CN114094444B - Laser diode area array system for realizing uniform flat-top distribution - Google Patents
Laser diode area array system for realizing uniform flat-top distribution Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4012—Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
- H01S5/4075—Beam steering
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Abstract
The invention discloses a laser diode area array system for realizing uniform flat-top distribution, which comprises: a polarization beam splitter element; the two groups of light path components are respectively arranged in a first direction and a second direction of the polarization beam splitting element, and the second direction is perpendicular to the first direction; the light path assembly includes: the laser diode area array LDA comprises a plurality of laser diodes LDbar which are arranged at intervals along a preset direction, wherein the preset direction is perpendicular to the arrangement direction of the light path components; a plurality of microlens collimating structures in one-to-one correspondence with the plurality LDbar of microlenses, each microlens collimating structure adapted to collimate its corresponding LDbar light beams; the refraction component is used for reducing the interval between any two adjacent collimated light beams; the polarization beam splitting component is suitable for spatially compensating polarization beam combination of the light beams output by the two groups of light path components so as to obtain light beams with uniform flat-top distribution of light intensity. The invention changes the position of the light beam by using the refraction component and the polarizing prism to realize uniform flat-top distribution of light intensity.
Description
Technical Field
The invention relates to the technical field of laser, in particular to a laser diode area array system for realizing uniform flat-top distribution.
Background
The laser diode is widely applied to the fields of solid laser systems, laser cosmetology, laser detection, material processing and the like, and along with the continuous improvement of laser power and laser beam size in each field, the laser diode is particularly used as a pumping source of a high-power large-size side-pumped solid laser system, and a plurality of laser diodes are required to be used in a spatial arrangement mode for combination, namely LDA is used as the pumping source.
Since the PN structure type of the diode laser causes the outgoing laser beam to have a certain divergence angle, and the divergence angles in the fast axis direction and the slow axis direction are different, the outgoing laser beam is shaped and transmitted before the diode laser is used. A Fast Axis Collimator (FAC) is often used to collimate the diverging light beams in the fast axis direction, and due to the influence of the FAC mechanical size, a certain longitudinal interval exists between each laser diode bar (LD bar) in the LDA, so that the collimated LDA outgoing light beams are distributed in a stripe shape in the fast axis direction, so that the duty ratio of the large-size plane light beams outgoing from the LDA is relatively low, and the whole distribution is in a non-uniform stripe shape.
In the existing laser system, the commonly adopted end-face pumping mode is to directly collect the pumping light emitted by the LDA into the pump pavement inlet of the laser gain medium, and the uniformity of pumping distribution is improved by the modes of total reflection of the pumping light in the medium and the like. However, as the pump light in the laser gain medium is continuously transmitted, the beam shape of the pump light is changed, such as the beam size, the uniformity of the intensity distribution on the beam section, and the like, so that the intensity distribution of the pump light in the laser gain medium on the section cannot reach high uniformity, and meanwhile, it is difficult to realize uniform gain and high beam quality laser output.
Disclosure of Invention
The embodiment of the invention provides a laser diode area array system for realizing uniform flat-top distribution, which is used for solving the problem of uneven intensity distribution on the beam size and the beam section in the prior art.
According to the embodiment of the invention, the laser diode area array system for realizing uniform flat-top distribution comprises:
A polarization beam splitter element;
The two groups of light path components are respectively arranged in a first direction and a second direction of the polarization beam splitting element, and the second direction is perpendicular to the first direction;
The light path assembly includes:
the laser diode area array LDA comprises a plurality of laser diode LD bar bars which are arranged at intervals along a preset direction, and the preset direction is perpendicular to the arrangement direction of the light path components;
a plurality of micro-lens collimating structures in one-to-one correspondence with a plurality of LD bars, each micro-lens collimating structure being adapted to collimate a light beam of its corresponding LD bar;
the refraction component is used for reducing the interval between any two adjacent collimated light beams;
The polarization beam splitting component is suitable for carrying out polarization beam combination on the light beams output by the two groups of light path components so as to obtain light beams with uniform flat-top distribution of light intensity.
According to some embodiments of the invention, the refractive assembly comprises: a plurality of refraction pieces corresponding to the microlens collimation structures one by one, wherein each refraction piece is suitable for outputting light beam displacement deltay i to the corresponding microlens collimation structure;
the incident surface and the emergent surface of the refraction piece are parallel;
The refractive index of the refraction element is n, the incident angle of the light beam output by the micro-lens collimating structure relative to the refraction element is alpha i, the refraction angle is beta i, the distance between the incident surface and the emergent surface in the preset direction is d Li, and the n, the alpha i, the beta i and the d Li satisfy the following conditions:
sin(αi)＝nsin(βi)
αi＝βi+θi。
According to some embodiments of the invention, a plurality of the refractive elements are interconnected to form a multi-step refractive lens.
According to some embodiments of the invention, the distance between the central axes of any two adjacent light beams passing through the refraction assembly is equal to the width of the light beam in the preset direction.
According to some embodiments of the invention, the microlens alignment structure is a fast axis collimator FAC.
According to some embodiments of the invention, the microlens collimating structure is a slow axis collimating microlens array.
According to some embodiments of the invention, the polarizing beam splitting element is a polarizing prism PSB.
According to some embodiments of the invention, the polarizing beam splitting element is a polarizer.
According to some embodiments of the invention, the distance between any two adjacent laser diodes LDbar is equal.
According to some embodiments of the present invention, a distance between any two adjacent laser diodes LDbar is equal to 1.8 mm, and a width of a light beam collimated by the microlens collimating structure is 0.6 mm.
By adopting the embodiment of the invention, the refraction component is used for generating certain displacement by refraction of two adjacent light sources generated by the laser diode area array, so that the distance between the adjacent light sources is reduced; and then the two groups of light beams with different polarization directions are spatially compensated and combined through the polarization beam splitting element, so that the light intensity distribution of the combined light beams is approximately flat-top and uniform.
The foregoing description is only an overview of the present invention, and is intended to be implemented in accordance with the teachings of the present invention in order that the same may be more clearly understood and to make the same and other objects, features and advantages of the present invention more readily apparent.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. In the drawings:
FIG. 1 is a schematic diagram of a laser diode area array system in an embodiment of the invention;
FIG. 2 is a schematic diagram of a multi-step refractive lens according to an embodiment of the present invention;
FIG. 3a is a beam pattern of a set of light beams collimated by a microlens according to an embodiment of the present invention;
FIG. 3b is a diagram of a group of light beams refracted by a refraction assembly according to an embodiment of the present invention;
FIG. 3c is a diagram of two sets of light beams after they have passed through a polarizing prism in an embodiment of the present invention;
FIG. 4 is a graph of incoherent superposition of multiple Gaussian beams in an embodiment of the invention;
FIG. 5 is a graph of the incident angle versus thickness for a multi-step refractive lens according to an embodiment of the present invention.
Reference numerals illustrate:
A laser diode area array system 1 for realizing uniform flat-top distribution,
The polarization beam splitter 10,
The optical path assembly 20,
The laser diode area array LDA210,
The micro-lens collimating structure 220,
A refractive component 230.
Detailed Description
Exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
As shown in fig. 1, an embodiment of the present invention proposes a laser diode area array system 1 for realizing uniform flat-top distribution, including:
A polarization beam splitter 10;
two sets of light path components 20 respectively arranged in a first direction and a second direction of the polarization beam splitter 10, wherein the second direction is perpendicular to the first direction; for example, the first direction may be a horizontal direction, and the second direction may be a vertical direction, and the two sets of optical path components 20 may be respectively arranged on the left and the upper sides of the polarization splitting element 10.
The optical path assembly 20 includes:
The laser diode area array LDA210 comprises a plurality of laser diode LD bars arranged at intervals along a preset direction, wherein the preset direction is perpendicular to the arrangement direction of the light path component 20; for example, when one path optical path component 20 is arranged in the first direction of the polarization splitting element 10, the laser diode LD bars in the path optical path component 20 are arranged in the second direction.
A plurality of microlens collimating structures 220 in one-to-one correspondence with a plurality of LD bars, each microlens collimating structure 220 being adapted to collimate the light beam of its corresponding LD bar;
a refraction assembly 230 for reducing the spacing between any two adjacent collimated light beams;
the refraction component 230 is located between the collimating structure and the polarization splitting element 10;
the polarization beam splitter is adapted to spatially compensate the polarization beams outputted by the two groups of the optical path components 20, so as to obtain beams with uniform flat-top distribution of light intensity.
According to the invention, the refraction component 230 is used for refracting two adjacent light sources generated by the laser diode area array LDA 210 to generate certain displacement, so that the distance between the adjacent light sources is reduced, and the duty ratio of the overall light intensity distribution is improved; and then the two groups of light beams with different polarization directions are spatially compensated and combined through the polarization beam splitting element 10, so that the light intensity distribution of the combined light beams is approximately flat-top and uniform.
On the basis of the above-described embodiments, various modified embodiments are further proposed, and it is to be noted here that only the differences from the above-described embodiments are described in the various modified embodiments for the sake of brevity of description.
According to some embodiments of the invention, the refraction assembly 230 includes: a plurality of refraction elements corresponding to the microlens alignment structures 220 one by one, wherein each refraction element is suitable for outputting a light beam displacement deltay i to the corresponding microlens alignment structure 220;
the incident surface and the emergent surface of the refraction piece are parallel;
The refractive index of the refractive element is n, the incident angle of the light beam output by the microlens collimating structure 220 with respect to the refractive element is α i, the refraction angle is β i, the distance between the incident surface and the exit surface in the preset direction is d Li, and the n, the α i, the β i, and the d Li satisfy:
sin(αi)＝nsin(βi)
αi＝βi+θi。
By dividing the refraction component 230 into a plurality of refraction members, the number of refraction members is in one-to-one correspondence with the plurality of micro-lens collimating structures 220, and the refraction displacement of each beam can be effectively and independently modified, so that the flat-top distribution of the light intensity of the beams formed by subsequent beam combination is more uniform.
As shown in fig. 2, a plurality of the refractive members are connected to each other to construct a multi-step refractive lens according to some embodiments of the present invention. Therefore, the device can be conveniently arranged and produced in batches, and the whole system is more convenient to install.
According to some embodiments of the present invention, the distance between the central axes of any two adjacent light beams passing through the refraction assembly 230 is equal to the width of the light beam itself in the preset direction.
The refractive component 230 is utilized to adjust the interval between the central axes of any two adjacent beams to be the same as the width of the beam, which is more favorable for making the light intensity distribution approximate to flat-top uniform distribution during the subsequent beam combination.
According to some embodiments of the invention, the microlens collimating structure 220 is a fast axis collimator FAC.
By using the fast axis collimator to collimate the LDA light beam, the divergence angle of the LDA light beam in the fast axis direction is reduced, so that the LDA light beam is transmitted in approximately parallel light, and the later beam combination of the light beam is facilitated.
According to some embodiments of the invention, the microlens collimating structure 220 is a slow axis collimating microlens array.
By using the slow axis collimating micro lens array to collimate the LDA light beam, the divergence angle of the LDA light beam in the slow axis direction is reduced, so that the LDA light beam is transmitted in approximately parallel light, and the later beam combination of the light beam is facilitated.
According to some embodiments of the invention, the microlens alignment structure 220 may be directly packaged on the LDA or may be used in combination with the LDA.
According to some embodiments of the invention, the polarizing beam splitting element 10 may be a polarizing prism PBS.
In the application, the polarization prism PSB plays a role in spatially compensating polarization beam combination, two paths of light beams with different polarization directions are combined into one path of light beam, one path of light beam is set to be displaced in the beam combination process, stripes between the two paths of light beams are alternately arranged to realize spatial compensation of light intensity, and the light intensity distribution of the combined light beam is approximately flat-topped and uniform. The PBS has the advantage that the spatially polarized beam combining process does not need to take into account the refraction induced optical path shift.
According to some embodiments of the invention, the polarizing beam splitter 10 may be a polarizer.
According to some embodiments of the invention, the polarizing beam splitter 10 may be a light polarizing beam combiner PBC.
According to some embodiments of the invention, the distances between any two adjacent LD bars are equal. The pitches between the LD bars are set to be the same, so that the polarizing beam splitter 10 is convenient to uniformly adjust the pitches.
According to some embodiments of the present invention, the distance between any two adjacent LD bars is equal to 1.8 mm, and the width of the light beam collimated by the microlens collimating structure 220 is 0.6 mm.
A laser diode area array system for achieving uniform flat top distribution according to an embodiment of the present invention will be described in detail with reference to fig. 1 and 2. It is to be understood that the following description is exemplary only and is not intended to limit the invention in any way. All similar structures and similar variations of the invention are included in the scope of the invention.
The laser diode area array system 1 for realizing uniform flat-top distribution in the embodiment of the invention comprises:
two groups of laser diode area arrays LDA210, 18 fast axis collimators FAC, two groups of multi-step refractive lenses and a polarizing prism. The two groups of laser diode area arrays LDA210 are respectively arranged in a first direction and a second direction of the polarizing prism, and the first direction and the second direction are perpendicular to each other. The first direction is the incident direction of reflected light of the polarizing prism, and the second direction is the incident direction of refracted light of the polarizing prism. The light beams generated by the two sets of light path components 20 are respectively reflected and refracted by the polarizing prism, and the reflected light direction is parallel to the refracted light direction.
Each group of the laser diode area array consists of 9 LD bars perpendicular to the arrangement direction of the light path component 20, each group of the multi-step refraction lenses is formed by connecting 9 refraction lenses, the fast axis collimator FAC is arranged at the light outlet position of the laser diode area array LDA 210, each LD bar of two groups of LDAs corresponds to one FAC, the two groups of multi-step refraction lenses are respectively arranged in the first direction and the second direction of the polarization prism and between the fast axis collimator and the polarization prism, and each incident surface of the multi-step refraction lenses corresponds to one collimating micro lens.
The interval Pitch of each LD bar in the fast axis direction is=1.8 mm, the longitudinal beam width of the divergent beam emitted by a single LD bar after passing through the Fast Axis Collimator (FAC) is ω 0 =0.6 mm, and the divergent beam is transmitted back in nearly parallel light. The longitudinal dimension of the light beam emitted by the whole LDA after passing through FAC is W 0
W0＝(N-1)Pitch+ω0
Referring to fig. 3a, the light intensity profile of the FAC beam is stripe-shaped, where the distance between each stripe is approximately equal to the bar longitudinal interval Pitch, and the light beams after being transmitted in parallel pass through the multi-step refractive lens and are shifted by Δy in a certain shift in the longitudinal direction, so that the interval between each stripe is changed. The fringe spacing through the multi-step refractive lens is d ω, where d ω≥ω0, the value of which depends on the RMS value of the uniformity after gaussian beam superposition.
Referring to FIG. 3b, the intensity distribution of the light beam emitted from a single LD bar in the fast axis direction after FAC can be approximated to a Gaussian distribution by changing the position distance between each of the stripes to obtain different incoherent superposition results, and the distribution function can be expressed by the following formula
Wherein A is a normalization coefficient, the light intensity distribution function of the light beam emitted by the LDA after FAC can be expressed as
As can be seen from the functional expression, the interval Pitch between each bar is such that the overall distribution is discontinuous, bright and dark stripes, and if the Pitch is continuously reduced to a certain extent, an overall approximately "continuous" intensity distribution is obtained due to the fact that the intensity edges of the "stripes" can be superimposed on each other, as shown in fig. 3c. In combination with the distribution law of the gaussian function, when a proper interval d ω is adopted, the effect of approximately flat-top distribution can be achieved, and referring to fig. 4, the superimposed light intensity distribution can be expressed as
The uniformity RMS value of the light intensity distribution can be calculated from the following formula
Wherein the method comprises the steps ofFor the average value of all sampling points, XY represents the sampling number of the light intensity distribution, E xy is the intensity value at the sampling point, and the sampling precision is generally not lower than the resolution of the detector CMOS.
The refracted fringe spacing d ω is determined according to the condition of the uniformity RMS value. The light beams are arranged from top to bottom in the vertical direction (longitudinal direction), the center of the LDA emitting surface is taken as the origin of coordinates, the longitudinal direction is taken as the Y direction, the light transmission direction is taken as the Z direction, and the height positions of the ith stripe light beam before and after refraction are respectively
Wherein i is a positive integer, i is less than or equal to (N+1)/2. Each stripe needs to be deflected and translated by the distance of
Referring to FIG. 2, the refractive index of the lens for LDA emergent beam is n, the incident angle is α i, the refraction angle is β i, and if the thickness dimension d Li of each step of a multi-step refractive lens is given, the relationship between these parameters is that
sin(αi)＝nsin(βi)
αi＝βi+θi
The dimensional parameters of the multi-step refractive lens can be obtained by the relation.
D ω is the minimum value when the optimal uniformity is obtained by the RMS calculation formula, namely omega 0. The direction of the fast axis of the LDA is taken as research, wherein N=9, pitch=1.8 mm, ω 0 =0.6 mm, the refractive index n=1.45 of the multi-step refractive lens to the light beam emitted by the LDA, and the thickness of the multi-step refractive lens is dLi not less than W0. From the above formula, the following parameters can be obtained
W0＝15mm
y0i＝7.2mm,5.4mm,3.6mm,1.8mm,0,-1.8mm,-3.6mm,-5.4mm,-7.2mm
y1i＝2.4mm,1.8mm,1.2mm,0.6mm,0,-0.6mm,-1.2mm,-1.8mm,-2.4mm
Δyi＝4.8mm,3.6mm,2.4mm,1.2mm,0,1.2mm,2.4mm,3.6mm,4.8mm
The angle of the incident surface of the multi-step refractive lens can be related to the thickness d Li of each step according to the refractive index formula, referring to fig. 5. From the graph, it can be seen that there is a common range for the thickness d Li of the lens over the angular range of the respective faces of the lens, and that the angle of the incident face can be determined when a thickness value is determined over this range. Taking d Li ≡ 20mm here, the angle of incidence α for each face of the refractive lens can be found i
αi＝39.5°,31°,21.5°,11°,0°,11°,21.5°,31°,39.5°
Referring to fig. 1, two light beams shifted by the multi-step refractive lens are finally spatially compensated and combined by the polarizing prism PBS, and by changing the spatial positions of the two light beams, one of the two light beams is shifted by d ω＝ω0 in the light beam direction, so that the interval between the two combined light beams is ω 0/2, that is, the bright fringes of the first light beam fall on the dark fringes of the second light beam, and the staggered light beams are non-coherently superimposed, so that the overall light intensity distribution after the above operation is uniform and flat-top as can be seen from the results of fig. 3c and fig. 4.
It should be noted that the above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention, but various modifications and changes will be apparent to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. A laser diode area array system for achieving uniform flat top distribution, comprising:
A polarization beam splitter element;
The two groups of light path components are respectively arranged in a first direction and a second direction of the polarization beam splitting element, and the second direction is perpendicular to the first direction;
The light path assembly includes:
the laser diode area array LDA comprises a plurality of laser diode LD bar bars which are arranged at intervals along a preset direction, and the preset direction is perpendicular to the arrangement direction of the light path components;
a plurality of micro-lens collimating structures in one-to-one correspondence with a plurality of LD bars, each micro-lens collimating structure being adapted to collimate a light beam of its corresponding LD bar;
the refraction component is used for reducing the interval between any two adjacent collimated light beams;
the polarization beam splitting element is suitable for carrying out polarization beam combination on the light beams output by the two groups of light path components so as to obtain light beams with uniform flat-top distribution of light intensity;
The refraction assembly includes: a plurality of refraction pieces corresponding to the microlens collimation structures one by one, wherein each refraction piece is suitable for outputting light beam displacement deltay i to the corresponding microlens collimation structure;
the incident surface and the emergent surface of the refraction piece are parallel;
The refractive index of the refraction element is n, the incident angle of the light beam output by the micro-lens collimating structure relative to the refraction element is alpha i, the refraction angle is beta i, the distance between the incident surface and the emergent surface in the preset direction is d Li, and the n, the alpha i, the beta i and the d Li satisfy the following conditions:
sin(αi)＝nsin(βi)
αi＝βi+θi；
the distance between the central axes of any two adjacent light beams passing through the refraction component is equal to the width of the light beam in the preset direction;
The distances between any two adjacent LD bars are equal;
The distance between any two adjacent LD bars is equal to 1.8mm, and the width of the light beam collimated by the micro-lens collimating structure is 0.6 mm.
2. The laser diode area array system for achieving a uniform flat top distribution of claim 1, wherein a plurality of said refractive elements are interconnected to form a multi-step refractive lens.
3. The laser diode area array system for achieving uniform flat top distribution of claim 1, wherein the microlens collimating structure is a fast axis collimator FAC.
4. The laser diode area array system for achieving uniform flat top distribution of claim 1, wherein said microlens collimating structure is a slow axis collimating microlens array.
5. The system of claim 1, wherein the polarizing beam splitter is a polarizing prism PBS.
6. The laser diode area array system for achieving uniform flat top distribution of claim 1, wherein the polarizing beam splitter is a polarizer.
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| US6377410B1 (en) * | 1999-10-01 | 2002-04-23 | Apollo Instruments, Inc. | Optical coupling system for a high-power diode-pumped solid state laser |
| CN103579905A (en) * | 2013-11-11 | 2014-02-12 | 西北大学 | Space overlaid and coupled high-power semiconductor laser stack array system |
| CN103944067A (en) * | 2014-05-09 | 2014-07-23 | 西安炬光科技有限公司 | High-power semiconductor laser beam combining system |
| CN103944066A (en) * | 2014-05-09 | 2014-07-23 | 西安炬光科技有限公司 | High-power semiconductor laser beam combining method |
| CN107045164A (en) * | 2016-02-05 | 2017-08-15 | 苏州旭创科技有限公司 | Optical path control device and optical module |
| CN110676691A (en) * | 2019-09-12 | 2020-01-10 | 华中科技大学 | Semiconductor laser spectrum beam combining device and method based on collimation-deflection element |
| CN213876189U (en) * | 2020-12-31 | 2021-08-03 | 华中科技大学 | Optical system for generating quasi-flat-top circular light spots |
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