension tube disposed between the first lens and the second lens.

4. The vacuum light source of claim 2, wherein the lens assembly further comprises:

the first sealing ring is arranged on the first lens and used for connecting the first lens and the light guide pipe in a sealing manner; and

a locking ring for mounting the first lens on the light pipe.

5. The vacuum light source of claim 3, wherein the lens assembly further comprises:

the second sealing ring is arranged on the second lens and used for connecting the second lens with the extension pipe in a sealing manner; and

a sealing cover for mounting the second lens on the extension tube.

6. The vacuum light source of claim 1, further comprising:

and the adjusting device is connected with the light guide device and is used for adjusting the extending distance and/or the extending angle of the light guide device.

7. The vacuum light source of claim 6, wherein the adjustment means comprises:

the fixed flange is fixedly connected with the sealing element;

the adjusting flange is used for vacuum sealing connection;

the corrugated pipe is fixedly and hermetically connected with the fixed flange and the adjusting flange and sleeved outside the light guide pipe;

and the at least one adjusting screw rod assembly is arranged on the fixing flange and the adjusting flange in a penetrating manner and is used for adjusting the extending distance and/or the extending angle of the light guide device.

8. The vacuum light source of claim 7, wherein the adjustment flange comprises a knife edge structure for vacuum tight connection, the at least one adjustment screw assembly being disposed outside the knife edge structure.

9. The vacuum light source of any of claims 1-8, further comprising:

a differential cavity disposed between the light source and the light guide device, comprising:

the first window is connected with the light source in a sealing mode; and

and the second window is hermetically connected with the light guide device.

10. The vacuum light source of claim 9, wherein the differential cavity further comprises:

and the third window is used for connecting a vacuum pump.

11. The vacuum light source of claim 9, further comprising:

and the light transmission tube is coupled with the output end of the light source and is used for transmitting light to the lens component.

12. The vacuum light source of any of claims 1-11, wherein the light source comprises:

the radio frequency focusing excitation device is used for forming a radio frequency electric field; and

and the ion retainer is used for emitting ultraviolet light under the action of the radio-frequency electric field.

13. The vacuum light source of claim 12, wherein the ion holder comprises an output cavity terminating in an output end of the ultraviolet light source.