CN114111805B - High-precision alignment method for carrier rocket multisource multiclass measurement data position references - Google Patents

High-precision alignment method for carrier rocket multisource multiclass measurement data position references Download PDF

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CN114111805B
CN114111805B CN202111132200.9A CN202111132200A CN114111805B CN 114111805 B CN114111805 B CN 114111805B CN 202111132200 A CN202111132200 A CN 202111132200A CN 114111805 B CN114111805 B CN 114111805B
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CN114111805A (en
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陈德明
王婷婷
陈永健
唐志强
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UNIT 63620 OF PLA
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C21/00Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
    • G01C21/24Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 specially adapted for cosmonautical navigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C21/00Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
    • G01C21/10Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration
    • G01C21/12Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning
    • G01C21/16Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning by integrating acceleration or speed, i.e. inertial navigation
    • G01C21/165Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning by integrating acceleration or speed, i.e. inertial navigation combined with non-inertial navigation instruments

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  • Radar, Positioning & Navigation (AREA)
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Abstract

The invention belongs to the field of space launching and space measurement and control, and discloses a method for correcting a position reference of multi-source multi-type measurement data of a carrier rocket. According to the technical approach provided by the invention, the correction precision of the position measurement elements of the three measurement systems is determined by the actual measurement precision of the measurement position deviation of the radar measurement system, the optical measurement system and the satellite navigation measurement system and the inertial navigation measurement system in the projectile body coordinate system, so that the problem of high-precision alignment of the position reference of the multi-source multi-type measurement data of the carrier rocket can be effectively solved.

Description

High-precision alignment method for carrier rocket multisource multiclass measurement data position references
Technical Field
The invention belongs to the field of space launching and space measurement and control, and relates to a carrier rocket multi-source multi-type measurement data position reference high-precision alignment method.
Background
Among the aerospace emission measurements, there are three general categories of measurements related to the emission trajectory: firstly, various external trajectory measurement data, namely measurement data of a radar measurement system (including pulse radar and high-precision speed measuring radar) and an optical measurement system; the second is inertial navigation trajectory data, namely output pulse data of a carrier rocket inertial measurement device (accelerometer and rate gyro) downloaded by a telemetry system on a carrier rocket, and trajectory data (i.e. inertial navigation trajectory data) calculated by a navigation computer according to the pulse data, wherein the output pulse data of the inertial measurement device and the inertial navigation trajectory data have strict corresponding relations, and the output pulse data and the inertial navigation trajectory data are equivalent in application, so that for convenience of application, only the inertial navigation trajectory data are generally referred to in the following description except for special description; thirdly, satellite navigation measurement data downloaded by the carrier rocket through an on-rocket telemetry system.
In the three types of measurement data, the measurement position of the radar measurement system is the antenna position of a transponder installed on a carrier rocket (the measurement position of a pulse radar is a pulse radar transponder antenna, the measurement position of a high-precision speed measuring radar is a speed measuring radar transponder), and the measurement position of the optical measurement system is taken as the flame center position of a carrier rocket engine; the measurement position of the satellite navigation measurement system is the position of a satellite navigation information receiving antenna arranged on the carrier rocket; the measurement position of the inertial navigation measurement system is the measurement position of the inertial measurement device of the carrier rocket, namely the origin of a measurement coordinate system of the navigation platform. The inconsistency of the position references can cause position differences and speed differences among three types of measurement data, and the existence of the differences not only directly affects the high-precision fusion of the three types of measurement data, but also inevitably affects the basic performance of key processes and key actions of the carrier rocket and the comprehensive performance of the flying process by utilizing inertial navigation trajectory data, outer trajectory measurement data, satellite navigation measurement data and various types of telemetry data of various systems of the carrier rocket.
In the space launching task, the position alignment refers to aligning the measurement position of the radar measurement system, the measurement position of the optical measurement system and the measurement position of the satellite navigation measurement system to the measurement position of the inertial navigation measurement system, that is, correcting the position measurement data of other 3 types of measurement systems by taking the measurement position of the inertial navigation measurement system as a reference, so that the position measurement data and the inertial navigation trajectory data keep the same position reference. The currently common position alignment measure is mainly to correct the difference between the engine flame spraying center position measured by the optical measurement system and the measuring position of the inertial navigation measurement system, namely, correct the optical measurement position. The difference between the measuring positions of the pulse radar and the speed measuring radar and the measuring position of the inertial navigation measuring system is not corrected generally, and the difference of speed measuring radar speed measuring metadata caused by inconsistent measuring positions is never corrected.
The primary condition of high-precision fusion processing of the measurement data of multiple sources and multiple types of carrier rocket launching tracks is that the consistency of measurement positions is required. At present, an alignment principle and a high-precision correction method for ensuring the consistency of the position references of three types of measurement data are not available.
Disclosure of Invention
The invention aims to provide a carrier rocket multisource multiscale measurement data position reference high-precision alignment method, which utilizes the difference between the measurement positions of an inertial navigation measurement system and other measurement systems, corrects position measurement elements corresponding to measurement data of the other measurement systems according to a measurement geometric relationship, and corrects all measurement data related to the positions in the measurement data of the other measurement systems to the measurement positions of the inertial navigation measurement system, thereby realizing the consistency of multisource multiscale measurement data in space positions and providing technical support for high-precision fusion processing and refinement application of the multisource multiscale measurement data.
In order to achieve the above purpose, the technical scheme of the invention is as follows:
a carrier rocket multisource multispeculiarity measurement data position reference high-precision alignment method comprises the following steps:
Step one, converting the projectile body system position difference into a navigation system position difference;
step two, the navigation system position difference is converted into the geocentric system position difference;
Step three, correcting position measurement data by different measurement systems;
correcting the position measurement data of the satellite navigation measurement system, and executing the fourth step;
The fifth step to the seventh step are executed for the correction of the radar measurement system position measurement data;
performing step eight to step ten for correction of the optical measurement system position measurement data;
correcting satellite navigation position measurement data based on the geocentric position difference;
step five, converting the geocentric system position difference into a radar measurement system position difference;
step six, converting the position difference of the radar measurement system into the position element measurement difference of the radar measurement system;
Step seven, correcting the position measurement metadata of the radar measurement system based on the position measurement metadata difference of the radar measurement system;
Step eight, converting the geocentric system position difference into an optical measurement system position difference;
step nine, converting the position difference of the optical measurement system into the position element measurement difference of the optical measurement system;
And step ten, correcting the position measurement metadata of the optical measurement system based on the position measurement metadata difference of the optical measurement system.
Further, the step one further includes:
The position difference of the elastic body system is set according to (1) Conversion to navigation System position Difference/>
Wherein, T G1 is a direction conversion matrix from a carrier rocket projectile body coordinate system to a navigation platform measurement coordinate system, and the specific calculation formula is as follows:
In the method, in the process of the invention, For the attitude angle of the projectile coordinate system relative to the navigation platform, the data can be obtained directly from the computer telemetry parameters of the launch vehicle.
Further, the second step further includes:
The navigation system position difference is calculated according to (2) Conversion to geocentric position difference/>
Wherein, T OG is a direction conversion matrix from a carrier rocket navigation measurement coordinate system to a geocentric coordinate system, and the specific calculation formula is as follows:
Wherein t is the flight time of the carrier rocket relative to the navigation calculation starting time, omega e is the earth rotation angular rate, and B 0、L0、A0 is the geographic latitude, geographic longitude and launching azimuth of the launching point of the carrier rocket respectively.
Further, the fourth step further includes:
According to the geocentric system position difference obtained in the second step Calculating the correction value/>, of satellite navigation position measurement data [ x sys zs]T ] according to (3)
Further, the fifth step further includes:
The position difference of the geocentric system is calculated according to (4) Conversion to radar measurement System position Difference/>
Wherein T MO is a direction conversion matrix from a geocentric coordinate system to a radar measurement system measurement coordinate system, and the specific calculation formula is as follows:
where B and L are the geographic latitude and geographic longitude, respectively, of the radar measurement system.
Further, the sixth step further includes:
measuring the position difference of the system by a radar measurement system according to the step (5) Conversion into radar measurement system position measurement element difference [ dR dA dE ] T:
Wherein T AM is a conversion matrix from the position difference of the radar measurement system to the position element difference of the radar measurement system, and the specific calculation formula is as follows:
Wherein [ RAE ] T is a position measuring element of the radar measuring system, wherein R represents an inclined distance measuring element, A represents an azimuth measuring element, and E represents a high-low angle measuring element.
Further, the step seven further includes:
According to the radar measurement system position measurement element difference [ dR dA dE ] T obtained in the step five, calculating a correction value of the radar measurement system position measurement element data [ R A E ] T according to the step (7)
Further, the step eight further includes:
The position difference of the geocentric system is calculated according to (8) Conversion to optical measurement System position Difference/>
In the method, in the process of the invention,The method is a direction conversion matrix from a geocentric coordinate system to an optical measurement system measurement coordinate system, and the specific calculation formula is as follows:
Where B G and L G are the geographic latitude and geographic longitude, respectively, of the optical measurement system.
Further, the step nine further includes:
9.1 estimation of the Tilt cell of an optical measurement System
① Based on the position data sequence of carrier rocket measured by satellite navigation measuring system within 10s before t timeThe sequence number i corresponds to the flight time t i of the carrier rocket, i=1, 2, …, n, and the position data sequence of the carrier rocket in the optical measurement system measurement coordinate system is calculated according to the following formula:
In the method, in the process of the invention, The direction conversion matrix from the geocentric coordinate system to the measurement coordinate system of the optical measurement system;
② Measuring position data sequence of coordinate system in optical measuring system according to carrier rocket Calculating the slant range sequence of the carrier rocket in the optical measurement system measurement coordinate system according to the following formula
③ Estimating the skew measuring element of the optical measurement system according to the (9) by adopting a second-order polynomial endpoint smoothing method
In the method, in the process of the invention,
9.2 Measuring the position difference of the optical measurement system according to (10)Conversion into optical measurement system position element difference
In the method, in the process of the invention,The method is a conversion matrix from the position difference of the optical measurement system to the position element difference of the optical measurement system, and the specific calculation formula is as follows:
Wherein, (A E) is an angle element of the optical measurement system.
Further, the step tenth further includes:
Position element measurement difference of optical measurement system obtained according to step eight Calculating optical measurement System position measurement metadata/> according to (11)Correction value/>
The invention has the advantages that:
According to the basic method of coordinate conversion and basic characteristics of space launching measurement data, the basic facts that the satellite navigation measurement antenna and the radar transponder antenna are fixed in position on an arrow body coordinate system are fully utilized, basic transfer relations of influences of differences of outer trajectory measurement positions and inertial navigation measurement positions on position measurement elements of various measurement systems are established, a correction method of the satellite navigation measurement system position measurement data, a correction method of the radar measurement system position measurement element measurement data and a correction method of the optical measurement system angle measurement element measurement data are provided, and the practical problem of position consistency among various measurement data in space launching tasks is well solved.
Drawings
FIG. 1 is a schematic illustration of a position alignment approach.
Fig. 2 is a schematic diagram of a main process of alignment.
In fig. 2, 4 parts marked by boxes mainly realize coordinate conversion of measurement position differences between various measurement data, and mainly solve the principle and method problems of position element measurement correction; the 3 parts of the oval frame mark mainly realize the specific correction of the difference between the measured position of the 3-class measuring system and the measured position of the inertial navigation measuring system, and mainly solve the specific method and process problems of position measuring element correction.
Detailed Description
As described above, the position measurement data of the other 3 types of measurement systems are corrected with reference to the measurement position of the inertial navigation measurement system.
The main signs used in the present invention are described as follows:
the carrier rocket multisource multispeculiarity measurement data position reference high-precision alignment method comprises the following steps:
Step one, converting the projectile body system position difference into a navigation system position difference;
The position difference of the elastic body system is set according to (1) Conversion to navigation System position Difference/>
Wherein, T G1 is a direction conversion matrix from a carrier rocket projectile body coordinate system to a navigation platform measurement coordinate system, and the specific calculation formula is as follows:
In the method, in the process of the invention, For the attitude angle of the projectile coordinate system relative to the navigation platform, the data can be obtained directly from the computer telemetry parameters of the launch vehicle.
Step two, the navigation system position difference is converted into the geocentric system position difference;
The navigation system position difference is calculated according to (2) Conversion to geocentric position difference/>
Wherein, T OG is a direction conversion matrix from a carrier rocket navigation measurement coordinate system to a geocentric coordinate system, and the specific calculation formula is as follows:
Wherein t is the flight time of the carrier rocket relative to the navigation calculation starting time, omega e is the earth rotation angular rate, and B 0、L0、A0 is the geographic latitude, geographic longitude and launching azimuth of the launching point of the carrier rocket respectively.
The first and second steps are true for satellite navigation measurement systems, radar measurement systems, and optical measurement systems. The correction of the position measurement data is carried out in different measurement systems starting from the following steps:
Step three, correcting position measurement data by different measurement systems;
correcting the position measurement data of the satellite navigation measurement system, and executing the fourth step;
The fifth step to the seventh step are executed for the correction of the radar measurement system position measurement data;
performing step eight to step ten for correction of the optical measurement system position measurement data;
correcting satellite navigation position measurement data based on the geocentric position difference;
According to the geocentric system position difference obtained in the second step Calculating the correction value/>, of satellite navigation position measurement data [ x sys zs]T ] according to (3)
Step five, converting the geocentric system position difference into a radar measurement system position difference;
The position difference of the geocentric system is calculated according to (4) Conversion to radar measurement System position Difference/>
Wherein T MO is a direction conversion matrix from a geocentric coordinate system to a radar measurement system measurement coordinate system, and the specific calculation formula is as follows:
where B and L are the geographic latitude and geographic longitude, respectively, of the radar measurement system.
Step six, converting the position difference of the radar measurement system into the position element measurement difference of the radar measurement system;
measuring the position difference of the system by a radar measurement system according to the step (5) Conversion into radar measurement system position measurement element difference [ dR dA dE ] T:
Wherein T AM is a conversion matrix from the position difference of the radar measurement system to the position element difference of the radar measurement system, and the specific calculation formula is as follows:
Wherein [ RAE ] T is a position measuring element of the radar measuring system, wherein R represents an inclined distance measuring element, A represents an azimuth measuring element, and E represents a high-low angle measuring element.
Specifically, the derivation process of the formula (5) is as follows:
The position coordinate vector [ x M yM zM]T ] of the carrier rocket in the radar measurement system measurement coordinate system has the following basic relationship with the position measuring element [ R A E ] T of the radar measurement system:
performing full differentiation on the obtained product to obtain
The equivalent transformation is carried out on the above-mentioned materials
Obtaining the formula (5).
Step seven, correcting the position measurement metadata of the radar measurement system based on the position measurement metadata difference of the radar measurement system;
According to the radar measurement system position measurement element difference [ dR dA dE ] T obtained in the step five, calculating a correction value of the radar measurement system position measurement element data [ R A E ] T according to the step (7)
Step eight, converting the geocentric system position difference into an optical measurement system position difference;
The position difference of the geocentric system is calculated according to (8) Conversion to optical measurement System position Difference/>
In the method, in the process of the invention,The method is a direction conversion matrix from a geocentric coordinate system to an optical measurement system measurement coordinate system, and the specific calculation formula is as follows:
Where B G and L G are the geographic latitude and geographic longitude, respectively, of the optical measurement system.
Step nine, converting the position difference of the optical measurement system into the position element measurement difference of the optical measurement system;
The method comprises the following steps of:
9.1 estimation of the Tilt cell of an optical measurement System
① Any measurement time may be denoted as time t, and the carrier rocket position data sequence measured by the satellite navigation measurement system within 10s before time tThe sequence number i corresponds to the flight time t i of the carrier rocket, i=1, 2, …, n, and the position data sequence of the carrier rocket in the optical measurement system measurement coordinate system is calculated according to the following formula:
In the method, in the process of the invention, Is the direction conversion matrix from the geocentric coordinate system to the measurement coordinate system of the optical measurement system.
② Measuring position data sequence of coordinate system in optical measuring system according to carrier rocketCalculating the slant range sequence of the carrier rocket in the optical measurement system measurement coordinate system according to the following formula
③ Estimating the skew measuring element of the optical measurement system according to the (9) by adopting a second-order polynomial endpoint smoothing method
In the method, in the process of the invention,
9.2 Measuring the position difference of the optical measurement system according to (10)Conversion into optical measurement System position measurement element Difference/>/>
In the method, in the process of the invention,The method is a conversion matrix from the position difference of the optical measurement system to the position element difference of the optical measurement system, and the specific calculation formula is as follows:
Wherein, (A E) is an angle element of the optical measurement system.
Specifically, the derivation process of the formula (10) is as follows:
Position coordinate vector [ x M yM zM]T ] of carrier rocket in optical measurement system measurement coordinate system and position measuring element of optical measurement system The following basic relations are provided:
performing full differentiation on the obtained product to obtain
The equivalent transformation is carried out on the above-mentioned materials
The formula (10) is obtained.
Step ten, correcting the position measurement metadata of the optical measurement system based on the position measurement metadata difference of the optical measurement system;
Position element measurement difference of optical measurement system obtained according to step eight Calculating optical measurement System position measurement metadata/> according to (11)Correction value/>/>
According to the carrier rocket multisource multiscale measurement data position reference correction method provided by the invention, the difference between the measurement position of the inertial navigation measurement system and the measurement positions of other measurement systems is utilized, and the measured element deviation caused by the measured position deviation is corrected, so that the consistency of all position measurement data in space positions is realized. According to the technical approach provided by the invention, the correction precision of the position measurement elements of the three measurement systems is determined by the actual measurement precision of the measurement position deviation of the radar measurement system, the optical measurement system and the satellite navigation measurement system and the inertial navigation measurement system in the projectile body coordinate system, so that the problem of high-precision alignment of the position reference of the multi-source multi-type measurement data of the carrier rocket can be effectively solved.

Claims (10)

1. A carrier rocket multisource multispeculiarity measurement data position reference high-precision alignment method is characterized by comprising the following steps:
Step one, converting the projectile body system position difference into a navigation system position difference;
step two, the navigation system position difference is converted into the geocentric system position difference;
Step three, correcting position measurement data by different measurement systems;
correcting the position measurement data of the satellite navigation measurement system, and executing the fourth step;
The fifth step to the seventh step are executed for the correction of the radar measurement system position measurement data;
performing step eight to step ten for correction of the optical measurement system position measurement data;
correcting satellite navigation position measurement data based on the geocentric position difference;
step five, converting the geocentric system position difference into a radar measurement system position difference;
step six, converting the position difference of the radar measurement system into the position element measurement difference of the radar measurement system;
Step seven, correcting the position measurement metadata of the radar measurement system based on the position measurement metadata difference of the radar measurement system;
Step eight, converting the geocentric system position difference into an optical measurement system position difference;
step nine, converting the position difference of the optical measurement system into the position element measurement difference of the optical measurement system;
And step ten, correcting the position measurement metadata of the optical measurement system based on the position measurement metadata difference of the optical measurement system.
2. A launch vehicle multisource multispeculiarity measurement data position reference high-precision alignment method as claimed in claim 1, wherein step one further comprises:
The position difference of the elastic body system is set according to (1) Conversion to navigation System position Difference/>
Wherein, T G1 is a direction conversion matrix from a carrier rocket projectile body coordinate system to a navigation platform measurement coordinate system, and the specific calculation formula is as follows:
In the method, in the process of the invention, For the attitude angle of the projectile coordinate system relative to the navigation platform, the data can be obtained directly from the computer telemetry parameters of the launch vehicle.
3. The method for aligning the position references of the multiple source and multiple type measurement data of the carrier rocket according to claim 2, wherein the second step further comprises:
The navigation system position difference is calculated according to (2) Conversion to geocentric position difference/>
Wherein, T OG is a direction conversion matrix from a measurement coordinate system of the carrier rocket navigation platform to a geocentric coordinate system, and the specific calculation formula is as follows:
Wherein t is the flight time of the carrier rocket relative to the navigation calculation starting time, omega e is the earth rotation angular rate, and B 0、L0、A0 is the geographic latitude, geographic longitude and launching azimuth of the launching point of the carrier rocket respectively.
4. A launch vehicle multisource multispeculiarity measurement data position reference high-precision alignment method as claimed in claim 3, wherein said step four further comprises:
According to the geocentric system position difference obtained in the second step Calculating the correction value/>, of satellite navigation position measurement data [ x s ys zs]T ] according to (3)
5. A launch vehicle multisource multispeculiarity measurement data position reference high-precision alignment method as claimed in claim 4, wherein said step five further comprises:
The position difference of the geocentric system is calculated according to (4) Conversion to radar measurement System position Difference/>
Wherein T MO is a direction conversion matrix from a geocentric coordinate system to a radar measurement system measurement coordinate system, and the specific calculation formula is as follows:
where B and L are the geographic latitude and geographic longitude, respectively, of the radar measurement system.
6. A launch vehicle multisource multispeculiarity measurement data position reference high-precision alignment method as claimed in claim 5, wherein said step six further comprises:
measuring the position difference of the system by a radar measurement system according to the step (5) Conversion into radar measurement system position measurement element difference [ dR dA dE ] T:
Wherein T AM is a conversion matrix from the position difference of the radar measurement system to the position element difference of the radar measurement system, and the specific calculation formula is as follows:
Wherein [ RAE ] T is a position measuring element of the radar measuring system, wherein R represents an inclined distance measuring element, A represents an azimuth measuring element, and E represents a high-low angle measuring element.
7. A launch vehicle multisource multispeculiarity measurement data position reference high-precision alignment method as recited in claim 6, wherein step seven further comprises:
According to the radar measurement system position measurement element difference [ dR dA dE ] T obtained in the step five, calculating a correction value of the radar measurement system position measurement element data [ R A E ] T according to the step (7)
8. A launch vehicle multisource multispeculiarity measurement data position reference high-precision alignment method as claimed in claim 4, wherein said step eight further comprises:
The position difference of the geocentric system is calculated according to (8) Conversion to optical measurement System position Difference/>
In the method, in the process of the invention,The method is a direction conversion matrix from a geocentric coordinate system to an optical measurement system measurement coordinate system, and the specific calculation formula is as follows:
Where B G and L G are the geographic latitude and geographic longitude, respectively, of the optical measurement system.
9. A launch vehicle multisource multispeculiarity measurement data position reference high-precision alignment method as claimed in claim 8, wherein step nine further comprises:
9.1, estimating a slant distance measuring element R of an optical measuring system;
① Based on the position data sequence of carrier rocket measured by satellite navigation measuring system within 10s before t time The sequence number i corresponds to the flight time t i of the carrier rocket, i=1, 2, …, n, and the position data sequence of the carrier rocket in the optical measurement system measurement coordinate system is calculated according to the following formula:
In the method, in the process of the invention, The direction conversion matrix from the geocentric coordinate system to the measurement coordinate system of the optical measurement system;
② Measuring position data sequence of coordinate system in optical measuring system according to carrier rocket Calculating the slant range sequence of the carrier rocket in the optical measurement system measurement coordinate system according to the following formula
③ Estimating the skew measuring element of the optical measurement system according to the (9) by adopting a second-order polynomial endpoint smoothing method
In the method, in the process of the invention,
9.2 Measuring the position difference of the optical measurement system according to (10)Conversion into optical measurement system position element difference
In the method, in the process of the invention,The method is a conversion matrix from the position difference of the optical measurement system to the position element difference of the optical measurement system, and the specific calculation formula is as follows:
Wherein, (A E) is an angle element of the optical measurement system.
10. A launch vehicle multisource multispeculiarity measurement data position reference high-precision alignment method as claimed in claim 9, wherein said step ten further comprises:
Position element measurement difference of optical measurement system obtained according to step eight Calculating optical measurement System position measurement metadata/> according to (11)Correction value/>
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